CN110355669B - Crystal silicon rough grinding and fine grinding integrated machine and application method thereof - Google Patents
Crystal silicon rough grinding and fine grinding integrated machine and application method thereof Download PDFInfo
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- CN110355669B CN110355669B CN201910769671.7A CN201910769671A CN110355669B CN 110355669 B CN110355669 B CN 110355669B CN 201910769671 A CN201910769671 A CN 201910769671A CN 110355669 B CN110355669 B CN 110355669B
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- grinding
- crystal silicon
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- sliding rail
- fine
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 180
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 180
- 239000010703 silicon Substances 0.000 title claims abstract description 180
- 239000013078 crystal Substances 0.000 title claims abstract description 157
- 238000000034 method Methods 0.000 title claims abstract description 12
- 230000007246 mechanism Effects 0.000 claims abstract description 116
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 41
- 238000001514 detection method Methods 0.000 claims description 17
- 238000006073 displacement reaction Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 description 30
- 230000000712 assembly Effects 0.000 description 4
- 238000000429 assembly Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 238000007670 refining Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
- B24B5/02—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work
- B24B5/04—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work for grinding cylindrical surfaces externally
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/20—Drives or gearings; Equipment therefor relating to feed movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
- B24B5/50—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground, e.g. strings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention relates to a crystal silicon rough grinding and fine grinding integrated machine and a use method thereof, belonging to the field of crystal silicon processing equipment, and comprising a base and a sliding rail, wherein the sliding rail is arranged on the base and sequentially arranged along the length direction of the sliding rail: the invention discloses a crystal silicon grinding device, which comprises a coarse grinding area, a crystal silicon transferring mechanism and a fine grinding area, wherein the crystal silicon transferring mechanism is arranged between the coarse grinding area and the fine grinding area, the coarse grinding area and the fine grinding area are both provided with a grinding feeding workbench mechanism for clamping crystal silicon and at least two groups of grinding head feeding components, the grinding feeding workbench mechanism is positioned on a sliding rail and is in sliding connection with the sliding rail, and the at least two groups of grinding head feeding components positioned in the coarse grinding area and the fine grinding area are symmetrically arranged on two sides of the sliding rail to form grinding channels for passing crystal silicon and grinding crystal silicon.
Description
Technical Field
The invention belongs to the technical field of crystal silicon processing equipment, and particularly relates to a crystal silicon rough grinding and fine grinding integrated machine and a use method thereof.
Background
The existing equipment in the market basically carries out rough grinding and accurate grinding on the surfaces and circular arcs in separate working procedures, only two surfaces can be processed at a time, and the grinding efficiency is low. The rough grinding and the fine grinding are positioned at two positions, so that the fine grinding allowance after the rough grinding is large and the efficiency is low, and therefore, how to quickly perform the rough grinding and the fine grinding on the cut crystalline silicon is a problem which needs to be solved.
Disclosure of Invention
Aiming at various defects in the prior art, the single crystal silicon rod after being cut is polished and chamfered, the single crystal silicon rod with different specifications is polished integrally in arc and surface, the equipment can meet the requirements of a rough grinding and fine grinding integrated machine with four-side grinding, single-side and single-arc independent processing control functions, and the grinding surface and rounding of the silicon rod can be automatically finished in the same equipment.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the utility model provides a crystalline silicon rough grinding fine grinding all-in-one, includes base and slide rail, and the slide rail setting sets gradually along the length direction of slide rail on the base: the device comprises a rough grinding area, a crystal silicon transferring mechanism and a fine grinding area, wherein the rough grinding area and the fine grinding area are respectively provided with a grinding feeding workbench mechanism for clamping crystal silicon and at least two groups of grinding head feeding components, the grinding feeding workbench mechanism is in sliding connection with a sliding rail and is used for clamping and conveying the crystal silicon, and the at least two groups of grinding head feeding components positioned in the rough grinding area and the fine grinding area are symmetrically arranged on two sides of the sliding rail to form a grinding channel for the crystal silicon to pass through and grind the crystal silicon.
Further, the rough grinding area further comprises a rough grinding head assembly, a feeding workbench mechanism and a centering mechanism; the coarse grinding head assembly is connected with the grinding head feeding assembly through a coarse grinding main shaft; the feeding workbench mechanism is arranged on one side of the sliding rail and is used for bearing the crystal silicon and conveying the crystal silicon to the position above the sliding rail; the centering mechanism is arranged between the feeding workbench mechanism and the sliding rail, so that the crystal silicon on the feeding workbench mechanism is centered, and the length direction of the crystal silicon is parallel to the sliding rail;
the crystal silicon transfer mechanism is arranged along the direction perpendicular to the sliding rail and is used for transferring the crystal silicon subjected to rough grinding to the fine grinding area;
the fine grinding area further comprises a fine grinding assembly and a blanking workbench mechanism; the fine grinding component is connected with the grinding head feeding component through a fine grinding main shaft; the blanking workbench mechanism is arranged on one side of the sliding rail and used for bearing the finely ground crystal silicon.
Further, material loading workstation mechanism includes material loading supporting seat, material loading backup pad, material loading workstation and the vertical lift lead screw of material loading, the bottom and the base of material loading supporting seat link firmly, vertical being provided with the vertical slide rail of material loading on the material loading supporting seat, just the material loading backup pad sets up along the horizontal direction, and it is through the vertical lift lead screw of material loading and material loading supporting seat in vertical direction sliding connection, be equipped with the material loading workstation of horizontal direction in the material loading backup pad, the material loading workstation is through the material loading lead screw of horizontal direction and material loading backup pad sliding connection, and its upper portion has set firmly the crystalline silicon backup pad for support crystalline silicon, one side that the crystalline silicon backup pad is close to the slide rail is equipped with the backup pad, and its opposite side is equipped with crystalline silicon clamping plate, backup pad and crystalline silicon clamping plate all set up along vertical direction, and crystalline silicon clamping plate links firmly with the piston of horizontal drive cylinder to promote crystalline silicon clamping plate and crystalline silicon to paste mutually and cooperate with crystalline silicon clamping plate and adjust crystalline silicon to be parallel to the guide rail.
Further, centering mechanism includes centering support column, centering clamping plate and centering clamping slide rail, centering clamping plate sets up two relatively, and its vertical setting, the bottom and the base of centering support column link firmly, centering clamping slide rail sets firmly in the upper portion of centering support column and parallels with the slide rail, and two centering clamping plates are engaged with and are followed centering clamping slide rail and slide in order to centre gripping crystalline silicon through rack and pinion, make crystalline silicon's center and crystalline silicon backup pad center be located same vertical line.
Further, the grinding feeding workbench mechanism comprises a grinding feeding base, a headstock assembly, a tailstock assembly and a tailstock feeding screw rod, wherein the grinding feeding base is arranged on a sliding rail and is in sliding connection with the sliding rail through the grinding feeding screw rod, the headstock assembly and the tailstock assembly are oppositely arranged on the grinding feeding base and are fixedly connected with the grinding feeding base, and the tailstock assembly is in sliding connection with the grinding feeding base through the tailstock feeding screw rod;
the headstock assembly comprises a headstock chuck and a headstock rotating motor, the headstock chuck is in driving connection with the headstock rotating motor, the tailstock assembly comprises a tailstock chuck and a tailstock rotating motor, the tailstock chuck is connected with the tailstock rotating motor, the headstock chuck and the tailstock chuck are both positioned on the same straight line and are parallel to the sliding rail, and the headstock chuck and the tailstock chuck simultaneously rotate to rotate crystal silicon;
the headstock assembly is arranged at one end close to the crystal silicon transfer mechanism, and the tailstock assembly is arranged at one end far away from the crystal silicon transfer mechanism.
Further, the grinding head feeding assembly comprises a grinding head feeding base, a grinding head workbench, a grinding head vertical sliding rail and a grinding head horizontal sliding rail, the bottom of the grinding head feeding base is fixedly connected with the base, the grinding head horizontal sliding rail is located on the grinding head feeding base, the grinding head workbench is in sliding connection with the grinding head horizontal sliding rail through a grinding head horizontal feeding screw rod, the grinding head horizontal sliding rail is arranged in the horizontal direction and is perpendicular to the sliding rail, the grinding head vertical sliding rail and a allowance detection device are fixedly arranged on the grinding head workbench, the grinding head vertical sliding rail is arranged in the vertical direction and is provided with a grinding head sliding table, the grinding head sliding table is arranged in the vertical direction and is in sliding connection with the grinding head vertical sliding rail, and the allowance detection device is located on one side close to the sliding rail and is used for detecting the allowance of crystal silicon.
Further, the rough grinding head assembly comprises a rough grinding rotating motor, a rough grinding main shaft and a rough grinding wheel, wherein the rough grinding main shaft penetrates through the grinding head sliding table, one end of the rough grinding main shaft is fixedly connected with the output end of the rough grinding rotating motor, and the other end of the rough grinding main shaft is fixedly connected with the rough grinding wheel;
the fine grinding assembly comprises a fine grinding rotating motor, a fine grinding main shaft and a fine grinding wheel, wherein the fine grinding main shaft penetrates through a grinding head sliding table, one end of the fine grinding main shaft is fixedly connected with the output end of the fine grinding rotating motor, and the other end of the fine grinding main shaft is fixedly connected with the fine grinding wheel;
the rough grinding wheel and the fine grinding wheel are arranged in the vertical direction.
Further, crystal silicon transfer mechanism is including transferring support post, the relative transfer clamping jaw subassembly that sets up, vertical transfer cylinder, horizontal transfer cylinder, vertical transfer guide pillar, horizontal transfer guide rail and transfer fixed station, the bottom and the base of transferring the support post link firmly, and vertical transfer guide pillar links firmly with the upper portion of transferring the support post, and transfer clamping jaw subassembly passes through vertical transfer cylinder and transfer support post sliding connection, and transfer clamping jaw subassembly produces relative displacement through the drive of horizontal transfer cylinder for carry out centre gripping and relax crystal silicon.
Further, unloading workstation mechanism includes unloading supporting seat, unloading backup pad, unloading workstation, the vertical lift lead screw of unloading, the lower part and the base of unloading supporting seat link firmly, the unloading backup pad sets up along the horizontal direction, the vertical lift lead screw of unloading is vertical along the vertical direction for the drive unloading backup pad moves along the vertical direction, the top of unloading backup pad is provided with the unloading workstation of horizontal direction, the unloading workstation passes through horizontal feed lead screw and unloading backup pad sliding connection, and its upper portion is equipped with the unloading fixed plate for accept the crystalline silicon that has finished in the fine grinding.
In addition, the invention also provides a use method of the crystal silicon rough grinding and fine grinding integrated machine, which comprises the following steps:
s1: the method comprises the steps that (1) manual or mechanical arms convey the well-opened crystal silicon to a feeding workbench mechanism, a crystal silicon clamping plate pushes the crystal silicon to be attached to a backup plate, a centering clamping plate clamps and centers the crystal silicon, and the feeding workbench mechanism conveys the crystal silicon to the position above a sliding rail of a rough grinding area;
s2: the grinding feeding workbench mechanism of the rough grinding area moves to the position opposite to the crystal silicon, and the headstock component and the tailstock component clamp the crystal silicon and move the crystal silicon to the grinding head feeding component;
s3: the residual quantity detection device performs residual quantity detection before coarse grinding on the crystal silicon, the coarse grinding head assembly performs surface coarse grinding on the crystal silicon, the headstock chuck and the tailstock chuck simultaneously rotate clockwise or anticlockwise for 45 degrees, the coarse grinding head assembly performs coarse grinding on the edges of the crystal silicon, the headstock chuck and the tailstock chuck simultaneously rotate clockwise or anticlockwise for 45 degrees, and the operations are repeated to perform coarse grinding on four sides and four edges of the crystal silicon;
s4: the grinding feeding workbench mechanism of the rough grinding area moves to the position of the crystal silicon transferring mechanism, the transferring clamping jaw assembly clamps the crystal silicon from the side face of the crystal silicon, the grinding feeding workbench mechanism of the rough grinding area returns to the rough grinding area, the grinding feeding workbench mechanism of the fine grinding area moves to the position of the transferring clamping jaw assembly, clamps the crystal silicon and conveys the crystal silicon to the position of the grinding head feeding assembly of the fine grinding area;
s5: the residual quantity detection device detects the residual quantity before the accurate grinding of the crystalline silicon, the accurate grinding component carries out surface accurate grinding on the crystalline silicon, the headstock chuck and the tailstock chuck simultaneously rotate clockwise or anticlockwise for 45 degrees, the edge of the crystalline silicon is accurately ground, the headstock chuck and the tailstock chuck simultaneously rotate clockwise or anticlockwise for 45 degrees, and the four sides and four edges of the crystalline silicon are accurately ground by repeating the operations;
s6: and the blanking workbench mechanism moves to the position above the grinding feeding workbench mechanism of the fine grinding area, and the grinding feeding workbench mechanism of the fine grinding area places the fine-ground crystalline silicon on the blanking workbench mechanism.
The beneficial effects of the invention are as follows:
and (3) grinding the surface, polishing and chamfering the cut crystalline silicon, so that the single crystal silicon square rods with different specifications are integrally polished in an arc manner. The grinding surface and the rounding of the crystal silicon are automatically finished by the same equipment, the crystal silicon is converted into a station of a fine grinding area for fine grinding after being coarsely ground, meanwhile, the blank coarse grinding station can be used for feeding and coarsely grinding at the same time, the simultaneous processing of coarse grinding and fine grinding of a silicon rod is realized, the grinding surface and the rounding efficiency is improved, the efficiency is improved by more than 1 time, and the method has a wide application prospect.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of another overall structure of the present invention;
FIG. 3 is a schematic view of the structure of the loading table mechanism;
FIG. 4 is a schematic structural view of a centering mechanism;
FIG. 5 is a schematic view of the structure of the grinding feed table mechanism;
FIG. 6 is a schematic structural view of a grater feed assembly;
FIG. 7 is a schematic structural view of a crystal silicon transfer mechanism;
FIG. 8 is a schematic view of the structure of the blanking table mechanism;
in the accompanying drawings: 1-base, 2-slide rail,
3-crystal silicon transfer mechanism, 301-transfer support column, 302-transfer clamping jaw assembly, 303-vertical transfer guide column, 304-horizontal transfer guide rail and 305-transfer fixed table;
4-grinding feed table mechanism, 401-grinding feed base, 402-headstock assembly, 403-tailstock assembly, 404-tailstock feed screw;
5-grinding head feeding components, 501-grinding head feeding bases, 502-grinding head working tables, 503-grinding head vertical sliding rails, 504-grinding head horizontal sliding rails, 505-grinding head horizontal feeding screw rods and 506-grinding head lifting cylinders;
6-a rough grinding head assembly and 601-a rough grinding wheel;
7-feeding workbench mechanisms, 701-feeding supporting seats, 702-feeding supporting plates, 703-feeding workbench, 704-crystalline silicon supporting plates, 705-backup plates and 706-crystalline silicon clamping plates;
8-centering mechanisms, 801-centering support columns, 802-centering clamping plates, 803-centering clamping slide rails, 804-gears and 805-racks;
9-fine grinding components and 901-fine grinding wheels;
10-blanking workbench mechanism, 1001-blanking supporting seat, 1002-blanking supporting plate, 1003-blanking workbench and 1004-blanking fixing plate.
Detailed Description
In order to make the technical solution of the present invention better understood by those skilled in the art, the technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings, and based on the embodiments in the present application, other similar embodiments obtained by those skilled in the art without making creative efforts should fall within the scope of protection of the present application. In addition, directional words such as "upper", "lower", "left", "right", and the like, as used in the following embodiments are merely directions with reference to the drawings, and thus, the directional words used are intended to illustrate, not to limit, the invention.
The invention will be further described with reference to the drawings and preferred embodiments.
The utility model provides a crystal silicon rough grinding fine grinding all-in-one, includes base 1 and slide rail 2, slide rail 2 sets up on base 1, has set gradually rough grinding district, crystal silicon transfer mechanism 3 and fine grinding district along the length direction of slide rail 2, rough grinding district and fine grinding district all are equipped with grinding feeding table mechanism 4 and two at least groups bistrique feeding subassembly 5 that are used for the centre gripping crystal silicon, grinding feeding table mechanism 4 is located on slide rail 2 and with slide rail 2 sliding connection, be located at the at least two groups bistrique feeding subassembly 5 symmetry in slide rail 2 both sides in rough grinding district and fine grinding district.
The rough grinding area further comprises a rough grinding head assembly 6, a feeding workbench mechanism 7 and a centering mechanism 8, wherein the rough grinding head assembly 6 is movably connected with the grinding head feeding assembly 5 through a rough grinding head cylinder, and the rough grinding head assemblies 6 positioned on two sides of the sliding rail 2 are oppositely arranged to form a rough grinding channel for crystal silicon to pass through. The feeding workbench mechanism 7 is arranged on one side of the sliding rail 2 and is used for bearing crystalline silicon and conveying the crystalline silicon to the upper side of the sliding rail 2. The centering mechanism 8 is arranged between the feeding workbench mechanism 7 and the sliding rail 2 and is used for centering the crystal silicon on the feeding workbench mechanism 7, so that the length direction of the crystal silicon subjected to the edge cutting is parallel to the sliding rail 2. The crystal silicon transferring mechanism 3 is arranged along the direction vertical to the sliding rail 2 and is used for transferring the crystal silicon after rough grinding to the fine grinding area.
The refining zone further comprises a refining assembly 9 and a blanking table mechanism 10. The fine grinding component 9 is movably connected with the grinding head feeding component 5, and fine grinding channels for passing and grinding the crystal silicon are formed by the fine grinding components 9 positioned on two sides of the sliding rail 2. The blanking workbench mechanism 10 is positioned on one side of the sliding rail 2 and is used for bearing refined crystalline silicon.
The well-opened crystal silicon is placed on a feeding workbench mechanism 7, the feeding workbench mechanism 7 is centered by a centering mechanism 8, the crystal silicon is conveyed to the upper part of a sliding rail 2 by the feeding workbench mechanism 7, the crystal silicon is clamped to a rough grinding head assembly 6 by a grinding feeding workbench mechanism 4, the crystal silicon is roughly ground, the roughly ground crystal silicon is clamped to the grinding feeding workbench mechanism 4 in a fine grinding area by a crystal silicon transferring mechanism 3, the clamping of the crystal silicon is realized, the fine grinding assembly 9 is convenient for finely grinding the crystal silicon, a discharging workbench mechanism 10 is moved to the upper part of the sliding rail 2 and used for bearing the finely ground crystal silicon, and the integration of the rough grinding and the fine grinding of the crystal silicon is realized.
Embodiment one:
referring to fig. 1, 2 and 3, the loading table mechanism 7 includes a loading support seat 701, a loading support plate 702, a loading table 703 and a loading vertical lifting screw. The bottom of material loading supporting seat 701 links firmly with base 1, and is provided with the vertical slide rail of material loading on the material loading supporting seat 701, simultaneously, the material loading backup pad 702 sets up along the horizontal direction, the vertical lift lead screw of material loading sets up along vertical direction, and it links firmly with material loading supporting seat 701 through the vertical lift lead screw support of material loading, the lead screw nut of the vertical lift lead screw of material loading links firmly with material loading backup pad 702, the vertical lift lead screw of material loading links firmly with servo motor's output for drive material loading backup pad 702 slides along the vertical slide rail of material loading, is used for carrying the crystalline silicon in the vertical direction. Meanwhile, a feeding horizontal sliding rail and a feeding screw are arranged on the upper portion of the feeding supporting plate 702, the feeding horizontal sliding rail and the feeding screw are both arranged in the horizontal direction and perpendicular to the sliding rail 2, and the feeding workbench 703 is located above the feeding horizontal sliding rail and slides along the feeding horizontal sliding rail through the driving of the feeding screw. That is, the feeding workbench 703 can be displaced in the vertical direction by the feeding vertical lifting screw, and can be horizontally displaced in the direction perpendicular to the sliding rail 2 by the feeding screw.
In order to facilitate placement of the crystalline silicon, a crystalline silicon support plate 704 is fixedly arranged on the feeding workbench 703, and the crystalline silicon support plate 704 is arranged along the horizontal direction and parallel to the sliding rail 2. In addition, be provided with backup plate 705 along vertical direction on the material loading workstation 703, backup plate 705 is located one side of brilliant silicon backup pad 704 for offset with the terminal surface of brilliant silicon, the opposite side of brilliant silicon backup pad 704 is vertical to be equipped with brilliant silicon clamping plate 706, the one side that the brilliant silicon clamping plate 706 kept away from backup plate 705 links firmly with the piston end of clamping plate drive cylinder, clamping plate drive cylinder sets firmly on material loading workstation 703 along the horizontal direction for promote brilliant silicon and guarantee that brilliant silicon pastes with backup plate 705 mutually. That is, the silicon is placed on the silicon supporting plate 704, the silicon clamping plate 706 adjusts the silicon clamping plate to be attached to the backup plate 705, the feeding vertical lifting screw drives the feeding workbench 703 to generate displacement in the vertical direction, the feeding screw drives the feeding workbench 703 to generate horizontal displacement in the direction perpendicular to the sliding rail 2, and the silicon is conveyed to the grinding feeding workbench mechanism 4.
Example two
Referring to fig. 4, 1 and 2, the centering mechanism 8 includes a centering support column 801, two oppositely disposed centering clamp plates 802, and two parallel disposed centering clamp rails 803. The centering clamping plate 802 is arranged along the vertical direction, the bottom of the centering support column 801 is fixedly connected with the base 1, the centering clamping slide 803 is arranged in parallel with the slide rail 2, the centering clamping plate is arranged on the upper portion of the centering support column 801 through a fixing plate, the centering clamping slide 803 is provided with a centering clamping slide block and a centering clamping slide 803 in sliding fit, the centering clamping plate 802 is fixedly connected with the centering clamping slide block, meanwhile, the fixing plate is provided with a gear 804 and a rack 805 which forms a transmission pair with the gear 804, the rack 805 is arranged along the direction of the slide rail 2, the centering clamping slide block is fixedly connected with the rack 805, and the gear 804 is fixedly connected with the output end of the centering motor. That is, the two centering clamping plates 802 are engaged with the gear 804 through the rack 805, when the centering motor rotates forward, the two centering clamping plates 802 are moved closer to each other, when the centering motor rotates backward, the two centering clamping plates 802 are moved away from each other, and in the process of moving the two centering clamping plates 802 closer to each other, the purpose of adjusting the silicon to the center position of the silicon support plate 704 is achieved.
The crystalline silicon clamping plate 706 adjusts the crystalline silicon to be attached to the backup plate 705, and the centering mechanism 8 adjusts the centers of the crystalline silicon and the crystalline silicon supporting plate 704 in the direction of the sliding rail 2 to be positioned on the same vertical line. The crystal silicon is convenient to clamp by the subsequent grinding and feeding workbench mechanism 4, and the crystal silicon is prevented from being biased by clamping.
Example III
Referring to fig. 5, 1, and 2, the grinding feed table mechanism 4 includes a grinding feed table 401, a headstock assembly 402, a tailstock assembly 403, and a tailstock feed screw 404. The grinding feeding base 401 is arranged on the sliding rail 2, the bottom of the grinding feeding base is provided with a sliding rail groove, and the grinding feeding base is in sliding fit with the sliding rail 2 through a grinding feeding screw fixed on the base 1. The headstock assembly 402 is fixedly arranged on the grinding feeding base 401 and is positioned at one end close to the crystal silicon transferring mechanism 3, the tailstock assembly 403 is positioned at one end far away from the crystal silicon transferring mechanism 3, meanwhile, a tailstock feeding screw 404 is arranged below the tailstock assembly 403, the tailstock feeding screw 404 is arranged along the direction of the sliding rail 2, and the tailstock assembly 403 slides along the direction of the sliding rail 2 through the tailstock feeding screw 404 to clamp crystal silicon with different lengths.
Specifically, the headstock assembly 402 includes a headstock fixing frame, a headstock chuck, a headstock rotating shaft and a headstock rotating motor, the headstock fixing frame is fixedly connected with the grinding feeding base 401, the headstock rotating motor is arranged on the upper portion of the headstock fixing frame, an output end of the headstock rotating motor is connected with one end of the headstock rotating shaft, the other end of the headstock rotating shaft is fixedly connected with the headstock chuck, the headstock rotating shaft is parallel to the sliding rail 2, and the headstock chuck is arranged along the vertical direction and is used for propping against one end of the clamped crystal silicon.
The tail frame subassembly 403 includes tail frame mount, tail frame chuck, tail frame pivot and tail frame rotating electrical machines, and tail frame feed screw 404 links firmly with grinding feed base 401 through the tail frame feed screw support frame, the bottom of tail frame mount links to each other with tail frame feed screw 404, and its upper portion is provided with the tail frame rotating electrical machines, the output of tail frame rotating electrical machines links to each other with the one end of tail frame pivot, the other end and the tail frame chuck of tail frame pivot link firmly, the tail frame pivot sets up with slide rail 2 looks parallel arrangement, just the tail frame chuck sets up along vertical direction for with the other end by centre gripping brilliant silicon.
That is, the tail frame assembly 403 is driven by the tail frame feed screw 404 to slide along the direction of the slide rail 2, so as to adjust the distance between the tail frame assembly and the head frame assembly 402, so as to clamp the silicon with different lengths, and when the head frame clamping head and the tail frame clamping head are both abutted against the clamped silicon, the silicon is clamped smoothly. When the head frame rotating motor and the tail frame rotate and simultaneously rotate in the same direction, the clamped crystal silicon is rotated.
Example IV
Referring to fig. 6, 1 and 2, the grinding head feeding assembly 5 includes a grinding head feeding base 501, a grinding head workbench 502, a grinding head vertical slide rail 503, a grinding head horizontal slide rail 504, a grinding head horizontal feeding screw 505 and a grinding head lifting cylinder 506. The bottom of the grinding head feeding base 501 is fixedly connected with the base 1, a grinding head horizontal sliding rail 504 and a grinding head horizontal feeding screw 505 are fixedly arranged on the grinding head feeding base 501, and the grinding head horizontal feeding screw 505 is used for driving the grinding head workbench 502 to generate displacement. Specifically, the grinding head horizontal slide rail 504 and the grinding head horizontal feed screw 505 are arranged along the horizontal direction and are perpendicular to the slide rail 2, and a screw nut of the grinding head horizontal feed screw 505 is fixedly connected with the grinding head workbench 502 and is connected with an output end of a servo motor for driving the grinding head workbench 502 to displace along the grinding head horizontal slide rail 504.
In addition, still be provided with bistrique vertical slide rail 503 and surplus detection device on bistrique workstation 502, bistrique vertical slide rail 503 sets up along vertical direction, be provided with the bistrique slip table on the bistrique vertical slide rail 503, the bistrique slip table sets up along vertical direction. Meanwhile, a grinding head lifting cylinder 506 is fixedly arranged on the grinding head workbench 502, the grinding head lifting cylinder 506 is arranged in the vertical direction, and the piston end of the grinding head lifting cylinder 506 is fixedly connected with a grinding head sliding table and used for driving the grinding head sliding table to slide along the grinding head vertical sliding rail 503. The residual quantity detection device is used for detecting the residual quantity of the crystal silicon.
That is, the grinding head slide table can be displaced in both the horizontal direction and the vertical direction.
Example five
Referring to fig. 1 and 2, a rough grinding head assembly 6 located in the rough grinding area is movably connected with the grinding head sliding table through a rough grinding main shaft. Specifically, the rough grinding head assembly 6 includes a rough grinding rotating motor and a rough grinding wheel 601, the rough grinding spindle penetrates through the grinding head sliding table, one end of the rough grinding spindle is fixedly connected with the output end of the rough grinding rotating motor, the other end of the rough grinding spindle is fixedly connected with the rough grinding wheel 601, and the rough grinding wheel 601 is driven to rotate by the rough grinding rotating motor.
The fine grinding component 9 positioned in the fine grinding area is movably connected with the grinding head sliding table through a fine grinding main shaft. Specifically, the fine grinding assembly 9 comprises a fine grinding rotating motor and a fine grinding wheel 901, the fine grinding main shaft penetrates through the grinding head sliding table, one end of the fine grinding main shaft is fixedly connected with the output end of the fine grinding rotating motor, the other end of the fine grinding main shaft is fixedly connected with the fine grinding wheel 901, and the fine grinding wheel 901 is driven to rotate through the fine grinding rotating motor. Meanwhile, the rough grinding wheel 601 and the fine grinding wheel 901 are arranged in the vertical direction.
Example six
Referring to fig. 7, 1 and 2, the crystal silicon transfer mechanism 3 comprises a transfer support column 301, an oppositely arranged transfer clamping jaw assembly 302, a vertical transfer cylinder, a horizontal transfer cylinder, a vertical transfer guide post 303, a horizontal transfer guide rail 304 and a transfer fixing table 305. The bottom of transferring support post 301 links firmly with base 1, vertical transfer guide pillar 303 links firmly with the upper portion of transferring support post 301, and its along vertical direction setting, simultaneously, vertical transfer cylinder sets firmly with transferring support post 301, and its cylinder body links firmly with transferring fixed station 305, transferring fixed station 305 sets firmly along the horizontal direction, vertical transfer guide pillar 303 sets up four, and four vertical transfer guide pillars 303 are connected with the four corners that transfers fixed station 305 respectively, specifically, vertical transfer guide pillar 303 includes the guide pin bushing and is located the guide pin bushing core, guide pin bushing core and guide pin bushing sliding connection, the guide pin bushing links firmly with transferring support post 301, and the guide pin bushing core links firmly with transferring fixed station 305, plays the guide effect at the in-process that transfers fixed station 305 reciprocates.
The transfer fixing table 305 is close to one side of the slide rail 2 and is fixedly provided with a horizontal transfer guide rail 304 and at least two groups of horizontal transfer cylinders which are oppositely arranged, and the horizontal transfer guide rail 304 and the horizontal transfer cylinders are arranged along the direction of the slide rail 2. The transfer clamping jaw assembly 302 comprises a plurality of clamping jaws which are fixed in parallel, the clamping jaws are arranged in the horizontal direction, the longitudinal sections of the clamping jaws are V-shaped, and a space for clamping a silicon rod is formed between the clamping jaw assemblies which are arranged oppositely. In this embodiment, transfer jaw assembly 302 includes 3 jaws. Meanwhile, a movable clamping jaw fixing groove is formed in the movable clamping jaw assembly and is used for being matched with the horizontal transfer guide rail 304, and the two movable clamping jaw assemblies are fixedly connected with a piston end of the horizontal transfer cylinder. That is, the two groups of movable clamping jaw assemblies are driven by the horizontal transfer cylinder to generate relative displacement so as to clamp and unclamp the crystal silicon.
Example seven
Referring to fig. 8, fig. 1, fig. 2, the blanking table mechanism 10 is disposed on one side of the base 1, and includes a blanking support seat 1001, a blanking support plate 1002, a blanking table 1003, and a blanking vertical lifting screw, where the blanking support plate 1002 is disposed along a horizontal direction, the bottom of the blanking table 1003 is fixedly connected with the base 1, a blanking vertical slide rail is disposed on the blanking support seat 1001, and simultaneously, the blanking support plate 1002 is disposed along the horizontal direction, and the blanking vertical lifting screw and the blanking vertical slide rail are disposed along the vertical direction, the blanking vertical lifting screw is fixedly connected with the blanking support seat 1001 through a vertical lifting screw support, and a screw nut of the blanking vertical lifting screw is fixedly connected with the blanking support plate 1002, and the blanking vertical lifting screw is connected with an output end of a servo motor, for driving the blanking support plate 1002 to slide along the blanking vertical slide rail, and conveying crystalline silicon in the vertical direction. Meanwhile, a blanking horizontal slide rail and a blanking feed screw are arranged on the upper portion of the blanking support plate 1002, the blanking horizontal slide rail and the blanking feed screw are arranged along the horizontal direction and are perpendicular to the slide rail 2, and the blanking workbench 1003 is located above the blanking horizontal slide rail and slides along the blanking horizontal slide rail under the driving of the blanking feed screw. That is, the discharging workbench 1003 can generate displacement along the vertical direction by a discharging vertical lifting screw, and can generate horizontal displacement along the direction perpendicular to the slide rail 2 by a discharging feeding screw, so as to be used for conveying the crystal silicon in the horizontal direction and the vertical direction. In addition, a blanking fixing plate 1004 is provided on the upper part of the blanking table 1003 for carrying refined silicon.
During specific operation, the opened crystal silicon is conveyed to the feeding workbench mechanism 7 by a manual or mechanical arm, the crystal silicon is pushed to be attached to the backup plate 705 by the crystal silicon clamping plate 706, the crystal silicon is clamped and centered by the centering clamping plate 802, and the crystal silicon is conveyed to the position above the sliding rail 2 of the rough grinding area by the feeding workbench mechanism 7; the grinding feeding workbench mechanism 4 of the rough grinding area moves to the position opposite to the crystal silicon, the headstock assembly 402 and the tailstock assembly 403 clamp the crystal silicon and move the crystal silicon to the position of the grinding head feeding assembly 5; the residual quantity detection device positioned in the rough grinding area carries out residual quantity detection before rough grinding on the crystal silicon, the rough grinding head assembly 6 carries out surface rough grinding on the crystal silicon, the headstock chuck and the tailstock chuck simultaneously rotate 45 degrees clockwise or anticlockwise, the rough grinding head assembly 6 carries out rough grinding on the edges of the crystal silicon, the headstock chuck and the tailstock chuck simultaneously rotate 45 degrees clockwise or anticlockwise, and the four sides and four edges of the crystal silicon are subjected to rough grinding repeatedly; the grinding feed workbench mechanism 4 of the rough grinding area moves to the position of the crystal silicon transfer mechanism 3, the vertical transfer cylinder drives the transfer fixing table 305 to move vertically downwards, the transfer clamping jaw assembly 302 clamps crystal silicon from the side face of the crystal silicon, the vertical transfer cylinder drives the transfer fixing table 305 to move vertically upwards, space is provided for resetting the grinding feed workbench mechanism 4 of the rough grinding area to the rough grinding area, meanwhile, the grinding feed workbench mechanism 4 of the fine grinding area moves to the position of the transfer clamping jaw assembly 302 along the sliding rail 2, at the moment, the transfer cylinder drives the transfer fixing table 305 to move vertically downwards, and the transfer clamping jaw assembly 302 is matched with the grinding feed workbench mechanism 4 of the fine grinding area to clamp crystal silicon and to convey the crystal silicon to the grinding head feed assembly 5 of the fine grinding area; the residual quantity detection device positioned in the fine grinding area carries out residual quantity detection before fine grinding on the crystal silicon, the fine grinding assembly 9 carries out surface fine grinding on the crystal silicon, the headstock chuck and the tailstock chuck simultaneously rotate 45 degrees clockwise or anticlockwise and carry out fine grinding on the edges of the crystal silicon, the headstock chuck and the tailstock chuck simultaneously rotate 45 degrees clockwise or anticlockwise and repeat the operation to carry out fine grinding on four sides and four edges of the crystal silicon; after finishing finish grinding, the blanking workbench mechanism 10 moves to the position above the grinding feeding workbench mechanism 4 of the finish grinding area, and the grinding feeding workbench mechanism 4 of the finish grinding area places the finished crystal silicon on the blanking workbench mechanism 10.
The foregoing detailed description of the invention has been presented for purposes of illustration and description, but is not intended to limit the scope of the invention, i.e., the invention is not limited to the details shown and described.
Claims (7)
1. The utility model provides a crystalline silicon rough grinding fine grinding all-in-one, includes base (1) and slide rail (2), and slide rail (2) set up on base (1), its characterized in that sets gradually along the length direction of slide rail (2): the device comprises a rough grinding area, a crystal silicon transfer mechanism (3) and a fine grinding area, wherein the rough grinding area and the fine grinding area are respectively provided with a grinding feeding workbench mechanism (4) for clamping crystal silicon and at least two groups of grinding head feeding components (5), the grinding feeding workbench mechanism (4) is in sliding connection with a sliding rail (2) and is used for clamping and conveying the crystal silicon, and the at least two groups of grinding head feeding components (5) which are positioned in the rough grinding area and the fine grinding area are symmetrically arranged on two sides of the sliding rail (2) to form grinding channels for the crystal silicon to pass through and grind the crystal silicon;
the rough grinding area further comprises a rough grinding head assembly (6), a feeding workbench mechanism (7) and a centering mechanism (8);
the coarse grinding head assembly (6) is connected with the grinding head feeding assembly (5) through a coarse grinding main shaft; the feeding workbench mechanism (7) is arranged on one side of the sliding rail (2) and is used for bearing the crystal silicon and conveying the crystal silicon to the position above the sliding rail (2); the centering mechanism (8) is arranged between the feeding workbench mechanism (7) and the sliding rail (2) so as to perform centering operation on the crystal silicon positioned on the feeding workbench mechanism (7) and enable the length direction of the crystal silicon to be parallel to the sliding rail (2);
the crystal silicon transfer mechanism (3) is arranged along the direction perpendicular to the sliding rail (2) and is used for transferring the roughly-ground crystal silicon to the fine grinding area;
the fine grinding area also comprises a fine grinding assembly (9) and a blanking workbench mechanism (10); the fine grinding component (9) is connected with the grinding head feeding component (5) through a fine grinding main shaft; the blanking workbench mechanism (10) is arranged on one side of the sliding rail (2) and used for bearing finely ground crystal silicon;
the feeding workbench mechanism (7) comprises a feeding supporting seat (701), a feeding supporting plate (702), a feeding workbench (703) and a feeding vertical lifting screw rod, wherein the bottom of the feeding supporting seat (701) is fixedly connected with the base (1), a feeding vertical sliding rail is vertically arranged on the feeding supporting seat (701), the feeding supporting plate (702) is arranged along the horizontal direction, the feeding supporting seat and the feeding supporting seat (701) are in sliding connection in the vertical direction through the feeding vertical lifting screw rod, the feeding supporting plate (702) is provided with a feeding workbench (703) in the horizontal direction, the feeding workbench (703) is in sliding connection with the feeding supporting plate (702) through the feeding screw rod in the horizontal direction, the upper part of the feeding workbench is fixedly provided with a crystal silicon supporting plate (704) for supporting crystal silicon, one side, close to the sliding rail (2), of the crystal silicon supporting plate (704) is provided with a backup plate (705), the other side of the crystal silicon clamping plate (706) is provided with a crystal silicon clamping plate (706), the crystal silicon clamping plate (706) and a piston (706) are both arranged along the vertical direction, and the crystal silicon clamping plate (706) is fixedly driven by the piston (706) to be in parallel to the crystal clamping plate (706), and the crystal silicon clamping plate is fixedly matched with the guide rail (706);
the crystal silicon transfer mechanism (3) comprises a transfer support column (301), a transfer clamping jaw assembly (302), a vertical transfer cylinder, a horizontal transfer cylinder, a vertical transfer guide column (304), a horizontal transfer guide rail and a transfer fixing table (305), wherein the bottom of the transfer support column (301) is fixedly connected with the base (1), the vertical transfer guide column (304) is fixedly connected with the upper portion of the transfer support column (301), the transfer clamping jaw assembly (302) is in sliding connection with the transfer support column (301) through the vertical transfer cylinder, and the transfer clamping jaw assembly (302) generates relative displacement through the driving of the horizontal transfer cylinder for clamping and loosening crystal silicon.
2. The crystal silicon rough grinding and fine grinding all-in-one machine according to claim 1, wherein the centering mechanism (8) comprises a centering support column (801), a centering clamping plate (802) and a centering clamping slide rail (803), the centering clamping plates (802) are oppositely arranged and vertically arranged, the bottom of the centering support column (801) is fixedly connected with the base (1), the centering clamping slide rail (803) is fixedly arranged on the upper part of the centering support column (801) and is parallel to the slide rail (2), and the two centering clamping plates (802) are meshed through a gear rack and slide along the centering clamping slide rail (803) to clamp crystal silicon, so that the center of the crystal silicon and the center of the crystal silicon support plate (704) are located on the same vertical line.
3. The integrated silicon rough grinding and fine grinding machine according to claim 2, wherein the grinding feed table mechanism (4) comprises a grinding feed base (401), a headstock assembly (402), a tailstock assembly (403) and a tailstock feed screw (404), the grinding feed base (401) is arranged on a sliding rail (2) and is in sliding connection with the sliding rail (2) through the grinding feed screw, the headstock assembly (402) and the tailstock assembly (403) are oppositely arranged on the grinding feed base (401), the headstock assembly (402) is fixedly connected with the grinding feed base (401), and the tailstock assembly (403) is in sliding connection with the grinding feed base (401) through the tailstock feed screw (404);
the headstock assembly (402) comprises a headstock chuck and a headstock rotating motor, the headstock chuck is connected with the headstock rotating motor, the tailstock assembly (403) comprises a tailstock chuck and a tailstock rotating motor, the tailstock chuck is connected with the tailstock rotating motor, the headstock chuck and the tailstock chuck are both positioned on the same straight line and are parallel to the sliding rail (2), and the headstock chuck and the tailstock chuck rotate simultaneously and are used for rotating crystal silicon;
the headstock assembly (402) is arranged at one end close to the crystal silicon transfer mechanism (3), and the tailstock assembly (403) is arranged at one end far away from the crystal silicon transfer mechanism (3).
4. The crystal silicon rough grinding and fine grinding all-in-one machine according to claim 3, wherein the grinding head feeding assembly (5) comprises a grinding head feeding base (501), a grinding head workbench (502), a grinding head vertical sliding rail (503) and a grinding head horizontal sliding rail (504), the bottom of the grinding head feeding base (501) is fixedly connected with the base, the grinding head horizontal sliding rail (504) is located on the grinding head feeding base (501), the grinding head workbench (502) is in sliding connection with the grinding head horizontal sliding rail (504) through a grinding head horizontal feeding screw (505), the grinding head horizontal sliding rail (504) is arranged in the horizontal direction and is perpendicular to the sliding rail (2), the grinding head vertical sliding rail (503) and a residual amount detection device are fixedly arranged on the grinding head workbench (502), the grinding head vertical sliding rail (503) is arranged in the vertical direction and is provided with a grinding head sliding table, the sliding table is arranged in sliding connection with the grinding head vertical sliding rail (503), and the residual amount detection device is located on one side close to the sliding rail (2) and is used for carrying out residual amount detection on crystal silicon.
5. The silicon rough grinding and fine grinding integrated machine according to claim 4, wherein the rough grinding head assembly (6) comprises a rough grinding rotating motor, a rough grinding main shaft and a rough grinding wheel (601), the rough grinding main shaft penetrates through a grinding head sliding table, one end of the rough grinding main shaft is fixedly connected with the output end of the rough grinding rotating motor, and the other end of the rough grinding main shaft is fixedly connected with the rough grinding wheel (601);
the fine grinding assembly (9) comprises a fine grinding rotating motor, a fine grinding main shaft and a fine grinding wheel (901), wherein the fine grinding main shaft penetrates through the grinding head sliding table, one end of the fine grinding main shaft is fixedly connected with the output end of the fine grinding rotating motor, and the other end of the fine grinding main shaft is fixedly connected with the fine grinding wheel (901);
the rough grinding wheel (601) and the fine grinding wheel (901) are arranged in the vertical direction.
6. The integrated machine for coarse grinding and fine grinding of crystalline silicon according to claim 5, wherein the blanking workbench mechanism (10) comprises a blanking supporting seat (1001), a blanking supporting plate (1002), a blanking workbench (1003) and a blanking vertical lifting screw, the lower part of the blanking supporting seat (1001) is fixedly connected with the base (1), the blanking supporting plate (1002) is arranged in the horizontal direction, the blanking vertical lifting screw is vertical in the vertical direction and is used for driving the blanking supporting plate (1002) to move in the vertical direction, a horizontally-oriented blanking workbench (1003) is arranged above the blanking supporting plate (1002), the blanking workbench (1003) is in sliding connection with the blanking supporting plate (1002) through a horizontal feeding screw, and a blanking fixing plate (1004) is arranged on the upper part of the blanking supporting plate and is used for receiving refined crystalline silicon.
7. A method of using the crystalline silicon rough grinding and fine grinding integrated machine of claim 6, comprising the steps of:
s1: the method comprises the steps that (1) manually or mechanically conveying the well-opened crystal silicon to a feeding workbench mechanism (7), pushing the crystal silicon to be attached to a backup plate (705) by a crystal silicon clamping plate (706), clamping and centering the crystal silicon by a centering clamping plate (802), and conveying the crystal silicon to the position above a sliding rail (2) of a rough grinding area by the feeding workbench mechanism (7);
s2: the grinding feeding workbench mechanism (4) of the rough grinding area moves to the position opposite to the crystal silicon, the headstock component (402) and the tailstock component (403) clamp the crystal silicon and move the crystal silicon to the grinding head feeding component (5);
s3: the residual quantity detection device carries out residual quantity detection before rough grinding on the crystal silicon, the rough grinding head assembly (6) carries out surface rough grinding on the crystal silicon, the headstock chuck and the tailstock chuck simultaneously rotate for 45 degrees clockwise or anticlockwise, the rough grinding head assembly (6) carries out rough grinding on the edges of the crystal silicon, the headstock chuck and the tailstock chuck simultaneously rotate for 45 degrees clockwise or anticlockwise, and the operations are repeated to carry out rough grinding on four sides and four edges of the crystal silicon;
s4: the grinding feeding workbench mechanism (4) of the rough grinding area moves to the position of the crystal silicon transferring mechanism (3), the transferring clamping jaw assembly 302 clamps the crystal silicon from the side face of the crystal silicon, the grinding feeding workbench mechanism (4) of the rough grinding area retreats to the rough grinding area, the grinding feeding workbench mechanism (4) of the fine grinding area moves to the position of the transferring clamping jaw assembly (302), clamps the crystal silicon and conveys the crystal silicon to the position of the grinding head feeding assembly (5) of the fine grinding area;
s5: the residual quantity detection device detects the residual quantity before the fine grinding of the crystal silicon, the fine grinding assembly (9) carries out surface fine grinding on the crystal silicon, the headstock chuck and the tailstock chuck simultaneously rotate clockwise or anticlockwise for 45 degrees, the edge of the crystal silicon is fine-ground, the headstock chuck and the tailstock chuck simultaneously rotate clockwise or anticlockwise for 45 degrees, and the four sides and four edges of the crystal silicon are fine-ground repeatedly;
s6: the blanking workbench mechanism (10) moves to the position above the grinding feeding workbench mechanism (4) of the fine grinding area, and the grinding feeding workbench mechanism (4) of the fine grinding area places the fine-ground crystalline silicon on the blanking workbench mechanism (10).
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| CN109434584A (en) * | 2018-12-11 | 2019-03-08 | 芜湖安普机器人产业技术研究院有限公司 | A kind of crankshaft automatic production line |
| CN110125772A (en) * | 2019-05-09 | 2019-08-16 | 徐建方 | A kind of crystal glass automatic grinding and polishing machine |
| CN210968306U (en) * | 2019-08-20 | 2020-07-10 | 青岛高测科技股份有限公司 | Coarse grinding and fine grinding integrated machine for crystalline silicon |
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