CN110301909A - A kind of anti-interference flexible biological electrical dry electrode and preparation method thereof - Google Patents
A kind of anti-interference flexible biological electrical dry electrode and preparation method thereof Download PDFInfo
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- CN110301909A CN110301909A CN201910664214.1A CN201910664214A CN110301909A CN 110301909 A CN110301909 A CN 110301909A CN 201910664214 A CN201910664214 A CN 201910664214A CN 110301909 A CN110301909 A CN 110301909A
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- 238000004544 sputter deposition Methods 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 238000005253 cladding Methods 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
- A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements
- A61B2562/125—Manufacturing methods specially adapted for producing sensors for in-vivo measurements characterised by the manufacture of electrodes
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/16—Details of sensor housings or probes; Details of structural supports for sensors
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/18—Shielding or protection of sensors from environmental influences, e.g. protection from mechanical damage
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- Heart & Thoracic Surgery (AREA)
- Veterinary Medicine (AREA)
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- General Physics & Mathematics (AREA)
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Abstract
The present invention provides a kind of anti-interference flexible biological electrical dry electrodes and preparation method thereof, comprising: electrode sensing layer, insulating layer, shielded layer, electrode backing layer；Wherein, the top of electrode backing layer is equipped with one layer of shielded layer；Shielded layer is equipped with the first tie point for fixed mask layer conductor；The top of shielded layer is equipped with a layer insulating；One layer of electrode sensing layer is equipped with above insulating layer；Electrode sensing layer is equipped with the second tie point for fixing electrode cable.The present invention improves the signal-to-noise ratio of electrode record bioelectrical signals in terms of contact impedance two that is anti-interference and reducing electrode and skin.
Description
Technical field
The present invention relates to the electrodes of medical instruments field, and in particular, to a kind of anti-interference flexible biological electrical dry electrode and
Preparation method.
Background technique
The bioelectrical signals for being usually used in the diagnosis of disease and the monitoring of health status have: electrocardio, brain electricity, myoelectricity and eye telecommunications
Number.With the development of electronic science and technology, so that record bioelectrical signals become possible whenever and wherever possible.But commonly used in record life
Object electric signal is wet electrode.Wet electrode needs that conduction is cooperated to be used together, but as the growth conducting resinl of time is dehydrated, causes
The contact impedance of electrode-skin increases, so as to cause the bioelectrical signals distortion of electrode record.Therefore wet electrode cannot be remembered for a long time
Record bioelectricity.And dry electrode does not need conducting resinl, can be used for long-term record bioelectrical signals.Dry electrode records bioelectrical signals
Principle be: dry electrode and skin form a small capacitances, will there are the intracorporal bioelectricity of people to be converted into the form of ionic current
In displacement current input record equipment.But the frequency of bioelectrical signals low (electrocardio, brain electricity and electro-ocular signal frequency range: 0-
100Hz, electromyography signal frequency range: 20-8000Hz), amplitude is low (5 μ V-5mV), therefore is easy by electromagnetic signal and the external world
Interference, the current low-quality problem of the generally existing tracer signal of dry electrode.
It is found through retrieval, publication No. is the Chinese patent of CN107411735A, discloses a kind of bioelectrical signals flexible dry
Formula electrode and preparation method thereof, including flexible dry type electrode body and electrical interconnecting means, wherein flexibility dry-type electrode entity is used
The substrate of flexible conductive composite material, flexible conductive composite material is conductive rubber or electric silica gel, and filler is filled out for carbon series conductive
One of material or me tallic conductive filler are a variety of.But that there are volumes is big for above-mentioned patent, it is inconvenient for use；The conduction of electrode
The problems such as performance is low, and the bioelectrical signals of record are of poor quality.
It is found through retrieval, publication No. is the Chinese patent of CN103271736A, discloses a kind of flexible capacitor electrocardiograph dry electricity
Pole and its processing method, the electrode successively include sensor layer, insulating layer, first screen layer and secondary shielding layer.On but
It states patent and has the disadvantage that degree of flexibility is low, electrode area is big, therefore electrode and skin contact are unstable so as to cause acquisition
Signal-to-Noise is low.
Summary of the invention
For the defects in the prior art, the object of the present invention is to provide a kind of anti-interference flexible biological electrical dry electrode and its
Preparation method.
First aspect according to the present invention provides a kind of anti-interference flexible biological electrical dry electrode, comprising: electrode sensing layer,
Insulating layer, shielded layer, electrode backing layer；
Wherein, the top of the electrode backing layer is equipped with one layer of shielded layer；The shielded layer is equipped with for fixed screen
Cover the first tie point of layer conductor；
The top of the shielded layer is equipped with one layer of insulating layer；
One layer of electrode sensing layer is equipped with above the insulating layer；
The electrode sensing layer is equipped with the second tie point for fixing electrode cable.
Further, shielded layer polyimides conduction composite wood as made of polyimides and electrical-conductive nanometer Material cladding
The bed of material.
Preferably, the electrical-conductive nanometer material is any one in carbon nanotube, graphene, silver nanowires or nanowires of gold
Kind.
Preferably, the microstructure array of the raised microstructure array of the electrode sensing layer, the protrusion is
Pyramid, cylindrical type or square-column-shaped array.
Preferably, the shielded layer with a thickness of 0.1-10 μm.
Preferably, the electrode backing layer with a thickness of 1 μm -100 μm.
Preferably, the electrode sensing layer is bio-compatible metal, and the bio-compatible metal is in Pt, Au or Ti
Any one.
Preferably, the insulating layer is Kapton.
Preferably, the electrode backing layer is flexible polymer film, and the flexible polymer film is Parylene C
Any one in type film, Kapton or polydimethylsiloxanefilm film.
The second aspect of the present invention provides a kind of preparation method of anti-interference flexible biological electrical dry electrode, the method
Include:
Step 1: the spin coating photoresist in substrate, exposes, and development, graphical photoresist layer；
Step 2: etching the substrate, micro structure array is obtained；
Step 3: spin-on polyimide pre-polymer solution in the substrate after etching, it is pre- to solidify the polyimides
Polymers forms the polyimide film, forms insulating layer, forms micro structure array in the lower surface of the insulating layer；
Step 4: preparing one layer of shielded layer on the upper surface of the insulating layer；
Step 5: one layer of flexible polymer film is prepared on the upper surface of the shielded layer, as electrode backing layer；
Step 6: the spin coating photoresist on the electrode backing layer, exposes, and development, graphical photoresist layer；
Step 7: the electrode backing layer that etching is not covered by photoresist, exposes the shielded layer；
Step 8: the splash-proofing sputtering metal on the shielded layer, for fixed mask layer conductor is formed in the shielded layer
One tie point；
Step 9: removing photoresist, device is removed from the substrate, one layer of life is sputtered on the lower surface of the insulating layer
Object compatible metal forms the electrode sensing layer with micro structure array and the second tie point for fixing electrode cable.
Further, the method also includes: preparation the polyimides as made of polyimides and electrical-conductive nanometer Material cladding
Electrical-conductive nanometer filling material is added in the polyimide preformed polymer solution, obtains institute for conducing composite material layer, that is, shielded layer
State polyimides conducing composite material；
In step 4, one layer of the spin coating polyimides conducing composite material on the upper surface of the insulating layer, Gu
Change the polyimides conducing composite material, forms the shielded layer on the upper surface of the insulating layer.
Compared with prior art, the present invention have it is following at least one the utility model has the advantages that
1, shielded layer is set in above structure of the present invention, the interference of external electromagnetic noise can be reduced, improve tracer signal
Quality.
2, further, shielded layer conducing composite material layer as made of PI and electrical-conductive nanometer Material cladding in the present invention,
Conductive filler is added in PI, by regulating and controlling the doping method of the content and filler of conductive filler in PI, adjustable PI is compound
The electric conductivity of material.Therefore, it can use shielded layer of the PI composite material as electrode.
3, further, insulating layer uses PI in the present invention, and PI is a kind of polymer, has good insulating properties and and metal
With good binding force, it is easy to carry out micro Process.Therefore, splash-proofing sputtering metal, formation there can be micro structure array on PI
Electrode sensing layer can further increase the surface area of electrode, effectively reduce the contact impedance of electrode and skin, into one
Step improves the quality of tracer signal.
4, there is shielded layer and micro structure array, from anti-interference and reduce electrode and skin in above structure of the invention
The signal-to-noise ratio that electrode record bioelectrical signals are improved in terms of contact impedance two solves dry electrode record bioelectrical signals and is easy
The problem low by signal-to-noise ratio caused by electromagnetic interference.
5, the above-mentioned preparation method of the present invention is prepared using micro fabrication, and preparation process is simple.
6, anti-interference flexible biological electrical dry electrode of the invention is suitable for long-term record bioelectrical signals.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon:
Fig. 1 is the structural schematic diagram of one embodiment of the present invention；
Fig. 2 is the diagrammatic cross-section of Fig. 1；
Fig. 3 is the technology for preparing electrode flow chart of one embodiment of the present invention；
Fig. 4 is the technology for preparing electrode flow chart of one embodiment of the present invention；
Figure acceptance of the bid note is expressed as: electrode sensing layer 1, insulating layer 2, shielded layer 3, electrode backing layer 4, the first tie point
5, the second tie point 6.
Specific embodiment
The present invention is described in detail combined with specific embodiments below.Following embodiment will be helpful to the technology of this field
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill of this field
For personnel, without departing from the inventive concept of the premise, various modifications and improvements can be made.These belong to the present invention
Protection scope.
It is a kind of preferred embodiment structural schematic diagram of anti-interference flexible biological electrical dry electrode, in figure referring to Fig.1 shown in -2
It include: electrode sensing layer 1, insulating layer 2, shielded layer 3, electrode backing layer 4, the first tie point 5 and the second tie point 6, wherein
The top of electrode backing layer 4 is equipped with one layer of shielded layer 3；Shielded layer 3 is equipped with the first tie point 5 for fixed mask layer conductor；
The top of shielded layer 3 is equipped with a layer insulating 2；One layer of electrode sensing layer 1 is equipped with above insulating layer 2；Electrode sensing layer 1, which is equipped with, to be used
In the second tie point 6 of fixed electrode cable, the equipment of electrode cable and tracer signal is connected, and can record bioelectrical signals.
In the specific implementation, electrode can be the arbitrary shape of needs in electrode structure；Electrode size is unrestricted, can be with
It is adjusted according to the actual situation.By application of electrode when bioelectrical signals record, the one side of the electrode sensing layer 1 of electrode is consolidated
Fixed position appropriate on the skin；There is above-mentioned electrode structure flexibility can fit closely with skin, and the bioelectrical signals of record are steady
It is fixed, it can be used for long-term record bioelectrical signals for a long time.
In another embodiment, the raised microstructure array of above-mentioned electrode sensing layer 1, raised microstructure battle array
Column can be pyramid, and cylindrical type or square-column-shaped array etc. increase the surface area of electrode, effectively reduce electrode and skin
The contact impedance of skin further improves the quality of tracer signal.Microstructure array structure is different, and the surface area of electrode is not
Together.
The present embodiment is further arranged to, and shielded layer can be led using the PI as made of PI and electrical-conductive nanometer Material cladding
Composite layer.Electrical-conductive nanometer material is any one in carbon nanotube, graphene, silver nanowires or nanowires of gold.In order to
The flexibility of electrode is improved, the shielded layer 3 of electrode does not answer blocked up, thickness range of the shielded layer 3 at 0.1-10 μm, the flexible effect of electrode
Fruit is best.
In other preferred embodiments, electrode backing layer 4 can be flexible polymer film, and flexible polymer film can be with
Using any one in Parylene c-type film, Kapton or polydimethylsiloxanefilm film.Electrode backing layer
4 do not answer blocked up, thickness range of the electrode backing layer 4 at 1 μm -100 μm, and electrode is enable closely to be bonded skin, and it is pseudo- to reduce movement
The influence of mark.
In other preferred embodiments, electrode sensing layer 1 is bio-compatible metal, and bio-compatible metal can use
Any one in Pt, Au or Ti.
In other preferred embodiments, insulating layer 2 can be PI film.PI is a kind of polymer, has good insulation
Property and with metal have good binding force, be easy carry out micro Process.Therefore, splash-proofing sputtering metal, formation can have micro- on PI
The electrode sensing layer of array of structures, can further increase the surface area of electrode, effectively reduce connecing for electrode and skin
Impedance is touched, the quality of tracer signal is further improved.
In one embodiment, a kind of preparation flow figure of anti-interference flexible biological electrical dry electrode is provided, it is specific to walk
It is rapid as follows:
Further include the preparation for being previously-completed PI, CNTs conducing composite material in the preparation of dry electrode, refers specifically to pre- in PI
CNTs is added in copolymer solution, ultrasonic disperse obtains conductive PI, CNTs conducing composite material.
Step 1: spin coating photoresist (PR), exposes on a silicon substrate, development, graphical photoetching with silicon wafer (Si) for substrate
Glue-line.
Step 2: etching silicon base forms inverted pyramid micro structure array, photoresist is removed.
Step 3: spin coating PI pre-polymer solution in silicon base after etching, be heating and curing PI pre-polymer solution, is formed exhausted
Edge layer 2, insulating layer 2 lower surface formed pyramid micro structure array, a height of 50 μm of pyramid, a length of 20 μm of bottom sides.
Step 4: on PI film be insulating layer upper surface on one layer of spin coating previously prepared PI, CNTs conduction composite wood
Material, PI, CNTs conducing composite material that is heating and curing form film, form shielded layer 3.
Step 5: depositing the Parylene C (PC) of 5um thickness on the upper surface of the film of PI, CNTs conducing composite material
Film, as electrode backing layer 4.
Step 6: the spin coating photoresist on Parylene C film, exposes, and development, graphical photoresist layer.
Step 7: the Parylene C film that etching is not covered by photoresist, exposes shielded layer.
Step 8: sputtering the Au of 100nm thickness on the shielded layer of exposing, connect as first for fixed mask layer conductor
Contact 5.
Step 9: removing photoresist, entire electrode is removed from silicon base, and it is thick that 100nm is sputtered on PI film layer lower surface
Au forms the electrode sensing layer 1 with pyramid micro structure array and the second tie point 6 for fixing electrode cable.
In another embodiment, referring to shown in Fig. 3, a kind of preparation of anti-interference flexible biological electrical dry electrode is provided, it can
To follow the steps below:
It further include the preparation for being previously-completed PI, CNTs conducing composite material in the preparation of dry electrode, it is molten in PI prepolymer
CNTs is added in liquid, disperses, obtains conductive PI, CNTs conducing composite material.
Step 1: spin coating photoresist (PR), exposes on a silicon substrate, development, graphical photoetching with silicon wafer (Si) for substrate
Glue-line, referring to shown in (a) in Fig. 3.
Step 2: etching silicon base forms rounding column micro structure array, photoresist is removed, referring to shown in (b) in Fig. 3.
Step 3: spin coating PI pre-polymer solution in silicon base after etching, be heating and curing PI pre-polymer solution, is formed exhausted
Edge layer 2 forms cylinder micro structure array in the lower surface of insulating layer 2, and a height of 50 μm of cylinder, diameter is 20 μm, referring in Fig. 3
(c) shown in.
Step 4: being that one layer 0.5 μm previously prepared PI, CNTs conduction of spin coating is multiple on the upper surface of insulating layer on PI film
Condensation material, PI, CNTs conducing composite material that is heating and curing form film, form shielded layer 3, referring to shown in (d) in Fig. 3.
Step 5: the PI film of 5um thickness is formed on the upper surface of the film of PI, CNTs conducing composite material, as electricity
Pole supporting layer 4, referring to shown in (e) in Fig. 3.
Step 6: the spin coating photoresist on PI film, exposes, and development, graphical photoresist layer, referring to (f) institute in Fig. 3
Show.
Step 7: the PI film that etching is not covered by photoresist, exposes shielded layer, referring to shown in (g) in Fig. 3.
Step 8: sputtering the Au of 100nm thickness on the shielded layer of exposing, connect as first for fixed mask layer conductor
Contact 5, referring to shown in (h) in Fig. 3.
Step 9: removing photoresist, entire electrode is removed from silicon base, sputters 100nm on the lower surface of insulating layer 2
Thick Au, being formed has cylinder micro structure array electrode sensing layer 1 and the second tie point 6 for fixing electrode cable, referring to Fig. 3
In shown in (i).
Referring to shown in Fig. 4, in another embodiment, a kind of preparation of anti-interference flexible biological electrical dry electrode can according to
Lower step carries out:
Further include the preparation for being previously-completed PI, AgNWs conducing composite material in the preparation of dry electrode, refers specifically in PI
Silver nanowires (AgNWs) is added in pre-polymer solution, dispersion obtains conductive PI, AgNWs conducing composite material.
Step 1: spin coating photoresist (PR), exposes on a silicon substrate, development, graphical photoetching with silicon wafer (Si) for substrate
Glue-line, referring to shown in (a) in Fig. 4.
Step 2: etching silicon base forms rounding column micro structure array, photoresist is removed, referring to shown in (b) in Fig. 4.
Step 3: spin coating PI pre-polymer solution in silicon base after etching, be heating and curing PI pre-polymer solution, forms 1 μ
M thick dielectric layer 2, forming height in the lower surface of insulating layer 2 is 40 μm, and diameter is 20 μm of cylinder micro structure arrays, referring in Fig. 4
(c) shown in.
Step 4: being that one layer 50 μm previously prepared PI, AgNWs conductions of spin coating are multiple on the upper surface of insulating layer on PI film
Condensation material, PI, AgNWs conducing composite material that is heating and curing form film, form shielded layer 3, referring to shown in (d) in Fig. 3.
Step 5: the PDMS film of 10 μ m-thicks is formed in the upper surface of the film of PI, AgNWs conducing composite material, as
Electrode backing layer 4, referring to shown in (e) in Fig. 4.
Step 6: the spin coating photoresist on PDMS film, exposes, and development, graphical photoresist layer, referring to (f) institute in Fig. 4
Show.
Step 7: the PDMS film that etching is not covered by photoresist, exposes shielded layer, referring to shown in (g) in Fig. 4.
Step 8: sputtering the Au of 100nm thickness on the shielded layer of exposing, connect as first for fixed mask layer conductor
Contact 5, referring to shown in (h) in Fig. 4.
Step 9: removing photoresist, entire electrode is removed from silicon base, and it is thick that 100nm is sputtered on PI film layer lower surface
Au, being formed specifically has the electrode sensing layer 1 of cylinder micro structure array and the second tie point 6 for fixing electrode cable, reference
In Fig. 4 shown in (i).
The above embodiment of the present invention prepares the dry electrode of anti-interference flexible biological using micro fabrication, it is advantageous that PI has
There is good insulation performance, the binding force with metal is easy to carry out micro Process.It is filled out by adding conduction in PI polymer solution
Material, further, adjusts the electric conductivity of PI.The electrode of the above embodiment of the present invention has shielded layer and micro structure array, from anti-
The signal-to-noise ratio of electrode record bioelectrical signals is improved in terms of the contact impedance two of interference and reduction electrode and skin.And this hair
The electrode of bright above-described embodiment is flexible dry electrode, energy record bioelectrical signals steady in a long-term.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited to above-mentioned
Particular implementation, those skilled in the art can make various deformations or amendments within the scope of the claims, this not shadow
Ring substantive content of the invention.
Claims (10)
1. a kind of anti-interference flexible biological electrical dry electrode characterized by comprising electrode sensing layer, insulating layer, shielded layer, electricity
Pole supporting layer；
Wherein, the top of the electrode backing layer is equipped with one layer of shielded layer；The shielded layer, which is equipped with, is used for fixed mask layer
First tie point of conducting wire；
The top of the shielded layer is equipped with one layer of insulating layer；
One layer of electrode sensing layer is equipped with above the insulating layer；
The electrode sensing layer is equipped with the second tie point for fixing electrode cable.
2. a kind of anti-interference flexible biological electrical dry electrode according to claim 1, which is characterized in that the shielded layer is by gathering
Polyimides conducing composite material layer made of acid imide and electrical-conductive nanometer Material cladding.
3. a kind of anti-interference flexible biological electrical dry electrode according to claim 2, which is characterized in that the electrical-conductive nanometer material
Material is any one in carbon nanotube, graphene, silver nanowires or nanowires of gold.
4. a kind of anti-interference flexible biological electrical dry electrode according to claim 1, which is characterized in that the electrode sensing layer
Raised microstructure array, the microstructure array of the protrusion are pyramid, cylindrical type or square-column-shaped array.
5. a kind of anti-interference flexible biological electrical dry electrode described in any one of -4 according to claim 1, which is characterized in that described
Shielded layer with a thickness of 0.1-10 μm.
6. a kind of anti-interference flexible biological electrical dry electrode described in any one of -4 according to claim 1, which is characterized in that described
Electrode backing layer with a thickness of 1 μm -100 μm.
7. a kind of anti-interference flexible biological electrical dry electrode described in any one of -4 according to claim 1, which is characterized in that have
One or more of feature:
The electrode sensing layer is bio-compatible metal, and the bio-compatible metal is any one in Pt, Au or Ti；
The insulating layer is Kapton.
8. a kind of anti-interference flexible biological electrical dry electrode described in any one of -4 according to claim 1, which is characterized in that described
Electrode backing layer is flexible polymer film, and the flexible polymer film is Parylene c-type film, Kapton
Or any one in polydimethylsiloxanefilm film.
9. a kind of preparation method of any one of claim 1-8 anti-interference flexible biological electrical dry electrode, which is characterized in that institute
The method of stating includes:
Step 1: the spin coating photoresist in substrate, exposes, and development, graphical photoresist layer；
Step 2: etching the substrate, micro structure array is obtained；
Step 3: spin-on polyimide pre-polymer solution in the substrate after etching, solidifies the polyimide preformed polymer
The Kapton is formed, insulating layer is formed, forms micro structure array in the lower surface of the insulating layer；
Step 4: preparing one layer of shielded layer on the upper surface of the insulating layer；
Step 5: one layer of flexible polymer film is prepared on the upper surface of the shielded layer, as electrode backing layer；
Step 6: the spin coating photoresist on the electrode backing layer, exposes, and development, graphical photoresist layer；
Step 7: the electrode backing layer that etching is not covered by photoresist, exposes the shielded layer；
Step 8: the splash-proofing sputtering metal on the shielded layer, forms in the shielded layer and connects for the first of fixed mask layer conductor
Contact；
Step 9: removing photoresist, device is removed from the substrate, it is simultaneous that one layer of biology is sputtered on the lower surface of the insulating layer
Capacitive metal forms the electrode sensing layer with micro structure array and the second tie point for fixing electrode cable.
10. a kind of preparation method of anti-interference flexible biological electrical dry electrode according to claim 9, it is characterised in that: institute
State method further include: preparation polyimides conducing composite material layer as made of polyimides and electrical-conductive nanometer Material cladding shields
Layer is covered, electrical-conductive nanometer filling material is added in the polyimide preformed polymer solution, it is compound to obtain the polyimides conduction
Material；
In step 4, one layer of the spin coating polyimides conducing composite material on the upper surface of the insulating layer solidifies institute
Polyimides conducing composite material is stated, forms the shielded layer on the upper surface of the insulating layer.
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