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CN110285841A - Bipolarity electret composite construction and its sensing and actuation method with class piezoelectric property - Google Patents

Bipolarity electret composite construction and its sensing and actuation method with class piezoelectric property Download PDF

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Publication number
CN110285841A
CN110285841A CN201910580785.7A CN201910580785A CN110285841A CN 110285841 A CN110285841 A CN 110285841A CN 201910580785 A CN201910580785 A CN 201910580785A CN 110285841 A CN110285841 A CN 110285841A
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CN
China
Prior art keywords
electret
layer
composite construction
dielectric barrier
negative polarity
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Application number
CN201910580785.7A
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Chinese (zh)
Inventor
徐明龙
张舒文
刘开园
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Xian Jiaotong University
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Xian Jiaotong University
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Priority to CN201910580785.7A priority Critical patent/CN110285841A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

A kind of bipolarity electret composite construction and its sensing and actuation method with class piezoelectric property, the composite construction includes negative polarity foil electret, the bonding agent of negative polarity foil electret lower surface bonds together the upper surface of negative polarity foil electret and dielectric barrier layer, the lower surface of dielectric barrier layer is bonded together by the upper surface of bonding agent and positive polarity charge layer, the lower surface of positive polarity charge layer, the upper surface of negative polarity foil electret passes through bonding agent respectively and dielec-tric support layer bonds together, which can be used as sensor or actuator;The invention also discloses the sensings of the composite construction and actuation method;The present invention has tension compression bidirectional output function, and has very high toughness, very big elastic range and high flexibility, and power-electricity transfer capability promotes at least 1-2 order of magnitude, suitable temperature range compared with the prior art and is also significantly improved compared with the prior art.

Description

With the bipolarity electret composite construction and its sensing of class piezoelectric property and actuation Method
Technical field
The present invention relates to piezoelectric media fields, and in particular to a kind of bipolarity electret bluk recombination with class piezoelectric property Structure and its sensing and actuation method.
Background technique
High-precision sensing/actuator and its relevant technologies are always the core technology of modern industry multiple fields, in precision There is very important status in machining, minute manufacturing, aerospace, the fields such as optics.Existing piezoelectric actuator technology has small The unique advantages such as good, the electromagnetism stability height of type, high frequency response, are widely adopted in above-mentioned each field.But had based on existing There is the deficiencies of brittleness is big, elastic range is small, power-electrical efficiency is not high enough, suitable temperature range is small in the material of big piezoelectric effect, limit mostly It has been made further to develop.In addition to this, existing piezoelectricity product due to its be unable to tension, output characteristics adjust and design difficulty it is big The deficiencies of, piezoelectric material is limited to a certain extent in accurate sensing/actuation field depth development.
Summary of the invention
In order to solve the above-mentioned problems of the prior art, the purpose of the present invention is to provide one kind to have class piezoelectric property Bipolarity electret composite construction and its sensing and actuation method, the present invention have a tension compression bidirectional output function, and have very High toughness, very big elastic range and high flexibility, power-electricity transfer capability promote at least 1-2 number compared with the prior art Magnitude, suitable temperature range are also significantly improved compared with the prior art.
To achieve the above objectives, the present invention adopts the following technical scheme:
A kind of bipolarity electret composite construction with class piezoelectric property, including negative polarity foil electret 1, negative polarity is stayed The bonding agent 2 of 1 lower surface of polar body film bonds together negative polarity foil electret 1 and the upper surface of dielectric barrier layer 3, dielectric every The lower surface of absciss layer 3 is bonded together by bonding agent 2 and the upper surface of positive polarity charge layer 4, the following table of positive polarity charge layer 4 Face, negative polarity foil electret 1 upper surface pass through bonding agent 2 respectively and bond together with dielec-tric support layer 5, dielec-tric support layer 5 Another surface bonded together respectively with electrode 6 by binder 2;Wherein the thickness of bonding agent 2 is ignored, and negative polarity is stayed The thickness of polar body film 2 and positive polarity charge layer 4 is ignored, elasticity modulus is much larger than dielectric barrier layer 3 and dielec-tric support layer 5, The thickness of dielectric barrier layer 3 is much smaller than the thickness of dielec-tric support layer 5, and the elasticity modulus of dielec-tric support layer 5 is much smaller than dielectric isolation The elasticity modulus of layer 3;The composite construction can be used as sensor or actuator.
The material of the negative polarity foil electret 1 and positive polarity charge layer 4 is respectively (per) fluoropolymer and polyimides, energy It is enough to keep negative, positive electrical property for a long time.
The bonding agent 2 with have strong adhesion properties, Nai La and pressure resistance to adhesives and to temperature-insensitive.
The dielectric barrier layer 3 and dielec-tric support layer 5 have long-term chemical durability and elasticity modulus is adjustable.
The sensing and actuation method of a kind of bipolarity electret composite construction with class piezoelectric property, when compound When structure is drawn as sensor or pressure acts on, dielec-tric support layer 5 is since its elasticity modulus is much smaller than dielectric barrier layer 3 Elasticity modulus, thus the deformation for being much larger than dielectric barrier layer 3 occurs, cause the electrode 6 of upper and lower part apart from negative polarity electret The distance change of body film 2 and positive polarity charge layer 4, thus induce and the different amounts of positive and negative charge of reset condition, realization sensing Demand;When composite construction is used as actuator, since there are potentials on electrode 6, thus generation is to negative polarity foil electret 1 and just The attraction of polarity charge layer 4 or repulsive force realize activities necessary to cause dielectric support layer 5 that the deformation of thickness direction occurs.
Compared to the prior art the present invention, has the advantages that
1) power-electricity transfer capability improves the 1-2 order of magnitude compared with the prior art;
2) there is the kinetic force of making of drawing-compressive load sensing characteristics and push-pull simultaneously, and sense and the power of actuation-electricity is joined Number has very strong designability;
3) power supply of mono-/bis-polarity can be used, there is lower power demands and wider adaptability;
4) there is higher power-permanent stability of electricity transfer capability and broader temperature applicable range;
In short, the present invention has a clear superiority compared with the prior art.
Detailed description of the invention
Fig. 1 is the diagrammatic cross-section of composite construction of the present invention.
Fig. 2 is theory analysis schematic diagram of the invention.
Specific embodiment
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
As shown in Figure 1, a kind of bipolarity electret composite construction with class piezoelectric property of the present invention, including negative polarity are stayed Polar body film 1, the bonding agent 2 of 1 lower surface of negative polarity foil electret is by the upper surface of negative polarity foil electret 1 and dielectric barrier layer 3 It bonds together, the lower surface of dielectric barrier layer 3 is bonded together by bonding agent 2 and the upper surface of positive polarity charge layer 4, just The lower surface of polarity charge layer 4, the upper surface of negative polarity foil electret 1 pass through bonding agent 2 respectively and are bonded in dielec-tric support layer 5 Together, another surface of dielec-tric support layer 5 is bonded together with electrode 6 by binder 2 respectively;The wherein thickness of bonding agent 2 It ignores, the thickness of negative polarity foil electret 2 and positive polarity charge layer 4 is ignored, elasticity modulus is much larger than dielectric isolation Layer 3 and dielec-tric support layer 5, the thickness of dielectric barrier layer 3 are much smaller than the thickness of dielec-tric support layer 5, the springform of dielec-tric support layer 5 Amount is much smaller than the elasticity modulus of dielectric barrier layer 3;The composite construction can be used as sensor or actuator.
When composite construction is drawn as sensor or pressure acts on, dielec-tric support layer 5 is far small due to its elasticity modulus In the elasticity modulus of dielectric barrier layer 3, thus the deformation for being much larger than dielectric barrier layer 3 occurs, leads to the electrode 6 of upper and lower part Distance change apart from negative polarity foil electret 2 and positive polarity charge layer 4, thus induce with reset condition it is different amounts of just, Negative electrical charge realizes sensing demand;When composite construction is used as actuator, since there are potentials on electrode 6, thus generate to cathode Property foil electret 1 and positive polarity charge layer 4 attraction or repulsive force, thus cause dielectric support layer 5 occur thickness direction shape Become, realizes activities necessary.
As the preferred embodiment of the present invention, the material of the negative polarity foil electret 1 and positive polarity charge layer 4 is distinguished For (per) fluoropolymer and polyimides, negative, positive electrical property can be kept for a long time.
As the preferred embodiment of the present invention, the bonding agent 2 with have strong adhesion properties, resistance to drawing to adhesives With pressure resistance and to temperature-insensitive.
As the preferred embodiment of the present invention, the dielectric barrier layer 3 and dielec-tric support layer 5 are stablized with long-term chemical Property and elasticity modulus is adjustable.
As shown in Figure 1, the present invention and conventional piezoelectric materials have many differences.Composite construction of the present invention does not need Dielectric material with piezoelectric effect, but generated using bipolarity electret-dielectric isolation-dielectric support mode Similar " piezoelectricity " effect, to realize sensing and activities necessary.Specific reality of the invention will be only explained from sensing modes below Mode is applied, and then analyzes its superiority compared with the prior art.
When the composite construction is for when sensing, schematic diagram to be as shown in Figure 2.
When two layers of foil electret is located at position as shown in the figure, upper and lower electricity can be obtained by Gauss theorem and its reasoning The charge inducing Q and Q ' of pole are respectively
Wherein L, d, Q1And Q2Respectively total electricity of the thickness of the thickness, dielec-tric support layer of dielectric barrier layer, upper electret layer The total charge dosage of lotus amount and lower electret layer.For easy analysis, if the charge polarity that upper and lower electret layer contains is cathode Property, it is only needed when two layers of electret polarity difference by one of sign reindexing.
If its dielec-tric support layer and the charge inducing of dielectric barrier layer are respectively when composite construction deforms
Wherein Q (t), Q ' (t), Δ d and Δ L are respectively the charge inducing of upper and lower electrode after deforming, dielec-tric support layer, Jie The amounts of thickness variation of electricity isolated layer.
The charge inducing variable quantity of electrode is respectively above and below
Wherein Δ Q and Δ Q ' is respectively the charge variation amount of upper and lower electrode, is also the total amount of charge flowing.
If the stress that composite construction is subject to is σ, the elasticity modulus of dielectric barrier layer and dielec-tric support layer is respectively EmLWith Emd, then charge variation amount can be written as
Stress suffered by material is discussed in the elastic range that composite construction can be born, i.e., dielec-tric support layer is discussed respectively With the relationship of elasticity modulus relationship and the charge flowing of dielectric barrier layer.It is apparent that the electric charge stream when the two elasticity modulus is identical Momentum is 0;(> 10 are set as when dielectric barrier layer elasticity modulus is much larger than dielec-tric support layer3Times), above formula can turn to
Wherein k is the modular ratio of dielectric barrier layer and dielec-tric support layer;When dielec-tric support layer elasticity modulus is much larger than (> 10 are set as when dielectric barrier layer3Times), above formula can turn to
Numerically, the value size of stress is for the size of modulus value, general small at least 1 order of magnitude (bullet Except the huge deformation of property body), therefore, formula (7) can turn to
And if formula (8) can turn to when the elasticity modulus of dielectric barrier layer is much larger than dielec-tric support layer
Wherein Δ DmFor the surface density of charge difference of upper and lower electret, when charge contrary sign, it is the sum of the two surface density. Thus the equivalent piezoelectric modulus of the composite material is
Wherein d33 effAnd EmRespectively have in the equivalent piezoelectric modulus of composite construction and dielec-tric support layer and dielectric barrier layer There is the value of relatively low modulus of elasticity.It can be seen that dielec-tric support layer and dielectric barrier layer thickness than bigger, surface density of charge is bigger, Softer dielectric material elasticity modulus is got over hour, and the equivalent piezoelectric modulus of material is bigger.
In bipolarity electret setting method of the invention, other than being arranged and there is positive and negative polar electret, may be used also By the way that by electret-single electrode composite construction, as double electret layers, i.e., such as foil electret upper surface keeps DmNegative electricity Lotus density, and the metal electrode being close to foil electret lower surface can then sense DmPositive charge density, eliminating searching just The trouble of polarity electret, simultaneously because negative polarity electret often has more large charge face surface density, it is thus possible to largely Ground increases equivalent piezoelectric modulus value.
After having discussed composite material based on power-electrical characteristics of sensing, make being analyzed as follows for dynamic characteristic.With dielec-tric support layer For actuation layer, if the potential on electret surface is-U0, external voltage is+U, then the electric field E in dielec-tric support layereqFor
The power that the charge layer on electret surface is subject to is
The strain of dielec-tric support layer is
It can be seen that equivalent piezoelectric modulus is in the case where dielec-tric support layer is as actuation layer
As can be seen that not fully identical with the equivalent piezoelectric modulus under actuation mode sensing.

Claims (5)

1. a kind of bipolarity electret composite construction with class piezoelectric property, it is characterised in that: including negative polarity foil electret (1), the bonding agent (2) of negative polarity foil electret (1) lower surface is by the upper of negative polarity foil electret (1) and dielectric barrier layer (3) Surface bonds together, and the lower surface of dielectric barrier layer (3) is viscous by the upper surface of bonding agent (2) and positive polarity charge layer (4) Be connected together, the lower surface of positive polarity charge layer (4), the upper surface of negative polarity foil electret (1) pass through respectively bonding agent (2) with Dielec-tric support layer (5) bonds together, and another surface of dielec-tric support layer (5) is Nian Jie by binder (2) with electrode (6) respectively Together;Wherein the thickness of bonding agent (2) is ignored, and the thickness of negative polarity foil electret (2) and positive polarity charge layer (4) is neglected Slightly disregard, elasticity modulus is much larger than dielectric barrier layer (3) and dielec-tric support layer (5), the thickness of dielectric barrier layer (3) is much smaller than Jie The thickness of electric supporting layer (5), the elasticity modulus of dielec-tric support layer (5) are much smaller than the elasticity modulus of dielectric barrier layer (3);This is compound Structure can be used as sensor or actuator.
2. a kind of bipolarity electret composite construction with class piezoelectric property according to claim 1, it is characterised in that: The material of the negative polarity foil electret (1) and positive polarity charge layer (4) is respectively (per) fluoropolymer and polyimides, Neng Gouchang Phase keeps negative, positive electrical property.
3. a kind of bipolarity electret composite construction with class piezoelectric property according to claim 1, it is characterised in that: The bonding agent (2) and there are strong adhesion properties to adhesives, Nai La and pressure resistance and to temperature-insensitive.
4. a kind of bipolarity electret composite construction with class piezoelectric property according to claim 1, it is characterised in that: The dielectric barrier layer (3) and dielec-tric support layer (5) have long-term chemical durability and elasticity modulus is adjustable.
5. a kind of described in any item sensings of the bipolarity electret composite construction with class piezoelectric property of Claims 1-4 With actuation method, it is characterised in that: when composite construction be used as sensor i.e. drawn or pressure act on when, dielec-tric support layer (5) by It is much smaller than the elasticity modulus of dielectric barrier layer (3) in its elasticity modulus, thus the deformation for being much larger than dielectric barrier layer (3) occurs, Lead to distance change of the electrode (6) of upper and lower part apart from negative polarity foil electret (2) and positive polarity charge layer (4), thus It induces and the different amounts of positive and negative charge of reset condition, realization sensing demand;When composite construction is used as actuator, due to electricity There are potentials on pole (6), thus generate the attraction to negative polarity foil electret (1) and positive polarity charge layer (4) or repulsive force, from And cause dielectric support layer (5) that the deformation of thickness direction occurs, realize activities necessary.
CN201910580785.7A 2019-06-29 2019-06-29 Bipolarity electret composite construction and its sensing and actuation method with class piezoelectric property Pending CN110285841A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111682099A (en) * 2020-06-01 2020-09-18 华中科技大学 Flexible polymer piezoelectric film and preparation method thereof

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CN1604453A (en) * 2004-11-15 2005-04-06 刘毅 Electrostatic induction power source
CN103069601A (en) * 2010-06-23 2013-04-24 拜耳知识产权有限责任公司 Electromechanical converter, method for producing same, and use thereof
CN103531706A (en) * 2013-10-22 2014-01-22 深圳市豪恩声学股份有限公司 Piezoelectric electret material and preparation method thereof
CN103954394A (en) * 2014-03-10 2014-07-30 西安交通大学 Flexible pressure sensor based on dielectric high-elastic polymer, and method for sensing pressure
CN106848051A (en) * 2016-12-23 2017-06-13 深圳市豪恩声学股份有限公司 Mechanical energy harvester and preparation method thereof
CN206399560U (en) * 2017-01-19 2017-08-11 深圳市柔纬联科技有限公司 A kind of self-driven micro- impact pressure sensor of electret
WO2018213781A1 (en) * 2017-05-18 2018-11-22 The Johns Hopkins University Push-pull electret transducer with controlled restoring force for low frequency microphones and energy harvesting

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1604453A (en) * 2004-11-15 2005-04-06 刘毅 Electrostatic induction power source
CN103069601A (en) * 2010-06-23 2013-04-24 拜耳知识产权有限责任公司 Electromechanical converter, method for producing same, and use thereof
CN103531706A (en) * 2013-10-22 2014-01-22 深圳市豪恩声学股份有限公司 Piezoelectric electret material and preparation method thereof
CN103954394A (en) * 2014-03-10 2014-07-30 西安交通大学 Flexible pressure sensor based on dielectric high-elastic polymer, and method for sensing pressure
CN106848051A (en) * 2016-12-23 2017-06-13 深圳市豪恩声学股份有限公司 Mechanical energy harvester and preparation method thereof
CN206399560U (en) * 2017-01-19 2017-08-11 深圳市柔纬联科技有限公司 A kind of self-driven micro- impact pressure sensor of electret
WO2018213781A1 (en) * 2017-05-18 2018-11-22 The Johns Hopkins University Push-pull electret transducer with controlled restoring force for low frequency microphones and energy harvesting

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111682099A (en) * 2020-06-01 2020-09-18 华中科技大学 Flexible polymer piezoelectric film and preparation method thereof
CN111682099B (en) * 2020-06-01 2022-01-07 华中科技大学 Flexible polymer piezoelectric film and preparation method thereof

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Application publication date: 20190927