CN110266212B - Piezoelectric inchworm rotating platform - Google Patents
Piezoelectric inchworm rotating platform Download PDFInfo
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- CN110266212B CN110266212B CN201910358031.7A CN201910358031A CN110266212B CN 110266212 B CN110266212 B CN 110266212B CN 201910358031 A CN201910358031 A CN 201910358031A CN 110266212 B CN110266212 B CN 110266212B
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- 229910003460 diamond Inorganic materials 0.000 claims description 7
- 239000010432 diamond Substances 0.000 claims description 7
- 230000000694 effects Effects 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 19
- 238000006073 displacement reaction Methods 0.000 description 14
- 238000005299 abrasion Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 1
- 230000009193 crawling Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
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- 238000012986 modification Methods 0.000 description 1
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- 235000001968 nicotinic acid Nutrition 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/023—Inchworm motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
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Abstract
The invention discloses a piezoelectric inchworm rotating platform, which comprises a cover plate serving as a platform surface, a rotating sleeve, a first clamping unit, a second clamping unit, a first driving unit and a second driving unit, wherein the rotating sleeve is vertically screwed below the cover plate; a base is arranged in a gap below the rotary sleeve, a supporting seat is connected between the second driving unit and the base, the first driving unit is screwed on the second driving unit, and a rotary gap is arranged between the supporting seat and the rotary sleeve; the rotary sleeve is annularly provided with a coded disc, the base is provided with a support, and the support is provided with a reading head which is opposite to the coded disc. The 'single-beat two-step' rotation of the rotating sleeve can be realized by the time sequence control of the first clamping unit, the second clamping unit, the first driving unit and the second driving unit. The invention has simple and compact integral structure, can realize the rotation effect of single-beat and two-step and has high movement speed.
Description
Technical Field
The invention belongs to the technical field of nano positioning, relates to a precise rotation driver with large corner stroke and high corner resolution, and particularly relates to a piezoelectric inchworm rotation platform.
Background
The piezoelectric inchworm rotating platform is a precise rotating driver which can realize 360-degree rotation and can realize a high angle-second-level high rotation angle resolution. The method is based on an inchworm crawling principle in bionics, and the micro displacement of the piezoelectric actuator is accumulated continuously, so that the continuous large-stroke angular displacement is formed. Compared with an electromagnetic type rotating platform, the piezoelectric inchworm rotating platform has the advantages of no magnetic field, easiness in control and the like; compared with an ultrasonic resonance type isobaric rotary platform such as an inertia driving type isobaric rotary platform, the ultrasonic resonance type isobaric rotary platform has the advantages of large output force, large power density, stable positioning, no friction and abrasion and the like. Therefore, the piezoelectric inchworm rotating platform has more advantages in some precise positioning fields needing large corner travel and high corner resolution. However, the current piezoelectric inchworm rotating platform has the following defects:
1) the platform has a complex and non-compact integral structure, is not easy to integrate an angular displacement sensor, is not easy to install a circumferential guide mechanism (such as a four-point angular contact ball bearing), and has low motion precision;
2) the clamping displacement or the releasing displacement of the clamping unit is the output displacement of the piezoelectric actuator, and the output displacement of the piezoelectric actuator is very small, so that the clamping unit and the driving unit are required to have very high processing and assembling precision in order to reliably clamp and release the clamping unit;
3) the output displacement of the clamping unit is small, the output shaft cannot be clamped or released fully, the output shaft cannot be clamped fully, the clamping force applied to the output shaft is reduced, and the motion stability is reduced; the output shaft can not be fully released, so that serious friction and abrasion can be generated, and the service life of the platform is shortened;
4) the platform can not be self-locked (namely, clamping can not be powered off), namely, when the platform does not work, the output shaft can not be clamped by the clamping unit;
5) the output shaft rotates only one step in one driving voltage period (namely one beat), and the motion speed of the platform is slow.
Disclosure of Invention
The invention aims to solve the technical problem of providing a piezoelectric inchworm rotating platform which is simple and compact in structure, capable of fully clamping and releasing, clamping in a power-off mode and high in rotating speed, aiming at the current situation of the prior art.
The technical scheme adopted by the invention for solving the technical problems is as follows: a piezoelectric inchworm rotating platform comprises a cover plate serving as a platform surface, a rotating sleeve is vertically screwed below the cover plate, a first clamping unit and a second clamping unit which are independently clamped on the inner wall of the rotating sleeve, a first driving unit for driving the first clamping unit to rotate forwards, and a second driving unit for driving the second clamping unit to rotate backwards are further arranged; a base is arranged in a gap below the rotary sleeve, a supporting seat is connected between the second driving unit and the base, the first driving unit is screwed on the second driving unit, and a rotary gap is arranged between the supporting seat and the rotary sleeve; the rotary sleeve is annularly provided with a coded disc, the base is provided with a support, and the support is provided with a reading head which is opposite to the coded disc.
In order to optimize the technical scheme, the adopted measures further comprise:
the second driving unit comprises a second rigid ring fixed on the supporting seat in a threaded manner, a second rigid rotating body arranged in the second rigid ring, and a second driving device which is connected to the second rigid ring and can push the second rigid rotating body to rotate reversely; the first driving unit comprises a first rigid ring fixed on the second rigid ring in a threaded manner, a first rigid rotating body arranged in the first rigid ring, and a first driving device which is connected to the first rigid ring and can push the first rigid rotating body to rotate positively;
the first clamping unit comprises a first connecting part screwed on the first rigid rotating body, a first clamping body clamped on the rotating sleeve, a first rigid part and a second rigid part which are arranged between the first clamping body and the first connecting part, a first flexible thin plate which is connected with the first clamping body, the first rigid part, the first connecting part, the second rigid part and the first clamping body in a diamond shape in sequence, and a first piezoelectric actuator for releasing which is arranged between the first rigid part and the second rigid part at the top.
The second clamping unit comprises a second connecting part fixed on the second rigid rotating body in a threaded mode, a second clamping body clamped on the rotating sleeve, a third rigid part and a fourth rigid part arranged between the second clamping body and the second connecting part, a second flexible thin plate sequentially connected with the second clamping body, the third rigid part, the second connecting part, the fourth rigid part and the second clamping body in a diamond mode, and a second piezoelectric actuator for releasing arranged between the third rigid part and the fourth rigid part at the top.
The first driving device comprises a first driving piezoelectric actuator arranged in the first rigid ring in the radial direction, a fifth rigid part, a sixth rigid part, a seventh rigid part and an eighth rigid part which are sequentially distributed into a diamond shape around the first driving piezoelectric actuator and are sequentially connected through a third flexible thin plate, the fifth rigid part and the seventh rigid part are arranged at two ends of the first driving piezoelectric actuator in an abutting mode, the eighth rigid part is connected to the first rigid ring, and the sixth rigid part is connected to the first rigid rotating body;
the second driving device comprises a second driving piezoelectric actuator arranged in the second rigid ring in the radial direction, a ninth rigid part, a tenth rigid part, an eleventh rigid part and a twelfth rigid part which are sequentially distributed in a rhombic shape around the second driving piezoelectric actuator and are sequentially connected through a fourth flexible thin plate, the ninth rigid part and the eleventh rigid part are arranged at two ends of the second driving piezoelectric actuator in an abutting mode, the twelfth rigid part is connected to the second rigid ring, and the tenth rigid part is connected to the second rigid rotating body.
The first driving unit, the first clamping unit, the second clamping unit and the second driving unit are sequentially arranged from top to bottom, and the rotary sleeve cover is arranged on the supporting seat.
A bearing is arranged between the rotating sleeve and the supporting seat, and preferably a four-point angular contact ball bearing is adopted, the supporting seat comprises a shaft body sleeved on an inner ring of the bearing, the shaft body is provided with a threaded section and a first step surface, the threaded section is in screwed connection with a locking nut, and the inner ring of the bearing is clamped between the locking nut and the first step surface; the rotating sleeve is provided with a second step surface, the lower end of the rotating sleeve is fixedly screwed with an end cover, and an outer ring of the bearing is clamped between the end cover and the second step surface.
A gasket is arranged between the end cover and the outer ring of the bearing; the end cover is in a ring shape matched with the end part of the rotating sleeve.
The inner wall of the rotating sleeve is provided with a fourth step surface facing the cover plate, and the supporting seat is provided with a flange for fixing the second driving unit.
An annular body for supporting the code wheel is arranged at the lower end of the rotary sleeve, and a second screw is vertically connected between the code wheel and the annular body.
The rotating sleeve and the annular body are integrally formed;
the fifth rigid part, the sixth rigid part, the seventh rigid part, the eighth rigid part, the third flexible thin plate, the first rigid ring and the first rigid rotating body are integrally formed;
the first connecting part, the first clamping body, the first rigid part, the second rigid part and the first flexible thin plate are integrally formed;
the second connecting part, the second clamping body, the third rigid part, the fourth rigid part and the second flexible thin plate are integrally formed;
the ninth rigid portion, the tenth rigid portion, the eleventh rigid portion, the twelfth rigid portion, the fourth flexible thin plate, the second rigid ring, and the second rigid rotating body are integrally molded.
Compared with the prior art, the piezoelectric inchworm rotating platform comprises a cover plate serving as a platform surface, a rotating sleeve is vertically screwed below the cover plate, a first clamping unit and a second clamping unit which are independently clamped on the inner wall of the rotating sleeve are further arranged, a first driving unit for driving the first clamping unit to rotate forwards is used for driving the second clamping unit to rotate backwards, and a second driving unit for driving the second clamping unit to rotate backwards is also arranged; a base is arranged in a gap below the rotary sleeve, a supporting seat is connected between the second driving unit and the base, the first driving unit is screwed on the second driving unit, and a rotary gap is arranged between the supporting seat and the rotary sleeve; the rotary sleeve is annularly provided with a coded disc, the base is provided with a support, and the support is provided with a reading head which is opposite to the coded disc. The 'single-beat two-step' rotation of the rotating sleeve can be realized by the time sequence control of the first clamping unit, the second clamping unit, the first driving unit and the second driving unit. The invention has the advantages that:
1) the rotating platform has simple and compact integral structure and is easy to integrate the angular displacement sensor;
2) the clamping mechanism is integrated, the driving mechanism is integrated, and the assembling and adjusting processes are omitted;
3) the clamping mechanism is composed of a bridge type amplifying mechanism, the rotating sleeve can be fully clamped and fully released, and therefore friction and abrasion between the rotating sleeve and the clamping mechanism can be reduced, and output torque of the rotating sleeve is improved;
4) the driving mechanism is also composed of a bridge type amplifying mechanism, and single-step displacement is large;
5) only the first driving unit, the second driving unit and the second clamping unit are electrified, the first driving unit drives the first clamping unit and the rotating sleeve to rotate forwards, and the second driving unit drives the second clamping unit to rotate backwards; after the power is cut off, the second driving unit drives the second clamping unit and the rotating sleeve to rotate forwards in the resetting process, so that the rotating effect of single-beat and two-step is realized, and the movement speed is high;
6) the four-point angular contact ball bearing has a circumferential guiding function, so that the rotary platform has high motion precision.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic view of the internal cross-sectional structure of FIG. 1;
FIG. 3 is an exploded view of the code wheel, bracket and readhead of FIG. 1;
FIG. 4 is a schematic view of the arrangement of FIG. 3 with the code wheel, bracket and readhead removed;
FIG. 5 is an exploded schematic view of FIG. 4;
FIG. 6 is a schematic view of the structure of FIG. 5 with the base removed;
FIG. 7 is a schematic view of the internal cross-sectional structure of FIG. 6;
FIG. 8 is an exploded schematic view of FIG. 6;
FIG. 9 is a schematic view of an assembly structure of the first driving unit, the first clamping unit, the second driving unit and the supporting base in FIG. 8;
FIG. 10 is a schematic view of the internal cross-sectional structure of FIG. 9;
FIG. 11 is a schematic view of FIG. 9 exploded in an axial direction;
FIG. 12 is a schematic view of the structure of FIG. 9 exploded in the horizontal plane direction;
fig. 13 is a schematic structural view of the first driving unit of fig. 12;
FIG. 14 is an exploded schematic view of FIG. 13;
fig. 15 is a schematic structural view of the second driving unit of fig. 12;
FIG. 16 is an exploded schematic view of FIG. 15;
fig. 17 is a timing control diagram of the first clamping unit, the second clamping unit, the first driving unit, and the second driving unit;
FIG. 18 is a schematic view showing the rotation of the rotating sleeve and the cover plate in the forward direction during a single movement period T;
fig. 19 is a schematic view showing the implementation of the rotation of the rotating sleeve and the cover plate in the reverse direction during one movement period T.
Detailed Description
Embodiments of the present invention are described in further detail below with reference to the accompanying drawings.
Fig. 1 to 16 are schematic structural diagrams of the present invention, wherein the reference numbers are as follows: the base 1, the rotating sleeve 2, the second stepped surface 21, the fourth stepped surface 22, the annular body 23, the cover plate 3, the third screw 31, the first drive unit 4, the first rigid ring 41, the sixth screw 411, the first rigid rotating body 42, the seventh screw 421, the sixth rigid portion 43, the fifth rigid portion 44, the eighth rigid portion 45, the seventh rigid portion 46, the third flexible thin plate 47, the first drive piezoelectric actuator 48, the first clamping unit 5, the first connecting portion 51, the first clamping body 52, the first rigid portion 53, the second rigid portion 54, the first flexible thin plate 55, the first release piezoelectric actuator 56, the second clamping unit 6, the second connecting portion 61, the second clamping body 62, the third rigid portion 63, the fourth rigid portion 64, the second flexible thin plate 65, the second release piezoelectric actuator 66, the second drive unit 7, the second rigid ring 71, the second rigid rotating body 72, and the third flexible thin plate 47, A ninth screw 721, a tenth rigid portion 73, a ninth rigid portion 74, a twelfth rigid portion 75, an eleventh rigid portion 76, a fourth flexible thin plate 77, a second piezoelectric actuator 78 for driving, a support base 8, a fourth screw 81, a screw hole 82, a first step surface 83, a flange 84, a shaft body 85, a screw section 851, an eighth screw 86, a bearing 91, a lock nut 92, an end cap 93, a fifth screw 94, a washer 95, a reading head 101, a bracket 102, a first screw 103, a code wheel 104, and a second screw 105.
Fig. 1 to 16 are schematic structural views of the present invention, and as shown in the drawings, the piezoelectric inchworm rotating platform of the present invention includes a cover plate 3 as a platform surface, a rotating sleeve 2 is vertically screwed below the cover plate 3, and the specific connection mode is as follows: the third screw 31 is connected to the upper end edge of the rotating sleeve 2 from the upper part of the cover plate 3, and is further provided with a first clamping unit 5 and a second clamping unit 6 which are independently clamped on the inner wall of the rotating sleeve 2, a first driving unit 4 for driving the first clamping unit 5 to rotate forwards, and a second driving unit 7 for driving the second clamping unit 6 to rotate backwards; a base 1 is arranged in a gap below the rotary sleeve 2, a supporting seat 8 is connected between the second driving unit 7 and the base 1, the first driving unit 4 is fixed on the second driving unit 7 in a threaded manner, and a rotary gap is arranged between the supporting seat 8 and the rotary sleeve 2; the rotary sleeve 2 is annularly provided with a code disc 104, the base 1 is provided with a bracket 102, the bracket 102 is fixedly connected to the base 1 through a first screw 103, and the bracket 102 is provided with a reading head 101 which is opposite to the code disc 104. The cover plate 3 rotates synchronously with the rotating sleeve 2. If only the first driving unit 4, the second driving unit 7 and the second clamping unit 6 are electrified, the first driving unit 4 drives the first clamping unit 5 and the rotating sleeve 2 to rotate forward, and the second driving unit 7 drives the second clamping unit 6 to rotate backward; after the power is cut off, the second driving unit 7 drives the second clamping unit 6 and the rotating sleeve 2 to rotate forwards in the resetting process, so that the rotating effect of single-beat two-step is realized, and the moving speed is high. The code wheel 104 and the readhead 101 are able to detect the angle and speed of rotation of the rotating sleeve 2.
In an embodiment, the second driving unit 7 includes a second rigid ring 71 screwed to the support base 8, and the specific installation manner is as follows: the eighth screw 86 is screwed to the second rigid ring 71 from the lower end of the support base 8, as shown in fig. 11 and 12; a second rigid rotating body 72 arranged in the second rigid ring 71, and a second driving device which is connected to the second rigid ring 71 and can push the second rigid rotating body 72 to rotate reversely; the first drive unit 4 includes a first rigid ring 41 screwed to a second rigid ring 71, and is specifically mounted in a manner that: the sixth screw 411 is screwed to the second rigid ring 71 from the upper end of the first rigid ring 41, as shown in fig. 11 and 12; a first rigid rotating body 42 disposed in the first rigid ring 41, and a first driving device connected to the first rigid ring 41 and capable of driving the first rigid rotating body 42 to rotate forward, as shown in fig. 13 and 14.
The first clamping unit 5 includes a first connection portion 51 screwed to the first rigid rotating body 42, and the connection manner is as follows: the seventh screw 421 is vertically connected to the first connecting portion 51 from the upper end of the first rigid rotating body 42, as shown in fig. 11 and 12; a first clamping body 52 clamped to the rotary sleeve 2, a first rigid portion 53 and a second rigid portion 54 provided between the first clamping body 52 and the first connecting portion 51, a first flexible thin plate 55 connecting the first clamping body 52, the first rigid portion 53, the first connecting portion 51, the second rigid portion 54, and the first clamping body 52 in this order in a diamond shape, and a first piezoelectric actuator 56 for release provided between the first rigid portion 53 and the second rigid portion 54 at the top, as shown in fig. 11 and 12. The first clamping body 52, the first connecting portion 51, the first rigid portion 53, the second rigid portion 54, and the first flexible thin plate 55 constitute a bridge type amplifying unit capable of amplifying the amount of elongation displacement of the first piezoelectric actuator 56 for releasing, thereby enabling the first clamping body 52 to be sufficiently clamped and released. When the first piezoelectric actuator 56 for release is energized, the first piezoelectric actuator 56 for release expands to spread the first rigid portion 53 and the second rigid portion 54, and the first clamp 52 is pulled toward the first connection portion 51 by the traction of the first flexible thin plate 55, and finally the first clamp 52 is released from the rotary sleeve 2.
The second clamping unit 6 includes a second connection portion 61 screwed to the second rigid rotating body 72, and the specific connection manner is as follows: a ninth screw 721 is vertically screwed upward from the lower end of the second rigid rotating body 72 to the second connecting portion 61, as shown in fig. 11 and 12; a second clamping body 62 clamped to the rotary sleeve 2, a third rigid portion 63 and a fourth rigid portion 64 provided between the second clamping body 62 and the second connecting portion 61, a second flexible sheet 65 connecting the second clamping body 62, the third rigid portion 63, the second connecting portion 61, the fourth rigid portion 64, and the second clamping body 62 in this order in a diamond shape, and a second piezoelectric actuator 66 for release provided between the third rigid portion 63 and the fourth rigid portion 64 at the top, as shown in fig. 11 and 12. The second clamping body 62, the second connecting portion 61, the third rigid portion 63, the fourth rigid portion 64, and the second flexible thin plate 65 constitute a bridge type amplifying unit capable of amplifying the amount of elongation displacement of the second piezoelectric actuator 66 for releasing, thereby enabling the second clamping body 62 to be sufficiently clamped and released. When the second piezoelectric actuator 66 for release is energized, the second piezoelectric actuator 66 for release expands to spread the third rigid portion 63 and the fourth rigid portion 64, and the second clamping body 62 is pulled toward the second connection portion 61 by the pulling of the second flexible thin plate 65, and finally the second clamping body 62 is released from the rotary sleeve 2.
In the embodiment, the first driving means includes a first piezoelectric actuator 48 for driving radially disposed in the first rigid ring 41, a fifth rigid portion 44, a sixth rigid portion 43, a seventh rigid portion 46, and an eighth rigid portion 45, which are diamond-shaped in sequence around the first piezoelectric actuator 48, and are sequentially connected by a third flexible thin plate 47, the fifth rigid portion 44 and the seventh rigid portion 46 are disposed at both ends of the first piezoelectric actuator 48 for driving, the eighth rigid portion 45 is connected to the first rigid ring 41, and the sixth rigid portion 43 is connected to the first rigid rotating body 42, as shown in fig. 11, 12, 13, and 14. The fifth rigid portion 44, the sixth rigid portion 43, the seventh rigid portion 46, the eighth rigid portion 45, and the third flexible thin plate 47 constitute a bridge amplification unit that amplifies the amount of elongation displacement of the first driving piezoelectric actuator 48, so that the seventh rigid portion 46 can be moved sufficiently with respect to the eighth rigid portion 45, and the first rigid rotating body 42 and, ultimately, the rotating sleeve 2 can be rotated sufficiently.
The second driving device includes a second driving piezoelectric actuator 78 radially disposed in the second rigid ring 71, a ninth rigid portion 74, a tenth rigid portion 73, an eleventh rigid portion 76, and a twelfth rigid portion 75, which are diamond-shaped in order around the second driving piezoelectric actuator 78, and are sequentially connected by a fourth flexible thin plate 77, the ninth rigid portion 74 and the eleventh rigid portion 76 are disposed at both ends of the second driving piezoelectric actuator 78, the twelfth rigid portion 75 is connected to the second rigid ring 71, and the tenth rigid portion 73 is connected to the second rigid rotating body 72. As shown in fig. 11, 12, 15 and 16. The ninth rigid portion 74, the tenth rigid portion 73, the eleventh rigid portion 76, the twelfth rigid portion 75, and the fourth flexible thin plate 77 constitute a bridge type amplification unit that can amplify the amount of elongation displacement of the second driving piezoelectric actuator 78, so that the tenth rigid portion 73 can be moved sufficiently with respect to the twelfth rigid portion 75, and thereby the second rigid rotating body 72 can be rotated sufficiently, and finally the rotating sleeve 2 can be rotated sufficiently.
In the embodiment, the first driving unit 4, the first clamping unit 5, the second clamping unit 6 and the second driving unit 7 are sequentially arranged from top to bottom, and the rotating sleeve 2 is covered on the supporting seat 8.
In an embodiment, a bearing 91 is arranged between the rotating sleeve 2 and the supporting seat 8, and the bearing 91 is preferably a four-point angular contact ball bearing, the supporting seat 8 includes a shaft body 85 sleeved on an inner ring of the bearing 91, the shaft body 85 is provided with a threaded section 851 and a first step surface 83, as shown in fig. 10, the threaded section 851 is screwed with a lock nut 92, and the inner ring of the bearing 91 is sandwiched between the lock nut 92 and the first step surface 83; the rotating sleeve 2 is provided with a second step surface 21, as shown in fig. 8, an end cover 93 is screwed to the lower end of the rotating sleeve 2, the end cover 93 is screwed to the lower end of the rotating sleeve 2 by a fifth screw 94, and an outer ring of the bearing 91 is interposed between the end cover 93 and the second step surface 21. The bearing 91 can reduce the radial run-out of the rotating sleeve 2 and the end face run-out of the cover plate 3, and improve the motion precision of the platform. A screw hole 82 is provided at the lower end of the shaft body 85, and a fourth screw 81 is screwed into the screw hole 82 from the bottom of the base 1.
In the embodiment, a gasket 95 is arranged between the end cover 93 and the outer ring of the bearing 91; the end cap 93 is annular to match the end of the rotating sleeve 2.
In the embodiment, the inner wall of the rotating sleeve 2 is provided with a fourth step surface 22 facing the cover plate 3, and the support base 8 is provided with a flange 84 for fixing the second driving unit 7.
In the embodiment, the lower end of the rotating sleeve 2 is provided with an annular body 23 for holding the code wheel 104, and a second screw 105 is vertically connected between the code wheel 104 and the annular body 23, as shown in fig. 3.
In the embodiment, the rotating sleeve 2 and the annular body 23 are integrally formed;
the fifth rigid portion 44, the sixth rigid portion 43, the seventh rigid portion 46, the eighth rigid portion 45, the third flexible thin plate 47, the first rigid ring 41, and the first rigid rotating body 42 are integrally formed;
the first connecting part 51, the first clamping body 52, the first rigid part 53, the second rigid part 54 and the first flexible thin plate 55 are integrally formed;
the second connecting part 61, the second clamping body 62, the third rigid part 63, the fourth rigid part 64 and the second flexible thin plate 65 are integrally formed;
the ninth rigid portion 74, the tenth rigid portion 73, the eleventh rigid portion 76, the twelfth rigid portion 75, the fourth flexible thin plate 77, the second rigid ring 71, and the second rigid rotating body 72 are integrally molded.
The integrated structure removes the process of assembly adjustment, so that the device is convenient to disassemble and assemble and operates more stably.
The working principle of the invention is as follows:
the direction of rotation of the first rigid rotary body 42 when the first driving piezoelectric actuator 48 is energized is defined as a forward direction, and the direction of rotation of the second rigid rotary body 72 when the second driving piezoelectric actuator 78 is energized is defined as a reverse direction.
The rotation of the rotating sleeve 2 and the cover plate 3 in the forward direction in one movement period T is achieved as follows: as shown in fig. 18, in a first step, the second clamping unit 6 is released from the rotating sleeve 2. As shown in fig. 17 (a), the second piezoelectric actuator for release 66 is energized u (t), and the second piezoelectric actuator for release 66 expands to spread the third rigid portion 63 and the fourth rigid portion 64, and the second clamping body 62 is pulled toward the second connecting portion 61 by the traction of the second flexible thin plate 65, and finally the second clamping body 62 is released from the rotating sleeve 2;
and secondly, the first driving unit 4 drives the first clamping unit 5 and the rotating sleeve 2 to rotate forward by one step, and the second driving unit 7 drives the second clamping unit 6 to rotate idle by one step in the reverse direction. The method specifically comprises the following steps: when the second piezoelectric actuator for release 66 is energized u (t) to reach a steady state (e.g., at time t 1), as shown in fig. 17 (b), the first piezoelectric actuator 48 for driving in the first driving unit 4 and the second piezoelectric actuator 78 for driving in the second driving unit 7 are energized simultaneously, so that the first driving unit 4 drives the first clamping unit 5 and the rotating sleeve 2 to rotate forward by one step, and the second driving unit 7 drives the second clamping unit 6 to rotate idle by one step in the reverse direction.
Third, the second clamping unit 6 is clamped to the rotating sleeve 2 again. The method specifically comprises the following steps: when the first driving piezoelectric actuator 48 and the second driving piezoelectric actuator 78 are energized u (t) to reach a steady state (e.g., at time t 2), the second releasing piezoelectric actuator 66 is deenergized as shown in fig. 17 (a), the second releasing piezoelectric actuator 66 is restored, and the second clamping body 62 is restored and is newly clamped to the rotating sleeve 2;
the fourth step releases the first clamping unit 5 from the rotating sleeve 2. The method specifically comprises the following steps: when the second piezoelectric actuator for release 66 is deenergized to reach the steady state (at time t 3), as shown in fig. 17 (c), when the first piezoelectric actuator for release 56 is energized, the first piezoelectric actuator for release 56 is extended to spread the first rigid portion 53 and the second rigid portion 54, the first clamp 52 is pulled toward the first connecting portion 51 by the traction of the first flexible thin plate 55, and finally the first clamp 52 is released from the rotating sleeve 2;
and fifthly, resetting the first driving unit 4 and driving the first clamping unit 5 to rotate reversely for one step, and resetting the second driving unit 7 and driving the second clamping unit 6 and the rotating sleeve 2 to rotate forwardly for one step. The method specifically comprises the following steps: when the first driving piezoelectric actuator 48 and the second driving piezoelectric actuator 78 are energized u (t) to reach a steady state (e.g., at time t 4), as shown in fig. 17 (b), when the first driving piezoelectric actuator 48 and the second driving piezoelectric actuator 78 are simultaneously deenergized, the first driving unit 4, the first clamping unit 5, the second clamping unit 6, and the second driving unit 7 are simultaneously reset, and the second clamping unit 6 can drive the rotary sleeve 2 to rotate forward by one step in the resetting process.
And a sixth step of clamping the first clamping unit 5 to the rotating sleeve 2 again. The method specifically comprises the following steps: when the first driving piezoelectric actuator 48 and the second driving piezoelectric actuator 78 are simultaneously deenergized to reach the steady state (e.g., at time t 5), as shown in fig. 17 (c), when the first releasing piezoelectric actuator 56 is deenergized, the first releasing piezoelectric actuator 56 is restored, and the first bit 52 is restored and is newly set in the rotating sleeve 2.
The process from the first step to the sixth step realizes the rotating effect of 'single beat and two steps'.
The rotation of the rotary sleeve 2 and the cover plate 3 in the opposite direction in one movement period T is effected as follows: as shown in fig. 19, in a first step, the first clamping unit 5 is released from the rotating sleeve 2. As shown in fig. 17 (a), the first piezoelectric actuator 56 for release is energized u (t), and the first piezoelectric actuator 56 for release expands to spread the first rigid portion 53 and the second rigid portion 54, and the first clamp 52 is pulled toward the first connecting portion 51 by the traction of the first flexible thin plate 55, and finally the first clamp 52 is released from the rotating sleeve 2;
in the second step, the second driving unit 7 drives the second clamping unit 6 and the rotating sleeve 2 to rotate reversely by one step, and the first driving unit 4 drives the first clamping unit 5 to idle by one step in the forward direction. The method specifically comprises the following steps: when the first piezoelectric actuator 56 for release is energized u (t) to reach a steady state (e.g., at time t 1), as shown in fig. 17 (b), the first piezoelectric actuator 48 for driving in the first driving unit 4 and the second piezoelectric actuator 78 for driving in the second driving unit 7 are energized simultaneously, so that the first driving unit 4 drives the first clamping unit 5 to idle for one step in the forward direction, and the second driving unit 7 drives the second clamping unit 6 and the rotating sleeve 2 to rotate for one step in the reverse direction.
Third, the first clamping unit 5 is clamped to the rotating sleeve 2 again. The method specifically comprises the following steps: when the first driving piezoelectric actuator 48 and the second driving piezoelectric actuator 78 are energized u (t) to reach a steady state (e.g., at time t 2), the first releasing piezoelectric actuator 56 is deenergized as shown in fig. 17 (a), the first releasing piezoelectric actuator 56 is restored, and the first clamping body 52 is restored and is newly clamped to the rotating sleeve 2;
and a fourth step of releasing the second clamping unit 6 from the rotating sleeve 2. The method specifically comprises the following steps: when the first piezoelectric actuator 56 for release is deenergized to reach a steady state (at time t 3), as shown in fig. 17 (c), when the second piezoelectric actuator 66 for release is energized, the second piezoelectric actuator 66 for release is elongated to spread the third rigid portion 63 and the fourth rigid portion 64, and the second clamping body 62 is pulled toward the second connecting portion 61 by the traction of the second flexible thin plate 65, and finally the second clamping body 62 is released from the rotating sleeve 2;
and fifthly, resetting the first driving unit 4 and driving the first clamping unit 5 and the rotating sleeve 2 to rotate reversely by one step, and resetting the second driving unit 7 and driving the second clamping unit 6 to idle by one step in the forward direction. The method specifically comprises the following steps: when the first driving piezoelectric actuator 48 and the second driving piezoelectric actuator 78 are energized u (t) to reach a steady state (e.g., at time t 4), as shown in fig. 17 (b), the first driving piezoelectric actuator 48 and the second driving piezoelectric actuator 78 are simultaneously deenergized, the first driving unit 4, the first clamping unit 5, the second clamping unit 6, and the second driving unit 7 are simultaneously reset, and the first clamping unit 5 can drive the rotary sleeve 2 to rotate reversely by one step in the resetting process.
And a sixth step of clamping the second clamping unit 6 to the rotating sleeve 2 again. The method specifically comprises the following steps: when the first driving piezoelectric actuator 48 and the second driving piezoelectric actuator 78 are simultaneously deenergized to reach the steady state (e.g., at time t 5), as shown in fig. 17 (c), when the second releasing piezoelectric actuator 66 is deenergized, the second releasing piezoelectric actuator 66 is restored, and the second clamping body 62 is restored and is newly clamped to the rotary sleeve 2.
The process from the first step to the sixth step realizes the rotating effect of 'single beat and two steps'.
While the preferred embodiments of the present invention have been illustrated, various changes and modifications may be made by one skilled in the art without departing from the scope of the invention.
Claims (8)
1. The utility model provides a piezoelectricity inchworm rotary platform, includes apron (3) as the mesa, characterized by: a rotary sleeve (2) is vertically screwed below the cover plate (3), a first clamping unit (5) and a second clamping unit (6) which are independently clamped on the inner wall of the rotary sleeve (2), a first driving unit (4) for driving the first clamping unit (5) to rotate forwards and a second driving unit (7) for driving the second clamping unit (6) to rotate backwards are further arranged; a base (1) is arranged in a gap below the rotating sleeve (2), a supporting seat (8) is connected between the second driving unit (7) and the base (1), the first driving unit (4) is fixed on the second driving unit (7) in a threaded manner, and a rotating gap is arranged between the supporting seat (8) and the rotating sleeve (2); the rotary sleeve (2) is annularly provided with a coded disc (104), the base (1) is provided with a bracket (102), and the bracket (102) is provided with a reading head (101) which is over against the coded disc (104);
the second driving unit (7) comprises a second rigid ring (71) fixed on the supporting seat (8) in a threaded manner, a second rigid rotating body (72) arranged in the second rigid ring (71), and a second driving device which is connected to the second rigid ring (71) and can push the second rigid rotating body (72) to rotate reversely; the first driving unit (4) comprises a first rigid ring (41) which is screwed on the second rigid ring (71), a first rigid rotating body (42) which is arranged in the first rigid ring (41), and a first driving device which is connected with the first rigid ring (41) and can push the first rigid rotating body (42) to rotate forwards;
the first clamping unit (5) comprises a first connecting part (51) screwed on the first rigid rotating body (42), a first clamping body (52) clamped on the rotating sleeve (2), a first rigid part (53) and a second rigid part (54) arranged between the first clamping body (52) and the first connecting part (51), a first flexible thin plate (55) sequentially connected with the first clamping body (52), the first rigid part (53), the first connecting part (51), the second rigid part (54) and the first clamping body (52) in a diamond shape, and a first release piezoelectric actuator (56) arranged between the first rigid part (53) and the second rigid part (54) at the top;
the second clamping unit (6) comprises a second connecting part (61) fixed on the second rigid rotating body (72) in a threaded mode, a second clamping body (62) clamped on the rotating sleeve (2), a third rigid part (63) and a fourth rigid part (64) arranged between the second clamping body (62) and the second connecting part (61), a second flexible thin plate (65) sequentially connected with the second clamping body (62), the third rigid part (63), the second connecting part (61), the fourth rigid part (64) and the second clamping body (62) in a diamond mode, and a second release piezoelectric actuator (66) arranged between the third rigid part (63) and the fourth rigid part (64) in an abutting mode.
2. The piezoelectric inchworm rotating platform according to claim 1, wherein: the first driving device comprises a first driving piezoelectric actuator (48) arranged in a first rigid ring (41) in a radial direction, a fifth rigid part (44), a sixth rigid part (43), a seventh rigid part (46) and an eighth rigid part (45) which sequentially form diamond-shaped parts around the first driving piezoelectric actuator (48) and are sequentially connected through a third flexible thin plate (47), the fifth rigid part (44) and the seventh rigid part (46) are arranged at two ends of the first driving piezoelectric actuator (48) in an abutting mode, the eighth rigid part (45) is connected to the first rigid ring (41), and the sixth rigid part (43) is connected to the first rigid rotating body (42);
the second driving device comprises a second driving piezoelectric actuator (78) radially arranged in a second rigid ring (71), a ninth rigid part (74), a tenth rigid part (73), an eleventh rigid part (76) and a twelfth rigid part (75) which sequentially form diamond-shaped parts around the second driving piezoelectric actuator (78) and are sequentially connected through a fourth flexible thin plate (77), the ninth rigid part (74) and the eleventh rigid part (76) are arranged at two ends of the second driving piezoelectric actuator (78) in an abutting mode, the twelfth rigid part (75) is connected to the second rigid ring (71), and the tenth rigid part (73) is connected to a second rigid rotating body (72).
3. The piezoelectric inchworm rotating platform according to claim 2, wherein: the first driving unit (4), the first clamping unit (5), the second clamping unit (6) and the second driving unit (7) are sequentially arranged from top to bottom, and the rotating sleeve (2) is covered on the supporting seat (8).
4. The piezoelectric inchworm rotating platform according to claim 3, wherein: a bearing (91) is arranged between the rotary sleeve (2) and the supporting seat (8), the supporting seat (8) comprises a shaft body (85) sleeved on an inner ring of the bearing (91), the shaft body (85) is provided with a threaded section (851) and a first step surface (83), the threaded section (851) is screwed with a lock nut (92), and an inner ring of the bearing (91) is clamped between the lock nut (92) and the first step surface (83); the rotating sleeve (2) is provided with a second step surface (21), an end cover (93) is screwed at the lower end of the rotating sleeve (2), and an outer ring of a bearing (91) is clamped between the end cover (93) and the second step surface (21).
5. The piezoelectric inchworm rotating platform according to claim 4, wherein: a gasket (95) is arranged between the end cover (93) and the outer ring of the bearing (91); the end cover (93) is in a ring shape matched with the end part of the rotating sleeve (2).
6. The piezoelectric inchworm rotating platform according to claim 5, wherein: the inner wall of the rotating sleeve (2) is provided with a fourth step surface (22) facing the cover plate (3), and the supporting seat (8) is provided with a flange (84) used for fixing the second driving unit (7).
7. The piezoelectric inchworm rotating platform according to claim 6, wherein: an annular body (23) used for supporting the coded disc (104) is arranged at the lower end of the rotary sleeve (2), and a second screw (105) is vertically connected between the coded disc (104) and the annular body (23).
8. The piezoelectric inchworm rotating platform according to claim 7, wherein: the rotating sleeve (2) and the annular body (23) are integrally formed;
the fifth rigid part (44), the sixth rigid part (43), the seventh rigid part (46), the eighth rigid part (45), the third flexible thin plate (47), the first rigid ring (41) and the first rigid rotating body (42) are integrally formed;
the first connecting part (51), the first clamping body (52), the first rigid part (53), the second rigid part (54) and the first flexible thin plate (55) are integrally formed;
the second connecting part (61), the second clamping body (62), the third rigid part (63), the fourth rigid part (64) and the second flexible thin plate (65) are integrally formed;
the ninth rigid portion (74), the tenth rigid portion (73), the eleventh rigid portion (76), the twelfth rigid portion (75), the fourth flexible thin plate (77), the second rigid ring (71), and the second rigid rotating body (72) are integrally formed.
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| CN113131787A (en) * | 2021-04-19 | 2021-07-16 | 吉林大学 | Driving mechanism of tracking rotary table for light and small laser communication |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102751899A (en) * | 2012-07-03 | 2012-10-24 | 吉林大学 | Micro nano bionic multi-degree of freedom driving device |
| CN108696182A (en) * | 2018-05-30 | 2018-10-23 | 东北大学 | A kind of rotatable stage and control method towards Multi-station precision operation |
| CN109391170A (en) * | 2018-11-19 | 2019-02-26 | 西安交通大学 | Containing zero Poisson's ratio eight-sided formation step-by-step movement rotary piezoelectric actuator and actuation method |
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| JP5764845B2 (en) * | 2010-09-24 | 2015-08-19 | 国立大学法人静岡大学 | Inch worm actuator |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102751899A (en) * | 2012-07-03 | 2012-10-24 | 吉林大学 | Micro nano bionic multi-degree of freedom driving device |
| CN108696182A (en) * | 2018-05-30 | 2018-10-23 | 东北大学 | A kind of rotatable stage and control method towards Multi-station precision operation |
| CN109391170A (en) * | 2018-11-19 | 2019-02-26 | 西安交通大学 | Containing zero Poisson's ratio eight-sided formation step-by-step movement rotary piezoelectric actuator and actuation method |
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