CN110246778A - A kind of pivot angle is separable and binds the adjustable binding mechanism of power - Google Patents
A kind of pivot angle is separable and binds the adjustable binding mechanism of power Download PDFInfo
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- CN110246778A CN110246778A CN201910163609.3A CN201910163609A CN110246778A CN 110246778 A CN110246778 A CN 110246778A CN 201910163609 A CN201910163609 A CN 201910163609A CN 110246778 A CN110246778 A CN 110246778A
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- clamping piston
- separable
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67121—Apparatus for making assemblies not otherwise provided for, e.g. package constructions
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Basic Packing Technique (AREA)
Abstract
The present invention discloses that a kind of pivot angle is separable and the binding adjustable binding mechanism of power, for chip package, including binding head, binding head includes crawl bar, ties up a body, head housing, briquetting and driving lever, crawl bar is rotatedly connected with a body is tied up, it ties up a body to be connected with the sliding of head housing, crawl bar is connected with briquetting, and driving lever is set on briquetting;Pneumatic loading pressure head, pneumatic loading pressure head include pressing plate and clamping piston, and clamping piston is set to briquetting top, and clamping piston is connected with pressing plate sliding;Press mechanism, press mechanism include voice coil motor, and voice coil motor is connected with pressing plate;Rotatable mechaninism, rotatable mechaninism include driving lever motor, and driving lever motor is able to drive driving lever rotation.Starting load head can be able to drive binding head crawl or binding chip, and the lower pressure of clamping piston can be adjusted by the pressure of control gas-pressurized, the precision of chip package is improved, rotatable mechaninism is able to drive crawl bar rotation, and rotatable mechaninism, which is located at, to be tied up outside a body.
Description
Technical field
The present invention relates to semiconductor integrated circuit manufacturing technology field, and a kind of binding power separable more particularly to pivot angle
Adjustable binding mechanism.
Background technique
Semiconductor integrated circuit is the core devices of electronic product, and the development of industrial technology is directly related to electric power
Industrial expansion is horizontal.From the point of view of overall situation, the technological progress of semiconductor industry has pushed new industry to a certain extent
Development, including photovoltaic industry, semiconductor lighting industry and FPD industry etc. it is a variety of, promote semiconductor integrated circuit
Industry vertical industry supply chain it is perfect, and optimize ecological environment to a certain extent.Semiconductor integrated circuit is will be brilliant
Body pipe, diode etc. active component and resistor, the passive elements such as capacitor are interconnected according to certain circuit, and " integrated " exists
On one block semiconductor single-chip, to complete specific circuit or system function.
The shell for installing semiconductor integrated circuit chip plays placement, fixation, sealing, protection chip and enhancing electric heating
The effect of performance, but also be link up the chip interior world and external circuit bridge --- the contact on chip is connected with conducting wire
Onto the pin of package casing, these pins establish connection with other devices further through the conducting wire in printed board, therefore, chip envelope
Dress plays an important role to IC manufacturing.Binding mechanism is the critical component of chip encapsulating device, the performance of binding mechanism
Chip package precision is directly influenced, in the prior art, whether the binding power of binding head can be adjusted, and grab the rotation journey of angle
An important factor for degree is always influence chip package and technical problem.
Therefore, how to provide that a kind of binding head is adjustable, the crawl rotatable sealed in unit of angle, improve chip package essence
Degree, is those skilled in the art's urgent problem to be solved.
Summary of the invention
And a kind of binding power adjustable binding mechanism separable the object of the present invention is to provide pivot angle, it is above-mentioned existing to solve
The problem of with the presence of technology, binding head is set to move up and down, to bind power adjustable, crawl angle is rotatable, improves chip envelope
The precision of dress.
To achieve the above object, the present invention provides following schemes: the present invention provides that a kind of pivot angle is separable and binding power
Adjustable binding mechanism, comprising:
Binding head, the binding head include crawl bar, tie up a body, head housing, briquetting and driving lever, the crawl bar with it is described
A body is tied up to be rotatedly connected, it is described to tie up the sliding of a body and the head housing and be connected, it is described to tie up sliding relatively for a body and the head housing
Dynamic direction is parallel with the crawl axis direction of bar, and the crawl bar is connected with the briquetting, and the driving lever is set to institute
It states on briquetting;
Pneumatic loading pressure head, the pneumatic loading pressure head includes pressing plate and clamping piston, and the clamping piston is set to institute
Briquetting top is stated, the clamping piston can apply pressure to the briquetting, and the clamping piston is connected with pressing plate sliding,
Cavity between the clamping piston and the pressing plate is connected with compressed gas source;
Press mechanism, the press mechanism include that compression pedestal and voice coil motor, the voice coil motor are fixed on the pressure
On tight pedestal, the voice coil motor is connected with the pressing plate;
Rotatable mechaninism, the rotatable mechaninism include driving lever motor, terminal pad and connecting rod, and the connecting rod passes through terminal pad
It is connected with the driving lever motor, the connecting rod is connected with the driving lever, and the driving lever motor is able to drive the driving lever rotation.
Preferably, the binding head further includes guiding pair, and a body of tying up is slided by the guiding pair and the headstock of tying up
It is dynamic to be connected.
Preferably, the binding head further includes upper limit plate and lower limiting board, the upper limit plate and the lower limiting board
Be both secured to it is described tie up on headstock, the upper limit plate and the lower limiting board, which are respectively arranged at, described ties up up and down the two of a body
End, the upper limit plate and the lower limiting board can limit the extreme position for tying up a body.
Preferably, balancing spring is also set up between the upper limit plate and the lower limiting board, the balancing spring also connects
Be connected to adjustment ring, the adjustment ring can the preload length to the balancing spring be adjusted.
Preferably, the binding head further includes locking spring, and one end of the locking spring is connected with the head housing, institute
The other end for stating locking spring is connected with the briquetting, and the locking spring is connected with adjusting jackscrew, and the adjusting jackscrew can
The locking spring is pre-tightened.
Preferably, sliding groove is arranged in the pressing plate, and the clamping piston outer cover is equipped with wear ring, the wear ring sliding
It is set in the sliding groove, the cavity between the top of the clamping piston and the sliding groove and external compression gas source phase
Even, positioning plate is additionally provided on the pressing plate, the positioning plate can prevent the clamping piston from deviating from, and the clamping piston is worn
It crosses the positioning plate and stretches out the sliding groove, also set up air flue in the positioning plate, the air flue is connected with the sliding groove.
Preferably, the rotatable mechaninism further includes grating rule displacement sensor and approaches switch, described close to switch and institute
It states voice coil motor to be connected, the grating rule displacement sensor can detect the displacement of the pressing plate, the grating scale position
Displacement sensor is connected with described close to switching signal.
Preferably, two deep groove ball bearings are arranged in the crawl bar and described tie up between a body.
The present invention achieves following technical effect compared with the existing technology: pivot angle of the invention is separable and binding power is adjustable
The binding mechanism of section, including binding head, binding head include crawl bar, tie up a body, head housing, briquetting and driving lever, grab bar and tie up
Head body is rotatedly connected, and ties up a body and is connected with the sliding of head housing, ties up the opposite glide direction of a body and head housing and the axis of crawl bar
Line direction is parallel, and crawl bar is connected with briquetting, and driving lever is set on briquetting;Pneumatic loading pressure head, pneumatic loading pressure head include
Pressing plate and clamping piston, clamping piston are set to briquetting top, and clamping piston can apply pressure, clamping piston and pressure to briquetting
Plate sliding is connected, and the cavity between clamping piston and pressing plate is connected with compressed gas source;Press mechanism, press mechanism include compressing base
Seat and voice coil motor, voice coil motor, which is fixed on, to be compressed on pedestal, and voice coil motor is connected with pressing plate;Rotatable mechaninism, rotatable mechaninism packet
Driving lever motor, terminal pad and connecting rod are included, connecting rod is connected by terminal pad with driving lever motor, and connecting rod is connected with driving lever, is dialled
Bar motor is able to drive driving lever rotation.Starting load head can be able to drive binding head crawl or binding chip, and pass through control
The pressure of gas-pressurized processed can adjust the lower pressure of clamping piston, effectively improve the precision of chip package, and rotatable mechaninism can
Crawl bar rotation is driven, rotatable mechaninism, which is located at, to be tied up outside a body, effectively solves the problems, such as that driving lever motor cabling is wound.
Detailed description of the invention
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention
Example, for those of ordinary skill in the art, without any creative labor, can also be according to these attached drawings
Obtain other attached drawings.
Fig. 1 is the positive structure diagram that pivot angle of the invention separated and bound the adjustable binding mechanism of power;
Fig. 2 is the left view structural representation that pivot angle of the invention separated and bound the adjustable binding mechanism of power;
Fig. 3 is the right side structural representation that pivot angle of the invention separated and bound the adjustable binding mechanism of power;
Fig. 4 is the structural schematic diagram for the binding head that pivot angle of the invention separated and bound the adjustable binding mechanism of power;
Fig. 5 is the knot of another angle for the binding head that pivot angle of the invention separated and bound the adjustable binding mechanism of power
Structure schematic diagram;
Fig. 6 is the structural schematic diagram for the pressing plate that pivot angle of the invention separated and bound the adjustable binding mechanism of power;
Fig. 7 is the cutting structural representation for the pressing plate that pivot angle of the invention separated and bound the adjustable binding mechanism of power
Figure;
Wherein, 1 is binding head, and 101 be crawl bar, and 102 be adjustment ring, and 103 be head housing, and 104 be guiding pair, and 105 are
Driving lever, 106 be briquetting, and 107 is adjust jackscrew, and 108 be locking spring, and 109 be lower limiting board, and 110 is tie up a body, and 111 be flat
Weigh spring, and 112 be upper limit plate, and 2 be pneumatic loading pressure head, and 201 be pressing plate, and 202 be clamping piston, and 203 be wear ring, and 3 are
Press mechanism, 301 is compress pedestal, and 302 is are grating rule displacement sensor close to switch, 303, and 304 be voice coil motor, and 4 are
Rotatable mechaninism, 401 be driving lever motor, and 402 be connecting rod, and 403 be terminal pad.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
And a kind of binding power adjustable binding mechanism separable the object of the present invention is to provide pivot angle, it is above-mentioned existing to solve
The problem of with the presence of technology, binding head is set to move up and down, to bind power adjustable, crawl angle is rotatable, improves chip envelope
The precision of dress.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing and specific real
Applying mode, the present invention is described in further detail.
Please refer to Fig. 1-7, wherein Fig. 1 is that pivot angle of the invention separates and binds the adjustable binding mechanism of power just
Depending on structural schematic diagram, Fig. 2 is the left view structural representation that pivot angle of the invention separated and bound the adjustable binding mechanism of power,
Fig. 3 is the right side structural representation that pivot angle of the invention separated and bound the adjustable binding mechanism of power, and Fig. 4 is of the invention
Pivot angle is separable and binds the structural schematic diagram of the binding head of the adjustable binding mechanism of power, and Fig. 5 is that pivot angle of the invention can divide
From and bind the adjustable binding mechanism of power binding head another angle structural schematic diagram, Fig. 6 is pivot angle of the invention
The structural schematic diagram of pressing plate that is separable and binding the adjustable binding mechanism of power, Fig. 7 be pivot angle of the invention it is separable and
Bind the cutting structural schematic diagram of the pressing plate of the adjustable binding mechanism of power.
The present invention provides that a kind of pivot angle is separable and the binding adjustable binding mechanism of power, comprising:
Binding head 1, binding head 1 include crawl bar 101, tie up a body 110, head housing 103, briquetting 106 and driving lever 105, grab
It takes bar 101 to be rotatedly connected with a body 110 is tied up, ties up a body 110 and be connected with the sliding of head housing 103, tie up a body 110 and head housing 103
Opposite glide direction with crawl the axis direction of bar 101 it is parallel, crawl bar 101 be connected with briquetting 106, driving lever 105 setting
In on briquetting 106;Crawl bar 101 can rotate, and move up and down in addition, tying up a body 110 and being able to drive crawl bar 101, realize core
Piece crawl binding.
Pneumatic loading pressure head 2, pneumatic loading pressure head 2 includes pressing plate 201 and clamping piston 202, and clamping piston 202 is set to
106 top of briquetting, clamping piston 202 can apply pressure to briquetting 106, and clamping piston 202 is connected with the sliding of pressing plate 201, presses
Cavity between tight piston 202 and pressing plate 201 is connected with compressed gas source;Pressing plate 201 is able to drive clamping piston 202 for briquetting
106 pressures realize that crawl bar 101 moves up and down, in addition, can adjust clamping piston 202 by the pressure of control gas-pressurized
Lower pressure.
Press mechanism 3, press mechanism 3 include that compression pedestal 301 and voice coil motor 304, voice coil motor 304 are fixed on compression
On pedestal 301, voice coil motor 304 is connected with pressing plate 201, and voice coil motor 304 is moved with dynamic pressure plate 201, then drives briquetting 106
Movement.
Rotatable mechaninism 305, rotatable mechaninism 305 include 105 motor 401 of driving lever, terminal pad 403 and connecting rod 402, connecting rod
402 are connected by terminal pad 403 with 105 motor 401 of driving lever, and connecting rod 402 is connected with driving lever 105,105 motor of driving lever, 401 energy
Enough driving lever 105 is driven to rotate, driving lever 105 drives crawl bar 101 to rotate.
Wherein, binding head 1 further includes guiding pair 104, ties up a body 110 and is connected by guiding pair 104 with headstock sliding is tied up,
In present embodiment, guiding pair 104 uses crossed roller guiding pair 104, improves sliding precision.
Specifically, binding head 1 further includes upper limit plate 112 and lower limiting board 109, upper limit plate 112 and lower limiting board 109
It is both secured to tie up on headstock, upper limit plate 112 and lower limiting board 109 are respectively arranged at the upper and lower ends for tying up a body 110, upper limit
Plate 112 and lower limiting board 109 can limit the extreme position for tying up a body 110, avoid tying up 110 hyperkinesia of a body.
More specifically, balancing spring 111 is also set up between upper limit plate 112 and lower limiting board 109,111 energy of balancing spring
Enough counteractings tie up a body 110 and grab gravity and revolution centrifugal force, balancing spring 111 of the bar 101 on binding direction and are also connected with
Have an adjustment ring 102, adjustment ring 102 can the preload length to balancing spring 111 be adjusted.
In addition, binding head 1 further includes locking spring 108, one end of locking spring 108 is connected with head housing 103, locking bullet
The other end of spring 108 is connected with briquetting 106, and locking spring 108 can prevent crawl bar 101 from arbitrarily rotating, and locking spring 108 connects
It is connected to and adjusts jackscrew 107, locking spring 108 can be pre-tightened by adjusting jackscrew 107, and adjusting jackscrew 107 can also be by driving lever
105 are adjusted to predetermined position.
Further, sliding groove is arranged in pressing plate 201, and 202 outer cover of clamping piston is equipped with wear ring 203, and wear ring 203 is sliding
Dynamic to be set in sliding groove, the cavity between the top and sliding groove of clamping piston 202 is connected with external compression gas source, pressing plate
Positioning plate is additionally provided on 201, positioning plate can prevent clamping piston 202 from deviating from, and clamping piston 202 passes through positioning plate and stretches out cunning
Slot is moved, also sets up air flue in positioning plate, air flue is connected with sliding groove.By changing the size of input compressed air pressure, adjust
The relative position of clamping piston 202 and pressing plate 201 is saved, to achieve the purpose that adjust the lower pressure of clamping piston 202.
Further, rotatable mechaninism 305 further includes grating rule displacement sensor 303 and close switch 302, close to switch
302 are connected with voice coil motor 304, and grating rule displacement sensor 303 can detect the displacement of pressing plate 201, grating scale position
Displacement sensor 303 is connected with close to 302 signal of switch, bind power size can also by grating rule displacement sensor 303 into
Row control.Sealed in unit of the invention also sets up control mechanism, grating rule displacement sensor 303, close switch 302 and control
The electric control elements such as the valve being connected with compressed gas source are connected with control mechanism, and the binding power size of control mechanism how is arranged,
It does not discuss herein.
It grabs bar 101 and ties up two deep groove ball bearings of setting between a body 110, setting deep groove ball bearing makes to grab bar 101
While rotating more smooth, additionally it is possible to play the role of positioning, two deep groove ball bearings are respectively arranged at the upper and lower of crawl bar 101
Both ends.
Pivot angle of the invention is separable and the binding adjustable binding mechanism of power, binding head 1 can be applicable to specific anode
It in structure, adapts to wafer and is separated with pannel platform, take piece and tie up the main machine structure that piece movement independently executes, rotatable mechaninism 305
Positioned at tying up outside a body 110, effectively solve the problems, such as that 105 motor of driving lever, 401 cabling is wound;And pass through the pressure of control gas-pressurized
The lower pressure that clamping piston 202 can be adjusted, effectively improves the precision of chip package.
Specific examples are applied in the present invention, and principle and implementation of the present invention are described, above embodiments
Illustrate to be merely used to help understand method and its core concept of the invention;At the same time, for those skilled in the art, according to
According to thought of the invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification
It should not be construed as limiting the invention.
Claims (8)
1. a kind of pivot angle is separable and binds the adjustable binding mechanism of power characterized by comprising
Binding head, the binding head include crawl bar, tie up a body, head housing, briquetting and driving lever, and the crawl bar ties up head with described
Body is rotatedly connected, and a body of tying up is connected with head housing sliding, the opposite sliding side for tying up a body and the head housing
To parallel with the crawl axis direction of bar, the crawl bar is connected with the briquetting, and the driving lever is set to the pressure
On block;
Pneumatic loading pressure head, the pneumatic loading pressure head includes pressing plate and clamping piston, and the clamping piston is set to the pressure
Block top, the clamping piston can apply pressure to the briquetting, and the clamping piston is connected with pressing plate sliding, described
Cavity between clamping piston and the pressing plate is connected with compressed gas source;
Press mechanism, the press mechanism include that compression pedestal and voice coil motor, the voice coil motor are fixed on the compression base
On seat, the voice coil motor is connected with the pressing plate;
Rotatable mechaninism, the rotatable mechaninism include driving lever motor, terminal pad and connecting rod, and the connecting rod passes through terminal pad and institute
It states driving lever motor to be connected, the connecting rod is connected with the driving lever, and the driving lever motor is able to drive the driving lever rotation.
2. pivot angle according to claim 1 is separable and binds the adjustable binding mechanism of power, it is characterised in that: described to tie up
Determining head further includes guiding pair, it is described tie up a body by the guiding pair with it is described tie up headstock slide be connected.
3. pivot angle according to claim 2 is separable and binds the adjustable binding mechanism of power, it is characterised in that: described to tie up
Determining head further includes upper limit plate and lower limiting board, the upper limit plate and the lower limiting board be both secured to it is described tie up on headstock,
The upper limit plate and the lower limiting board are respectively arranged at the upper and lower ends for tying up a body, the upper limit plate and it is described under
Limit plate can limit the extreme position for tying up a body.
4. pivot angle according to claim 3 is separable and binds the adjustable binding mechanism of power, it is characterised in that: on described
Balancing spring is also set up between limit plate and the lower limiting board, the balancing spring is also connected with adjustment ring, the adjustment ring
Can the preload length to the balancing spring be adjusted.
5. pivot angle according to claim 4 is separable and binds the adjustable binding mechanism of power, it is characterised in that: described to tie up
Determining head further includes locking spring, and one end of the locking spring is connected with the head housing, the other end of the locking spring with
The briquetting is connected, and the locking spring is connected with adjusting jackscrew, and the adjusting jackscrew can carry out the locking spring pre-
Tightly.
6. pivot angle according to claim 1 is separable and binds the adjustable binding mechanism of power, it is characterised in that: the pressure
Sliding groove is arranged in plate, and the clamping piston outer cover is equipped with wear ring, and the wear ring is slideably positioned in the sliding groove, institute
The cavity stated between the top of clamping piston and the sliding groove is connected with external compression gas source, and it is fixed to be additionally provided on the pressing plate
Position plate, the positioning plate can prevent the clamping piston from deviating from, and the clamping piston passes through the positioning plate and stretches out the cunning
Slot is moved, also sets up air flue in the positioning plate, the air flue is connected with the sliding groove.
7. pivot angle according to claim 1 is separable and binds the adjustable binding mechanism of power, it is characterised in that: the pendulum
Rotation mechanism further includes grating rule displacement sensor and close switch, described to be connected close to switch with the voice coil motor, the light
Grid rule displacement sensor can detect the displacement of the pressing plate, the grating rule displacement sensor and the close switch
Signal is connected.
8. pivot angle according to claim 1-7 is separable and the binding adjustable binding mechanism of power, feature exist
In: two deep groove ball bearings are arranged in the crawl bar and described tie up between a body.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201910163609.3A CN110246778B (en) | 2019-03-05 | 2019-03-05 | Binding mechanism with separable swing angle and adjustable binding force |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201910163609.3A CN110246778B (en) | 2019-03-05 | 2019-03-05 | Binding mechanism with separable swing angle and adjustable binding force |
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CN110246778A true CN110246778A (en) | 2019-09-17 |
CN110246778B CN110246778B (en) | 2021-03-09 |
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CN201910163609.3A Active CN110246778B (en) | 2019-03-05 | 2019-03-05 | Binding mechanism with separable swing angle and adjustable binding force |
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Cited By (1)
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CN111605283A (en) * | 2020-06-24 | 2020-09-01 | 深圳市鑫三力自动化设备有限公司 | Machine is bound in wearing of dysmorphism curved surface duplex position |
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US6145189A (en) * | 1997-04-30 | 2000-11-14 | Seagate Technology Llc | Apparatus for assembling magnets for a voice coil motor |
JP2000208549A (en) * | 1999-01-14 | 2000-07-28 | Kaijo Corp | Bonding device |
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CN111605283A (en) * | 2020-06-24 | 2020-09-01 | 深圳市鑫三力自动化设备有限公司 | Machine is bound in wearing of dysmorphism curved surface duplex position |
CN111605283B (en) * | 2020-06-24 | 2023-07-18 | 深圳市鑫三力自动化设备有限公司 | Wearing binding machine of dysmorphism curved surface duplex position |
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CN110246778B (en) | 2021-03-09 |
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