CN110213705A - MEMS loudspeaker - Google Patents
MEMS loudspeaker Download PDFInfo
- Publication number
- CN110213705A CN110213705A CN201910463293.XA CN201910463293A CN110213705A CN 110213705 A CN110213705 A CN 110213705A CN 201910463293 A CN201910463293 A CN 201910463293A CN 110213705 A CN110213705 A CN 110213705A
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- equal
- mems loudspeaker
- shell
- sound channel
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Classifications
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
The invention belongs to electro-acoustic product technical field more particularly to a kind of MEMS loudspeakers, including shell, and annular groove is surrounded on shell, are equipped on shell along the entrant sound channel that the axis direction of annular groove extends, and further include the piezoelectricity vibrating diaphragm that lid is located on the notch of annular groove.MEMS loudspeaker is electrically connected with electronic product, piezoelectricity vibrating diaphragm can be made to generate corresponding vibration to make a sound by the variation of voltage signal, when use, due to making piezoelectricity vibrating diaphragm face user ear, the sound that MEMS loudspeaker can be issued is transferred directly to user ear, the people that sound spreads around and interferes surrounding can be reduced, and the entrant sound channel for being transferred to external sound at user ear is equipped on MEMS loudspeaker, external sound can pass through entrant sound channel and be transferred to user ear, the MEMS loudspeaker of the embodiment of the present invention both can guarantee that the sound that MEMS loudspeaker issues was transferred directly at user ear without the people around interfering, external sound will not be hindered to be transferred to user ear again.
Description
Technical field
The invention belongs to electro-acoustic product technical field more particularly to a kind of MEMS loudspeakers.
Background technique
Loudspeaker is a kind of electro-acoustic transducer device, with the development of science and technology, the electronics that is applied to of MEMS loudspeaker gradually produces
On product, MEMS is the abbreviation of Micro-Electro-Mechanical System, i.e. MEMS.
Currently, realizing audio playing function, loudspeaking by the way that loudspeaker or earplug are arranged on AR class product, VR class product
Device is the component of loudspeaker or earplug made a sound.Using loudspeaker form when, be difficult to accomplish in direction of sound propagation only
It hears self, does not interfere the people of surrounding；Using earplug form when, and external sound can be hindered to be transferred to user, influence using.
Summary of the invention
The purpose of the present invention is to provide a kind of MEMS loudspeaker, the sound direction that both can guarantee that MEMS loudspeaker issued is used
Family ear will not hinder external sound to be transferred to user ear without the people around interfering.
The invention is realized in this way a kind of MEMS loudspeaker, the MEMS loudspeaker includes shell, on the housing
Annular groove is surrounded, is equipped on the housing along the entrant sound channel that the axis direction of the annular groove extends, further includes that lid is located at
Piezoelectricity vibrating diaphragm on the notch of the annular groove.
As an improvement the entrant sound channel is located on the inside of the annular groove.
As an improvement the piezoelectricity vibrating diaphragm includes flat membrane portion in a curved state, is fixedly connected on outside the flat membrane portion
The infolding ring portion for being folded outward ring portion and be fixedly connected on the flat membrane portion inner circumferential side on all sides, it is described to be folded outward ring portion
It is fixedly connected with the lateral wall of the annular groove, the infolding ring portion is fixedly connected with the inner sidewall of the annular groove.
As an improvement the shell include outer ring shell annular in shape, with the outer ring shell coaxial arrangement and
Inner ring shell annular in shape and the bottom plate being connected between the outer ring shell and the end of the inner ring shell, it is described outer
Circle shell, the inner ring shell and the bottom plate surround the annular groove, the piezoelectricity vibrating diaphragm be connected to the outer ring shell,
Between the end of the inner ring shell far from the bottom plate, the inner ring shell surrounds the entrant sound channel.
As an improvement the shell is circular annular form, the annular groove, the piezoelectricity vibrating diaphragm is corresponding is set as round
Shape is cyclic annular, and the entrant sound channel is round poroid.
As an improvement the outer diameter of the MEMS loudspeaker, which is more than or equal to 4mm, is less than or equal to 30mm, the MEMS loudspeaking
The axial width of device is more than or equal to 1mm and is less than or equal to 5mm, and the internal diameter in the entrant sound channel is more than or equal to 2mm and is less than or equal to 10mm.
As an improvement the shell is elliptical annular, the annular groove, the piezoelectricity vibrating diaphragm is corresponding is set as
Elliptical annular, the entrant sound channel are that ellipse is poroid.
As an improvement the long axial dimension of MEMS loudspeaker periphery, which is more than or equal to 6mm, is less than or equal to 30mm, institute
The short axial size for stating MEMS loudspeaker periphery is more than or equal to 3mm and is less than or equal to 15mm, the axial width of the MEMS loudspeaker
It is less than or equal to 5mm more than or equal to 1mm, the long axial dimension in the entrant sound channel is more than or equal to 3mm and is less than or equal to 15mm, described
The short axial size in sound channel is more than or equal to 1mm and is less than or equal to 5mm.
As an improvement the shell is square ring, the annular groove, the corresponding side of being set as of the piezoelectricity vibrating diaphragm
Shape is cyclic annular, and the entrant sound channel is rectangular poroid.
As an improvement the side edge length size of MEMS loudspeaker periphery, which is more than or equal to 5mm, is less than or equal to 30mm,
The axial width of the MEMS loudspeaker is more than or equal to 1mm and is less than or equal to 5mm, the side edge length size of the entrant sound channel 12a
It is less than or equal to 15mm more than or equal to 1mm.
By adopting the above-described technical solution, MEMS loudspeaker of the invention includes shell, annular groove is surrounded on shell,
It is equipped on shell along the entrant sound channel that the axis direction of annular groove extends, further includes the piezoelectricity that lid is located on the notch of annular groove
Vibrating diaphragm.MEMS loudspeaker is electrically connected with electronic product, piezoelectricity vibrating diaphragm can be made to generate phase by the variation of voltage signal
The vibration answered is to make a sound, in use, can issue MEMS loudspeaker due to making piezoelectricity vibrating diaphragm face user ear
Sound is transferred directly to user ear, can reduce the people that sound spreads around and interferes surrounding；And in MEMS loudspeaker
It is equipped with the entrant sound channel for being transferred to external sound at user ear, external sound can pass through entrant sound channel and be transferred to
User ear, the sound that the MEMS loudspeaker of the embodiment of the present invention both can guarantee that MEMS loudspeaker issued are transferred directly to user's ear
Without the people around interfering at portion, and external sound will not be hindered to be transferred to user ear, it can be achieved that the sound that loudspeaker issues
The input of the double sound source of sound and external sound.
Detailed description of the invention
Fig. 1 is the schematic cross-sectional view of the MEMS loudspeaker of first embodiment of the invention；
Fig. 2 is the overlooking structure diagram of the MEMS loudspeaker of first embodiment of the invention；
Fig. 3 is the overlooking structure diagram of the MEMS loudspeaker of second embodiment of the invention；
Fig. 4 is the overlooking structure diagram of the MEMS loudspeaker of third embodiment of the invention；
Wherein, 10a, shell, 10b, shell, 10c, shell, 11, annular groove, 12a, entrant sound channel, 12b, entrant sound channel,
12c, entrant sound channel, 13, outer ring shell, 14, inner ring shell, 15, bottom plate, 20a, piezoelectricity vibrating diaphragm, 20b, piezoelectricity vibrating diaphragm, 20c, pressure
Electric vibrating diaphragm, 21, flat membrane portion, 22, be folded outward ring portion, 23, infolding ring portion.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
Fig. 1 to Fig. 4 is the structural schematic diagram of the MEMS loudspeaker of the embodiment of the present invention, wherein Fig. 1 shows the present invention the
The schematic cross-sectional view of the MEMS loudspeaker of one embodiment, Fig. 2 shows the MEMS loudspeakers of first embodiment of the invention
Overlooking structure diagram, Fig. 3 show the overlooking structure diagram of the MEMS loudspeaker of second embodiment of the invention, and Fig. 4 is shown
The overlooking structure diagram of the MEMS loudspeaker of third embodiment of the invention.For the ease of statement, only gived in figure and this
Invent relevant part.
First embodiment
By Fig. 1 and Fig. 2 it is found that the MEMS loudspeaker includes shell 10a, annular groove 11 is surrounded on shell 10a, in shell
10a is equipped with the entrant sound channel 12a extended along the axis direction of annular groove 11, further includes that lid is located on the notch of annular groove 11
Piezoelectricity vibrating diaphragm 20a.
MEMS loudspeaker is electrically connected with electronic product, piezoelectricity vibrating diaphragm 20a can be made by the variation of voltage signal
Corresponding vibration is generated to make a sound.In use, MEMS can be raised due to making piezoelectricity vibrating diaphragm 20a face user ear
The sound that sound device issues is transferred directly to user ear, can reduce the people that sound spreads around and interferes surrounding；It is same with this
When, it is equipped with entrant sound channel 12a for being transferred to external sound at user ear on MEMS loudspeaker, external sound can be with
Across entrant sound channel, 12a is transferred to user ear.The MEMS loudspeaker of the embodiment of the present invention both can guarantee that MEMS loudspeaker issued
Sound be transferred directly at user ear and external sound will not be hindered to be transferred to user's ear without the people around interfering
Portion is, it can be achieved that the double sound source of sound and external sound that loudspeaker issues inputs.
In the present embodiment, the inside of annular groove 11 is arranged in entrant sound channel 12a.
In the present embodiment, piezoelectricity vibrating diaphragm 20a includes flat membrane portion 21 in a curved state, is fixedly connected on 21 periphery of flat membrane portion
The infolding ring portion 23 for being folded outward ring portion 22 and be fixedly connected on 21 inner circumferential side of flat membrane portion on side, be folded outward ring portion 22 with
The lateral wall of annular groove 11 is fixedly connected, infolding ring portion 23 is fixedly connected with the inner sidewall of annular groove 11, is collected in flat membrane portion 21
At there is MEMS.Be arranged be folded outward ring portion 22, infolding ring portion 23 is not only convenient for the fixed installation of piezoelectricity vibrating diaphragm 20a, and can be improved
Rigidity enhances piezoelectricity vibrating diaphragm 20a vibration performance.
In general, piezoelectricity vibrating diaphragm 20a is adhesively fixed with shell 10a, particular by UV glue sticking.
In the present embodiment, shell 10a includes outer ring shell 13 annular in shape, is coaxially disposed with outer ring shell 13 and is in
Cricoid inner ring shell 14 and the bottom plate 15 being connected between outer ring shell 13 and the end of inner ring shell 14, outer ring shell
13, inner ring shell 14 and bottom plate 15 surround annular groove 11, and it is remote that piezoelectricity vibrating diaphragm 20a is connected to outer ring shell 13, inner ring shell 14
Between end from bottom plate 15, inner ring shell 14 surrounds entrant sound channel 12a.
Specifically, it is folded outward that ring portion 22 is adhered on outer ring shell 13, infolding ring portion 23 is adhered on inner ring shell 14.
In the present embodiment, shell 10a is circular annular form, and annular groove 11, piezoelectricity vibrating diaphragm 20a is corresponding is provided in round ring
Shape, entrant sound channel 12a are round poroid.In general, the outside diameter d 1 of MEMS loudspeaker, which is more than or equal to 4mm, is less than or equal to 30mm, MEMS
The axial width H of loudspeaker is more than or equal to 1mm and is less than or equal to 5mm, and the internal diameter d2 of entrant sound channel 12a is more than or equal to 2mm and is less than etc.
In 10mm.
Second embodiment
From the figure 3, it may be seen that the embodiment and first embodiment are essentially identical, the difference is that:
Shell 10b is elliptical annular, and annular groove 11, piezoelectricity vibrating diaphragm 20b are corresponding to be set as elliptical annular, and entrant sound is logical
Road 12b is that ellipse is poroid.In general, the long axial dimension A2 of MEMS loudspeaker periphery, which is more than or equal to 6mm, is less than or equal to 30mm,
The short axial size A1 of MEMS loudspeaker periphery is more than or equal to 3mm and is less than or equal to 15mm, and the axial width H of MEMS loudspeaker is greater than
It is less than or equal to 5mm equal to 1mm, the long axial dimension B2 of entrant sound channel 12b is more than or equal to 3mm and is less than or equal to 15mm, entrant sound channel
The short axial size B1 of 12a is more than or equal to 1mm and is less than or equal to 5mm.
3rd embodiment
As shown in Figure 4, the embodiment and first embodiment are essentially identical, the difference is that:
Shell 10c is square ring, and annular groove 11, piezoelectricity vibrating diaphragm 20c are corresponding to be set as square ring, entrant sound channel
12c is rectangular poroid.In general, the side edge length C2 of MEMS loudspeaker periphery, which is more than or equal to 5mm, is less than or equal to 30mm, MEMS loudspeaking
The axial width H of device is more than or equal to 1mm and is less than or equal to 5mm, and it is small that the side edge length size C1 of entrant sound channel 12c is more than or equal to 1mm
In equal to 15mm.
The foregoing is merely some embodiments of the present invention, are not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (10)
1. a kind of MEMS loudspeaker, including shell, which is characterized in that surround annular groove on the housing, on the housing
Entrant sound channel equipped with the axis direction extension along the annular groove, further includes the piezoelectricity that lid is located on the notch of the annular groove
Vibrating diaphragm.
2. MEMS loudspeaker according to claim 1, which is characterized in that the entrant sound channel is located in the annular groove
Side.
3. MEMS loudspeaker according to claim 1, which is characterized in that the piezoelectricity vibrating diaphragm includes flat membrane in a curved state
Portion is fixedly connected on being folded outward ring portion and be fixedly connected on the flat membrane portion inner circumferential side on flat membrane portion periphery side
On infolding ring portion, it is described be folded outward ring portion be fixedly connected with the lateral wall of the annular groove, the infolding ring portion and the annular
The inner sidewall of slot is fixedly connected.
4. MEMS loudspeaker according to claim 3, which is characterized in that the shell include outer ring shell annular in shape,
With outer ring shell coaxial arrangement and inner ring shell annular in shape and be connected to the outer ring shell and the inner ring shell
Bottom plate between the end of body, the outer ring shell, the inner ring shell and the bottom plate surround the annular groove, the pressure
Electric vibrating diaphragm is connected between the outer ring shell, the end of the inner ring shell far from the bottom plate, and the inner ring shell surrounds
The entrant sound channel.
5. MEMS loudspeaker according to claim 1, which is characterized in that the shell be circular annular form, the annular groove,
The piezoelectricity vibrating diaphragm is corresponding to be provided in round ring-type, and the entrant sound channel is round poroid.
6. MEMS loudspeaker according to claim 5, which is characterized in that the outer diameter of the MEMS loudspeaker is more than or equal to
4mm is less than or equal to 30mm, and the axial width of the MEMS loudspeaker is more than or equal to 1mm and is less than or equal to 5mm, the entrant sound channel
Internal diameter is more than or equal to 2mm and is less than or equal to 10mm.
7. MEMS loudspeaker according to claim 1, which is characterized in that the shell is elliptical annular, the annular
Slot, the piezoelectricity vibrating diaphragm are corresponding to be set as elliptical annular, and the entrant sound channel is that ellipse is poroid.
8. MEMS loudspeaker according to claim 7, which is characterized in that the long axial dimension of MEMS loudspeaker periphery
It is less than or equal to 30mm more than or equal to 6mm, the short axial size of MEMS loudspeaker periphery is less than or equal to more than or equal to 3mm
15mm, the axial width of the MEMS loudspeaker are more than or equal to 1mm and are less than or equal to 5mm, the long axial dimension in the entrant sound channel
It is less than or equal to 15mm more than or equal to 3mm, the short axial size in the entrant sound channel is more than or equal to 1mm and is less than or equal to 5mm.
9. MEMS loudspeaker according to claim 1, which is characterized in that the shell be square ring, the annular groove,
The piezoelectricity vibrating diaphragm is corresponding to be set as square ring, and the entrant sound channel is rectangular poroid.
10. MEMS loudspeaker according to claim 9, which is characterized in that the side edge length of MEMS loudspeaker periphery
Size is more than or equal to 5mm and is less than or equal to 30mm, and the axial width of the MEMS loudspeaker is more than or equal to 1mm and is less than or equal to 5mm, institute
The side edge length size for stating entrant sound channel 12a is more than or equal to 1mm and is less than or equal to 15mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910463293.XA CN110213705B (en) | 2019-05-30 | 2019-05-30 | MEMS speaker |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910463293.XA CN110213705B (en) | 2019-05-30 | 2019-05-30 | MEMS speaker |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110213705A true CN110213705A (en) | 2019-09-06 |
| CN110213705B CN110213705B (en) | 2022-08-16 |
Family
ID=67789625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910463293.XA Active CN110213705B (en) | 2019-05-30 | 2019-05-30 | MEMS speaker |
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| Country | Link |
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| CN (1) | CN110213705B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110996226A (en) * | 2019-11-21 | 2020-04-10 | 瑞声科技(新加坡)有限公司 | Sound production device |
| CN111405423A (en) * | 2019-11-21 | 2020-07-10 | 瑞声科技(新加坡)有限公司 | Loudspeaker |
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| KR20110115452A (en) * | 2010-04-15 | 2011-10-21 | 잘만테크 주식회사 | Earphone apparatus |
| CN205584427U (en) * | 2013-09-09 | 2016-09-14 | 朴充满 | Personal sound equipment with through -hole portion and noise muting function that disappears |
| CN106688245A (en) * | 2014-05-14 | 2017-05-17 | 悠声股份有限公司 | MEMS loudspeaker having an actuator structure and a diaphragm spaced apart therefrom |
| CN206620292U (en) * | 2017-03-07 | 2017-11-07 | 歌尔科技有限公司 | A kind of sound-producing device and electronic equipment |
| CN207926919U (en) * | 2018-01-26 | 2018-09-28 | 安徽奥飞声学科技有限公司 | MEMS piezoelectric speakers with soft support construction |
| CN208489986U (en) * | 2018-08-13 | 2019-02-12 | 汉桑（南京）科技有限公司 | Passive radiator |
| CN208836358U (en) * | 2018-09-30 | 2019-05-07 | 深圳瑞利声学技术股份有限公司 | Passive radiation speaker |
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2019
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20110115452A (en) * | 2010-04-15 | 2011-10-21 | 잘만테크 주식회사 | Earphone apparatus |
| CN205584427U (en) * | 2013-09-09 | 2016-09-14 | 朴充满 | Personal sound equipment with through -hole portion and noise muting function that disappears |
| CN106688245A (en) * | 2014-05-14 | 2017-05-17 | 悠声股份有限公司 | MEMS loudspeaker having an actuator structure and a diaphragm spaced apart therefrom |
| CN206620292U (en) * | 2017-03-07 | 2017-11-07 | 歌尔科技有限公司 | A kind of sound-producing device and electronic equipment |
| CN207926919U (en) * | 2018-01-26 | 2018-09-28 | 安徽奥飞声学科技有限公司 | MEMS piezoelectric speakers with soft support construction |
| CN208489986U (en) * | 2018-08-13 | 2019-02-12 | 汉桑（南京）科技有限公司 | Passive radiator |
| CN208836358U (en) * | 2018-09-30 | 2019-05-07 | 深圳瑞利声学技术股份有限公司 | Passive radiation speaker |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110996226A (en) * | 2019-11-21 | 2020-04-10 | 瑞声科技(新加坡)有限公司 | Sound production device |
| CN111405423A (en) * | 2019-11-21 | 2020-07-10 | 瑞声科技(新加坡)有限公司 | Loudspeaker |
| CN111405422A (en) * | 2019-11-21 | 2020-07-10 | 瑞声科技(新加坡)有限公司 | Sound production device |
| CN111405422B (en) * | 2019-11-21 | 2021-11-12 | 瑞声科技(新加坡)有限公司 | Sound production device |
| CN110996226B (en) * | 2019-11-21 | 2021-12-24 | 瑞声科技(新加坡)有限公司 | Sound production device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110213705B (en) | 2022-08-16 |
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