CN110186942A - Film assembly examines container and electron microscope - Google Patents
Film assembly examines container and electron microscope Download PDFInfo
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- CN110186942A CN110186942A CN201810155124.5A CN201810155124A CN110186942A CN 110186942 A CN110186942 A CN 110186942A CN 201810155124 A CN201810155124 A CN 201810155124A CN 110186942 A CN110186942 A CN 110186942A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/203—Measuring back scattering
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- Crystallography & Structural Chemistry (AREA)
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Abstract
The present invention provides a kind of film assembly, examines container and electron microscope.The inspection container includes a main body, a film assembly and a lid.Main body has an accommodation groove to accommodate sample.One open end of film assembly covering accommodation groove.Film assembly includes a supporting element and a film.Supporting element has a first surface and a second surface, and wherein supporting element is tabular, and has a first through hole, runs through first surface and second surface.Film is set to the second surface side of supporting element, and has one second through-hole, wherein the second through-hole corresponds to first through hole, and the second through-hole passes through for a charged particle beam.Lid is removably in conjunction with main body, to fix film assembly.The film assembly of above-mentioned inspection container is easily changed and only generates less consumptive material.A kind of electron microscope using above-mentioned inspection container is also disclosed simultaneously.The present invention is easily changed film assembly and can only be generated a small amount of consumptive material with the fixed film of flat supporting element, operator.
Description
Technical field
The present invention is in relation to a kind of inspection technology using electron microscope, especially a kind of sample that can be examined under normal pressure
Film assembly, examine container and electron microscope.
Background technique
Known electron microscope is sample survey under vacuum conditions, therefore can not examine the sample of normal pressure state, example
It such as include liquid or gaseous sample.In order to overcome this defect, has been developed utilize the transparent film of charged particle beam at present
Separate the electron microscope of vacuum environment and non-vacuum environment, that is, film to the region between electron gun is vacuum environment,
And film to the region of sample room then can be non-vacuum environment.According to this structure, electron microscope can be examined under normal pressure
Sample, such as dispersity, the gas in reaction or the biological sample of living body of suspended particles etc..
However, inevitably, film will receive the bombardment of charged particle beam and damaged or dirty because contacting sample.It passes
On system, film is to be pasted on bulk, then bulk is locked in predetermined position with multiple screws.Therefore, film is replaced every time
Program is more cumbersome and generates a large amount of consumptive material.
In view of this, how easily to replace film is the target that current pole need to make great efforts.
Summary of the invention
The present invention provides a kind of film assembly, is set to film on flat supporting element, this film assembly is
Can a lid be fixed in a main body and formed one inspection container, so that electron microscope is tested.Therefore, the present invention is more
Generated consumable quantity can be greatly decreased when changing film, and operator can easily replace film assembly.
The film assembly of one embodiment of the invention includes a supporting element and a film.Supporting element have a first surface with
And an opposite second surface, wherein supporting element is tabular, and has a first through hole, runs through first surface and second
Surface.Film is set to the second surface side of supporting element, and has one second through-hole, leads to wherein the second through-hole corresponds to first
Hole, and the second through-hole passes through for a charged particle beam.
The inspection container of another embodiment of the present invention includes a main body, a film assembly and a lid.Main body has one
Accommodation groove is to accommodate sample.One open end of film assembly covering accommodation groove.Film assembly includes a supporting element and a film.
Supporting element has a first surface and an opposite second surface, and wherein supporting element is tabular, and has a first through hole,
It runs through first surface and second surface.Film is set to the second surface side of supporting element, and has one second through-hole, wherein
Second through-hole corresponds to first through hole, and the second through-hole passes through for a charged particle beam.Lid removably in conjunction with main body,
To fix film assembly.
The electron microscope of further embodiment of this invention includes an inspection chamber, a charged particle beam generator, an inspection
Container and a detector.Chamber is examined to define a vacuum environment.Charged particle beam generator is connect with chamber is examined, to
A charged particle beam is generated in inspection chamber.It examines container to be placed in examine in chamber, to receive charged particle beam bombardment.It examines
Container includes a main body, a film assembly and a lid.Main body has an accommodation groove to accommodate sample.Film assembly covering is held
Set an open end of slot.Film assembly includes a supporting element and a film.Supporting element has a first surface and opposite
One second surface, wherein supporting element is tabular, and has a first through hole, runs through first surface and second surface.It is thin
Film is set to the second surface side of supporting element, and has one second through-hole, wherein the second through-hole corresponds to first through hole, and second
Through-hole passes through for a charged particle beam, to bombard sample.Lid is removably in conjunction with main body, to fix film assembly.Inspection
The response that device is bombarded to test sample by charged particle beam is surveyed, and is converted to an electronic signal.
Film assembly, inspection container and electron microscope of the invention is to fix film with flat supporting element, because
This, breakage of thin film applied or it is dirty after, operator is not only easy to replacement film assembly, and can only generate less amount of consumptive material.
Below by way of the appended schema elaborate of specific embodiment cooperation, when being easier to understand the purpose of the present invention, skill
Art content, feature and its it is reached the effect of.
Detailed description of the invention
Fig. 1 is an exploded view, shows the inspection container of first embodiment of the invention.
Fig. 2 is a constitutional diagram, shows the inspection container of first embodiment of the invention.
Fig. 3 is a schematic diagram, shows the partial enlargement structure of the film assembly of one embodiment of the invention.
Fig. 4 is a schematic diagram, shows the inspection container of second embodiment of the invention.
Fig. 5 is a schematic diagram, shows the inspection container of third embodiment of the invention.
Fig. 6 is a schematic diagram, shows the inspection container of fourth embodiment of the invention.
Fig. 7 is a schematic diagram, shows the inspection container of fifth embodiment of the invention.
Fig. 8 is a schematic diagram, shows the inspection container of sixth embodiment of the invention.
Fig. 9 is a schematic diagram, shows the inspection container of seventh embodiment of the invention.
Figure 10 is a schematic diagram, shows the inspection container of eighth embodiment of the invention.
Figure 11 is a schematic diagram, shows the film assembly of another embodiment of the present invention.
Figure 12 is a schematic diagram, shows the film assembly of further embodiment of this invention.
Figure 13 is a schematic diagram, shows the electron microscope of one embodiment of the invention.
Drawing reference numeral
10 examine container
11 main bodys
111 accommodation grooves
112 microscope carriers
112a dowel
The upright surface 112b
112c sample cushion block
113a fluid inlet
113b fluid outlet
113c temperature controlled fluid entrance
The outlet of 113d temperature controlled fluid
114 push rods
115 temperature control runners
The protrusion 115a
12 film assemblies
121 supporting elements
121a first surface
121b second surface
The first groove of 121c
121d first through hole
The second groove of 121e
122 films
The second through-hole of 122a
13 lids
131 apertures
14,14a, 14b O-ring
15 temperature-controlling components
21 examine chamber
22 charged particle beam generators
221 charged particle beams
222 responses
23 detectors
Specific embodiment
It will be described various embodiments of the present invention below, and cooperate schema as illustration.Other than these are described in detail, this
Invention also can be widely performed in other embodiments, and substitution easily, modification, the equivalence changes of any embodiment are all wrapped
Containing within the scope of the invention, and it is subject to claim.In the description of specification, in order to there is reader to the present invention
Whole understanding, provides many specific details；However, the present invention may under the premise of clipped or whole specific detail,
It is still implementable.Moreover, it is well known that the step of or element be not described in details, to avoid to the present invention formed it is unnecessary
Limitation.Same or similar element will be indicated in schema with same or like symbol.It is specifically intended that schema is only to illustrate
It is used, not the actual size of representation element or quantity, some details may not drawn completely, in the hope of the succinct of schema.
Fig. 1 to Fig. 3 is please referred to, the inspection container 10 of one embodiment of the invention is disposed on an inspection of an electron microscope
It tests in chamber, product as being examined in container 10 with inspection.Examining container 10 includes a main body 11, a film assembly 12 and one
Lid 13.Main body 11 has an accommodation groove 111 to accommodate sample, for example, suspended particles dispersity or living body biological sample
Deng.In an embodiment, the material of main body 11 can be stainless steel.Film assembly 12 covers an open end of accommodation groove 111, with envelope
Close accommodation groove 111.
Please with reference to Fig. 3, film assembly 12 includes a supporting element 121 and a film 122.Supporting element 121 has one
A first surface 121a and opposite second surface 121b.Supporting element 121 is tabular, and has a first through hole 121d.
In embodiment shown in Fig. 3, supporting element 121 includes a thinning region, covers first through hole 121d, to reduce first through hole
The Sidewall Height of 121d.For example, the settable one first groove 121c in the side first surface 121a of supporting element 121.First is logical
Hole 121d is then set to the bottom of the first groove 121c, can so reduce the Sidewall Height of first through hole 121d.The person of should be noted,
Figure 11 is please referred to, supporting element 121 can be not provided with any thinning region, that is, first surface 121a and second surface 121b all do not have
There is difference in height.It is understood that the possible block signal of the side wall of first through hole 121d receives, in an embodiment, first is logical
The ratio of the width of the Sidewall Height and first through hole 121d of hole 121d should be less than or be equal to 0.7.In an embodiment, supporting element
121 material can be metal or metallic compound, nonmetallic compound or high molecular material.For example, metal or metallization
Closing object can be aluminium, copper, aluminium oxide or stainless steel etc.；Nonmetallic compound can be glass, ceramics, nitride, carbide or silication
Object etc.；High molecular material can be plastic cement or rubber etc..
Film 122 is set to the side second surface 121b of supporting element 121, and has one second through-hole 122a.Film 122
Second through-hole 122a correspond to supporting element 121 first through hole 121d, therefore, charged particle beam can via first through hole 121d with
And second through-hole 122a enter accommodation groove 111 to bombard sample.Persond having ordinary knowledge in the technical field of the present invention can be with
Understand, diaphragm of the film 122 also comprising the second through-hole 122a of covering, to maintain the air-tightness of accommodation groove 111.For schema letter
It is clean, therefore it is not painted the diaphragm of the second through-hole 122a of covering.In an embodiment, film 122 can be a thin film chip, citing and
Speech, the material of thin film chip can be semi-conducting nitride, conductor oxidate, metal oxide, high molecular material, graphite, stone
Black alkene or other materials appropriate.
Lid 13 is then removably combined with main body 11, to fix film assembly 12.In an embodiment, lid 13 can phase
Main body 11 is rotated and is locked in main body 11 and urgent film assembly 12, to prevent sample from leaking out out of accommodation groove 111
Come.For example, corresponding screw thread can be respectively set in lid 13 and main body 11, keep lid 13 and main body 11 opposite
It rotates and locks.In an embodiment, a settable O-ring 14 between main body 11 and supporting element 121, to increase the effect of sealing
Fruit.It is understood that lid 13 have aperture 131 appropriate, to avoid barrier support part 121 first through hole 121d and
Second through-hole 122a of film 122.In an embodiment, the material of lid 13 can be stainless steel.
According to above structure, operator, which can directly rotate, carrys out removal lid 13, is replaceable film group after removal lid 13
Part 12, therefore, operator can easily replace damaged film 12.In addition, supporting element 121 is a plate-like structure, film 122
Be relatively easy to remove from supporting element 121, then paste new film 122, therefore, supporting element 121 can recycling and reusing, with into
One step reduces irretrievable consumptive material.
In an embodiment, the second through-hole 122a can be circular hole, square hole or long and narrow hole.It is understood that the second through-hole
122a is that the film 122 of circular hole can bear biggish pressure.In other words, under the conditions of uniform pressure, the aperture of circular hole can be big
Damaged without will lead to film 122 in the aperture of square hole, therefore, biggish circular hole can get biggish test range.Yu Yishi
It applies in example, the side wall of the second through-hole 122a has segment difference.In other words, as shown in figure 3, towards 12 side of supporting element the second through-hole
The opening of 122a is larger, and according to this structure, backscattering charged particle caused by sample can avoid being stopped by film 122.
In an embodiment, the second surface 121b of supporting element 121 has one second groove 121e.Film 122 is then arranged
In in the second groove 121e.It is noted that the depth of the second groove 121e is less than the thickness of film 122.It is thin according to this structure
Film 122 projects slightly from the second surface 121b of supporting element 121, to avoid bubble rests on the position of the second through-hole 122a and arranges
It squeezes sample or influences to examine.It is understood that without in the case where considering bubble, such as observation gaseous sample, then second
The depth of groove 121e can be greater than the thickness of film 122, as shown in figure 12.In an embodiment, the shape of the second groove 121e
Can be it is round, rectangular or endpoint is circular rectangular.
Referring to figure 4., in order to simplify schema, O-ring 14 is not drawn in Fig. 4.It, can in accommodation groove 111 in an embodiment
One microscope carrier 112 is set, and setting position corresponds to the second through-hole 122a of film 122.Since charged particle beam is easy by liquid
It is shallower that absorption permits the pass through depth, therefore, by designing the microscope carrier 112 of appropriate height, can set microscope carrier 112 to film assembly
12 distance can be bombarded with the sample ensured on microscope carrier 112 by charged particle beam, and backscattering caused by sample charges
Particle can penetrate film 122 and be detected by detector.In an embodiment, a settable fluid inlet in accommodation groove 111
A 113a and fluid outlet 113b.The sample of flowable state can enter in accommodation groove 111 via fluid inlet 113a, pass through load
Platform 112 is discharged via fluid outlet 113b again after testing.Preferably, fluid inlet 113a and fluid outlet 113b are to thin
The distance of membrane module 12 is greater than the distance of microscope carrier 112 to film assembly 12.According to this structure, can avoid on the top of accommodation groove 111
Portion generates bubble.
Referring to figure 5., in an embodiment, microscope carrier 112 is removably set in accommodation groove 111.Citing
For, a dowel 112a is set below microscope carrier 112, with dowel 112a to the slot in positive accommodation groove 111, by microscope carrier 112
It is pushed into accommodation groove 111.According to this structure, the microscope carrier 112 of the replaceable different height of operator, with adjust microscope carrier 112 to
The distance of film assembly 12.In an embodiment, settable O-ring 14a around microscope carrier 112, to prevent sample or fluid
Into the bottom of accommodation groove 111.
Fig. 6 is please referred to, in an embodiment, microscope carrier 112 includes a upright surface 112b.For example, the top of microscope carrier 112
Face has segment difference, so forms upright surface 112b.According to this structure, sample, which can stand, is resisted against upright surface 112b, with
The side of sample survey, such as the depth of observation etching liquid etching sample.The person of should be noted, upright surface 112b are not limited to vertically
Face also can be an inclined-plane, with the sample of benefit observation different angle.
Fig. 7 is please referred to, in an embodiment, microscope carrier 112 can be positioned below a push rod 114, and push rod 114 extends to appearance
Set the outside of slot 111.According to this structure, operator can adjust load using push rod 114 in the case where not opening inspection container
The height of platform 112, that is, adjust the distance of microscope carrier 112 to film assembly 12.For example, push rod 114 has a screw thread, operation
Person can utilize proper implements rotating push rod 114, to adjust the distance of microscope carrier 112 to film assembly 12.In an embodiment, push away
Bar 114 is also using driven electrically.
Fig. 8 is please referred to, in an embodiment, examining container may include a sample cushion block 112c, removably
It is set to a top surface of microscope carrier 112.Sample cushion block 112c can be a disposable component, for examining high pollution or being not easy clear
The sample washed.Alternatively, active biological sample can be cultivated on sample cushion block 112c, the sample that will have biological sample later
Product cushion block 112c, which is placed on microscope carrier 112, to be observed.It is understood that sample cushion block 112c also settable pattern appropriate, with control
The flow behavior of fluid sample processed is with benefit observation.
Fig. 9 is please referred to, in an embodiment, microscope carrier 112 has a temperature control runner 115, is set to 112 lower section of microscope carrier.
Temperature controlled fluid can flow into sample of the temperature control runner 115 to be heated or cooled on microscope carrier 112 from temperature controlled fluid entrance 113c, then from control
Warm fluid outlet 113d outflow.Temperature controlled fluid is heated or cooling can flow into temperature control runner 115 again and form a loop temperature-control system.
In an embodiment, settable protrusion 115a in temperature control runner 115, so that 115 top of temperature control runner close to sample can be filled
Full temperature controlled fluid.As can be seen that temperature control runner 115 is made of two components in embodiment as shown in Figure 9, therefore, if
O-ring 14b is set in appropriate location to prevent temperature controlled fluid from leaking.
Figure 10 is please referred to, in an embodiment, examining container 10 may include a temperature-controlling component 15, be set to main body 11
Outside.Temperature-controlling component 15 can be directly heated or be cooled down for main body 11 or entire inspection container 10, to control sample or inspection
Test the temperature of environment.It is understood that temperature-controlling component 15 can be examined from outside to main body 11 or entirely with higher temperature
Container 10 is directly heated, such as more than 100° centigrade, and even up to 300 degree Celsius or more.
Figure 13 is please referred to, the electron microscope of one embodiment of the invention includes inspection a chamber 21, a charged particle beam
Generator 22, one examines container 10 and a detector 23.Chamber 21 is examined to can define a vacuum environment.Charged particle beam produces
Raw device 22 is connect with chamber 21 is examined, to examine chamber 21 to generate a charged particle beam 221.Container 10 is examined to be placed in inspection
In chamber 21, to receive the bombardment of charged particle beam 221.As described above, details are not described herein for the detailed construction of inspection container 10.
The response 222 that then test sample is bombarded by charged particle beam 221 of detector 23, and be converted to an electronic signal.It is understood that
, electronic signal can form a micro-imaging or X-ray frequency spectrum through subsequent signal processing.For example, detector 23 can be
One charged particle detector, to detect the backscattering charged particle from sample.Alternatively, detector 23 can be an element frequency spectrum
Detector bombards the X-ray signal issued after sample to detect charged particle beam 221.Other function element of electron microscope,
Such as signal processor, power supply unit, for known to those skilled in the art, and it is non-for the present invention
Technical characteristics, therefore details are not described herein.
It should also be noted that previous embodiment is that film assembly 12 is applied to inspection of hermetic seal container 10.However, of the invention
Film assembly also can using sealing include charged particle beam generator chamber.For example, it is generated comprising charged particle beam
The chamber of device has the lock solid structure of the similar main body for examining container, and film assembly 12 is again with the knot of the similar lid for examining container
Structure is fixed on chamber i.e. sealable chamber.According to this structure, sample can test in open space.
In summary, film assembly of the invention, inspection container and electron microscope are solid with flat supporting element
Determine film, therefore, breakage of thin film applied or it is dirty after, operator is not only easy to replacement film assembly, and can only generate less amount of consumption
Material.Preferably, supporting element can be recycled, to be further reduced consumptive material.
Embodiment described above is only technical idea and feature to illustrate the invention, and purpose makes art technology
Personnel can understand the content of the present invention and implement it accordingly, when cannot with restriction the scope of the patents of the invention, i.e., generally according to this
Equivalent change or modification made by revealed spirit are invented, should be covered in the scope of the patents of the invention.
Claims (22)
1. a kind of film assembly, characterized by comprising:
One supporting element has a first surface and an opposite second surface, and wherein the supporting element is tabular, and is had
One first through hole runs through the first surface and the second surface；And
One film is set to the second surface side of the supporting element, and has one second through-hole, and wherein second through-hole is corresponding
In the first through hole, and second through-hole passes through for a charged particle beam.
2. film assembly as described in claim 1, which is characterized in that the supporting element has a thinning region, cover this
One through-hole, to reduce the Sidewall Height of the first through hole.
3. film assembly as described in claim 1, which is characterized in that the Sidewall Height of the first through hole and the first through hole
The ratio of width is less than or equal to 0.7.
4. film assembly as described in claim 1, which is characterized in that the second surface of the supporting element is recessed with one second
Slot, the film are set in second groove, and the depth of second groove is less than the thickness of the film.
5. film assembly as claimed in claim 4, which is characterized in that the shape of second groove is round, rectangular or endpoint
It is circular rectangular.
6. film assembly as described in claim 1, which is characterized in that the side wall of second through-hole has segment difference.
7. film assembly as described in claim 1, which is characterized in that second through-hole is circular hole, square hole or long and narrow hole.
8. a kind of inspection container, which is characterized in that its inspection chamber for being placed in an electron microscope is to examine the inspection to hold
Product as in device, wherein the inspection container include:
One main body has an accommodation groove to accommodate the sample；
One film assembly covers an open end of the accommodation groove, and wherein the film assembly includes:
One supporting element has a first surface and an opposite second surface, and wherein the supporting element is tabular, and is had
One first through hole runs through the first surface and the second surface；And
One film is set to the second surface side of the supporting element, and has one second through-hole, and wherein second through-hole is corresponding
In the first through hole, and second through-hole passes through for a charged particle beam；And
One lid, removably in conjunction with the main body, to fix the film assembly.
9. examining container as claimed in claim 8, which is characterized in that the supporting element has a thinning region, cover this
One through-hole, to reduce the Sidewall Height of the first through hole.
10. examining container as claimed in claim 8, which is characterized in that the Sidewall Height of the first through hole and the first through hole
Width ratio be less than or equal to 0.7.
11. examining container as claimed in claim 8, which is characterized in that the second surface of the supporting element is recessed with one second
Slot, the film are set in second groove, and the depth of second groove is less than the thickness of the film.
12. examining container as claimed in claim 8, which is characterized in that the side wall of second through-hole has segment difference.
13. examining container as claimed in claim 8, which is characterized in that the lid is rotated relative to the main body, to be locked on this
Main body.
14. examining container as claimed in claim 8, which is characterized in that the accommodation groove has a microscope carrier, and setting position is corresponding
In second through-hole.
15. examining container as claimed in claim 14, which is characterized in that the accommodation groove has a fluid inlet and a fluid
Outlet, and the distance of the fluid inlet and the fluid outlet to the film assembly be greater than the microscope carrier to the film assembly away from
From.
16. examining container as claimed in claim 14, which is characterized in that the microscope carrier is removable installed in the accommodation groove.
17. examining container as claimed in claim 14, which is characterized in that the microscope carrier has a upright surface, for the sample
Standing is resisted against the upright surface.
18. examining container as claimed in claim 14, which is characterized in that the distance of the microscope carrier to the film assembly is adjustable
's.
19. examining container as claimed in claim 14, which is characterized in that further include:
A sample cushion block is removable installed in a top surface of the microscope carrier.
20. examining container as claimed in claim 14, which is characterized in that the microscope carrier has a temperature control runner, for a temperature control
Fluid is flowed in the temperature control runner.
21. examining container as claimed in claim 8, which is characterized in that further include a temperature-controlling component, be set to the main body
Outside.
22. a kind of electron microscope, characterized by comprising:
One examines chamber, defines a vacuum environment；
One charged particle beam generator is connect with the inspection chamber, to generate a charged particle beam in the inspection chamber；
One examines container, is placed in the inspection chamber, is bombarded with receiving the charged particle beam, wherein the inspection container packet
Contain:
One main body has an accommodation groove to accommodate a sample；
One film assembly covers an open end of the accommodation groove, and wherein the film assembly includes:
One supporting element has a first surface and an opposite second surface, and wherein the supporting element is tabular, and is had
One first through hole runs through the first surface and the second surface；And
One film is set to the second surface side of the supporting element, and has one second through-hole, and wherein second through-hole is corresponding
In the first through hole, and second through-hole passes through for the charged particle beam, to bombard the sample；And
One lid, removably in conjunction with the main body, to fix the film assembly；And
One detector, the response bombarded to detect the sample by the charged particle beam, and be converted to an electronic signal.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810155124.5A CN110186942A (en) | 2018-02-23 | 2018-02-23 | Film assembly examines container and electron microscope |
| TW107142752A TWI688984B (en) | 2018-02-23 | 2018-11-29 | Membrane assembly, examination container and electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810155124.5A CN110186942A (en) | 2018-02-23 | 2018-02-23 | Film assembly examines container and electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110186942A true CN110186942A (en) | 2019-08-30 |
Family
ID=67713410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810155124.5A Pending CN110186942A (en) | 2018-02-23 | 2018-02-23 | Film assembly examines container and electron microscope |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN110186942A (en) |
| TW (1) | TWI688984B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114488505A (en) * | 2020-11-12 | 2022-05-13 | 邑流微测股份有限公司 | Microscope observation platform |
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| CN105359250A (en) * | 2013-06-14 | 2016-02-24 | 株式会社日立高新技术 | Charged particle radiation device and adjustment method for charged particle radiation device |
| CN105067649A (en) * | 2015-08-24 | 2015-11-18 | 首钢总公司 | Method for quantitative analysis on material organization through scanning electron microscope and energy disperse spectrometer |
| CN107192730A (en) * | 2016-03-14 | 2017-09-22 | 台湾电镜仪器股份有限公司 | Electron microscope |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114488505A (en) * | 2020-11-12 | 2022-05-13 | 邑流微测股份有限公司 | Microscope observation platform |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI688984B (en) | 2020-03-21 |
| TW201937528A (en) | 2019-09-16 |
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