CN110082360A - A kind of sequence optical element surface on-line detection device of defects and method based on array camera - Google Patents
A kind of sequence optical element surface on-line detection device of defects and method based on array camera Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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Abstract
The present invention provides a kind of sequence optical element surface on-line detection device of defects and method based on array camera, comprising: lighting system, optical lens, a digital camera or array camera, Two-dimensional motion device, Digital Image Processor.Main innovation point of the invention is to have used Two-dimensional motion device that camera is driven to carry out translation in horizontal and vertical direction to achieve the effect that array camera, array camera detection system eliminates the tedious steps that multiple optical elements under different object distances are carried out with focusing imaging, and the imaging focal length of imaging system is flexibly changed by the way that different reconstruction object distances is arranged.The method can be applied to the on-line checking of optical element surface defect, be of great significance to the raising of multiple optical element surface defects while on-line checking speed.
Description
Technical field
The invention belongs to optical element defect detecting technique field, specially a kind of optical element table based on array camera
Planar defect on-line detecting system and method can be applied to optical element surface defect on-line checking.
Background technique
Multiple optical elements cause optical element surface to go out under optical system works state due to environment influence etc.
Existing defect, can not can be carried out offline inspection, but influence of the optical element surface defect to light field can not be ignored at this time.Conventional
Based on the defect on-line checking mode of mechanical focusing mode, there is detection, time-consuming, to the displacement accuracy of platform require it is high its
His shortcoming.Since the defect of optical element surface can not only be such that optical transmittance declines, stray light is generated, it can also serious shadow
Beam quality is rung, in optical system under the action of transmission light field, defect distribution can constantly change until system can not normally make
With, it is necessary to it is just monitored in the initial stage that defect is formed, is convenient for on-call maintenance and replacement.Therefore optical element surface lacks
The importance that can sunken on-line checking continue health operation for optical system is self-evident.
Traditional is mainly offline inspection and on-line checking two ways for the detection of optical element surface defect.Offline
Detection accuracy is high, but time-consuming, and detection device is bulky.It, can be in optics using optical element on-line detection device of defects
Element is fixed on the detection that defect is carried out among optical system, and can image to the impaired loci element for statistical analysis that obtains
Defect distribution situation.Optical element on-line detection device of defects is actually a high-resolution zoom away from imaging system, different
The object distance of optical element range imaging system is different, keeps by adjusting optical system focal length to multiple optical element surfaces
Defect magnifying power it is constant.Zoom system is usually the variation that focal length is realized in the multiple microscope group positions of Mechanical Moving, be may be implemented
Continuous vari-focus and precision is higher, but since imaging system can generate a panel height resolution image to each optical element, can generate
Huge data volume, subsequent image processing are comparatively laborious.And the time is expended to the process that multiple optical elements are successively focused, it is difficult
To realize on-line checking truly.There are stringent limitation, base to detection time in some special optical systems
In multiple optical element defect online measuring techniques of mechanical focusing mode, just there is some shortcomingss.
Summary of the invention
In view of the deficiency of traditional technology, the purpose of the present invention is to provide one kind can be to multiple optical element surface defects
Carry out the device and method of on-line checking, it is intended to solve the detection speed of existing multiple optical element defect online detection methods
Slowly, the problems such as detection process is complicated, intuitive display optics surface defect distribution.
The invention solves traditional technology there are the problem of used technical solution be:
Sequence optical element surface on-line detection device of defects based on array camera, comprising:
Lighting system, lighting source can be laser or bar shaped, ring-shaped light emitting diode light source, for distinguishing optics
The imaging effect of element surface defect and non-defective region；
Optical lens, for acquiring the optical imagery of the detected optical element under different object distances；
One digital camera or array camera, for converting the image into corresponding data image signal；
Two-dimensional motion device meets positioning accuracy and range for driving camera to realize the translation of two axis of X-Y；
Digital Image Processor, for being stored to the collected digital signal of camera, digital refocusing operation, image
Processing, judges whether optical element is defective, shows the processing result of digital picture；
The sequence optical element surface on-line detection device of defects based on array camera, utilizes a digital camera
Machine or array camera are collected within field depth simultaneously after the surface defect image of different optical elements, are counted to image
Word refocusing obtains multiple optical element surface defect distribution situations under different object distances.
The sequence optical element surface on-line detection device of defects based on array camera, wherein detection light source shines
Bright mode mainly has following three kinds: coaxial orthodromic illumination；Coaxial antidromic illumination；Edge light illumination.
The sequence optical element surface on-line detection device of defects based on array camera, wherein use two maintenance and operations
Moving platform drives camera to realize the translation of two axis of X-Y, can achieve the effect of array camera；
Sequence optical element surface defect online detection method based on array camera, comprising the following steps:
A, Detection task determines, detection resolution index determines therewith, selects camera lens and imaging system parameters, imaging system
Parameter includes the pixel resolution and pixel number of CCD sensing chip, calculates magnifying power according to detection resolution and determines camera lens coke
Away from multiple optical elements all must be positioned in the field depth of imaging system, and the defect information of multiple optical element surfaces all may be used
It is imaged with the photosurface clearly in single camera；
B, camera calibration is carried out, the Intrinsic Matrix of camera is obtained, passes through the position change battle array of the mobile camera of displacement platform
Baseline position size between column camera obtains the outer parameter of camera；
C, camera collects several while including the image of multiple optical element defect informations at different location, to image into
Line number word refocusing obtains multiple optical element surface defect distributions, at this time other optical element surfaces under non-reunion focus-object distance
The aliased image that shows as defocus of the defect in refocusing image；
D, denoising is filtered to the image after digital refocusing, obtains threshold binarization, Defect Edge extracts, statistics
The geological information of defect, the geological information of defect includes area, length-width ratio, perimeter and number, in conjunction with the amplification of imaging system
Multiplying power obtains the defect information distribution of multiple optical element surfaces in optical system.
Compare the prior art, the sequence optical element surface defect on-line checking provided by the invention based on array camera
Device and method has the following advantages: single camera only generates a panel height resolution image to multiple optical elements, is based on array camera
Multiple optical element surface defect online measuring techniques substantially increase detection speed, improve the accuracy of testing result,
The optical element being located in field depth is imaged by digital refocusing, it can be simultaneously by the optics member under multiple and different object distances
Part surface defect is intuitively shown, is of great significance for the health operation of auxiliary optics.
Detailed description of the invention
Fig. 1 is the optical element surface defects detection schematic diagram based on array camera under edge light illumination；
Fig. 2 is the optical element surface defects detection schematic diagram based on array camera under coaxial orthodromic illumination；
Fig. 3 is the optical element surface defects detection schematic diagram based on array camera under coaxial antidromic illumination.
In figure: 1 is Two-dimensional motion device, and 2 be the first lighting source, and 3 be the second lighting source, and 4 be third lighting source,
5 be the first optical element, and 6 be the second optical element, and 7 be third optical element, and 8 be image capturing system, and 9 is at digital pictures
Device is managed, 10 be laser light source, and 11 be beam-expanding system, and 12 be plane mirror, and 13 be plane mirror, and 14 acquire for array image
System.
Specific embodiment
To keep technical solution of the present invention more explicit, this is further illustrated in conjunction with attached drawing and specific embodiment
Invention.
Embodiment 1
As shown in Figure 1, the present invention is a kind of multiple optical element surface on-line detection device of defects based on array camera,
It include: Two-dimensional motion device 1, the first lighting source 2, the second lighting source 3, third lighting source 4, the first optical element 5,
Two optical elements 6, third optical element 7, image capturing system 8 and Digital Image Processor 9；Image capturing system 8 includes CCD
Video camera, camera lens etc..
Lighting source can be laser or bar shaped, ring-shaped light emitting diode light source, the selection mode of light source mainly according to
Rely the practical working situation in optical element in optical system to determine different on-line checking modes.
After detection resolution index determines, select the CCD sensing chip of camera lens and imaging system pixel resolution and
Pixel number reasonably designs lens focus, entrance pupil size, CCD pixel dimension, makes multiple optical elements all and must be positioned at imaging
In the field depth of system, visual field is reasonable, and the defect information of multiple optical element surfaces can be clearly in single camera
Photosurface is imaged.In conjunction with Fig. 1, the optical element surface defect inspection method based on array camera is as follows:
(1) Intrinsic Matrix that camera calibration step obtains camera is carried out first, passes through 1 mobile image of Two-dimensional motion device
The outer parameter of the baseline position acquiring size camera of the position change array camera of acquisition system 8.Acquire camera at different location
Image, obtain several while including the image of multiple optical element defect informations；
(2) image capturing system 8 is equidistantly translated in Two-dimensional motion device 1, is obtaining a series of objects as plane
The projection image of plane may be implemented in different sampled points to scene successively projection imaging, to achieve the effect that array camera, save
Camera cost has been saved, the complexity of acquisition system is simplified；
(3) when array camera (or mobile camera position) collects the optical element surface defect point in field depth
After cloth situation, it will be overlapped and average under different cameral image projection to specified object distance, be equivalent to one virtual big
Aperture camera lens rebuilds the optical element surface defect situation under digital refocusing object distance, since virtual lens bore is big,
So Depth of field very little.Optics member in addition to the optical element surface defect of focusing can clearly be imaged, under other object distances
The cumulative image planes of the defect of part can be very fuzzy；
(4) image procossing is carried out to the image after digital refocusing and extracts clearly defect information, accurate edge graph
Picture, is analyzed and the size for calculating defect obtains the feature of target image, at this time other optical element tables under non-reunion focus-object distance
The aliased image that shows as defocus of the planar defect in refocusing image；
(5) counterweight focusedimage is filtered denoising, obtains threshold binarization, and Defect Edge extracts, statistical shortcomings it is several
What information (area, length-width ratio, perimeter, number etc.).It is examined online using multiple optical element surface defects based on array camera
Survey technology can in a short time be imaged the optical element being located in field depth, obtain the defect point of optical element surface
Cloth information, the operation of better auxiliary optics.
In conclusion multiple optical element surface on-line detection device of defects provided by the invention and its detection method, lack
Sunken detection system specifically includes that Two-dimensional motion device 1, the first lighting source 2, the second lighting source 3, third lighting source 4,
One optical element 5, the second optical element 6, third optical element 7, image capturing system 8 and Digital Image Processor 9；Image is adopted
Collecting system 8 includes CCD camera, camera lens etc..First lighting source 2 first, the second lighting source 3, third lighting source 4 are simultaneously
Irradiate the first optical element 5, the second optical element 6, third optical element 7, the presence of optical element surface defect can to light into
Row scattering, scattering light are received into image capturing system 8 by camera lens and are converted to data image signal, and image is with digital signal
Form be transmitted to Digital Image Processor 9 storage, digital refocusing algorithm and from again focus after image in extract light
The geometrical characteristic for learning element surface defect information is calculated by processor, is shown eventually by display module.
Multiple optical element surface defect online measuring techniques based on array camera greatly increase detection speed, by multiple optics
Element surface defect is intuitively shown.
Embodiment 2
As shown in Fig. 2, multiple optical element surface on-line detection device of defects based on array camera, comprising: the first light
Learn element 5, the second optical element 6, third optical element 7；Digital Image Processor 9；Laser light source 10；Beam-expanding system 11；It is flat
Face reflecting mirror 12；Plane mirror 13；Array image acquisition system 14, array image acquisition system 14 include a plurality of lenses and
CCD camera.
Embodiment 3
As shown in figure 3, multiple optical element surface on-line detection device of defects based on array camera, comprising: the first light
Learn element 5, the second optical element 6, third optical element 7；Digital Image Processor 9；Laser light source 10；Beam-expanding system 11；It is flat
Face reflecting mirror 12；Array image acquisition system 14, array image acquisition system 14 include a plurality of lenses and CCD camera.
The main distinction of comparison diagram 2, Fig. 3, the optical element surface defect inspection method based on array camera is light source
Lighting method and array camera placement location, can be omitted the process of camera Mechanical Moving in such a way that camera is integrated,
May be different for practical working situation locating for different optical elements, it can choose Fig. 2, detection method shown in Fig. 3.
In addition, refering to fig. 1, Fig. 2, Fig. 3, detection lighting method mainly have following three kinds: Fig. 1 shines using edge light
It is bright；Fig. 2 is using coaxial orthodromic illumination；Fig. 3 is using coaxial antidromic illumination；The purpose of use of light source is to make defect
The imaging effect at place and non-defective place, which is distinguished, to be increased.Fig. 1, Fig. 2, Fig. 3 are for different works of the optical element in optical system
Make under state, the detection mode schematic diagram under the three kinds of modes illuminated to optical element surface defect.
It should be noted that the application of the present invention is not limited to the above, only a specific embodiment of the invention, it can
To illustrate to be subject to modifications and variations according to the present invention, the protection scope of claims of the present invention all should belong to.
Claims (4)
1. a kind of sequence optical element surface on-line detection device of defects based on array camera, it is characterised in that: include: illumination
System, optical lens, a digital camera or array camera, Two-dimensional motion device and Digital Image Processor；Wherein:
The lighting system, lighting source can be laser or bar shaped, ring-shaped light emitting diode light source, for distinguishing light
Learn the imaging effect of element surface defect and non-defective region；
The optical lens, for acquiring the optical imagery of the detected optical element under different object distances；
The digital camera or array camera, for converting the image into corresponding data image signal；
The Two-dimensional motion device meets positioning accuracy and range for driving camera to realize the translation of two axis of X-Y；
The Digital Image Processor for being stored to the collected digital signal of camera, digital refocusing operation, is schemed
As processing, judges whether optical element is defective, show the processing result of digital picture；
One digital camera or array camera collect the surface defect image of different optical elements within field depth simultaneously
After, by carrying out multiple optical element surface defect distribution feelings under the available different object distances of digital refocusing to image
Condition.
2. the sequence optical element surface on-line detection device of defects according to claim 1 based on array camera, special
Sign is: array camera can be multiple cameras and integrate, and Two-dimensional motion device can also be used, camera is driven to realize that two axis of X-Y is flat
It moves, to achieve the effect that array camera.
3. the sequence optical element surface on-line detection device of defects according to claim 1 based on array camera, special
Sign is: the selection mode of light source depends primarily on practical working situation of the optical element in optical system to determine difference
On-line checking mode, detection lighting method mainly has following three kinds: coaxial orthodromic illumination；Coaxial antidromic illumination；Edge light
Illumination.
4. a kind of sequence optical element surface defect online detection method based on array camera, using described in claim 1
Sequence optical element surface on-line detection device of defects based on array camera, it is characterised in that: the following steps are included:
A, Detection task determines, detection resolution index determines therewith, selects camera lens and imaging system parameters, imaging system parameters
Pixel resolution and pixel number including CCD sensing chip；Magnifying power, which is calculated, according to detection resolution determines lens focus, it is more
A optical element all must be positioned in the field depth of imaging system, and the defect information of multiple optical element surfaces can be clear
The photosurface in single camera be imaged；
B, camera calibration is carried out, the Intrinsic Matrix of camera is obtained, passes through the position change array phase of the mobile camera of displacement platform
Baseline position size between machine obtains the outer parameter of camera；
C, camera collects several while including the image of multiple optical element defect informations at different location, counts to image
Word refocusing obtains multiple optical element surface defect distributions, at this time other optical element surface defects under non-reunion focus-object distance
The aliased image for showing as defocus in refocusing image；
D, denoising is filtered to the image after digital refocusing, obtains threshold binarization, edge extracting, statistical shortcomings it is several
What information, area, length-width ratio, perimeter and number including defect obtain optical system in conjunction with the enlargement ratio of imaging system
In multiple optical element surfaces defect information distribution.
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| CN111554591A (en) * | 2020-04-27 | 2020-08-18 | 上海果纳半导体技术有限公司 | Semiconductor chip processing apparatus |
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Application publication date: 20190802 |