CN110044541A - A kind of fiber bragg grating pressure sensor based on rectangular diaphragm - Google Patents
A kind of fiber bragg grating pressure sensor based on rectangular diaphragm Download PDFInfo
- Publication number
- CN110044541A CN110044541A CN201910445797.9A CN201910445797A CN110044541A CN 110044541 A CN110044541 A CN 110044541A CN 201910445797 A CN201910445797 A CN 201910445797A CN 110044541 A CN110044541 A CN 110044541A
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- Prior art keywords
- pressure
- pressure sensor
- fiber
- bragg grating
- sensor based
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
- G01L11/025—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means using a pressure-sensitive optical fibre
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
A kind of fiber bragg grating pressure sensor based on rectangular diaphragm, comprising: protection cap is provided with the fairlead of optical fiber pigtail, intermediate member at top center, and top surface has the square pressure-bearing diaphragm of direct feeling external world oil-air pressure signal;It is installed on the stress transfer bar of square pressure-bearing center;It is installed on the pedestal of disc surfaces;It is installed on the triangle equi intensity cantilever of Chuck top, there are two threaded holes for equi intensity cantilever bottom end and Chuck top setting, and equi intensity cantilever top is in contact but is not fixed with stress transfer bar top;It is installed on the fiber grating of equi intensity cantilever upper and lower surface symmetric position.Pressure port is provided with pressure conduction channel inside center;It is set to two clamp grooves of pressure port bottom.The present invention has the features such as linearity is high, and structure is simple, and size is small and cheap.
Description
Technical field
The present invention relates to optical fiber grating sensing detection technique field, in particular to a kind of fiber grating based on rectangular diaphragm
Pressure sensor.
Background technique
Conditional electronic class pressure transmitter, such as condenser type, pressure resistance type, inductance type, piezoelectric resonator pressure transmitter are existing
Stage major part oil and gas pipeline pressure detecting master sensor to be used.Electrical type pressure transmitter can experience load cell
To the physical pressures parameter such as gas, liquid be transformed into the electric signal of standard, electric signal will appear due to the impedance of transmission line
Relaxation phenomenon, and under the environment such as high temperature, high pressure, electromagnetic radiation, transmitter is vulnerable to interference.Electrical type pressure transmitter is non-linear
Degree, hysteresis error are higher, influence measurement accuracy, will lead to its different degrees of damage with corrosivity or overheat media contact,
Also have the shortcomings that production technology is complicated, the service life is short, stability is poor.
At present with the pressure sensor of fiber grating detection strain mostly using circular film as pressure restraining element.Environmental liquids,
Gas pressure acts on circular film, its generation deformation of diaphragm pressure at both sides official post.The shortcomings that circular film is that the linearity is poor,
I.e. extraneous pressure with its caused by membrane deflection curve departure degree it is larger.
Summary of the invention
In order to overcome the above-mentioned deficiencies of the prior art, the purpose of the present invention is to provide a kind of optical fiber based on rectangular diaphragm
Grating pressure sensor has the characteristics that the linearity is high, size is small and temperature self-compensation.
To achieve the goals above, the technical solution adopted by the present invention is that:
A kind of fiber bragg grating pressure sensor based on rectangular diaphragm, including from top to bottom sequentially connected protection top cover 1,
Intermediate member 2 and pressure port 3 are protected and are provided with optical fiber pigtail fairlead 6 at the top of top cover 1, and optical fiber pigtail fairlead 6 draws the
One fiber grating 7 and the second fiber grating 10,2 top surface of intermediate member are provided with the pressure-bearing for experiencing extraneous oil-air pressure
Diaphragm 11, the pressure containing disk 11 are square structure, and the pressure containing disk 11 is provided centrally with stress transfer bar 5, are protected
Disk 4 is provided between top cover 1 and intermediate member 2, pedestal 9 is arranged in 4 surface of disk;The equal strength that is equipped on 9 top of pedestal is hanged
Arm beam 8,8 top of cantilever beam are located at 5 center of stress transfer bar, and the first optical fiber light is arranged in 8 upper and lower surface symmetric position of cantilever beam
Grid 7 and the second fiber grating 10, pressure port 3 are internally provided with pressure conduction channel 12.
The protection top cover 1 is pie tubular construction, and intermediate member 2 is column tubular construction, and pressure port 3 is ' T '
Shape structure.
The pressure conduction channel 12 is arranged at 3 inside center of pressure port, the pressure of 12 two sides of pressure conduction channel
There are two clamp grooves 13 for setting on power port 3.
5 cross section of stress transfer bar is square structure.
The equi intensity cantilever 8 is equilateral triangle structure;8 top of equi intensity cantilever and stress transfer
Bar 5 is contacted but is not fixed;There are two threaded hole 16, the bottom ends of cantilever beam 8 for 8 bottom end of cantilever beam and the setting of 9 top of pedestal
The top of pedestal 9 is fixed on by two screws.
Pressure containing disk 11, stress transfer bar 5 and the equi intensity cantilever 8 constitutes a transverse direction-axial displacement conversion
Structure.
First fiber grating 7 and the second fiber grating 10 is in same temperature field.
The protection cap 1 is connected through a screw thread with intermediate member 2.
The intermediate member 2 and pressure port 3 is by being welded to connect, to guarantee leakproofness.
Beneficial effects of the present invention:
Fiber bragg grating pressure sensor provided by the invention based on rectangular diaphragm is mentioned by using square pressure-bearing diaphragm
The high linearity of ambient pressure and the pressure containing disk amount of deflection caused by it.
Fiber bragg grating pressure sensor provided by the invention based on rectangular diaphragm, under a certain pressure, same material,
Rectangular center amount of deflection under size is higher than circular film center amount of deflection, improves the sensitivity of pressure sensor.
Fiber bragg grating pressure sensor provided by the invention based on rectangular diaphragm, can be by changing pressure containing disk and waiting
The size of intensity cantilever beam adjusts sensitivity and the range of fiber bragg grating pressure sensor, is wanted with adapting to the monitoring of different occasions
It asks.
Fiber bragg grating pressure sensor provided by the invention based on rectangular diaphragm, is designed using double grating, and in same
In one temperature field, the influence of ambient temperature can be eliminated, realizes temperature self-compensation.
Detailed description of the invention
Fig. 1 is the fiber bragg grating pressure sensor provided by the invention based on rectangular diaphragm along equi intensity cantilever center line
Cross-sectional view.
Fig. 2 is the top view of the fiber bragg grating pressure sensor intermediate member provided by the invention based on rectangular diaphragm.
Fig. 3 is the top view of the fiber bragg grating pressure sensor pressure port provided by the invention based on rectangular diaphragm.
Specific embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings.
As depicted in figs. 1 and 2, the fiber bragg grating pressure sensor provided by the invention based on rectangular diaphragm, comprising: protection
Lid 1 is pie tubular construction, is provided at top center for drawing the first fiber grating 7 and 10 tail of the second fiber grating
Fine fairlead 6.Intermediate member 2, is column tubular construction, and top surface has rectangular the holding of direct feeling external world oil-air pressure
Pressuring film plate 11;It is installed on the stress transfer bar 5 at 11 center of square pressure-bearing diaphragm;It is installed on the pedestal 9 on 4 surface of disk;It is installed on
There are two threaded holes for the triangle equi intensity cantilever 8 on 9 top of pedestal, 8 bottom end of equi intensity cantilever and the setting of 9 top of pedestal
16,8 top of equi intensity cantilever is in contact but is not fixed with 5 top of stress transfer bar;It is installed on following table on equi intensity cantilever 8
The first fiber grating 7 and the second fiber grating 10 of face symmetric position.Pressure port 3 is ' T ' shape structure, is set inside center
It is equipped with pressure conduction channel 12 (as shown in Figure 3);It is set to two clamp grooves 13 of 3 bottom of pressure port.
The pressure containing disk 11 is square structure, improves the line of ambient pressure and the pressure containing disk amount of deflection caused by it
Property degree.
5 cross section of stress transfer bar is square structure.
The equi intensity cantilever 8 is equilateral triangle structure.8 top of equi intensity cantilever and stress transfer
It 5 tip contact of bar but is not fixed.The bottom end of the equi intensity cantilever 8 is fixed on the top of pedestal 9 by two screws.
Pressure containing disk 11, stress transfer bar 5 and the equi intensity cantilever 8 constitutes a transverse direction-axial displacement conversion
Structure.Pressure containing disk 11 is since ambient pressure generates lateral displacement and passes to equi intensity cantilever 8 by stress transfer bar (5).
It is symmetrical that first fiber grating 7 and the second fiber grating 10 are fixed on 8 upper and lower surface centerline of equi intensity cantilever
Position.First fiber grating 7 and the second fiber grating 10 can be regarded as being in same temperature since paste position is closer
In.
The fiber bragg grating pressure sensor is adjusted by changing the size of pressure containing disk 11 and equi intensity cantilever 8
The sensitivity of fiber bragg grating pressure sensor and range.
The fiber bragg grating pressure sensor is designed using double grating, and the first fiber grating 7 and the second fiber grating
10 in same temperature field, can eliminate the influence of ambient temperature, realizes temperature self-compensation.
Pressure containing disk 11, stress transfer bar 5 and the equi intensity cantilever 8 constitutes a transverse direction-axial displacement conversion
Structure.When extraneous oil-air pressure acts on pressure containing disk 11, the lateral displacement that pressure containing disk 11 generates simultaneously will by stress transfer bar 5
It passes to equi intensity cantilever 8, is fixed on the first fiber grating 7 impression of 8 upper surface position of center line of equi intensity cantilever
To contracting power and axial strain is generated, is fixed on the second fiber grating 10 prison of equi intensity cantilever lower surface center line same position
It measures tension and generates axial strain, two strains are equal in magnitude, contrary.
Working principle of the present invention is:
The working principle of fiber bragg grating pressure sensor provided by the invention based on rectangular diaphragm is, when extraneous oil gas pressure
Power acts on square pressure-bearing diaphragm 11 by pressure conduction channel 12, and the transverse center displacement generated passes through stress transfer bar 5
Equi intensity cantilever 8 is passed to, the first fiber grating 7 for being fixed on 8 upper surface position of center line of equi intensity cantilever is experienced
Contracting power simultaneously generates axial strain, is fixed on the second fiber grating 10 inspection of 8 lower surface center line same position of equi intensity cantilever
It measuring tension and generates axial strain, two strains are equal in magnitude, and it is contrary, cause its output wavelength to change, passes through
The variation of demodulated equipment Detection wavelength is to demodulate extraneous oil-air pressure signal.First fiber grating 7 and the second fiber grating 10
In same temperature field, operating temperature is identical, to realize sensor temperature self compensation.
Claims (9)
1. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm, which is characterized in that including from top to bottom sequentially connected
Top cover (1), intermediate member (2) and pressure port (3) are protected, is provided with optical fiber pigtail fairlead (6) at the top of protection top cover (1),
Optical fiber pigtail fairlead (6) draws the first fiber grating (7) and the second fiber grating (10), intermediate member (2) top surface are set
It is equipped with the pressure containing disk (11) for experiencing extraneous oil-air pressure, pressure containing disk (11) is square structure, the pressure containing disk
(11) it is provided centrally with stress transfer bar (5), protects and be provided with disk (4) between top cover (1) and intermediate member (2), disk (4)
Pedestal (9) are arranged in surface, and pedestal (9) top is equipped with equi intensity cantilever (8), and cantilever beam (8) top is located at stress transfer
At bar (5) center, the first fiber grating (7) and the second fiber grating (10), pressure is arranged in cantilever beam (8) upper and lower surface symmetric position
Power port (3) is internally provided with pressure conduction channel (12).
2. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described
Protection top cover (1) be pie tubular construction, intermediate member (2) be column tubular construction, pressure port (3) be ' T ' shape structure.
3. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described
Pressure conduction channel (12) be arranged at pressure port (3) inside center, the pressure port of pressure conduction channel (12) two sides
(3) there are two clamp groove (13) for setting on.
4. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described
Stress transfer bar (5) cross section be square structure.
5. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described
Equi intensity cantilever (8) be equilateral triangle structure;Equi intensity cantilever (8) top connects with stress transfer bar (5)
It touches but is not fixed;There are two threaded hole (16), the bottoms of cantilever beam (8) for cantilever beam (8) bottom end and the setting of pedestal (9) top
End is fixed on the top of pedestal (9) by two screws.
6. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described
Pressure containing disk (11), stress transfer bar (5) and equi intensity cantilever (8) constitute a transverse direction-axial displacement transferring structure.
7. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described
The first fiber grating (7) and the second fiber grating (10) be in same temperature field.
8. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described
Protection cap (1) be connected through a screw thread with intermediate member (2).
9. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described
Intermediate member (2) and pressure port (3) pass through welded connecting.
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CN201910445797.9A CN110044541A (en) | 2019-05-27 | 2019-05-27 | A kind of fiber bragg grating pressure sensor based on rectangular diaphragm |
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CN201910445797.9A CN110044541A (en) | 2019-05-27 | 2019-05-27 | A kind of fiber bragg grating pressure sensor based on rectangular diaphragm |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110702280A (en) * | 2019-10-18 | 2020-01-17 | 西安石油大学 | High-sensitivity fiber grating pressure sensor based on square diaphragm |
CN114354037A (en) * | 2022-03-21 | 2022-04-15 | 江苏浦丹光电技术有限公司 | Pressure testing machine and method for integrated optical waveguide modulator |
CN117889998A (en) * | 2024-03-13 | 2024-04-16 | 成都凯天电子股份有限公司 | Sensor chip with stress amplifying structure and preparation method |
Citations (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101324189A (en) * | 2008-07-28 | 2008-12-17 | 西安石油大学 | External pressure type temperature compensation high-temperature high-pressure optical fiber grating sensor |
CN101338166A (en) * | 2008-08-14 | 2009-01-07 | 西安石油大学 | Fiber optics and grating sensor adhesive and method for preparing same |
CN201373786Y (en) * | 2008-12-04 | 2009-12-30 | 哈尔滨工业大学 | Liquid-pressure sensor based on fiber gratings |
JP2015517678A (en) * | 2012-05-25 | 2015-06-22 | ヴァスキュラー イメージング コーポレイションVascular Imaging Corporation | Fiber optic pressure sensor |
CN105806543A (en) * | 2016-05-16 | 2016-07-27 | 中北大学 | Extrinsic fabry-perot interferometer high-temperature pressure sensor |
BR102015031872A2 (en) * | 2015-02-09 | 2016-08-16 | Boeing Co | system for storing a liquid, and method for determining a characteristic of the liquid stored in a storage tank |
RU2628734C1 (en) * | 2016-11-09 | 2017-08-21 | Акционерное общество "Научно-исследовательский институт физических измерений" | Fiber optical pressure sensor |
CN108519175A (en) * | 2018-03-22 | 2018-09-11 | 湖北省路桥集团有限公司 | The soil pressure measurement method of changeable fluid based on bragg grating |
CN208060051U (en) * | 2018-02-06 | 2018-11-06 | 上海光栅信息技术有限公司 | A kind of fiber grating earth pressure sensor |
CN108871652A (en) * | 2018-05-31 | 2018-11-23 | 西安交通大学 | A kind of micromation high temperature resistant high dynamic pressure sensor |
CN208187626U (en) * | 2018-06-04 | 2018-12-04 | 温州汉臣汽车电器有限公司 | A kind of novel gas inlet pressure sensor |
CN208254711U (en) * | 2018-06-20 | 2018-12-18 | 河北领冠仪器仪表有限公司 | A kind of novel fast checking joint of pressure gauge |
CN109060234A (en) * | 2018-08-23 | 2018-12-21 | 芜湖凯兴汽车电子有限公司 | A kind of Novel pressure meter with night vision effect |
CN208350278U (en) * | 2018-07-27 | 2019-01-08 | 罗洪宇 | A kind of novel pressure gage joint mechanism |
CN208458900U (en) * | 2018-07-24 | 2019-02-01 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of fiber bragg grating pressure sensor structure |
CN109406039A (en) * | 2018-11-26 | 2019-03-01 | 闽南师范大学 | A kind of flat membrane structure SIC N wireless and passive pressure sensor and its design and manufacturing method |
CN208588488U (en) * | 2018-08-31 | 2019-03-08 | 歌尔科技有限公司 | A kind of pressure sensor |
-
2019
- 2019-05-27 CN CN201910445797.9A patent/CN110044541A/en active Pending
Patent Citations (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101324189A (en) * | 2008-07-28 | 2008-12-17 | 西安石油大学 | External pressure type temperature compensation high-temperature high-pressure optical fiber grating sensor |
CN101338166A (en) * | 2008-08-14 | 2009-01-07 | 西安石油大学 | Fiber optics and grating sensor adhesive and method for preparing same |
CN201373786Y (en) * | 2008-12-04 | 2009-12-30 | 哈尔滨工业大学 | Liquid-pressure sensor based on fiber gratings |
JP2015517678A (en) * | 2012-05-25 | 2015-06-22 | ヴァスキュラー イメージング コーポレイションVascular Imaging Corporation | Fiber optic pressure sensor |
BR102015031872A2 (en) * | 2015-02-09 | 2016-08-16 | Boeing Co | system for storing a liquid, and method for determining a characteristic of the liquid stored in a storage tank |
CN105806543A (en) * | 2016-05-16 | 2016-07-27 | 中北大学 | Extrinsic fabry-perot interferometer high-temperature pressure sensor |
RU2628734C1 (en) * | 2016-11-09 | 2017-08-21 | Акционерное общество "Научно-исследовательский институт физических измерений" | Fiber optical pressure sensor |
CN208060051U (en) * | 2018-02-06 | 2018-11-06 | 上海光栅信息技术有限公司 | A kind of fiber grating earth pressure sensor |
CN108519175A (en) * | 2018-03-22 | 2018-09-11 | 湖北省路桥集团有限公司 | The soil pressure measurement method of changeable fluid based on bragg grating |
CN108871652A (en) * | 2018-05-31 | 2018-11-23 | 西安交通大学 | A kind of micromation high temperature resistant high dynamic pressure sensor |
CN208187626U (en) * | 2018-06-04 | 2018-12-04 | 温州汉臣汽车电器有限公司 | A kind of novel gas inlet pressure sensor |
CN208254711U (en) * | 2018-06-20 | 2018-12-18 | 河北领冠仪器仪表有限公司 | A kind of novel fast checking joint of pressure gauge |
CN208458900U (en) * | 2018-07-24 | 2019-02-01 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of fiber bragg grating pressure sensor structure |
CN208350278U (en) * | 2018-07-27 | 2019-01-08 | 罗洪宇 | A kind of novel pressure gage joint mechanism |
CN109060234A (en) * | 2018-08-23 | 2018-12-21 | 芜湖凯兴汽车电子有限公司 | A kind of Novel pressure meter with night vision effect |
CN208588488U (en) * | 2018-08-31 | 2019-03-08 | 歌尔科技有限公司 | A kind of pressure sensor |
CN109406039A (en) * | 2018-11-26 | 2019-03-01 | 闽南师范大学 | A kind of flat membrane structure SIC N wireless and passive pressure sensor and its design and manufacturing method |
Non-Patent Citations (1)
Title |
---|
包宏权: "压力传感器结构设计和优化分析", 《中国优秀硕士学位论文全文数据库(信息科技辑)》 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110702280A (en) * | 2019-10-18 | 2020-01-17 | 西安石油大学 | High-sensitivity fiber grating pressure sensor based on square diaphragm |
CN114354037A (en) * | 2022-03-21 | 2022-04-15 | 江苏浦丹光电技术有限公司 | Pressure testing machine and method for integrated optical waveguide modulator |
CN114354037B (en) * | 2022-03-21 | 2022-06-07 | 江苏浦丹光电技术有限公司 | Pressure testing machine and method for integrated optical waveguide modulator |
CN117889998A (en) * | 2024-03-13 | 2024-04-16 | 成都凯天电子股份有限公司 | Sensor chip with stress amplifying structure and preparation method |
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Application publication date: 20190723 |