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CN119060504B - Chip stacking packaging film, preparation method and application thereof - Google Patents

Chip stacking packaging film, preparation method and application thereof Download PDF

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Publication number
CN119060504B
CN119060504B CN202411564813.3A CN202411564813A CN119060504B CN 119060504 B CN119060504 B CN 119060504B CN 202411564813 A CN202411564813 A CN 202411564813A CN 119060504 B CN119060504 B CN 119060504B
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epoxy resin
mass
modified epoxy
acrylic rubber
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CN119060504A (en
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伍得
李婷
廖述杭
苏峻兴
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Wuhan Sanxuan Technology Co ltd
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Wuhan Sanxuan Technology Co ltd
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/561Batch processing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
    • H01L23/295Organic, e.g. plastic containing a filler
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2363/00Characterised by the use of epoxy resins; Derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2463/00Characterised by the use of epoxy resins; Derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2463/00Characterised by the use of epoxy resins; Derivatives of epoxy resins
    • C08J2463/02Polyglycidyl ethers of bis-phenols
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2463/00Characterised by the use of epoxy resins; Derivatives of epoxy resins
    • C08J2463/10Epoxy resins modified by unsaturated compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2479/00Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2461/00 - C08J2477/00
    • C08J2479/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K7/00Use of ingredients characterised by shape
    • C08K7/16Solid spheres
    • C08K7/18Solid spheres inorganic

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Materials Engineering (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Macromolecular Compounds (AREA)

Abstract

The invention discloses a chip stacking and packaging film, which comprises, by mass, 40-45 parts of an inorganic filler, 22-25 parts of a polyether modified epoxy resin, 15-17 parts of an acrylic rubber modified epoxy resin, 5-15 parts of a CTBN modified epoxy resin, 10-12 parts of a bisphenol F type epoxy resin, 10-15 parts of a bisphenol F type benzoxazine, 2-6 parts of a curing agent and 0.4-0.8 part of an accelerator. The chip stacking packaging film has excellent flexibility, fluidity and silicon wafer adhesion, low storage modulus and low moisture absorption rate, and can be applied to multi-chip stacking packaging.

Description

Chip stacking packaging film, preparation method and application thereof
Technical Field
The application relates to the field of semiconductor chip packaging, in particular to a chip stacking packaging film, a preparation method and application thereof.
Background
The chip stacking packaging film is used for fixing the chip on the substrate. The use method comprises the steps of attaching the packaging film on the chip, cutting the chip, attaching the cut chip on the substrate through the packaging film, wire bonding, covering another cut chip, and stacking layer by layer to realize multi-chip packaging. When multi-chip packaging is performed, bonding wires are required to penetrate through the packaging film to realize interconnection among multiple layers of chips. The chip stack package film should have good wire embedding properties. The line embedding properties are a combination of flowability and flexibility, with good line embedding properties corresponding to good flowability and good flexibility. But the wire embedding performance of the chip stacking packaging film still needs to be further improved. In addition, in multi-chip stacked packages, the higher storage modulus of the encapsulation film causes greater stress, resulting in chip cracking or detachment, and therefore, the storage modulus of the encapsulation film needs to be further reduced.
Disclosure of Invention
The application aims to provide a chip stacking and packaging film, a preparation method and application thereof, and the chip stacking and packaging film has excellent flexibility, flowability and silicon wafer adhesion, low storage modulus and low moisture absorption rate.
The chip stacking packaging film comprises, by mass, 40-45 parts of an inorganic filler, 22-25 parts of polyether modified epoxy resin, 15-17 parts of acrylic rubber modified epoxy resin, 5-15 parts of CTBN modified epoxy resin, 10-12 parts of bisphenol F type epoxy resin, 10-15 parts of bisphenol F type benzoxazine, 2-6 parts of a curing agent and 0.4-0.8 part of an accelerator.
In some embodiments, the raw materials of the chip stack packaging film include:
40-42 parts of inorganic filler, 22-25 parts of polyether modified epoxy resin, 15 parts of acrylic rubber modified epoxy resin, 8-15 parts of CTBN modified epoxy resin, 10 parts of bisphenol F type epoxy resin, 10-15 parts of bisphenol F type benzoxazine, 2-6 parts of curing agent and 0.4-0.8 part of accelerator.
In some embodiments, the raw materials of the chip stack packaging film include:
40 parts of inorganic filler, 25 parts of polyether modified epoxy resin, 15 parts of acrylic rubber modified epoxy resin, 10-15 parts of CTBN modified epoxy resin, 10-15 parts of bisphenol F type epoxy resin, 2-6 parts of curing agent and 0.4-0.8 part of accelerator.
In some embodiments, the acrylic rubber modified epoxy resin comprises 0-12 parts by mass of SR-828R10 acrylic rubber modified epoxy resin and 5-15 parts by mass of YLER-200V30 acrylic rubber modified epoxy resin.
In some embodiments, the acrylic rubber modified epoxy resin comprises 0-10 parts by mass of SR-828R10 acrylic rubber modified epoxy resin and 5-15 parts by mass of YLER-200V30 acrylic rubber modified epoxy resin, wherein the SR-828R10 acrylic rubber modified epoxy resin comprises YLER-200V30 acrylic rubber modified epoxy resin.
In some embodiments, the acrylic rubber modified epoxy resin comprises 0-5 parts by mass of SR-828R10 acrylic rubber modified epoxy resin and 10-15 parts by mass of YLER-200V30 acrylic rubber modified epoxy resin, wherein the SR-828R10 acrylic rubber modified epoxy resin comprises YLER-200V30 acrylic rubber modified epoxy resin.
In some embodiments, the inorganic filler is selected from silica, preferably spherical silica having a particle size of 0.1 to 0.9 um.
In some embodiments, the curing agent is selected from amine curing agents and the accelerator is selected from imidazole accelerators.
The second object of the present application is to provide a method for preparing the chip stacking and packaging film, comprising:
the preparation method comprises the steps of taking and mixing raw materials according to a proportion, grinding the mixed raw materials into jelly by using a bead mill, carrying out vacuum defoaming to obtain a glue solution, and coating the glue solution by using a coating machine to obtain the packaging film.
The third object of the present application is to provide an application of the chip stacking packaging film in multi-chip stacking packaging.
Compared with the prior art, the application has the following advantages and beneficial effects:
The chip stacking and packaging film has excellent flexibility, fluidity and silicon wafer adhesion, shows excellent wire embedding performance, has low storage modulus and low moisture absorption rate, has low storage modulus, can provide low stress combination between chips, can avoid chip fragmentation or detachment in the multi-chip stacking and packaging body, and can also ensure that the chips do not move in the wire bonding process.
Detailed Description
The present application will be described in further detail with reference to the following examples in order to make the objects, technical solutions and advantageous effects of the present application more apparent.
The chip stacking packaging film provided by the embodiment of the application comprises, by mass, 40-45 parts of inorganic filler, 22-25 parts of polyether modified epoxy resin, 15-17 parts of acrylic rubber modified epoxy resin, 5-15 parts of CTBN modified epoxy resin, 10-12 parts of bisphenol F type epoxy resin, 10-15 parts of bisphenol F type benzoxazine, 2-6 parts of curing agent and 0.4-0.8 part of accelerator.
In some embodiments, the polyether modified epoxy resin has the following structure:
In some embodiments, the inorganic filler is 40 to 42 parts by mass or 42 to 45 parts by mass.
In some embodiments, the CTBN-modified epoxy resin is 5-8 parts by mass, 5-10 parts by mass, 5-12 parts by mass, 8-10 parts by mass, 8-12 parts by mass, 8-15 parts by mass, 10-12 parts by mass, 10-15 parts by mass, or 12-15 parts by mass.
In some embodiments, the curing agent is 4-5 parts by mass and the accelerator is 0.65-0.7 parts by mass.
In some embodiments, the acrylic rubber modified epoxy resin comprises SR-828R10 type acrylic rubber modified epoxy resin and YLER-200V30 type acrylic rubber modified epoxy resin, wherein the SR-828R10 type acrylic rubber modified epoxy resin comprises 0-12 parts by mass, 0-5 parts by mass, 0-10 parts by mass, 5-12 parts by mass or 10-12 parts by mass, and the YLER-200V30 type acrylic rubber modified epoxy resin comprises 5-15 parts by mass, 5-10 parts by mass or 10-15 parts by mass.
The raw materials used in the examples and comparative examples are specifically as follows:
inorganic filler, spherical silicon dioxide with the grain diameter of 0.1-0.9 um is purchased in the market;
The polyether modified epoxy resin is YLSE-2000 type polyether modified epoxy resin, the epoxy equivalent is 240-260 g/eq, the viscosity is 1500-3000 cps at 25 ℃, and the manufacturer is Nanjing Yuehai new material science and technology Co., ltd;
the acrylic rubber modified epoxy resin comprises SR-828R10 type acrylic rubber modified epoxy resin, wherein the epoxy equivalent is 200-220 g/eq, the viscosity at 25 ℃ is 17000-3700 cps, the YLER-200V30 type acrylic rubber modified epoxy resin, the epoxy equivalent is 200-240 g/eq, the viscosity at 25 ℃ is 10000-50000cps, and SR-828R10 and YLER-200V30 are Nanjing Yuehai new material technology Co., ltd;
CTBN modified epoxy resin is YLSE-C15 CTBN modified epoxy resin, has an epoxy equivalent of 201g/eq and a viscosity of 24700cps at 25 ℃, and is manufactured by Nanjing Yuehai new material science and technology Co., ltd;
bisphenol F type epoxy resin 8170 type bisphenol F type epoxy resin with an epoxy equivalent of 159g/eq and a viscosity of 1000cps at 25 ℃, manufacturer's southern epoxy resin (Kunshan Co., ltd.);
bisphenol F type benzoxazine CB4100 type bisphenol F type benzoxazine, manufacturer is available from high molecular technology Co., ltd;
Dicyandiamide DICY, hydroxyl equivalent weight 21g/eq;
promoter 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Examples and comparative examples provided by the present application are as follows:
Example 1
The raw materials of the embodiment comprise 45 parts by weight of spherical silica, 22 parts by weight of YLSE-2000 type polyether modified epoxy resin, 12 parts by weight of SR-828R10 type acrylic rubber modified epoxy resin, 5 parts by weight of YLER-200V30 type acrylic rubber modified epoxy resin, 5 parts by weight of YLSE-C15 type CTBN modified epoxy resin, 10 parts by weight of 8170 type bisphenol F type epoxy resin, 15 parts by weight of CB4100 type bisphenol F type benzoxazine, 4 parts by weight of dicyandiamide and 0.65 part by weight of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Example 2
The raw materials of the embodiment comprise 42 parts by weight of spherical silica, 22 parts by weight of YLSE-2000 type polyether modified epoxy resin, 10 parts by weight of SR-828R10 type acrylic rubber modified epoxy resin, 5 parts by weight of YLER-200V30 type acrylic rubber modified epoxy resin, 8 parts by weight of YLSE-C15 type CTBN modified epoxy resin, 10 parts by weight of 8170 type bisphenol F type epoxy resin, 15 parts by weight of CB4100 type bisphenol F type benzoxazine, 4 parts by weight of dicyandiamide and 0.7 part by weight of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Example 3
The raw materials of the embodiment comprise 40 parts by weight of spherical silica, 22 parts by weight of YLSE-2000 type polyether modified epoxy resin, 10 parts by weight of SR-828R10 type acrylic rubber modified epoxy resin, 5 parts by weight of YLER-200V30 type acrylic rubber modified epoxy resin, 8 parts by weight of YLSE-C15 type CTBN modified epoxy resin, 10 parts by weight of 8170 type bisphenol F type epoxy resin, 15 parts by weight of CB4100 type bisphenol F type benzoxazine, 4 parts by weight of dicyandiamide and 0.7 part by weight of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Example 4
The raw materials of the embodiment comprise 40 parts by weight of spherical silica, 22 parts by weight of YLSE-2000 type polyether modified epoxy resin, 10 parts by weight of SR-828R10 type acrylic rubber modified epoxy resin, 5 parts by weight of YLER-200V30 type acrylic rubber modified epoxy resin, 10 parts by weight of YLSE-C15 type CTBN modified epoxy resin, 10 parts by weight of 8170 type bisphenol F type epoxy resin, 15 parts by weight of CB4100 type bisphenol F type benzoxazine, 4 parts by weight of dicyandiamide and 0.7 part by weight of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Example 5
The raw materials of the embodiment comprise 40 parts by weight of spherical silica, 25 parts by weight of YLSE-2000 type polyether modified epoxy resin, 10 parts by weight of SR-828R10 type acrylic rubber modified epoxy resin, 5 parts by weight of YLER-200V30 type acrylic rubber modified epoxy resin, 10 parts by weight of YLSE-C15 type CTBN modified epoxy resin, 10 parts by weight of 8170 type bisphenol F type epoxy resin, 15 parts by weight of CB4100 type bisphenol F type benzoxazine, 5 parts by weight of dicyandiamide and 0.7 part by weight of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Example 6
The raw materials of the embodiment comprise 40 parts by weight of spherical silica, 25 parts by weight of YLSE-2000 type polyether modified epoxy resin, 5 parts by weight of SR-828R10 type acrylic rubber modified epoxy resin, 10 parts by weight of YLER-200V30 type acrylic rubber modified epoxy resin, 10 parts by weight of YLSE-C15 type CTBN modified epoxy resin, 10 parts by weight of 8170 type bisphenol F type epoxy resin, 15 parts by weight of CB4100 type bisphenol F benzoxazine, 5 parts by weight of dicyandiamide and 0.7 part by weight of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Example 7
The raw materials of the embodiment comprise 40 parts by weight of spherical silica, 25 parts by weight of YLSE-2000 type polyether modified epoxy resin, 15 parts by weight of YLER-200V30 type acrylic rubber modified epoxy resin, 10 parts by weight of YLSE-C15 type CTBN modified epoxy resin, 10 parts by weight of 8170 type bisphenol F type epoxy resin, 15 parts by weight of CB4100 type bisphenol F type benzoxazine, 5 parts by weight of dicyandiamide and 0.7 part by weight of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Example 8
The raw materials of the embodiment comprise 40 parts by weight of spherical silica, 25 parts by weight of YLSE-2000 type polyether modified epoxy resin, 15 parts by weight of YLER-200V30 type acrylic rubber modified epoxy resin, 12 parts by weight of YLSE-C15 type CTBN modified epoxy resin, 10 parts by weight of 8170 type bisphenol F type epoxy resin, 10 parts by weight of CB4100 type bisphenol F type benzoxazine, 5 parts by weight of dicyandiamide and 0.7 part by weight of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Example 9
The raw materials of the embodiment comprise 40 parts by weight of spherical silica, 25 parts by weight of YLSE-2000 type polyether modified epoxy resin, 15 parts by weight of YLER-200V30 type acrylic rubber modified epoxy resin, 15 parts by weight of YLSE-C15 type CTBN modified epoxy resin, 10 parts by weight of 8170 type bisphenol F type epoxy resin, 10 parts by weight of CB4100 type bisphenol F type benzoxazine, 5 parts by weight of dicyandiamide and 0.7 part by weight of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Comparative example 1
The raw materials of the comparative example comprise 45 parts by mass of spherical silica, 15 parts by mass of YLSE-2000 type polyether modified epoxy resin, 10 parts by mass of SR-828R10 type acrylic rubber modified epoxy resin, 12 parts by mass of 8170 type bisphenol F type epoxy resin, 18 parts by mass of CB4100 type bisphenol F type benzoxazine, 2 parts by mass of dicyandiamide and 0.5 part by mass of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Comparative example 2
The raw materials of the comparative example comprise 45 parts by mass of spherical silica, 18 parts by mass of YLSE-2000 type polyether modified epoxy resin, 10 parts by mass of SR-828R10 type acrylic rubber modified epoxy resin, 12 parts by mass of 8170 type bisphenol F type epoxy resin, 18 parts by mass of CB4100 type bisphenol F type benzoxazine, 2 parts by mass of dicyandiamide and 0.6 part by mass of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Comparative example 3
The raw materials of the comparative example comprise 45 parts by mass of spherical silica, 18 parts by mass of YLSE-2000 type polyether modified epoxy resin, 12 parts by mass of SR-828R10 type acrylic rubber modified epoxy resin, 12 parts by mass of 8170 type bisphenol F type epoxy resin, 18 parts by mass of CB4100 type bisphenol F type benzoxazine, 3 parts by mass of dicyandiamide and 0.6 part by mass of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Comparative example 4
The raw materials of the comparative example comprise 45 parts by mass of spherical silica, 20 parts by mass of YLSE-2000 type polyether modified epoxy resin, 12 parts by mass of SR-828R10 type acrylic rubber modified epoxy resin, 12 parts by mass of 8170 type bisphenol F type epoxy resin, 15 parts by mass of CB4100 type bisphenol F type benzoxazine, 3 parts by mass of dicyandiamide and 0.6 part by mass of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Comparative example 5
The raw materials of the comparative example comprise 42 parts by mass of spherical silica, 20 parts by mass of YLSE-2000 type polyether modified epoxy resin, 12 parts by mass of SR-828R10 type acrylic rubber modified epoxy resin, 12 parts by mass of 8170 type bisphenol F type epoxy resin, 15 parts by mass of CB4100 type bisphenol F type benzoxazine, 4 parts by mass of dicyandiamide and 0.65 part by mass of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Comparative example 6
The raw materials of the comparative example comprise 42 parts by mass of spherical silica, 22 parts by mass of YLSE-2000 type polyether modified epoxy resin, 15 parts by mass of SR-828R10 type acrylic rubber modified epoxy resin, 10 parts by mass of 8170 type bisphenol F type epoxy resin, 15 parts by mass of CB4100 type bisphenol F type benzoxazine, 4 parts by mass of dicyandiamide and 0.65 part by mass of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
Comparative example 7
The raw materials of the comparative example comprise 42 parts by mass of spherical silica, 22 parts by mass of YLSE-2000 type polyether modified epoxy resin, 5 parts by mass of YLSE-C15 type CTBN modified epoxy resin, 10 parts by mass of 8170 type bisphenol F type epoxy resin, 15 parts by mass of CB4100 type bisphenol F type benzoxazine, 4 parts by mass of dicyandiamide and 0.65 part by mass of 4, 5-bis (hydroxymethyl) -2-phenyl-1H-imidazole.
The products of the above examples and comparative examples are prepared by mixing the raw materials in proportion, grinding the mixed raw materials to a jelly with a bead mill, vacuum defoaming to obtain a glue solution, and coating the glue solution with a coater to obtain the packaging film.
The detection method of each performance parameter of the products of the examples and the comparative examples is as follows:
1. Tensile strength and elongation at break:
Cutting a film material with the size of 10mm and 50mm, namely a spline, tearing off a light release film, adhering two ends of the spline by using adhesive tapes, respectively clamping the adhesive tapes at two ends by using a clamp of a universal material testing machine, tearing off a heavy release film, and testing the tensile strength and the elongation at break of the film.
2. Storage modulus:
Referring to the standard ASTM E2254-2018 test method for determination of storage modulus of dynamic mechanical analyzer, a Film was fabricated as a 25mm size sample of 6.5mm 0.25mm, cured at 170 ℃ for 1h, and the measurement mode: tensile: film (Film stretch), heated to 250 ℃ at 5 ℃ per min, and the storage modulus at 25 ℃ was taken.
3. Temperature rising rheological viscosity:
The film material with the thickness of 25um is pasted with 40 layers to prepare a round sample with the thickness of 1mm and the diameter of 20mm, wherein the test mode is Oscillation Temperature Ramp (oscillation mode temperature change), the temperature is raised to 200 ℃ at the temperature raising rate of 5 ℃ per minute, and the viscosity value at 130 ℃ is taken.
4. Moisture absorption rate:
And (3) sticking 20 layers of film materials with the thickness of 25um, then manufacturing 5 sample strips with the size of 8cm multiplied by 1cm, curing at 170 ℃ for 1 hour, weighing, marking the weight as Ma, then performing a pressure cooker steaming test, steaming at 120 ℃ for 24 hours, wiping off the surface moisture of the sample strips after the steaming test is completed, weighing, marking the weight as Mb, and calculating the water absorption rate (Mb-Ma)/Ma. Averaging the absorptivity of 5 sample bars;
5. Silicon wafer adhesion:
and transferring a single-layer film with the thickness of 25um and the thickness of 3mm to a silicon wafer, covering the silicon wafer above the film, clamping, curing for 1h at 170 ℃, and testing the shearing bonding strength, namely the silicon wafer adhesive force by using a universal tensile machine.
The test data for the performance of the above examples and comparative examples are shown in tables 1-2, respectively. Table 1 is the test data for the performance of the example product and table 2 is the test data for the performance of the comparative example product.
Table 1 test data for product properties of examples
Table 2 test data for comparative product properties
The resin matrix comprises polyether modified epoxy resin, acrylic rubber modified epoxy resin and CTBN modified epoxy resin, wherein the polyether modified epoxy resin is low in viscosity and has excellent fluidity and flexibility, the acrylic rubber modified epoxy resin is excellent in adhesive force, the CTBN modified epoxy resin is low in modulus, and the flexibility, fluidity and silicon wafer adhesive force of a packaging film product can be further improved and the modulus and the moisture absorption rate can be reduced by combining the polyether modified epoxy resin, the acrylic rubber modified epoxy resin and the CTBN modified epoxy resin according to specific use amounts. As can also be seen from the performance parameter data in tables 1-2, the products of examples 1-9 have excellent flexibility, flowability and silicon wafer adhesion, and lower modulus and moisture absorption, compared with the products of comparative examples 1-7, thereby exhibiting more excellent line embedding properties.
The above examples are presented for clarity of illustration only and are not limiting of the embodiments. Other variations and modifications of the above description will be apparent to those of ordinary skill in the art, and it is not necessary or exhaustive of all embodiments, and thus all obvious variations or modifications that come within the scope of the invention are desired to be protected.

Claims (9)

1.一种芯片堆叠封装薄膜,其特征是,其原料包括:1. A chip stacking packaging film, characterized in that its raw materials include: 无机填充剂40~45质量份,聚醚改性环氧树脂22~25质量份,丙烯酸橡胶改性环氧树脂15~17质量份,CTBN改性环氧树脂5~15质量份,双酚F型环氧树脂10~12质量份,双酚F型苯并噁嗪10~15质量份,固化剂2~6 质量份,促进剂0.4~0.8质量份;40-45 parts by mass of inorganic filler, 22-25 parts by mass of polyether modified epoxy resin, 15-17 parts by mass of acrylic rubber modified epoxy resin, 5-15 parts by mass of CTBN modified epoxy resin, 10-12 parts by mass of bisphenol F type epoxy resin, 10-15 parts by mass of bisphenol F type benzoxazine, 2-6 parts by mass of curing agent, and 0.4-0.8 parts by mass of accelerator; 所述丙烯酸橡胶改性环氧树脂包括SR-828R10型丙烯酸橡胶改性环氧树脂和YLER-200V30型丙烯酸橡胶改性环氧树脂,其中,SR-828R10型丙烯酸橡胶改性环氧树脂0~12质量份,YLER-200V30型丙烯酸橡胶改性环氧树脂5~15质量份;The acrylic rubber modified epoxy resin includes SR-828R10 acrylic rubber modified epoxy resin and YLER-200V30 acrylic rubber modified epoxy resin, wherein the SR-828R10 acrylic rubber modified epoxy resin is 0-12 parts by mass, and the YLER-200V30 acrylic rubber modified epoxy resin is 5-15 parts by mass; SR-828R10型丙烯酸橡胶改性环氧树脂,环氧当量200~220g/eq,25℃粘度17000-37000cps;YLER-200V30型丙烯酸橡胶改性环氧树脂,环氧当量200~240g/eq,25℃粘度10000-50000cps;SR-828R10和YLER-200V30均为南京悦莱新材料科技有限公司产品。SR-828R10 acrylic rubber modified epoxy resin, epoxy equivalent 200~220g/eq, viscosity 17000-37000cps at 25℃; YLER-200V30 acrylic rubber modified epoxy resin, epoxy equivalent 200~240g/eq, viscosity 10000-50000cps at 25℃; SR-828R10 and YLER-200V30 are both products of Nanjing Yuelai New Material Technology Co., Ltd. 2.如权利要求1所述的芯片堆叠封装薄膜,其特征是,其原料包括:2. The chip stacking packaging film according to claim 1, wherein the raw materials thereof include: 无机填充剂40~42质量份,聚醚改性环氧树脂22~25质量份,丙烯酸橡胶改性环氧树脂15质量份,CTBN改性环氧树脂8~15质量份,双酚F型环氧树脂10质量份,双酚F型苯并噁嗪10~15质量份,固化剂2~6 质量份,促进剂0.4~0.8质量份。40-42 parts by mass of inorganic filler, 22-25 parts by mass of polyether modified epoxy resin, 15 parts by mass of acrylic rubber modified epoxy resin, 8-15 parts by mass of CTBN modified epoxy resin, 10 parts by mass of bisphenol F type epoxy resin, 10-15 parts by mass of bisphenol F type benzoxazine, 2-6 parts by mass of curing agent, and 0.4-0.8 parts by mass of accelerator. 3.如权利要求1所述的芯片堆叠封装薄膜,其特征是,其原料包括:3. The chip stacking packaging film according to claim 1, wherein the raw materials thereof include: 无机填充剂40质量份,聚醚改性环氧树脂25质量份,丙烯酸橡胶改性环氧树脂15质量份,CTBN改性环氧树脂10~15质量份,双酚F型环氧树脂10质量份,双酚F型苯并噁嗪10~15质量份,固化剂2~6 质量份,促进剂0.4~0.8质量份。40 parts by mass of inorganic filler, 25 parts by mass of polyether modified epoxy resin, 15 parts by mass of acrylic rubber modified epoxy resin, 10-15 parts by mass of CTBN modified epoxy resin, 10 parts by mass of bisphenol F type epoxy resin, 10-15 parts by mass of bisphenol F type benzoxazine, 2-6 parts by mass of curing agent, and 0.4-0.8 parts by mass of accelerator. 4.如权利要求2~3中任一项所述的芯片堆叠封装薄膜,其特征是:4. The chip stacking packaging film according to any one of claims 2 to 3, characterized in that: 所述丙烯酸橡胶改性环氧树脂包括SR-828R10型丙烯酸橡胶改性环氧树脂和YLER-200V30型丙烯酸橡胶改性环氧树脂,其中,SR-828R10型丙烯酸橡胶改性环氧树脂0~10质量份,YLER-200V30型丙烯酸橡胶改性环氧树脂5~15质量份。The acrylic rubber modified epoxy resin includes SR-828R10 acrylic rubber modified epoxy resin and YLER-200V30 acrylic rubber modified epoxy resin, wherein the SR-828R10 acrylic rubber modified epoxy resin is 0-10 parts by weight and the YLER-200V30 acrylic rubber modified epoxy resin is 5-15 parts by weight. 5.如权利要求2~3中任一项所述的芯片堆叠封装薄膜,其特征是:5. The chip stacking packaging film according to any one of claims 2 to 3, characterized in that: 所述丙烯酸橡胶改性环氧树脂包括SR-828R10型丙烯酸橡胶改性环氧树脂和YLER-200V30型丙烯酸橡胶改性环氧树脂,其中,SR-828R10型丙烯酸橡胶改性环氧树脂0~5质量份,YLER-200V30型丙烯酸橡胶改性环氧树脂10~15质量份。The acrylic rubber modified epoxy resin includes SR-828R10 acrylic rubber modified epoxy resin and YLER-200V30 acrylic rubber modified epoxy resin, wherein the SR-828R10 acrylic rubber modified epoxy resin is 0-5 parts by weight and the YLER-200V30 acrylic rubber modified epoxy resin is 10-15 parts by weight. 6.如权利要求1~3中任一项所述的芯片堆叠封装薄膜,其特征是:6. The chip stacking packaging film according to any one of claims 1 to 3, characterized in that: 所述无机填充剂选择二氧化硅。The inorganic filler is selected from silicon dioxide. 7.如权利要求1~3中任一项所述的芯片堆叠封装薄膜,其特征是:7. The chip stacking packaging film according to any one of claims 1 to 3, characterized in that: 所述固化剂选择胺固化剂;且所述促进剂选择咪唑类促进剂。The curing agent is an amine curing agent; and the accelerator is an imidazole accelerator. 8.权利要求1~7中任一项所述的芯片堆叠封装薄膜的制备方法,其特征在于,包括:8. The method for preparing a chip stacking packaging film according to any one of claims 1 to 7, characterized in that it comprises: 按配比取原料并混合,用珠磨机将混合后的原料研磨至胶状物,再经真空脱泡得到胶液,采用涂布机对胶液进行涂布即得封装薄膜。The raw materials are taken according to the ratio and mixed, and the mixed raw materials are ground into a colloid by a bead mill, and then vacuum degassing is performed to obtain a glue liquid, and a coating machine is used to coat the glue liquid to obtain a packaging film. 9.权利要求1~7中任一项所述的芯片堆叠封装薄膜在多芯片堆叠封装中的应用。9. Use of the chip stacking packaging film according to any one of claims 1 to 7 in multi-chip stacking packaging.
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CN117417619A (en) * 2023-10-18 2024-01-19 绵阳惠利电子材料有限公司 Medium-temperature curing single-component elastic epoxy resin composition

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EP3064520B1 (en) * 2013-10-29 2019-07-03 Kaneka Corporation Curable resin composition containing polymer fine particles and having improved storage stability

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CN113897027A (en) * 2021-09-28 2022-01-07 江苏泰特尔新材料科技股份有限公司 High-toughness and high-heat-resistance alicyclic epoxy resin and preparation method thereof
CN117417619A (en) * 2023-10-18 2024-01-19 绵阳惠利电子材料有限公司 Medium-temperature curing single-component elastic epoxy resin composition

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