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CN118915245A - Optical fiber coupling structure and optical fiber and chip welding method thereof - Google Patents

Optical fiber coupling structure and optical fiber and chip welding method thereof Download PDF

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Publication number
CN118915245A
CN118915245A CN202411161354.4A CN202411161354A CN118915245A CN 118915245 A CN118915245 A CN 118915245A CN 202411161354 A CN202411161354 A CN 202411161354A CN 118915245 A CN118915245 A CN 118915245A
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optical fiber
chip
wavelength division
division multiplexer
base
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张崇富
陈家鸿
刘家瑜
胡鹏举
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4215Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4236Fixing or mounting methods of the aligned elements
    • G02B6/4237Welding

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

本发明公开了一种光纤耦合结构及其光纤和芯片焊接方法,属于光纤与波分复用器芯片耦合结构技术领域。本发明光纤耦合结构包括波分复用器芯片、金属座、光纤固定器、光纤套筒、芯片底座、光纤、光纤阵列;其中光纤固定器与芯片底座放置在金属座上表面,光纤固定器与金属座通过激光焊连接,芯片底座上方设置有波分复用器芯片,光纤固定器开口正对芯片输出端,光纤固定器底部抵住芯片底座底部,光纤与光纤套筒同轴设置,光纤套筒穿过光纤固定器实现限位,光纤阵列固定在芯片底座。本发明通过激光焊接的方式固定光纤套筒,保证光纤与波分复用器芯片横向以及纵向对准。最后再次调整芯片底座,使用激光焊接固定芯片底座,实现光纤与波分复用器芯片的稳定精准连接。

The present invention discloses an optical fiber coupling structure and an optical fiber and chip welding method thereof, and belongs to the technical field of optical fiber and wavelength division multiplexer chip coupling structure. The optical fiber coupling structure of the present invention includes a wavelength division multiplexer chip, a metal seat, an optical fiber holder, an optical fiber sleeve, a chip base, an optical fiber, and an optical fiber array; wherein the optical fiber holder and the chip base are placed on the upper surface of the metal seat, the optical fiber holder and the metal seat are connected by laser welding, a wavelength division multiplexer chip is arranged above the chip base, the opening of the optical fiber holder is directly opposite to the chip output end, the bottom of the optical fiber holder is against the bottom of the chip base, the optical fiber and the optical fiber sleeve are coaxially arranged, the optical fiber sleeve passes through the optical fiber holder to achieve limiting, and the optical fiber array is fixed to the chip base. The present invention fixes the optical fiber sleeve by laser welding to ensure that the optical fiber and the wavelength division multiplexer chip are aligned horizontally and vertically. Finally, the chip base is adjusted again, and the chip base is fixed by laser welding to achieve stable and accurate connection between the optical fiber and the wavelength division multiplexer chip.

Description

一种光纤耦合结构及其光纤和芯片焊接方法A fiber coupling structure and a fiber and chip welding method thereof

技术领域Technical Field

本发明涉及光纤与波分复用器芯片耦合结构技术领域,尤其涉及一种光纤耦合结构及其光纤和芯片焊接方法。The invention relates to the technical field of optical fiber and wavelength division multiplexer chip coupling structure, and in particular to an optical fiber coupling structure and an optical fiber and chip welding method.

背景技术Background Art

多模干涉仪型、阵列波导光栅型、马赫曾德尔干涉仪型等波分复用器件是光纤通信网络中不可或缺的部分。在射频光子系统中,Sub15GHz黄金频谱下高能效高功率宽带无线系统的应用需求在未来将会快速增长。突破高功率高效率模拟射频前传网络和光电探测器直驱天线的微波光子核心器件的相关技术将变得尤其重要。高输入光功率要求光芯片与光纤之间形成稳定连接,而高效率则要求光芯片和光纤高效耦合降低损耗。常规的光芯片与光纤耦合使用固化剂固定。如“Ranno,L.,et al.(2022)."Integrated PhotonicsPackaging:Challenges and Opportunities."ACS Photonics 9(11):3467-3485.”中所介绍,该方法在高功率输入下连接光纤与器件的固化剂稳定性变差,影响耦合质量,导致输入损耗增大,严重者将损坏光芯片使之无法正常工作。多数对光纤耦合的研究集中在激光器与光纤耦合上,例如公告号为CN108879318A、发明名称为“一种半导体激光器封装结构及其焊接方法”的专利申请中所公开的方案。又如文献“Yi-Cheng,H.,et al.(2005)."A novelfiber alignment shift measurement and correction technique in laser-weldedlaser module packaging."Journal of Lightwave Technology 23(2):486-494.”中介绍的自由光出射封装的激光器。由于激光器的工作特性,光芯片和光纤只需要单端面耦合,相比需要耦合输入和输出两端面的波分复用器耦合难度较低。另一方面,由于器件的微型化导致耦合难度加大,精准光纤与波分复用器等无源光芯片输入/输出耦合技术能够降低光器件插入损耗。虽然有如公布号为CN103323919A、发明名称为“使光学部件与光纤精准地对准的光学组件”的专利申请所提方案可以使光组件和光纤精确对准,但其工序复杂而且耦合要求特殊装置完成,操作难度大。因此需要一种针对波分复用器件并且结构简单操作简易的新型芯片和光纤耦合方法。Wavelength division multiplexing devices such as multimode interferometers, arrayed waveguide gratings, and Mach-Zehnder interferometers are indispensable parts of optical fiber communication networks. In RF photonic systems, the application demand for high-efficiency and high-power broadband wireless systems in the Sub15GHz golden spectrum will grow rapidly in the future. Breakthroughs in the relevant technologies of microwave photonic core devices for high-power and high-efficiency analog RF fronthaul networks and photodetector direct-driven antennas will become particularly important. High input optical power requires a stable connection between the optical chip and the optical fiber, while high efficiency requires efficient coupling between the optical chip and the optical fiber to reduce losses. Conventional optical chips and optical fibers are coupled using a curing agent. As introduced in "Ranno, L., et al. (2022). "Integrated Photonics Packaging: Challenges and Opportunities." ACS Photonics 9(11): 3467-3485.", this method deteriorates the stability of the curing agent used to connect the optical fiber and the device under high power input, affecting the coupling quality and increasing the input loss. In severe cases, the optical chip will be damaged and unable to work normally. Most of the research on fiber coupling focuses on the coupling between laser and fiber, such as the solution disclosed in the patent application with the announcement number CN108879318A and the invention name "A semiconductor laser packaging structure and its welding method". Another example is the free light emission packaged laser introduced in the document "Yi-Cheng, H., et al. (2005). "A novel fiber alignment shift measurement and correction technique in laser-welded laser module packaging." Journal of Lightwave Technology 23(2):486-494." Due to the working characteristics of the laser, the optical chip and the optical fiber only need single-end coupling, which is less difficult than the wavelength division multiplexer that needs to couple the input and output two end faces. On the other hand, due to the increased difficulty of coupling due to the miniaturization of the device, the input/output coupling technology of passive optical chips such as precision optical fiber and wavelength division multiplexer can reduce the insertion loss of optical devices. Although there is a solution proposed in the patent application with publication number CN103323919A and invention name “Optical assembly for precisely aligning optical components with optical fibers” that can precisely align optical components with optical fibers, the process is complicated and the coupling requires special devices to complete, which makes the operation difficult. Therefore, a new chip and optical fiber coupling method for wavelength division multiplexing devices with simple structure and easy operation is needed.

发明内容Summary of the invention

本发明的目的在于,基于实际需求,提供一种高功率输入应用场景下低损耗、耦合稳定、耦合精度高的光纤与波分复用器芯片的耦合结构及其耦合方法。The purpose of the present invention is to provide a coupling structure and a coupling method of an optical fiber and a wavelength division multiplexer chip with low loss, stable coupling and high coupling accuracy in a high power input application scenario based on actual needs.

一方面,本发明公开了一种光纤耦合结构,该结构包括金属座、光纤固定器、光纤套筒、芯片底座、波分复用器芯片、光纤和光纤阵列;In one aspect, the present invention discloses a fiber coupling structure, which includes a metal seat, a fiber holder, a fiber sleeve, a chip base, a wavelength division multiplexer chip, an optical fiber, and an optical fiber array;

其中,光纤固定器与芯片底座置于金属座上表面,光纤固定器与芯片底座均呈类几字型,并分别通过光纤固定器底部与芯片底座底部固定于金属座上表面,光纤固定器高度大于芯片底座高度,芯片底座上方设置有波分复用器芯片;The optical fiber holder and the chip base are placed on the upper surface of the metal base. The optical fiber holder and the chip base are both in a "J" shape and are fixed to the upper surface of the metal base through the bottom of the optical fiber holder and the bottom of the chip base respectively. The height of the optical fiber holder is greater than the height of the chip base. A wavelength division multiplexer chip is arranged above the chip base.

光纤与光纤套筒同轴设置,且光纤套筒内径不小于光纤外径,光纤套筒穿过光纤固定器以与波分复用器芯片相对,且位于光纤固定器内的光纤套筒与光纤固定器固定连接;The optical fiber and the optical fiber sleeve are coaxially arranged, and the inner diameter of the optical fiber sleeve is not less than the outer diameter of the optical fiber. The optical fiber sleeve passes through the optical fiber holder to face the wavelength division multiplexer chip, and the optical fiber sleeve located in the optical fiber holder is fixedly connected to the optical fiber holder;

波分复用器芯片的芯片输入端与固定于芯片底座上的光纤阵列相连,波分复用器芯片的芯片输出端与穿过光纤固定器的光纤套筒中的光纤相连。The chip input end of the wavelength division multiplexer chip is connected to the optical fiber array fixed on the chip base, and the chip output end of the wavelength division multiplexer chip is connected to the optical fiber in the optical fiber sleeve passing through the optical fiber fixture.

进一步的,芯片底座上表面尺寸大于波分复用器芯片的芯片尺寸,波分复用器芯片的芯片输出端面与芯片底座上表面边缘平齐,波分复用器芯片两侧与芯片底座上表面两边缘距离相等。Furthermore, the chip base upper surface size is larger than the chip size of the wavelength division multiplexer chip, the chip output end face of the wavelength division multiplexer chip is flush with the edge of the chip base upper surface, and the distances between the two sides of the wavelength division multiplexer chip and the two edges of the chip base upper surface are equal.

进一步的,还可以将光纤和光纤阵列与波分复用器芯片的连接对换,光纤固定器的开口正对波分复用器芯片的芯片输入端面,波分复用器芯片的芯片输入端用于与穿过光纤固定器的光纤相连,波分复用器芯片的芯片输出端用于与光纤阵列相连。Furthermore, the connection between the optical fiber and the optical fiber array and the wavelength division multiplexer chip can be swapped, the opening of the optical fiber holder is opposite to the chip input end face of the wavelength division multiplexer chip, the chip input end of the wavelength division multiplexer chip is used to connect to the optical fiber passing through the optical fiber holder, and the chip output end of the wavelength division multiplexer chip is used to connect to the optical fiber array.

进一步的,芯片底座上表面的长度大于芯片长度5~7mm。Furthermore, the length of the upper surface of the chip base is 5 to 7 mm greater than the length of the chip.

进一步的,光纤固定器高度大于芯片底座高度4~5mm。Furthermore, the height of the optical fiber holder is 4 to 5 mm greater than the height of the chip base.

进一步的,金属座、光纤固定器、光纤套筒和芯片底座的材料均采用伐合金。Furthermore, the materials of the metal seat, the optical fiber holder, the optical fiber sleeve and the chip base are all made of var alloy.

进一步的,芯片底座的侧面和/或侧面位于金属座上表面的延伸面均开设有窗口,以用于增加调整焊焊点,增加调整焊调整维度。Furthermore, windows are provided on the side surfaces of the chip base and/or the extended surfaces of the side surfaces located on the upper surface of the metal base, so as to increase the adjustment welding points and increase the adjustment welding dimensions.

进一步的,芯片底座的侧面呈类几字型,几字型侧面的左右两侧分别设置两组焊接固定点,以将芯片底座焊接于金属座上表面。Furthermore, the side surface of the chip base is in a shape similar to an "X" character, and two groups of welding fixing points are respectively arranged on the left and right sides of the "X"-shaped side surface to weld the chip base to the upper surface of the metal base.

另一方面,本发明还公开了一种用于本发明的光纤耦合结构的光纤和芯片焊接方法,其包括如下步骤:On the other hand, the present invention also discloses a method for welding an optical fiber and a chip used in the optical fiber coupling structure of the present invention, which comprises the following steps:

A)将波分复用器芯片贴装于芯片底座;A) Mounting the wavelength division multiplexer chip on the chip base;

B)修剪光纤接头,以使光纤接头不超过光纤包层的限定长度,该限定长度为1~5mm;B) trimming the optical fiber connector so that the optical fiber connector does not exceed the limited length of the optical fiber cladding, which is 1 to 5 mm;

C)采用固化剂永久性连接光纤与光纤套筒;C) Use a curing agent to permanently connect the optical fiber and the optical fiber sleeve;

D)将光纤固定器的通过激光焊接至金属座固定;D) Fixing the optical fiber holder to the metal base by laser welding;

E)使用夹具将芯片底座抵住光纤固定器,使用精密调节器将光纤套筒穿过光纤固定器,使用显微镜观察光纤和波分复用器芯片输出端的横向距离,调整芯片底座位置,当光纤光轴与芯片输出波导对齐后,下压贴装在芯片底座的波分复用器芯片将其临时固定;E) Use a clamp to hold the chip base against the fiber holder, use a precision adjuster to pass the fiber sleeve through the fiber holder, use a microscope to observe the lateral distance between the optical fiber and the output end of the wavelength division multiplexer chip, adjust the position of the chip base, and when the optical axis of the optical fiber is aligned with the chip output waveguide, press down the wavelength division multiplexer chip mounted on the chip base to temporarily fix it;

F)将光纤另一端连接激光器,将近红外成像显微镜放置于波分复用器芯片输入端面;F) Connect the other end of the optical fiber to the laser and place the near-infrared imaging microscope on the input end face of the wavelength division multiplexer chip;

G)打开激光,通过近红外成像显微镜观察输出状况,调整光纤套筒位置,当波分复用器芯片的出射通道显示光斑时,使用两束对称激光焊接光纤套筒与光纤固定器,实现光纤套筒与光纤固定器的永久连接;G) Turn on the laser, observe the output status through a near-infrared imaging microscope, adjust the position of the optical fiber sleeve, and when the output channel of the wavelength division multiplexer chip shows a light spot, use two symmetrical laser beams to weld the optical fiber sleeve and the optical fiber holder to achieve permanent connection between the optical fiber sleeve and the optical fiber holder;

H)释放对波分复用器芯片的压力,通过观察近红外成像显微镜输出调整芯片底座,当近红外显微成像显示出射通道光斑时,下压临时固定的波分复用器芯片;H) releasing the pressure on the wavelength division multiplexer chip, adjusting the chip base by observing the output of the near-infrared imaging microscope, and pressing down the temporarily fixed wavelength division multiplexer chip when the near-infrared microscopic imaging shows the emission channel spot;

I)将光纤阵列一路接入光功率计,使用精密调节器夹紧光纤阵列,当输出光功率最大时,将光纤阵列与波分复用器芯片固定;1) Connect the fiber array to the optical power meter, use a precision adjuster to clamp the fiber array, and when the output optical power is maximum, fix the fiber array to the wavelength division multiplexer chip;

J)使用两束对称激光将芯片底座激光焊接至金属座上,释放对波分复用器芯片的压力。J) Use two symmetrical laser beams to laser weld the chip base to the metal base to release the pressure on the wavelength division multiplexer chip.

进一步的,若出现掉光现象,则使用调整焊调整芯片底座以找到最佳耦合位置。Furthermore, if the light falling phenomenon occurs, the chip base is adjusted using adjustment solder to find the best coupling position.

由于波分复用器为无源光器件,光波可以双向传播,因此本发明的光纤和芯片焊接方法同样适用于光纤作为输入端、光纤阵列作为输出端的波分解复用器与光纤耦合。Since the wavelength division multiplexer is a passive optical device, light waves can propagate in both directions, so the optical fiber and chip welding method of the present invention is also applicable to the wavelength division multiplexer and optical fiber coupling with the optical fiber as the input end and the optical fiber array as the output end.

进一步的,步骤D)中,将光纤固定器的通过激光焊接至金属座固定时,在同一时刻,对光纤固定器底部两边同时点焊,以保证光纤固定器垂直于光纤轴向的方向无偏移,固定完前面一对焊接点后固定后面一对。Furthermore, in step D), when the optical fiber holder is fixed to the metal seat by laser welding, at the same time, spot welding is performed on both sides of the bottom of the optical fiber holder to ensure that the optical fiber holder is not offset in the direction perpendicular to the axial direction of the optical fiber. After fixing the front pair of welding points, the rear pair is fixed.

进一步,步骤G)中,通过激光焊接将光纤套筒固定焊接至光纤固定器时,在同一时刻,对光纤固定器开口两边同时点焊,以保证光纤固定器垂直于光纤轴向的方向无偏移,固定完前面一对焊接点后固定后面一对。Furthermore, in step G), when the optical fiber sleeve is fixedly welded to the optical fiber holder by laser welding, at the same time, both sides of the opening of the optical fiber holder are spot welded simultaneously to ensure that the optical fiber holder is not offset in the direction perpendicular to the axial direction of the optical fiber, and the rear pair of welding points are fixed after the front pair of welding points are fixed.

当波分复用器芯片的出射通道显示光斑时,使用两束对称激光焊接光纤套筒与光纤固定器,实现光纤套筒与光纤固定器的永久连接;When the output channel of the wavelength division multiplexer chip shows a light spot, two symmetrical laser beams are used to weld the optical fiber sleeve and the optical fiber holder to achieve permanent connection between the optical fiber sleeve and the optical fiber holder;

本发明提供的技术方案至少带来如下有益效果:The technical solution provided by the present invention brings at least the following beneficial effects:

本申请的光纤耦合结构相对于现有的耦合结构,在固定光纤固定器后先通过调整芯片底座横向位置,实现水平方向上的粗对准,然后通过调整光纤套筒在光纤固定器的高度,实现光纤与芯片的精对准。由于光纤套筒在激光焊接冷却后形成热变形和偏移,会导致耦合效率下降,在光纤部分固定后,需要通过再次调整芯片底座,实现额外维度的调整,本发明提供的光纤和芯片焊接方法使得得到的光纤耦合结构在光纤固定后只需调整光纤阵列便能完成芯片与光纤阵列的高效对接。相比光纤固定器,芯片底座尺寸更大,在激光焊接后芯片的偏移较小,使用对称激光焊接的方式,结合耦合结构对芯片底座的限制,能够有效防止底座焊接过程产生移位。另外,在芯片底座以及光纤套筒激光焊接后均能使用调整焊二次调整由于形变造成的偏移,能够实现比单独通过激光焊接输入光纤更高精度的调整。Compared with the existing coupling structure, the fiber coupling structure of the present application first adjusts the lateral position of the chip base after fixing the fiber holder to achieve rough alignment in the horizontal direction, and then adjusts the height of the fiber sleeve in the fiber holder to achieve fine alignment between the fiber and the chip. Since the fiber sleeve forms thermal deformation and offset after cooling after laser welding, the coupling efficiency will decrease. After the fiber part is fixed, it is necessary to adjust the chip base again to achieve additional dimensional adjustment. The fiber and chip welding method provided by the present invention enables the obtained fiber coupling structure to complete the efficient docking of the chip and the fiber array by only adjusting the fiber array after the fiber is fixed. Compared with the fiber holder, the chip base is larger in size, and the chip offset is smaller after laser welding. The use of symmetrical laser welding, combined with the restriction of the coupling structure on the chip base, can effectively prevent the base from shifting during welding. In addition, after the chip base and the fiber sleeve are laser welded, the adjustment weld can be used to adjust the offset caused by deformation for a second time, which can achieve a higher precision adjustment than the input fiber by laser welding alone.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

为了更清楚地说明本发明实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其它的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

图1为本申请的光纤耦合结构示意图。FIG1 is a schematic diagram of the optical fiber coupling structure of the present application.

图2为本申请的光纤固定器俯视图。FIG. 2 is a top view of the optical fiber holder of the present application.

图3为本申请的光纤耦合结构光纤套筒和光纤固定器激光焊接部分示意图。FIG. 3 is a schematic diagram of the laser welding portion of the optical fiber sleeve and the optical fiber holder of the optical fiber coupling structure of the present application.

图4为本申请的光纤耦合结构芯片底座示意图。FIG. 4 is a schematic diagram of a fiber-coupled structure chip base of the present application.

附图标记:1、芯片底座;2、光纤固定器;3、光纤套筒;4、金属座;5、波分复用器芯片;6、光纤;7、光纤阵列;11和12分别为芯片底座上用于焊接金属座的不同固定点对,21和22分别为光纤固定器上用于焊接金属座的不同固定点对;23和24分别为光纤固定器上用于焊接光纤套筒的不同固定点对。Figure numerals: 1, chip base; 2, optical fiber holder; 3, optical fiber sleeve; 4, metal seat; 5, wavelength division multiplexer chip; 6, optical fiber; 7, optical fiber array; 11 and 12 are different fixed point pairs on the chip base for welding the metal seat, 21 and 22 are different fixed point pairs on the optical fiber holder for welding the metal seat; 23 and 24 are different fixed point pairs on the optical fiber holder for welding the optical fiber sleeve.

具体实施方式DETAILED DESCRIPTION

为使本发明实施例的目的、技术方案和优势更加清楚,下面将结合本发明实施中的附图,对本发明实施例中的技术方案进行详细、完整地描述。显然,所描述的实施例仅是本申请一部分实施例,而不是全部的实施例。通常情况下,在附图中描述和展示的本发明实施例的组件能够使用不同的配置来布置和设计。因此,以下对在附图中提供的本发明的实施例的详细描述并非只在限制要求保护的本申请的范围,而是仅仅表示本发明的选定实施例。To make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be described in detail and completely in conjunction with the drawings in the implementation of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings can be arranged and designed using different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present invention.

如图1所示,本申请的光纤耦合结构包括金属座4、光纤固定器2、光纤套筒3、芯片底座1、波分复用器芯片5、光纤6和光纤阵列7;其中,光纤固定器2与芯片底座1分别通过其底部固定连接于金属座4的上表面,且光纤固定器2的高度大于芯片底座1的高度。优选的,本实施例中,基于光纤固定器2与芯片底座1的底部分别将其焊接固定于金属座4的上表面。芯片底座1上方设置有波分复用器芯片5,光纤固定器2的开口正对波分复用器芯片5的芯片输出端面,光纤6与光纤套筒3同轴设置,且光纤套筒3的内径不小于光纤1的外径,光纤套筒3穿过光纤固定器2以与波分复用器芯片5相对,且位于光纤固定器2内的光纤套筒3与光纤固定器2固定连接;波分复用器芯片5的芯片输入端与固定于芯片底座1上的光纤阵列7相连,波分复用器芯片5的芯片输出端与穿过光纤固定器2的光纤套筒3中的光纤6相连。优选的,芯片底座1的上表面尺寸大于波分复用器芯片5的芯片尺寸,波分复用器芯片5的芯片输出端面与芯片底座1的上表面边缘平齐,波分复用器芯片5的两侧与芯片底座1的上表面两边缘距离相等。此外,在具体实施时,金属座4、光纤固定器2、光纤套筒4、芯片底座1材料均为可伐合金,可伐合金方便焊接、导热性强并且热膨胀系数小,能够减小激光焊接后的位置偏移。As shown in Fig. 1, the fiber coupling structure of the present application includes a metal seat 4, a fiber holder 2, a fiber sleeve 3, a chip base 1, a wavelength division multiplexer chip 5, an optical fiber 6 and an optical fiber array 7; wherein the fiber holder 2 and the chip base 1 are respectively fixedly connected to the upper surface of the metal seat 4 through their bottoms, and the height of the fiber holder 2 is greater than the height of the chip base 1. Preferably, in this embodiment, the fiber holder 2 and the chip base 1 are respectively welded and fixed to the upper surface of the metal seat 4 based on their bottoms. A wavelength division multiplexer chip 5 is arranged above the chip base 1, the opening of the optical fiber holder 2 is directly opposite to the chip output end face of the wavelength division multiplexer chip 5, the optical fiber 6 is coaxially arranged with the optical fiber sleeve 3, and the inner diameter of the optical fiber sleeve 3 is not less than the outer diameter of the optical fiber 1, the optical fiber sleeve 3 passes through the optical fiber holder 2 to face the wavelength division multiplexer chip 5, and the optical fiber sleeve 3 located in the optical fiber holder 2 is fixedly connected to the optical fiber holder 2; the chip input end of the wavelength division multiplexer chip 5 is connected to the optical fiber array 7 fixed on the chip base 1, and the chip output end of the wavelength division multiplexer chip 5 is connected to the optical fiber 6 in the optical fiber sleeve 3 passing through the optical fiber holder 2. Preferably, the upper surface size of the chip base 1 is larger than the chip size of the wavelength division multiplexer chip 5, the chip output end face of the wavelength division multiplexer chip 5 is flush with the upper surface edge of the chip base 1, and the two sides of the wavelength division multiplexer chip 5 are equidistant from the two edges of the upper surface of the chip base 1. In addition, in the specific implementation, the metal seat 4, the optical fiber holder 2, the optical fiber sleeve 4, and the chip base 1 are all made of Kovar alloy, which is easy to weld, has strong thermal conductivity and a small thermal expansion coefficient, and can reduce positional deviation after laser welding.

本申请提供的一种用于上述光纤耦合结构的光纤和芯片焊接方法包括如下步骤:The present application provides a method for welding an optical fiber and a chip for the above optical fiber coupling structure, comprising the following steps:

将波分复用器芯片5贴装在芯片底座1,贴装时需注意波分复用器芯片5的芯片输出端面与芯片底座1的上表面边缘平齐,波分复用器芯片5的两侧与芯片底座1的两边缘等距;Mount the wavelength division multiplexer chip 5 on the chip base 1. When mounting, it should be noted that the chip output end surface of the wavelength division multiplexer chip 5 is flush with the upper surface edge of the chip base 1, and the two sides of the wavelength division multiplexer chip 5 are equidistant from the two edges of the chip base 1;

光纤6修剪光纤接头后插入光纤套筒3内,并使用固化剂固定;After trimming the optical fiber connector, the optical fiber 6 is inserted into the optical fiber sleeve 3 and fixed with a curing agent;

将光纤固定器2通过激光焊接至金属座4固定,如图2所示,使用两束对称激光先焊接固定点对21然后焊接固定点对22;The optical fiber holder 2 is fixed to the metal seat 4 by laser welding, as shown in FIG2 , using two symmetrical laser beams to first weld the fixed point pair 21 and then weld the fixed point pair 22;

使用夹具将芯片底座1抵住光纤固定器2,以防止芯片底座1在光纤轴向方向移动,使用精密调节器将光纤套筒3穿过光纤固定器2,使用显微镜观察光纤6和波分复用器芯片5的芯片输出端面的横向距离,保持芯片底座1抵住光纤固定器2同时调整芯片底座1的位置,当光纤6的光轴与波分复用器芯片5的输出波导对齐后,下压贴装在芯片底座1的波分复用器芯片5以将其临时固定,防止横向距离偏移;Use a clamp to hold the chip base 1 against the optical fiber holder 2 to prevent the chip base 1 from moving in the axial direction of the optical fiber, use a precision adjuster to pass the optical fiber sleeve 3 through the optical fiber holder 2, use a microscope to observe the lateral distance between the optical fiber 6 and the chip output end face of the wavelength division multiplexer chip 5, keep the chip base 1 against the optical fiber holder 2 while adjusting the position of the chip base 1, and when the optical axis of the optical fiber 6 is aligned with the output waveguide of the wavelength division multiplexer chip 5, press down the wavelength division multiplexer chip 5 mounted on the chip base 1 to temporarily fix it to prevent the lateral distance from shifting;

将光纤6的另一端连接激光器,将近红外成像显微镜放置在波分复用器芯片5的芯片输入端面,然后打开激光,通过近红外成像显微镜观察输出状况,调整光纤套筒3的位置,当波分复用器芯片5的出射通道显示光斑,使用两束对称激光焊接将光纤套筒3与光纤固定器2永久连接,如图3所示,先焊接23两个固定点再焊接24两个固定点,使用对称激光能够很好抑制光线套筒3在水平方向的移动,降低后续调整难度,固定好光纤固定器2和光线套筒3后松开夹具。Connect the other end of the optical fiber 6 to the laser, place the near-infrared imaging microscope on the chip input end face of the wavelength division multiplexer chip 5, then turn on the laser, observe the output status through the near-infrared imaging microscope, adjust the position of the optical fiber sleeve 3, and when the output channel of the wavelength division multiplexer chip 5 shows a light spot, use two beams of symmetrical laser welding to permanently connect the optical fiber sleeve 3 to the optical fiber holder 2, as shown in Figure 3, first weld the two fixed points 23 and then weld the two fixed points 24. The use of symmetrical lasers can well suppress the horizontal movement of the optical fiber sleeve 3 and reduce the difficulty of subsequent adjustments. After fixing the optical fiber holder 2 and the optical fiber sleeve 3, release the clamp.

下一步为对准波分复用器芯片5和光纤阵列7,首先释放对波分复用器芯片5的压力,通过观察近红外成像显微镜输出调整芯片底座1,当近红外显微成像显示出射通道光斑时,下压临时固定的波分复用器芯片55,以保证在芯片输入端能够通过输入激光信号完成对准。将光纤阵列7的一路接入光功率计,使用精密调节器夹紧光纤阵列7,当输出光功率最大时,将光纤阵列7与波分复用器芯片5固定。通过固定芯片底座1调整光纤阵列7位置,能够提高波分复用器芯片5输出端至光纤阵列7的耦合效率。The next step is to align the wavelength division multiplexer chip 5 and the optical fiber array 7. First, release the pressure on the wavelength division multiplexer chip 5, and adjust the chip base 1 by observing the output of the near-infrared imaging microscope. When the near-infrared microscopic imaging shows the emission channel spot, press down the temporarily fixed wavelength division multiplexer chip 55 to ensure that the alignment can be completed by inputting the laser signal at the chip input end. Connect one channel of the optical fiber array 7 to the optical power meter, use the precision regulator to clamp the optical fiber array 7, and fix the optical fiber array 7 to the wavelength division multiplexer chip 5 when the output optical power is the maximum. By fixing the chip base 1 to adjust the position of the optical fiber array 7, the coupling efficiency from the output end of the wavelength division multiplexer chip 5 to the optical fiber array 7 can be improved.

光纤阵列7固定在芯片底座1上后,再次调整芯片底座1与光纤固定器2的相对位置至输出光功率最大处,使用两束对称激光将芯片底座1激光焊接至金属座4固定,如图4所示,先焊接固定点11再焊接固定点12,因为芯片底座尺寸相比光纤固定器更大,在激光焊接后芯片的偏移较小,并且在后续调整焊时能够更精确的修正激光焊接后的偏移。由于两次调整都使用对称激光、因此极大减小了光纤6与波分复用器芯片5在水平方向上的相对位移,因此对于光纤套筒只需要通过调整焊调整垂直方向,降低了调整难度并且提高了对准精度。After the optical fiber array 7 is fixed on the chip base 1, the relative position of the chip base 1 and the optical fiber holder 2 is adjusted again to the maximum output optical power, and the chip base 1 is laser welded to the metal base 4 using two symmetrical laser beams, as shown in FIG4 , first welding the fixing point 11 and then welding the fixing point 12. Because the chip base size is larger than the optical fiber holder, the chip offset after laser welding is smaller, and the offset after laser welding can be more accurately corrected during subsequent adjustment welding. Since both adjustments use symmetrical lasers, the relative displacement of the optical fiber 6 and the wavelength division multiplexer chip 5 in the horizontal direction is greatly reduced. Therefore, for the optical fiber sleeve, only the vertical direction needs to be adjusted by adjusting the welding, which reduces the difficulty of adjustment and improves the alignment accuracy.

本申请中,光纤固定器2与芯片底座1放置在金属座4的上表面,光纤固定器2与金属座4通过激光焊连接,芯片底座1上方设置有波分复用器芯片5,光纤固定器2开口正对波分复用器芯片5的芯片输出端面,光纤固定器2的底部抵住芯片底座1的底部,光纤6与光纤套筒3同轴设置,光纤套筒3穿过光纤固定器2实现限位,光纤阵列7固定于芯片底座1。通过激光焊接的方式固定光纤套筒3,保证光纤6与波分复用器芯片5的横向以及纵向对准。最后再次调整芯片底座1,使用激光焊接固定芯片底座1,以实现光纤6与波分复用器芯片5的稳定精准连接。In the present application, the optical fiber holder 2 and the chip base 1 are placed on the upper surface of the metal base 4, and the optical fiber holder 2 and the metal base 4 are connected by laser welding. A wavelength division multiplexer chip 5 is arranged above the chip base 1, and the opening of the optical fiber holder 2 is directly opposite to the chip output end face of the wavelength division multiplexer chip 5. The bottom of the optical fiber holder 2 is against the bottom of the chip base 1, and the optical fiber 6 is coaxially arranged with the optical fiber sleeve 3. The optical fiber sleeve 3 passes through the optical fiber holder 2 to achieve position limiting, and the optical fiber array 7 is fixed to the chip base 1. The optical fiber sleeve 3 is fixed by laser welding to ensure the lateral and longitudinal alignment of the optical fiber 6 and the wavelength division multiplexer chip 5. Finally, the chip base 1 is adjusted again, and the chip base 1 is fixed by laser welding to achieve a stable and accurate connection between the optical fiber 6 and the wavelength division multiplexer chip 5.

最后应说明的是:以上实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

以上所述的仅是本发明的一些实施方式。对于本领域的普通技术人员来说,在不脱离本发明创造构思的前提下,还可以做出若干变形和改进,这些都属于本发明的保护范围。The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the creative concept of the present invention, which all belong to the protection scope of the present invention.

Claims (10)

1. The optical fiber coupling structure comprises a metal seat, an optical fiber fixer, an optical fiber sleeve, a chip base, a wavelength division multiplexer chip, optical fibers and an optical fiber array, and is characterized in that the optical fiber fixer and the chip base are arranged on the upper surface of the metal seat, the optical fiber fixer and the chip base are in a similar shape and are respectively fixed on the upper surface of the metal seat through the bottom of the optical fiber fixer and the bottom of the chip base, the height of the optical fiber fixer is larger than the height of the chip base, and the wavelength division multiplexer chip is arranged above the chip base;
The opening of the optical fiber fixer is opposite to the chip output end face of the wavelength division multiplexer chip, the length of the bottom of the chip base is longer than that of the top of the chip base, and the bottom of the optical fiber fixer is propped against the bottom of the chip base;
The optical fiber and the optical fiber sleeve are coaxially arranged, the inner diameter of the optical fiber sleeve is not smaller than the outer diameter of the optical fiber, the optical fiber sleeve penetrates through the optical fiber fixer to be opposite to the wavelength division multiplexer chip, and the optical fiber sleeve positioned in the optical fiber fixer is fixedly connected with the optical fiber fixer;
The chip input end of the wavelength division multiplexer chip is connected with the optical fiber array fixed on the chip base, and the chip output end of the wavelength division multiplexer chip is connected with the optical fibers in the optical fiber sleeve passing through the optical fiber fixer.
2. The optical fiber coupling structure of claim 1, wherein the upper surface of the chip base has a size greater than the chip size of the wavelength division multiplexer chip, the chip output end face of the wavelength division multiplexer chip is flush with the edge of the upper surface of the chip base, and the two sides of the wavelength division multiplexer chip are equidistant from the two edges of the upper surface of the chip base.
3. The optical fiber coupling structure of claim 1, wherein the optical fibers and the optical fiber array are connected to the wavelength division multiplexer chip in a reciprocal manner, the opening of the optical fiber holder is opposite to the chip input end face of the wavelength division multiplexer chip, the chip input end of the wavelength division multiplexer chip is connected to the optical fibers passing through the optical fiber holder, and the chip output end of the wavelength division multiplexer chip is connected to the optical fiber array.
4. The optical fiber coupling structure of claim 1, wherein the upper surface of the chip base has a length greater than 5-7 mm of the chip length.
5. A fiber coupling structure according to claim 1, wherein the fiber holder has a height greater than 4-5 mm of the height of the chip base.
6. The optical fiber coupling structure of claim 1 wherein the metal base, the fiber holder, the fiber sleeve and the chip base are all made of a vaive alloy.
7. The optical fiber coupling structure according to claim 1, wherein the side surface of the chip base and/or the extension surface of the side surface on the upper surface of the metal base are/is provided with windows.
8. The optical fiber coupling structure of claim 1, wherein the open ends of the fiber holder are respectively provided with a pair of welding fixation points for welding the fiber optic ferrule disposed within the fiber holder.
9. The optical fiber coupling structure of claim 1, wherein the side surface of the chip base is shaped like a Chinese character 'ji', and a welding fixing point is respectively arranged at the left and right sides of the side surface of the Chinese character 'ji' to weld the chip base to the upper surface of the metal base.
10. A method of optical fiber and die bonding for an optical fiber coupling structure according to any one of claims 1 to 9, comprising the steps of:
a) Mounting the wavelength division multiplexer chip on a chip base;
b) Trimming the fiber splice so that the fiber splice does not exceed a defined length of the fiber cladding, the defined length being 1-5 mm;
C) Connecting the optical fiber with the optical fiber sleeve by adopting a curing agent;
D) Fixing the optical fiber fixer to the metal seat by laser welding;
E) The chip base is propped against the optical fiber fixer by using a clamp, the optical fiber sleeve passes through the optical fiber fixer by using a precision regulator, the transverse distance between the optical fiber and the output end of the wavelength division multiplexer chip is observed by using a microscope, the position of the chip base is adjusted, and after the optical axis of the optical fiber is aligned with the output waveguide of the chip, the wavelength division multiplexer chip attached to the chip base is pressed down to temporarily fix the optical fiber;
f) Connecting the other end of the optical fiber with a laser, and placing a near infrared imaging microscope on the input end face of the wavelength division multiplexer chip;
G) Opening laser, observing output conditions through a near infrared imaging microscope, adjusting the position of the optical fiber sleeve, and welding the optical fiber sleeve and the optical fiber fixer by using two symmetrical lasers when the emergent channel of the wavelength division multiplexer chip displays light spots;
H) Releasing the pressure on the wavelength division multiplexer chip, adjusting a chip base by observing the output of the near infrared imaging microscope, and pressing down the temporarily fixed wavelength division multiplexer chip when the near infrared imaging microscope displays the emergent channel light spots;
I) One path of the optical fiber array is connected into an optical power meter, a precise regulator is used for clamping the optical fiber array, and when the output optical power is maximum, the optical fiber array and the wavelength division multiplexer chip are fixed;
J) And (3) using two symmetrical lasers to weld the chip base on the metal base by laser, and releasing the pressure on the wavelength division multiplexer chip.
CN202411161354.4A 2024-08-22 2024-08-22 Optical fiber coupling structure and optical fiber and chip welding method thereof Pending CN118915245A (en)

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