CN118832500A - Automatic equipment for processing hard and brittle materials - Google Patents

Abstract

The invention relates to an automated apparatus for processing hard and brittle materials, comprising a storage area, a processing area and a positioning area which allow communication and isolation; the storage area is provided with a material box and a first middle rotary table for vertically placing the workpieces, a first manipulator for picking up the vertically placed workpieces, a second manipulator for overturning the workpieces and a second middle rotary table for horizontally placing the workpieces; the processing area is used for processing a workpiece and allowing the second manipulator to enter and exit; the positioning area is provided with a positioning device and a third manipulator for switching the position of the workpiece between the second turntable and the positioning device; the second manipulator is used for switching positions of the workpiece among the first turntable, the second turntable and the processing area. The invention can improve the protection level, reduce the occupied area of equipment and reduce the price of the equipment.

Description

Automatic equipment for processing hard and brittle materials

Technical Field

The invention relates to automatic equipment for processing hard and brittle materials, and belongs to the field of mechanical equipment.

Background

The brittle and hard material has the characteristics of high strength, high hardness, manuscript brittleness, wear resistance, corrosion resistance and the like, is incomparable with common metal materials, wherein the brittle and hard material layers represented by ceramics, hard alloy, microcrystalline glass, ruby, sapphire, artificial stone and the like are different, and is widely applied to the fields of electronic products, automobiles, aerospace, military and the like. For example, a wafer, which is a brittle and hard material, is a basic raw material for manufacturing a semiconductor device, and in the manufacturing process, numerical control processing such as grinding, chamfering and the like is required to be performed on the shape of a wafer substrate, specifically, a silicon wafer, i.e., a wafer, is manufactured by performing procedures such as grinding, polishing, slicing and the like on a silicon crystal rod formed by pulling, and then a circuit structure is formed on the wafer through a series of processes and finally packaged into chips and the like, so that the wafer is applied to various electronic devices. The technology barrier for manufacturing brittle and hard materials such as wafers is very high, and particularly in the process of loading and unloading, defects are easily introduced due to contact with pollutants such as particles and dust, so that the processing quality of subsequent procedures is influenced. At present, no automatic loading and unloading device specially aiming at a wafer substrate and the like exists in the market, numerical control machining mainly relies on manual loading and unloading, and the manual loading and unloading is large in deviation and low in efficiency, so that the requirements of customers cannot be met. The mechanical arm partially applied to brittle and hard materials is low in protection level, short in arm extension and high in limitation, and the requirement of data processing on automatic feeding and discharging cannot be met.

Disclosure of Invention

The invention provides automatic equipment for processing hard and brittle materials, and aims to at least solve one of the technical problems in the prior art. Therefore, the invention provides the automatic equipment for processing the hard and brittle materials, which can improve the protection level, reduce the occupied area of the equipment and reduce the price of the equipment.

In one aspect, the present disclosure relates to an automated apparatus for processing hard and brittle materials, comprising:

a storage area, a processing area and a positioning area which allow communication and isolation;

the storage area is provided with a material box and a first middle rotary table for vertically placing workpieces, a first manipulator for picking up the vertically placed workpieces, a second manipulator for overturning the workpieces and a second middle rotary table for horizontally placing the workpieces;

The processing area is used for processing a workpiece and allowing the second manipulator to enter and exit;

the positioning area is provided with a positioning device and a third manipulator for switching the position of the workpiece between the second turntable and the positioning device;

The second manipulator is used for switching positions of the workpiece among the first turntable, the second turntable and the processing area.

Further, the storage area and the positioning area are arranged on one side of the processing area, and the material box is arranged on one side of the storage area far away from the processing area and the positioning area.

Further, the magazine and the first middle turntable are respectively arranged on the right side and the left side of the second middle turntable, the first manipulator and the second manipulator are both arranged above the second middle turntable, the third manipulator is arranged at the rear of the second middle turntable, and the processing area is arranged on the left side of the first middle turntable.

Further, the magazine includes a plurality of stock bins for vertically placing workpieces.

Further, the stock trough is provided with a first trough section, a second trough section and a third trough section which are allowed to be contacted with the workpiece from top to bottom, the first trough section and the third trough section are vertically arranged, and the second trough section is inclined from top to bottom to the inner side.

Further, the device comprises a moving block and a moving guide rail, wherein the material box is arranged on the moving block, and the moving block is arranged on the moving guide rail.

Further, a first automatic door is arranged between the storage area and the positioning area, and a second automatic door is arranged between the storage area and the positioning area.

Further, the third manipulator comprises a rotating table, a telescopic guide rail and a mechanical arm for picking up a workpiece; the mechanical arm is arranged on the telescopic guide rail, and the telescopic guide rail is arranged on the rotating table.

Further, the second turntable is provided in front of the cleaning device for cleaning the workpiece on the second table.

Another aspect of the present invention relates to a control method of an automation apparatus for processing a hard and brittle material, which is applied to the automation apparatus for processing a hard and brittle material of the above embodiment; the method comprises the following steps:

S100, placing the blank workpiece on the first turntable on the second turntable by a second manipulator for cleaning;

S200, placing a finished workpiece on the first middle rotary table into one of the material boxes by the first manipulator, taking out a blank workpiece from the other material box, and then placing the blank workpiece on the first middle rotary table, and simultaneously placing the cleaned blank workpiece on the second middle rotary table on a positioning device by the third manipulator and placing the blank workpiece which is positioned back to the second middle rotary table;

s300, after receiving a finishing instruction of the numerical control machine tool, the second manipulator moves the positioned blank workpiece on the second transfer table into the numerical control machine tool, picks up a finished workpiece on the numerical control machine tool, and then places the blank workpiece on the numerical control machine tool;

s400, a second manipulator moves the finished workpiece out of the numerical control machine tool, the blank workpiece is picked up at the first middle rotary table, and then the finished workpiece taken out of the numerical control machine tool is placed on the first middle rotary table;

s500, repeating the steps S100 to S400 until a finishing instruction is received.

The beneficial effects of the invention are as follows.

The automatic equipment for processing the hard and brittle materials can improve the protection level, reduce the occupied area of the equipment and reduce the price of the equipment.

Through the function district division, adopt the clean mode of transfer, can reduce the influence of cutting fluid and crocus etc. to positioner discernment precision, it is through setting up first automatically-controlled door and second automatically-controlled door to and cooperation manipulator assembly's transportation, can effectively avoid the chip fluid in processing district and crocus etc. to fall into positioner on, be favorable to improving the positioning accuracy of automatic unloading.

Work piece in the delivery box is got through first manipulator, cooperates the upset of second manipulator to switch work piece pose, cooperates through two manipulators of simple structure, replaces traditional high price and area to require high multi freedom manipulator, realizes going up the unloading to the work piece of placing perpendicularly side by side in the delivery box, can effectively reduce equipment area, effectively reduces equipment price and then reduction in production cost.

According to the invention, the first manipulator capable of rotating along the Z axis is arranged, and is matched with the two positioning recognition, so that the manipulator can vertically place workpieces in the transfer trough and the plurality of storage troughs, automatic loading and unloading of the vertically placed workpieces is realized on the basis of effectively preventing the workpieces from being broken in the placing process, the occupied area is effectively reduced, the material box can be arranged at one corner of the equipment, the expansion of a production line is conveniently realized, and the second manipulator capable of switching the positions of the workpieces between horizontal placement and vertical placement is matched, so that the traditional multi-degree-of-freedom mechanical arm loading and unloading mode is replaced, the occupied area of the equipment is effectively reduced, and the manufacturing cost of the equipment is reduced.

Drawings

The foregoing and/or additional aspects and advantages of the invention will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:

Fig. 1 is a structural plan view of an automated apparatus according to an embodiment of the present invention.

Fig. 2 is a structural elevation view of an automated apparatus according to an embodiment of the present invention.

Fig. 3 is a structural side view of an automated apparatus according to an embodiment of the present invention.

Fig. 4 is a structural rear view of a stock area according to an embodiment of the present invention.

Fig. 5 is a schematic view of the structure of a stock area according to an embodiment of the present invention.

Fig. 6 is a schematic structural view of a cartridge according to an embodiment of the present invention.

Fig. 7 is a schematic view of the structural movement direction of an automated device according to an embodiment of the present invention.

Fig. 8 is a manipulator blanking flow chart of an automated apparatus according to an embodiment of the present invention.

Fig. 9 is a workpiece processing flow diagram of an automated apparatus according to an embodiment of the invention.

Reference numerals illustrate:

100. A magazine; 110. a stock bin; 111. a first trough section; 112. a second trough section; 113. a third trough section; 120. a mobile device; 121. a moving block; 122. a moving guide rail; 123. a moving motor; 130. a side plate; 140. a partition plate;

200. A first manipulator; 210. a first moving plate; 220. a first guide rail; 230. a first chuck assembly; 231. a first suction cup; 232. a first connection block; 233. a rotating plate; 234. a first mounting plate;

300. A second manipulator; 310. a second moving plate; 320. a second guide rail; 330. a second chuck assembly; 331. a second suction cup; 332. a second connection block; 333. a connecting bracket; 334. a rotating shaft; 335. a second mounting plate;

400. a third manipulator; 410. a rotating table; 420. a telescopic guide rail; 430. a mechanical arm; 440. a positioning device;

500. A transfer rail;

600. A first turntable; 610. a storage plate; 620. a transfer trough; 621. a fourth trough section; 622. a fifth trough section; 623. a sixth slot section;

700. A second intermediate turntable; 710. a cleaning device; 720. a storage table;

810. A storage area; 820. a processing zone; 830. a positioning area; 840. a first automatic door; 850. a second automatic door; 860. a numerical control machine tool; 870. and (3) a wafer.

Detailed Description

The conception, specific structure, and technical effects produced by the present application will be clearly and completely described below with reference to the embodiments and the drawings to fully understand the objects, aspects, and effects of the present application. It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other.

It should be noted that, unless otherwise specified, when a feature is referred to as being "fixed" or "connected" to another feature, it may be directly or indirectly fixed or connected to the other feature. Further, the descriptions of the upper, lower, left, right, top, bottom, etc. used in the present invention are merely with respect to the mutual positional relationship of the respective constituent elements of the present invention in the drawings.

Furthermore, unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used in the description presented herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used herein includes any combination of one or more of the associated listed items.

It should be understood that although the terms first, second, third, etc. may be used in this disclosure to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element of the same type from another. For example, a first element could also be termed a second element, and, similarly, a second element could also be termed a first element, without departing from the scope of the present disclosure.

Referring to fig. 1 to 9, an automatic apparatus for processing a hard and brittle material according to the present invention includes a magazine 100, a first middle turn table 600 for vertically storing a plurality of workpieces, a first robot 200 for picking up vertically placed workpieces and switching a placement position between the magazine 100 for processing a hard and brittle material of a loading and unloading mechanism and the first middle turn table 600 for processing a hard and brittle material of a loading and unloading mechanism, a second middle turn table 700 for horizontally placing workpieces, and a second robot 300 for turning over the workpieces so that the workpieces of the loading and unloading mechanism for processing a hard and brittle material of the loading and unloading mechanism switch a placement position between the first middle turn table 600 for processing a hard and brittle material of the loading and unloading mechanism and the second middle turn table 700 for processing a hard and brittle material of the loading and unloading mechanism.

Referring to fig. 1, the automation device in the embodiment of the present invention is provided with a processing area 820, a storage area 810 and a positioning area 830, the two areas are separated by an automatic door, the workpiece can be shuttled between the different areas by opening the automatic door, and when the workpiece is processed in a numerical control manner, the automatic door can be closed to reduce pollution to the positioning device 440 caused by processing dust particles and the like, thereby realizing automatic feeding and discharging and being beneficial to ensuring the identification effect of the positioning device 440. Specifically, the storage area 810 and the positioning area 830 are disposed at the front end and the rear end on the same side of the processing area 820, the storage area 810 is provided with a material box 100 for storing workpieces and a cleaning device 710 for cleaning the workpieces, and a first middle rotary table 600 and a second middle rotary table 700 for placing the workpieces and switching the positions of the workpieces, the processing area 820 is a numerical control machine tool 860 for processing fragile materials, the positioning area 830 is internally provided with the positioning device 440, a first automatic door 840 is disposed between the storage area 810 and the processing area 820, a second automatic door 850 is disposed between the storage area 810 and the positioning area 830, and the workpieces can be circulated between different areas through a manipulator assembly.

Referring to fig. 1 and 2, the blank workpiece is vertically placed in the storage area 810, the robot assembly firstly takes the blank workpiece out of the magazine 100, then switches the positions of the blank workpiece through the first intermediate turntable 600 and the second intermediate turntable 700, after the second intermediate turntable 700 is cleaned, the second automatic door 850 is opened, the robot assembly transfers the horizontally placed blank workpiece to the positioning area 830, the second automatic door 850 is closed, after the positioning of the blank workpiece is completed through the positioning device 440, the second automatic door 850 is opened, and the second automatic door 850 is closed after the blank workpiece is transferred onto the second intermediate turntable 700 again. After the numerical control machine tool 860 finishes the processing of the current workpiece, the first automatic door 840 is opened, the manipulator component sends the blank workpiece on the second middle turntable 700 into the numerical control machine tool 860 and closes the first automatic door 840, after the numerical control processing of the workpiece is finished, the first automatic door 840 is opened again, the finished workpiece is transferred to the first middle turntable 600 and closes the first automatic door 840, and finally the workpiece is put back into the magazine 100 through the manipulator component, so that the automatic loading and unloading of one workpiece are finished. By providing the first automatic door 840 and the second automatic door 850, and cooperating with the transfer of the manipulator assembly, the chip liquid and the powder of the processing area 820 can be effectively prevented from falling onto the positioning device 440, which is beneficial to improving the positioning precision of automatic loading and unloading. And through the functional area division, the transfer cleaning mode is adopted, so that the influence of cutting fluid, grinding powder and the like on the identification precision of the positioning device 440 can be reduced.

In some embodiments, the storage area 810 is provided with the magazine 100, the cleaning device 710, the first middle turntable 600 and the second middle turntable 700, referring to fig. 2 and 4, the first middle turntable 600 and the magazine 100 are respectively disposed on the left side and the right side of the second middle turntable 700, the cleaning device 710 is disposed on the front side of the second middle turntable 700, the positioning area 830 is disposed on the rear side of the second middle turntable 700, the processing area 820 is disposed on the left side of the first middle turntable 600, and the magazine 100 for storing blank workpieces and finished workpieces is disposed at a corner of the apparatus, such as the magazine 100 is disposed at the upper left corner of the apparatus, so that manual feeding and discharging can be facilitated, and the apparatus for accessing other processes can be conveniently accessed, thereby realizing the expansion of the production line.

Specifically, an operator first places a plurality of workpieces in the magazine 100, and then places the magazine 100 within the storage area 810. The plurality of workpieces are vertically placed in the material box 100, the manipulator assembly takes out one workpiece from the material box 100, the workpiece is switched from vertical placement to horizontal placement through the first middle rotary table 600 and the second middle rotary table 700, meanwhile, on the second middle rotary table 700, after the horizontally placed workpiece is cleaned through the cleaning device 710, the workpiece is transferred to the positioning device 440 to complete positioning, and then the workpiece is replaced into the second middle rotary table 700, and the workpiece is taken out and processed by the numerical control machine 860.

In some embodiments, the material storage groove 110 is arranged in the material box 100, and the workpiece can be vertically inserted into the material storage groove 110 from above the material box 100, so that the workpiece can be vertically placed in the material box 100, the occupied space of the material storage area in the equipment can be effectively saved, and the occupied area of the equipment is reduced. For example, referring to fig. 3,5 and 6, the cartridge 100 is hollow and box-shaped like, and the cartridge 100 includes two side plates 130 and two partition plates, wherein two sides of one side plate 130 are respectively connected to one side of the two partition plates 140, and two sides of the other side plate 130 are respectively connected to the other side of the two partition plates 140. The stock groove 110 sets up in the inboard of division board 140, the stock groove 110 symmetry setting of both sides, the upper end opening of stock groove 110 sets up in the top of division board 140, the groove width of stock groove 110 is slightly greater than the thickness of work piece, the degree of depth of stock groove 110 is slightly less than its width for when the manipulator subassembly inserts the work piece vertically in stock groove 110, be difficult for causing the work piece to bump garrulous because of contacting with magazine 100, simultaneously, make the work piece keep vertical state on the magazine 100 position of setting for, make things convenient for the manipulator subassembly to carry out automatic unloading.

Further, referring to fig. 6, the stock tank 110 includes a first tank section 111, a second tank section 112, and a third tank section 113, which are disposed from top to bottom, the first tank section 111 and the third tank section 113 are disposed vertically, the third tank section 113 is disposed inside the first tank section 111, and the second tank section 112 is disposed obliquely from outside to inside and from bottom to bottom, it being understood that the second tank section 112 may be parallel to a certain tangent line of the wafer 870. Specifically, the distance between the bottom walls of the two first groove sections 111 symmetrically arranged on two sides is slightly larger than the diameter of the wafer 870, when the manipulator assembly moves to the upper side of the material box 100 and determines the position of the material box for placing the workpiece in the material box 110 through the first recognition positioning, and when the workpiece is driven to move downwards to be placed in the material box 100, the lower side of the wafer 870 enters into the material box 100, at this time, the wafer 870 is not contacted with the groove wall of the material box 110, at this time, a visual positioning system is arranged above the material box 100, photographing is performed above the wafer 870 and the material box 100 in the vertical direction so as to perform the second recognition positioning, whether two sides of the wafer 870 are positioned on the inner sides of the two material boxes 110 symmetrically arranged, and whether two planes of the wafer 870 are positioned between the two side walls of the material box 110 is recognized in real time, if not, the posture of the wafer 870 can be adjusted in time, so that the wafer 870 can be automatically bumped by positioning the wafer 870 for a plurality of times before the wafer 870 enters the material box 100 but is contacted with the material box 100, and the automatic wafer 870 can be effectively reduced, so that the vertical placement of the wafer 870 can be achieved. When the manipulator assembly drives the wafer 870 to move down, two sides of the wafer 870 can be in contact with the groove wall of the first groove section 111, the lower side of the wafer 870 can be in contact with the groove wall of the second groove section 112, and the lowest side of the wafer 870 is suspended, i.e. the third groove section 113 is not in contact with the wafer 870, and by arranging the first groove section 111, the second groove section 112 and the third groove section 113, the wafer 870 can be stored in the material box 100 according to a preset position, and the probability of the wafer 870 being broken is reduced.

In some embodiments, referring to fig. 2 and 5, a plurality of cartridges 100 are disposed in the storage area 810, and the cartridges 100 are placed on the moving device 120, for example, two cartridges 100 are disposed in the storage area 810, so that the plurality of cartridges 100 can be alternately performed, so that the loading and unloading of the manipulator assembly can not be affected when an operator loads and unloads the cartridges 100. Specifically, the moving device 120 includes a moving block 121, a moving rail 122 and a moving motor 123, the cartridge 100 is disposed on the moving block 121, the moving block 121 is disposed on the moving rail 122, and the moving block 121 drives the cartridge 100 to move along the moving rail 122 through the moving motor 123. Further, a manual loading and unloading door is arranged on the equipment outer protection, the moving device 120 drives the material box 100 to be far away from or close to the manual loading and unloading door, after the material box 100 on one moving device 120 is provided with a finished product workpiece, the moving device 120 moves the material box 100 to the manual loading and unloading door, an operator opens the door to take out the material box 100 provided with the finished product workpiece, places the material box 100 provided with the blank workpiece, closes the door, and the moving device 120 moves the material box 100 just loaded in the direction far away from the manual loading and unloading automatic door so as to wait for the manipulator component to take the workpiece. Further, the moving block 121 may be provided with a positioning portion, by which the cartridge 100 is assisted to be placed at a set position of the moving block 121, so as to achieve positioning of the cartridge 100 on the moving block 121. Further, the moving block 121 may be provided with a locking portion by which the cartridge 100 is fixed to the moving block 121 after the positioning is completed.

In some embodiments, referring to fig. 4 and 5, a transfer chute 620 is provided at an upper side of the first transfer table 600, and the first robot 200 may insert a workpiece into the transfer chute 620 from above by adjusting the pose of the workpiece such that the workpiece is vertically placed on the first transfer table 600, i.e., the workpiece in the transfer chute 620 may be vertically placed. Specifically, the first turntable 600 includes a storage plate 610, the storage plate 610 is vertically disposed, and a transfer chute 620 is disposed on an upper side of the storage plate 610. The transfer chute 620 comprises a fourth chute section 621, two fifth chute sections 622 and two sixth chute sections 623, wherein the fourth chute section 621 can be horizontally arranged, two ends of the fourth chute section 621 are respectively connected with the lower ends of the two fifth chute sections 622, the upper ends of the two fifth chute sections 622 are respectively connected with the lower ends of the two sixth chute sections 623, the upper end opening of the sixth chute section 623 is arranged on the upper side surface of the storage plate 610, the sixth chute section 623 can be vertically arranged, and the fifth chute sections 622 incline inwards from top to bottom. It should be noted that, the first turntable 600 has a positioning function, and when the workpiece is processed, the first manipulator 200 first places the workpiece on the first turntable 600, and then transfers the workpiece from the first turntable 600 to the magazine 100 (see fig. 8 and 9).

In some embodiments, for example, the brittle material to be processed is a wafer 870, the bottom wall distance between the two fifth groove segments 622 may be slightly larger than the distance between the wafers 870, when the wafer 870 is placed on the first turntable 600, the center line of the wafer 870 is parallel to the transfer rail 500, two sides of the wafer 870 are respectively embedded in the two sixth groove segments 623, the lower side of the wafer 870 is in contact with the fifth groove segments 622, and the lowest side of the wafer 870 is suspended.

Specifically, after the first manipulator 200 moves above the first turntable 600 and determines the position of the transfer chute 620 in the first turntable 600 for placing the workpiece through the first identification positioning, the workpiece is driven to move down to make the workpiece enter the placement plate 610, and the lower side of the wafer 870 enters the placement plate 610 without contacting with the chute wall of the transfer chute 620, at this time, a visual positioning system may be disposed above the first turntable 600, photographing is performed above the wafer 870 and the first turntable 600 in the vertical direction, so as to perform the second identification positioning, identify whether the two sides of the wafer 870 are already located inside the two transfer chutes 620 in real time, and identify whether the two planes of the wafer 870 are located between the two side walls of the transfer chute 620 in real time, if not, the gesture of the wafer 870 can be adjusted in time, so that by performing the second positioning before the wafer 870 enters the first turntable 600 but is not contacted with the placement plate 610, the wafer 870 is crushed, thereby realizing the automatic vertical placement of the manipulator blanking. When the robot assembly drives the wafer 870 to move down, two sides of the wafer 870 may contact with the groove walls of the sixth groove section 623, the lower side of the wafer 870 may contact with the groove walls of the fifth groove section 622, and the lowest side of the wafer 870 is suspended, i.e. the fourth groove section 621 is not contacted with the wafer 870, and by setting the fourth groove section 621, the fifth groove section 622 and the sixth groove section 623, the wafer 870 may be stored in the first middle turntable 600 according to a preset position, and the probability of the wafer 870 being broken is reduced.

Further, referring to fig. 4 and 5, the first transfer table 600 may be provided with a plurality of transfer tanks 620 having different widths, different depths, and different heights of the lower surfaces. Specifically, the first turntable 600 includes a plurality of storage plates 610 having different specifications of transfer slots 620, and the plurality of storage plates 610 are vertically disposed and are placed side by side along the direction of the transfer rail 500, and the transfer slots 620 are disposed on the upper sides of the storage plates 610, so that the requirement of placing workpieces of different specifications can be met, and frequent replacement of the first turntable 600 is avoided. For example, the first transferring table 600 is provided with a plurality of object placing plates 610, and the opening widths of the plurality of transferring grooves 620 (i.e., the distance between the two sixth groove sections 623) are sequentially increased from left to right, so that the workpieces with sequentially increased diameters are placed from left to right.

In some embodiments, referring to fig. 4 and 5, the second turntable 700 is provided with a table 720, and the workpiece may be horizontally placed on the table 720. The workpiece may be fixed to the second turntable 700 by vacuum suction, electrostatic suction, or the like. The cleaning device 710 is disposed at a side of the second turntable 700 to clean the workpiece on the second turntable 700, for example, the cleaning device 710 may include an air knife through which the workpiece is air-blown.

In some embodiments, referring to fig. 1 and 2, the robot assembly includes a first robot 200, a second robot 300, and a third robot 400, the first robot 200 is configured to take out one workpiece from the magazine 100 and place it on the first turntable 600, the second robot 300 is configured to pick up the workpiece on the first turntable 600 and convert it from a vertical setting to a horizontal setting, then place the workpiece horizontally on the second turntable 700, the second robot 850 is opened, the third robot 400 transfers the workpiece on the second turntable 700 to the positioning device 440, after positioning by the positioning device 440, the third robot 400 returns the workpiece to the second turntable 700, after completing the current workpiece processing with the nc machine 860, the first robot 840 is opened, the second robot 300 transfers the workpiece in the processing area 820 to the first turntable 600, and the workpiece on the second turntable 700 is transferred to the nc machine 860 for processing.

In some embodiments, the first robot 200 and the second robot 300 are both movably disposed on the transfer rail 500, two sides of the transfer rail 500 are disposed in the storage area 810 and the processing area 820, respectively, and the second robot 300 is disposed on a side of the first robot 200 near the processing area 820. The first transferring table 600, the second transferring table 700, the magazine 100 and the workbench of the numerical control machine 860 may be disposed below the transfer rail 500, so that the first robot 200 and the second robot 300 may switch the workpiece placement positions. Specifically, when the second manipulator 300 performs loading and unloading on the numerical control machine 860, the first manipulator 200 may perform loading on the first turntable 600 synchronously, the third manipulator 400 may transfer the workpiece on the second turntable 700 synchronously to perform workpiece positioning, and the operator may perform loading and unloading on one of the cartridges 100 synchronously, so as to perform multiple processes synchronously, and reduce waiting time.

Referring to fig. 4,5 and 7, the first robot 200 is provided with a first moving plate 210, a first guide rail 220 and a first suction cup assembly 230, the first moving plate 210 is horizontally movably disposed on the transfer rail 500, the first guide rail 220 is vertically movably disposed on the first moving plate 210, and the first suction cup assembly 230 is vertically movable along with the first guide rail 220. The first suction cup assembly 230 is provided with a plurality of first suction cups 231, and the plurality of first suction cups 231 are disposed on the same plane, so that the first robot 200 can suck up vertically placed workpieces. For example, a plurality of wafers 870 are arranged side by side along the transfer rail 500, the center line of the wafers 870 is parallel to the transfer rail 500, and the first robot 200 moves to the right of the magazine 100 to pick up the wafers 870 located at the rightmost side of the magazine 100.

Further, the first suction cup assembly 230 further includes a first connection block 232, a rotation plate 233 and a first mounting plate 234, the first connection block 232 is fixed to the lower side of the first guide rail 220, the rotation plate 233 is rotatably disposed at the lower end of the first connection block 232, and the upper end and the lower end of the first mounting plate 234 are respectively connected with the rotation plate 233 and the first suction cup 231. The rotating plate 233 may drive the workpiece to rotate around the Z axis, and the first connecting block 232 may drive the workpiece to move up and down, so that the pose of the workpiece may be changed by the first robot 200 in the process of transferring the workpiece from the magazine 100 to the first transferring table 600. It will be appreciated that four first suction cups 231 may be provided on the first mounting plate 234.

Referring to fig. 1, a plurality of stock bins 100 are provided in the magazine 100, wherein a blank workpiece is placed in a plurality of stock bins 110 on one side, and a plurality of stock bins 110 on the other side are empty, for example, a plurality of stock bins 110 on the right side of the magazine 100 are used for placing the blank workpiece, and a stock bin 110 on the left side of the magazine 100 is empty. Also, the first transfer table 600 is used to place a plurality of workpieces, the diameters of which decrease from right to left, and the workpieces are located on the right side of the first suction cup 231 when the first robot 200 places the workpieces into the transfer chute 620.

Specifically, referring to fig. 8 and 9, after the operator fixes the magazine 100 with the blank workpiece in the half stock chest 110 on the moving device 120, the moving device 120 drives the magazine 100 to move toward the inside of the apparatus, so that the magazine 100 reaches below the transfer rail 500. In the process of feeding the blank workpiece of the magazine 100 to the first turntable 600 by the first manipulator 200, the rotating block rotates first, so that the suction end of the first suction cup 231 faces away from the processing area 820, the first suction cup 231 contacts with the right side surface of the blank workpiece positioned at the rightmost side, after the blank workpiece vertically placed is sucked up, the workpiece is moved to the upper side of the first turntable 600 along the transfer track 500, the vertically placed workpiece is driven to rotate around the Z axis by the rotating block, the blank workpiece is positioned at the right side of the first suction cup 231, and after the first identification positioning and the second identification positioning, the workpiece is driven to move downwards, so that the workpiece can be inserted into the first turntable 600. In the process of transferring the finished workpiece of the first transferring table 600 to the material box 100 by the first manipulator 200, the suction end of the first suction cup 231 is made to face away from the processing area 820 by the rotating block, after the first suction cup 231 reaches the left side of the finished workpiece, the first suction cup 231 contacts with the left side surface of the finished workpiece, the vertically placed finished workpiece is sucked up and lifted up, the first manipulator 200 moves to the upper left side of the material box 100 along the transferring track 500, and the finished workpiece is placed into the empty material storage groove 110 at the rightmost side of the material box 100 by the first identification positioning and the second identification positioning.

Referring to fig. 4,5 and 7, the second robot 300 is provided with a second moving plate 310, a second guide rail 320 and a second suction cup assembly 330, the second moving plate 310 is horizontally movably disposed on the transfer rail 500, the second guide rail 320 is vertically movably disposed on the second moving plate 310, and the second suction cup assembly 330 is vertically movable along with the second guide rail 320. Further, the second suction cup assembly 330 includes a second connection block 332, a connection bracket 333, a rotation shaft 334 and a second mounting plate 335, the second connection block 332 is fixed at the lower end of the second guide rail 320, the connection bracket 333 is in an inverted U-like shape, the upper side of the connection bracket 333 is connected with the second connection block 332, two sides of the lower end of the connection bracket 333 are rotatably connected with two ends of the rotation shaft 334, the second mounting plate 335 is fixed at the middle part of the rotation shaft 334 and can rotate along with the rotation shaft 334, a plurality of second suction cups 331 are arranged on the second mounting plate 335, and a plurality of second suction cups 331 on the same side are on the same plane. After the second manipulator 300 sucks up the workpiece, the second suction cup 331 and the second mounting plate 335 are driven to rotate around the Y axis by the rotation shaft 334, so that the workpiece can be placed horizontally or vertically.

Further, referring to fig. 3 and 5, two second mounting plates 335 are provided, and the two second mounting plates 335 are symmetrically disposed on the rotation shaft 334, and each second mounting plate 335 is provided with a plurality of second suction cups 331. Specifically, after the second suction cup 331 at the lower side sucks up the horizontally arranged blank workpiece on the second middle turntable 700, the workpiece is turned around the Y axis by the rotation axis 334 to make the workpiece at the upper side of the other group of second suction cup 331, that is, the second suction cup 331 originally at the lower side, which sucks the blank workpiece, rotate to the upper side, and move to the upper side of the workbench of the numerical control machine tool 860 along the transfer track 500, the second suction cup 331 at the lower side sucks up the finished workpiece on the workbench by the second suction cup 331 not sucking the blank workpiece, then turns over the two groups of second suction cups 331 by the rotation axis 334, and cooperates with the up-and-down movement of the second manipulator 300 to make the blank workpiece at the lower side, so that after the blank workpiece is placed on the workbench, the second manipulator 300 moves the finished workpiece out of the numerical control machine tool 860 along the transfer track 500, and after the rotation axis 334 drives the workpiece to make the finished workpiece switch from the horizontal placement to the vertical placement, the finished workpiece is placed on the first middle turntable 600, and the finished workpiece on the first middle turntable 600 is removed by the first manipulator 200 and transferred to the magazine 100.

The manipulator assembly is provided with the first manipulator 200 and the second manipulator 300, so that automatic transfer of workpieces between the material box 100 and the numerical control machine 860 can be realized, the manual feeding and discharging of the material box 100 and the feeding and discharging of the workpieces of the numerical control device can be performed step by step simultaneously, the waiting time of machine halt is shortened, and an operator can feed and discharge a plurality of workpieces at one time. The workpiece in the material box 100 is taken out through the first manipulator 200, the workpiece pose is switched by matching with the overturning of the second manipulator 300, and the traditional multi-degree-of-freedom manipulator which is high in price and occupation area requirement is replaced by matching of two manipulators with simple structure, so that automatic feeding and discharging of the vertically side-by-side placed workpieces in the material box 100 are realized, the occupation area of equipment can be effectively reduced, the price of the equipment is effectively reduced, and the production cost is further reduced.

In some embodiments, referring to fig. 1 and 3, the third robot 400 includes a rotation table 410, a telescopic rail 420, and a robot arm 430, the telescopic rail 420 is disposed on an upper side of the rotation table 410, and the robot arm 430 is movably disposed on the telescopic rail 420 such that the robot arm 430 may extend to an outer side of the telescopic rail 420 or retract to an upper side of the telescopic rail 420. Specifically, referring to fig. 8 and 9, the rotation table 410 is disposed at the left side of the positioning device 440, and the rotation table 410 is disposed at the rear of the second transfer table 700, and the rotation table 410 rotates such that the pickup end of the robot arm 430 may face the positioning device 440 or the second transfer table 700. When the second automatic door 850 is opened, the rotating table 410 drives the telescopic guide rail 420 and the mechanical arm 430 to rotate, so that the mechanical arm 430 can enter the stock area, the mechanical arm 430 moves and stretches out along the telescopic guide rail 420, after the mechanical arm 430 picks up the workpiece on the second middle turntable 700, the mechanical arm 430 retracts along the telescopic guide rail 420, and the rotating table 410 rotates, so that the workpiece enters the positioning area 830. When the rotating table 410 rotates to the set position, the mechanical arm 430 extends outward, the workpiece is placed on the positioning device 440, the mechanical arm 430 is retracted, when the workpiece is positioned, the mechanical arm 430 extends out, the mechanical arm 430 is retracted after the positioned workpiece on the positioning device 440 is removed, the second automatic door 850 is opened, the mechanical arm 430 is rotated by the rotating table 410, and the mechanical arm 430 extends out to place the workpiece on the second transferring table 700, so that the workpiece is positioned. It is understood that the third robot 400 may be a bernoulli robot, and the adsorption of the workpieces such as the wafer 870 is implemented using the bernoulli principle.

The invention is provided with the storage area 810, the processing area 820 and the positioning area 830 by the functional partition, and is provided with the transit cleaning, so that the influence of particles, cutting fluid, grinding powder and the like during processing on the identification precision of the positioning device 440 can be reduced. The manipulator assembly is provided with the first manipulator 200 for feeding and discharging the material box 100, the second manipulator 300 for feeding and discharging the numerical control machine 860 and the third manipulator 400 for feeding and discharging the positioning device 440, so that the protection level of the manipulator can be improved, the problem of high shortening limitation of the traditional manipulator is solved, and automatic feeding and discharging of brittle and hard materials can be realized. Through the rotation of the first manipulator 200 and the turnover cooperation of the second manipulator 300, the workpiece can be vertically placed in the material box 100 and the first transferring table 600, so that the mechanical arm 430 with multiple degrees of freedom is replaced by the mechanical arm with simple structure, and the equipment area and the equipment price are effectively reduced.

Referring to fig. 1 to 9, the control method of the automatic device for processing a hard and brittle material according to the technical scheme of the present invention is applied to the automatic device for processing a hard and brittle material according to the embodiment of the present invention, and the method at least includes the following steps:

s100, a second manipulator 300 places a blank workpiece on a first turntable 600 on a second turntable 700 for cleaning;

S200, the first manipulator 200 places the finished workpiece on the first middle rotary table 600 in one of the material boxes 100 and places the workpiece on the first middle rotary table 600 after taking out the workpiece from the other material box 100, and meanwhile, the third manipulator 400 places the cleaned workpiece on the second middle rotary table 700 on the positioning device 440 and places the workpiece which is positioned back to the second middle rotary table 700;

S300, after receiving a finishing instruction of the numerical control machine 860, the second manipulator 300 moves the positioned blank workpiece on the second middle turntable 700 into the numerical control machine 860, picks up a finished workpiece on the numerical control machine 860, and then places the blank workpiece on the numerical control machine 860;

S400, the second manipulator 300 moves the finished workpiece out of the numerical control machine tool 860, the blank workpiece is picked up at the first turntable 600, and then the finished workpiece taken out of the numerical control machine tool 860 is placed on the first turntable 600;

s500, repeating the steps S100 to S400 until a finishing instruction is received.

Referring to fig. 1 to 9, the loading and unloading method of the loading and unloading mechanism for processing a hard and brittle material according to the technical scheme of the invention is applied to the automation equipment for processing the hard and brittle material and the loading and unloading mechanism thereof according to the embodiment of the invention, and the method at least comprises the following steps:

A110, when receiving a blank workpiece feeding instruction, the first manipulator 200 rotates to enable the first sucker 231 to face to a first direction, and the first manipulator 200 moves downwards to suck the blank workpiece at the first side of the material box 100; the first manipulator 200 drives the blank workpiece to move above the first turntable 600 and makes the first suction cup 231 face the second direction; according to the first positioning recognition result, the first manipulator 200 moves downwards to enable the blank workpiece to enter the transfer chute 620, then the relative position between the blank workpiece and the transfer chute 620 is obtained according to the second positioning recognition result, and after the pose of the blank workpiece is adjusted, the blank workpiece is placed on the first transfer table 600;

A200, when receiving a finished workpiece blanking instruction, the first manipulator 200 rotates to enable the first sucker 231 to face the second direction, and the first manipulator 200 moves downwards to suck the finished workpiece on the first middle rotary table 600; the first manipulator 200 drives the finished workpiece to move above the material box 100; according to the third positioning recognition result, the first manipulator 200 moves down to enable the finished workpiece to enter the stock bin 110, then obtains the relative position between the finished workpiece and the stock bin 110 according to the fourth positioning recognition result, adjusts the pose of the finished workpiece, and then places the finished workpiece in the stock bin 110 on the second side in the magazine 100.

According to the invention, the first manipulator 200 capable of rotating along the Z axis is arranged, and is matched with the two positioning recognition, so that the manipulator can vertically place workpieces in the transfer trough 620 and the plurality of storage troughs 110, automatic loading and unloading of the vertically placed workpieces is realized on the basis of effectively preventing the crushing problem in the workpiece placement process, the occupied area is effectively reduced, the material box 100 can be arranged at one corner of the equipment, the expansion of a production line is convenient to realize, and the second manipulator 300 capable of realizing the position change of the workpieces between the horizontal placement and the vertical placement is matched, so that the traditional loading and unloading mode of the multi-degree-of-freedom mechanical arm 430 is replaced, the occupied area of the equipment is effectively reduced, and the manufacturing cost of the equipment is reduced.

The present invention is not limited to the above embodiments, but can be modified, equivalent, improved, etc. by the same means to achieve the technical effects of the present invention, which are included in the spirit and principle of the present disclosure. Are intended to fall within the scope of the present invention. Various modifications and variations are possible in the technical solution and/or in the embodiments within the scope of the invention.

Claims (10)

1. An automated apparatus for processing hard and brittle materials, comprising:

A storage area (810), a processing area (820) and a positioning area (830) allowing communication and isolation;

The storage area (810) is provided with a material box (100) and a first middle rotary table (600) for vertically placing workpieces, and a first manipulator (200) for picking up the vertically placed workpieces, a second manipulator (300) for turning over the workpieces and a second middle rotary table (700) for horizontally placing the workpieces;

The processing area (820) is used for processing workpieces and allowing the second manipulator (300) to enter and exit;

The positioning area (830) is provided with a positioning device (440), and a third robot (400) for switching the position of a workpiece between the second turntable (700) and the positioning device (440);

Wherein the second robot (300) is configured to switch positions of a workpiece between the first turntable (600), the second turntable (700), and the processing zone (820).

2. The automated apparatus for processing hard and brittle materials according to claim 1, wherein the storage zone (810) and the positioning zone (830) are disposed on a side of the processing zone (820), and the cartridge (100) is disposed on a side of the storage zone (810) remote from the processing zone (820) and remote from the positioning zone (830).

3. The automated apparatus for processing hard and brittle materials according to claim 1, wherein the magazine (100) and the first turntable (600) are disposed to the right and left of the second turntable (700), respectively, the first robot (200) and the second robot (300) are both disposed above the second turntable (700), the third robot (400) is disposed behind the second turntable (700), and the processing zone (820) is disposed to the left of the first turntable (600).

4. The automated apparatus for processing hard and brittle materials according to claim 1, characterized in that the magazine (100) comprises a plurality of holding bins (110) for vertically placing workpieces.

5. The automated equipment for processing hard and brittle materials according to claim 4, characterized in that the stock chest (110) is provided with a first slot section (111) from top to bottom and a second slot section (112) and a third slot section (113) allowing contact with the workpiece, the first slot section (111) and the third slot section (113) being vertically arranged, the second slot section (112) being inclined from top to bottom to the inside.

6. The automated apparatus for processing hard and brittle materials according to claim 1, further comprising a moving device (120), the moving device (120) comprising a moving block (121) and a moving rail (122), the cartridge (100) being disposed on the moving block (121), the moving block (121) being disposed on the moving rail (122).

7. The automated apparatus for processing hard and brittle materials according to claim 1, characterized in that a first automatic door (840) is provided between the storage zone (810) and the positioning zone (830), and a second automatic door (850) is provided between the storage zone (810) and the positioning zone (830).

8. The automated apparatus for processing hard and brittle materials according to claim 1, characterized in that the third robot (400) comprises a rotating table (410), a telescopic rail (420) and a robotic arm (430) for picking up a workpiece; the mechanical arm (430) is arranged on the telescopic guide rail (420), and the telescopic guide rail (420) is arranged on the rotating table (410).

9. An automated apparatus for processing hard and brittle materials according to claim 3, characterized in that the second turntable (700) is provided in front of a cleaning device (710) for cleaning the workpiece on the second table.

10. A control method for an automated apparatus for processing hard and brittle materials, applied to the automated apparatus of any of claims 1 to 9; the method comprises the following steps:

S100, a second manipulator (300) places a blank workpiece on a first turntable (600) on a second turntable (700) for cleaning;

S200, a first manipulator (200) places a finished workpiece on a first middle rotary table (600) in one of the material boxes (100) and places the workpiece on the first middle rotary table (600) after taking out the workpiece from the other material box (100), and meanwhile, a third manipulator (400) places a cleaned workpiece on a second middle rotary table (700) on a positioning device (440) and places the workpiece which is positioned back to the second middle rotary table (700);

s300, after a finishing instruction of the numerical control machine tool (860) is received, the second manipulator (300) moves the positioned blank workpiece on the second turntable (700) into the numerical control machine tool (860), picks up a finished workpiece on the numerical control machine tool (860), and then places the blank workpiece on the numerical control machine tool (860);

S400, a second manipulator (300) moves the finished workpiece out of the numerical control machine tool (860), the blank workpiece is picked up at the first middle rotary table (600), and then the finished workpiece taken out of the numerical control machine tool (860) is placed on the first middle rotary table (600);

s500, repeating the steps S100 to S400 until a finishing instruction is received.