CN118685746A - Fixing mechanism and coating equipment - Google Patents

Abstract

A fixing mechanism can realize the fixing of articles by simple operation. The fixing mechanism comprises a fixing piece, a rotating piece, a first elastic piece, a linkage piece and a limiting part. The fixing member is provided with a through hole penetrating through the fixing member along the axial direction thereof. The rotating piece is at least partially positioned in the through hole and comprises a clamping part positioned outside the through hole. The clamping part and the fixing piece are used for clamping articles. The linkage member is slidably disposed in the through hole in the axial direction. The linkage piece is matched with the rotating piece to drive the rotating piece to move along the axial direction and rotate around the axial direction. The limiting part is arranged on the wall of the through hole in a protruding mode and is used for guiding the linkage piece to slide along the axial direction. The limiting part and the linkage piece are used for alternatively propping against the rotating piece. The first elastic piece is sleeved on the rotating piece and is positioned in the through hole, the first end of the first elastic piece abuts against one end part of the through hole, and the second end abuts against one part of the rotating piece. The first elastic member is compressed when the linkage member is pressed. The application also provides coating equipment comprising the fixing mechanism.

Description

Fixing mechanism and coating equipment

Technical Field

The application relates to the field of manufacturing and processing of semiconductors or photovoltaic materials, in particular to a fixing mechanism and coating equipment.

Background

In the process of manufacturing photovoltaic cells, silicon wafers are often coated with films of different functions using a coating apparatus. The coating equipment generally needs to use a carrier plate for carrying the silicon wafer. At present, in a silicon wafer placing mode, the silicon wafer is generally placed in a placing groove of a carrier plate, then a pressing needle is fixed on the carrier plate through screw connection, and the pressing needle abuts against the silicon wafer, so that the silicon wafer is fixed on the carrier plate. In this way, the screws are required to mount and dismount the silicon wafer, resulting in lower efficiency of mounting and dismount the silicon wafer.

Disclosure of Invention

In view of the above, the present application provides a fixing mechanism that can be simply operated to achieve fixing with a carrier plate, the fixing mechanism comprising:

the fixing piece is provided with a through hole which penetrates through the fixing piece along the axial direction of the fixing piece;

The rotating piece is at least partially positioned in the through hole and comprises a clamping part positioned outside the through hole, and the clamping part is used for clamping an article between the fixing piece and the rotating piece;

The linkage piece is slidably arranged in the through hole along the axial direction and is matched with the rotating piece so as to drive the rotating piece to move along the axial direction and rotate around the axial direction when the linkage piece is pressed;

The limiting part is convexly arranged on the hole wall of the through hole and is matched with the linkage piece to guide the linkage piece to slide along the axial direction, and the limiting part and the linkage piece are used for alternately propping against the rotating piece;

The first elastic piece is sleeved on the rotating piece and is positioned in the through hole, the first end of the first elastic piece abuts against one end part of the through hole, the second end of the first elastic piece abuts against one part of the rotating piece, and the first elastic piece is compressed when the linkage piece is pressed.

According to the fixing mechanism, the linkage piece and the rotating piece which are matched with each other are arranged, the linkage piece is pressed to move along the axial direction to drive the rotating piece to move, the limiting part releases the rotating piece, and the linkage piece further drives the rotating piece to move along the axial direction and rotate around the axial direction, so that the clamping and releasing of the article between the clamping part and the fixing piece are realized. After the linkage piece is stopped being pressed, the resilience force of the first elastic piece drives the linkage piece and the rotating piece to axially move, so that the limiting part clamps the rotating piece again. By adopting the fixing mechanism, the clamping and releasing of the fixing mechanism to the article can be realized only by simple pressing action, and the operation is convenient and quick, so that the efficiency can be greatly improved.

The application also provides a coating device, comprising:

The fixing mechanism;

The support plate is provided with a through hole penetrating through the support plate in the thickness direction, the through hole is used for the clamping part to penetrate through, and the clamping part and the fixing part are matched to clamp the support plate after the rotating part rotates around the axial direction; and

And the pressing and holding element is connected with the fixing piece.

The film plating equipment disclosed by the application can be used for easily fixing the silicon wafer on the carrier plate by matching the fixing mechanism with the simple pressing element. When the fixing mechanism is installed on the carrier plate, the clamping part is aligned to pass through the through hole, and the linkage piece is pressed to enable the rotating piece to rotate, so that the carrier plate is clamped between the clamping part and the fixing piece; in addition, the silicon chip can be easily fixed on the carrier plate by being matched with a simple pressing element. Then, the linkage piece is pressed again to enable the rotating piece to rotate, the clamping part can penetrate out of the penetrating hole, and therefore the fixing structure can be removed from the carrier plate. The coating equipment can realize the installation and removal of the fixing mechanism on the carrier plate only by simple operation, and is convenient and quick in overall operation, thereby greatly improving the efficiency.

Drawings

Fig. 1 is a schematic perspective view of a fixing mechanism according to an embodiment of the application.

Fig. 2 is an exploded view of the securing mechanism of fig. 1.

Fig. 3 is a perspective view of a fixing member of the fixing mechanism.

Fig. 4 is a schematic cross-sectional view of the mount of fig. 3.

Fig. 5 is a perspective view of a rotating member of the fixing mechanism.

Fig. 6 is a schematic perspective view of the linkage of the securing mechanism.

Fig. 7 is a perspective view of the linkage and the rotator.

Fig. 8 is a schematic cross-sectional view of the securing mechanism.

Fig. 9 is a schematic cross-sectional view of the fixing mechanism fixed on the carrier plate.

Fig. 10 is a second schematic cross-sectional view of the fixing mechanism fixed on the carrier plate.

Fig. 11 is a schematic partial top view of a carrier plate according to an embodiment of the application.

Description of main reference numerals:

100. A fixing mechanism; 10. a fixing member; 20. a rotating member; 21. a stem portion; 23. a clamping part; 25. a head; 30. a linkage member; 40. pressing the lifting piece; 11. a first end face; 13. a second end face; 12. a through hole; 17. a limiting wall; 81. a first elastic member; 82. a second elastic member; 22. a first slide claw; 31. a mating portion; 33. a connecting rod; 32. a second slide claw; 41. a pressing part; 200. a carrier plate; 210. a through hole; 221. a first occlusal surface; 321. a second occlusal surface; 223. a first stop surface; 323. a second stop surface; 121. a first hole portion; 123. a second hole portion; 122. a limit part; 312. a chute; 401. a receiving groove; 403. a slide slot; 50. a jaw member; 51. a claw portion; 511. an end face; 14. a round table part; 15. a connection part; 14. a round table part; 16. a main body portion; 142. a bottom surface; 143. a side surface; 161. a limit protrusion; 61. a slide block; 611. a conical side; 52. a main part; 53. tail part; 300. a silicon wafer; 220. the holding element is pressed.

Detailed Description

The fixing mechanism of the embodiment of the application is used for fixing the silicon wafer on the carrier plate (or the tray), so that the silicon wafer can be conveniently subjected to physical vapor deposition or chemical vapor deposition and other film plating processing. Referring to fig. 1 and 2, the fixing mechanism 100 includes a fixing member 10, a rotating member 20, a linkage member 30, and a pressing pull member 40, wherein the rotating member 20 and the linkage member 30 are slidably disposed in the fixing member 10, and the pressing pull member 40 is removably disposed on the fixing member 10.

As shown in fig. 3 and 4, the fixing member 10 includes a first end face 11 and a second end face 13 opposite to each other in the axial direction. The first end face 11 and the second end face 13 are arranged in the axial direction of the mount 10. The fixing member 10 is provided with a through hole 12, and the through hole 12 extends through the first end face 11 and the second end face 13 in the axial direction.

As shown in fig. 8, 9 and 10, the rotary member 20 is at least partially located in the through hole 12. Referring to fig. 2 and 8 in combination, the rotating member 20 includes a catching portion 23 located outside the through hole 12. The clamping portion 23 is used for clamping an article, such as the carrier 200, between the fixing member 10 and the clamping portion. The rotating member 20 further includes a shaft portion 21 and a head portion 25, and the catching portion 23 and the head portion 25 connect opposite ends of the shaft portion 21, respectively. The outer diameter of the stem 21 is smaller than the outer diameter of the catch 23 and the outer diameter of the head 25. The head 25 is located in the through hole 12 and the stem 21 extends from the second end face 13 into the through hole 12. The rotating member 20 is sleeved with a first elastic member 81, and in the embodiment of the present application, the rod portion 21 is sleeved with a first spring 81. The first end of the first elastic member 81 abuts against one end portion of the through hole 12, and the second end of the first elastic member 81 abuts against a portion of the rotating member 20. The fixing element 10 extends with a limiting wall 17 at the position of the through hole 12 at the second end face 13. Due to the arrangement of the limiting wall 17, the head 25 and the first elastic member 81 are both limited in the through hole 12 and cannot be separated from the second end face 13, and the first end and the second end of the first elastic member 81 respectively abut against the limiting wall 17 of the through hole 12 and the head 25 of the rotating member 20. The head 25 is provided with a plurality of first pawls 22. In the embodiment of the application, the first elastic member 81 is a spring, but not limited thereto.

As shown in fig. 8 to 10, the linkage member 30 is slidably disposed in the through hole 12 on a side of the rotation member 20 facing away from the second end surface 13. As shown in fig. 6, the link 30 includes a fitting portion 31 facing the rotation member 20 and a connection rod 33 connecting the fitting portion 31, wherein an outer diameter of the connection rod 33 is smaller than an outer diameter of the fitting portion 31. The engaging portion 31 is provided with a plurality of second pawls 32 toward an end face (an end facing away from the connecting rod 33) of the rotating member 20. The second slider 32 cooperates with the first slider 22. When the linkage 30 is pressed to displace in the axial direction toward the second end face 13, the rotation member 20 is driven to move in the axial direction and rotate around the axial direction by the engagement of the first slide pawl 22 and the second slide pawl 32.

As shown in fig. 3 and 4, the wall of the through hole 12 is provided with a limit part 122. In the embodiment of the application, the number of the limiting portions 122 is two, but not limited thereto. The limiting portion 122 extends in an axial direction into a long strip shape. As shown in fig. 6, the linkage 30 is provided with two slide grooves 312 extending in the axial direction. In the embodiment of the present application, the sliding groove 312 is formed in the matching portion 31 of the linkage 30. The limiting portion 122 is configured to cooperate with the sliding slot 312 of the linkage 30, and the limiting portion 122 is retained in the sliding slot 312 to guide the sliding of the linkage 30 in the through hole 12. In addition, the cooperation of the limiting portion 122 and the sliding groove 312 makes the linkage member 30 not rotate in the process of mutually engaging the linkage member 30 and the rotating member 20, and the linkage member 30 can only move along the axial direction. Although not shown, the limiting portion 122 is configured to clamp the first slider 22 of the rotator 20 when the linkage 30 is not pressed. When the link 30 is pressed to move the rotary member 20 in the axial direction, the stopper 122 releases the rotary member 20 to rotate the rotary member 20 in the axial direction while moving the rotary member 20 in the axial direction.

When the linkage 30 is pressed to move toward the rotation member 20, the first elastic member 81 may be compressed. When the pressing of the linkage 30 is stopped, the compressed first elastic member 81 provides a resilient force to drive the rotation member 20 to move toward the linkage 30 in the axial direction, so that the limiting portion 122 again clamps the rotation member 20. The limiting portion 122 and the linkage 30 are used to alternately abut against the rotary member 20.

As shown in FIG. 7, the rotating member 20 is provided with at least one axially spiraling inclined surface and an axially parallel cross section, with one side of the inclined surface being contiguous with one side of the cross section. The link 30 and the stopper 122 alternately slide along the inclined surface.

As shown in fig. 8 to 10, the pressing lifter 40 is removably provided on the fixing member 10. The pressing lifter 40 includes a pressing portion 41. The pressing portion 41 is configured to extend from the first end surface 11 into the through hole 12 to push the linkage 30 to displace toward the second end surface 13 in the axial direction.

The catch 23 is designed as: along with each pressing of the pulling member 40 to the linkage member 30, the linkage member 30 is driven to press the rotation member 20, so that the rotation member 20 is driven to rotate, and the clamping portion 23 is circularly switched between being not overlapped and overlapped with the clamping portion 23 before initial rotation. The cross section of the holding portion 23 in the vertical axial direction is non-circular. As shown in fig. 11, the carrier 200 with which the fixing mechanism 100 is used is provided with a through hole 210 penetrating through the thickness direction. The through hole 210 is used for the clamping portion 23 to pass through in alignment, and the clamping portion 23 cannot pass through the through hole 210 after the rotating member 20 rotates around the axial direction, so as to cooperate with the fixing member 10 to clamp the carrier 200. In the embodiment of the present application, the through hole 210 is substantially consistent with the contour and the size of the clamping portion 23. The shape and size of the holding portion 23 and the through hole 210 are designed so that the holding portion 23 can enter and pass through the through hole 210 when the holding portion 23 is aligned with the through hole 210, and the through hole 210 can be staggered after the rotating member 20 rotates once to hold the carrier 200 between the fixing member 10 and the holding portion 23, and the rotating member 20 rotates once again and can be aligned again through the through hole 210 to disengage the fixing mechanism 100 from the carrier. As shown in fig. 1 and 5, in the present embodiment, the cross section of the holding portion 23 is oval track-shaped, having a length and a width, wherein the length is greater than the width. The length is greater than the width, which is of special significance in order to fix the carrier 200. In other embodiments, for example, the cross-section of the catch 23 may be rectangular, oval, or the like.

Referring to fig. 2 and 5 in combination, the head 25 is provided with a plurality of first pawls 22 connected in sequence toward the periphery of the end face of the link 30. Each first slider 22 includes a first engagement surface 221 and a first stop surface 223 that cross-connects the first engagement surfaces 221. The first engaging surface 221 is curved and is disposed obliquely with respect to the axial direction. The first stop surface 223 is parallel to the axial direction. The first engagement surface 221 of each first slider 22 extends from the first stop surface 223 of an adjacent first slider 22 in an axial direction toward the linkage 30. When the limiting portion 122 is engaged with the first sliding jaw 22, the limiting portion 122 abuts against the first engaging surface 221 of one first sliding jaw 22 and the first stop surface 223 of the adjacent first sliding jaw 22. The first engagement surface 221 forms the inclined surface and the first stop surface 223 forms the cross section. As shown in fig. 2 and 6, the engaging portion 31 is provided with a plurality of second pawls 32 connected in sequence toward the periphery of the end face of the rotating member 20. Each second slider 32 includes a second engagement surface 321 and a second stop surface 323 that cross-connects the second engagement surfaces 321. The second engaging surface 321 is curved and is disposed obliquely with respect to the axial direction. The second stop surface 323 is parallel to the axial direction. The second engagement surface 321 of each second slider 32 extends from the second stop surface 323 of an adjacent second slider 32 in a curved manner axially toward the rotary member 20. In the embodiment of the present application, the outer diameters of the head portion 25 and the fitting portion 31 are equal. At least a portion of one of the slide slots 312 is formed in one of the second slide pawls 32.

When the linkage 30 is pressed to push the rotating member 20 in the axial direction, the rotating member 20 moves in the axial direction to enable the limiting portion 122 not to clamp the first sliding jaw 22 any more, the first sliding jaw 22 and the second sliding jaw 32 are in contact and match with each other, and since the first engaging surface 221 and the second engaging surface 321 are both curved surfaces and are obliquely arranged in the axial direction, and the pressed linkage 30 can only move in the axial direction, during the mutual contact of the first engaging surface 221 and the second engaging surface 321, the first engaging surface 221 slides along the second engaging surface 321, so that the rotating member 20 moves in the axial direction and rotates around the axial direction until the first stopping surface 223 abuts against the second stopping surface 323, and the movement and the rotation of the rotating member 20 are stopped.

In the embodiment of the present application, the head 25 is provided with four first sliding pawls 22 connected in sequence, and the mating portion 31 is provided with four second sliding pawls 32 connected in sequence. Thus, with each pressing of the pressing portion 41, the rotator 20 is brought into abutting engagement with the link 30, and the rotator 20 is rotated (360/4) degrees, that is, 90 degrees, around its center axis.

Initially, the rotating member 20 cannot rotate when a portion of the limiting portion 122 extends out of the sliding groove 312 to clamp the first sliding jaw 22. When the linkage member 30 is pressed downwards, the linkage member 30 abuts against the pressing-down rotation member 20 to enable the rotation member 20 to move axially until the limiting portion 122 is separated from the first sliding pawls 22 which are not clamped/abutted any more, the first sliding pawls 22 and the second sliding pawls 32 start to be mutually meshed, the rotation member 20 rotates and moves axially in the meshing process until the first sliding pawls 22 and the second sliding pawls 32 are clamped with each other and cannot be meshed continuously, and the rotation member cannot rotate, so that the pressing of the linkage member 30 is stopped. In the process of pressing the linkage 30 in front, as the first elastic member 81 is compressed, after the linkage 30 is stopped being pressed, the elastic force of the first elastic member 81 drives the rotating member 20 and the linkage 30 to rebound upwards by a certain distance along the axial direction, the limiting part 122 clamps the first sliding claw 22 again, and the other first sliding claw 22 of the rotating member 20 after rotation is clamped by the limiting part 122.

Fig. 8 shows a state in which the pressing lifter 40 lifts the fixing member 10. Fig. 9 shows a state in which the carrier 200 is held by the fixing member 10 and the rotating member 20, and then the pulling member 40 is pushed to be separated. Fig. 10 shows a second state in which the pulling member 40 is about to be released after the fixing member 10 cooperates with the rotating member 20 to hold the carrier 200.

When the fixing mechanism 100 is used, the holding portion 23 is aligned with the through hole 210 penetrating the carrier 200, and then the pressing portion 41 presses the pulling member 40 to move downward (in the direction of the second end face 13), the pressing portion 41 presses the pushing linkage member 30, and the linkage member 30 pushes the rotating member 20 to move axially so that the limiting portion 122 no longer holds the rotating member 20, so that the linkage member 30 abuts against and drives the rotating member 20 to move and rotate, for example, 90 degrees, and the holding portion 23 no longer aligns with the through hole 210 of the carrier 200, so that the holding portion 23 cannot be separated from the through hole 210, and the carrier 200 is held between the holding portion 23 and the fixing member 10 by the holding portion 23, specifically, between the holding portion 23 and the second end face 13 of the fixing member 10 by the carrier 200. At this time, the first elastic member 81 is in a compressed state, and elastically abuts against the retaining portion 23 and the limiting wall 17. When the pressing portion 41 stops pressing the pushing linkage 30, the compressed first elastic member 81 pushes the rotating member 20 to reset, and the limiting portion 122 again clamps the rotating member 20.

Referring to fig. 4, the through hole 12 includes a first hole 121 penetrating the first end face 11 and a second hole 123 penetrating the second end face 13, the first hole 121 and the second hole 123 are aligned and coaxially disposed, and an inner diameter of the first hole 121 is smaller than an inner diameter of the second hole 123.

Referring to fig. 8 to 10, the engaging portion 31 and the head 25 are limited in the second hole 123 and cannot be separated, the outer diameter of the engaging portion 31 is substantially equal to the inner diameter of the second hole 123, and the outer diameter of the head 25 is substantially equal to the inner diameter of the second hole 123. In addition, the second hole portion 123 is provided with a limiting wall 17 at the second end face 13 to prevent the head 25 from being detached from the second end face 13, to prevent the rotary member 20 from being detached from the fixed member 10, and the outer diameter of the rod portion 21 is substantially equal to the opening inner diameter at the second end face 13, when the size of the catching portion 23 is larger than the opening size of the second hole portion 123 at the second end face 13, to prevent the catching portion 23 from entering the through hole 12. The outer diameter of the connecting rod 33 is substantially equal to the inner diameter of the first hole 121, and since the outer diameter of the fitting portion 31 is larger than the outer diameter of the connecting rod 33, the fitting portion 31 can be limited only to the second hole 123 and cannot enter the first hole 121. The outer diameter of the pressing portion 41 is substantially equal to the inner diameter of the first hole 121.

As shown in fig. 8 to 10, the pressing lifter 40 is provided with a receiving groove 401, and the pressing portion 41 is located in the receiving groove 401, specifically, is provided protruding on the groove bottom wall of the receiving groove 401. The pressing pull member 40 is covered on the fixing member 10, and at least a portion of the fixing member 10 is protruded into the accommodating groove 401 so that the pressing portion 41 is aligned to protrude into the through hole 12.

The pressing and pulling member 40 is further provided with two opposing slide slot holes 403, and each slide slot hole 403 is in cross communication with the receiving slot 401. In the embodiment of the present application, the sliding slot 403 penetrates the pressing pull member 40 along the vertical axial direction. A jaw member 50 is slidably disposed in each slide slot 403. The jaw members 50 are adapted to cooperate with the anchor 10 to hold the anchor 10 in place or to release the anchor from the anchor 10. When the claw member 50 holds the fixed member 10, the fixed member 10 and the rotating member 20 and the interlocking member 30 in the fixed member 10 can be lifted together by lifting the push-pull member 40. When the jaw member 50 releases the fixing member 10, the push-pull member 40 can be disengaged from the fixing member 10.

As shown in fig. 3 and 7, the fixing member 10 further includes a truncated cone portion 14, a connecting portion 15, and a main body portion 16, which are sequentially connected in the axial direction. The through hole 12 penetrates the truncated cone portion 14, the connecting portion 15, and the main body portion 16. When the pressing and pulling member 40 is disposed on the fixing member 10, the pressing and pulling member 40 covers at least the truncated cone portion 14. The truncated cone portion 14 has a truncated cone shape and includes a top surface 11 and a bottom surface 142 which are opposed to each other, and a side surface 143 connected between the top surface 11 and the bottom surface 142, the top surface 11 being a first end surface 11, and the side surface 143 being a conical surface. The truncated cone portion 14 is gradually thickened (the cross-sectional diameter is gradually increased) in the axial direction from the top surface 11 toward the bottom surface 142. The outer diameter of the connecting portion 15 is smaller than the outer diameters of the truncated cone portion 14 and the main body portion 16. The main body 16 is further provided with a limiting protrusion 161 protruding in a direction perpendicular to the axial direction for limiting the carrier 200, specifically, limiting the carrier 200 when the clamping portion 25 is aligned with the through hole 210.

As shown in fig. 8 to 10, the jaw member 50 includes a claw portion 51 retained in the chute hole 403, the claw portion 51 having an end surface 511 facing the fixing member 10. The end face 511 is beveled. The width of the claw portion 51 is tapered in the axial direction and in the direction in which the first end face 11 is directed toward the second end face 13. End surface 511 mates with side surface 143 such that end surface 511 is slidable along side surface 143.

The claw member 50 is sleeved with a second elastic member 82, and the second elastic member 82 is limited between the claw portion 51 and the wall of the chute hole 403. The claw portion 51 is engaged with the circular truncated cone portion 14, specifically, an end surface 511 (inclined surface) of the claw portion 51 is engaged with a side surface 143 (conical surface) of the circular truncated cone portion 14. During the engagement, the claw portion 51 slides along the slide groove hole 403 in a direction away from the accommodating groove 401, so that the second elastic member 82 can be compressed. In the embodiment of the application, the second elastic member 82 is a spring, but not limited to this.

When the pressing portion 41 is pressed down, the claw member 50 moves downward (toward the second end surface 13) along the side surface 143 (conical surface) of the circular truncated cone portion 14, and at the same time, the second elastic member 82 is compressed, and when the claw portion 51 of the claw member 50 reaches the bottom surface 142 of the circular truncated cone portion 14, the elastic force of the second elastic member 82 is released, and the claw portion 51 of the claw member 50 lifts the circular truncated cone portion 14 of the fixing member 10, so that the pressing and pulling member 40 can lift the fixing member 10.

As shown in fig. 8 to 10, the connecting portion 15 is slidably fitted with a slider 61, and the slider 61 is limited between the circular truncated cone portion 14 and the main body portion 16. The slider 61 is in the shape of a truncated cone and comprises conical sides 611, the slider 61 being tapered in the axial direction with the first end face 11 pointing towards the second end face 13. The claw portion 51 is engaged with the slider 61, specifically, an end surface (inclined surface) of the claw portion 51 is engaged with a conical side surface 611 of the slider 61. During the engagement of the claw portion 51 with the slider 61, the claw portion 51 slides along the chute hole 403 in a direction away from the accommodation groove 401 (outer circumferential direction), so that the second elastic member 82 can be compressed, thereby enabling the push-pull member 40 to be released and removed from the fixing member 10.

Specifically, when the push-pull member 40 is required to be pushed and pulled out, the push-pull member 40 is pushed and pulled upward, the claw member 50 is pushed to the conical side 611 of the slider 61, so as to drive the slider 61 to move toward the first end face 11, when the slider 61 reaches the bottom face 142 of the circular truncated cone portion 14, the claw member 50 is pushed and pulled upward due to the stop of the circular truncated cone portion 14, and at this time, the claw member 50 and the conical side 611 are pressed against each other, so that the claw member 50 slides along the chute hole 403 in a direction away from the accommodating groove 401, and the second elastic member 82 is compressed until the claw member 50 is completely separated from the fixing member 10.

As shown in fig. 2 and 8, the jaw member 50 further includes a main portion 52 and a tail portion 53, the tail portion 53 and the jaw portion 51 being connected to opposite ends of the main portion 52, respectively. The tail 53 is located outside the slide slot 403, the main portion 52 extends into the slide slot 403, the outer diameter of the tail 53 and the outer diameter of the claw 51 are both larger than the outer diameter of the main portion 52, and the second elastic member 82 is sleeved on the main portion 52. The outer diameter of the claw portion 51 is larger than the entrance dimension of the slide groove hole 403, i.e., the slide groove hole 403 is provided with a stopper wall (not shown) to prevent the claw portion 51 from coming out of the slide groove hole 403 and the tail portion 53 from entering into the slide groove hole 403, thereby preventing the claw member 50 from coming out of the push-pull member 40 from the slide groove hole 403.

It will be appreciated that the top surface 11 of the push-pull member 40 may be coupled to a driving mechanism for driving the push-pull member 40 to lift or push down, and the driving mechanism may be configured as various mechanisms such as a head tooling, a module, an electric cylinder, etc. of the robot.

When the fixing mechanism 100 is used, the claw member 50 is brought into a state of supporting the fixing member 10, and the holding portion 23 is aligned with the through hole 210 of the carrier 200 and passes through the through hole 210 until the limit projection 161 abuts against the carrier 200. The pressing and pulling member 40 is pressed down, the pressing portion 41 presses down the linkage member 30, and the linkage member 30 presses down and drives the rotation member 20 to rotate by about 90 degrees, so that the clamping portion 23 is matched with the fixing member 10 to clamp the carrier 200. The pressing pull member 40 continues to be pushed down over the slider 61, and then the pressing pull member 40 is lifted up, and the jaw member 50 lifts the slider 61 until the jaw member 50 is lifted up by the conical surface of the slider 61, and the jaw member 50 no longer holds the fixing member 10, so that the pressing pull member 40 can be removed from the fixing member 10, and the fixing member 10, the link member 30, and the rotation member 20 remain fixed to the carrier plate 200.

When it is desired to remove the fixture 10 from the carrier 200, the push pull 40 is directed downward toward the fixture 10, with the jaw members 50 facing downward through the conical surface of the boss 14, but not through the slide 61. The pressing portion 41 presses down the linkage member 30, the linkage member 30 presses down and drives the rotation member 20 to rotate 90 degrees, so that the clamping portion 23 is aligned with the through hole 210 on the carrier 200, and at this time, the clamping portion 23 no longer clamps the carrier 200. The pressing lifter 40 is lifted upward, and the claw member 50 lifts the round table portion 14 of the fixing member 10, so that the pressing lifter 40 and the fixing member 10 are separated from the carrier 200. The fixing mechanism 100 is used for fixing a silicon wafer to the carrier 200, and the carrier 200 is provided with a through hole 210 corresponding to the holding portion 23.

The application also provides a coating device, which comprises the fixing mechanism 100, the carrier plate 200 and the pressing element 220. As shown in fig. 9 and 10, a silicon wafer 300 is placed on the carrier 200, and in order to fix the silicon wafer 300 on the carrier 200, the fixing member 10 may be connected through the pressing element 220, and the pressing element 220 may be pressed against the silicon wafer 300, so as to fix the silicon wafer 300 on the carrier 200. The hold-down element 220 may be a hold-down element conventional in the art such as a compression tab, needle, bead, etc. It can be understood that the carrier 200 is provided with a plurality of silicon chips 300, so a plurality of through holes 210 are required to be formed, and each through hole 210 is correspondingly provided with a fixing mechanism 100.

According to the fixing mechanism 100 provided by the embodiment of the application, through arranging the linkage piece 30 and the rotating piece 20 which are matched with each other, the pressing part 41 drives the linkage piece 30 to move along the axial direction to drive the rotating piece 20 to move, so that the limiting part 122 releases the rotating piece 20, and the linkage piece 30 further drives the rotating piece 20 to move along the axial direction and rotate around the axial direction, thereby realizing the clamping and releasing of the fixing mechanism 100 on the carrier plate 200. In addition, by the cooperation of the pressing lifter 40 and the fixing member 10, the claw member 50 cooperates with the circular truncated cone portion 14 to hold the pressing lifter 40 and lift the fixing member 10, and the cooperation of the claw member 50 and the slider 61 to release the pressing lifter 40 from the fixing member 10.

With the fixing mechanism 100 of the present application, only two to three simple actions are required to be performed to achieve the mounting and removal of the fixing mechanism 100 on the carrier 200, and in addition, the silicon wafer 300 can be easily fixed on the carrier 200 by cooperating with the simple pressing element 220. The fixing mechanism 100 is very simple and fast to install and operate on the carrier plate 200, so that the installation efficiency is greatly improved.

The above embodiments are only for illustrating the technical solution of the present application and not for limiting the same, and although the present application has been described in detail with reference to the above preferred embodiments, it should be understood by those skilled in the art that modifications and equivalents may be made thereto without departing from the spirit and scope of the technical solution of the present application.

Claims (11)

1. A securing mechanism, comprising:

the fixing piece is provided with a through hole which penetrates through the fixing piece along the axial direction of the fixing piece;

The rotating piece is at least partially positioned in the through hole and comprises a clamping part positioned outside the through hole, and the clamping part is used for clamping an article between the fixing piece and the rotating piece;

The linkage piece is slidably arranged in the through hole along the axial direction and is matched with the rotating piece so as to drive the rotating piece to move along the axial direction and rotate around the axial direction when the linkage piece is pressed;

The limiting part is convexly arranged on the hole wall of the through hole and is matched with the linkage piece to guide the linkage piece to slide along the axial direction, and the limiting part and the linkage piece are used for alternately propping against the rotating piece;

The first elastic piece is sleeved on the rotating piece and is positioned in the through hole, the first end of the first elastic piece abuts against one end part of the through hole, the second end of the first elastic piece abuts against one part of the rotating piece, and the first elastic piece is compressed when the linkage piece is pressed.

2. A fixing mechanism according to claim 1, wherein said rotary member is provided with at least one inclined surface spiraling in said axial direction and a cross section parallel in said axial direction, one side of said inclined surface being connected to one side of said cross section;

wherein the linkage piece and the limiting part alternately slide along the inclined plane.

3. The fixing mechanism according to claim 2, wherein the limiting portion extends in the axial direction to form a long strip, and the linkage member is provided with a chute extending in the axial direction, and the chute is matched with the limiting portion to enable the linkage member to slide in the through hole along the limiting portion.

4. A fixing mechanism according to claim 3, wherein the rotating member further comprises a rod portion and a head portion, the holding portion and the head portion are respectively connected to opposite ends of the rod portion, the head portion is located in the through hole, and the first elastic member is sleeved on the rod portion;

The end face of the head part, which is away from the clamping part, is provided with a plurality of first sliding claws which are sequentially connected, the first sliding claws comprise first meshing surfaces and first stop surfaces which are in cross connection, the first stop surfaces are parallel to the axial direction, the first meshing surfaces extend from the first stop surfaces of the adjacent first sliding claws along the axial direction towards the linkage part in a bending way, the limiting parts are used for clamping the first sliding claws, the first meshing surfaces form the inclined surfaces, and the first stop surfaces form the sections;

The end face, facing the rotating piece, of the linkage piece is provided with a plurality of second sliding claws which are sequentially connected, each second sliding claw comprises a second engaging surface and a second stopping surface which are connected in a cross mode, the second stopping surfaces are parallel to the axial direction, the second engaging surfaces extend from the second stopping surfaces of the adjacent second sliding claws in a bending mode towards the rotating piece along the axial direction, and the sliding groove is at least partially formed in one second sliding claw;

the first engagement surface and the second engagement surface are in contact engagement with each other so as to drive the rotating piece to move along the axial direction and rotate around the axial direction until the first stop surface abuts against the second stop surface.

5. The securing mechanism of claim 1, further comprising a pressing pull member removably disposed on the securing member, the pressing pull member including a pressing portion that extends into the through hole to press and push the linkage member.

6. The fixing mechanism according to claim 5, wherein the pressing and pulling member is provided with a receiving groove, the pressing portion is provided on a groove wall of the receiving groove in a protruding manner, and the receiving groove is configured to receive a portion of the fixing member;

the pressing lifting piece is also provided with two opposite chute holes, each chute hole is communicated with the containing groove in a crossing way, each chute hole is slidably provided with a claw piece, and the claw piece is used for being matched with the fixing piece so as to clamp and fix or release the fixing piece.

7. The securing mechanism according to claim 6, wherein said securing member includes a boss portion through which said through hole penetrates, said boss portion being boss-like and including opposite top and bottom surfaces and side surfaces connected between said top and bottom surfaces, said boss portion being tapered in the axial direction from said top surface toward said bottom surface, said claw member being adapted to cooperate with said boss portion to lift said boss portion from said bottom surface side of said boss portion;

the claw piece comprises a claw part limited in the sliding slot hole, the claw part is provided with an end face facing the fixing piece, the end face is an inclined plane, and the end face is matched with the side face so as to enable the end face to slide along the side face;

The claw piece is sleeved with a second elastic piece, the second elastic piece is located in the chute hole, and the claw portion and the round table portion are matched with each other to enable the claw portion to slide along the chute hole in a direction away from the accommodating groove, so that the second elastic piece is compressed.

8. The fixing mechanism according to claim 7, wherein the fixing member further comprises a connection portion and a main body portion, the round table portion, the connection portion and the main body portion are connected in this order in the axial direction, the through hole penetrates through the round table portion, the connection portion and the main body portion, and an outer diameter of the connection portion is smaller than an outer diameter of the round table portion and the main body portion, respectively;

The connecting part is slidably sleeved with a sliding block, the sliding block is arranged between the round platform part and the main body part, the sliding block is in the shape of a round platform and comprises a side surface which is a conical surface, and the sliding block is gradually thinned along the axial direction and the direction which points to the round platform part.

9. The fixing mechanism of claim 8, wherein the body portion is further provided with a limit projection protruding in a direction perpendicular to the axial direction.

10. The securing mechanism as claimed in claim 7, wherein the jaw member further comprises a main portion and a tail portion, the tail portion and the jaw portion being connected to opposite ends of the main portion, respectively, the tail portion being located outside the slot hole, the main portion extending into the slot hole, an outer diameter of the tail portion and an outer diameter of the jaw portion being greater than an outer diameter of the main portion, the second resilient member being sleeved on the main portion.

11. A coating apparatus, characterized by comprising:

The securing mechanism of any one of claims 1 to 10;

The support plate is provided with a through hole penetrating through the support plate in the thickness direction, the through hole is used for the clamping part to penetrate through, and the clamping part and the fixing part are matched to clamp the support plate after the rotating part rotates around the axial direction; and

And the pressing and holding element is connected with the fixing piece.