CN118655820A - Waveguide ignition acquisition and microwave restarting control system and control method - Google Patents
Waveguide ignition acquisition and microwave restarting control system and control method Download PDFInfo
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Abstract
The present disclosure relates to a waveguide ignition acquisition and microwave restarting control system and control method, the waveguide ignition acquisition and microwave restarting control system comprising: the blue-violet sensor is used for collecting blue-violet signals generated when the ignition occurs; the light receiver is used for receiving the blue-violet light signal and converting the blue-violet light signal into a voltage signal; the comparator is used for receiving the voltage signal and comparing the voltage signal with a preset reference voltage, and outputting a corresponding low level or high level according to a comparison result; the singlechip is used for collecting low level or high level and controlling a startup signal for closing the anode power supply according to the low level or the high level. The method comprises the steps of judging the occurrence of waveguide ignition through ignition signal acquisition, and timely closing an anode power supply of a microwave generator to close microwave output; meanwhile, the microwave generator is restarted quickly, microwaves are started quickly, and the aim that the whole equipment is not shut down is fulfilled; the restarting interval time and the restarting times can be changed according to different application conditions of the whole equipment.
Description
Technical Field
The disclosure belongs to the technical field of microwave control, and particularly relates to a waveguide ignition acquisition and microwave restarting control system and a control method.
Background
In plasma application, the high-power microwave is transmitted to the plasma cavity by adopting the waveguide element, and the whole transmission link and the cavity are influenced by various factors such as process, environment and the like, so that the possibility of breakdown and ignition exists. When a fire occurs, the microwave transmission is shorted out, all microwave energy propagates forward, such as when a fire occurs after the circulator, the reflected energy will be carried by the circulator for a major portion and a minor portion to the magnetron, such as when a fire occurs before or at the circulator, the energy is totally reflected to the magnetron. Both the circulator and the magnetron are difficult to bear the total power reflection for a long time, and particularly the magnetron can be damaged in a short time. After the plasma cavity is free from microwaves, the plasma will disappear, the temperature suddenly drops, the treatment substances in the cavity are greatly influenced, and even the treatment substances are directly damaged, for example, MPCVD synthetic diamond is extremely easy to crack after the microwaves suddenly lose, and great loss occurs.
Most of the existing generators do not have waveguide ignition acquisition circuits, when ignition occurs, reflected microwaves are born by a circulator or a magnetron, and the microwave generator is closed due to abnormal working state caused by large reflection acquisition or large emission of the magnetron. The mode has low reaction speed, is easy to cause fatal damage to equipment, and can not accurately position faults and can not troubleshoot the faults. And a microwave generator for collecting the fire of the waveguide is partially adopted, and after the waveguide is collected and the fire is ignited, the microwave generator is directly turned off to extinguish the plasma, so that adverse effects are generated on user products.
Disclosure of Invention
The present disclosure is directed to a waveguide ignition acquisition and microwave restarting control system and control method for solving the above problems.
The technical scheme of the disclosure is as follows:
A waveguide ignition acquisition and microwave restart control system comprising:
the blue-violet sensor is used for collecting blue-violet signals generated when the ignition occurs;
The light receiver is used for receiving the blue-violet light signal and converting the blue-violet light signal into a voltage signal;
The comparator is used for receiving the voltage signal and comparing the voltage signal with a preset reference voltage, and outputting a corresponding low level or high level according to a comparison result;
The singlechip is used for collecting low level or high level and controlling a startup signal for closing the anode power supply according to the low level or the high level.
As a further optimization of the present disclosure, the blue-violet sensor is connected with the light receiver through an optical fiber.
As a further optimization scheme of the disclosure, the connection circuit between the optical receiver and the comparator comprises a first resistor R1, a second resistor R2, a capacitor C1 and a potentiometer RP1, wherein one end of the first resistor R1 is connected with the optical receiver, and the other end of the first resistor R1 is connected with one end of the capacitor C1, one end of the second resistor R2 and the comparator; the other end of the capacitor C1 is connected with the optical receiver and the other end of the second resistor R2 and grounded; the two ends of the potentiometer RP1 are respectively connected with voltage and ground, and the middle end of the potentiometer RP1 is connected with the comparator.
As a further refinement of the disclosure, the potentiometer RP1 is used to adjust the protection point.
As a further optimization scheme of the present disclosure, the comparator compares the voltage signal with a preset reference after receiving the voltage signal, and when the voltage signal is greater than the preset reference voltage, the output of the comparator changes from low level to high level.
As a further optimization scheme of the present disclosure, the singlechip collects level change, rapidly shuts off a startup signal of the anode power supply, and shuts off the anode power supply, thereby shutting off microwave output.
As a further optimization scheme of the disclosure, the system further comprises a touch screen, wherein the touch screen is connected with the single chip microcomputer, and the restarting interval time and the restarting times are sent to the single chip microcomputer in a manual setting mode.
As a further optimization scheme of the disclosure, the touch screen is connected with the singlechip through RS485 communication.
As a further optimization of the present disclosure, the restart interval time is 5ms-100ms.
A control method of a waveguide ignition acquisition and microwave restarting control system comprises the following steps:
the touch screen sends the restarting interval time and the restarting times to the singlechip for storage;
The blue-violet light sensor receives a blue-violet light signal generated when the ignition occurs and transmits the blue-violet light signal to the light receiver, and the receiver converts the blue-violet light signal into a voltage signal and transmits the voltage signal to the comparator;
the comparator compares the voltage signal with a preset reference voltage, and when the voltage signal is larger than the preset reference voltage, the output of the comparator is changed from low level to high level;
The singlechip acquires the level change and rapidly shuts off the startup signal of the anode power supply, and shuts off the anode power supply, thereby shutting down the microwave output;
Starting timing after the anode power supply is turned off, restarting the anode power supply after the restarting interval time is reached, and starting microwave output; if the waveguide is ignited again, repeating the shutdown and startup actions according to the shutdown flow until the restarting times are reached; when the number of restarting times is reached, the anode power supply is not started any more, the microwave generator reports the waveguide ignition fault, and the fault is prompted on the touch screen.
The beneficial effects of the present disclosure are:
The method judges the occurrence of waveguide ignition through ignition signal acquisition, and timely turns off the anode power supply of the microwave generator, and turns off microwave output, thereby achieving the purpose of protecting the magnetron; meanwhile, the microwave generator is restarted quickly in ms order, so that microwaves are started quickly, and the aim of not shutting down the whole equipment is fulfilled; the restarting interval time and the restarting times can be changed according to different application conditions of the whole equipment.
Drawings
Fig. 1 is a schematic circuit configuration diagram of the system of the present disclosure.
Detailed Description
The present application will be described in further detail with reference to the accompanying drawings, wherein it is to be understood that the following detailed description is for the purpose of further illustrating the application only and is not to be construed as limiting the scope of the application, as various insubstantial modifications and adaptations of the application to those skilled in the art can be made in light of the foregoing disclosure.
As shown in fig. 1, a waveguide ignition acquisition and microwave restarting control system includes:
the blue-violet sensor is used for collecting blue-violet signals generated when the ignition occurs;
The light receiver is used for receiving the blue-violet light signal and converting the blue-violet light signal into a voltage signal;
The comparator is used for receiving the voltage signal and comparing the voltage signal with a preset reference voltage, and outputting a corresponding low level or high level according to a comparison result;
the singlechip is used for collecting the level change and closing the startup signal of the anode power supply according to the level change.
The blue-violet sensor is connected with the light receiver through an optical fiber.
The connecting circuit between the light receiver and the comparator comprises a first resistor R1, a second resistor R2, a capacitor C1 and a potentiometer RP1, wherein one end of the first resistor R1 is connected with the light receiver, and the other end of the first resistor R1 is connected with one end of the capacitor C1, one end of the second resistor R2 and the comparator; the other end of the capacitor C1 is connected with the optical receiver and the other end of the second resistor R2 and grounded; the two ends of the potentiometer RP1 are respectively connected with voltage and ground, and the middle end of the potentiometer RP1 is connected with the comparator.
The potentiometer RP1 is used for adjusting the protection point.
And the comparator compares the voltage signal with a preset reference after receiving the voltage signal, and when the voltage signal is larger than the preset reference voltage, the output of the comparator is changed from low level to high level.
The singlechip collects the level change and rapidly shuts down the startup signal of the anode power supply, and shuts down the anode power supply, thereby shutting down the microwave output.
The waveguide ignition acquisition and microwave restarting control system further comprises a touch screen, wherein the touch screen is connected with the singlechip, and restarting interval time and restarting times are sent to the singlechip in a manual setting mode.
The touch screen is connected with the singlechip through RS485 communication.
The restart interval time is 5ms-100ms.
In this embodiment, the blue-violet light sensor is disposed in the waveguide system, and generates blue-violet light when a fire is struck, and after the blue-violet light sensor receives the light, the light is transmitted to the light receiver through the optical fiber, converted into an electrical signal, sent to the voltage comparator, compared with a preset reference (the potentiometer RP1 is used for adjusting the protection point), when the voltage signal converted by the optical signal is greater than the reference voltage, the output of the comparator is changed from low level to high level, the singlechip collects the level change, rapidly shuts off the startup signal of the anode power supply, and shuts off the anode power supply, thereby shutting down the microwave output.
The touch screen sends the restarting interval time and restarting times to the singlechip through RS485 communication, after the singlechip is stored and identified, the singlechip starts timing after the anode power supply is closed, and after the restarting interval time is reached, the anode power supply is restarted, and microwaves start to be output. If the waveguide is ignited again, the shutdown and startup are repeatedly started according to the flow until the restarting times are met, if the waveguide is still ignited, the anode power supply is not started any more, and the microwave generator reports the waveguide ignition fault and prompts the fault on the touch screen.
The restarting interval time and the restarting times can be set according to different microwave application and plasma equipment process requirements.
A control method of a waveguide ignition acquisition and microwave restarting control system comprises the following steps:
the touch screen sends the restarting interval time and the restarting times to the singlechip for storage;
The blue-violet light sensor receives a blue-violet light signal generated when the ignition occurs and transmits the blue-violet light signal to the light receiver, and the receiver converts the blue-violet light signal into a voltage signal and transmits the voltage signal to the comparator;
the comparator compares the voltage signal with a preset reference voltage, and when the voltage signal is larger than the preset reference voltage, the output of the comparator is changed from low level to high level;
The singlechip acquires the level change and rapidly shuts off the startup signal of the anode power supply, and shuts off the anode power supply, thereby shutting down the microwave output;
Starting timing after the anode power supply is turned off, restarting the anode power supply after the restarting interval time is reached, and starting microwave output; if the waveguide is ignited again, repeating the shutdown and startup actions according to the shutdown flow until the restarting times are reached; when the number of restarting times is reached, the anode power supply is not started any more, the microwave generator reports the waveguide ignition fault, and the fault is prompted on the touch screen.
The foregoing examples have expressed only a few embodiments of the present disclosure, which are described in more detail and detail, but are not to be construed as limiting the scope of the present disclosure. It should be noted that variations and modifications can be made by those skilled in the art without departing from the spirit of the disclosure, which are within the scope of the disclosure.
Claims (9)
1. A waveguide ignition acquisition and microwave restarting control system, comprising:
the blue-violet sensor is used for collecting blue-violet signals generated when the ignition occurs;
The light receiver is used for receiving the blue-violet light signal and converting the blue-violet light signal into a voltage signal;
the comparator is used for receiving the voltage signal, comparing the voltage signal with a preset reference voltage and outputting a corresponding level according to a comparison result;
The singlechip is used for collecting the level and controlling a starting signal of the anode power supply according to the level;
The touch screen is connected with the singlechip, and the restarting interval time and the restarting times are sent to the singlechip in a manual setting mode.
2. The waveguide ignition acquisition and microwave restart control system according to claim 1, wherein the blue-violet sensor is connected to the light receiver by an optical fiber.
3. The waveguide ignition acquisition and microwave restarting control system according to claim 1, wherein the connection circuit between the optical receiver and the comparator comprises a first resistor R1, a second resistor R2, a capacitor C1 and a potentiometer RP1, wherein one end of the first resistor R1 is connected with the optical receiver, and the other end of the first resistor R1 is connected with one end of the capacitor C1, one end of the second resistor R2 and the comparator; the other end of the capacitor C1 is connected with the optical receiver and the other end of the second resistor R2 and grounded; the two ends of the potentiometer RP1 are respectively connected with voltage and ground, and the middle end of the potentiometer RP1 is connected with the comparator.
4. A waveguide ignition acquisition and microwave restart control system according to claim 2, wherein the potentiometer RP1 is used to adjust the protection point.
5. The waveguide ignition acquisition and microwave restarting control system according to claim 1 wherein the comparator compares the voltage signal with a preset reference after receiving the voltage signal, and when the voltage signal is greater than the preset reference voltage, the output of the comparator changes from low level to high level.
6. The waveguide ignition acquisition and microwave restarting control system according to claim 1, wherein the single-chip microcomputer acquires a level change, rapidly shuts off a startup signal of the anode power supply, shuts off the anode power supply, and thereby shuts off microwave output.
7. The waveguide ignition acquisition and microwave restarting control system according to claim 1, wherein the touch screen is connected with the singlechip through RS485 communication.
8. A waveguide ignition acquisition and microwave restart control system according to claim 1, wherein the restart interval time is 5ms-100ms.
9. A control method of a waveguide ignition acquisition and microwave restarting control system according to any one of claims 1 to 8, comprising the steps of:
sending the restarting interval time and the restarting times to the singlechip for storage through the touch screen;
The blue-violet light sensor receives a blue-violet light signal generated when the ignition occurs and transmits the blue-violet light signal to the light receiver, and the receiver converts the blue-violet light signal into a voltage signal and transmits the voltage signal to the comparator;
the comparator compares the voltage signal with a preset reference voltage, and when the voltage signal is larger than the preset reference voltage, the output of the comparator is changed from low level to high level;
The singlechip acquires the level change and rapidly shuts off the startup signal of the anode power supply, and shuts off the anode power supply, thereby shutting down the microwave output;
Starting timing after the anode power supply is turned off, restarting the anode power supply after the restarting interval time is reached, and starting microwave output; if the waveguide is ignited again, repeating the shutdown and startup actions according to the shutdown flow until the restarting times are reached; when the number of restarting times is reached, the anode power supply is not started any more, the microwave generator reports the waveguide ignition fault, and the fault is prompted on the touch screen.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411102928.0A CN118655820A (en) | 2024-08-13 | 2024-08-13 | Waveguide ignition acquisition and microwave restarting control system and control method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202411102928.0A CN118655820A (en) | 2024-08-13 | 2024-08-13 | Waveguide ignition acquisition and microwave restarting control system and control method |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104792409A (en) * | 2015-04-06 | 2015-07-22 | 华中科技大学 | High-power microwave ignition detecting system and high-power microwave ignition detecting method |
| CN115201642A (en) * | 2022-07-07 | 2022-10-18 | 中国电子科技集团公司第三十八研究所 | Detection device strikes sparks with self-checking function |
| WO2023060875A1 (en) * | 2021-10-15 | 2023-04-20 | 散裂中子源科学中心 | High-power y-junction waveguide circulator |
| CN118337048A (en) * | 2024-06-12 | 2024-07-12 | 合肥博雷电气有限公司 | High-voltage sparking quick protection circuit |
| CN118413099A (en) * | 2024-05-30 | 2024-07-30 | 西安微电子技术研究所 | High-voltage power supply output sparking short-circuit transient response protection circuit and method |
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- 2024-08-13 CN CN202411102928.0A patent/CN118655820A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104792409A (en) * | 2015-04-06 | 2015-07-22 | 华中科技大学 | High-power microwave ignition detecting system and high-power microwave ignition detecting method |
| WO2023060875A1 (en) * | 2021-10-15 | 2023-04-20 | 散裂中子源科学中心 | High-power y-junction waveguide circulator |
| CN115201642A (en) * | 2022-07-07 | 2022-10-18 | 中国电子科技集团公司第三十八研究所 | Detection device strikes sparks with self-checking function |
| CN118413099A (en) * | 2024-05-30 | 2024-07-30 | 西安微电子技术研究所 | High-voltage power supply output sparking short-circuit transient response protection circuit and method |
| CN118337048A (en) * | 2024-06-12 | 2024-07-12 | 合肥博雷电气有限公司 | High-voltage sparking quick protection circuit |
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