CN118655820A - A waveguide ignition collection and microwave restart control system and control method - Google Patents

Abstract

The present disclosure relates to a waveguide ignition acquisition and microwave restarting control system and control method, the waveguide ignition acquisition and microwave restarting control system comprising: the blue-violet sensor is used for collecting blue-violet signals generated when the ignition occurs; the light receiver is used for receiving the blue-violet light signal and converting the blue-violet light signal into a voltage signal; the comparator is used for receiving the voltage signal and comparing the voltage signal with a preset reference voltage, and outputting a corresponding low level or high level according to a comparison result; the singlechip is used for collecting low level or high level and controlling a startup signal for closing the anode power supply according to the low level or the high level. The method comprises the steps of judging the occurrence of waveguide ignition through ignition signal acquisition, and timely closing an anode power supply of a microwave generator to close microwave output; meanwhile, the microwave generator is restarted quickly, microwaves are started quickly, and the aim that the whole equipment is not shut down is fulfilled; the restarting interval time and the restarting times can be changed according to different application conditions of the whole equipment.

Description

A waveguide ignition collection and microwave restart control system and control method

Technical Field

The present invention belongs to the field of microwave control technology, and in particular relates to a waveguide ignition collection and microwave restart control system and control method.

Background Art

In plasma applications, high-power microwaves are transmitted to the plasma cavity using waveguide elements. The entire transmission link and cavity are affected by various factors such as process and environment, and there is a possibility of breakdown and sparking. When sparking occurs, the microwave transmission is short-circuited, and all microwave energy propagates forward. If sparking occurs after the circulator, the reflected energy will be borne by the circulator for the most part, and a small part will be reflected to the magnetron. If sparking occurs before or after the circulator, all the energy will be reflected to the magnetron. It is difficult for circulators and magnetrons to withstand long-term full power reflection, especially magnetrons, which can be damaged in a short time. After there is no microwave in the plasma cavity, the plasma will disappear and the temperature will drop sharply, which will have a great impact on the processed materials in the cavity, and even directly damage them. For example, MPCVD artificial synthetic diamonds are very likely to crack when the microwaves are suddenly lost, resulting in large losses.

Most of the existing generators do not have waveguide spark collection circuits. When sparks occur, the circulator or magnetron receives the reflected microwaves, which are collected through reflection or the magnetron works abnormally due to large emission, and the microwave generator is shut down. This method has a slow response speed and can easily cause fatal damage to the equipment. At the same time, it is impossible to accurately locate the fault and troubleshoot the fault. Some microwave generators that use waveguide spark collection directly shut down after collecting the waveguide spark, causing the plasma to extinguish, which has an adverse effect on user products.

Summary of the invention

The purpose of the present disclosure is to provide a waveguide ignition collection and microwave restart control system and control method in order to solve the above problems.

The present invention achieves the above-mentioned purpose through the following technical solutions:

A waveguide ignition collection and microwave restart control system, comprising:

A blue-violet light sensor is used to collect blue-violet light signals generated when ignition occurs;

An optical receiver, used for receiving the blue-violet light signal and converting it into a voltage signal;

A comparator, used to receive the voltage signal and compare it with a preset reference voltage, and output a corresponding low level or high level according to the comparison result;

The single chip microcomputer is used for collecting the low level or high level and controlling the start-up signal of shutting down the anode power supply according to the low level or high level.

As a further optimization solution of the present disclosure, the blue-violet light sensor is connected to the light receiver via an optical fiber.

As a further optimization scheme of the present disclosure, the connection circuit between the optical receiver and the comparator includes a first resistor R1, a second resistor R2, a capacitor C1 and a potentiometer RP1, one end of the first resistor R1 is connected to the optical receiver, and the other end of the first resistor R1 is connected to one end of the capacitor C1, one end of the second resistor R2, and the comparator; the other end of the capacitor C1 is connected to the optical receiver and the other end of the second resistor R2 and is grounded; the two ends of the potentiometer RP1 are respectively connected to voltage and ground, and the middle end is connected to the comparator.

As a further optimization solution of the present disclosure, the potentiometer RP1 is used to adjust the protection point.

As a further optimization scheme of the present disclosure, after receiving the voltage signal, the comparator compares the voltage signal with a preset reference. When the voltage signal is greater than the preset reference voltage, the output of the comparator changes from a low level to a high level.

As a further optimization solution of the present disclosure, the single chip microcomputer detects the level change, quickly turns off the start signal of the anode power supply, turns off the anode power supply, and thus turns off the microwave output.

As a further optimization solution of the present disclosure, it also includes a touch screen, which is connected to the single-chip microcomputer, and the restart interval time and the number of restarts are sent to the single-chip microcomputer by manual setting.

As a further optimization solution of the present disclosure, the touch screen is connected to the single chip microcomputer via RS485 communication.

As a further optimization solution of the present disclosure, the restart interval is 5ms-100ms.

A control method for a waveguide ignition collection and microwave restart control system comprises the following steps:

The touch screen sends the restart interval time and restart times to the microcontroller for storage;

The blue-violet light sensor receives the blue-violet light signal generated when ignition occurs and transmits it to the light receiver, and the receiver converts the blue-violet light signal into a voltage signal and transmits it to the comparator;

The comparator compares the voltage signal with a preset reference voltage. When the voltage signal is greater than the preset reference voltage, the output of the comparator changes from a low level to a high level.

The single chip microcomputer collects the level change, quickly turns off the start signal of the anode power supply, turns off the anode power supply, and thus turns off the microwave output;

The timing starts after the anode power supply is turned off. After the restart interval time is reached, the anode power supply is turned on again and the microwave starts to output. If the waveguide ignites again, the shutdown and restart actions are repeated according to the shutdown process until the restart number is reached. If ignition still occurs after the restart number is reached, the anode power supply is no longer turned on, and the microwave generator reports a waveguide ignition failure, which is prompted on the touch screen.

The beneficial effects of the present disclosure are:

The present invention collects spark signals to determine the occurrence of waveguide sparking, and promptly shuts down the anode power supply of the microwave generator and the microwave output, thereby protecting the magnetron. At the same time, the microwave generator is quickly restarted in ms to quickly start the microwave, thereby achieving the purpose of not shutting down the entire device. The restart interval and the number of restarts can be changed according to different application conditions of the entire device.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG1 is a schematic diagram of the circuit structure of the system of the present disclosure.

DETAILED DESCRIPTION

The present application is further described in detail below in conjunction with the accompanying drawings. It is necessary to point out here that the following specific implementation methods are only used to further illustrate the present application and cannot be understood as limiting the scope of protection of the present application. Technical personnel in this field can make some non-essential improvements and adjustments to the present application based on the above application content.

As shown in FIG1 , a waveguide ignition collection and microwave restart control system includes:

A blue-violet light sensor is used to collect blue-violet light signals generated when ignition occurs;

An optical receiver, used for receiving the blue-violet light signal and converting it into a voltage signal;

A comparator, used to receive the voltage signal and compare it with a preset reference voltage, and output a corresponding low level or high level according to the comparison result;

The single chip microcomputer is used to collect the level change and shut down the start signal of the anode power supply according to the level change.

The blue-violet light sensor is connected to the light receiver via an optical fiber.

The connection circuit between the optical receiver and the comparator includes a first resistor R1, a second resistor R2, a capacitor C1 and a potentiometer RP1, one end of the first resistor R1 is connected to the optical receiver, and the other end of the first resistor R1 is connected to one end of the capacitor C1, one end of the second resistor R2, and the comparator; the other end of the capacitor C1 is connected to the optical receiver and the other end of the second resistor R2 and is grounded; the two ends of the potentiometer RP1 are respectively connected to a voltage and a ground, and the middle end is connected to the comparator.

The potentiometer RP1 is used to adjust the protection point.

After receiving the voltage signal, the comparator compares the voltage signal with a preset reference voltage. When the voltage signal is greater than the preset reference voltage, the output of the comparator changes from a low level to a high level.

The single chip microcomputer collects the level change, quickly turns off the start signal of the anode power supply, turns off the anode power supply, and thus turns off the microwave output.

A waveguide ignition collection and microwave restart control system also includes a touch screen, which is connected to the single-chip microcomputer, and the restart interval time and the number of restarts are sent to the single-chip microcomputer in a manually set manner.

The touch screen is connected to the single chip microcomputer via RS485 communication.

The restart interval is 5ms-100ms.

In this embodiment, a blue-violet light sensor is placed in the waveguide system. When a spark occurs, blue-violet light is generated. After being received by the blue-violet light sensor, it is transmitted to the optical receiver through the optical fiber, converted into an electrical signal, and sent to the voltage comparator for comparison with a preset reference (potentiometer RP1 is used to adjust the protection point). When the voltage signal converted from the optical signal is greater than the reference voltage, the output of the comparator changes from a low level to a high level. The single-chip microcomputer collects the level change, quickly turns off the start-up signal of the anode power supply, turns off the anode power supply, and thus turns off the microwave output.

The touch screen sends the restart interval and restart times to the single-chip computer through RS485 communication. After the single-chip computer saves and recognizes, it starts timing after turning off the anode power supply. After reaching the restart interval, the anode power supply is turned on again and the microwave starts outputting. If the waveguide ignites again, the power supply will be turned off and on repeatedly according to the above process until the restart times are met. If the ignition still occurs, the anode power supply will not be turned on, and the microwave generator will report a waveguide ignition fault, which will be prompted on the touch screen.

The restart interval time and restart times can be set according to different microwave applications and plasma equipment process requirements.

A control method for a waveguide ignition collection and microwave restart control system comprises the following steps:

The touch screen sends the restart interval time and restart times to the microcontroller for storage;

The blue-violet light sensor receives the blue-violet light signal generated when ignition occurs and transmits it to the light receiver, and the receiver converts the blue-violet light signal into a voltage signal and transmits it to the comparator;

The comparator compares the voltage signal with a preset reference voltage. When the voltage signal is greater than the preset reference voltage, the output of the comparator changes from a low level to a high level.

The single chip microcomputer collects the level change, quickly turns off the start signal of the anode power supply, turns off the anode power supply, and thus turns off the microwave output;

The timing starts after the anode power supply is turned off. After the restart interval time is reached, the anode power supply is turned on again and the microwave starts to output. If the waveguide ignites again, the shutdown and restart actions are repeated according to the shutdown process until the restart number is reached. If ignition still occurs after the restart number is reached, the anode power supply is no longer turned on, and the microwave generator reports a waveguide ignition failure, which is prompted on the touch screen.

The above-mentioned embodiments only express several implementation methods of the present disclosure, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present disclosure. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present disclosure, and these all belong to the protection scope of the present disclosure.

Claims (9)

1. A waveguide ignition collection and microwave restart control system, characterized in that it includes: A blue-violet light sensor is used to collect blue-violet light signals generated when ignition occurs; An optical receiver, used for receiving the blue-violet light signal and converting it into a voltage signal; A comparator, used to receive the voltage signal and compare it with a preset reference voltage, and output a corresponding level according to the comparison result; A single chip microcomputer, used for collecting the electrical level and controlling a start-up signal of an anode power supply according to the electrical level; A touch screen is connected to the single chip microcomputer, and the restart interval time and the restart number are sent to the single chip microcomputer in a manually set manner. 2. A waveguide ignition collection and microwave restart control system according to claim 1, characterized in that the blue-violet light sensor is connected to the light receiver through an optical fiber. 3. A waveguide ignition collection and microwave restart control system according to claim 1, characterized in that the connection circuit between the optical receiver and the comparator includes a first resistor R1, a second resistor R2, a capacitor C1 and a potentiometer RP1, one end of the first resistor R1 is connected to the optical receiver, and the other end of the first resistor R1 is connected to one end of the capacitor C1, one end of the second resistor R2, and the comparator; the other end of the capacitor C1 is connected to the optical receiver and the other end of the second resistor R2 and is grounded; the two ends of the potentiometer RP1 are respectively connected to voltage and ground, and the middle end is connected to the comparator. 4. A waveguide ignition collection and microwave restart control system according to claim 2, characterized in that the potentiometer RP1 is used to adjust the protection point. 5. A waveguide ignition collection and microwave restart control system according to claim 1, characterized in that after the comparator receives the voltage signal, it compares the voltage signal with a preset reference, and when the voltage signal is greater than the preset reference voltage, the output of the comparator changes from a low level to a high level. 6. A waveguide ignition collection and microwave restart control system according to claim 1, characterized in that the single chip microcomputer collects the level change, quickly turns off the start-up signal of the anode power supply, turns off the anode power supply, and thus turns off the microwave output. 7. A waveguide ignition collection and microwave restart control system according to claim 1, characterized in that the touch screen is connected to the single chip microcomputer via RS485 communication. 8. A waveguide ignition collection and microwave restart control system according to claim 1, characterized in that the restart interval time is 5ms-100ms. 9. A control method for the waveguide ignition collection and microwave restart control system according to any one of claims 1 to 8, characterized in that it comprises the following steps: The restart interval time and restart times are sent to the microcontroller through the touch screen for storage; The blue-violet light sensor receives the blue-violet light signal generated when ignition occurs and transmits it to the light receiver, and the receiver converts the blue-violet light signal into a voltage signal and transmits it to the comparator; The comparator compares the voltage signal with a preset reference voltage. When the voltage signal is greater than the preset reference voltage, the output of the comparator changes from a low level to a high level. The single chip microcomputer collects the level change, quickly turns off the start signal of the anode power supply, turns off the anode power supply, and thus turns off the microwave output; The timing starts after the anode power supply is turned off. After the restart interval time is reached, the anode power supply is turned on again and the microwave starts to output. If the waveguide ignites again, the shutdown and restart actions are repeated according to the shutdown process until the restart number is reached. If ignition still occurs after the restart number is reached, the anode power supply is no longer turned on, and the microwave generator reports a waveguide ignition failure, which is prompted on the touch screen.