CN118642415A - Low-noise inspection quality alternating current control method - Google Patents
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Abstract
The invention discloses a low-noise inspection quality alternating current control method, which comprises the following steps: placing parallel metal polar plates around the inspection mass, wherein the parallel metal polar plates are parallel to the inspection mass and have the same distance with the inspection mass; converting the displacement signal of the inspection quality into a voltage signal; inputting the voltage signal into a PID controller, and calculating a control moment; outputting optimal maximum moment and compensation voltage according to the control moment; generating the amplitude of alternating current voltage according to the control moment and the maximum moment; converting the amplitude into alternating voltage, combining the alternating voltage with direct current compensation voltage to generate feedback voltage, applying the feedback voltage to the parallel metal polar plates, and finally controlling the inspection quality at the balance position. According to the invention, the motion control of the inspection mass can be realized without applying direct-current bias voltage on the inspection mass, the interference on the low-frequency signal of the inertial sensor is effectively reduced, and meanwhile, the acceleration noise of the inspection mass is effectively reduced, so that the method has a wide application prospect.
Description
Technical Field
The invention relates to the field of high-precision inertial sensors, in particular to a low-noise inspection quality alternating current control method.
Background
In the field of high precision inertial sensors, it is often necessary to control the proof mass in an equilibrium position so that the spatial physics laws and physical phenomena are measured and studied by its positional variation. The sensitive probe of the inertial sensor consists of a test mass and surrounding polar plates, and the test mass is connected with a power supply voltage by using a gold wire with extremely small torsional rigidity, so that the DC feedback voltage is applied on the premise of not influencing the movement of the test mass, and the corresponding DC feedback control voltage is calculated and output by a controller and applied on the surrounding polar plates of the test mass, thereby realizing the high-precision control of the position of the test mass. However, for the inertial sensor in the space task with higher precision, the gold wire connection structure adopted by applying the direct-current bias voltage can introduce extra acceleration noise to affect the scientific detection precision. It is therefore necessary to replace the dc voltage control scheme with the ac voltage control scheme.
Taking the ac feedback control scheme adopted in LISAPATHFINDER as an example, it only measures and analyzes the rounding error (rounding error) of the ac feedback voltage output DAC, and does not optimize the maximum moment and the dc compensation voltage in the ac feedback voltage, so that it introduces additional acceleration noise, which brings great challenges to practical application
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a low-noise test quality alternating current control method and aims to solve the problem that the existing feedback control scheme generates excessive noise.
The aim of the invention is realized by the following technical scheme: a low-noise inspection quality alternating current control method comprises the following steps:
Placing parallel metal plates around the proof mass; the parallel metal polar plates are parallel to the inspection mass and have the same distance, and the number of the parallel metal polar plates placed on two sides of the inspection mass is the same;
The inspection quality receives an external disturbance signal, so that a displacement signal is generated when the inspection quality deviates from the balance position, and the displacement signal is converted into a voltage signal through a sensing circuit;
Calculating a control moment required for moving the proof mass to an initial position by using a PID control algorithm according to the voltage signal;
according to the control moment, calculating a maximum moment and a compensation voltage by using a parameter optimization algorithm so as to minimize moment noise;
Generating the amplitude of the alternating voltage through the control moment and the maximum moment, and converting the amplitude into corresponding alternating voltage;
combining the alternating voltage with the compensation voltage to obtain a feedback voltage;
The feedback voltage is applied to the parallel metal plates, and the electrostatic force generated between the parallel metal plates and the proof mass ultimately controls the proof mass in an equilibrium position.
Further, the number of the parallel metal polar plates is 4, and the parallel metal polar plates are respectively a first parallel metal polar plate, a second parallel metal polar plate, a third parallel metal polar plate and a fourth parallel metal polar plate; wherein the first parallel metal polar plate and the third parallel metal polar plate are positioned at one side of the inspection quality; the second parallel metal polar plate and the fourth parallel metal polar plate are positioned at the other side of the inspection quality; when the inspection mass is at the balance position, the distances between the first, second, third and fourth parallel metal polar plates and the inspection mass are the same; the first parallel metal polar plate and the second parallel metal polar plate are opposite to be parallel; the third parallel metal polar plate is opposite to the fourth parallel metal polar plate in parallel.
Further, the process of calculating the maximum moment by using the parameter optimization algorithm specifically comprises the following steps:
Inputting a voltage signal obtained by converting the displacement signal into a PID controller, and outputting a control moment required for moving the inspection mass to an initial position; ac voltage output maximum according to voltage signal And control moment output by the controllerObtaining the maximum value of the maximum moment; Then generating a sequence with 0 as a lower limit and the maximum value of the maximum moment as an upper limit, wherein the data amount contained in the sequence is N+1, and the interval is；
Converting the maximum moment sequences into corresponding voltage amplitude sequences respectively by using an amplitude algorithm, generating corresponding feedback voltage sequences according to an amplitude modulation algorithm, respectively controlling the inspection quality, and observing the closed-loop control performance and robustness of the inspection quality in an inspection quality control state;
based on a maximum moment-moment noise model of the inspection mass, selecting a maximum moment which enables the moment noise of the inspection mass to be minimum from the sequence, namely, obtaining an optimal value; the maximum moment is expressed as:
Wherein, Representing the electrostatic negative stiffness required to control the proof mass back to the equilibrium position; Representing the distance between the centers of parallel metal polar plates on the same side of the inspection quality; indicating the distance from the parallel metal plates when the proof mass is in the equilibrium position.
Further, the maximum moment-moment noise model is:
Wherein, Representing the capacitance between the proof mass and the plate; representing angular displacement; representing voltage amplitude noise on each parallel metal plate.
Further, the process of calculating the compensation voltage by using the parameter optimization algorithm specifically comprises the following steps:
according to the maximum output voltage value of the compensation voltage Generating a maximum voltage sequence with 0 as a lower limit and a maximum output voltage value as an upper limit, wherein the data amount contained in the maximum voltage sequence is N+1, and the interval is；
Sequentially combining the maximum voltage sequence with alternating voltage to obtain a feedback voltage sequence, respectively controlling the inspection quality, and observing the closed-loop control performance and robustness of the inspection quality in the inspection quality control state;
And selecting a compensation voltage value which enables the moment noise of the inspection mass to be minimum from the sequence based on the compensation voltage-moment noise model of the inspection mass, namely the optimal value.
Further, the compensation voltage-moment noise model is:
Wherein, 、、AndRepresenting the compensation voltages applied to the first, second, third and fourth parallel metal plates,Representing the compensation voltage noise on each parallel metal plate.
Further, the method for generating the amplitude of the alternating voltage specifically comprises the following steps:
generating an alternating voltage amplitude by using an amplitude algorithm according to the control moment and the maximum moment; the amplitude of the alternating voltage is as follows:
Wherein, 、、AndThe magnitudes of the alternating voltages on the first, second, third and fourth plates are respectively represented; Representing the capacitance between each polar plate and the proof mass when the proof mass is at the balance position; representing the control moment output by the controller; representing the maximum moment.
Further, the method for converting the alternating voltage specifically comprises the following steps:
converting the amplitude value into corresponding alternating voltage based on an amplitude lookup table by using an amplitude modulation algorithm, wherein the alternating voltage is as follows:
Wherein, 、、AndRepresenting the ac voltages on the first, second, third and fourth parallel plates respectively,Indicating the frequency of the applied ac voltage.
Further, the method for obtaining the feedback voltage is specifically:
combining the alternating voltage with the compensation voltage to obtain a feedback voltage as follows:
Wherein, 、、AndRepresenting ac feedback voltages on the first, second, third and fourth parallel plates, respectively.
The present invention also provides a computer readable storage medium having stored thereon a computer program which when executed by a processor implements the described low noise proof quality ac control method.
Compared with the prior art, the invention has the following beneficial effects: the invention detects the displacement of the inspection mass by using the displacement sensor, then calculates the control moment when the inspection mass is controlled at the balance position by calculating, then calculates the feedback voltage based on the maximum moment value and the control moment, and applies the feedback voltage to the corresponding parallel metal polar plates to keep the inspection mass at the balance position, thereby realizing the control of the movement of the inspection mass by using the alternating current feedback voltage and avoiding the problem that the adopted gold wire connection structure can introduce extra acceleration noise in the direct current bias voltage control scheme. In addition, the maximum moment and the compensation voltage are optimized, so that moment noise suffered by the inspection quality in the alternating current feedback control process is reduced, and the method has wide application prospect.
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In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the description of the embodiments will be briefly described below, it will be obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a flow chart of a low noise proof quality AC control method according to an embodiment of the present invention;
FIG. 2 is a flowchart of a method for optimizing a maximum torque in a low noise AC control method for testing quality according to an embodiment of the present invention;
FIG. 3 is a flowchart of a method for optimizing compensation voltage in a low noise AC control method for testing quality according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a mechanical structure of a device in a low noise AC control method for testing quality according to an embodiment of the present invention;
fig. 5 is a schematic diagram of a device of a low-noise ac control method for inspection quality according to an embodiment of the present invention.
Detailed Description
Reference will now be made in detail to exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numbers in different drawings refer to the same or similar elements, unless otherwise indicated. The implementations described in the following exemplary examples do not represent all implementations consistent with the invention. Rather, they are merely examples of apparatus and methods consistent with aspects of the invention as detailed in the accompanying claims.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in this specification and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and/or" as used herein refers to and encompasses any or all possible combinations of one or more of the associated listed items.
It should be understood that although the terms first, second, third, etc. may be used herein to describe various information, these information should not be limited by these terms. These terms are only used to distinguish one type of information from another. For example, first information may also be referred to as second information, and similarly, second information may also be referred to as first information, without departing from the scope of the invention. The word "if" as used herein may be interpreted as "at … …" or "at … …" or "in response to a determination" depending on the context.
The present invention will be described in detail with reference to the accompanying drawings. The features of the examples and embodiments described below may be combined with each other without conflict.
The problem that extra acceleration noise is introduced into a gold wire connection structure adopted by applying direct-current bias voltage in the inertial sensor is solved, and meanwhile, the precision of an alternating-current feedback control system is improved. The application discloses a low-noise inspection quality alternating current control method through the following implementation.
As shown in FIG. 4, the mechanical structure of the device used in the low-noise AC control method for testing quality is provided in the embodiment of the invention.
The parallel metal polar plates are placed on two sides of the inspection quality, wherein the parallel metal polar plates are parallel to the surface of the inspection quality, and the distances between the parallel metal polar plates on two sides and the inspection quality are the same; four output ends of the parallel metal polar plates、、AndIs connected with a displacement sensor; four input ends of the parallel metal polar plates are connected with the actuator module.
As shown in fig. 5, a low noise ac control device for testing quality according to an embodiment of the present invention includes: mechanical mechanism, displacement sensor, control module and static executor module.
Four output ends of the mechanical structure、、AndIs connected with a displacement sensor; the output end of the displacement sensor is connected with a control module, and the control module is connected with an electrostatic actuator module; the output of the electrostatic actuator module is connected to a mechanical structure.
The control module comprises a PID controller, an amplitude calculation module, an amplitude modulation module, a parameter optimization module and a lookup table module.
The electrostatic actuator module comprises four modules, namely a first actuator module, a second actuator module, a third actuator module and a fourth actuator module; the input ends of the first, second, third and fourth executor modules are connected with the amplitude modulation module, and the output ends of the first, second, third and fourth executor modules are respectively connected with corresponding parallel metal polar plates.
The specific working principle of the device is as follows: the inspection mass is free to rotate under the action of external force so as to generate angular displacement, and the displacement sensor is used for converting a displacement signal into a voltage signal; then inputting the voltage signal into a PID controller of the control module, and calculating the control moment for keeping the inspection quality at the balance position according to the input voltage signal by the PID controller; The parameter optimization module calculates and obtains corresponding maximum moment according to an optimization algorithmCompensation voltage; The amplitude calculation module receives the control moment output by the PID controllerAnd the output maximum moment output by the parameter optimization moduleCalculating the amplitude of the alternating voltage; The amplitude modulation module receives the calculated amplitude, calculates alternating voltage corresponding to each parallel metal polar plate based on the lookup table module, and outputs the alternating voltage and the compensation voltage to the parameter optimization moduleAnd the feedback voltage is applied to the corresponding parallel metal polar plates by the first to fourth executor modules, and the inspection quality is kept at the balance position by the action of electrostatic force.
As shown in fig. 1, the low-noise ac control method for testing quality provided by the embodiment of the present invention adopts the above device, and includes the following steps:
1. Placing parallel metal polar plates around the inspection mass, wherein the parallel metal polar plates are parallel to the inspection mass and have the same distance with the inspection mass; inspection quality both sides placement the number of plates is the same.
The number of the parallel metal polar plates is 4, and the parallel metal polar plates are respectively a first parallel metal polar plate, a second parallel metal polar plate, a third parallel metal polar plate and a fourth parallel metal polar plate; the first parallel metal polar plate and the third parallel metal polar plate displace one side of the inspection quality; the second parallel metal polar plate and the fourth parallel metal polar plate are positioned at the other side of the inspection quality; when the inspection mass is at the balance position, the distances between the first, second, third and fourth parallel metal polar plates and the inspection mass are the same; the first parallel metal polar plate and the second parallel metal polar plate are opposite to be parallel; the third parallel metal polar plate is opposite to the fourth parallel metal polar plate in parallel.
2. The inspection quality is subjected to an external disturbance signal, so that a displacement signal is generated when the inspection quality deviates from the balance position, and the displacement signal is converted into a voltage signal through a displacement sensor.
3. Inputting the voltage signal output by the displacement sensor into a PID controller, and calculating and outputting a control moment for keeping the inspection mass at the balance position; meanwhile, the parameter optimization module outputs the optimized maximum moment, as shown in fig. 2, and the specific optimization method is as follows:
(3.1) outputting a maximum value according to the feedback voltage And control moment output by the controllerObtaining the maximum value of the maximum moment。
(3.2) Generating a sequence with 0 as a lower limit and the maximum value of the maximum moment as an upper limit, wherein the data amount contained in the sequence is N+1, and the interval is。
And (3.3) sequentially inputting the maximum moment sequence into an amplitude calculation module, and observing the closed-loop control performance and robustness of the inspection quality.
(3.4) If the control performance meets the requirement and all data in the sequence are calculated, turning to the step (3.5); otherwise go to step (3.3).
(3.5) Calculating moment noise suffered by the inspection mass based on the maximum moment-moment noise model of the inspection mass.
And (3.6) selecting the maximum moment which enables the moment noise of the inspection mass to be minimum from the sequence, namely the optimal value.
The establishing process of the maximum moment-moment noise model of the inspection mass comprises the following steps:
After applying the feedback voltage to the plate, assuming no compensation voltage is applied, the moment experienced by the proof mass can be expressed as:
（1）
Wherein, Representing the moment to which the proof mass is subjected after the feedback voltage is applied;、、 And The magnitudes of the alternating voltages on the first, second, third and fourth plates are respectively represented; Representing the capacitance between the proof mass and the plate; Indicating angular displacement.
From the moment model of the inspection mass, moment noise of the inspection mass can be obtained as follows:
（2）
Wherein, Representing voltage amplitude noise on the ith flat metal plate; Indicating the magnitude of the ac voltage on the i-th plate.
From equation (1), four partial derivatives can be expressed as:
（3）
Wherein, Representing the control moment output by the controller; representing the maximum moment.
Assuming the voltage amplitude noise on the first, second, third and fourth metal plates is the same, i.eSubstituting the formula (3) into the formula (2), the maximum moment-moment noise model of the inspection quality is obtained as follows:
4. Inputting the control moment and the maximum moment into an amplitude calculation module to generate alternating voltage amplitude, and then converting the input amplitude into corresponding alternating voltage by an amplitude modulation module based on a lookup table; the magnitude of the feedback voltage is specifically:
Wherein, Representing the capacitance between each polar plate and the proof mass when the proof mass is at the balance position; Representing the distance between the centers of parallel metal polar plates on the same side of the inspection quality; Indicating the distance from the parallel metal plates when the proof mass is in the equilibrium position, Representing the control moment output by the controller; representing the maximum moment. The maximum torque can be expressed as:
Wherein, Representing the electrostatic negative stiffness required to control the proof mass back to the equilibrium position.
5. Converting the amplitude value into corresponding alternating voltage based on an amplitude lookup table; the alternating voltage is:
Wherein, 、、AndRepresenting the ac voltages on the first, second, third and fourth parallel plates respectively,Indicating the frequency of the applied ac voltage.
6. Combining the alternating voltage and the optimized compensation voltage into a feedback voltage, wherein the feedback voltage is as follows:
Wherein, ，，AndRepresenting feedback voltages on the first, second, third and fourth parallel plates, respectively;、、 And The compensation voltages on the first, second, third and fourth polar plates are respectively represented; Representing the frequency of the applied feedback voltage, ，，AndThe magnitudes of the ac voltages on the first, second, third and fourth plates are indicated, respectively.
As shown in fig. 3, the method for optimizing the compensation voltage in the present invention specifically includes:
(6.1) determining the maximum output voltage value of the compensation voltage according to the maximum output voltage value of the actuator 。
(6.2) Generating a sequence having a maximum output voltage value of an upper limit of 0 as a lower limit, the data amount contained in the sequence being N+1, the interval being。
(6.3) Inputting the sequences into an amplitude modulation module in turn, and observing the quality closed-loop control performance and robustness in a quality control state.
(6.4) If the control performance meets the requirement and all data in the sequence are calculated, turning to the step (5.5); otherwise go to step (6.3).
(6.5) Calculating moment noise suffered by the inspection mass based on the compensation voltage-moment noise model of the inspection mass.
And (6.6) selecting a compensation voltage value which enables the moment noise of the inspection mass to be minimum from the sequence, namely the optimal value.
The establishment process of the test mass moment-compensation voltage noise model comprises the following steps:
after the feedback voltage is applied to the plate, assuming that no ac voltage is applied, the moment experienced by the proof mass can be expressed as:
（4）
Wherein, Representing the moment to which the proof mass is subjected after the application of the compensation voltage;、、 And The compensation voltages on the first, second, third and fourth polar plates are respectively represented; Representing the capacitance between the proof mass and the plate; Indicating angular displacement.
From the moment model of the inspection mass, moment noise of the inspection mass can be obtained as follows:
（5）
Wherein, Representing the compensation voltage noise on each parallel metal plate.
From equation (4), four partial derivatives can be expressed as:
（6）
Wherein, Representing the control moment output by the controller;、、 And The magnitude of the compensation voltages on the first, second, third and fourth plates are indicated, respectively.
Assuming the compensation voltage noise on the first, second, third and fourth metal plates is the same, i.eSubstituting the formula (6) into the formula (5), the compensation voltage-moment noise model of the inspection quality is obtained as follows:
7. applying a feedback voltage to the parallel metal plates by the electrostatic actuator module, and finally controlling the inspection quality at an equilibrium position by an electrostatic force generated between the parallel metal plates and the inspection quality; wherein the magnitude of the electrostatic force can be expressed as:
the embodiment of the invention also provides a computer readable storage medium, on which a computer program is stored, which when executed by a processor implements a low noise proof quality ac control method as described in any of the embodiments.
The computer readable storage medium may be an internal storage unit, such as a hard disk or a memory, of any of the data processing enabled devices described in any of the previous embodiments. The computer readable storage medium may also be any device having data processing capabilities, such as a plug-in hard disk, a smart memory card (SMART MEDIA CARD, SMC), an SD card, a flash memory card (FLASH CARD), or the like, provided on the device. Further, the computer readable storage medium may include both internal storage units and external storage devices of any data processing device. The computer readable storage medium is used for storing the computer program and other programs and data required by the arbitrary data processing apparatus, and may also be used for temporarily storing data that has been output or is to be output.
Other embodiments of the application will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure herein. This application is intended to cover any variations, uses, or adaptations of the application following, in general, the principles of the application and including such departures from the present disclosure as come within known or customary practice within the art to which the application pertains. The specification and examples are to be regarded in an illustrative manner only.
It is to be understood that the application is not limited to the precise arrangements and instrumentalities shown in the drawings, which have been described above, and that various modifications and changes may be effected without departing from the scope thereof.
Claims (10)
1. A low-noise inspection quality alternating current control method is characterized by comprising the following steps:
Placing parallel metal plates around the proof mass; the parallel metal polar plates are parallel to the inspection mass and have the same distance, and the number of the parallel metal polar plates placed on two sides of the inspection mass is the same;
The inspection quality receives an external disturbance signal, so that a displacement signal is generated when the inspection quality deviates from the balance position, and the displacement signal is converted into a voltage signal through a sensing circuit;
Calculating a control moment required for moving the proof mass to an initial position by using a PID control algorithm according to the voltage signal;
according to the control moment, calculating a maximum moment and a compensation voltage by using a parameter optimization algorithm so as to minimize moment noise;
Generating the amplitude of the alternating voltage through the control moment and the maximum moment, and converting the amplitude into corresponding alternating voltage;
combining the alternating voltage with the compensation voltage to obtain a feedback voltage;
The feedback voltage is applied to the parallel metal plates, and the electrostatic force generated between the parallel metal plates and the proof mass ultimately controls the proof mass in an equilibrium position.
2. The low noise ac control method of claim 1 wherein said number of parallel metal plates is 4, being a first parallel metal plate, a second parallel metal plate, a third parallel metal plate and a fourth parallel metal plate, respectively; wherein the first parallel metal polar plate and the third parallel metal polar plate are positioned at one side of the inspection quality; the second parallel metal polar plate and the fourth parallel metal polar plate are positioned at the other side of the inspection quality; when the inspection mass is at the balance position, the distances between the first, second, third and fourth parallel metal polar plates and the inspection mass are the same; the first parallel metal polar plate and the second parallel metal polar plate are opposite to be parallel; the third parallel metal polar plate is opposite to the fourth parallel metal polar plate in parallel.
3. The low noise ac control method according to claim 1, wherein the process of calculating the maximum torque using the parameter optimization algorithm is specifically:
Inputting a voltage signal obtained by converting the displacement signal into a PID controller, and outputting a control moment required for moving the inspection mass to an initial position; ac voltage output maximum according to voltage signal And control moment output by the controllerObtaining the maximum value of the maximum moment; Generating a sequence with 0 as a lower limit and the maximum value of the maximum moment as an upper limit, wherein the data amount contained in the sequence is N+1, and the interval is；
Converting the maximum moment sequences into corresponding voltage amplitude sequences respectively by using an amplitude algorithm, generating corresponding feedback voltage sequences according to an amplitude modulation algorithm, respectively controlling the inspection quality, and observing the closed-loop control performance and robustness of the inspection quality in an inspection quality control state;
Selecting a maximum moment from the sequence that minimizes the moment noise of the proof mass based on a maximum moment-moment noise model of the proof mass; the maximum moment is expressed as:
Wherein, Representing the electrostatic negative stiffness required to control the proof mass back to the equilibrium position; representing the distance between the centers of parallel metal polar plates on the same side of the inspection quality; indicating the distance from the parallel metal plates when the proof mass is in the equilibrium position.
4. A low noise proof mass ac control method according to claim 3, characterized in that said maximum moment-moment noise model is:
Wherein, Representing the capacitance between the proof mass and the plate; representing angular displacement; representing voltage amplitude noise on each parallel metal plate.
5. The low noise ac control method according to claim 1, wherein the process of calculating the compensation voltage using the parameter optimization algorithm is specifically:
according to the maximum output voltage value of the compensation voltage Generating a maximum voltage sequence with 0 as a lower limit and a maximum output voltage value as an upper limit, wherein the data amount contained in the maximum voltage sequence is N+1, and the interval is；
Sequentially combining the maximum voltage sequence with alternating voltage to obtain a feedback voltage sequence, respectively controlling the inspection quality, and observing the closed-loop control performance and robustness of the inspection quality in the inspection quality control state;
and selecting a compensation voltage value which minimizes the moment noise of the inspection mass from the sequence based on the compensation voltage-moment noise model of the inspection mass.
6. The low noise proof quality ac control method of claim 5, wherein said compensation voltage-moment noise model is:
Wherein, 、、AndRepresenting the compensation voltages applied to the first, second, third and fourth parallel metal plates,Representing the compensation voltage noise on each parallel metal plate.
7. The low noise ac control method according to claim 1, wherein the method for generating the magnitude of the ac voltage is specifically:
generating an alternating voltage amplitude by using an amplitude algorithm according to the control moment and the maximum moment; the amplitude of the alternating voltage is as follows:
Wherein, 、、AndThe magnitudes of the alternating voltages on the first, second, third and fourth plates are respectively represented; Representing the capacitance between each polar plate and the proof mass when the proof mass is at the balance position; representing the control moment output by the controller; representing the maximum moment.
8. The low noise ac control method according to claim 1, wherein said method for converting ac voltage is specifically:
converting the amplitude value into corresponding alternating voltage based on an amplitude lookup table by using an amplitude modulation algorithm, wherein the alternating voltage is as follows:
Wherein, 、、AndRepresenting the ac voltages on the first, second, third and fourth parallel plates respectively,Indicating the frequency of the applied ac voltage.
9. The low noise ac control method of claim 1, wherein said method for obtaining a feedback voltage is specifically:
combining the alternating voltage with the compensation voltage to obtain a feedback voltage as follows:
Wherein, 、、AndRepresenting ac feedback voltages on the first, second, third and fourth parallel plates, respectively.
10. A computer readable storage medium having stored thereon a computer program, wherein the program when executed by a processor implements a low noise proof quality ac control method according to any of claims 1-9.
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