CN118540843A - Charged particle beam two-dimensional vacuum scanning magnet - Google Patents

Abstract

The present invention relates to the field of scanning magnets, and in particular to a two-dimensional vacuum scanning magnet for charged particle beams. It includes an X-axis vacuum scanning magnet and a Y-axis vacuum scanning magnet; the vacuum scanning magnet includes a thin-walled vacuum box, a saddle-shaped coil, a concentrically wound iron core, and an airtight filler; the thin-walled vacuum box fits tightly with the saddle-shaped coil, the concentrically wound iron core, and the airtight filler. The present invention can realize two-dimensional scanning of charged particle beams, and solves the problem that there is a certain gap between the thin-walled vacuum box and the scanning magnet in the traditional solution, and when the thin-walled vacuum box is evacuated, the thin-walled vacuum box will be squeezed and deformed to a certain extent. The miniaturization and lightweight of the scanning magnet are also realized.

Description

Two-dimensional vacuum scanning magnet for charged particle beams

Technical Field

The invention relates to the field of scanning magnets, and in particular to a two-dimensional vacuum scanning magnet for charged particle beams.

Background Art

In modern scientific research and industrial applications, the precise control and scanning technology of charged particle beams are of great significance. Charged particle beams are widely used in medical imaging, material analysis, particle accelerators and other fields. Traditional scanning magnets usually face some technical challenges, such as the thin-walled vacuum box and the scanning magnet are separated, the total volume is large, and there is a certain gap between the two components, and the compactness is poor. When the thin-walled vacuum box is evacuated, the outer wall of its chamber is subjected to atmospheric pressure, and the thin-walled vacuum box will be squeezed and deformed to a certain extent, affecting the scanning accuracy. Therefore, the structure of the thin-walled vacuum box requires a certain degree of rigidity and strength. In order to ensure the rigidity and strength of the thin-walled vacuum box in the traditional scanning magnet, reinforcing ribs are often welded on its surface. This causes the traditional scanning magnet to be large in size and heavy in weight, which limits its use in some application scenarios. How to solve these problems becomes crucial.

Summary of the invention

In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a charged particle beam two-dimensional vacuum scanning magnet to solve the problems in the prior art, achieve high-precision two-dimensional scanning of charged particle beams, effectively avoid the problem of deformation of thin-walled vacuum boxes, and achieve miniaturization and lightweight of the equipment.

To achieve the above object, the technical solution of the present invention is as follows:

A charged particle beam two-dimensional vacuum scanning magnet, comprising:

X-axis vacuum scanning magnet and Y-axis vacuum scanning magnet;

Wherein, the vacuum scanning magnet comprises a thin-walled vacuum box, a saddle-shaped coil, a concentrically wound iron core and an airtight filler;

The thin-walled vacuum box is closely fitted with the saddle-shaped coil, the concentrically wound iron core, and the airtight filler, and a highly self-adhesive material is coated therebetween.

A further technical solution is: the airtight filler is made of a high-strength and high-temperature resistant material.

A further technical solution is: the saddle coil is made of a highly conductive material.

A further technical solution is: the concentric coiled iron core is made of a high magnetic permeability material.

Compared with the prior art, the beneficial technical effects of the present invention are as follows:

(1) The airtight filler is between the thin-walled vacuum box, the saddle coil and the concentrically wound iron core, eliminating the gap between the thin-walled vacuum box and the scanning magnet, making the thin-walled vacuum box and the scanning magnet a whole.

(2) Since the wall thickness of the thin-walled vacuum box is relatively thin, its structural strength is relatively weak. Therefore, after placing the airtight filler, there is no gap between the thin-walled vacuum box and the scanning magnet, and a highly self-adhesive material is coated between them, so that the structure of the thin-walled vacuum box is strengthened; when the inner chamber of the thin-walled vacuum box reaches a certain vacuum degree, its outer wall does not directly bear the atmospheric pressure, but is borne by the overall structure of the scanning magnet, so that the thin-walled vacuum box is not prone to deformation and failure; the scanning accuracy of the charged particle beam is guaranteed.

(3) The thin-walled vacuum box of the present invention has no reinforcing ribs; the concentrically wound iron core adopts a high magnetic permeability material, and the material consumption is small; and the iron core of the present invention adopts a concentric winding process, which is different from the traditional silicon steel sheet stacking, and has no fasteners; therefore, the overall structure of the scanning magnet is compact, small in size, light in weight, and easy to install and use; the miniaturization and lightweight of the scanning magnet are realized.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram showing the three-dimensional structure of a charged particle beam two-dimensional vacuum scanning magnet according to an embodiment of the present invention.

FIG. 2 shows a front cross-sectional view of the Y-axis vacuum scanning magnet according to an embodiment of the present invention.

Markings in the attached drawings: 1. X-axis vacuum scanning magnet; 2. Y-axis vacuum scanning magnet; 2. Vacuum scanning magnet; 21. Thin-walled vacuum box; 22. Saddle coil; 23. Concentric coils around the iron core; 24. Airtight filler.

DETAILED DESCRIPTION

In order to make the purpose, technical scheme and advantages of the present invention clearer, the device proposed by the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. According to the following description, the advantages and features of the present invention will be clearer. It should be noted that the accompanying drawings adopt a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention. In order to make the purpose, features and advantages of the present invention more obvious and easy to understand, please refer to the accompanying drawings. It should be noted that the structure, proportion, size, etc. illustrated by the accompanying drawings of this specification are only used to match the content disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present invention, so they have no technical substantive significance. Any modification of the structure, change of the proportional relationship or adjustment of the size, without affecting the effect that the present invention can produce and the purpose that can be achieved, should still fall within the scope of the technical content disclosed by the present invention.

Embodiment 1:

Fig. 1 shows a three-dimensional structure schematic diagram of a charged particle beam two-dimensional vacuum scanning magnet according to an embodiment of the present invention. In conjunction with Fig. 1 , the present invention discloses a charged particle beam two-dimensional vacuum scanning magnet, comprising an X-axis vacuum scanning magnet 1 and a Y-axis vacuum scanning magnet 2 .

FIG. 2 shows a front cross-sectional view of the Y-axis vacuum scanning magnet according to an embodiment of the present invention.

The structure of each vacuum scanning magnet is as follows:

1. Thin-walled vacuum box 21:

The thin-walled vacuum box 21 is made of high-strength material, such as stainless steel or high-strength alloy. The thin-walled vacuum box 21 is closely fitted with the saddle coil 22 and the concentric coil iron core 23 through the airtight filler 24. It is ensured that the thin-walled vacuum box 21 will not deform when the vacuum is evacuated.

2. Saddle coil 22:

The saddle coil 22 is made of a highly conductive material, such as copper or aluminum. The design of the saddle coil 22 enables the scanning magnet to achieve the required magnetic field strength and scanning frequency, ensuring that the charged particle beam maintains high precision during the scanning process.

3. Concentrically wound core 23:

The concentrically wound iron core 23 is made of a high magnetic permeability material, such as an iron-nickel alloy or a silicon steel sheet. The iron core wound by the concentric steel strip winding process can further improve the uniformity of the good field distribution.

4. Airtight filler 24:

The airtight filler 24 can be made of high-strength and high-temperature resistant materials, such as epoxy resin, polyvinyl chloride, polyamide or polyester plastics, so that there is no gap between the thin-walled vacuum box, the saddle coil, the concentric coil iron core and the airtight filler, making them a whole.

Embodiment 2:

On the basis of Example 1, in order to further improve the performance and reliability of the scanning magnet, the thin-walled vacuum box 21 and the method of filling the internal gap of the scanning magnet can be optimized. For example, a thin-walled vacuum box 21 with a multi-layer structure can be used. A highly self-adhesive material is coated between the thin-walled vacuum box 21, the saddle coil 22, the concentric coiled iron core 23, and the airtight filler 24 to further improve the airtightness and anti-deformation ability.

Embodiment 3:

On the basis of Example 1 and Example 2, the saddle coil 22 and the concentric coil core 23 can be optimized. For example, the number of layers, wire diameter and shape of the coil can be adjusted to change the current flow capacity and further improve the uniformity and stability of the magnetic field. The coil can also be made into a hollow structure with cooling water in the middle to increase the heat dissipation capacity of the coil. At the same time, the shape and size of the concentric coil core 23 can be optimized, such as changing the rectangular appearance to a waist shape. The thickness, width and number of winding layers of the steel strip can be changed to change the overall size of the concentric coil core to further improve the distribution shape and uniformity of the good field area of the magnetic field.

The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims (6)

1. A charged particle beam two-dimensional vacuum scanning magnet, characterized in that it comprises an X-axis vacuum scanning magnet (1) and a Y-axis vacuum scanning magnet (2). 2. The charged particle beam two-dimensional vacuum scanning magnet as claimed in claim 1, characterized in that: the X-axis vacuum scanning magnet (1) or the Y-axis vacuum scanning magnet (2) comprises a thin-walled vacuum box (21), a saddle coil (22), a concentrically wound iron core (23) and an airtight filler (24); and an airtight filler (24) is provided between adjacent saddle coils (22) and between the saddle coils (22) and the concentrically wound iron core (23). 3. The charged particle beam two-dimensional vacuum scanning magnet as described in claim 2, characterized in that the airtight filler (24) is made of a high-strength and high-temperature resistant material. 4. The charged particle beam two-dimensional vacuum scanning magnet as claimed in claim 2, characterized in that the thin-walled vacuum box (21), the saddle coil (22), the concentrically wound iron core (23), and the airtight filler (24) are tightly attached and a highly self-adhesive material is coated therebetween. 5. The charged particle beam two-dimensional vacuum scanning magnet according to claim 2, characterized in that the saddle coil (22) is made of a highly conductive material. 6. The charged particle beam two-dimensional vacuum scanning magnet as claimed in claim 2, characterized in that the concentrically wound iron core (23) is made of a high magnetic permeability material.