CN118549321A - Particle counter - Google Patents
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- CN118549321A CN118549321A CN202411019332.4A CN202411019332A CN118549321A CN 118549321 A CN118549321 A CN 118549321A CN 202411019332 A CN202411019332 A CN 202411019332A CN 118549321 A CN118549321 A CN 118549321A
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- 239000002245 particle Substances 0.000 title claims abstract description 79
- 230000003287 optical effect Effects 0.000 claims abstract description 35
- 238000012545 processing Methods 0.000 claims abstract description 15
- 230000035945 sensitivity Effects 0.000 claims abstract description 3
- 238000007493 shaping process Methods 0.000 claims description 16
- 238000001914 filtration Methods 0.000 claims description 5
- 239000011358 absorbing material Substances 0.000 claims description 4
- 230000003321 amplification Effects 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000003993 interaction Effects 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 9
- 238000013461 design Methods 0.000 abstract description 7
- 238000012423 maintenance Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000003749 cleanliness Effects 0.000 abstract 1
- 238000009826 distribution Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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- 230000007797 corrosion Effects 0.000 description 1
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- 238000012938 design process Methods 0.000 description 1
- 201000010099 disease Diseases 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
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- 238000006467 substitution reaction Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/1434—Optical arrangements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N2015/1486—Counting the particles
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention relates to the technical field of optical particle detection, and discloses a particle counter, which comprises a scattering cavity, a light source cavity, an air inlet pipe, an air outlet pipe, a reflecting mirror, a photodiode, an optical trap and other components, wherein a laser in the light source cavity shapes a laser beam through an aspheric lens and a cylindrical lens, the laser beam is scattered by the scattering cavity and gas particles, vertical scattered light is reflected to the photodiode by the reflecting mirror and is converted into an electric signal and then is sent into a signal processing system, the photoelectric detector adopts the photodiode with high sensitivity, meanwhile, the collection and detection of the scattered light are optimized, and the signal processing system comprises a pre-amplifying circuit and a signal amplitude discrimination circuit. The particle counter has the advantages of miniaturization, portability, low cost, easiness in maintenance and the like, can monitor the concentration of particles in the environment in real time, ensures the cleanliness of production and medical and health environments, remarkably improves the detection efficiency and precision through modularized design and optimized optical and gas path structures, and has wide application prospects.
Description
Technical Field
The invention relates to the technical field of optical particle detection, in particular to a particle counter.
Background
The particle counter is used for measuring the quantity and the particle size distribution of dust particles in a unit volume in a clean environment, and is widely applied to authorities such as drug inspection stations, blood centers, epidemic prevention stations, disease control centers, quality supervision stations, and production enterprises and scientific research departments such as electronic industry, pharmaceutical workshops, semiconductors, optical or precision machining, plastics, paint spraying, hospitals, environmental protection, inspection stations, and the like.
The laser air particle counter has become a mainstream product in a plurality of industries because of the advantages of high test speed, wide dynamic distribution, no influence of human factors and the like.
A particle counter is an instrument that uses the principle of light scattering to count particles. The working principle is that a beam of particles passes through a beam of strong light, the particles emit scattered light, the scattered light is reflected to a photoelectric detector through a light-gathering reflector 11, light pulses are converted into electric pulses, and the number of the particles is calculated through the number of the pulses.
The existing particle counter mainly comprises an optical structure, a gas circuit sampling structure, a scattered light collecting structure, a signal processing and collecting module and a control system, and the modules are accommodated in a cavity.
Most of the existing particle counters are large in size, are not suitable for complex and changeable scenes, and are required to be designed in a miniaturized manner.
In addition, when the measured particle concentration is too high, a phenomenon that a plurality of particles pass through the photosensitive region at the same time is generated, and the phenomenon is regarded as one particle, so that counting is omitted.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides the particle counter which adopts a modularized structure, improves each structure, reduces the number of parts, realizes the miniaturized design of the particle counter, improves the stability of a gas path, reduces the overlapping rate of particles to be detected, and improves the detection precision of the particle counter.
In order to achieve the above purpose, the invention is realized by the following technical scheme:
a particle counter, comprising: the laser is used for outputting laser beams, the shaping lens is arranged on a beam transmission path, the scattering cavity and the light source cavity, and the shaping lens is used for controlling the spot intensity and the size of the beams in a photosensitive area; the scattering cavity is used for diverging the light source, and the light beam emitted by the laser passes through the shaping lens and the scattering cavity in sequence.
Preferably, the laser is a semiconductor laser.
Preferably, the shaping lens is an aspheric lens and a cylindrical lens, and can adjust the divergences of different optical axis directions, so that the light spot intensity and the light spot size of the light beam in the photosensitive area are modulated to a reasonable range.
Preferably, an air inlet pipe, an air outlet pipe, a reflecting mirror, a photoelectric detector and an optical trap are arranged in the scattering cavity; the air inlet pipe is used for guiding the detected air flow to enter the scattering cavity, and the air outlet pipe is used for discharging the detected air flow; the reflecting mirror is used for reflecting scattered light in the vertical direction generated by the interaction of the light beam entering the scattering cavity and the detected air flow; the photoelectric detector is used for receiving the scattered light in the vertical direction reflected by the reflecting mirror; the optical trap comprises an optical trap cavity and an optical trap cone, and is used for capturing laser light in the horizontal direction so as to avoid influence of redundant stray light on the photoelectric detector.
Preferably, the shaping lens is capable of controlling the spot intensity and size of the light beam in the photosensitive region by adjusting its relative position to the laser.
Preferably, the six devices of the laser, the optical trap, the reflecting mirror, the photoelectric detector, the air inlet pipe and the air outlet pipe are respectively connected to six surfaces of the scattering cavity through six through holes. The two coaxial surfaces of the laser and the optical trap form an incident structure and a stray light absorbing mechanism of the laser, the two coaxial surfaces of the air inlet pipe and the air outlet pipe form an air path structure of the counter, and the two coaxial surfaces of the reflector and the photoelectric detector form a scattered light collecting structure.
Preferably, the particle counter is provided with light absorbing layers on the surfaces except the light emitter, the light shaping mirror and the light detecting element, so as to reduce the influence of stray light on the measurement result to the greatest extent.
Preferably, the air inlet pipe is of an air inlet pipe structure containing a sheath flow device, and is a left sheath air inlet positioned at the left side, a sample air inlet positioned at the middle part and a right sheath air inlet positioned at the right side, an air inlet is formed at the bottom, sheath air is introduced into the left side and the right side of the gas to be detected, so that the beam waist width of a particle beam can be reduced, the condition that a plurality of particles pass through a laser photosensitive area at the same time is reduced, and the overall counting efficiency of the system is improved. The air inlet pipe is connected to the scattering cavity from the air inlet through hole, and the air outlet pipe is connected to the scattering cavity from the air outlet through hole.
Preferably, the reflector is positioned at the bottom through hole of the scattering cavity, the reflector bottom cover is fixed below the reflector, the bottom through hole is a stepped hole, and the reflector cover are embedded and positioned and connected with each other at the bottom through hole.
Preferably, the photoelectric detector is a photodiode, a through hole is formed in the top of the scattering cavity, a sensor fixing structure is arranged above the photoelectric detector, the sensor is fixed, the air tightness of the scattering cavity is guaranteed, and pins of the photodiode are connected with a signal processing system outside the scattering cavity through the sensor fixing structure.
Preferably, a signal processing system is mounted on the outer surface of the scattering chamber and is responsible for receiving and processing the electrical signals from the photodetector and converting the processed signals into particle count information. The signal processing system comprises an amplifying circuit, a filtering circuit, an analog-to-digital converter and a microprocessor, and is used for amplifying, filtering and digitizing the electric signals, calculating and analyzing the digital signals and finally outputting the particle number and particle size distribution information.
Preferably, laser light generated by the laser irradiates into the scattering cavity from the front end through hole after passing through the shaping lens, after particles in the scattering cavity and the gas circuit scatter, residual light irradiates into the light trap structure of the rear end through hole, and the scattered light is absorbed by the light trap, so that influence on the photoelectric detector is avoided, noise signals are reduced, and the signal to noise ratio of the signals is improved.
The invention provides a particle counter, which has the following beneficial effects:
1. According to the particle counter disclosed by the invention, the sheath flow device is adopted in the aspect of the air inlet, so that the beam waist width of the air flow entering the scattering cavity is reduced, the air flow speed is reduced, a plurality of particles are scattered through laser at the same time, the signal overlapping interference is reduced, the counting error is generated, and the technical efficiency and the accuracy of the particle counter are improved; furthermore, the miniaturized design of particle counters also reduces costs and can be applied to more complex scenarios.
2. The particle counter provided by the invention not only can improve the detection precision and efficiency, but also has the advantages of simple structure, low cost, easiness in maintenance and the like, can adapt to various complex environments in practical application, meets the requirements of different users, and has a wide application prospect.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It is evident that the figures in the following description are only some embodiments of the invention, from which other figures can be obtained without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a split structure of a particle counter according to the present invention;
FIG. 2 is a schematic diagram showing a cross-sectional structure of an optical path of a particle counter according to the present invention;
FIG. 3 is a schematic diagram of a cross-sectional structure of a gas circuit of a particle counter according to the present invention;
Fig. 4 is a schematic view of an air inlet pipe structure of a sheath flow device of a particle counter according to the present invention.
1, A scattering cavity; 2. a light source cavity; 23. an aspherical lens; 24. a cylindrical lens; 3. an air inlet pipe; 31. an air inlet; 4. a sampling tube air inlet; 41. a left sheath gas inlet; 42. a sample gas inlet; 43. a right sheath gas inlet; 5. an air outlet pipe; 6. a mirror base; 7. a detector base; 8. an optical trap cavity; 9. an optical trap cone; 10. a photodetector; 11. a reflecting mirror.
Detailed Description
The following description of the embodiments of the present invention will be made more apparent and fully hereinafter with reference to the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-4, an embodiment of the present invention provides a particle counter, including: a laser for outputting a laser beam, a shaping lens arranged on a beam transmission path, a scattering cavity 1 and a light source cavity 2.
The shaping lens is combined with the aspheric lens 23 and the cylindrical lens 24, so that the divergence of the light beams in different optical axis directions can be adjusted, and the light spot intensity and the light spot size of the light beams in the photosensitive area can be modulated to a reasonable range.
The scattering cavity 1 is internally provided with an air inlet pipe 3, an air outlet pipe 5, a reflecting mirror 11, a photoelectric detector 10 and an optical trap; wherein, the detected air flow enters the scattering cavity 1 through the air inlet pipe 3 and is discharged from the air outlet pipe 5; the reflecting mirror 11 and the photodetector 10 are respectively used for reflecting and receiving vertical scattered light generated by the interaction of the light beam entering the scattering cavity 1 and the detected air flow; the laser light in the horizontal direction scattered by the gas circuit is injected into the optical trap, and the optical trap comprises an optical trap cavity and an optical trap cone, wherein the optical trap is used for capturing the laser light in the horizontal direction so as to avoid the influence of redundant stray light on the photoelectric detector.
The inner wall of the scattering cavity 1 is made of a light absorbing material, and the light trap is made of the light absorbing material.
Specifically, referring to the optical path structure of the particle counter in fig. 2, laser light from the light source cavity 2 is shaped by the aspherical lens 23 and the cylindrical lens 24 and then reaches the scattering cavity 1, and the laser light is scattered by particles in the gas introduced from the gas inlet 31 in the scattering cavity 1. The generated vertically scattered light is focused by the mirror 11 on a photodiode, which converts the light signal into an electrical signal and sends the electrical signal to a subsequent signal processing circuit and counting system. The transmitted light and scattered light in the horizontal direction are incident into the optical trap cavity 8, and the optical trap absorbs stray light, thereby reducing noise signals received by the photodiode.
Specifically, the six devices of the light source cavity 2, the light trap cavity 8, the reflecting mirror 11, the photodiode, the air inlet pipe 3 and the air outlet pipe 5 are respectively connected to six surfaces of the scattering cavity 1 through six through holes. The two coaxial surfaces of the laser and the optical trap form an incidence structure and a stray light absorption structure of the laser, the two coaxial surfaces of the air inlet pipe 3 and the air outlet pipe 5 form an air path structure of the counter, and the two coaxial surfaces of the reflecting mirror 11 and the photoelectric detector 10 form a scattered light collection structure. The light absorption layer is arranged on the other surfaces except the light emitter, the light shaping mirror and the light detection part in the shell.
Specifically, referring to fig. 4, the air inlet pipe 3 is an air inlet pipe structure of the sheath-containing device, and is a left sheath air inlet 41 at a left side position, a sample air inlet 42 at a middle part, and a right sheath air inlet 43 at a right side position, the bottom of the air inlet is provided with an air inlet 31, and sheath air is introduced into the left side and the right side of the air to be measured to reduce the beam waist width of the particle beam, thereby reducing the condition that a plurality of particles pass through the laser photosensitive area at the same time, and improving the overall counting efficiency of the system. The air inlet pipe 3 is connected to the scattering cavity 1 from the air inlet through hole, and the air outlet pipe 5 is connected to the scattering cavity 1 from the air outlet through hole. The reflecting mirror 11 is positioned at the bottom through hole of the scattering cavity 1, the bottom cover of the reflecting mirror 11 is fixed below the reflecting mirror, the bottom through hole is a stepped hole, and the reflecting mirror 11 are covered at the bottom through hole and are embedded and positioned and connected.
The photoelectric detector 10 is a photodiode and is positioned at a through hole at the top of the scattering cavity 1, a sensor fixing structure is arranged above the photoelectric detector 10, the sensor is fixed, the air tightness of the scattering cavity 1 is ensured, and pins of the photodiode are connected with a signal processing system outside the scattering cavity 1 through the sensor fixing structure. The signal processing system is mounted on the outer surface of the scattering chamber 1.
Laser generated by the laser irradiates into the scattering cavity 1 from the front end through hole after passing through the shaping lens, after particles in the scattering cavity 1 and the gas circuit are scattered, the rest light irradiates into the light trap structure of the rear end through hole, and the scattered light is absorbed by the light trap, so that the influence on the photoelectric detector 10 is avoided, and the noise signal is reduced.
Compared with the prior art, the particle counter disclosed by the invention adopts the sheath flow device in the aspect of the air inlet 31, so that the beam waist width of the air flow entering the scattering cavity 1 is reduced, and the air flow speed is reduced, thereby reducing the scattering of a plurality of particles through laser, reducing the counting error generated by signal overlapping interference, and improving the technical efficiency and the precision of the particle counter. Furthermore, the miniaturized design of particle counters also reduces costs and can be applied to more complex scenarios.
In the design of the scattering chamber 1, an optimized optical and air path structure is used in order to further improve the performance of the particle counter. First, the aspherical lens 23 and the cylindrical lens 24 in the light source cavity 2 can not only adjust the divergence of the light beam, but also maintain the optimal spot shape of the light beam when passing through the scattering cavity 1, thereby improving the intensity and detection accuracy of the scattered signal. And secondly, the light absorption layer is arranged on the inner surface of the scattering cavity 1, so that redundant scattered light and reflected light can be effectively absorbed, background noise received by the photoelectric detector 10 is reduced, and the signal-to-noise ratio of signals is improved.
In terms of the air path structure, the design of the air inlet pipe 3 and the air outlet pipe 5 is carefully optimized. The sheath flow device is arranged in the air inlet pipe 3, and particle beam waist width in the gas to be detected can be reduced by adjusting flow and speed of sheath gas, so that the condition that a plurality of particles pass through a laser photosensitive area at the same time is reduced, and the overall counting efficiency of the system is improved.
Furthermore, the present invention is optimally designed in terms of the arrangement of the mirror 11 and the photodetector 10. The reflecting mirror 11 is made of a high-reflectivity material, so that scattered light can be reflected to the photoelectric detector 10 to the maximum extent, and the intensity of a scattered signal can be improved. The photodetector 10 uses a photodiode with high sensitivity, and can convert weak optical signals into electrical signals, thereby realizing high-precision particle counting.
In the aspect of signal processing, the particle counter of the invention adopts a perfect signal processing system, and comprises an amplifying circuit, a filter circuit, an analog-to-digital converter, a microprocessor and the like. The amplifying circuit is used for amplifying the weak electric signal output by the photodetector 10 for subsequent processing. The filter circuit is used for filtering high-frequency noise in the electric signal and ensuring the purity of the signal. The analog-to-digital converter converts the analog signal into a digital signal, and the microprocessor is responsible for processing and analyzing the digital signal and finally outputting the information of the number and the particle size distribution of the particles.
The circuit comprises a pre-signal amplification module for amplifying and filtering the current signal generated by the photodetector 10, and a signal amplitude discrimination module for identifying the signal amplitudes generated by the particulate matters with different particle sizes.
In order to ensure the reliability and stability of the particle counter, the present invention also takes into account a number of factors in the design process. For example, the scattering chamber 1 is made of a high-strength and corrosion-resistant material, so that the durability and stability of the device in long-term use are ensured. And a dustproof and dampproof structure is also arranged to prevent the influence of the external environment on the particle counter.
In a word, the particle counter of the invention not only improves the detection precision and efficiency by adopting the modularized design and the optimized optical and gas path structure, but also has the advantages of simple structure, low cost, easy maintenance and the like, and has wide application prospect.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. A particle counter, comprising: the laser is used for outputting laser beams, a shaping lens is arranged on a beam transmission path, the scattering cavity (1) and the light source cavity (2), and the shaping lens is used for controlling the spot intensity and the size of the beams in a photosensitive area; the scattering cavity (1) is used for diverging the light source, and the light beam emitted by the laser sequentially passes through the shaping lens and the scattering cavity (1).
2. A particle counter as claimed in claim 1 wherein the laser is a semiconductor laser.
3. A particle counter according to claim 1, characterized in that the shaping lenses are aspherical lenses (23) and cylindrical lenses (24) capable of adjusting the divergence of the light beam in different directions of the optical axis to modulate the spot intensity and size of the light beam in the photosensitive area to a reasonable range.
4. A particle counter according to claim 1, characterized in that the scattering chamber (1) is provided with an air inlet tube (3), an air outlet tube (5), a reflector (11), a photodetector (10) and an optical trap; the air inlet pipe (3) is used for guiding the detected air flow into the scattering cavity (1), and the air outlet pipe (5) is used for discharging the detected air flow; the reflecting mirror (11) is used for reflecting scattered light in the vertical direction generated by the interaction of the light beam entering the scattering cavity (1) and the detected air flow; the photodetector (10) is used for receiving the scattered light in the vertical direction reflected by the reflecting mirror (11); the optical trap comprises an optical trap cavity (8) and an optical trap cone (9), and is used for capturing laser light in the horizontal direction so as to avoid influence of redundant stray light on the photoelectric detector (10).
5. A particle counter as claimed in claim 1 wherein the shaping lens is capable of controlling the spot intensity and size of the beam in the photosensitive region by adjusting its relative position to the laser.
6. A particle counter according to claim 1, characterized in that the inner wall of the scattering chamber (1) is of a light absorbing material, the light traps being made of a light absorbing material.
7. A particle counter according to claim 1, characterized in that the photodetector (10) is a high sensitivity photodiode.
8. A particle counter according to claim 1, characterized in that the air inlet pipe (3) is an air inlet pipe structure containing a sheath flow device, and comprises a left sheath air inlet (41) positioned at a left side, a sample air inlet (42) positioned at a middle part and a right sheath air inlet (43) positioned at a right side, wherein an air inlet (31) is formed at the bottom, and sheath air is introduced into the left side and the right side of the gas to be measured.
9. A particle counter as claimed in claim 4, further comprising a set of circuits for signal amplification and signal amplitude discrimination, said circuits being connected to the photodetector (10) for processing the particle count results.
10. A particle counter according to claim 9, wherein the circuit comprises a pre-signal amplification module for amplifying and filtering the current signal generated by the photodetector (10), and wherein the circuit comprises a signal amplitude discrimination module for discriminating the signal amplitudes generated by particles of different particle sizes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411019332.4A CN118549321A (en) | 2024-07-29 | 2024-07-29 | Particle counter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411019332.4A CN118549321A (en) | 2024-07-29 | 2024-07-29 | Particle counter |
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| CN118549321A true CN118549321A (en) | 2024-08-27 |
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| CN202411019332.4A Pending CN118549321A (en) | 2024-07-29 | 2024-07-29 | Particle counter |
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| CN111366506A (en) * | 2020-03-20 | 2020-07-03 | 江苏天瑞仪器股份有限公司 | Optical equivalent particle size spectrometer with internal circulation sheath flow structure |
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| CN219065205U (en) * | 2023-01-16 | 2023-05-23 | 苏州苏信环境科技有限公司 | Particle counter |
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2024
- 2024-07-29 CN CN202411019332.4A patent/CN118549321A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101162195A (en) * | 2007-11-16 | 2008-04-16 | 苏州华达仪器设备有限公司 | Dust particle counter and method of use thereof |
| CN201116912Y (en) * | 2007-11-16 | 2008-09-17 | 苏州华达仪器设备有限公司 | Optical sensor for measuring dust particle |
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| CN219065205U (en) * | 2023-01-16 | 2023-05-23 | 苏州苏信环境科技有限公司 | Particle counter |
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