CN118545997B - High-dielectric-property electronic ceramic and preparation method thereof - Google Patents
High-dielectric-property electronic ceramic and preparation method thereof Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 40
- 238000002360 preparation method Methods 0.000 title abstract description 7
- 239000000203 mixture Substances 0.000 claims abstract description 12
- 239000000126 substance Substances 0.000 claims abstract description 9
- 238000005245 sintering Methods 0.000 claims description 21
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 14
- 229910052760 oxygen Inorganic materials 0.000 claims description 14
- 239000001301 oxygen Substances 0.000 claims description 14
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 11
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 11
- 239000011230 binding agent Substances 0.000 claims description 9
- 239000008187 granular material Substances 0.000 claims description 5
- 238000010304 firing Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000000843 powder Substances 0.000 claims description 3
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 claims description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 claims 2
- 238000009413 insulation Methods 0.000 claims 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Inorganic materials O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052593 corundum Inorganic materials 0.000 claims 1
- XMFOQHDPRMAJNU-UHFFFAOYSA-N lead(II,IV) oxide Inorganic materials O1[Pb]O[Pb]11O[Pb]O1 XMFOQHDPRMAJNU-UHFFFAOYSA-N 0.000 claims 1
- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium(III) oxide Inorganic materials O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 claims 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims 1
- YEAUATLBSVJFOY-UHFFFAOYSA-N tetraantimony hexaoxide Chemical compound O1[Sb](O2)O[Sb]3O[Sb]1O[Sb]2O3 YEAUATLBSVJFOY-UHFFFAOYSA-N 0.000 claims 1
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten(VI) oxide Inorganic materials O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 claims 1
- 229910001845 yogo sapphire Inorganic materials 0.000 claims 1
- 229910010293 ceramic material Inorganic materials 0.000 abstract description 5
- 229910002117 Bi 4Ti3O12 Inorganic materials 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 6
- 238000000498 ball milling Methods 0.000 description 6
- 239000011812 mixed powder Substances 0.000 description 6
- 229910052726 zirconium Inorganic materials 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 239000012071 phase Substances 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 229910010413 TiO 2 Inorganic materials 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 2
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
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Abstract
Description
技术领域Technical Field
本发明涉及电子陶瓷材料领域,具体为一种高介电性能电子陶瓷及其制备方法。The invention relates to the field of electronic ceramic materials, in particular to an electronic ceramic with high dielectric properties and a preparation method thereof.
背景技术Background Art
传统的电子陶瓷材料由于介电常数不高在应用方面受到限制。近年来,随着压电电声器件向着小型化、薄型化方向发展,需要电子陶瓷材料具有更高的介电常数以及更低的介电损耗。Traditional electronic ceramic materials are limited in application due to their low dielectric constant. In recent years, as piezoelectric electroacoustic devices have developed towards miniaturization and thinning, electronic ceramic materials are required to have higher dielectric constants and lower dielectric losses.
发明内容Summary of the invention
发明目的:针对上述技术问题,本发明提出了一种高介电性能电子陶瓷及其制备方法。Purpose of the invention: In view of the above technical problems, the present invention proposes an electronic ceramic with high dielectric properties and a preparation method thereof.
所采用的技术方案如下:The technical solutions adopted are as follows:
一种高介电性能电子陶瓷,其化学组成包括:A high dielectric performance electronic ceramic, the chemical composition of which includes:
Pb(ZrxTi1-x)(MgyW1-y)(SczTa1-z)O3-αwt%Ba(AlqSb1-q)O3-βwt%Bi4Ti3O12 Pb(Zr x Ti 1-x )(Mg y W 1-y )(Sc z Ta 1-z )O 3 -αwt%Ba(Al q Sb 1-q )O 3 -βwt%Bi 4 Ti 3 O 12
x、y、z、q为原子百分比;x, y, z, q are atomic percentages;
α和β分别代表Ba(AlqSb1-q)O3和Bi4Ti3O12占整体电子陶瓷的质量百分比;α and β represent the mass percentage of Ba(Al q Sb 1-q )O 3 and Bi 4 Ti 3 O 12 in the whole electronic ceramic, respectively;
x为0.4-0.6,y为0.4-0.6,z为0.4-0.6,q为0.4-0.6;x is 0.4-0.6, y is 0.4-0.6, z is 0.4-0.6, q is 0.4-0.6;
α为5-10,β为0.1-1。α is 5-10, and β is 0.1-1.
进一步地,x为0.45-0.55,y为0.45-0.55,z为0.45-0.55,q为0.45-0.55。Further, x is 0.45-0.55, y is 0.45-0.55, z is 0.45-0.55, and q is 0.45-0.55.
进一步地,x为0.48,y为0.5,z为0.5,q为0.5。Further, x is 0.48, y is 0.5, z is 0.5, and q is 0.5.
进一步地,α为6-8,β为0.4-0.8。Furthermore, α is 6-8, and β is 0.4-0.8.
进一步地,α为6.5,β为0.5。Further, α is 6.5 and β is 0.5.
本发明还提供了一种高介电性能电子陶瓷的制备方法:The present invention also provides a method for preparing electronic ceramics with high dielectric properties:
将Pb3O4、ZrO2、TiO2、MgO、WO3、Sc2O3、Ta2O5、BaCO3、Al2O3、Sb2O3和Bi4Ti3O12混合球磨后干燥,预压制成生片后预烧,预烧产物破碎后再次球磨并干燥,所得粉体加入粘结剂造粒,压制成坯体,将坯体置于烧结炉中先一段升温至550-650℃保温排胶1-3h,再二段升温至1150-1300℃保温烧结2-4h即可。Pb 3 O 4 , ZrO 2 , TiO 2 , MgO, WO 3 , Sc 2 O 3 , Ta 2 O 5 , BaCO 3 , Al 2 O 3 , Sb 2 O 3 and Bi 4 Ti 3 O 12 are mixed, ball-milled and dried, pre-pressed into green sheets and pre-fired, the pre-fired products are crushed and ball-milled again and dried, a binder is added to the obtained powder to granulate, and the green bodies are pressed into green bodies, which are placed in a sintering furnace, first heated to 550-650°C for 1-3 hours for debinding, and then heated to 1150-1300°C for 2-4 hours for sintering.
进一步地,预烧温度为800-900℃,预烧时间为1-3h。Furthermore, the pre-firing temperature is 800-900° C., and the pre-firing time is 1-3 hours.
进一步地,所述粘结剂为聚乙烯醇和/或聚乙烯醇缩丁醛。Furthermore, the binder is polyvinyl alcohol and/or polyvinyl butyral.
进一步地,烧结在氧气气氛下进行。Furthermore, sintering is performed in an oxygen atmosphere.
进一步地,一段升温的速度为0.5-20℃/min,二段升温的速度为0.5-20℃/min。Furthermore, the first stage heating rate is 0.5-20°C/min, and the second stage heating rate is 0.5-20°C/min.
本发明的有益效果:Beneficial effects of the present invention:
本发明提供了一种高介电性能电子陶瓷,PZT作为一种极其重要的压电陶瓷,为了提升其压电和介电性能,PZT系多元电子陶瓷被广泛研究,本发明PZT-PMW-PST处在准同形相界(MPB)附近,电子陶瓷材料结构处于三方相和四方相共存且三方相与四方相之间的势垒降低,电子陶瓷的宏观介电和压电效应较好,Ba(AlqSb1-q)O3为钙钛矿结构,可与PZT-PMW-PST形成良好的固溶体,其含有的离子Ba2+,Cu2+,Sb3+均可对PZT-PMW-PST起到较好的改性作用,从而改善电子陶瓷的各项性能,Bi4Ti3O12作为复合氧化物可以降低烧结温度,并且在烧结过程中产生大量的液相促进烧结致密化,在氧气气氛下烧结可以获得高性能的电子陶瓷,这主要因为氧气气氛下烧结可以降低电子陶瓷中的氧空位含量,减弱因空间电荷聚集对畴壁产生的钉扎作用,从而相同条件下电子陶瓷的极化程度更高,本发明所制备的电子陶瓷具有良好的介电性能和压电性能,而且通过对比可知Ba(Al0.5Sb0.5)O3、Bi4Ti3O12的加入和氧气氛围下烧结对于提升电子陶瓷的介电性能和压电性能起到了积极作用。The invention provides an electronic ceramic with high dielectric properties. PZT is an extremely important piezoelectric ceramic. In order to improve its piezoelectric and dielectric properties, PZT-PMW-PST is widely studied. The PZT-PMW-PST of the invention is near the quasi-morphous phase boundary (MPB). The electronic ceramic material structure is in the coexistence of the rhombic phase and the tetragonal phase, and the barrier between the rhombic phase and the tetragonal phase is reduced. The macroscopic dielectric and piezoelectric effects of the electronic ceramic are good. Ba(Al q Sb 1-q )O 3 is a perovskite structure and can form a good solid solution with PZT-PMW-PST. The ions Ba 2+ , Cu 2+ , and Sb 3+ contained in the Ba(Al q Sb 1-q )O 3 can all play a good modification role on PZT-PMW-PST, thereby improving various properties of the electronic ceramic. Bi 4 Ti 3 O 12 as a composite oxide can reduce the sintering temperature, and produce a large amount of liquid phase during the sintering process to promote sintering densification. Sintering in an oxygen atmosphere can obtain high-performance electronic ceramics. This is mainly because sintering in an oxygen atmosphere can reduce the oxygen vacancy content in the electronic ceramics and weaken the pinning effect on the domain wall caused by space charge aggregation, so that the polarization degree of the electronic ceramics is higher under the same conditions. The electronic ceramics prepared by the present invention have good dielectric properties and piezoelectric properties. Moreover, by comparison, it can be seen that the addition of Ba(Al 0.5 Sb 0.5 )O 3 and Bi 4 Ti 3 O 12 and sintering in an oxygen atmosphere play a positive role in improving the dielectric properties and piezoelectric properties of electronic ceramics.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为实施例1中所制备电子陶瓷的SEM图。FIG. 1 is a SEM image of the electronic ceramic prepared in Example 1.
具体实施方式DETAILED DESCRIPTION
实施例中未注明具体条件者,按照常规条件或制造商建议的条件进行。所用试剂或仪器未注明生产厂商者,均为可以通过市售购买获得的常规产品。本发明未提及的技术均参照现有技术,除非特别指出,以下实施例和对比例为平行试验,采用同样的处理步骤和参数。If the specific conditions are not specified in the examples, the experiments were carried out under conventional conditions or the conditions recommended by the manufacturer. If the manufacturer of the reagents or instruments is not specified, they are all conventional products that can be purchased commercially. The techniques not mentioned in the present invention are all referenced to the prior art. Unless otherwise specified, the following examples and comparative examples are parallel experiments, using the same processing steps and parameters.
实施例1:一种高介电性能电子陶瓷,其化学组成包括:Embodiment 1: A high dielectric performance electronic ceramic, the chemical composition of which comprises:
Pb(Zr0.48Ti0.52)(Mg0.5W0.5)(Sc0.5Ta0.5)O3-6.5wt%Ba(Al0.5Sb0.5)O3-0.5wt%Bi4Ti3O12 Pb(Zr 0.48 Ti 0.52 )(Mg 0.5 W 0.5 )(Sc 0.5 Ta 0.5 )O 3 -6.5wt%Ba(Al 0.5 Sb 0.5 )O 3 -0.5wt%Bi 4 Ti 3 O 12
上述高介电性能电子陶瓷的制备方法:Preparation method of the above-mentioned high dielectric performance electronic ceramics:
按照化学组成称取Pb3O4、ZrO2、TiO2、MgO、WO3、Sc2O3、Ta2O5、BaCO3、Al2O3、Sb2O3和Bi4Ti3O12,将其混合后加入到行星式球磨机的球磨罐中,以无水乙醇为球磨介质,用锆球球磨10h后干燥,再在10MPa压力下预压制成生片,将生片升温至850℃预烧2h,将预烧得到的产物破碎后再次加入到行星式球磨机的球磨罐中,以无水乙醇为球磨介质,用锆球球磨5h后干燥得到混合粉体,将粘结剂聚乙烯醇溶于水中得到质量浓度为8%的聚乙烯醇溶液,将混合粉体与聚乙烯醇溶液混合造粒,过筛后于200MPa下压制成坯体,将坯体置于烧结炉中在空气氛围下,先以1℃/min的速度一段升温至600℃保温排胶2h,用高纯氧气置换烧结炉中的空气,再在氧气气氛下以5℃/min的速度二段升温至1250℃保温烧结3h即可。Pb 3 O 4 , ZrO 2 , TiO 2 , MgO, WO 3 , Sc 2 O 3 , Ta 2 O 5 , BaCO 3 , Al 2 O 3 , Sb 2 O 3 and Bi 4 Ti 3 O 12 were weighed according to their chemical compositions. , add them to the ball mill of a planetary ball mill after mixing, use anhydrous ethanol as the ball milling medium, use zirconium balls to mill for 10 hours and then dry, and then pre-press them under a pressure of 10MPa to form a green sheet, heat the green sheet to 850℃ and pre-sinter for 2h, crush the pre-sintered product and add it to the ball mill of a planetary ball mill again, use anhydrous ethanol as the ball milling medium, use zirconium balls to mill for 5h and then dry to obtain a mixed powder, dissolve the binder polyvinyl alcohol in water to obtain a polyvinyl alcohol solution with a mass concentration of 8%, mix the mixed powder with the polyvinyl alcohol solution to granulate, sieve and press them into a green body at 200MPa, place the green body in a sintering furnace under an air atmosphere, first heat to 600℃ at a speed of 1℃/min in one stage, keep warm for 2h to debind, replace the air in the sintering furnace with high-purity oxygen, and then heat to 1250℃ in two stages at a speed of 5℃/min in an oxygen atmosphere, keep warm and sinter for 3h.
实施例2:一种高介电性能电子陶瓷,其化学组成包括:Embodiment 2: A high dielectric performance electronic ceramic, the chemical composition of which comprises:
Pb(Zr0.48Ti0.52)(Mg0.5W0.5)(Sc0.5Ta0.5)O3-6.5wt%Ba(Al0.5Sb0.5)O3-0.5wt%Bi4Ti3O12 Pb(Zr 0.48 Ti 0.52 )(Mg 0.5 W 0.5 )(Sc 0.5 Ta 0.5 )O 3 -6.5wt%Ba(Al 0.5 Sb 0.5 )O 3 -0.5wt%Bi 4 Ti 3 O 12
上述高介电性能电子陶瓷的制备方法:Preparation method of the above-mentioned high dielectric performance electronic ceramics:
按照化学组成称取Pb3O4、ZrO2、TiO2、MgO、WO3、Sc2O3、Ta2O5、BaCO3、Al2O3、Sb2O3和Bi4Ti3O12,将其混合后加入到行星式球磨机的球磨罐中,以无水乙醇为球磨介质,用锆球球磨10h后干燥,再在10MPa压力下预压制成生片,将生片升温至900℃预烧3h,将预烧得到的产物破碎后再次加入到行星式球磨机的球磨罐中,以无水乙醇为球磨介质,用锆球球磨5h后干燥得到混合粉体,将粘结剂聚乙烯醇溶于水中得到质量浓度为8%的聚乙烯醇溶液,将混合粉体与聚乙烯醇溶液混合造粒,过筛后于200MPa下压制成坯体,将坯体置于烧结炉中在空气氛围下,先以5℃/min的速度一段升温至650℃保温排胶2h,用高纯氧气置换烧结炉中的空气,再在氧气气氛下以10℃/min的速度二段升温至1300℃保温烧结2h即可。Pb 3 O 4 , ZrO 2 , TiO 2 , MgO, WO 3 , Sc 2 O 3 , Ta 2 O 5 , BaCO 3 , Al 2 O 3 , Sb 2 O 3 and Bi 4 Ti 3 O 12 were weighed according to their chemical compositions. , add the mixed materials into the ball mill of a planetary ball mill, use anhydrous ethanol as the ball milling medium, use zirconium balls to mill for 10 hours and then dry, and then pre-press them into green sheets under a pressure of 10 MPa, heat the green sheets to 900°C and pre-sinter for 3 hours, crush the pre-sintered products and add them into the ball mill of a planetary ball mill again, use anhydrous ethanol as the ball milling medium, use zirconium balls to mill for 5 hours and then dry to obtain a mixed powder, dissolve the binder polyvinyl alcohol in water to obtain a polyvinyl alcohol solution with a mass concentration of 8%, mix the mixed powder with the polyvinyl alcohol solution to granulate, sieve and press them into a green body under 200 MPa, place the green body in a sintering furnace under an air atmosphere, first heat to 650°C at a rate of 5°C/min in one stage to remove binder for 2 hours, replace the air in the sintering furnace with high-purity oxygen, and then heat to 1300°C in an oxygen atmosphere at a rate of 10°C/min in two stages to sinter for 2 hours.
实施例3:一种高介电性能电子陶瓷,其化学组成包括:Embodiment 3: A high dielectric performance electronic ceramic, the chemical composition of which comprises:
Pb(Zr0.48Ti0.52)(Mg0.5W0.5)(Sc0.5Ta0.5)O3-6.5wt%Ba(Al0.5Sb0.5)O3-0.5wt%Bi4Ti3O12 Pb(Zr 0.48 Ti 0.52 )(Mg 0.5 W 0.5 )(Sc 0.5 Ta 0.5 )O 3 -6.5wt%Ba(Al 0.5 Sb 0.5 )O 3 -0.5wt%Bi 4 Ti 3 O 12
上述高介电性能电子陶瓷的制备方法:Preparation method of the above-mentioned high dielectric performance electronic ceramics:
按照化学组成称取Pb3O4、ZrO2、TiO2、MgO、WO3、Sc2O3、Ta2O5、BaCO3、Al2O3、Sb2O3和Bi4Ti3O12,将其混合后加入到行星式球磨机的球磨罐中,以无水乙醇为球磨介质,用锆球球磨10h后干燥,再在10MPa压力下预压制成生片,将生片升温至800℃预烧1h,将预烧得到的产物破碎后再次加入到行星式球磨机的球磨罐中,以无水乙醇为球磨介质,用锆球球磨5h后干燥得到混合粉体,将粘结剂聚乙烯醇溶于水中得到质量浓度为8%的聚乙烯醇溶液,将混合粉体与聚乙烯醇溶液混合造粒,过筛后于200MPa下压制成坯体,将坯体置于烧结炉中在空气氛围下,先以0.5℃/min的速度一段升温至550℃保温排胶3h,用高纯氧气置换烧结炉中的空气,再在氧气气氛下以0.5℃/min的速度二段升温至1150℃保温烧结2h即可。Pb 3 O 4 , ZrO 2 , TiO 2 , MgO, WO 3 , Sc 2 O 3 , Ta 2 O 5 , BaCO 3 , Al 2 O 3 , Sb 2 O 3 and Bi 4 Ti 3 O 12 were weighed according to their chemical compositions. , add them to the ball mill of a planetary ball mill after mixing, use anhydrous ethanol as the ball milling medium, use zirconium balls to mill for 10 hours and then dry, and then pre-press them under a pressure of 10 MPa to form a green sheet, heat the green sheet to 800℃ and pre-sinter for 1 hour, crush the pre-sintered product and add it to the ball mill of a planetary ball mill again, use anhydrous ethanol as the ball milling medium, use zirconium balls to mill for 5 hours and then dry to obtain a mixed powder, dissolve the binder polyvinyl alcohol in water to obtain a polyvinyl alcohol solution with a mass concentration of 8%, mix the mixed powder with the polyvinyl alcohol solution to granulate, sieve and press them into a green body at 200 MPa, place the green body in a sintering furnace under an air atmosphere, first heat to 550℃ at a speed of 0.5℃/min in one stage to remove binder for 3 hours, replace the air in the sintering furnace with high-purity oxygen, and then heat to 1150℃ in two stages at a speed of 0.5℃/min in an oxygen atmosphere and sinter for 2 hours.
对比例1:Comparative Example 1:
与实施例1基本相同,区别在于,不加入Ba(Al0.5Sb0.5)O3。The method is basically the same as Example 1, except that Ba(Al 0.5 Sb 0.5 )O 3 is not added.
对比例2:Comparative Example 2:
与实施例1基本相同,区别在于,不加入Bi4Ti3O12。The process is basically the same as Example 1, except that Bi 4 Ti 3 O 12 is not added.
对比例3:Comparative Example 3:
与实施例1基本相同,区别在于,不用高纯氧气置换烧结炉中的空气,继续保持在空气氛围下烧结。The method is basically the same as Example 1, except that the air in the sintering furnace is not replaced by high-purity oxygen, and the sintering is continued in an air atmosphere.
性能测试:Performance Test:
分别将本发明实施例1-3及对比例1-3中所制备的高介电性能电子陶瓷打磨后上下两表面刷涂银浆,在600℃保温固化30min,浸入70℃的硅油中并施加3kv/mm的直流电场极化30min作为试样进行性能测试;The high dielectric performance electronic ceramics prepared in Examples 1-3 of the present invention and Comparative Examples 1-3 were polished and coated with silver paste on the upper and lower surfaces, cured at 600° C. for 30 min, immersed in silicone oil at 70° C. and polarized with a DC electric field of 3 kv/mm for 30 min as samples for performance testing;
用ZJ-3A型准静态d 33 测试仪测量试样的压电常数,利用Agilent公司的HP4192精密阻抗分析仪测试试样的相对介电常数εr(室温100kHz)、介电损耗tanδ(室温100kHz)、谐振频率和反谐振频率以及相应阻抗,并以此计算出试样的机电耦合系数kp;The piezoelectric constant of the sample was measured by using a ZJ-3A quasi-static d 33 tester, and the relative dielectric constant ε r (room temperature 100kHz), dielectric loss tanδ (room temperature 100kHz), resonant frequency, anti-resonant frequency and corresponding impedance of the sample were measured by using an Agilent HP4192 precision impedance analyzer, and the electromechanical coupling coefficient k p of the sample was calculated based on this.
测试结果如下表1所示:The test results are shown in Table 1 below:
表1:Table 1:
; ;
由上表1可知,本发明所制备的电子陶瓷具有良好的介电性能和压电性能,而且通过对比可知Ba(Al0.5Sb0.5)O3、Bi4Ti3O12的加入和氧气氛围下烧结对于提升电子陶瓷的介电性能和压电性能起到了积极作用。It can be seen from Table 1 above that the electronic ceramics prepared in the present invention have good dielectric properties and piezoelectric properties. Moreover, by comparison, it can be seen that the addition of Ba(Al 0.5 Sb 0.5 )O 3 and Bi 4 Ti 3 O 12 and sintering in an oxygen atmosphere play a positive role in improving the dielectric properties and piezoelectric properties of the electronic ceramics.
以上实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features thereof may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.
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