CN118502106A - Small deflection angle piezoelectric swing mirror based on bending deformation actuation - Google Patents
Small deflection angle piezoelectric swing mirror based on bending deformation actuation Download PDFInfo
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- CN118502106A CN118502106A CN202410792371.1A CN202410792371A CN118502106A CN 118502106 A CN118502106 A CN 118502106A CN 202410792371 A CN202410792371 A CN 202410792371A CN 118502106 A CN118502106 A CN 118502106A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
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Abstract
The invention discloses a small deflection angle piezoelectric oscillating mirror based on bending deformation actuation, relates to the technical field of laser beam deflection adjustment, and solves the problems of more driving control signals and more complex use of the existing oscillating mirror. The invention comprises a spectacle frame, a base, four bending piezoelectric drivers and four flexible hinges, wherein the four bending piezoelectric drivers are uniformly arranged on the periphery of the base; the frame is arranged above the base, and the end part of the frame is connected with the bending piezoelectric driver through a flexible hinge. The piezoelectric bending driver can realize differential push/pull movement by applying positive/negative voltage, and can realize deflection with two degrees of freedom by only using two paths of control signals by combining the piezoelectric bending driver with the piezoelectric swing mirror; the piezoelectric bending driver is arranged outwards along the circumferential direction, so that the deflection radius of the glasses frame is increased on the premise of not changing the deformation displacement of the piezoelectric bending driver, and the swing mirror can be driven to realize deflection movement with smaller angle and higher resolution.
Description
Technical Field
The invention relates to the technical field of laser beam deflection adjustment, in particular to a small deflection angle piezoelectric oscillating mirror based on bending deformation actuation.
Background
In optical positioning and scanning systems, the angular resolution of deflection of the laser beam is particularly important. The traditional piezoelectric oscillating mirror drives the lenses on the oscillating mirror to deflect in a lever motion mode of differential push-pull of the piezoelectric stack, however, control signals required by the oscillating mirror to deflect in two degrees of freedom are three paths, and the use is complex. On the other hand, for ultra-high precision optical applications, deflection angle resolution is more demanding. To achieve a lower number of control signal paths and a higher deflection angle resolution, improvements to conventional driving schemes are required based on this.
Disclosure of Invention
The invention aims to solve the problems that the prior oscillating mirror has more driving control signals and is more complex to use, and particularly provides a small-deflection-angle piezoelectric oscillating mirror based on bending deformation actuation. The piezoelectric bending driver can realize differential push/pull motion through the applied positive/negative voltage, and the piezoelectric bending driver and the piezoelectric swing mirror are combined to realize deflection with two degrees of freedom by using only two paths of control signals. In addition, the piezoelectric bending driver is arranged outwards along the circumferential direction, so that the deflection radius of the glasses frame is increased on the premise of not changing the deformation displacement of the piezoelectric bending driver, and the swing mirror can be driven to realize deflection movement with smaller angle and higher resolution.
The invention provides a small deflection angle piezoelectric swing mirror based on bending deformation actuation, which specifically comprises a mirror bracket, a base, four bending piezoelectric drivers and four flexible hinges, wherein the four bending piezoelectric drivers are uniformly arranged around the base; the frame is arranged above the base, and the end part of the frame is connected with the bending piezoelectric driver through a flexible hinge.
Further, the end of the bending piezoelectric actuator is provided with a driving rod, and the driving rod is connected with one end of the flexible hinge.
Still further, the small deflection angle piezoelectric swing mirror based on bending deformation actuation further comprises a plurality of driver fixing bolts, the bending piezoelectric driver and the driving rod are provided with through holes, and one end of each driver fixing bolt penetrates through the bending piezoelectric driver and the through holes on the driving rod to be connected with the base.
Further, one section of the flexible hinge is fixed on the driving rod through a driver fixing bolt, and the other end of the flexible hinge is connected with the lens frame through a bolt connection, glue joint or welding mode.
Still further, the hinge type of the flexible hinge is a leaf shape, a semicircular shape or an oval shape.
Still further, the small deflection angle piezoelectric swing mirror based on bending deformation actuation further comprises a plurality of strain gauges, wherein the strain gauges are arranged on the bending piezoelectric actuator or the flexible hinge.
Further, the polarization directions of the upper half cylinder and the lower half cylinder of the bending piezoelectric driver are opposite, and the bending piezoelectric driver generates downward bending motion when positive voltage is applied; when a negative voltage is applied, the bending piezoelectric actuator produces an upward bending motion.
Still further, the bending piezoelectric actuator is of a stacked structure, a patch structure, or a piezoelectric tube structure.
Further, the polarization directions of the four bending piezoelectric drivers are opposite, and the two bending piezoelectric drivers are symmetrical to each other among the four bending piezoelectric drivers arranged on the base.
The small deflection angle piezoelectric oscillating mirror based on bending deformation actuation has the beneficial effects that:
(1) The small deflection angle piezoelectric oscillating mirror based on bending deformation actuation solves the problems that the existing oscillating mirror is more in driving control signals and more complex to use, two paths of control signals are used for realizing deflection motion of two degrees of freedom, each path of control signals respectively control two mutually symmetrical bending piezoelectric drivers to move upwards and downwards, differential push-pull motion is used for realizing deflection of a mirror bracket, the deflection radius of the mirror bracket is increased in a circumferential outwards arrangement mode of the bending piezoelectric drivers, and the small deflection angle piezoelectric oscillating mirror based on the bending piezoelectric drivers is suitable for the field of laser beam regulation of small deflection angle and high resolution;
(2) The small deflection angle piezoelectric oscillating mirror based on bending deformation actuation can realize the small-range adjustment of the deflection angle of two degrees of freedom of an optical lens through the bending piezoelectric driver and the driving rod, and the complexity of a control system is reduced due to the fewer control signal paths, so that the small deflection angle piezoelectric oscillating mirror based on bending deformation actuation is suitable for optical application of communication, manufacturing and measurement by utilizing laser beams.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the application.
In the drawings:
FIG. 1 is an isometric view of a small-deflection piezoelectric oscillating mirror based on bending deformation actuation according to the present invention;
FIG. 2 is a side view of a small-deflection piezoelectric oscillating mirror based on bending deformation actuation according to the present invention;
FIG. 3 is an exploded view of a small deflection angle piezoelectric swing mirror based on bending deformation actuation according to the present invention;
FIG. 4 is a cross-sectional view of a small-deflection piezoelectric oscillating mirror based on bending deformation actuation according to the present invention;
FIG. 5 is a schematic view of the polarization direction inside a bending piezoelectric actuator of a small-deflection piezoelectric oscillating mirror based on bending deformation actuation according to the present invention;
FIG. 6 is a schematic diagram of a bending state of a bending piezoelectric actuator of a small deflection piezoelectric swing mirror based on bending deformation actuation when positively charged;
FIG. 7 is a schematic diagram of a bending state of a bending piezoelectric actuator of a small deflection piezoelectric swing mirror based on bending deformation actuation when negatively charged;
FIG. 8 is a schematic diagram of a bending piezoelectric actuator for driving a mirror frame to rotate about an X-axis based on a bending deformation actuated small-deflection piezoelectric swing mirror according to the present invention;
FIG. 9 is a schematic diagram of a bending piezoelectric actuator for driving a mirror frame to rotate about a Y-axis based on a bending deformation actuated small-deflection piezoelectric swing mirror according to the present invention;
wherein: 1-a spectacle frame fixing bolt; 2-a frame; 3-a base; 4-strain gage; a 5-bend piezoelectric driver; 6-driving rod; 7-a flexible hinge; 8-driver fixing bolts.
Detailed Description
The following describes the embodiments of the present invention in further detail with reference to the accompanying drawings:
The first embodiment is as follows: the present embodiment is specifically described with reference to fig. 1 to 9. The small-deflection-angle piezoelectric swing mirror based on bending deformation actuation specifically comprises a mirror bracket 2, a base 3, four bending piezoelectric drivers 5 and four flexible hinges 7, wherein the base 3 is of a cube structure, and four bending piezoelectric drivers 5 are uniformly arranged on four planes around the base 3; the upper side of the base 3 is provided with the glasses frame 2 through four bending piezoelectric drivers 5 and four flexible hinges 7, the end parts of the glasses frame 2 are connected with the bending piezoelectric drivers 5 through the flexible hinges 7, and the flexible hinges 7 are connected with the glasses frame 2 through the glasses frame fixing bolts 1 in a gluing or welding mode.
The tail end of the bending piezoelectric actuator 5 is provided with a driving rod 6, the driving rod 6 is connected with one end of a flexible hinge 7, and the action of the bending piezoelectric actuator 5 is amplified through the driving rod 6, so that the posture of the spectacle frame 2 is adjusted.
The small-deflection-angle piezoelectric swing mirror based on bending deformation actuation further comprises a plurality of driver fixing bolts 8, and threaded holes are formed in four side faces of the base 3; the bending piezoelectric driver 5 is provided with a through hole, and when the bending piezoelectric driver is installed, the through hole of the bending piezoelectric driver 5 is in concentric fit with the threaded hole of the base 3, and one end of the bending piezoelectric driver is tightly attached to the side face of the base 3; the driving rod 6 is provided with a through hole, the through hole of the driving rod 6 is concentrically matched with the through hole of the bending piezoelectric driver 5 during installation, and one end of the driving rod 6 is tightly attached to the bending piezoelectric driver 5; one end of the flexible hinge 7 is of a cuboid structure with a single through hole, the flexible hinge 7 is concentrically matched with the through hole of the driving rod 6, and one end of the flexible hinge 7 is tightly attached to the driving rod 6 during installation; the driver fixing bolt 8 penetrates through the through hole of the flexible hinge 7, the through hole of the driving rod 6 and the through hole of the bending piezoelectric driver 5 in a sandwich mode and is in threaded connection with the threaded hole on the side surface of the base 3; the driver fixing bolt 8 restrains the displacement of the flexible hinge 7, the driving rod 6, the bending piezoelectric driver 5 and the base 3, the bottom surface of the base 3 is restrained from displacement, and after the bending piezoelectric driver 5 is electrified, bending deformation is generated, so that the driving rod 6, the flexible hinge 7 and the driver fixing bolt 8 are driven to swing upwards or downwards.
The hinge type of the flexible hinge 7 is blade-shaped, semicircular or elliptic, and the flexible hinge 7 is used for transmitting linear and bending motions so as to realize the deflection of the swing mirror with two degrees of freedom.
The small deflection angle piezoelectric oscillating mirror based on bending deformation actuation further comprises a plurality of strain gages 4, wherein the strain gages 4 are arranged on a bending piezoelectric driver 5 or a flexible hinge 7 and are used for measuring strain, and the oscillation angle is obtained through indirect calculation.
As shown in fig. 5 to 7, the polarization directions of the upper and lower semi-cylinders divided along the axis of the bending piezoelectric actuator 5 are opposite, and the bending piezoelectric actuator 5 generates a downward bending motion when a positive voltage is applied; when a negative voltage is applied, the bending piezoelectric driver 5 generates an upward bending motion; different actions of the bending piezoelectric actuator 5 are achieved by applying different voltages to drive the mirror holder 2 to oscillate. The bending piezoelectric actuator 5 is of a stacked structure, a patch structure or a piezoelectric tube structure.
As shown in fig. 8-9, the four bending piezoelectric drivers 5 disposed on the base 3 are divided into two groups, two bending piezoelectric drivers 5 symmetrical to each other are grouped, and polarization directions of the two bending piezoelectric drivers 5 in each group are opposite; the polarization directions of the two bending piezoelectric drivers 5 arranged along the X axis are opposite, the bending piezoelectric drivers 5 arranged along the positive direction of the X axis are bent upwards under a single positive voltage signal, and the bending piezoelectric drivers 5 arranged along the negative direction of the X axis are bent downwards for driving the eyeglass frame 2 to deflect around the Y axis; the polarization directions of the two bending piezoelectric drivers 5 arranged along the Y-axis are opposite, the bending piezoelectric drivers 5 arranged along the positive direction of the Y-axis are bent upward under a single positive voltage signal, and the bending piezoelectric drivers 5 arranged along the negative direction of the Y-axis are bent downward for driving the eyeglass frame 2 to deflect around the X-axis.
By applying two paths of control signals to the four bending piezoelectric actuators 5, the mirror holder 2 is driven to perform two-degree-of-freedom deflection translation in the orthogonal direction, and sensing and feedback control are performed through the strain gauge 4. The small deflection angle piezoelectric oscillating mirror based on bending deformation actuation can realize two-degree-of-freedom deflection motion output, has larger radius of gyration of the mirror frame when the same driver is displaced, and is suitable for light beam adjustment application requiring small deflection angle and high resolution.
According to the small deflection angle piezoelectric oscillating mirror based on bending deformation actuation, the problems that the existing oscillating mirror is more in driving control signals and more complex in use are solved, two-degree-of-freedom deflection motion is realized through two paths of control signals, each path of control signals respectively controls two bending piezoelectric drivers 5 which are symmetrical to each other to move upwards and downwards, deflection of a mirror frame 2 is realized through differential push-pull motion, the deflection radius of the mirror frame 2 is increased through a mode of circumferentially outwards arranging the bending piezoelectric drivers 5, and the small deflection angle piezoelectric oscillating mirror based on bending deformation actuation is suitable for the field of laser beam regulation of small deflection angle and high resolution; the small deflection angle piezoelectric oscillating mirror based on bending deformation actuation can realize the small-range adjustment of the deflection angle of two degrees of freedom of an optical lens through the bending piezoelectric driver 5 and the driving rod 6, and the complexity of a control system is reduced due to the fewer control signal paths, so that the small deflection angle piezoelectric oscillating mirror based on bending deformation actuation is suitable for optical application of communication, manufacturing and measurement by utilizing laser beams.
The above specific embodiments are used for further detailed description of the objects, technical solutions and advantageous effects of the present invention. It should be understood that the foregoing description is only a specific example of the present invention, and is not intended to limit the invention, but rather is a reasonable combination of features described in the foregoing embodiments, and any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (9)
1. The utility model provides a little off-angle piezoelectric swing mirror based on bending deformation actuation which characterized in that: the bending piezoelectric device comprises a frame (2), a base (3), four bending piezoelectric drivers (5) and four flexible hinges (7), wherein the four bending piezoelectric drivers (5) are uniformly arranged around the base (3); the frame (2) is arranged above the base (3), and the end part of the frame (2) is connected with the bending piezoelectric actuator (5) through the flexible hinge (7).
2. The bending deformation actuation-based small-deflection piezoelectric oscillating mirror of claim 1, wherein: the end of the bending piezoelectric actuator (5) is provided with a driving rod (6), and the driving rod (6) is connected with one end of a flexible hinge (7).
3. The bending deformation actuation-based small-deflection piezoelectric oscillating mirror of claim 2, wherein: the small deflection angle piezoelectric swing mirror based on bending deformation actuation further comprises a plurality of driver fixing bolts (8), through holes are formed in the bending piezoelectric drivers (5) and the driving rods (6), and one ends of the driver fixing bolts (8) penetrate through the through holes in the bending piezoelectric drivers (5) and the driving rods (6) and are connected with the base (3).
4. A bending deformation actuation-based small-deflection piezoelectric oscillating mirror according to claim 3, characterized in that: one end of the flexible hinge (7) is fixed on the driving rod (6) through a driver fixing bolt (8), and the other end of the flexible hinge is connected with the glasses frame (2) through a bolt connection, an adhesive joint or a welding mode.
5. The bending deformation actuation-based small-deflection piezoelectric oscillating mirror of claim 1, wherein: the hinge type of the flexible hinge (7) is blade-shaped, semicircular or elliptic.
6. The bending deformation actuation-based small-deflection piezoelectric oscillating mirror of claim 1, wherein: the small deflection angle piezoelectric swing mirror based on bending deformation actuation further comprises a plurality of strain gauges (4), wherein the strain gauges (4) are arranged on the bending piezoelectric driver (5) or the flexible hinge (7).
7. The bending deformation actuation-based small-deflection piezoelectric oscillating mirror of claim 1, wherein: the polarization directions of the upper half cylinder and the lower half cylinder of the bending piezoelectric driver (5) are opposite, and the bending piezoelectric driver (5) generates downward bending motion when positive voltage is applied; when a negative voltage is applied, the bending piezoelectric actuator (5) generates an upward bending motion.
8. The bending deformation actuation-based small-deflection piezoelectric oscillating mirror of claim 7, wherein: the bending piezoelectric actuator (5) is of a stacked structure, a patch structure or a piezoelectric tube structure.
9. The bending deformation actuation-based small-deflection piezoelectric swing mirror according to any one of claims 1 to 8, wherein: the polarization directions of the four bending piezoelectric drivers (5) which are symmetrical to each other are opposite among the four bending piezoelectric drivers (5) arranged on the base (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410792371.1A CN118502106A (en) | 2024-06-19 | 2024-06-19 | Small deflection angle piezoelectric swing mirror based on bending deformation actuation |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410792371.1A CN118502106A (en) | 2024-06-19 | 2024-06-19 | Small deflection angle piezoelectric swing mirror based on bending deformation actuation |
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| CN118502106A true CN118502106A (en) | 2024-08-16 |
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| CN202410792371.1A Pending CN118502106A (en) | 2024-06-19 | 2024-06-19 | Small deflection angle piezoelectric swing mirror based on bending deformation actuation |
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