CN118362201A - Light field energy detection method and system - Google Patents

Abstract

The application provides a light field energy detection method, which comprises the steps of obtaining a plurality of first light spot image gray scales, wherein the first light spot image gray scales comprise light spot image gray scales of a plurality of emergent light beams with different emission energies, which are emitted by a scanning optical system at the same scanning deflection angle; acquiring a plurality of second light spot image grayscales, wherein the second light spot image grayscales comprise light spot image grayscales of emergent light beams with the same emission energy emitted by a scanning optical system at a plurality of different scanning deflection angles; an energy distribution of a scanned light field of the scanning optical system is determined based on the plurality of first spot image grayscales and the plurality of second spot image grayscales. According to the application, the mapping relation between the energy and the image gray level and the mapping relation between the scanning deflection angle and the image gray level are respectively marked by using the light spot image gray level, and the mapping relation between the light field energy and the scanning deflection angle is obtained by inversion, so that the energy distribution of the scanning light field is obtained, no complex mechanical detection equipment is needed, the detection cost is reduced, and the light field energy detection precision is improved.

Description

Light field energy detection method and system

Technical Field

The present application relates to the field of laser technology, and in particular to a light field energy detection method and system.

Background technique

Laser technology has made great progress so far, and with it comes the widespread application of laser scanning technology in the fields of big data optical storage, laser micro-nano processing, high-resolution imaging, etc. As a typical modern optical system, the two-dimensional laser scanning system achieves large field of view applications by modulating the propagation direction of the light beam over time, so it has received widespread attention in the field of industrial applications. For laser scanning technology, the uniformity of the light field is crucial to the performance of the optical system. Therefore, the detection of the uniformity of the light field of the laser scanning optical system is of great significance.

Summary of the invention

The embodiments of the present application provide a light field energy detection method, which quantitatively determines the light field energy by means of image grayscale and light field energy calibration, thereby reducing the cost of light field uniformity detection on the one hand and improving the accuracy of light field energy detection on the other hand.

An embodiment of the present application provides a light field energy detection method, including acquiring a plurality of first light spot image grayscales, wherein the plurality of first light spot image grayscales include the light spot image grayscales of a plurality of outgoing light beams with different emission energies emitted by a scanning optical system at the same scanning deflection angle detected by a light detection component; acquiring a plurality of second light spot image grayscales, wherein the plurality of second light spot image grayscales include the light spot image grayscales of an outgoing light beam with the same emission energy emitted by the scanning optical system at a plurality of different scanning deflection angles detected by the light detection component; and determining the energy distribution of a scanning light field of the scanning optical system based on the plurality of first light spot image grayscales and the plurality of second light spot image grayscales.

The embodiments of the present application utilize the grayscale of the light spot image to calibrate the mapping relationship between energy and image grayscale, as well as the mapping relationship between the scanning deflection angle and image grayscale, and invert the mapping relationship between the light field energy and the scanning deflection angle, thereby obtaining the energy distribution of the scanning light field. This eliminates the need for complex mechanical detection equipment, reduces detection costs, and improves the accuracy of light field energy detection.

Optionally, the grayscale of the spot image includes but is not limited to the grayscale value of the spot image or the grayscale level of the spot image.

In one possible implementation, based on multiple first spot image grayscales and multiple second spot image grayscales, the energy distribution of the scanning light field of the scanning optical system is determined, including: based on the mapping relationship between energy and spot image grayscale, and the mapping relationship between the scanning deflection angle and the spot image grayscale, determining the mapping relationship between the scanning deflection angle and the energy; wherein the mapping relationship between energy and spot image grayscale is determined based on the mapping relationship between multiple outgoing light beams with different emission energies and multiple first spot image grayscales; the mapping relationship between the scanning deflection angle and the spot image grayscale is determined based on the mapping relationship between multiple different scanning deflection angles and multiple second spot image grayscales; based on the mapping relationship between the scanning deflection angle and energy, the energy distribution of the scanning light field of the scanning optical system is determined.

For example, the scanning optical system is controlled to emit a plurality of light beams with different emission energies at the same scanning deflection angle, and the light detection component is used to detect the grayscale of the light spot image corresponding to the plurality of light beams with different emission energies, thereby obtaining a mapping relationship between energy and the grayscale of the light spot image; the scanning optical system is controlled to emit a plurality of light beams with the same energy at a plurality of different scanning deflection angles, and the light detection component is used to detect the grayscale of the light spot image corresponding to the plurality of different scanning deflection angles, thereby obtaining a mapping relationship between the scanning deflection angle and the grayscale of the light spot image. Then, the mapping relationship between the scanning deflection angle and the energy is inverted based on the mapping relationship between the energy and the grayscale of the light spot image, and the mapping relationship between the scanning deflection angle and the grayscale of the light spot image, and the energy distribution of the scanning light field of the scanning optical system can be obtained based on the mapping relationship between the scanning deflection angle and the energy.

In this possible implementation, by first calibrating the mapping relationship between energy and the grayscale of the light spot image, and the mapping relationship between the scanning deflection angle and the grayscale of the light spot image, and then inverting to obtain the mapping relationship between energy and the scanning deflection angle, and then obtaining the energy distribution of the scanning light field, the light field energy uniformity of the scanning light field of the scanning optical system can be judged according to the energy distribution. For example, if the energy distribution of the scanning light field is uniform or relatively uniform, it is determined that the light field energy uniformity of the scanning light field of the scanning optical system is good and meets the standard; if the energy distribution of the scanning light field is uneven or poorly uniform, it is determined that the light field energy uniformity of the scanning light field of the scanning optical system is poor and does not meet the standard. It can be seen that the light field energy detection method provided in the embodiment of the present application does not require complex detection equipment. It only detects the grayscale of the light spot image of multiple light beams emitted by the scanning optical system with different energies at the same scanning deflection angle and the same energy at different scanning deflection angles through an optical detection component, and then determines the energy distribution of the scanning light field according to the grayscale of the multiple light spot images, which reduces the cost of light field energy detection and improves the accuracy of light field energy detection.

In another possible implementation, the light field energy detection method provided in the embodiment of the present application further includes: using the energy distribution of the scanning light field detected by the above steps to perform energy compensation on the scanning light field to obtain a scanning light field with uniform energy distribution. For example, based on the energy distribution of the scanning light field, determining the energy compensation of the scanning light field; and controlling the scanning optical system to perform energy compensation based on the energy compensation.

In another possible implementation, determining the energy compensation of the scanning light field based on the energy distribution of the scanning light field includes: determining the energy compensation value corresponding to each scanning deflection angle based on the difference between the energy value corresponding to each scanning deflection angle in the scanning light field and the maximum energy value corresponding to the scanning light field; controlling the scanning optical system to perform energy compensation based on the energy compensation includes: controlling the scanning optical system to perform energy compensation based on the energy compensation value corresponding to each scanning deflection angle.

For example, after obtaining the energy compensation value corresponding to each scanning deflection angle, that is, the difference between the energy value corresponding to each scanning deflection angle and the maximum energy value corresponding to the scanning light field, the light source in the scanning optical system is controlled to perform energy compensation according to the energy compensation value corresponding to each scanning deflection angle. For example, if the energy compensation value of a certain scanning deflection angle is 0.2mw, the light source in the scanning optical system is controlled to increase the power of the light beam by 0.2mw, and energy compensation is performed on each scanning deflection angle in turn, so as to finally achieve uniform energy distribution of the entire scanning light field.

In the second aspect, an embodiment of the present application also provides a light field energy detection system, comprising at least a light detection component and a detection compensation device, wherein the light detection component is used to detect the spot image grayscale of an outgoing light beam of a scanning optical system; the detection compensation device is used to receive a plurality of first spot image grayscales and a plurality of second spot image grayscales detected by the detection component, wherein the plurality of first spot image grayscales are the spot image grayscales corresponding to the outgoing light beams with a plurality of different emission energies emitted by the scanning optical system at the same scanning deflection angle; the plurality of second spot image grayscales are the spot image grayscales corresponding to the outgoing light beams with the same emission energy emitted by the scanning optical system at a plurality of different scanning deflection angles; based on the plurality of first spot image grayscales and the plurality of second spot image grayscales, the energy distribution of the scanning light field of the scanning optical system is determined.

Exemplarily, a light detection component is disposed on a transmission path of an outgoing light beam of a scanning optical system to be tested, and the grayscale of a spot image of an outgoing light beam of the scanning optical system is detected. The light detection component is communicatively connected with a detection and compensation device, and the light detection component sends the detected grayscale data of the spot image to the detection and compensation device in real time or periodically. The detection and compensation device uses the received grayscale of the spot image to obtain the energy distribution of the scanning light field through a preset algorithm.

In one possible implementation, the detection and compensation device is specifically used to: determine the mapping relationship between the scanning deflection angle and the energy based on the mapping relationship between energy and the grayscale of the spot image, and the mapping relationship between the scanning deflection angle and the grayscale of the spot image; wherein the mapping relationship between energy and the grayscale of the spot image is determined based on the mapping relationship between a plurality of emission light beams of different energies and a plurality of first spot image grayscales; the mapping relationship between the scanning deflection angle and the grayscale of the spot image is determined based on the mapping relationship between a plurality of different scanning deflection angles and a plurality of second spot image grayscales; and determine the energy distribution of the scanning light field of the scanning optical system based on the mapping relationship between the scanning deflection angle and energy.

For example, a scanning optical system includes a light source (such as a laser) and a scanning component. The detection and compensation device controls the light source to emit light beams of different energies at different powers. The scanning deflection angle of the scanning component is fixed to emit light beams of different energies at the same scanning deflection angle. The light beams are projected to the light detection component. The light detection component detects the grayscale of the spot image corresponding to the light beams of different energies and sends it to the detection and compensation device, so that the detection and compensation device obtains the mapping relationship between energy and the grayscale of the spot image; then the detection and compensation device controls the light source to emit light beams of the same energy at the same power, and the scanning component emits light beams of the same energy at different scanning deflection angles. The light beams are projected to the light detection component. The light detection component detects the grayscale of the spot image corresponding to different scanning deflection angles and sends it to the detection and compensation device, so that the detection and compensation device obtains the mapping relationship between the scanning deflection angle and the grayscale of the spot image; then the detection and compensation device inverts the mapping relationship between the scanning deflection angle and the energy based on the mapping relationship between energy and the grayscale of the spot image and the mapping relationship between the scanning deflection angle and the grayscale of the spot image, thereby obtaining the energy distribution of the scanning light field.

In another possible implementation, the detection compensation device is further used to determine energy compensation of the scanning light field based on the energy distribution of the scanning light field; and to control the scanning optical system to perform energy compensation based on the energy compensation.

That is, according to the energy distribution of the scanning light field obtained by detection, the energy compensation of the scanning light field is determined, and the scanning light field is energy compensated according to the energy compensation to obtain a scanning light field with uniform energy distribution.

In another possible implementation, the detection and compensation device is specifically used to determine the energy compensation value corresponding to each scanning deflection angle based on the difference between the energy value corresponding to each scanning deflection angle in the scanning light field and the maximum energy value corresponding to the scanning light field; based on the energy compensation value corresponding to each scanning deflection angle, control the scanning optical system to perform energy compensation.

For example, after obtaining the energy compensation value corresponding to each scanning deflection angle, that is, the difference between the energy value corresponding to each scanning deflection angle and the maximum energy value corresponding to the scanning light field, the detection and compensation device controls the light source in the scanning optical system to perform energy compensation on it according to the energy compensation value corresponding to each scanning deflection angle. For example, if the energy compensation value of a certain scanning deflection angle is 0.2mw, the detection and compensation device controls the light source in the scanning optical system to increase the power of the emitted light beam by 0.2mw, and performs energy compensation on each scanning deflection angle in turn, thereby finally achieving uniform energy distribution of the entire scanning light field.

In another possible implementation, the light field energy detection system provided in the embodiment of the present application also includes a Kohler illumination imaging component, which is used to obtain a spot image of the outgoing light beam; the detection compensation device is also used to adjust the position of the light detection component based on the imaging uniformity of the spot image so that the outgoing light beam is perpendicular to the receiving surface of the incident light detection component.

Optionally, the light detection component may be a planar array energy detector, a linear array energy detector, or a dot array energy detector. The present application does not specifically limit the specific form of the light detection component, and a suitable light detection component may be selected according to actual needs.

In another example, in order to protect the light detection component from being damaged by the high-energy light beam, an attenuation plate is provided between the scanning optical system and the light detection component to attenuate the energy of the outgoing light beam.

In a third aspect, an embodiment of the present application provides a computing device, including a memory and a processor, wherein the memory stores instructions, and when the instructions are executed by the processor, the method described in the first aspect is implemented.

In a fourth aspect, an embodiment of the present application provides a computer-readable storage medium having a computer program stored thereon, and when the computer program is executed by a processor, the method described in the first aspect is implemented.

In a fifth aspect, an embodiment of the present application further provides a computer program or a computer program product, wherein the computer program or the computer program product comprises instructions, and when the instructions are executed, the computer is caused to execute the method described in the first aspect.

In a sixth aspect, an embodiment of the present application further provides a chip, comprising at least one processor and a communication interface, wherein the processor is used to execute the method described in the first aspect.

BRIEF DESCRIPTION OF THE DRAWINGS

The following is a brief introduction to the drawings required for describing the embodiments or prior art.

FIG1 shows an architecture diagram of a translational optical storage system;

FIG2 shows an architecture diagram of a laser processing system;

FIG3 is a schematic diagram of a flow chart of a light field energy detection method provided in an embodiment of the present application;

FIG4 is a schematic diagram of a flow chart of another light field energy detection method provided in an embodiment of the present application;

FIG5 is a schematic diagram showing a method of applying the light field energy detection system provided in an embodiment of the present application to perform light field energy detection on a scanning optical system;

FIG6 is a schematic diagram of the structure of a computing device provided in an embodiment of the present application.

Detailed ways

The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application.

In the description of the present application, the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

In the description of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, a conflicting connection or an integrated connection. For ordinary technicians in this field, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

There are many ways to detect the uniformity of the light field. For example, the first solution is the probe step scanning detection method, which uses a combination of row continuous scanning and column step scanning. When the translation stage carries a spot sensor (SS) that moves continuously from the preset origin (row head) along the positive direction of the X-axis, the probe goes through multiple states of starting, acceleration, uniform speed, and deceleration, and finally stops completely at a preset fixed position (row end). During this period, the computer controls the integration circuit to continuously collect the energy of the pulse and collect the three-dimensional coordinates of the point at the same time without stopping. When the probe reaches the end of the line, it moves a step amount along the Y-axis in the positive direction, keeping the Y-axis coordinate value unchanged, and then moves in the opposite direction along the X-axis to repeat the above process and stop at a preset fixed position (row head). Repeat the above process to achieve continuous scanning of the "bow" shape.

During the measurement process, this solution needs to control the motion stage to do stepping motion, which requires the motion stage to have high motion accuracy. At the same time, it is necessary to obtain the coordinate position of the motion stage, so a high positioning accuracy is required. There are problems such as high accuracy requirements for the motion stage and high costs. Secondly, when the motion stage performs line scanning motion, it is necessary to continuously obtain the coordinate position, and it is necessary to synchronously collect the light field data detected by the sensor, so a high acquisition speed and data transmission speed are required, and there is a problem of difficulty in signal acquisition.

The second method is the light field film exposure method, which is similar to the photography technology. It uses a photosensitive film of a specific wavelength band to expose the light to be measured through the photosensitive film. The energy is measured within the exposure linear range of the photosensitive film.

The second solution has the following problems: the linear range of the photosensitive film is not obvious, so only qualitative judgment can be made and accurate measurement cannot be performed; and the photosensitive film needs to be further processed after exposure, which will introduce other uncertain factors and cause errors.

Because the scanning optical system is affected by the field of view and MTF (optical transfer function) of the optical device, the energy at both ends of the scanning line will be attenuated to a certain extent, so it is necessary to measure the energy curve of the entire scanning range for compensation.

In order to solve the problems existing in the above-mentioned scheme, the embodiments of the present application provide a light field energy detection method and device, which calibrates the mapping relationship between energy and image grayscale, as well as the mapping relationship between scanning deflection angle and image grayscale by the grayscale of the light spot image, and inverts the mapping relationship between light field energy and scanning deflection angle, thereby obtaining the energy distribution of the scanned light field. It does not require complex mechanical detection equipment, reduces the detection cost and improves the light field energy detection accuracy.

The specific implementation of the light field energy detection method and device provided in the embodiments of the present application is described in detail below with reference to the accompanying drawings.

Laser scanning systems have a variety of application scenarios, such as big data optical storage, laser micro-nano processing, high-resolution imaging scenarios, etc. In actual application scenarios, there are high requirements for the uniformity of the scanning light field of the laser scanning system. Therefore, it is necessary to detect the uniformity of the energy distribution of the scanning light field of the laser scanning system, and then perform energy compensation based on the energy detection results of the scanning light field to achieve uniform energy distribution of the scanning light field of the laser scanning system.

A typical laser scanning system can be applied to a translational optical storage system and a laser processing system. Accordingly, the light field energy detection method and device provided in the embodiments of the present application can be applied to a translational optical storage system and a laser processing system to detect the energy uniformity of the scanning light field of the laser scanning system, and then perform energy compensation based on the detection results to achieve the uniformity of the scanning light field of the laser scanning system, thereby ensuring the correct operation of the translational optical storage system and the high-precision and high-quality processing of materials by the laser processing system.

FIG1 shows an architecture diagram of a translational optical storage system. As shown in FIG1 , the translational optical storage system includes an external interface, a read-write optical drive system, and a storage medium, wherein the storage medium is a carrier for information recording, and stores data by utilizing the optical properties of the material to change and present a long-term stable state. The read-write optical drive system includes a read-write optical path, an electromechanical system, and a control chip module, etc. The optical field energy detection method and device provided in the embodiment of the present application are used to detect the uniformity of the optical field in the read-write optical drive system to ensure the correct operation of the optical drive.

FIG2 shows an architecture diagram of a laser processing system. As shown in FIG2 , the laser processing system includes a three-dimensional laser processing device and a processing material, wherein the material is a processing object, which may be a metal, a semiconductor, a polymer, etc., depending on the specific application. The three-dimensional laser processing device includes an optical path module, a mechanical module, and a control module. The light field energy detection method and device provided in the embodiment of the present application are used to detect the light field uniformity in the three-dimensional laser processing device to ensure high-precision and high-quality processing of the material.

Of course, Figures 1 and 2 only show two typical application scenarios of the light field energy detection method and device provided in the embodiments of the present application, and do not limit the application scope of the embodiments of the present application. The light field energy detection method and device provided in the embodiments of the present application can be applied to any scenario where light field uniformity detection is required.

Fig. 3 is a schematic diagram of a flow chart of a light field energy detection method provided in an embodiment of the present application. As shown in Fig. 3, the light field energy detection method provided in an embodiment of the present application at least includes steps S301 to S303.

In step S301, a plurality of first light spot image grayscales are acquired, wherein the plurality of first light spot image grayscales include light spot image grayscales of a plurality of outgoing light beams with different emission energies emitted by a scanning optical system at the same scanning deflection angle detected by a light detection component.

The light detection component is arranged on the transmission path of the outgoing light beam of the optical scanning system to detect the grayscale of the spot image of the outgoing light beam.

The scanning optical system is controlled to emit a plurality of light beams with different energies at the same scanning deflection angle, and the light detection component is used to detect the light spot image grayscales corresponding to the plurality of light beams with different energies, that is, a plurality of first light spot image grayscales.

Exemplarily, the scanning optical system includes a light source and a scanning component. The light source is controlled to emit light beams of different energies. The scanning component is controlled to emit light beams of different energies at the same scanning deflection angle. The light detection component detects the grayscale of the spot images corresponding to the multiple light beams of different energies.

The control can be implemented by manual control, such as manually inputting the working parameters of the scanning optical system, wherein the working parameters instruct the light source of the scanning optical system to emit light beams of different energies at different luminous powers, and the scanning component to operate at a fixed scanning deflection angle, and record the grayscale of the spot image corresponding to the multiple light beams of different energies detected by the light detection component.

In another example, the control process can also be automatically controlled by a computing device. For example, the computing device is respectively connected to the scanning optical system and the light detection component for communication. A program that can implement the light field energy detection method provided in the embodiment of the present application is run on the computing device. The computing device sends a control instruction to the scanning optical system to control the light source of the scanning optical system to emit light beams of different energies with different light emitting powers, and the scanning component to operate at a fixed scanning deflection angle. The computing device receives the grayscale of the light spot image corresponding to the multiple light beams of different energies detected by the light detection component.

Optionally, the scanning optical system includes a controller, a light source and a scanning component, the controller is respectively connected to the light source and the scanning component in communication, and the computing device is respectively connected to the controller and the light detection component in communication. The controller is used to output a digital signal to modulate the switch of the light source, that is, the energy output, and output a voltage signal to control the scanning deflection angle of the scanning component; the controller communicates with the computing device through a serial port protocol, and the computing device sends a control instruction to the controller, which then controls the controller to send a control signal to control the light source and the scanning component to work according to the control instruction, and the light detection component periodically or in real time sends the detected light spot image grayscale to the computing device.

Exemplarily, the computing device sends a control instruction to the controller, and the controller sends a control signal to the light source and the scanning component. The light source emits light beams of different energies at different luminous powers, and the scanning component operates at a fixed scanning deflection angle. The computing device receives the light spot image grayscales corresponding to the multiple light beams of different energies detected by the light detection component, and obtains multiple first light spot image grayscales.

Optionally, the grayscale of the spot image mentioned in the embodiment of the present application includes but is not limited to the grayscale value of the spot image or the grayscale level of the spot image, and a suitable measurement method can be selected to measure the grayscale of the spot image as needed.

In step S302, a plurality of second light spot image grayscales are acquired, wherein the plurality of second light spot image grayscales include light spot image grayscales detected by the light detection component, in which the scanning optical system emits light beams with the same emission energy at a plurality of different scanning deflection angles.

The scanning optical system is controlled to emit light beams of the same energy at a plurality of different scanning deflection angles, and the light detection component is used to detect the light spot image grayscales corresponding to the plurality of different scanning deflection angles, that is, a plurality of second light spot image grayscales.

This control can be implemented by manual control or automatic control by a computing device. The implementation process is similar to step S301 and will not be described here for brevity.

In step S303, based on the plurality of first light spot image grayscales and the plurality of second light spot image grayscales, the energy distribution of the scanning light field of the scanning optical system is determined.

Through step S301 and step S302, the grayscales of the spot images corresponding to the light beams with different energies and the grayscales of the spot images corresponding to the different scanning deflection angles are obtained. The mapping relationship between energy and the grayscale of the spot images can be obtained according to the grayscales of the spot images corresponding to the light beams with different energies, and the mapping relationship between the scanning deflection angle and the grayscale of the spot images can be obtained according to the grayscales of the spot images corresponding to the different scanning deflection angles.

Based on the mapping relationship between energy and spot image grayscale, and the mapping relationship between scanning deflection angle and spot image grayscale, the mapping relationship between scanning deflection angle and energy can be inverted to obtain. According to the mapping relationship between scanning deflection angle and energy, the energy distribution corresponding to the scanning light field of the scanning optical system can be obtained.

For example, according to the mapping relationship between the scanning deflection angle and the energy, an energy distribution diagram of the scanning light field is drawn, and the energy distribution diagram indicates the energy distribution of the scanning light field.

In another example, the light field energy detection method provided by the present application further includes step S304 and step S305 after executing step 303, that is, after executing step S303, step S304 and step S305 are continued to be executed.

As shown in FIG. 4 , in step S304 , energy compensation of the scanning light field is determined based on the energy distribution of the scanning light field.

After the energy distribution of the scanning light field is obtained in step S303, the maximum energy value of the scanning light field is determined, and then the energy difference between the energy value corresponding to each scanning deflection angle in the scanning light field and the maximum energy value is calculated. The energy difference is the energy compensation value corresponding to each scanning deflection angle in the scanning light field. Based on the energy compensation value corresponding to each scanning deflection angle in the scanning light field, a light field energy uniformity compensation curve of the scanning light field can be drawn, and the compensation curve indicates the energy compensation information of the scanning light field.

In step S305, the scanning optical system performs energy compensation based on the energy compensation control.

After determining the energy compensation corresponding to the scanning light field, that is, after obtaining the energy compensation value corresponding to each scanning deflection angle, that is, the difference between the energy value corresponding to each scanning deflection angle and the maximum energy value corresponding to the scanning light field, the light source in the scanning optical system is controlled to perform energy compensation on the scanning deflection angle according to the energy compensation value corresponding to each scanning deflection angle. For example, if the energy compensation value of a certain scanning deflection angle is 0.2mw, the light source in the scanning optical system is controlled to increase the power of the light beam by 0.2mw, and energy compensation is performed on each scanning deflection angle in turn, so as to finally achieve uniform energy distribution of the entire scanning light field.

In some other embodiments, the light field energy detection method provided in the embodiments of the present application also includes a preparation step before executing step S301 and subsequent steps, namely, a step of debugging the light detection component, placing the light detection component in a suitable position so that the outgoing light beam of the scanning optical system is vertically incident on the receiving surface of the light detection component, thereby ensuring the accuracy of the grayscale of the light spot image detected by the light detection component.

Exemplarily, a Kohler illumination imaging component is provided, and the Kohler illumination imaging component is communicatively connected to a computing device. The Kohler illumination imaging component obtains a spot image of an outgoing light beam of a scanning optical system irradiated onto a light detection component, and then sends the obtained spot image to the computing device. The computing device detects the imaging uniformity of the spot image to adjust the position of the light detection component until the imaging of the spot image is uniform. At this time, the posture debugging of the light detection component is completed, and the outgoing light beam of the scanning optical system vertically enters the receiving surface of the light detection component.

An embodiment of the present application also provides a light field energy detection system. The light field energy detection system adopts the light field energy detection method mentioned above to detect the energy uniformity of the scanning light field of the scanning optical system, and performs uniformity energy compensation based on the detection results, thereby obtaining a scanning light field with uniformity that meets the standard.

The light field energy detection system provided by the embodiment of the present application includes a light detection component and a detection compensation device, wherein the light detection component is used to detect the spot image grayscale of the outgoing light beam of the scanning optical system; the detection compensation device is used to receive a plurality of first light spot image grayscales detected by the detection component, the plurality of first light spot image grayscales are the spot image grayscales corresponding to a plurality of emission light beams of different energies emitted by the scanning optical system at the same scanning deflection angle; receive a plurality of second light spot image grayscales detected by the detection component, the plurality of second light spot image grayscales are the spot image grayscales corresponding to the emission light beams of the same energy emitted by the scanning optical system at a plurality of different scanning deflection angles; based on the plurality of first light spot image grayscales and the plurality of second light spot image grayscales, determine the energy distribution of the scanning light field of the scanning optical system.

Exemplarily, a light detection component is disposed on a transmission path of an outgoing light beam of a scanning optical system to be tested, the light detection component detects the grayscale of a spot image of an outgoing light beam of the scanning optical system, the light detection component is communicatively connected with a detection and compensation device, the light detection component sends the detected grayscale data of the spot image to the detection and compensation device in real time or periodically, and the detection and compensation device uses the received grayscale of the spot image to obtain the energy distribution of the scanning light field through a preset algorithm.

The detection and compensation device determines the energy distribution of the scanning light field of the scanning optical system based on multiple first light spot image grayscales and multiple second light spot image grayscales, and determines the energy compensation of the scanning light field based on the energy distribution of the scanning light field; for the specific implementation of energy compensation based on energy compensation control of the scanning optical system, please refer to the specific description of the light field energy detection method above, which will not be repeated here for the sake of brevity.

The scanning optical system includes a light source and a scanning component. The detection and compensation device is respectively connected to the light source and the scanning component for communication. The detection and compensation device sends control instructions to the light source and the scanning component to control the light source to emit light beams of different energies at different powers. The scanning deflection angle of the scanning component is fixed to emit light beams of different energies at the same scanning deflection angle. The light beams are projected to the light detection component. The light detection component detects the grayscale of the spot image corresponding to the light beams of different energies and sends it to the detection and compensation device. In this way, the detection and compensation device obtains the mapping relationship between energy and the grayscale of the spot image. Then, the detection and compensation device controls the light source to emit light beams of the same energy at the same power. The scanning component emits light beams of the same energy at different scanning deflection angles. The light beams are projected to the light detection component. The light detection component detects the grayscale of the spot image corresponding to different scanning deflection angles and sends it to the detection and compensation device. In this way, the detection and compensation device obtains the mapping relationship between the scanning deflection angle and the grayscale of the spot image. Then, based on the mapping relationship between energy and the grayscale of the spot image and the mapping relationship between the scanning deflection angle and the grayscale of the spot image, the detection and compensation device inverts the mapping relationship between the scanning deflection angle and the energy, thereby obtaining the energy distribution of the scanning light field.

In another example, after determining the uniform energy compensation of the scanning light field, the detection and compensation device controls the light source in the scanning optical system to perform energy compensation according to the energy compensation value corresponding to each scanning deflection angle. For example, if the energy compensation value of a certain scanning deflection angle is 0.2mw, the detection and compensation device controls the light source in the scanning optical system to increase the power of the emitted light beam by 0.2mw, and performs energy compensation for each scanning deflection angle in turn, thereby finally achieving uniform energy distribution of the entire scanning light field.

In one example, the light field energy detection system provided in an embodiment of the present application also includes a Kohler illumination imaging component, which is communicatively connected to a detection compensation device. The Kohler illumination imaging component obtains a spot image of an outgoing light beam of a scanning optical system irradiated onto a light detection component, and then sends the obtained spot image to the detection compensation device. The detection compensation device detects the imaging uniformity of the spot image to adjust the position of the light detection component until the imaging of the spot image is uniform. At this time, the posture debugging of the light detection component is completed, and the outgoing light beam of the scanning optical system is vertically incident on the receiving surface of the light detection component.

Optionally, the light detection component may be a planar array energy detector, a linear array energy detector, or a dot array energy detector. The embodiment of the present application does not specifically limit the specific form of the light detection component, and a suitable light detection component may be selected according to actual needs.

In another example, in order to protect the light detection component from being damaged by the high-energy light beam, an attenuation plate is provided between the scanning optical system and the light detection component to attenuate the energy of the outgoing light beam.

It can be understood that the detection and compensation device mentioned in the embodiment of the present application can be any computing device deployed with a program that can implement the light field energy detection method provided in the embodiment of the present application. The computing device can be, for example, a smart phone, a laptop computer, a desktop computer, a smart wearable device, and other devices with computing capabilities.

It should be explained that the size of the serial numbers of the above steps does not mean the order of execution. The execution order of each step should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiment of the present application. For example, step 302 can be executed before step 301, that is, first obtain multiple first light spot image grayscales, and then obtain multiple second light spot image grayscales.

The following takes a scenario in which a specific scanning optical system uses the light field energy detection system provided in an embodiment of the present application to perform light field detection as an example to introduce the specific implementation of the light field energy detection method and system provided in an embodiment of the present application in practical applications.

FIG5 is a schematic diagram showing the application of the light field energy detection system provided in an embodiment of the present application to perform light field energy detection on a scanning optical system.

As shown in FIG5 , the scanning optical system includes a blue laser 1, a beam expander 2, a galvanometer module 3, a scanning lens 4, a tube lens 5, a dichroic mirror 6, and a focusing objective lens 7; wherein the blue laser 1 is the light source mentioned above, used to provide light beams of the same or different energies, and the galvanometer module 3, the scanning lens 4, and the tube lens 5 are the scanning components mentioned above, used to realize the light beam scanning function. The light field energy detection system includes an attenuation plate 8, a CCD 9 (i.e., a surface array detector composed of a charge coupled device (CCD), which is also an implementation of the light detection component mentioned above), a Kohler illumination imaging module 10, a reflector 11, and a detection compensation device 12.

A blue laser 1 emits a 405nm laser, which is expanded by a beam expander 2 and reaches a galvanometer module 3 and a scanning lens 4. After being folded by the galvanometer module 3 and the scanning lens 4, lasers of different angles are emitted. The emitted lasers are imaged on an entrance pupil plane of a focusing lens 7 after passing through a tube lens 5 and a dichroic mirror 6, and then are focused by the focusing lens 7. The focused laser light is power attenuated by an attenuation plate 8 and converged to a detection surface of a CCD 9; a Kohler illumination imaging module 10 (for example, a typical Kohler illumination structure of a microscope) emits a beam of white light, which passes through a reflector 11 and a dichroic mirror 6 in sequence and reaches an entrance pupil plane of the focusing lens, and after being focused, irradiates the detection surface of the CCD 9, and after being reflected by the detection surface of the CCD 9, returns to the Kohler illumination imaging module 10 along the original incident light path. The Kohler illumination imaging module 10 is connected in communication with a detection compensation device 12 (for example, the Kohler illumination imaging module 10 is connected in communication with the detection compensation device 12 via a USB3.0 interface), and transmits the collected image to the detection compensation device 12.

In one example, the galvanometer module 3 is composed of two-axis galvanometers, an X-axis galvanometer and a Y-axis galvanometer. The optical scanning system also includes a controller, which is electrically connected to the galvanometer module 3 and outputs a control signal to control the oscillation of the galvanometer and the laser.

The controller is also connected to the blue laser, and the controller outputs a control signal to control the on and off of the blue laser, as well as the emission power of the blue laser.

The detection and compensation device 12 is connected to the controller for communication. The detection and compensation device 12 sends a control instruction to the controller. The controller executes the control instruction to control the blue laser and the galvanometer module, thereby achieving control of the laser energy and scanning angle of the scanning optical system.

The specific implementation of using the light field energy detection system provided in the embodiment of the present application to perform light field energy detection on the scanning optical system is as follows:

S1. Control the laser to turn on and output a suitable power, such as 10mw.

S2. Adjust the focusing mirror position in the Kohler illumination imaging module to 1 mm, and use the image analysis algorithm to observe that the CCD pixel edge is clear, that is, the light beam is considered to be incident vertically on the CCD surface; at this time, the laser can observe an imaging spot diameter of 20 pixels on the CCD.

S3, change the emission power of the laser, and then change the laser energy, from 10mw to 20mw, every 0.5mw, CCD collects an image, at this time the galvanometer deflection angle is fixed at 0°, calculate the image grayscale (add the pixel grayscale values of 20pixel*20pixel, the output of each pixel is a 16-bit depth value), generate the corresponding relationship between laser energy and grayscale P-G1, as shown in Table 1;

P/mw 10 10.5 11 11.5 12 12.5 13 G1 g0 g1 g2 g3 g4 g5 g6 P/mw 13.5 14 14.5 15 15.5 16 16.5 G1 g7 g8 g9 g10 g11 g12 g13 P/mw 17 17.5 18 18.5 19 19.5 20 G1 g14 g15 g16 g17 g18 g19 g20

Table 1

S4, change the control galvanometer voltage from -1V to -1V through the detection compensation device, corresponding to the galvanometer swing angle of -2° to -2°, control the laser to be incident at different angles, collect an image every 0.5°, at this time the laser energy is 20mw, calculate the grayscale of the acquired image (add the pixel grayscale values of 20pixel*20pixel, the output of each pixel is a 16-bit depth value), establish the corresponding relationship between the grayscale level G2 and the galvanometer scanning angles θx and θy, G2-θx,θy, as shown in Table 2;

Table 2

S5. By transforming the relationship P-G1 and G2-θx,θy, the intermediate quantity G in Table 2 is replaced with the relationship between grayscale and power in Table 1 (replacement rule, for example, if the value of g00 in Table 2 is equal to g0 in Table 1, then replace the grayscale g00 with the power 10mw corresponding to g0 in Table 1), and then the energy distribution of the light field at different angles can be obtained, and the corresponding relationship between energy and angle P-θx,θy can be obtained, that is, the energy distribution of the scanning light field can be obtained. The energy distribution of the scanning light field can be used to obtain the light field energy uniformity compensation information of the scanning system, as shown in Table 3

table 3

S6. Obtain a specific light intensity energy compensation value through the light field energy uniformity compensation information. At this time, the maximum light intensity energy within the scanning range of the galvanometer is Pmax, and the energy compensation value ΔPxy at any position coordinate X, Y is ΔPxy = Pmax-pxy. Feeding ΔPxy back to the laser light source compensation can achieve compensation for light field uniformity.

Through the light field energy detection method and system provided in the embodiments of the present application, a planar array light detector is used to obtain the light field information of the rear focal plane of the focusing objective lens, which can effectively eliminate the inherent distortion influence of the galvanometer; at the same time, the light field information obtained afterwards is processed by image processing, and the light field strength is evaluated in the form of image grayscale, thereby avoiding the errors caused by the different signal strengths in different areas of traditional power detection devices, improving the light field detection accuracy, and then ensuring the compensation accuracy, and finally achieving a scanning light field with uniform energy distribution.

It should be understood that what is shown in FIG5 is only an application example of an embodiment of the present application and does not constitute a limitation on the embodiment of the present application. For example, the scanning optical system may adopt other light sources, such as a laser array, etc., and the scanning component may adopt other scanning implementation methods, such as a scanning mirror; the light field energy detection system may include more or fewer components than those shown in FIG5, for example, it may not include an attenuation plate, etc.

Based on the same concept as the aforementioned method embodiment, a computing device is also provided in the embodiment of the present application. The computing device includes at least a processor and a memory, and a program is stored in the memory. When the processor executes the program, it can implement the units or modules of each step in the method shown in Figures 3 and 4.

FIG6 is a schematic diagram of the structure of a computing device provided in an embodiment of the present application.

As shown in FIG6 , the computing device 600 includes at least one processor 601, a memory 602, and a communication interface 603. The processor 601, the memory 602, and the communication interface 603 are connected in communication, and the communication connection can be realized by wired means (such as a bus) or by wireless means. The communication interface 603 is used to receive data sent by other devices (such as detection data of a light detection component, image data of a Kohler illumination imaging module, etc.); the memory 602 stores computer instructions, and the processor 601 executes the computer instructions to execute the method in the aforementioned method embodiment.

It should be understood that in the embodiment of the present application, the processor 601 may be a central processing unit CPU, and the processor 601 may also be other general-purpose processors, digital signal processors (DSP), application specific integrated circuits (ASIC), field programmable gate arrays (FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. The general-purpose processor may be a microprocessor or any conventional processor, etc.

The memory 602 may include a read-only memory and a random access memory, and provides instructions and data to the processor 601. The memory 602 may also include a nonvolatile random access memory.

The memory 602 may be a volatile memory or a nonvolatile memory, or may include both volatile and nonvolatile memories. Among them, the nonvolatile memory may be a read-only memory (ROM), a programmable ROM (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), or a flash memory. The volatile memory may be a random access memory (RAM), which is used as an external cache. By way of example and not limitation, many forms of RAM are available, such as static random access memory (SRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDR SDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchronous link DRAM (SLDRAM), and direct memory bus random access memory (DR RAM).

It should be understood that the computing device 600 according to the embodiment of the present application can execute the method shown in Figures 3 and 4 in the embodiment of the present application. The detailed description of the implementation of the method is shown above, and for the sake of brevity, it will not be repeated here.

An embodiment of the present application provides a computing device, including a memory and a processor, wherein the memory stores instructions, and when the instructions are executed by the processor, the method described in the first aspect is implemented.

An embodiment of the present application provides a computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the light field energy detection method provided in the embodiment of the present application is implemented.

The embodiments of the present application also provide a computer program or a computer program product. The computer program or the computer program product includes instructions. When the instructions are executed, the computer is caused to execute the light field energy detection method provided in the embodiments of the present application.

An embodiment of the present application also provides a chip, including at least one processor and a communication interface, wherein the processor is used to execute the light field energy detection method provided in the embodiment of the present application.

In the description of this specification, specific features, structures, materials or characteristics may be combined in an appropriate manner in any one or more embodiments or examples.

Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and do not limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims (12)

1. A method of light field energy detection, comprising:

Acquiring a plurality of first light spot image gray scales, wherein the first light spot image gray scales comprise light spot image gray scales of a plurality of emergent light beams with different emission energies, which are emitted by a scanning optical system and detected by a light detection assembly at the same scanning deflection angle;

Acquiring a plurality of second light spot image gray scales, wherein the second light spot image gray scales comprise light spot image gray scales of emergent light beams with the same emission energy and emitted by a scanning optical system detected by the light detection assembly at a plurality of different scanning deflection angles;

An energy distribution of a scanned light field of the scanning optical system is determined based on the plurality of first spot image grayscales and the plurality of second spot image grayscales.

2. The method of claim 1, wherein the determining an energy distribution of a scanned light field of the scanning optical system based on the plurality of first spot image gray scales and the plurality of second spot image gray scales comprises:

Determining the mapping relation between the scanning deflection angle and the emission energy based on the mapping relation between the emission energy and the light spot image gray scale and the mapping relation between the scanning deflection angle and the light spot image gray scale;

The mapping relation between the emission energy and the light spot image gray level is determined based on the mapping relation between the emergent light beams with different emission energies and the first light spot image gray level; the mapping relation between the scanning deflection angles and the light spot image gray scales is determined based on the mapping relation between the different scanning deflection angles and the second light spot image gray scales;

and determining the energy distribution of a scanning light field of the scanning optical system based on the mapping relation between the scanning deflection angle and the emission energy.

3. The method according to claim 1 or 2, further comprising:

determining an energy compensation of the scanned light field based on an energy distribution of the scanned light field;

and controlling the scanning optical system to perform energy compensation based on the energy compensation.

4. A method according to claim 3, wherein said determining an energy compensation of said scanned light field based on an energy distribution of said scanned light field comprises:

Determining an energy compensation value corresponding to each scanning deflection angle based on a difference value between an energy value corresponding to each scanning deflection angle in the scanning light field and a maximum energy value corresponding to the scanning light field;

the controlling the scanning optical system to perform energy compensation based on the energy compensation includes:

and controlling the scanning optical system to perform energy compensation based on the energy compensation value corresponding to each scanning deflection angle.

5. A light field energy detection system, comprising

The light detection component is used for detecting the light spot image gray level of the emergent light beam of the scanning optical system;

The detection compensation device is used for receiving the first light spot image gray scales and the second light spot image gray scales which are detected by the light detection assembly;

The light detection component is used for detecting the light spot image gray level of the emergent light beams with different emission energies, wherein the plurality of first light spot image gray levels comprise light spot image gray levels of the emergent light beams with different emission energies, which are emitted by a scanning optical system and detected by the light detection component at the same scanning deflection angle; the plurality of second light spot image gray scales comprise light spot image gray scales of emergent light beams which are detected by the light detection component and emit the same emission energy by the scanning optical system at a plurality of different scanning deflection angles;

An energy distribution of a scanned light field of the scanning optical system is determined based on the plurality of first spot image grayscales and the plurality of second spot image grayscales.

6. The system according to claim 5, wherein the detection compensation means is specifically configured to:

Determining the mapping relation between the scanning deflection angle and the emission energy based on the mapping relation between the emission energy and the light spot image gray scale and the mapping relation between the scanning deflection angle and the light spot image gray scale;

The mapping relation between the emission energy and the light spot image gray level is determined based on the mapping relation between the emergent light beams with different emission energies and the first light spot image gray level; the mapping relation between the scanning deflection angles and the light spot image gray scales is determined based on the mapping relation between the different scanning deflection angles and the second light spot image gray scales;

and determining the energy distribution of a scanning light field of the scanning optical system based on the mapping relation between the scanning deflection angle and the emission energy.

7. The system of claim 5 or 6, wherein the detection compensation means is further for:

determining an energy compensation of the scanned light field based on an energy distribution of the scanned light field;

and controlling the scanning optical system to perform energy compensation based on the energy compensation.

8. The system according to claim 7, wherein the detection compensation means is specifically configured to:

Determining an energy compensation value corresponding to each scanning deflection angle based on a difference value between an energy value corresponding to each scanning deflection angle in the scanning light field and a maximum energy value corresponding to the scanning light field;

and controlling the scanning optical system to perform energy compensation based on the energy compensation value corresponding to each scanning deflection angle.

9. The system of any one of claims 5-8, wherein the detection compensation means is further for:

the scanning optical system is controlled to emit light beams with different energies at the same scanning deflection angle, and the scanning optical system is controlled to emit light beams with the same energy at different scanning deflection angles.

10. The system according to any one of claims 5-9, further comprising:

the Kohler illumination imaging assembly is used for acquiring a spot image of the emergent light beam;

The detection compensation device is also used for adjusting the position of the light detection component based on the imaging uniformity of the light spot image so that the emergent light beam vertically enters the receiving surface of the light detection component.

11. A computing device comprising a memory and a processor, wherein the memory has instructions stored therein that when executed by the processor cause the method of any of claims 1-4 to be implemented.

12. A computer readable storage medium, on which a computer program is stored which, when being executed by a processor, causes the method according to any of claims 1-4 to be implemented.