CN118244506A

CN118244506A - Optical device and method of operating the same

Info

Publication number: CN118244506A
Application number: CN202211620533.0A
Authority: CN
Inventors: 陈鲁; 姚本溪; 莫云杰; 江博闻; 吕肃; 张嵩
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2022-12-15
Filing date: 2022-12-15
Publication date: 2024-06-25

Abstract

An optical device and method of operation thereof, the optical device comprising: a light source module for emitting a first incident light to the to-be-modulated optical element along a first path; an autocollimator comprising a second light source and a detector; the second light source is used for emitting second incident light to the to-be-modulated optical element along a second path; the detector is used for collecting first reflected light corresponding to the first incident light transmitted from a third path and/or collecting second reflected light corresponding to the second incident light transmitted from a fourth path; the first reflected light is used for detecting the eccentric amount of the optical element to be adjusted, and the second reflected light is used for detecting the inclination amount of the optical element to be adjusted. The technical scheme of the invention is beneficial to improving the precision of the adjustment of the optical element, so that the measurement error of the detection system caused by lower adjustment precision of the optical element can be reduced, and the detection precision can be correspondingly improved.

Description

Optical device and method of operating the same

Technical Field

The invention relates to the technical field of optical detection, in particular to optical equipment and a working method thereof.

Background

Along with the improvement of the process requirements on the precision requirements of the workpiece, the requirements on the detection precision of the detection equipment are provided, and the assembly and adjustment precision of the optical element in the detection equipment is critical to the detection precision of the detection equipment. In order to meet the requirements of the detection apparatus for the accuracy of the adjustment of the optical element, it is often necessary to mount the optical element on an adjusting device so as to be adjustable with the position of the optical element.

In the existing optical detection system, three modes are generally adopted to realize the adjustment of an optical element: firstly, the optical element is assembled and adjusted by means of precision machining of an optical machine, and the assembled and adjusted position of the optical element is not finely adjusted; secondly, judging whether the optical axis of the light passes through the center of the optical element or not by observing the position deviation condition of light spots before and after the installation of the optical element, but the problem of larger error exists; thirdly, an eccentric instrument is adopted to adjust the eccentricity of the optical element, but the eccentric instrument is generally complex in structure, high in price and high in application environment requirement, and is difficult to be suitable for the adjustment of a complex optical detection system.

Therefore, the precision of the adjustment of the optical element needs to be improved at present.

Disclosure of Invention

The invention solves the problem of how to improve the precision of the adjustment of the optical element.

In order to solve the above problems, the present invention provides an optical apparatus comprising:

a light source module for emitting a first incident light to the to-be-modulated optical element along a first path;

An autocollimator comprising a second light source and a detector; the second light source is used for emitting second incident light to the to-be-modulated optical element along a second path; the detector is used for collecting first reflected light corresponding to the first incident light transmitted from a third path and/or collecting second reflected light corresponding to the second incident light transmitted from a fourth path;

The first reflected light is used for detecting the eccentric amount of the optical element to be adjusted, and the second reflected light is used for detecting the inclination amount of the optical element to be adjusted.

Correspondingly, the embodiment of the invention also provides a working method of the optical device, wherein the optical device is any one of the optical devices, and the working method comprises the following steps:

acquiring the inclination amount of the optical element to be adjusted through the optical equipment and/or acquiring the eccentricity amount of the optical element to be adjusted through the optical equipment;

Acquiring, by the optical device, an amount of tilt of the optical element to be adjusted, including: transmitting a second incident light to the to-be-modulated optical element along a second path by the second light source; collecting second reflected light corresponding to the second incident light transmitted from the fourth path through a detector; acquiring the inclination amount of the to-be-adjusted optical element according to the second reflected light;

Acquiring the eccentric amount of the optical element to be adjusted through the optical device comprises the following steps: emitting first incident light to the to-be-modulated optical element along a first path through a light source module; and acquiring first reflected light corresponding to the first incident light transmitted from a third path through the detector, and acquiring the eccentric amount of the optical element to be modulated according to the first reflected light.

Compared with the prior art, the technical scheme of the invention has the following advantages:

An embodiment of the present invention provides an optical apparatus including: a light source module for emitting a first incident light to the to-be-modulated optical element along a first path; an autocollimator comprising a second light source and a detector; the second light source is used for emitting second incident light to the to-be-modulated optical element along a second path; the detector is used for collecting first reflected light corresponding to the first incident light transmitted from a third path and/or collecting second reflected light corresponding to the second incident light transmitted from a fourth path; the first reflected light is used for detecting the eccentric amount of the optical element to be adjusted, and the second reflected light is used for detecting the inclination amount of the optical element to be adjusted.

It can be seen that the light source module is used to emit the first incident light to the to-be-adjusted optical element along the first path, the second light source of the auto-collimator is used to emit the second incident light to the to-be-adjusted optical element along the second path, and the detector of the auto-collimator is used to collect the first reflected light corresponding to the first incident light transmitted from the third path and/or collect the second reflected light corresponding to the second incident light transmitted from the fourth path, so that the eccentric amount and/or the inclination amount of the to-be-adjusted optical element can be adjusted, which is beneficial to improving the adjustment precision of the optical element, and further reducing the measurement error caused by the lower adjustment precision of the optical element of the detection system, and accordingly improving the detection precision.

Drawings

FIG. 1 is a schematic diagram of an embodiment of an optical device according to the present disclosure;

FIG. 2 is a schematic structural diagram and an optical path diagram of an embodiment of an optical device according to the present disclosure;

FIG. 3 is a schematic view showing the structure and the optical path of an embodiment of an auto-collimator according to the present invention;

FIG. 4 is a schematic view of a part of an optical path of an embodiment of an optical device according to the present disclosure;

FIG. 5 is a schematic flow chart of an embodiment of obtaining an eccentricity of an optical element to be modulated by using an optical device according to the present invention;

Fig. 6 is a schematic flow chart of an embodiment of obtaining an inclination amount of an optical element to be adjusted by using an optical device according to the present invention.

Detailed Description

As known from the background art, an optical detection system is a commonly used detection system for an object to be detected. However, in the conventional optical inspection system for inspection, the accuracy of mounting and adjusting the optical element is required to be improved.

In order to solve the above problems, the present invention provides an optical apparatus comprising: a light source module for emitting a first incident light to the to-be-modulated optical element along a first path; an autocollimator comprising a second light source and a detector; the second light source is used for emitting second incident light to the to-be-modulated optical element along a second path; the detector is used for collecting first reflected light corresponding to the first incident light transmitted from a third path and/or collecting second reflected light corresponding to the second incident light transmitted from a fourth path; the first reflected light is used for detecting the eccentric amount of the optical element to be adjusted, and the second reflected light is used for detecting the inclination amount of the optical element to be adjusted.

In order that the above objects, features and advantages of embodiments of the invention may be readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.

Fig. 1 is a schematic structural diagram of an embodiment of an optical device according to the present invention. Referring to fig. 1, an optical device includes: a light source module 100 for emitting a first incident light to the to-be-modulated optical element along a first path; autocollimator 400, including second light source 410 and detector 440; the second light source 410 is configured to emit a second incident light to the optical element to be modulated along a second path; the detector 440 is configured to collect a first reflected light corresponding to the first incident light transmitted from the third path and/or collect a second reflected light corresponding to the second incident light transmitted from the fourth path. The first reflected light is used for detecting the eccentric amount of the optical element to be adjusted, and the second reflected light is used for detecting the inclination amount of the optical element to be adjusted.

In this embodiment, the inclination amount of the optical element to be adjusted refers to an inclination angle between the optical axis of the optical element to be adjusted and a system preset optical axis when the optical axis of the optical element to be adjusted is not parallel to the system preset optical axis; the eccentric amount of the optical element to be adjusted refers to the offset distance between the optical axis of the optical element to be adjusted and the preset optical axis of the system under the condition that the optical axis of the optical element to be adjusted is parallel to the preset optical axis of the system.

In this embodiment, the optical device is configured to first obtain an inclination amount of an optical element to be adjusted, so that the inclination of the optical element to be adjusted is adjusted by the inclination amount, so that an optical axis of the optical element to be adjusted is parallel to a preset optical axis of the system; and the optical device is further used for acquiring the eccentric amount of the optical element to be adjusted under the condition that the optical axis of the optical element to be adjusted is parallel to the preset optical axis of the system, so that the eccentric amount is used for eccentrically adjusting the optical element to be adjusted, and the optical axis of the optical element to be adjusted is aligned with the preset optical axis of the system.

In other embodiments, the optical device can also be used for acquiring the inclination amount of the optical element to be adjusted, so that the inclination of the optical element to be adjusted is adjusted by the inclination amount, and the optical axis of the optical element to be adjusted is parallel to the preset optical axis of the system; or the optical device can be only used for acquiring the eccentric amount of the optical element to be adjusted under the condition that the optical axis of the optical element to be adjusted is parallel to the preset optical axis of the system, so that the eccentric amount is used for eccentrically adjusting the optical element to be adjusted, and the optical axis of the optical element to be adjusted is aligned with the preset optical axis of the system.

The optical apparatus in the embodiment of the present invention will be described in further detail below.

Fig. 2 is a schematic structural diagram and an optical path diagram of an embodiment of an optical device according to the present invention. Referring to fig. 2, an optical apparatus includes a light source module 100, a light splitting module 150, a first reflecting module 300, and an auto-collimator 400.

The light source module 100 is configured to emit a first incident light to the to-be-modulated optical element 210 along a first path.

Specifically, the light source module 100 is configured to generate a first outgoing light, and the light splitting module 150 is located on an optical path of the first outgoing light and configured to split the first outgoing light to generate a first incident light that is projected to the optical element 210 to be modulated.

Accordingly, the first path includes a transmission path of the first outgoing light between the light source module 100 and the light splitting module 150, and a transmission path of the first incoming light between the light splitting module 150 and the optical element to be modulated 210.

In the present embodiment, the light source module 100 includes a first light source.

In this embodiment, the first light source is a laser light source. In other embodiments, the type of first light source can also be an LED light source, a xenon light source, or other light source introduced using an optical waveguide.

In this embodiment, the light splitting module 150 is located on the light path of the first outgoing light generated by the light source module 100, and the light splitting module 150 is configured to split the first outgoing light generated by the light source module 100 to generate the first incident light projected onto the optical element 210 to be modulated, and is further configured to pass the first reflected light passing through the optical element 210 to be modulated after the first incident light of the optical element 210 to be modulated is reflected to form the first reflected light.

The light splitting module 150 is located in the optical path of the first outgoing light generated by the light source module 100, and is used for splitting the first outgoing light into a plurality of lights transmitted along different optical path directions, wherein the first incoming light is projected to the optical element 210 to be modulated along the first path, and the light splitting module 150 is also located in the optical path of the first reflected light, and is used for splitting the first reflected light into a plurality of lights transmitted along different optical path directions, and the first reflected light passing through the optical element 210 to be modulated passes through.

In this embodiment, the light splitting module 150 includes a light splitting prism. The beam splitting prism can realize beam splitting of light, and has the characteristics of small stress, high extinction ratio, good imaging quality, small light deflection angle and the like.

In this embodiment, the light splitting prism splits the first outgoing light generated by the light source module 100 to form the first polarized light and the second polarized light with the perpendicular polarization directions. Wherein the first polarized light is transmitted along a first optical branch of the first outgoing light emitted by the light source module 100, and the second polarized light is transmitted along a second optical branch perpendicular to the first optical branch.

In this embodiment, the light splitting ratio of the light splitting prism is 1:1, so that the first polarized light and the second polarized light are relatively uniform, and the uniformity of the imaging quality of the first polarized light and the second polarized light is relatively high.

In this embodiment, the first incident light projected onto the to-be-modulated optical element 210 is the second polarized light transmitted along the second optical branch formed by splitting the first outgoing light generated by the light source module 100 by the light splitting module 150. Thus, the second polarized light is perpendicularly projected to the optical element 210 to be modulated.

In this embodiment, the optical axis of the first incident light projected to the to-be-modulated optical element 210 is aligned with the system preset optical axis, that is, the optical axis of the second polarized light propagating along the second optical branch is aligned with the system preset optical axis.

The optical axis of the first incident light projected to the optical element to be modulated 210 is aligned with the system preset optical axis, and when the optical axis of the optical element to be modulated 210 is parallel to the system preset optical axis, the offset distance between the first reflected light formed by reflecting the first incident light passing through the optical element to be modulated 210 and the first incident light projected to the optical element to be modulated 210 is obtained, so that the offset angle between the optical axis of the first incident light passing through the optical element to be modulated 210 and the system preset optical axis can be obtained.

The to-be-adjusted optical element 210 is located in the optical path of the first incident light, and is used for collecting the first incident light, making the first incident light pass through and projected to the first reflection module 300, and the to-be-adjusted optical element 210 is also located in the optical path of the first reflected light, and is used for collecting the first reflected light formed by the reflection of the first incident light, and making the first reflected light pass through.

In this embodiment, the optical axis of the optical element to be adjusted 210 is parallel to the system preset optical axis, and an offset distance is provided between the optical axis of the optical element to be adjusted 210 and the system preset optical axis in a direction perpendicular to the optical axis, and then the offset angle between the first incident light projected to the optical element to be adjusted 210 and the first reflected light formed after the first incident light passing through the optical element to be adjusted 210 is obtained, so that the eccentric amount of the optical element to be adjusted 210 is obtained, and the optical axis of the optical element to be adjusted 210 is aligned with the system preset optical axis according to the eccentric amount of the optical element to be adjusted 210.

In this embodiment, the to-be-adjusted optical element 210 has a mounting location (not shown) on which the to-be-adjusted optical element 210 is mounted.

Accordingly, the mounting position of the optical element to be adjusted 210 can be moved along the direction perpendicular to the optical axis, so that when the eccentric amount of the optical element to be adjusted 210 is obtained subsequently, the mounting position of the optical element to be adjusted 210 can be eccentrically adjusted along the direction perpendicular to the optical axis, and the alignment between the optical axis of the optical element to be adjusted 210 and the preset optical axis of the system can be realized.

The first reflection module 300 is located on an optical path of the first incident light passing through the optical element to be modulated 210, and is configured to reflect the first incident light passing through the optical element to be modulated 210 to form first reflected light projected to the auto-collimator 400, so as to project the first reflected light to the auto-collimator 400 along a third path.

Accordingly, the third path comprises a transmission path of the first reflected light between the to-be-tuned optical element 210 and the autocollimator 400.

In this embodiment, the first reflection module 300 has a reflection surface, through which reflection of the first incident light passing through the optical element 210 to be modulated can be achieved, forming first reflected light.

Specifically, the first reflection module 300 includes a first mirror. Accordingly, the surface of the first mirror is a reflecting surface.

In this embodiment, the reflective surface of the first reflecting mirror has a high reflective film, and the high reflective film is used to provide the reflective surface of the first reflecting module 300.

As an example, the material of the high reflection film includes aluminum, and the reflection performance of the reflection surface of the first reflection module 300 can be improved by using the preferable reflection characteristics of aluminum.

In this embodiment, the reflective surface of the first reflective module 300 is a plane. The reflective surface of the first reflective module 300 is a plane, which is beneficial to simplifying the complexity of the optical path.

The auto-collimator 400 is configured to collect the first reflected light transmitted from the third path, where the first reflected light is used to obtain the eccentricity of the optical element 210 to be modulated.

In this embodiment, the optical axis of the auto-collimator 400 is aligned with the preset optical axis of the system, and the optical axis of the auto-collimator 400 is perpendicular to the reflective surface of the first reflective module 300, and meanwhile, the first incident light projected onto the optical element to be modulated 210 is aligned with the preset optical axis of the system, so that the offset between the first reflected light projected onto the auto-collimator 400 and the first incident light projected onto the optical element to be modulated 210 can be obtained by the auto-collimator 400 through the first offset information between the first reflected light projected onto the auto-collimator and the first incident light projected onto the optical element to be modulated 210, and further, the offset of the optical element to be modulated 210 can be obtained through the offset angle between the first reflected light projected onto the auto-collimator 400 and the first incident light projected onto the optical element to be modulated 210.

With continued reference to fig. 3, in particular, in the auto-collimator 400, the detector 440 is configured to obtain first offset information between the first reflected light and the first incident light, and obtain an offset angle between the first reflected light and the first incident light according to the first offset information between the first reflected light and the first incident light, where the offset angle between the first reflected light and the first incident light is used to obtain an offset between the optical axis of the optical element 210 to be modulated and the preset optical axis of the system.

In this embodiment, the first offset information between the first reflected light and the first incident light is an offset distance between a center of a light spot formed by the first reflected light on the imaging surface of the detector 440 and a preset reference position on the imaging surface of the detector 440.

Specifically, the optical axis of the first incident light is aligned with the system preset optical axis, and the optical axis of the auto-collimator 400 is aligned with the system preset optical axis, the optical axis of the first incident light is aligned with the optical axis of the auto-collimator 400. Meanwhile, the optical axis of the autocollimator 400 passes through a preset reference position on the imaging surface of the detector 440, and thus, the optical axis of the first incident light also passes through a preset reference position on the imaging surface of the detector 440. Accordingly, the first offset information between the first reflected light and the first incident light is an offset distance between the center of the light spot formed by the first reflected light on the imaging surface of the detector 440 and a preset reference position on the imaging surface of the detector 440.

In this embodiment, autocollimator 400 also includes a collimating lens 430. Specifically, the collimating lens 430 is located on the optical path of the first reflected light, and the collimating lens 430 is configured to transmit the first reflected light and collect the first reflected light on the imaging surface of the detector 440, so that the detector 440 can obtain the first reflected light, and further can obtain an offset distance between the center of a light spot formed by the first reflected light on the imaging surface of the detector 440 and a preset reference position.

Accordingly, according to the offset distance between the center of the light spot formed on the imaging surface of the detector 440 and the preset reference position on the imaging surface of the detector 440, the offset between the first reflected light and the first incident light is calculated by the following formula

Angle:

Wherein θ ₁ represents the deviation angle between the first reflected light and the first incident light, M ₁ O represents the deviation distance between the center of the light spot formed by the first reflected light on the imaging surface of the detector 440 and the preset reference position on the imaging surface of the detector 440, and S represents the distance between the collimating lens and the imaging surface of the detector 440.

Fig. 4 is a schematic view of a part of an optical path of an embodiment of an optical device according to the present disclosure. Referring to fig. 4, in the case where the optical axis of the auto-collimator 400 is perpendicular to the reflective surface of the first reflective module 300 and parallel to the optical axis of the optical element to be tuned 210, and there is an offset distance between the optical axis of the optical element to be tuned 210 and the optical axis of the auto-collimator 400, the first reflected light passing through the optical element to be tuned 210 is concentrated on a focal plane where the optical element to be tuned 210 approaches the first reflective module 300.

At this time, if the reflecting surface of the first reflecting module 300 is located on the focal plane of the optical element 210 to be modulated, the first incident light and the first reflected light formed by the first reflecting module 300 reflecting the first incident light passing through the optical element 210 to be modulated overlap each other.

In other words, the first incident light projected to the to-be-tuned optical element 210 and the first reflected light passing through the to-be-tuned optical element 210 will not deviate, or the deviation angle between the first incident light projected to the to-be-tuned optical element 210 and the first reflected light passing through the to-be-tuned optical element 210 is zero.

Conversely, if the first reflection module 300 is far from the focal plane of the optical element 210 to be modulated near to the first reflection module 300, a deviation occurs between the first reflected light passing through the optical element 210 to be modulated and the first incident light projected to the optical element 210 to be modulated, that is, a corresponding deviation angle exists between the first reflected light passing through the optical element 210 to be modulated and the first incident light projected to the optical element 210 to be modulated.

In this embodiment, according to the deviation angle between the first reflected light passing through the to-be-adjusted optical element 210 and the first incident light projected to the to-be-adjusted optical element 210, the offset distance between the optical axis of the to-be-adjusted optical element 210 and the optical axis of the auto-collimator 400 is calculated by the following formula:

Where D ₁ represents the offset distance between the optical axis of the to-be-tuned optical element 210 and the optical axis of the auto-collimator 400, θ ₁ represents the offset angle between the first reflected light projected to the to-be-tuned optical element 210 and the first incident light projected to the to-be-tuned optical element 210, F ₁ represents the focal length of the to-be-tuned optical element 210, and L ₁ represents the distance between the reflecting surface of the first mirror and the focal plane of the to-be-tuned optical element 210.

It should be noted that the deviation angle θ ₁ between the first reflected light projected onto the optical element to be tuned 210 and the first incident light projected onto the optical element to be tuned is obtained by the auto-collimator 400, and the focal length F ₁ of the optical element to be tuned 210 is a known amount, and accordingly, the distance L ₁ between the reflecting surface of the first reflecting module 300 and the focal plane of the optical element to be tuned 210 can be obtained according to the distance between the reflecting surface of the first reflecting module 300 and the optical element to be tuned 210 and the focal length F ₁ of the optical element to be tuned 210, that is, the distance L ₁ between the reflecting surface of the first reflecting module 300 and the focal plane of the optical element to be tuned 210 is also a known amount. Therefore, the offset distance between the optical axis of the optical element 210 to be tuned and the optical axis of the auto-collimator 400 can be calculated by substituting the above known amount into the above formula (2).

In this embodiment, the optical device is further configured to perform decentration adjustment on the optical element 220 other than the optical element 210 to be adjusted. Specifically, the other optical element 220 is located on a side of the to-be-tuned optical element 210 away from the first reflection module 300, and a distance between the to-be-tuned optical element 210 and the other optical element 220 is smaller or larger than a focal length of the to-be-tuned optical element 210.

The optical axis of the first incident light projected to the other optical element 220 is aligned with the system preset optical axis, and the optical axis of the auto-collimator 400 is also aligned with the system preset optical axis, and the optical axis of the first incident light of the other optical element 220 is aligned with the optical axis of the auto-collimator 400. At the same time, the optical axis of the autocollimator 400 passes through the preset reference position on the imaging surface of the detector 440, and then the first offset information between the first reflected light passing through the other optical element 220 and the first incident light projected onto the other optical element 220, that is, the offset distance between the center of the spot formed on the imaging surface of the detector 440 by the first reflected light passing through the other optical element 220 and the preset reference position on the imaging surface of the detector 440.

The detector 440 acquires an offset distance between the center of a spot formed on the imaging surface of the detector 440 by the first reflected light passing through the other optical element 220 and a preset reference position on the imaging surface of the detector 440, and acquires an offset angle between the first reflected light passing through the other optical element 220 and the first incident light projected to the other optical element 220 by the offset distance between the center of a spot formed on the imaging surface of the detector 440 by the first reflected light passing through the other optical element 220 and the preset reference position on the imaging surface of the detector 440.

In this embodiment, according to the offset distance between the center of the light spot formed by the first reflected light projected onto the other optical element 220 on the imaging surface of the detector 440 and the preset reference position on the imaging surface of the detector 440, the offset angle between the first reflected light projected onto the other optical element 220 and the first incident light projected onto the other optical element 220 is calculated by the following formula:

Where θ ₂ denotes a deviation angle between the first reflected light projected to the other optical element 220 and the first incident light projected to the other optical element 220, and M ₂ O denotes a deviation distance between the center of the spot formed on the imaging surface of the detector 440 by the first reflected light projected to the other optical element 220 and a preset reference position on the imaging surface of the detector 440.

After the offset angle between the first reflected light passing through the other optical element 220 and the first incident light projected onto the other optical element 220 is obtained, the offset distance between the optical axis of the other optical element 220 and the system preset optical axis, that is, the eccentric amount of the other optical element 220, can be obtained according to the offset angle between the first reflected light passing through the other optical element 220 and the first incident light projected onto the other optical element 220.

Specifically, in the case where the optical axis of the optical element 210 to be adjusted is aligned with the system preset optical axis and the optical axis of the other optical element 220 is parallel to the system preset optical axis, the offset distance between the optical axis of the other optical element 220 and the optical axis of the auto-collimator 400 is calculated and obtained by using the following formula according to the offset angle between the first reflected light passing through the other optical element 220 and the first incident light projected to the other optical element 220:

Where D ₂ denotes an eccentric amount of the other optical element 220, θ ₂ denotes a deviation angle between the first reflected light passing through the other optical element 220 and the first incident light projected to the other optical element 220, F ₂ denotes a focal length of the other optical element 220, and L ₁₂ denotes a distance between the optical element 210 to be adjusted and the other optical element 220.

After the eccentric amount of the other optical element 220 is obtained, the other optical element 220 is translated along the direction perpendicular to the optical axis by the corresponding eccentric amount, so that the alignment between the optical axis of the other optical element 220 and the preset optical axis of the system is realized.

In this embodiment, the other optical element 220 is mounted on the mounting position of the other optical element 220, and the mounting position of the other optical element 220 is located at the side of the mounting position of the optical element 210 to be adjusted away from the first reflection module 300.

Accordingly, the mounting position of the other optical element 220 is shifted by a corresponding eccentricity amount in a direction perpendicular to the optical axis of the auto-collimator 400 according to the eccentricity amount of the other optical element 220, so that the optical axis of the other optical element 220 is aligned with the system preset optical axis.

In this embodiment, the optical element 210 to be adjusted is close to the first reflection module 300, and the other optical elements 220 are located on the side of the optical element 210 to be adjusted away from the first reflection module 300. Accordingly, after the to-be-adjusted optical element 210 is mounted on the mounting position of the to-be-adjusted optical element 210 and the optical axis of the to-be-adjusted optical element 210 is aligned with the system preset optical axis, the other optical elements 220 are mounted on the mounting positions of the other optical elements 220 and the optical axes of the other optical elements 220 are aligned with the system preset optical axis.

In other words, in the process of aligning the to-be-adjusted optical element 210 and the other optical element 220 with the optical axis of the auto-collimator 400, the to-be-adjusted optical element 210 and the other optical element 220 are sequentially mounted at corresponding mounting positions in the order of the distances between the plurality of to-be-adjusted optical elements 210 and the other optical element 220 and the first reflection module 300 from near to far, and in the case of achieving the alignment of the mounted to-be-adjusted optical element 210 with the system preset optical axis, the mounting and alignment of the other optical element 220 further from the first reflection module 300 is performed.

The optical axis of the optical element 210 to be tuned and the optical axes of the other optical elements 220 are aligned with the system preset optical axis, thereby achieving coaxial alignment of the optical element 210 to be tuned and the other optical elements 220, respectively.

Taking the to-be-adjusted optical element 210 and the other optical elements 220 as an example, the description is made on how to perform the eccentric adjustment of the to-be-adjusted optical element 210 and the other optical elements, so that the optical axis of the to-be-adjusted optical element 210 and the optical axis of the other optical elements are aligned with the preset optical axis of the system.

It will be appreciated that the optical device is also capable of enabling decentration of further optical elements, such as a third optical element on a side of the other optical element remote from the optical element to be tuned, a fourth optical element on a side of the third optical element remote from the second optical distance, etc.

The method for obtaining the eccentric amounts of the other optical elements may be performed by referring to the method for obtaining the eccentric amounts of the optical element to be adjusted and the other optical elements, which is not described herein.

In other embodiments, other optical elements and other more optical elements can also be directly obtained by quantitative analysis using optical design software such as ZEMAX, so that the operation of obtaining the eccentric amount can be simplified.

In this embodiment, in the case of implementing non-parallelism between the optical axis of the optical element 210 to be adjusted and the system preset optical axis, the optical device is further configured to make the optical axis of the optical element 210 to be adjusted parallel to the system preset optical axis.

Fig. 3 shows a schematic structural diagram of an auto-collimator in an embodiment of the invention. Referring to fig. 3, an autocollimator 400 includes a second light source 410, a beam splitter 420, a collimating lens 430, and a detector 440.

The second light source 410 is configured to emit a second incident light toward the optical element 210 to be modulated along a second path.

Specifically, the second light source 410 is configured to generate a second outgoing light; the beam splitter 420 is located on the optical path of the second outgoing light emitted by the second light source, and is configured to split the second outgoing light to generate a third outgoing light; the collimating lens 430 is located on the optical path of the third outgoing light, and is configured to collimate the third outgoing light to generate a second incident light that is projected onto the optical element 210 to be modulated.

Accordingly, the second path includes a transmission path of the second outgoing light between the second light source 410 and the beam splitter 420 and a transmission path of the third outgoing light between the beam splitter 420 and the collimator lens 430, and a transmission path of the second incoming light between the collimator lens 430 and the optical element 210 to be modulated.

The second light source 410 is configured to generate a second outgoing light.

The second light source 410 may be an LED light source, a helium-neon light source, a laser light source, or the like, according to actual needs.

The beam splitter 420 is located on the optical path of the second outgoing light generated by the second light source 410, and the beam splitter 420 splits the second outgoing light to generate third outgoing light, and is further used for passing through second reflection light formed by reflecting the second incoming light.

The beam splitter 420 is executed with reference to the content of the beam splitting module 150, and will not be described herein.

The collimating lens 430 is located on the optical path of the third outgoing light, and the collimating lens 430 is configured to collimate the third outgoing light to generate second incident light that is projected onto the optical element 210 to be modulated, and further configured to pass second reflected light formed by reflecting the second incident light, and collect the passed second reflected light on the imaging surface of the detector 440.

In this embodiment, the collimating lens 430 is a biconvex lens. The collimator lens 430 is a biconvex lens, and can collimate light collected on either side of the collimator lens 430 to form parallel light and then emit the parallel light from the other side, and can collect parallel light incident from either side at a focal plane position on the other side.

In other embodiments, the collimating lens 430 can also be an objective lens.

In this embodiment, when the optical element 210 to be adjusted is tilted, the light source module 100 emits the first incident light to the optical element 210 to be adjusted along the first path. The first path includes a transmission path of the first outgoing light between the light source module 100 and the light splitting module 150, and a transmission path of the first incoming light between the light splitting module 150 and the optical element to be modulated 210.

In this embodiment, the first path partially coincides with the second path. Specifically, the transmission path of the first incident light between the light splitting module 150 and the optical element 210 to be modulated in the first path and the transmission path of the second incident light between the light splitting module 150 and the optical element 210 to be modulated in the second path are coincident paths between the first path and the second path.

In this embodiment, the system preset optical axis is located on the overlapping path of the first path and the second path.

The system preset optical axis is located on the coincident path of the first path, and accordingly, the optical axis of the first incident light projected to the optical element to be modulated 210 is aligned with the system preset optical axis.

The system preset optical axis is located on the coincident path of the second path, and accordingly, the optical axis of the second incident light projected to the optical element to be modulated 210 is aligned with the system preset optical axis. The optical axis of the second incident light projected onto the optical element to be modulated is the optical axis of the auto-collimator 400, and thus, the optical axis of the auto-collimator 400 is aligned with the system preset optical axis.

In this embodiment, after the second incident light is projected onto the optical element to be modulated 210, the optical element to be modulated 210 reflects the second incident light with its own plane to form a second reflected light.

In this embodiment, the optical element 210 to be modulated comprises a lens.

The to-be-adjusted optical element 210 adopts its own plane to reflect the second incident light to form a second reflected light, and no additional optical element is required to be provided to reflect the second incident light to form a second reflected light, which can correspondingly save cost.

In other embodiments, a second mirror can also be mounted on the mounting location of the optical element to be modulated, and the second incident light is reflected by the second mirror to form second reflected light.

After the optical element 210 to be modulated reflects the second incident light with its own plane to form second reflected light, the second reflected light is projected to the collimating lens 430.

Accordingly, the collimator lens 430 is further configured to pass the second reflected light transmitted along the fourth path, and collect the passed second reflected light on the imaging surface of the detector 440. At the same time, the beam splitter 420 also serves to pass the projected second reflected light transmitted along the fourth path, so that the second reflected light can continue to be transmitted forward to the detector 440.

In this embodiment, the detector 440 is located on the optical path of the second reflected light, and the detector 440 is configured to collect the second reflected light transmitted from the fourth path, and the second reflected light is configured to detect the tilt of the optical element 210 to be modulated.

Accordingly, the fourth path includes a transmission path of the second reflected light sequentially along the to-be-modulated optical element 210, the collimator lens 430, the beam splitter 420, and up to the detector 440.

In this embodiment, the detector 440 is located on a side of the collimating lens 430 away from the optical element 210 to be modulated, and the imaging surface of the detector 440 is located on the back focal surface of the collimating lens 430.

The detector 440 is located at a side of the collimating lens 430 away from the element 210 to be modulated, and the imaging surface of the detector 440 is located on the back focal plane of the collimating lens 430, so that the collimating lens 430 can collect the second reflected light projected in parallel on the imaging surface of the detector 440, so as to clearly image the second reflected light.

In other embodiments, the imaging plane of the detector can also be on the conjugate plane of the back focal plane of the collimating lens.

In this embodiment, the detector 440 is an image sensor. Specifically, the detector 440 is a Charge-coupled Device (CCD) image sensor.

In other embodiments, the detector can also be a Complementary Metal Oxide Semiconductor (CMOS) image sensor or a photo-position sensor (Position Sensitive Detectors, PSD) image sensor or the like.

Referring to fig. 1 to 4, if the optical axis of the optical element to be modulated 210 is parallel to the system preset optical axis, the plane of the optical element to be modulated 210 is perpendicular to the system preset optical axis. Accordingly, after the second incident light generated by collimating the third outgoing light by the collimating lens 430 is projected onto the optical element to be modulated 210, the optical element to be modulated 210 reflects the second incident light by using its own plane as a reflection plane to form second reflected light, so that the second reflected light coincides with the optical path of the second incident light and has opposite directions, the subsequent second reflected light is projected from the optical element to be modulated 210 to the collimating lens 430, and the collimating lens 430 passes the second reflected light and converges the passed second reflected light onto the imaging surface of the detector 430, so that the center M1 of a light spot formed by the second reflected light on the imaging surface of the detector 430 coincides with the preset reference position O.

On the contrary, in the case that the optical axis of the to-be-adjusted optical element 210 is not parallel to the system preset optical axis, that is, the optical axis of the to-be-adjusted optical element 210 has an inclination angle with the system preset optical axis, at this time, the plane of the to-be-adjusted optical element 210 is not perpendicular to the system preset optical axis. Accordingly, after the second incident light generated by collimating the third outgoing light by the collimating lens 430 is projected onto the optical element to be modulated 210, the optical element to be modulated 210 reflects the second incident light by using its own plane as a reflection plane to form a second reflected light, the optical path of the second reflected light is offset from the optical path of the second incident light, and after the subsequent second reflected light is transmitted from the optical element to be modulated 210 to the collimating lens 430, the collimating lens 430 converges the second reflected light onto the imaging surface of the detector 430, so that the center M1 of a light spot formed by the second reflected light on the imaging surface of the detector 430 is offset from the preset reference position O.

The center M1 of the spot formed by the second reflected light on the imaging surface of the detector 430 is offset from the preset reference position O, i.e., the center M1 of the spot formed by the second reflected light on the imaging surface of the detector 430 has an offset distance from the preset reference position O. The offset distance between the center M1 of the light spot formed by the second reflected light on the imaging surface of the detector 430 and the preset reference position O is the second offset information between the center M1 of the light spot formed by the second reflected light on the imaging surface of the detector 430 and the preset reference position O.

In this embodiment, after obtaining the second offset information between the center M1 of the light spot formed by the second reflected light on the imaging surface of the detector 430 and the preset reference position O, that is, the offset distance between the center M1 of the light spot formed by the second reflected light on the imaging surface of the detector 430 and the preset reference position O, the tilt amount of the optical element 210 to be modulated is calculated and obtained according to the second offset information between the center M1 of the light spot formed by the second reflected light on the imaging surface of the detector 430 and the preset reference position O by using the formula (2) described above.

In this embodiment, after the inclination amount of the optical element 210 to be adjusted is obtained, the method further includes the step of adjusting the posture of the optical element to be adjusted based on the inclination amount of the optical element to be adjusted, so that the optical axis of the optical element to be adjusted is parallel to the system preset optical axis.

Specifically, after the inclination amount of the optical element to be adjusted 210 is obtained, when the inclination adjustment is performed on the optical element to be adjusted 210, the inclination adjustment angle of the optical element to be adjusted 210 is made to be the same as the inclination amount of the optical element to be adjusted 210, so that the optical axis of the optical element to be adjusted 210 is parallel to the system preset optical axis.

In this embodiment, the to-be-adjusted optical element 210 is mounted on the mounting position of the to-be-adjusted optical element 210, and the mounting position of the to-be-adjusted optical element 210 can be adjusted in a tilt manner along a direction perpendicular to the preset optical axis of the system or the optical axis of the to-be-adjusted optical element 210. Accordingly, after the inclination amount of the optical element 210 to be adjusted is obtained, the installation position of the optical element 210 to be adjusted is adjusted in an inclination manner along the direction perpendicular to the preset optical axis of the system, so that the optical axis of the optical element 210 to be adjusted is parallel to the preset optical axis of the system.

In this embodiment, after obtaining the tilt amounts of the other optical elements 220, the method further includes the step of adjusting the posture of the other optical elements 220 based on the tilt amounts of the other optical elements 220 so that the optical axes of the other optical elements 220 are parallel to the system preset optical axis.

In this embodiment, the optical element 210 to be adjusted is close to the first reflection module 300, and the other optical elements 220 are located on the side of the optical element 210 to be adjusted away from the first reflection module 300.

Specifically, after the tilt amount of the other optical element 220 is obtained, when the tilt adjustment is performed on the other optical element 220, the tilt adjustment angle of the other optical element 220 is made to be the same as the tilt amount of the other optical element 220, so that the optical axis of the other optical element 220 is parallel to the system preset optical axis.

In this embodiment, the other optical element 220 is mounted on the mounting position of the other optical element 220, and the mounting position of the other optical element 220 can be adjusted in a tilt direction perpendicular to the preset optical axis of the system or the optical axis of the other optical element 220. Accordingly, after the inclination amount of the other optical element 220 is obtained, the installation position of the other optical element 220 is inclined and adjusted along the direction perpendicular to the preset optical axis of the system, so that the optical axis of the other optical element 220 is parallel to the preset optical axis of the system.

It should be noted that, after the to-be-adjusted optical element 210 is mounted on the mounting position of the to-be-adjusted optical element 210, and the optical axis of the to-be-adjusted optical element 210 is parallel to the system preset optical axis by performing tilt adjustment on the mounting position of the to-be-adjusted optical element 210, the to-be-adjusted optical element 210 is removed from the mounting position of the to-be-adjusted optical element 210, and then the other optical elements 220 are mounted on the mounting positions of the other optical elements 220, so that the optical axes of the other optical elements 220 are parallel to the system preset optical axis.

Or, after the other optical element 220 is mounted on the mounting position of the other optical element 220 and the mounting position of the other optical element 220 is adjusted by tilting, so that the optical axis of the other optical element 220 is parallel to the preset optical axis of the system, the other optical element 220 is removed from the mounting position of the other optical element 220, the to-be-adjusted optical element 210 is mounted on the mounting position of the to-be-adjusted optical element 210, and the optical axis of the other optical element 220 is parallel to the preset optical axis of the system by tilting the mounting position of the to-be-adjusted optical element 210.

In this embodiment, the second reflecting mirror is mounted on the mounting position of the optical element to be modulated, and after the second reflecting light formed by reflecting the second incident light by the second reflecting mirror obtains the inclination amount of the optical element to be modulated, the inclination adjustment is performed on the mounting position of the optical element to be modulated, so that the optical axis of the optical element to be modulated is parallel to the system preset optical axis. And then, the second reflector is taken down from the installation position of the optical element to be modulated, the second reflector is installed on the installation position of other optical elements, the second reflection light formed by reflecting the second incident light through the second reflector obtains the inclination amount of other optical elements, and the installation position of the other optical elements is subjected to inclination adjustment according to the obtained inclination amount of the other optical elements, so that the optical axes of the other optical elements are parallel to the preset optical axis of the system.

The second reflecting mirror can be installed on the installation position of the other optical element, the second reflecting light formed by reflecting the second incident light through the second reflecting mirror obtains the inclination amount of the other optical element, and the installation position of the other optical element is subjected to inclination adjustment according to the obtained inclination amount of the other optical element, so that the optical axis of the other optical element is parallel to the preset optical axis of the system. And then, the second reflecting mirror is taken down from the installation position of the other optical element and is installed on the installation position of the optical element to be modulated, the second reflecting light formed by reflecting the second incident light through the second reflecting mirror obtains the inclination amount of the other optical element 220, and the inclination adjustment is performed on the installation position of the optical element to be modulated, so that the optical axis of the optical element to be modulated 210 is parallel to the preset optical axis of the system.

In other words, the order of tilt adjustment of the optical element 210 to be adjusted and the other optical elements 220 may be arbitrarily set.

Correspondingly, the embodiment of the invention also provides a working method of the optical equipment.

Specifically, the working method of the optical device comprises the following steps: the method comprises the steps of acquiring the eccentric amount of an optical element to be adjusted by using an optical device and/or acquiring the inclination amount of the optical element to be adjusted by using the optical device.

In this embodiment, the step of obtaining the eccentric amount of the optical element to be adjusted by using the optical device refers to obtaining the offset distance between the optical axis of the optical element to be adjusted and the preset optical axis of the system by using the optical device when the optical axis of the optical element to be adjusted is parallel to the preset optical axis of the system.

Fig. 5 is a schematic flow chart of an embodiment of obtaining an eccentricity of an optical element to be modulated by using an optical device according to the present invention. Referring to fig. 5, a step of acquiring an eccentricity of an optical element to be adjusted using an optical apparatus includes:

step S510: emitting first incident light to the to-be-modulated optical element along a first path through a light source module;

step S520: and acquiring first reflected light corresponding to the first incident light transmitted from a third path through the detector, and acquiring the eccentric amount of the optical element to be modulated according to the first reflected light.

Referring to fig. 1 to 5 in combination, step S510 is performed to emit a first incident light along a first path toward the to-be-modulated optical element 210 by the light source module 100.

The light source module 100 emits the first incident light to the optical element 210 to be modulated along the first path, so as to provide a basis for obtaining the first reflected light formed by reflecting the first incident light through the detector.

In this embodiment, the step of emitting the first incident light to the to-be-modulated optical element 210 along the first path by the light source module 100 includes: making the first incident light pass through the to-be-modulated optical element 210 and then enter a first reflection module 300; the reflecting surface of the first reflecting module 300 is perpendicular to the preset optical axis of the system; reflecting the first incident light by the first reflecting module 300 to form the first reflected light; the first reflected light is transmitted to the auto-collimator 400 along the third path after passing through the optical element 210 to be modulated.

The light source module 100 emits a first incident light to the light to be modulated element 210 along a first path. Specifically, the light source module 100 generates a first outgoing light, and the light splitting module 150 splits the first outgoing light to generate a first incoming light that is projected to the optical element 210 to be modulated.

In this embodiment, the light splitting module 150 is located on the light path of the first outgoing light generated by the light source module 100, and the light splitting module 150 splits the first outgoing light generated by the light source module 100 to generate the first incident light projected onto the optical element 210 to be modulated, and further reflects the first incident light of the optical element 210 to be modulated to form the first reflected light, so that the first reflected light passing through the optical element 210 to be modulated passes through.

The light splitting module 150 is located in the optical path of the first outgoing light generated by the light source module 100, and splits the first outgoing light into a plurality of lights transmitted along different optical path directions, where the first incoming light is projected to the optical element 210 to be modulated along the first path, and the light splitting module 150 is also located in the optical path of the first reflected light, and splits the first reflected light into a plurality of lights transmitted along different optical path directions, where the first reflected light passing through the optical element 210 to be modulated passes through.

The optical axis of the first incident light projected to the optical element to be modulated 210 is aligned with the system preset optical axis, and in the case that the optical axis of the optical element to be modulated 210 is parallel to the system preset optical axis, the offset angle between the first reflected light formed by reflecting the first incident light passing through the optical element to be modulated 210 and the first incident light projected to the optical element to be modulated 210 is obtained subsequently, so that the offset angle between the optical axis of the first incident light passing through the optical element to be modulated 210 and the system preset optical axis can be obtained.

The to-be-adjusted optical element 210 is located in the optical path of the first incident light, the to-be-adjusted optical element 210 collects the first incident light, so that the first incident light passes through and is projected to the first reflection module 300, the to-be-adjusted optical element 210 is also located in the optical path of the first reflected light, and the to-be-adjusted optical element 210 collects the first reflected light formed by the reflection of the first incident light, and makes the first reflected light pass through.

The first reflection module 300 is located on the optical path of the first incident light passing through the optical element 210 to be modulated, and the first reflection module 300 reflects the first incident light passing through the optical element 210 to be modulated to form the first reflected light projected to the auto-collimator 400, thereby projecting the first reflected light to the auto-collimator 400 along the third path.

Referring to fig. 1 to 5 in combination, step S520 is performed to collect, by the detector 440, first reflected light corresponding to the first incident light transmitted from the third path, and to obtain the eccentricity of the optical element 210 to be modulated according to the first reflected light.

In this embodiment, the auto-collimator 400 collects the first reflected light transmitted from the third path, where the first reflected light is used to obtain the eccentricity of the optical element 210 to be modulated.

In this embodiment, the optical axis of the auto-collimator 400 is aligned with the system preset optical axis, and the optical axis of the auto-collimator 400 is perpendicular to the reflective surface of the first reflective module 300, and meanwhile, the first incident light projected onto the optical element to be modulated 210 is aligned with the system preset optical axis, so that the offset between the first reflected light projected onto the auto-collimator 400 and the first incident light projected onto the optical element to be modulated 210 can be obtained by the auto-collimator 400 through the first offset information between the first reflected light projected onto the auto-collimator 400 and the first incident light projected onto the optical element to be modulated 210, and further, the offset of the optical element to be modulated 210 can be obtained through the offset angle between the first reflected light projected onto the auto-collimator 400 and the first incident light projected onto the optical element to be modulated 210.

With continued reference to fig. 3, in particular, in the auto-collimator 400, the detector 440 acquires first offset information between the first reflected light and the first incident light, and acquires an offset angle between the first reflected light and the first incident light according to the first offset information between the first reflected light and the first incident light, where the offset angle between the first reflected light and the first incident light is used to acquire an offset between the optical axis of the optical element 210 to be modulated and the preset optical axis of the system.

In this embodiment, autocollimator 400 also includes a collimating lens 430. Specifically, the collimating lens 430 is located on the optical path of the first reflected light, and the collimating lens 430 transmits the first reflected light and converges the first reflected light on the imaging surface of the detector 440, so that the detector 440 can obtain the first reflected light, and further can obtain the offset distance between the center of the light spot formed by the first reflected light on the imaging surface of the detector 440 and the preset reference position.

In this embodiment, according to the offset distance between the center of the light spot formed by the first reflected light on the imaging surface of the detector 440 and the preset reference position on the imaging surface of the detector 440, the offset angle between the first reflected light and the first incident light is calculated by using the aforementioned formula (1).

Referring to fig. 4, in the case where the optical axis of the auto-collimator 400 is perpendicular to the reflective surface of the first reflective module 300 and parallel to the optical axis of the optical element to be tuned 210, and there is an offset distance between the optical axis of the optical element to be tuned 210 and the optical axis of the auto-collimator 400, the first reflected light passing through the optical element to be tuned 210 is concentrated on a focal plane where the optical element to be tuned 210 approaches the first reflective module 300.

In this embodiment, the offset distance between the optical axis of the optical element 210 to be modulated and the optical axis of the auto-collimator 400 is calculated and obtained by using the aforementioned formula (2) according to the offset angle between the first reflected light passing through the optical element 210 to be modulated and the first incident light projected onto the optical element 210 to be modulated.

It should be noted that the deviation angle θ ₁ between the first reflected light projected onto the optical element to be tuned and the first incident light projected onto the optical element to be tuned is obtained by the auto-collimator 400, and the focal length F ₁ of the optical element to be tuned is a known amount, and accordingly, the distance L ₁ between the reflecting surface of the first reflecting module 300 and the focal plane of the optical element to be tuned 210 can be obtained according to the distance between the reflecting surface of the first reflecting module 300 and the optical element to be tuned 210 and the focal length F ₁ of the optical element to be tuned, that is, the distance L ₁ between the reflecting surface of the first reflecting module 300 and the focal plane of the optical element to be tuned 210 is also a known amount. Therefore, the offset distance between the optical axis of the optical element 210 to be tuned and the optical axis of the auto-collimator 400 can be calculated by substituting the above known amount into the above formula (2).

In this embodiment, after the eccentric amount of the optical element 210 to be adjusted is obtained, the working method of the optical device further includes: the posture of the to-be-adjusted optical element is adjusted based on the eccentric amount of the to-be-adjusted optical element 210 so that the optical axis of the to-be-adjusted optical element is aligned with the system preset optical axis.

Accordingly, an offset distance between the optical axis of the to-be-adjusted optical element 210 and the system preset optical axis is obtained, that is, after the eccentric amount of the to-be-adjusted optical element 210 is obtained, the to-be-adjusted optical element 210 is translated along the direction perpendicular to the optical axis according to the obtained eccentric amount, and the translation amount of the to-be-adjusted optical element 210 is the same as the calculated offset distance, so that the optical axis of the to-be-adjusted optical element 210 is aligned with the system preset optical axis.

In this embodiment, the to-be-adjusted optical element 210 is mounted on the mounting position of the to-be-adjusted optical element 210, and accordingly, according to the eccentric amount of the to-be-adjusted optical element 210, the mounting position of the to-be-adjusted optical element 210 is shifted by the offset distance along the direction perpendicular to the optical axis, so as to achieve the alignment between the optical axis of the to-be-adjusted optical element 210 and the preset optical axis of the system.

In this embodiment, after the optical axis of the to-be-adjusted optical element is aligned with the preset optical axis of the system, the working method of the optical device further includes: acquiring the eccentricity of the other optical element 220 except the to-be-adjusted optical element 210 through the optical device; the posture of the other optical element 220 is adjusted based on the eccentric amount of the other optical element 220 so that the optical axis of the other optical element 220 is aligned with the system preset optical axis.

Specifically, the other optical element 220 is located on a side of the to-be-tuned optical element 210 away from the first reflection module 300, and a distance between the to-be-tuned optical element 210 and the other optical element 220 is smaller or larger than a focal length of the to-be-tuned optical element 210.

In this embodiment, according to the offset distance between the center of the light spot formed by the first reflected light projected onto the other optical element 220 on the imaging surface of the detector 440 and the preset reference position on the imaging surface of the detector 440, the offset angle between the first reflected light projected onto the other optical element 220 and the first incident light projected onto the other optical element 220 is calculated by using the aforementioned formula (3).

Specifically, in the case where the optical axis of the optical element 210 to be adjusted is aligned with the system preset optical axis and the optical axis of the other optical element 220 is parallel to the system preset optical axis, the offset distance between the optical axis of the other optical element 220 and the optical axis of the auto-collimator 400 is calculated and obtained by using the aforementioned formula (4) according to the offset angle between the first reflected light passing through the other optical element 220 and the first incident light projected onto the other optical element 220.

Accordingly, after the eccentric amount of the other optical element 220 is obtained, the other optical element 220 is translated along the direction perpendicular to the optical axis by the corresponding eccentric amount, so as to realize the alignment between the optical axis of the other optical element 220 and the preset optical axis of the system.

In this embodiment, the other optical element 220 is mounted on the mounting position of the other optical element 220, the mounting position of the other optical element 220 is located at the side of the mounting position of the optical element 210 to be adjusted away from the first reflection module 300, and the mounting position of the other optical element 220.

In this embodiment, the optical device is used to obtain the inclination amount of the optical element to be adjusted, which means that the optical device is used to obtain the inclination angle between the optical axis of the optical element to be adjusted and the system preset optical axis when the optical axis of the optical element to be adjusted is not parallel to the system preset optical axis.

Fig. 6 is a schematic flow chart of an embodiment of obtaining an inclination amount of an optical element to be adjusted by using an optical device according to the present invention. Referring to fig. 6, a step of acquiring a tilting amount of an optical element to be adjusted using an optical device includes:

step S610: transmitting a second incident light to the to-be-modulated optical element along a second path by the second light source;

Step S620: and acquiring second reflected light corresponding to the second incident light transmitted from the fourth path through a detector, and acquiring the inclination amount of the optical element to be modulated according to the second reflected light.

Referring to fig. 1 to 3 and 6 in combination, step S610 is performed: a second incident light is emitted to the to-be-modulated optical element 210 along a second path by the second light source 410.

The second light source 410 emits the second incident light to the optical element 210 to be modulated along the second path, so as to provide a basis for collecting the second reflected light corresponding to the second incident light transmitted from the fourth path through the detector, and obtaining the inclination amount of the optical element 210 to be modulated according to the second reflected light.

In this embodiment, the step of emitting the second incident light to the optical element to be modulated along the second path by the second light source 410 includes: receiving the second incident light transmitted by the second path using a self-plane of the to-be-modulated optical element 210; reflecting the second incident light from the plane of the optical element 210 to be modulated to form the second reflected light; the second reflected light is transmitted along the fourth path to the autocollimator 400.

With continued reference to fig. 3, in this embodiment, auto-collimator 400 includes a second light source 410, a beam splitter 420, a collimating lens 430, and a detector 440.

The second light source 410 emits a second incident light along a second path toward the to-be-modulated optical element 210.

Specifically, the second light source 410 generates a second outgoing light; the beam splitter 420 splits the second outgoing light to generate a third outgoing light; the collimating lens 430 collimates the third outgoing light to generate a second incoming light that is projected to the optical element 210 to be modulated.

The second light source 410 is configured to generate a second outgoing light.

The collimating lens 430 is located on the optical path of the third outgoing light, and the collimating lens 430 is configured to collimate the third outgoing light to generate second incident light that is projected onto the optical element 210 to be modulated, and further configured to pass second reflected light formed by reflecting the second incident light, and collect the passed second reflected light on the imaging surface of the detector 400.

In this embodiment, the collimating lens 430 is a biconvex lens. The collimator lens 430 is a biconvex lens capable of collimating light collected on either side of the collimator lens 430 into parallel light and then emitting the parallel light from the other side, and also capable of collecting parallel light incident from either side at a focal plane position on the other side.

In other embodiments, the collimating lens 430 can also be an objective lens.

In this embodiment, the optical element 210 to be modulated comprises a lens.

The to-be-modulated optical element 210 adopts its own plane to reflect the second incident light to form a second reflected light, and no additional optical element is required to be provided to reflect the second incident light to form a second reflected light, so that the cost can be saved correspondingly.

After the second reflected light is projected to the collimating lens 430, the collimating lens 430 passes the second reflected light transmitted along the fourth path, and condenses the passed second reflected light on the imaging surface of the detector 440. At the same time, the beam splitter 420 also passes the projected second reflected light, so that the second reflected light can continue to be transmitted forward to the detector 440.

Referring to fig. 1 to 3 and 6 in combination, step S620 is performed: and collecting second reflected light corresponding to the second incident light transmitted from the fourth path by the detector 440.

In this embodiment, the detector 440 is located on the optical path of the second reflected light, and the detector 440 collects the second reflected light transmitted from the fourth path, where the second reflected light is used to detect the tilt of the optical element 210 to be modulated.

With continued reference to fig. 3, if the optical axis of the to-be-adjusted optical element 210 is parallel to the system preset optical axis, the plane of the to-be-adjusted optical element 210 is correspondingly perpendicular to the system preset optical axis. Accordingly, after the second incident light generated by collimating the third outgoing light by the collimating lens 430 is projected onto the optical element to be modulated 210, the optical element to be modulated 210 reflects the second incident light by using its own plane as a reflection plane to form second reflected light, so that the second reflected light coincides with the optical path of the second incident light and has opposite directions, the subsequent second reflected light is projected from the optical element to be modulated 210 to the collimating lens 430, and the collimating lens 430 passes the second reflected light and converges the passed second reflected light onto the imaging surface of the detector 430, so that the center M1 of a light spot formed by the second reflected light on the imaging surface of the detector 430 coincides with the preset reference position O.

On the contrary, in the case that the optical axis of the to-be-adjusted optical element 210 is not parallel to the system preset optical axis, that is, the optical axis of the to-be-adjusted optical element 210 has an inclination angle with the system preset optical axis, at this time, the plane of the to-be-adjusted optical element 210 is not perpendicular to the system preset optical axis. Accordingly, after the second incident light generated by collimating the third outgoing light by the collimating lens 430 is projected onto the optical element to be modulated 210, the optical element to be modulated 210 reflects the second incident light by using its own plane as a reflection plane to form a second reflected light, the optical path of the second reflected light is offset from the optical path of the second incident light, and after the subsequent second reflected light is transmitted from the optical element to be modulated 210 to the collimating lens 430, the collimating lens 430 converges the second reflected light onto the imaging surface of the detector 440, so that the center M1 of a light spot formed by the second reflected light on the imaging surface of the detector 440 is offset from the preset reference position O correspondingly.

The center M1 of the spot formed by the second reflected light on the imaging surface of the detector 440 is offset from the preset reference position O, i.e., the center M1 of the spot formed by the second reflected light on the imaging surface of the detector 440 has an offset distance from the preset reference position O. The offset distance between the center M1 of the light spot formed by the second reflected light on the imaging surface of the detector 440 and the preset reference position O is the second offset information between the center M1 of the light spot formed by the second reflected light on the imaging surface of the detector 440 and the preset reference position O.

In this embodiment, after obtaining the second offset information between the center M1 of the light spot formed by the second reflected light on the imaging surface of the detector 440 and the preset reference position O, that is, the offset distance between the center M1 of the light spot formed by the second reflected light on the imaging surface of the detector 440 and the preset reference position O, the tilt amount of the optical element 210 to be modulated is calculated and obtained according to the second offset information between the center M1 of the light spot formed by the second reflected light on the imaging surface of the detector 440 and the preset reference position O by using the formula (2) described above.

In this embodiment, after obtaining the inclination amount of the optical element 210 to be adjusted, the working method of the optical device further includes: the posture of the to-be-adjusted optical element 210 is adjusted based on the amount of inclination of the to-be-adjusted optical element 210 so that the optical axis of the to-be-adjusted optical element 210 is parallel to a system preset optical axis.

In this embodiment, after the optical axis of the to-be-adjusted optical element is aligned with the preset optical axis of the system, the working method of the optical device further includes: setting mounting positions of the other optical elements and the other optical elements based on the coincident paths; acquiring an inclination amount of the other optical element 220 by the optical device; the posture of the other optical element 220 is adjusted based on the amount of inclination of the other optical element 220 so that the optical axis of the other optical element 220 is parallel to the system preset optical axis.

In this embodiment, setting the mounting position of the other optical element 220 and the other optical element 220 based on the overlapping path refers to setting the mounting position of the other optical element 220 on the overlapping path or at a position near the overlapping path, and mounting the other optical element 220 on the mounting position of the other optical element 220.

In this embodiment, the tilt amount of the other optical element 220 is obtained by the optical device, and the posture of the other optical element 220 is adjusted based on the tilt amount of the other optical element 220, so that the optical axis of the other optical element 220 is parallel to the preset optical axis of the system, and the tilt amount of the optical element 210 to be adjusted is obtained by the optical device, and the posture of the other optical element 220 is adjusted based on the tilt amount of the other optical element 220, so that the optical axis of the other optical element 220 is parallel to the preset optical axis of the system, which is not described herein.

Or after the other optical element 220 is mounted on the mounting position of the other optical element 220 and the mounting position of the other optical element 220 is subjected to tilt adjustment, so that the optical axis of the other optical element 220 is parallel to the preset optical axis of the system, the other optical element 220 is removed from the mounting position of the other optical element 220, the to-be-adjusted optical element 210 is mounted on the mounting position of the to-be-adjusted optical element 210, and the optical axis of the other optical element 220 is parallel to the preset optical axis of the system by performing tilt adjustment on the mounting position of the to-be-adjusted optical element 210.

Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the invention, and the scope of the invention should be assessed accordingly to that of the appended claims.

Claims

1. An optical device, comprising:

2. The optical device of claim 1, wherein partial paths of the first path and the second path overlap to form an overlapping path, and wherein a system preset optical axis is disposed on the overlapping path;

The eccentric amount and the tilting amount are used for adjusting the posture of the optical element to be adjusted so as to align the optical axis of the optical element to be adjusted with the preset optical axis of the system.

3. The optical device of claim 2, further comprising a spectroscopy module located at an intersection of the first path and the second path;

The first incident light emitted by the light source module and the second incident light emitted by the auto-collimator are split by the light splitting module and then enter the superposition path; the to-be-tuned optical element is located on the coincident path.

4. The optical device of claim 2, further comprising a first reflective module;

the first incident light passes through the to-be-modulated optical element and then enters the first reflection module, and the reflection surface of the first reflection module is perpendicular to the preset optical axis of the system;

The first reflection module is used for reflecting the first incident light to form first reflected light, and the first reflected light passes through the optical element to be modulated and then reaches the auto-collimator along the third path;

The detector is used for acquiring first offset information between the first reflected light and the first incident light, and the first offset information is used for acquiring the eccentric amount between the optical axis of the optical element to be modulated and the preset optical axis of the system.

5. The optical device according to claim 4, wherein the optical element to be tuned reflects light by itself plane or by a second mirror provided on a mounting position of the optical element to be tuned;

the self-plane of the optical element to be modulated or the second reflecting mirror is used for reflecting the second incident light to form second reflected light, and the second reflected light reaches the auto-collimator along the fourth path; at least part of the fourth path and the third path coincide;

The detector is used for acquiring second offset information between the second reflected light and the second incident light, and the second offset information is used for acquiring the inclination amount between the optical axis of the optical element to be modulated and the preset optical axis of the system.

6. The optical device of claim 5, wherein the autocollimator further comprises:

the beam splitter is positioned on the light path of the second emergent light emitted by the second light source and is used for splitting the second emergent light to generate third emergent light; and is further configured to pass second reflected light formed by reflecting the second incident light;

The collimating lens is positioned on the light path of the third emergent light and is used for collimating the third emergent light to form the second incident light; the second reflection light is used for enabling the second incident light to pass through and be converged on the imaging surface of the detector; and/or enabling first reflected light formed by reflecting first incident light to pass through, and converging the first reflected light on an imaging surface of the detector;

The detector is positioned on the light path of one side of the collimating lens far away from the optical element to be modulated, and the imaging surface of the detector is positioned on the back focal surface of the collimating lens or the conjugate surface of the back focal surface of the collimating lens; the detector is configured to detect the first reflected light entering the autocollimator to form a spot of first reflected light and/or to detect the second reflected light entering the autocollimator to form a spot of second reflected light.

7. The optical device according to claim 6, wherein the first offset information indicates a distance between a center of a spot formed by the first reflected light on the imaging surface of the detector and a preset reference position on the imaging surface of the detector, and is denoted as M ₁ O; and S represents the distance between the axis surface of the collimating lens and the imaging surface of the detector;

the angle of deviation between the first reflected light and the second incident light is expressed by the following formula:

The eccentricity between the optical axis of the optical element to be modulated and the preset optical axis of the system is expressed by the following formula:

Wherein F ₁ represents a focal length of the to-be-adjusted optical element, and L ₁ represents a distance between a reflecting surface of the first reflecting module and a front focal surface of the to-be-adjusted optical element.

8. The optical apparatus according to claim 6, wherein the second offset information indicates a distance between a center of a spot formed by the second reflected light on the imaging surface of the detector and a preset reference position on the imaging surface of the detector, and is denoted as x1;

the amount of tilt of the optical element to be tuned is calculated using the formula:

Wherein θ ₃ represents the amount of inclination of the optical element to be modulated, and x2 represents the distance between the imaging plane of the detector and the axial plane of the collimator lens.

9. The optical device of any one of claims 1-8, wherein the light source module is a laser light source.

10. A method of operating an optical device, characterized in that the optical device is an optical device according to any one of claims 1-8, the method comprising:

acquiring the inclination amount of the optical element to be adjusted through the optical equipment and/or acquiring the eccentricity amount of the optical element to be adjusted through the optical equipment; acquiring, by the optical device, an amount of tilt of the optical element to be adjusted, including: transmitting a second incident light to the to-be-modulated optical element along a second path by the second light source; collecting second reflected light corresponding to the second incident light transmitted from the fourth path through a detector; acquiring the inclination amount of the to-be-adjusted optical element according to the second reflected light;

11. The method of operating an optical device according to claim 10, wherein the second reflected light is formed by reflecting the second incident light by a plane of the optical element to be adjusted or by a second mirror provided on a mounting position of the optical element to be adjusted.

12. The method of claim 10, wherein the first reflected light is formed by reflecting a first incident light passing through the optical element to be modulated by a first reflection module, the first reflection module is located on an optical path of the first incident light passing through the optical element to be modulated, and a reflection surface of the first reflection module is perpendicular to a system preset optical axis.

13. The method of operating an optical device according to claim 10, wherein after acquiring the amount of tilt of the optical element to be adjusted and/or the amount of decentration of the optical element to be adjusted, the method further comprises:

Adjusting the posture of the to-be-adjusted optical element based on the inclination amount of the to-be-adjusted optical element so that the optical axis of the to-be-adjusted optical element is parallel to a system preset optical axis;

and adjusting the posture of the to-be-adjusted optical element based on the eccentric amount of the to-be-adjusted optical element so as to align the optical axis of the to-be-adjusted optical element with the preset optical axis of the system.

14. A method of operating an optical device as claimed in claim 13 wherein part of the paths of the first and second paths overlap to form an overlapping path; the system preset optical axis is arranged on the coincident path.

15. The method of operating an optical device as recited in claim 14, further comprising the step of performing alignment adjustment of optical elements other than the optical element to be adjusted after the optical axis of the optical element to be adjusted is aligned with the system preset optical axis:

setting mounting positions of the other optical elements and the other optical elements based on the coincident paths;

acquiring the inclination amount of the other optical element through the optical device;

adjusting the posture of the other optical element based on the tilt amount of the other optical element so that the optical axis of the other optical element is parallel to the system preset optical axis;

acquiring the eccentric amount of the other optical element through the optical equipment;

and adjusting the posture of the other optical element based on the eccentric amount of the other optical element so as to align the optical axis of the other optical element with the preset optical axis of the system.

16. A method of operating an optical device as claimed in claim 15, wherein obtaining the tilt of the other optical element by the optical device comprises:

Emitting a second incident light along a second path to the other optical element by the second light source; collecting second reflected light corresponding to the second incident light transmitted from the fourth path through a detector; and acquiring the inclination amount of the other optical element according to the second reflected light.

17. A method of operating an optical device as claimed in claim 15, wherein obtaining the amount of eccentricity of the other optical element by the optical device comprises: emitting first incident light to the other optical elements along a first path by the light source module; and acquiring first reflected light corresponding to the first incident light transmitted from a third path through the detector, and acquiring the eccentric amount of the other optical elements according to the first reflected light.