CN118091777B

CN118091777B - High-sensitivity single-substance gravity detection and multi-substance detection device and method thereof

Info

Publication number: CN118091777B
Application number: CN202410520203.7A
Authority: CN
Inventors: 王东方; 蔡旺; 杨健
Original assignee: Jilin University
Current assignee: Jilin University
Priority date: 2024-04-28
Filing date: 2024-04-28
Publication date: 2024-06-21
Anticipated expiration: 2044-04-28
Also published as: CN118091777A

Abstract

The invention relates to a high-sensitivity single-substance gravity detection and multi-substance detection device and a method thereof, wherein the device comprises the following steps: the device comprises an array resonance structure, a substance to be detected adsorption film, a second detection substance adsorption film and a film without adsorption effect; the array resonance structure includes: the base, the first resonance structure, the second resonance structure, the third resonance structure, the first coupling structure and the second coupling structure are arranged on the base at equal intervals through rectangular upright posts, the fixed ends of the second resonance structure face opposite to the fixed ends of the first resonance structure and the third resonance structure, and the first coupling structure and the second coupling structure are used for connecting the first resonance structure, the second resonance structure and the third resonance structure; the invention has the advantages that: with asymmetric localization, high sensitivity single-substance gravity detection can be performed on small mass substances, and multiple substances can be detected when single-substance gravity detection is performed.

Description

High-sensitivity single-substance gravity detection and multi-substance detection device and method thereof

Technical Field

The invention belongs to the technical field of high-sensitivity gravity detection, and relates to a high-sensitivity single-substance gravity detection and multi-substance detection device and a method thereof.

Background

Gravity detection of substances is one of the important means for studying earth and cosmic physics, aiming at measuring the gravitational effects of objects, thereby revealing the distribution, properties and motion laws of the substances. Although the gravity detection of the small mass substance is small in scale, the importance of the gravity detection can not be underestimated, and the gravity detection has important significance for promoting scientific research and expanding human cognition. First, research in microgravity environment is helpful to understand behavior of microscopic world, such as interaction between atoms and molecules, and is of great importance to development of fields of material science and biology. Second, gravity detection of small mass substances has important applications in the field of aerospace science and technology, such as experimental research in space station environments, exploring the feasibility of long-term space life and the possibility of future space exploration. In addition, the gravity detection of the small-mass substances plays a key role in the aspects of new material research and development under the microgravity condition, biological experiments under the microgravity environment and the like.

Conventional methods of gravity detection of substances rely primarily on the design and use of gravity instruments. The most common gravity instruments include gravimeters, gravity gradiometers, and the like, which indirectly infer the distribution and nature of a substance by measuring the change in gravitational force or field to which an object is subjected. The traditional gravity detection method has the advantages of maturity and stability, but also has the limitations of lower precision, limited measurement range and the like. In addition to measuring gravity directly, there are also means for measuring gravity indirectly by measuring mass, wherein mass detection mainly comprises three major types of piezoelectric effect, surface acoustic wave sensing and optical interference sensing, which have their own advantages and short plates. The detection based on the piezoelectric effect is a mass sensing method with wider application, has the advantages of wide frequency response range, high stability, high anti-interference capability and the like, and also has the defects of large temperature influence, frequency drift and the like. The surface acoustic wave mass sensing has the advantages of non-contact measurement, high resolution, rapid response speed and the like, but also has the disadvantages of high requirements on environmental conditions, high cost and the like. The optical interference quality sensor has the advantages of high precision, non-contact measurement, high sensitivity and the like, but also has the defects of high requirement on environmental conditions, easy influence by vibration and the like. And the gravity detection is carried out by utilizing the localization principle, so that the high-sensitivity detection can be realized, the detection is not easily influenced by the detection environment, and the structure is simpler.

In the existing application of detecting by utilizing the localization principle, most of the methods and devices are localization methods and devices with completely symmetrical coupling and respective degrees of freedom, and the design has the advantages of high manufacturing precision and the like, but symmetrical localization can only realize the output amplification of the part acted by the object to be detected, and can not carry out the output control on other parts not acted by the outside. In contrast, the coupling asymmetric localization can be used for carrying out output control on other parts while the output of the part acted by the object to be detected is amplified, so that the sensing transmission can be carried out by utilizing the part acted by the object to be detected, the detection sensitivity of the part acted by the object to be detected can be improved again by utilizing other parts, and additional functions such as detection, early warning, identification, feedback and the like can be simultaneously carried out.

In the existing resonant structure for detecting by utilizing the localization principle, the spatial arrangement mode of each degree-of-freedom structure mainly comprises an array with consistent output ends or fixed ends, equidistant arrangement and the like, and when the structure simultaneously detects by utilizing a plurality of degrees of freedom, the structure is easy to generate interference coupling of electrostatic interference, attractive force interference and the like of each degree of freedom, which are not considered in the principle level.

Disclosure of Invention

In view of the above problems, the present invention aims to provide a high-sensitivity single-substance gravity detection and multi-substance detection device and a method thereof, which are used for solving the defects of complex structure, strict detection environment requirements, limited measurement range and the like in the traditional method, and improving the defects of limited sensitivity improvement, interference coupling introduction and the like in the conventional localized detection principle, and can perform high-sensitivity detection on tiny-mass gravity, and the device has a simpler structure and is not easily affected by detection environment.

In order to achieve the above purpose, the invention adopts the following technical scheme:

A high sensitivity single-substance gravity detection and multi-substance detection device, comprising: the device comprises an array resonance structure, a substance to be detected adsorption film, a second detection substance adsorption film and an adsorption-free film; the array resonant structure includes: the base, first resonance structure, second resonance structure, third resonance structure, first coupling structure, and second coupling structure, first resonance structure, second resonance structure and third resonance structure pass through rectangular stand equidistance and arrange on the base, and the stiff end of second resonance structure is opposite with the stiff end of first resonance structure, third resonance structure, there is not adsorption film, second detection material adsorption film and the material adsorption film that awaits measuring install in proper order on first resonance structure, second resonance structure, third resonance structure, the both ends of first coupling structure link firmly with the side surfaces of first resonance structure, second resonance structure, the both ends of second coupling structure link firmly with the side surfaces of second resonance structure, third resonance structure, after the base receives the excitation with vibration transfer to first resonance structure, second resonance structure, third resonance structure, first coupling structure and second coupling structure, and through first resonance structure, second detection material adsorption film, the second detection material adsorption film on the third resonance structure, the gravity detection material adsorption film detects and detects with the first resonance structure and second eigenvalued time difference between the first resonance structure, second resonance structure and second resonance structure.

As the preferable mode of the invention, the base is in a circular table shape, the base is excited in multiple directions and drives the array resonant structure to vibrate integrally, and the vertical rectangular upright columns connected with the first resonant structure, the second resonant structure and the third resonant structure are used as fixed supports for weakening vibration information in other directions outside the vertical direction, so that the first resonant structure, the second resonant structure and the third resonant structure vibrate only in the vertical direction.

As a preferable mode of the invention, the shapes and materials of the first resonant structure, the second resonant structure and the third resonant structure are consistent, and grooves are arranged on the positions close to the fixed ends of the first resonant structure, the second resonant structure and the third resonant structure so as to avoid vibration detuning of the first resonant structure, the second resonant structure and the third resonant structure when the first coupling structure and the second coupling structure are too close to the fixed ends of the first resonant structure, the fixed ends of the second resonant structure and the fixed ends of the third resonant structure; the first resonance structure, the second resonance structure and the third resonance structure are also provided with grooves at positions close to the free ends of the first resonance structure, the second resonance structure and the third resonance structure so as to limit the fixed positions of the adsorption-free film, the second detection substance adsorption film and the substance to be detected on the first resonance structure, the second resonance structure and the third resonance structure, and vibration detuning is avoided when the fixed positions of the adsorption-free film, the second detection substance adsorption film and the substance to be detected on the first resonance structure, the second resonance structure and the third resonance structure are far away from the free ends of the first resonance structure, the second resonance structure and the third resonance structure.

As a preferred aspect of the present invention, the shapes and materials of the first coupling structure and the second coupling structure of the array resonant structure are consistent, the positions of the first coupling structure and the second coupling structure on the second resonant structure are adjusted by the eigenvector calculation module, the first coupling structure and the second coupling structure after the positions are adjusted ensure that the second resonant structure is not affected by the external action acting on the third resonant structure, and even if the first resonant structure and the third resonant structure are affected by the gravity of external substances, the eigenvectors of the second resonant structure themselves remain unchanged; the first coupling structure and the second coupling structure are I-shaped, and through holes are formed in the first coupling structure and the second coupling structure, so that the coupling contact length of the first coupling structure and the second coupling structure with the first resonance structure, the second resonance structure and the third resonance structure can be prolonged, and the energy dissipation caused by self damping can be reduced.

Preferably, the thicknesses of the first coupling structure and the second coupling structure are consistent with the thicknesses of the cantilevers of the first resonant structure, the second resonant structure and the third resonant structure, so as to ensure that the energy transfer efficiency between the first coupling structure and the second coupling structure and between the first resonant structure, the second resonant structure and the third resonant structure is maximized when the array resonant structure is localized; the horizontal distance between the side surface of the first coupling structure, which is close to the side of the first resonant structure fixed support, and the side surface of the first coupling structure, which is close to the side of the first resonant structure fixed support, is equal to the horizontal distance between the side surface of the first coupling structure, which is close to the side of the second resonant structure fixed support, and the side surface of the second resonant structure fixed support, which is close to the side of the first coupling structure; the horizontal distance between the side surface of the second coupling structure, which is close to the side of the third resonance structure fixed support, and the side surface of the third resonance structure fixed support, which is close to the side of the second coupling structure, is equal to the horizontal distance between the side surface of the second coupling structure, which is close to the side of the second resonance structure fixed support, and the side surface of the second resonance structure fixed support, which is close to the side of the second coupling structure.

Preferably, the mass of the substance to be detected adsorption film, the mass of the second detection substance adsorption film and the mass of the non-adsorption film are the same, so that the first resonance structure, the second resonance structure and the third resonance structure are ensured to bear the same gravity action;

The to-be-detected substance adsorption film is fixed on the upper surface of the free end of the third resonance structure and only has an adsorption effect on to-be-detected substances, and the fixed position of the to-be-detected substance adsorption film on the upper surface of the free end of the third resonance structure does not exceed the groove position of the third resonance structure, which is close to the free end, in the direction from the free end of the third resonance structure to the fixed end, so that vibration detuning of the third resonance structure is avoided;

The second detection substance adsorption film is fixed on the upper surface of the free end of the second resonance structure and only has an adsorption effect on the second detection substance, and the fixed position of the second detection substance adsorption film on the upper surface of the free end of the second resonance structure does not exceed the groove position of the second resonance structure, which is close to the free end, in the direction from the free end to the fixed end of the second resonance structure so as to avoid vibration detuning of the second resonance structure; meanwhile, according to the quantity of the substance types to be detected, on the premise that the total mass of the second detection substance adsorption film is unchanged and the fixed position does not exceed the groove position of the second resonance structure close to the free end, a plurality of adsorption films of different types of second detection substances are fixed on the upper surface of the free end of the second resonance structure in a non-overlapping manner;

The film without adsorption effect is fixed on the upper surface of the free end of the first resonant structure and has no adsorption effect, the effect of ensuring that the first resonant structure, the second resonant structure and the third resonant structure bear the same gravity effect, and the film without adsorption effect is at the fixed position of the upper surface of the free end of the first resonant structure, and in the direction pointing to the fixed end from the free end of the first resonant structure, the film does not exceed the position of the groove of the first resonant structure close to the free end, so that vibration detuning of the first resonant structure is avoided.

Preferably, the eigenvector calculation module is configured to adjust spatial distribution positions of the first coupling structure and the second coupling structure, and output and control the second resonant structure, so that an eigenvector of the eigenvector can keep a variation equal to zero no matter whether an external gravity acts on the third resonant structure, and thus, gravity detection can be performed by using the third resonant structure acted by a substance to be detected, and energy transfer of the first resonant structure and the second resonant structure through the first coupling structure and the second coupling structure can be performed, so that gravity detection sensitivity of the third resonant structure is improved, and single-substance gravity detection is performed by using the second resonant structure, and multi-substance detection is performed at the same time.

The invention also aims to provide a high-sensitivity single-substance gravity detection and multi-substance detection method, which specifically comprises the following steps:

step S1: in the array resonance structure, the coupling interval of the first coupling structure And coupling spacing/>, of the second coupling structureThe following relationship is satisfied:

Wherein the coupling interval Representing the horizontal distance between the side surface of the first coupling structure, which is close to the side of the first resonant structure fixed support, and the side surface of the first resonant structure fixed support, which is close to the side of the first coupling structure, which is equal in value to the horizontal distance between the side surface of the first coupling structure, which is close to the side of the second resonant structure fixed support, and the side surface of the second resonant structure fixed support, which is close to the side of the first coupling structure; coupling intervalRepresenting the horizontal distance between the side surface of the second coupling structure, which is close to the side of the third resonant structure fixed support, and the side surface of the third resonant structure fixed support, which is close to the side of the second coupling structure fixed support, which is equal in value to the horizontal distance between the side surface of the second coupling structure, which is close to the side of the second resonant structure fixed support, and the side surface of the second resonant structure fixed support, which is close to the second coupling structure; /(I)Is a constant measured by experiment,Usually, the gravity detection is carried out before the gravity detection is carried out by calibrating experimental data;

Step S2: exciting a base of the array resonance structure so as to drive the device to vibrate integrally and promote the array resonance structure to localize, wherein rectangular upright posts connected with the base and the first resonance structure, the second resonance structure and the third resonance structure are used for weakening vibration information in other directions outside the vertical direction, and further the first resonance structure, the second resonance structure and the third resonance structure vibrate only in the vertical direction;

Step S3: and applying a substance to be detected into the device, and starting to perform gravity detection of the substance, wherein when single-substance gravity detection without doping of other second detection substances is performed, the substance to be detected is adsorbed on the upper surface of the adsorption film of the substance to be detected, and the substances are not adsorbed on the upper surfaces of the adsorption film and the non-adsorption film of the second detection substances, so that the device is localized, and at the moment, the derivation process of the eigenvalue change value and eigenvector change value analytical expression of the device is as follows:

at this time, according to the lumped parameter physical model of the device, the free vibration equation of motion of the device when no external material gravity acts is:

Wherein, For the mass sum of the first resonant structure and the non-adsorption film,For the mass sum,/>, of the second resonant structure and the second probe species adsorbing filmThe mass sum of the adsorption film for the third resonance structure and the substance to be detected; /(I)、、The free end vibration displacement of the first resonance structure, the second resonance structure and the third resonance structure is respectively represented;、、 The second derivatives of the free end vibration displacement of the first resonance structure, the second resonance structure and the third resonance structure are respectively represented; /(I) 、、Respectively representing equivalent rigidities of the first resonant structure, the second resonant structure and the third resonant structure; /(I) Respectively representing the coupling rigidity of the first coupling structure and the second coupling structure;

The geometric shapes and material characteristics of the first resonant structure, the second resonant structure and the third resonant structure of the array resonant structure are consistent, the first resonant structure, the second resonant structure and the third resonant structure are arranged at equal intervals, and meanwhile, the mass of the substance to be detected adsorption film, the mass of the second detection substance adsorption film and the mass of the non-adsorption film are the same, so that the first resonant structure, the second resonant structure and the third resonant structure are ensured to bear the same gravity action, and the localization of the device is realized; thus (2) ，The dimensionless eigen equation of the device thus obtained is:

Wherein the coupling coefficient Coupling coefficientAnd meet，Usually, the gravity detection is carried out before the gravity detection is carried out by calibrating experimental data; /(I)Is the eigenvector of the device without the gravity intervention of the adsorption substance; /(I)Is the eigenvalue of the device without the gravity intervention of the adsorbed substances; /(I)Is the first, second and third order eigenfrequency of the device;

The eigenvalues of the device without the gravitational intervention of the adsorbed substances are as follows:

the eigenvectors of the device without gravitational intervention of the adsorbed substances are as follows:

the upper surface of the adsorption film of the substance to be detected on the third resonance structure is adsorbed with the gravity of the same size The eigenvalue change value/>, of the device when the substance to be measured isThe method comprises the following steps:

Wherein:

eigenvector/>, as gravity intervention of non-adsorbed material of system Is a transposed vector of (2); to further determine the eigenvalue change value/>, of the systemThe analytical expression is:

Wherein, ；

Eigenvector change values for devicesThe method comprises the following steps:

Further obtain the first-order mode eigenvector change value of the device The analytical expression is:

Step S4: when only the substance to be detected is adsorbed on the upper surface of the adsorption film of the substance to be detected for gravity detection and the device is not doped with the second detection substance except the substance to be detected, the adsorption film of the second detection substance and the upper surface of the film without adsorption function are not adsorbed with substances, at the moment, the coupling interval mathematical relationship between the first coupling structure and the second coupling structure on the array resonance structure enables the coupling coefficient of the device The following relationship is satisfied:

thereby changing the first-order modal eigenvector of the second resonance structure The method comprises the following steps:

at this time, because The fact that the second resonance structure is not affected by the gravity of external substances is indicated, and the multi-substance detection mechanism is not triggered at the moment, namely, substances to be detected are not doped with other substances except the substances to be detected, so that the gravity of the substances to be detected can be solved according to the eigenvalue change value or eigenvector change value of the device, and the device can detect the gravity of single substances.

Step S5: when the substance to be detected is doped with a second detection substance other than the substance to be detected, the substance to be detected is adsorbed on the upper surface of the adsorption film of the substance to be detected, the second detection substance is adsorbed on the upper surface of the adsorption film of the second detection substance, and the upper surface of the adsorption film is not adsorbed with the substance without adsorption effect, at the momentNo longer 0, once detectedThe detection mechanism is triggered immediately, so that the device can detect other second detection substances doped in the device when the gravity detection of the substances to be detected is performed.

The invention has the advantages and positive effects that:

1. The invention utilizes the asymmetric localization of coupling, realizes the amplification of the output of the third resonant structure acted by the substance to be detected, and compared with common symmetric localization, the invention can also control the output of the second resonant structure by adjusting the spatial distribution positions of the first and second resonant structures, so that the eigenvector of the second resonant structure can keep the variation equal to zero no matter whether the third resonant structure has external gravity or not, thereby realizing the gravity detection by using the third resonant structure acted by the substance to be detected, and the energy transfer by using other resonant structures through the two resonant structures, further improving the gravity detection sensitivity of the third resonant structure, and simultaneously utilizing the second resonant structure to detect multiple substances during the single-substance detection.

2. According to the invention, asymmetric localization is utilized, and on the premise of not changing the physical parameters of each degree of freedom, the mode of reversing the orientations of the fixed end and the output end of the adjacent degree of freedom structure is greatly weakened, and besides the mechanical coupling realized through the first coupling structure and the second coupling structure, other interference coupling such as electrostatic coupling and gravitational coupling are greatly weakened, so that the detection precision is improved compared with the conventional localization structure utilizing the modes of the same array, equidistant arrangement and the like of each degree of freedom.

3. According to the invention, by utilizing asymmetric localization, the coupling structure is designed into an I shape, and the through holes are formed in the coupling structure, so that the coupling contact length of the coupling structure and each resonant structure is prolonged, the coupling strength is further improved, and meanwhile, the energy dissipation caused by self damping of the coupling structure is reduced by subtracting materials, so that the detection precision is further improved.

4. According to the invention, by utilizing asymmetric localization, through the mode that the first resonant structure, the second resonant structure and the third resonant structure are provided with the grooves at the positions close to the fixed ends of the first resonant structure, the second resonant structure and the third resonant structure, vibration detuning of the resonant structures is avoided when the distance between the first coupling structure and the second coupling structure is too close to the fixed ends of the resonant structures.

5. According to the invention, asymmetric localization is utilized, and the fixed positions of the substance to be detected adsorption film, the second detection substance adsorption film and the non-adsorption film on each resonance structure are limited by arranging grooves at the positions of the first resonance structure, the second resonance structure and the third resonance structure close to the free ends of the first resonance structure, the second resonance structure and the third resonance structure, so that vibration detuning of each resonance structure is avoided when the fixed positions of the films on each resonance structure are far away from the free ends of the resonance structures.

6. According to the invention, by utilizing asymmetric localization, when only a substance to be detected is adsorbed on the upper surface of the substance to be detected adsorption film, and the second detection substance adsorption film and the upper surface of the non-adsorption film are not adsorbed with substances, the amplitude of the third resonance structure of the array resonance structure can be maximized, the eigenvector of the second resonance structure of the array resonance structure is kept unchanged, a multi-substance detection mechanism is not triggered at the moment, and the gravity of the substance to be detected can be solved through the device eigenvalue or eigenvector change value at the moment, so that the high-sensitivity single-substance gravity detection is realized.

7. According to the invention, asymmetric localization is utilized, when a second detection substance is adsorbed on the upper surface of the second detection substance adsorption film besides the substance to be detected is adsorbed on the upper surface of the substance to be detected, and the substance is not adsorbed on the upper surface of the non-adsorption film, the eigenvector of the second resonance structure of the array resonance structure can be changed, and the detection of other doped second detection substances during single substance gravity detection is realized by obtaining the information that the eigenvector of the second resonance structure of the array resonance structure is changed.

8. According to the invention, by utilizing asymmetric localization, the function of simultaneously detecting a plurality of different second detection substances can be realized by fixing the adsorption films of the second detection substances on the upper surface of the free end of the second resonance structure in a non-overlapping manner on the premise of ensuring that the total mass of the adsorption films of the second detection substances is unchanged and the fixed position of the adsorption films is not beyond the position of the groove of the second resonance structure, which is close to the free end, according to the quantity of the substance types to be detected when the device performs single-substance gravity detection.

9. The invention utilizes asymmetric localization, is not influenced by factors such as detection environment pressure, temperature and the like, and has better detection stability.

10. The invention can detect the gravity of the substance to be detected with the mass of 0% -2% of the mass of the third resonance structure by utilizing asymmetric localization, and has wider detection range.

Drawings

FIG. 1 is a schematic diagram of a gravity sensing and substance detecting apparatus according to the present invention;

FIG. 2 is a schematic diagram of the structure of the present invention for detecting a doped second detection material when single material gravity detection is performed;

FIG. 3 is a schematic diagram of the array resonant structure of the present invention;

FIG. 4 is a schematic diagram of the structure of the invention with only single-species gravity detection without doping of the other second probe species;

FIG. 5 is a schematic diagram of a coupling interval definition of the present invention;

FIG. 6 is a schematic block diagram of the gravity detection and substance detection operation principle of the present invention;

FIG. 7 is a schematic diagram of a lumped parameter physical model of the gravity sensing and substance detecting device of the present invention;

FIG. 8 is a schematic diagram of the quantitative relationship between the magnitude of the experimentally measured coupling interval and the magnitude of the coupling coefficient of the present invention;

FIG. 9 is a diagram showing the quantitative relationship between the first-order eigenvector change value of the array resonance structure for single-substance gravity detection and the relative gravity of the substance to be measured when no other second detection substance is doped, which is obtained through the experiment of the invention;

FIG. 10 is a diagram showing the quantitative relationship between the first-order eigenvector change value of the array resonance structure for detecting the doped second detection material and the relative gravity of the material to be detected when single-material gravity detection is performed according to the experimental measurement of the present invention;

FIG. 11 is a diagram showing the quantitative relationship between the relative gravity of the measured substance, which is only detected by single-substance gravity, and the second-order eigenvalue change value of the array resonance structure when no other second detection substance is doped;

FIG. 12 is a diagram showing the quantitative relationship between the relative gravity of the measured substance and the third-order eigenvalue change of the array resonance structure, which is obtained by performing only single-substance gravity detection when no other second detection substance is doped.

Detailed Description

Example 1

As shown in fig. 1-12, the present embodiment provides a high-sensitivity single-substance gravity detection and multi-substance detection device based on asymmetric localization, which includes an array resonance structure 1, a substance to be detected adsorption film 2, a second detection substance adsorption film 3 and an adsorption-free film 4; the array resonant structure 1 comprises a base 101, a first resonant structure 102, a second resonant structure 103, a third resonant structure 104, a first coupling structure 105 and a second coupling structure 106; the base 101 of the array resonance structure 1 can be excited in multiple directions, so that the device is driven to vibrate integrally, the array resonance structure 1 is promoted to be localized, and the base 101 and upright post structures connected with the resonance structures can weaken vibration information in other directions outside the vertical direction to a certain extent, so that the resonance structures vibrate only in the vertical direction.

As shown in fig. 1 to 5, the geometry and material characteristics of the first resonant structure 102, the second resonant structure 103 and the third resonant structure 104 of the array resonant structure 1 are consistent, the three are arranged at equal intervals, and the fixed ends of the second resonant structure 103 and the fixed ends of the first resonant structure 102 and the third resonant structure 104 face opposite directions, so as to ensure that interference coupling such as electrostatic coupling, gravitational coupling and the like is avoided except mechanical coupling by using the first coupling structure 105 and the second coupling structure 106; meanwhile, grooves are formed in the first resonant structure 102, the second resonant structure 103 and the third resonant structure 104 at positions close to the fixed ends of the first resonant structure, so that vibration detuning of the resonant structures is avoided when the distance between the first coupling structure 105 and the second coupling structure 106 and the fixed ends of the resonant structures is too close; meanwhile, grooves are formed in the first resonant structure 102, the second resonant structure 103 and the third resonant structure 104 near the free ends of the first resonant structure, so that the fixed positions of the substance to be detected adsorption film 2, the second detection substance adsorption film 3 and the non-adsorption film 4 on the resonant structures are limited, and vibration detuning of the resonant structures caused when the fixed positions of the films on the resonant structures are far away from the free ends of the resonant structures is avoided.

As shown in fig. 1 to 5, the geometry and material characteristics of the first coupling structure 105 and the second coupling structure 106 of the array resonant structure 1 in the present invention are consistent, and at the same time, the connection position of the first coupling structure 105 and the second coupling structure 106 on the second resonant structure 103 satisfies the following mathematical formula relationship in the eigenvector calculation module, so that after localization occurs, as long as the second resonant structure 103 is not affected by the external world, even if other resonant structures are affected by the gravity of external objects, the eigenvectors of the second resonant structure 103 themselves can remain unchanged; the I-shaped structure design with the through holes inside of the first coupling structure 105 and the second coupling structure 106 can prolong the coupling contact length between the first coupling structure 105 and the second coupling structure and each resonant structure so as to improve the coupling strength, and meanwhile, the energy dissipation caused by self damping of the first coupling structure and the second coupling structure can be reduced by subtracting materials.

As shown in fig. 3, two ends of a first coupling structure 105 are respectively connected with side surfaces of a first resonant structure 102 and a second resonant structure 103, two ends of a second coupling structure 106 are respectively connected with side surfaces of a second resonant structure 103 and a third resonant structure 104, and thicknesses of the first coupling structure 105 and the second coupling structure 106 are consistent with thicknesses of cantilevers of the first resonant structure 102, the second resonant structure 103 and the third resonant structure 104, so as to ensure that energy transfer efficiency between the coupling structure and the resonant structure is maximized when the device is localized.

As shown in fig. 5, the first coupling structure 105 in the present invention is located at a horizontal distance from the side surface of the first resonant structure 102, which is located at a side of the first resonant structure 102, which is fixedly supported by the first coupling structure 105Equal to the horizontal distance/>, between the side surface of the first coupling structure 105, which is close to the side of the second resonant structure 103, which is fixedly supported, and the side surface of the second resonant structure 103, which is close to the first coupling structure 105。

As shown in fig. 5, the second coupling structure 106 of the present invention is close to the side surface of the third resonant structure 104 on the side of the fixed support, and the horizontal distance between the side surface of the third resonant structure 104 on the side of the fixed support close to the second coupling structure 106Equal to the horizontal distance/>, between the side surface of the second coupling structure 106, which is close to the side of the second resonant structure 103, which is fixedly supported, and the side surface of the second resonant structure 103, which is fixedly supported, which is close to the second coupling structure 106。

The mass of the to-be-detected substance adsorption film 2, the mass of the second detection substance adsorption film 3 and the mass of the non-adsorption film 4 are the same, so that the first resonance structure 102, the second resonance structure 103 and the third resonance structure 104 are ensured to bear the same gravity action, and the localization of the device is realized.

The to-be-detected substance adsorption film 2 is fixed on the upper surface of the free end of the third resonant structure 104 in the array resonant structure 1 and only has adsorption effect on to-be-detected substances, and the fixed position of the to-be-detected substance adsorption film 2 on the upper surface of the free end of the third resonant structure 104 cannot exceed the groove position of the third resonant structure 104 close to the free end in the direction from the free end to the fixed end of the third resonant structure 104 so as to avoid vibration detuning of the third resonant structure 104;

The second detection substance adsorption film 3 is fixed on the upper surface of the free end of the second resonance structure 103 in the array resonance structure 1 and only has adsorption effect on the second detection substance, and the fixed position of the second detection substance adsorption film 3 on the upper surface of the free end of the second resonance structure 103 cannot exceed the groove position of the second resonance structure 103 close to the free end in the direction from the free end to the fixed end of the second resonance structure 103 so as to avoid vibration detuning of the second resonance structure 103; meanwhile, according to the quantity of the substance types to be detected when the device performs single-substance gravity detection, a plurality of adsorption films of different types of second detection substances can be fixed on the upper surface of the free end of the second resonance structure 103 in a non-overlapping manner on the premise that the total mass of the second detection substance adsorption films is unchanged and the fixed position of the second detection substance adsorption films is not beyond the position of the groove of the second resonance structure 103 close to the free end.

The film 4 without adsorption effect is fixed on the upper surface of the free end of the first resonant structure 102 in the array resonant structure 1 and has no adsorption effect, and the effect is to ensure that the first resonant structure 102, the second resonant structure 103 and the third resonant structure 104 bear the same gravity effect, so that the localization of the device is realized; the fixed position of the non-adsorption film 4 on the upper surface of the free end of the first resonant structure 102 cannot exceed the position of the groove of the first resonant structure 102 near the free end in the direction from the free end to the fixed end of the first resonant structure 102, so as to avoid vibration detuning of the first resonant structure 102.

As shown in fig. 2, a substance 5 to be measured is adsorbed on the upper surface of the substance adsorption film 2 to be measured; the second detecting substance 6 is adsorbed on the upper surface of the second detecting substance adsorbing film 3.

In this embodiment, when only the substance to be detected is adsorbed on the upper surface of the substance to be detected adsorption film, and the second detection substance adsorption film and the upper surface of the non-adsorption film are not adsorbed with the substance, the amplitude of the third resonance structure of the array resonance structure can be maximized, the eigenvector of the second resonance structure of the array resonance structure is kept unchanged, the multi-substance detection mechanism is not triggered at this time, and the gravity of the substance to be detected can be solved by the device eigenvalue and eigenvector change value at this time, thereby realizing high-sensitivity single-substance gravity detection.

In this embodiment, when the second detection material is adsorbed on the upper surface of the second detection material adsorption film in addition to the adsorption of the substance to be detected on the upper surface of the substance to be detected, and the substance is not adsorbed on the upper surface of the non-adsorption film, the eigenvector of the second resonant structure of the array resonant structure can be changed, and the detection of other doped second detection materials during the single-material gravity detection is realized by obtaining the information of the change of the eigenvector of the second resonant structure of the array resonant structure.

Example 2

The embodiment provides a high-sensitivity single-substance gravity detection and multi-substance detection method based on asymmetric localization, which specifically comprises the following steps:

First, in the array resonance structure, the coupling interval of the first coupling structure Coupling interval of second coupling structureThe following relationship is satisfied:

wherein, as shown in FIG. 5, the coupling interval Representing the horizontal distance between the side surface of the first coupling structure, which is close to the side of the first resonant structure fixed support, and the side surface of the first resonant structure fixed support, which is close to the side of the first coupling structure, which is equal in value to the horizontal distance between the side surface of the first coupling structure, which is close to the side of the second resonant structure fixed support, and the side surface of the second resonant structure fixed support, which is close to the side of the first coupling structure; coupling intervalRepresenting the horizontal distance between the side surface of the second coupling structure, which is close to the side of the third resonant structure fixed support, and the side surface of the third resonant structure fixed support, which is close to the side of the second coupling structure fixed support, which is equal in value to the horizontal distance between the side surface of the second coupling structure, which is close to the side of the second resonant structure fixed support, and the side surface of the second resonant structure fixed support, which is close to the second coupling structure; /(I)Is a constant measured by experiment, as shown in FIG. 8,Usually, the gravity detection is carried out before the gravity detection is carried out by calibrating experimental data;

Then, exciting a base of the array resonance structure so as to drive the device to vibrate integrally and promote the array resonance structure to localize, wherein the base and the upright post structure connected with each resonance structure can weaken vibration information in other directions outside the vertical direction to a certain extent, and further each resonance structure vibrates only in the vertical direction as much as possible;

Then, applying a substance to be detected into the device, and starting to perform gravity detection of the substance, wherein when single-substance gravity detection without doping of other second detection substances is performed, the substance to be detected is adsorbed on the upper surface of the substance to be detected adsorption film, and the substances are not adsorbed on the upper surfaces of the second detection substance adsorption film and the non-adsorption film, so that the device is localized;

then, according to the eigenvalue change value or eigenvector change value of the device at the moment, the gravity of the substance to be detected can be solved;

At this time, the derivation process of eigenvalue change value and eigenvector change value analysis expression of the device is as follows:

As shown in fig. 7, according to the lumped parameter physical model of the device, the free vibration motion equation of the device without the action of the gravity of the foreign substances is:

For the embodiment, the geometric shapes and material characteristics of the first resonant structure, the second resonant structure and the third resonant structure of the array resonant structure are consistent, the first resonant structure, the second resonant structure and the third resonant structure are arranged at equal intervals, and meanwhile, the mass of the substance to be detected adsorption film, the mass of the second detection substance adsorption film and the mass of the non-adsorption film are the same, so that the first resonant structure, the second resonant structure and the third resonant structure are ensured to bear the same gravity effect, and the localization of the device is realized; thus (2) ，The dimensionless eigen equation of the device thus obtained is:

Wherein the coupling coefficient Coupling coefficientAnd meetAs shown in FIG. 8,Usually, the gravity detection is carried out before the gravity detection is carried out by calibrating experimental data; /(I)Is the eigenvector of the device without the gravity intervention of the adsorption substance; /(I)Is the eigenvalue of the device without the gravity intervention of the adsorbed substances; Is the first, second and third order eigenfrequency of the device;

Wherein:

Wherein, ；

Eigenvector change values for devicesThe method comprises the following steps:

Then, when only the substance to be detected is adsorbed on the upper surface of the adsorption film for gravity detection and the device is not doped with the second detection substance except the substance to be detected, the adsorption film for the second detection substance and the upper surface of the film without adsorption function are not adsorbed with substances, at this time, the mathematical relationship of the coupling intervals of the first coupling structure and the second coupling structure on the array resonance structure enables the coupling coefficient of the device The following relationship is satisfied:

Finally, when the substance to be detected is doped with other second detection substances besides the substance to be detected, the substance to be detected is adsorbed on the upper surface of the adsorption film of the substance to be detected, the second detection substances are adsorbed on the upper surface of the adsorption film of the second detection substances, and the upper surface of the adsorption film is not adsorbed with the substances, at the momentNo longer 0, once detectedThe detection mechanism is triggered immediately, so that the device can detect other second detection substances doped in the device when the gravity detection of the substances to be detected is performed.

FIG. 4 is a schematic diagram of a structure in which only a single-substance gravity detection is performed when no other second detecting substance is doped, the substance to be detected is adsorbed on the upper surface of the substance to be detected adsorption film, and the substances are not adsorbed on the upper surfaces of the second detecting substance adsorption film and the non-adsorption film, at this time, the eigenvector of the second resonance structure of the array resonance structure remains unchanged, the detection mechanism is not triggered, and the gravity of the substance to be detected can be solved according to the eigenvalue change value or eigenvector change value of the device at this time;

FIG. 6 is a schematic block diagram of the operation principle of the single-substance gravity detection and multi-substance detection method, and it can be seen that the device performs single-substance gravity detection when the eigenvector of the second resonance structure of the array resonance structure remains unchanged, and detects the doped second detection substance during single-substance gravity detection when the eigenvector of the second resonance structure of the array resonance structure changes;

FIG. 7 is a schematic diagram of a lumped parameter physical model of a gravity sensing and material detection device;

FIG. 8 is a schematic diagram showing the fitting relationship between the coupling interval between the surface of the coupling structure near the substrate and the coupling coefficient, which is a linear relationship with the square of the coupling interval, i.e ，The constant measured by calibration experimental data before gravity detection is adopted, which means that the coupling coefficient can be rapidly solved according to the coupling interval, and vice versa;

FIG. 9 is a diagram showing the quantitative relationship between the first-order eigenvector change value of the array resonance structure and the relative gravity of the material to be measured, which is measured by the experiment of example 1 of the present invention, when no other second detecting material is doped, it can be seen that the first-order modal eigenvector change value of the second resonance structure The fact that no other second detection substances except the substances to be detected are doped at the moment is explained, and the gravity of the substances to be detected can be solved according to the eigenvalue change value or eigenvector change value of the device at the moment;

FIG. 10 is a diagram showing the quantitative relationship between the first-order eigenvector change value of the array resonance structure and the relative gravity of the measured substance for detecting the doped second detection substance in single-substance gravity detection according to the experiment of example 1 of the present invention, and it can be seen that the first-order modal eigenvector change value of the second resonance structure Indicating that other second detection substances are doped except the substances to be detected in the device at the moment, and triggering a multi-substance detection mechanism at the moment;

FIG. 11 is a diagram showing the quantitative relationship between the relative gravity of the detected material and the second order eigenvalue change value of the array resonance structure, which is obtained by experimental measurement without doping of other second detection materials, wherein the sensitivity of the second order eigenvalue of the asymmetric localized array resonance structure with different coupling intervals is higher than that of the symmetric localized array resonance structure with the same coupling intervals, and the sensitivity of the embodiment 1 of the invention is higher than that of the conventional array resonance structure with the same coupling stiffness based on symmetric localization;

FIG. 12 is a diagram showing the quantitative relationship between the magnitude of the relative gravity of the measured substance and the change value of the third-order eigenvalue of the array resonance structure, which is obtained by experimental measurement without doping of other second detection substances, and clearly shows that the sensitivity of the third-order eigenvalue of the asymmetric localized array resonance structure with different coupling intervals is higher than that of the symmetric localized array resonance structure with the same coupling intervals, and the sensitivity of the embodiment 1 of the invention is higher than that of the conventional array resonance structure with the same coupling stiffness based on symmetric localization;

The foregoing description is only a preferred embodiment of the present invention and is not intended to limit the invention, but it will be apparent to those skilled in the art that various modifications, equivalent substitutions, and improvements can be made within the spirit and principles of the present invention.

Claims

1. A high sensitivity single-substance gravity detection and multi-substance detection device, comprising: the device comprises an array resonance structure, a substance to be detected adsorption film, a second detection substance adsorption film and an adsorption-free film; the array resonant structure includes: the base, first resonance structure, second resonance structure, third resonance structure, first coupling structure, and second coupling structure, first resonance structure, second resonance structure and third resonance structure pass through rectangular stand equidistance and arrange on the base, and the stiff end of second resonance structure is opposite with the stiff end of first resonance structure, third resonance structure, there is not adsorption film, second detection material adsorption film and the material adsorption film that awaits measuring install in proper order on first resonance structure, second resonance structure, third resonance structure, the both ends of first coupling structure link firmly with the side surfaces of first resonance structure, second resonance structure, the both ends of second coupling structure link firmly with the side surfaces of second resonance structure, third resonance structure, after the base receives the excitation with vibration transfer to first resonance structure, second resonance structure, third resonance structure, first coupling structure and second coupling structure, and through first resonance structure, second detection material adsorption film, the second detection material adsorption film on the third resonance structure, the gravity detection material adsorption film detects and detects with the first resonance structure and second eigenvalued time difference between the first resonance structure, second resonance structure and second resonance structure.

2. The high-sensitivity single-substance gravity detection and multi-substance detection device according to claim 1, wherein the base is in a shape of a circular table, the base is excited in multiple directions and drives the array resonance structure to vibrate integrally, and the vertical rectangular upright columns connected with the first resonance structure, the second resonance structure and the third resonance structure are used as fixed supports for weakening vibration information in other directions outside the vertical direction, so that the first resonance structure, the second resonance structure and the third resonance structure vibrate only in the vertical direction.

3. The high-sensitivity single-substance gravity detection and multi-substance detection device according to claim 1, wherein the shapes and materials of the first resonant structure, the second resonant structure and the third resonant structure are consistent, and grooves are formed in the positions close to the fixed ends of the first resonant structure, the second resonant structure and the third resonant structure so as to avoid vibration detuning of the first resonant structure, the second resonant structure and the third resonant structure when the distance between the first coupling structure and the second coupling structure is too close to the fixed ends of the first resonant structure, the fixed ends of the second resonant structure and the fixed ends of the third resonant structure; the first resonance structure, the second resonance structure and the third resonance structure are also provided with grooves at positions close to the free ends of the first resonance structure, the second resonance structure and the third resonance structure so as to limit the fixed positions of the adsorption-free film, the second detection substance adsorption film and the substance to be detected on the first resonance structure, the second resonance structure and the third resonance structure, and vibration detuning is avoided when the fixed positions of the adsorption-free film, the second detection substance adsorption film and the substance to be detected on the first resonance structure, the second resonance structure and the third resonance structure are far away from the free ends of the first resonance structure, the second resonance structure and the third resonance structure.

4. The high-sensitivity single-substance gravity detection and multi-substance detection device according to claim 1, wherein the shapes and materials of the first coupling structure and the second coupling structure of the array resonance structure are consistent, the positions of the first coupling structure and the second coupling structure on the second resonance structure are adjusted by an eigenvector calculation module, the first coupling structure and the second coupling structure after the positions are adjusted ensure that the second resonance structure is not influenced by the external action acting on the third resonance structure, and even if the first resonance structure and the third resonance structure are influenced by the gravity of the external substance, the eigenvectors of the second resonance structure are kept unchanged; the first coupling structure and the second coupling structure are I-shaped, and through holes are formed in the first coupling structure and the second coupling structure, so that the coupling contact length of the first coupling structure and the second coupling structure with the first resonance structure, the second resonance structure and the third resonance structure can be prolonged, and the energy dissipation caused by self damping can be reduced.

5. The device of claim 1, wherein the thicknesses of the first and second coupling structures are consistent with the thicknesses of the cantilevers of the first, second and third resonant structures to ensure that the energy transfer efficiency between the first and second coupling structures and the first, second and third resonant structures is maximized when the array resonant structures are localized; the horizontal distance between the side surface of the first coupling structure, which is close to the side of the first resonant structure fixed support, and the side surface of the first coupling structure, which is close to the side of the first resonant structure fixed support, is equal to the horizontal distance between the side surface of the first coupling structure, which is close to the side of the second resonant structure fixed support, and the side surface of the second resonant structure fixed support, which is close to the side of the first coupling structure; the horizontal distance between the side surface of the second coupling structure, which is close to the side of the third resonance structure fixed support, and the side surface of the third resonance structure fixed support, which is close to the side of the second coupling structure, is equal to the horizontal distance between the side surface of the second coupling structure, which is close to the side of the second resonance structure fixed support, and the side surface of the second resonance structure fixed support, which is close to the side of the second coupling structure.

6. The device for detecting and detecting the gravity of the single substance with high sensitivity according to claim 1, wherein the mass of the substance to be detected, the mass of the second detecting substance and the mass of the non-adsorbing film are the same, so as to ensure that the first resonant structure, the second resonant structure and the third resonant structure bear the same gravity;

7. The device for detecting and detecting the gravity of the single substance with high sensitivity according to claim 4, wherein the eigenvector calculation module is used for adjusting the spatial distribution positions of the first coupling structure and the second coupling structure, and performing output control on the second resonance structure, so that the eigenvector of the eigenvector can keep the variation equal to zero no matter whether the third resonance structure has external gravity or not, thereby not only utilizing the third resonance structure acted by the substance to be detected to perform gravity detection, but also utilizing the first resonance structure and the second resonance structure to perform energy transfer through the first coupling structure and the second coupling structure, so that the gravity detection sensitivity of the third resonance structure is improved, and utilizing the second resonance structure to perform multi-substance detection while performing single-substance gravity detection.

8. The method for detecting the high-sensitivity single-substance gravity detection and multi-substance detection device according to claim 1, comprising the following steps:

；

Wherein, For the mass sum of the first resonant structure and the non-adsorption film,For the mass sum,/>, of the second resonant structure and the second probe species adsorbing filmThe mass sum of the adsorption film for the third resonance structure and the substance to be detected; /(I)、、The free end vibration displacement of the first resonance structure, the second resonance structure and the third resonance structure is respectively represented; /(I)、、The second derivatives of the free end vibration displacement of the first resonance structure, the second resonance structure and the third resonance structure are respectively represented; /(I)、、Respectively representing equivalent rigidities of the first resonant structure, the second resonant structure and the third resonant structure; /(I) Respectively representing the coupling rigidity of the first coupling structure and the second coupling structure;

；

Wherein: ；

；

Wherein, ；

Eigenvector change values for devicesThe method comprises the following steps:

；

at this time, because The second resonance structure is not affected by the gravity of external substances, and the multi-substance detection mechanism is not triggered, i.e. the substances to be detected are not doped with other substances except the substances to be detected, so that the gravity/>, of the substances to be detected can be solved according to the eigenvalue change value or eigenvector change value of the deviceThereby realizing the detection of the device on the gravity of the single substance;

Step S5: when the substance to be detected is doped with a second detection substance other than the substance to be detected, the substance to be detected is adsorbed on the upper surface of the adsorption film of the substance to be detected, the second detection substance is adsorbed on the upper surface of the adsorption film of the second detection substance, and the upper surface of the adsorption film is not adsorbed with the substance without adsorption effect, at the moment No longer 0, once detectedThe detection mechanism is triggered immediately, so that the device can detect other second detection substances doped in the device when the gravity detection of the substances to be detected is performed.