CN117912933A - Device for acquiring initial energy distribution state of plasma - Google Patents
Device for acquiring initial energy distribution state of plasma Download PDFInfo
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- CN117912933A CN117912933A CN202311787025.6A CN202311787025A CN117912933A CN 117912933 A CN117912933 A CN 117912933A CN 202311787025 A CN202311787025 A CN 202311787025A CN 117912933 A CN117912933 A CN 117912933A
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Abstract
The invention discloses a device for acquiring an initial energy distribution state of plasma, which comprises an ion source, a repulsion pulse electrode and a time-of-flight mass analyzer which are sequentially and symmetrically arranged at the left side and the right side of the ion source, and a plurality of ion screening pulse electrodes and a plurality of ion detectors which are arranged on the time-of-flight mass analyzer; the ion source is used for ionizing the sample, the ionized sample forms plasma, and the plasma contains ionized gaseous substances consisting of positive and negative ions; the repulsion pulse electrodes are arranged on the left side and the right side of the ion generation area and output pulse high voltages with synchronous pulse width, equal amplitude and opposite polarity; the time-of-flight mass analyzer is arranged in the flight direction of ions and is used for separating ions with different mass-to-charge ratios or different planes on the time-of-flight mass analyzer, and the separated ions are directly detected by the ion detector or are repelled to the ion detector by the ion screening pulse electrode to be detected, so that the intensity information of different ion flows can be obtained.
Description
Technical Field
The invention relates to the technical field of mass spectrometry, in particular to a device for acquiring an initial energy distribution state of plasma.
Background
Time-of-flight mass spectrometry is one of the techniques for measuring high-speed ion beams, and the mass analyzer of such a mass spectrometer is an ion drift tube. Ions generated by the ion source are first collected. All ion velocities in the collector become 0. A pulsed electric field is used to accelerate and then enter the field-free drift tube and fly at a constant velocity toward the ion receiver. The greater the ion mass, the longer it takes to reach the receiver; the smaller the mass of the ions, the shorter the time it takes to reach the receiver, and according to this principle ions of different masses can be separated according to the m/x value. The mass-to-charge ratio of the ion is obtained according to the flight time of the ion, and the ion mass analyzer has the advantages of quick, accurate, qualitative and quantitative analysis and simultaneous analysis of various ions, and is particularly suitable for ion clusters or ion beams with complex components generated in short time and transient state. The traditional time-of-flight mass spectrometer can realize detection of electric signals of different ions, and the change of the ion quantity is reflected by the change of the intensity of the electric signals of the ions received by the detector.
The resolution r=t/2 Δt of the time-of-flight mass spectrum, where t is the average time of flight of the ions, Δt is the time difference of flight of the ions, and the initial kinetic energy divergence of ions of the same mass-to-charge ratio causes a difference in the flight speeds of the ions, thereby causing a time difference in the flight speeds of the ions, which increases with an increase in the energy dispersion of the ions, resulting in a decrease in the mass resolution of the mass spectrometer. Therefore, in order to improve the mass resolution of time-of-flight mass spectrometry, the impact of the initial spatial position of the dispersed ions and the ion energy must be reduced. To reduce the initial energy dispersion of the dispersed ions, different ion initial energy states must be analyzed. In addition, with the continuous and deep research of the physical state and the collision reaction rule of the ions, the analysis of the original energy state of the ions can realize the characterization of the physical process, the measurement of the charge distribution state of the ions and the disclosure of the collision reaction dynamics rule.
In addition, in the prior art, when the ion agglomeration condition is required to be acquired, a fluorescent screen can be arranged at the position of a detector of the time-of-flight mass spectrometer to replace an anode plate in the detector to receive ions reaching a detection surface, the ion imaging condition is observed to obtain the space distribution condition of the ions, and the energy distribution state of the ions is reversely calculated through the imaging light spot size. However, this method generally only can obtain the energy distribution of the ion group in one dimension direction, and reflects the energy distribution of all ions in the ion group, and cannot specifically analyze the energy distribution of the ions with a specific mass-to-charge ratio.
Disclosure of Invention
The present invention is directed to overcoming at least one of the above-mentioned drawbacks (shortcomings) of the prior art and providing a device for acquiring an initial energy distribution state of a plasma, so as to achieve an effect of more comprehensively reflecting the initial energy distribution of the plasma.
The technical scheme adopted by the invention is as follows:
The device for acquiring the initial energy distribution state of the plasma comprises an ion source, repulsion pulse electrodes and a time-of-flight mass analyzer which are sequentially and symmetrically arranged at the left side and the right side of the ion source, and a plurality of ion screening pulse electrodes and a plurality of ion detectors which are arranged on the time-of-flight mass analyzer;
The ion source is used for ionizing the sample, the ionized sample forms plasma, and the plasma contains ionized gaseous substances consisting of positive and negative ions;
The repulsion pulse electrodes are arranged on the left side and the right side of the ion generation area, and pulse high voltages with synchronous pulse width, equal amplitude and opposite polarity are output through the variable polarity pulse circuit;
The time-of-flight mass analyzer is arranged in the flight direction of ions and is used for separating ions with different mass-to-charge ratios or striking different planes on the time-of-flight mass analyzer, and the separated ions are directly detected by the ion detector or are repelled to the ion detector by the ion screening pulse electrode to be detected, so that the intensity information of different ion flows can be obtained.
According to the device for acquiring the initial energy distribution state of the plasma, the repulsion pulse electrode is a repulsion pulse grid electrode plate, the repulsion pulse grid electrode plate comprises a front surface and a back surface, the front surface is a surface opposite to an ion source, and a metal wire grid is arranged on the front surface.
According to the device for acquiring the initial energy distribution state of the plasma, the flight time mass analyzer comprises an acceleration area, a field-free flight area and a detection area which are sequentially arranged, wherein the acceleration area is arranged on one side close to a repulsion pulse electrode, the detection area is arranged on one side far away from the repulsion pulse electrode, and the ion screening pulse electrode and the ion detector are arranged on the detection area; the interior of the field-free flight zone is an equipotential zone so that ions can pass through the field-free flight zone at a uniform speed.
According to the device for acquiring the initial energy distribution state of the plasma, the accelerating area comprises a plurality of hollow metal pole pieces in the interior, the metal pole pieces are arranged in parallel, the hollow positions of the metal pole pieces are sequentially communicated for ions to pass through, and ceramic gaskets are arranged between the adjacent metal pole pieces for insulation.
According to the device for acquiring the initial energy distribution state of the plasma, the metal pole pieces are annular or square in shape, the intervals between adjacent metal pole pieces are consistent, and a certain distance is reserved between each metal pole piece and a field-free flight zone.
According to the device for acquiring the initial energy distribution state of the plasma, the same high-voltage resistor is used for dividing the voltage between every two layers of metal pole pieces so as to form a uniform electric field, and ions pass through an acceleration region and enter the electric field to acquire a certain flying speed.
According to the device for acquiring the initial energy distribution state of the plasma, the field-free flight area and the detection area are surrounded by the stainless steel sheet metal to form an internal hollow structure, the field-free flight area is arranged on the front half part of the stainless steel sheet metal, the detection area is arranged on the rear half part of the stainless steel sheet metal, the ion screening pulse electrode and the ion detector are arranged on the stainless steel sheet metal, and one surface of the stainless steel sheet metal, which is close to the acceleration area, is an opening surface so that ions can pass through the opening surface.
According to the device for acquiring the initial energy distribution state of the plasma, the ion detector comprises a first detector, a second detector and a third detector which are arranged on the stainless steel sheet metal, and the ion screening pulse electrode comprises a first screening pulse electrode arranged opposite to the second detector and a second screening pulse electrode arranged opposite to the third detector; the ion screening pulse electrode is used for pushing ions to an ion detector opposite to the ion screening pulse electrode, and when the ion screening pulse electrode pushes ions, a needed potential difference is provided through an ion pulse circuit.
According to the device for acquiring the initial energy distribution state of the plasma, the stainless steel sheet metal is enclosed into the shape of a hollow cylinder, wherein the flying direction of ions is taken as the length direction of the stainless steel sheet metal, the first side surface of the surface enclosed by the width and the height of the stainless steel sheet metal is set, the surface enclosed by the length and the height of the stainless steel sheet metal is a second side surface, the surface enclosed by the length and the width of the stainless steel sheet metal is a third side surface, the first side surface is positioned on the surface far away from an acceleration zone, the first detector is arranged on the first side surface, the second detector and the first screening pulse electrode are respectively arranged on the second side surface and are opposite, and the third detector and the third screening pulse electrode are respectively arranged on the third side surface and are opposite.
According to the device for acquiring the initial energy distribution state of the plasma, the ion detector comprises a micro-channel plate and a fluorescent screen which are sequentially connected, ions entering the ion detector collide with the micro-channel plate first, secondary electrons are generated for amplification, then the secondary electrons are beaten onto the fluorescent screen, and the secondary electrons are converted into optical signals through the fluorescent screen, so that ion energy distribution information is acquired;
Or the ion detector comprises a micro-channel plate and an anode plate which are connected in sequence, ions entering the ion detector collide with the micro-channel plate first, secondary electrons are generated for amplification and then strike the anode plate, and ion signals are formed through the derivation of the anode plate, so that the intensity of ion flow is obtained.
Compared with the prior art, the invention has the beneficial effects that:
The invention designs the straight line symmetrical flight time mass analyzers at the left and right sides of the ion source, and respectively applies pulse electric fields with different polarities to the plasma clusters in the initial state so as to respectively detect positive and negative ions. Meanwhile, the ion detectors are arranged in the three dimensional directions of the flight time mass analyzers on the left side and the right side, the repulsion pulse electrode and the ion screening pulse electrode are arranged, and a pulse electric field is applied to the ion screening pulse electrode, so that detection of the energy distribution states of ions with different mass-to-charge ratios in plasma in three dimensions is realized, acquisition of the energy distribution information of the ions in different dimensions is realized, the initial energy distribution of the plasma is reflected more comprehensively, and the modulation of the plasma state is facilitated.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a schematic diagram of ion flow intensity of two ions.
Fig. 3 is a schematic structural view of a microchannel plate.
Detailed Description
The drawings are for illustrative purposes only and are not to be construed as limiting the invention. For better illustration of the following embodiments, some parts of the drawings may be omitted, enlarged or reduced, and do not represent the actual product dimensions; it will be appreciated by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.
Example 1
As shown in fig. 1, the present embodiment discloses a device for acquiring an initial energy distribution state of plasma, which comprises an ion source 100, repulsion pulse electrodes 200 and a time-of-flight mass analyzer which are symmetrically arranged on the left side and the right side of the ion source 100 in sequence, and two groups of ion screening pulse electrodes and three groups of ion detectors which are arranged on the time-of-flight mass analyzer.
The ion source 100 is a vacuum arc discharge ion source 100, which is used for ionizing a sample through vacuum arc discharge, and forms plasma after ionization, wherein the plasma contains ionized gaseous substances consisting of positive and negative ions.
The repulsive pulse electrodes 200 are disposed on the left and right sides of the ion source 100, in this embodiment, the repulsive pulse electrodes 200 are repulsive pulse grid pole pieces, each repulsive pulse grid pole piece includes a front surface and a back surface, the front surface is opposite to the ion source 100, and metal wire grids are wound on the front surface, so that the electric field distribution can be more uniform. The repulsive pulse electrodes 200 on the left and right sides of the ion source 100 respectively carry pulse high voltages with synchronous pulse widths, equal amplitudes and opposite polarities. Specifically, the pulse high voltages with synchronous pulse widths, equal amplitudes and opposite polarities carried by the repulsive pulse electrodes 200 are output through the variable polarity pulse circuit and applied to the repulsive pulse electrodes 200. In this embodiment, the variable polarity pulse circuit applies a positive pulse to the repeller pulse electrode 200 on the left side of the ion source 100 and a negative pulse to the repeller pulse electrode 200 on the right side of the ion source 100. The polarity of the pulse voltage output by the variable polarity pulse circuit can be switched according to the test requirement, that is, a negative pulse can be applied to the repulsive pulse electrode 200 on the left side of the ion source 100, and a positive pulse can be applied to the repulsive pulse electrode 200 on the right side of the ion source 100.
Further, the time-of-flight mass analyzer is arranged in the direction of the ion flight and is used for separating ions with different mass-to-charge ratios or striking different planes on the time-of-flight mass analyzer, and the separated ions are directly detected by the ion detector or are repelled to the ion detector by the ion screening pulse electrode to be detected, so that the intensity information of different ion flows can be obtained. Specifically, the flight time mass analyzer is a linear symmetric flight time mass analyzer based on the bilateral symmetry design of the ion source 100, and the two linear symmetric flight time mass analyzers have consistent layout and functions and can detect ions with positive and negative polarities in plasmas at two sides at the same time.
Further, the time-of-flight mass analyzer comprises an acceleration zone 310, a field-free flight zone 320 and a detection zone 330, which are sequentially arranged, wherein the acceleration zone 310 is arranged at one side close to the repulsive pulse electrode 200, the detection zone 330 is arranged at one side far away from the repulsive pulse electrode 200, and the ion screening pulse electrode and the ion detector are arranged on the detection zone 330. Specifically, the accelerating region 310 includes a plurality of hollow annular or square metal pole pieces, the hollow positions of the metal pole pieces are sequentially communicated for passing ions, and ceramic gaskets are arranged between adjacent metal pole pieces for insulation.
Further, the metal pole piece is a stainless steel pole piece, the hollow position of the metal pole piece is a circular through hole, and the metal pole pieces are coaxially and parallelly arranged in sequence, namely, the circle centers of the circular through holes are on the same straight line.
Further, voltage division is performed between every two layers of metal pole pieces through the same high-voltage resistor so as to form a uniform electric field, and ions pass through the acceleration region 310 and enter the electric field to obtain a certain flying speed. In the embodiment, the ion-permeable metal electrode comprises 3 groups of metal electrode plates, wherein the metal electrode plates are square in periphery and round through holes in inner periphery, and the round through holes are used for allowing ions to pass through; and a certain interval is reserved between the adjacent metal pole pieces, between the metal pole pieces and the repulsive pulse electrode 200 and between the metal pole pieces and the field-free flight zone 320, so that the uniform distribution of potential surfaces in the pole pieces is ensured.
In this embodiment, the shape of the repulsive pulse grid pole piece on the repulsive pulse electrode 200 is identical to that of the metal pole piece on the accelerating region 310, so that the electric field is more uniform.
The field-free flight zone 320 and the detection zone 330 are surrounded into an internal hollow structure by stainless steel sheet metal, specifically are in a shape of a hollow cuboid, the field-free flight zone 320 is arranged on the front half part of the stainless steel sheet metal, the detection zone 330 is arranged on the rear half part of the stainless steel sheet metal, the ion screening pulse electrode and the ion detector are arranged on the stainless steel sheet metal, one surface of the stainless steel sheet metal, which is close to the acceleration zone 310, is an opening surface, and an equipotential zone is formed in the field-free flight zone 320 by applying high pressure with a certain amplitude so that ions uniformly pass through.
Further, the ion detector includes a first detector 410, a second detector 420 and a third detector 430 disposed on the stainless steel sheet metal, and the ion screening pulse electrode includes a first screening pulse electrode 510 disposed opposite to the second detector 420 and a second screening pulse electrode 520 disposed opposite to the third detector 430; the ion screening pulse electrode is used for pushing ions to an ion detector opposite to the ion screening pulse electrode, and when the ion screening pulse electrode pushes ions, a needed potential difference is provided through an ion pulse circuit.
The first side surface a of the surface surrounded by the width and the height of the stainless steel sheet metal is set as the length direction of the stainless steel sheet metal, the surface surrounded by the length and the height of the stainless steel sheet metal is the second side surface B, the surface surrounded by the length and the width of the stainless steel sheet metal is the third side surface C, the first side surface a is located at the surface far away from the acceleration area 310, the first detector 410 is arranged on the first side surface a, the second detector 420 and the first screening pulse electrode 510 are respectively arranged on the second side surface B and are opposite in position, and the third detector 430 and the third screening pulse electrode are respectively arranged on the third side surface C and are opposite in position.
Specifically, ions may selectively reach the first side a, the second side B, or the third side C as they fly into the detection zone 330.
When the ions reach the first side a, the first detector 410 detects the ions.
When the ions reach the second side B and reach the first screening pulse electrode 510, the ion screening pulse circuit outputs a pulse high voltage to the first screening pulse electrode 510, so that the ions fly to the ion detector opposite to the first screening pulse electrode 510, that is, the ions are repelled to the second detector 420 so as to be detected by the second detector 420;
when ions reach the third side C and reach the second screening pulse electrode 520, the ion screening pulse circuit outputs a pulse high voltage to the second screening pulse electrode 520 to repel ions flying to the second screening pulse electrode 520 to the opposite side of the second screening pulse electrode 520, i.e., onto the third detector 430, so as to be detected by the third detector 430.
The time for the ion to reach the ion screening pulse electrode can be estimated from the time of flight value of the ion.
As shown in fig. 3, further, the ion detector includes a microchannel plate 401 and a fluorescent screen 402 connected in sequence, the fluorescent screen 402 is disposed at the rear of the microchannel plate 401, ions entering the ion detector collide with the microchannel plate 401 first, secondary electrons are amplified, and then strike the fluorescent screen 402, and are converted into optical signals through the fluorescent screen 402, thereby obtaining ion energy distribution information; the ion focusing condition can be intuitively observed through the ion energy distribution information.
Specifically, a plurality of groups of inclined and parallel micro-channel through holes are disposed on the micro-channel plate 401, wherein the inclination directions of the micro-channel through holes on two adjacent micro-channel plates 401 are opposite. The fluorescent screen 402 is a screen in which an aluminum film is covered on a fluorescent powder thin layer by adopting a vacuum coating technology in a glass screen interlayer, and the main principle is that charged ions are bombarded to the screen to generate luminous compounds, so that an electric signal is converted into an optical signal, and the ion focusing condition can be visually seen through the optical signal.
When the ions are converted into light signals on the fluorescent screen 402, the light-emitting brightness and the light spot position of the fluorescent sheet can be photographed by adjusting the lens voltage of the high-speed camera, so that the ion energy distribution information can be obtained. When the energy distribution of ions with different mass-to-charge ratios is required to be obtained, the pulse interval of the ion screening pulse electrode is set to be the time difference of the ions with different mass-to-charge ratios reaching the ion screening pulse electrode, so that the ions with different mass-to-charge ratios can sequentially reach the same ion detector, and spot images at different moments are recorded, namely the energy distribution of the ions with different mass-to-charge ratios is represented.
Alternatively, the ion detector comprises a microchannel plate 401 and an anode plate connected in sequence, wherein the phosphor screen 402 and the anode plate are interchangeable. The anode plate is arranged at the rear of the micro-channel plate 401, ions entering the ion detector collide with the micro-channel plate 401 first, secondary amplification is generated, the ions are then beaten on the anode plate, ion signals are formed through the output of the anode plate, and the ion signals are transmitted to the acquisition card, so that the intensity of ion flow is obtained.
In this embodiment, the first detector 410 is provided with a microchannel plate 401 and an anode plate, and the second detector 420 and the third detector 430 are provided with a microchannel plate 401 and a phosphor screen 402. Wherein the arrangement is such that the first detector 410 detects first the intensity information of the different ions in the ion stream. The other two detectors detect the energy distribution of the ions in two dimensions
Further, when the two ion mass-to-charge ratios are different and detection by the same ion detector is required, the larger one of the two ion mass-to-charge ratios reaches the same ion screening pulse electrode later. At this time, the pulse interval is set to be the time difference that two ions reach the same ion screening pulse electrode, so that ions with different mass-to-charge ratios are sequentially beaten onto the same ion detector, and energy distribution information of different ions can be detected through the same ion detector.
For example, as shown in fig. 2, after the ion source 100 ionizes, a positive ion a+ with a mass number a and a positive ion b+ with a mass number B are generated, wherein the mass-to-charge ratio of the positive ion b+ is greater than that of the positive ion a+, and then the positive ion b+ arrives at the same ion screening pulse electrode later than the positive ion a+, at this time, the pulse interval is set to be the time difference between two ions arriving at the same ion screening pulse electrode, so that the positive ion a+ and the positive ion b+ strike the same ion detector in sequence, and energy distribution of different ions on the same plane can be obtained.
In addition, since the time-of-flight mass analyzers are disposed on both the left and right sides of the ion source 100, the same ion screening pulse electrodes and ion detectors are disposed in the symmetric time-of-flight mass analyzers, so that when the repulsive pulse electrodes apply pulse voltages of different polarities, ions of different polarities in the plasma fly in opposite directions respectively, and the ion detectors in the time-of-flight mass analyzers on both sides capture images of ion spots of different polarities respectively, so as to obtain energy distribution information of each dimension of the ion spot images.
It should be understood that the foregoing examples of the present invention are merely illustrative of the present invention and are not intended to limit the present invention to the specific embodiments thereof. Any modification, equivalent replacement, improvement, etc. that comes within the spirit and principle of the claims of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. The device for acquiring the initial energy distribution state of the plasma is characterized by comprising an ion source, repulsion pulse electrodes and a time-of-flight mass analyzer which are sequentially and symmetrically arranged at the left side and the right side of the ion source, and a plurality of ion screening pulse electrodes and a plurality of ion detectors which are arranged on the time-of-flight mass analyzer;
The ion source is used for ionizing the sample, the ionized sample forms plasma, and the plasma contains ionized gaseous substances consisting of positive and negative ions;
The repulsion pulse electrodes are arranged on the left side and the right side of the ion generation area, and pulse high voltages with synchronous pulse width, equal amplitude and opposite polarity are output through the variable polarity pulse circuit;
The time-of-flight mass analyzer is arranged in the flight direction of ions and is used for separating ions with different mass-to-charge ratios or striking different planes on the time-of-flight mass analyzer, and the separated ions are directly detected by the ion detector or are repelled to the ion detector by the ion screening pulse electrode to be detected, so that the intensity information of different ion flows can be obtained.
2. The apparatus of claim 1, wherein the repeller pulse electrode is a repeller pulse grid pole piece, the repeller pulse grid pole piece comprises a front face and a back face, the front face is a face opposite to the ion source, and the front face is provided with a wire grid.
3. The apparatus of claim 1, wherein the time-of-flight mass analyzer comprises an acceleration zone, a field-free flight zone, and a detection zone sequentially disposed, the acceleration zone being disposed on a side near the repelled pulsed electrode, the detection zone being disposed on a side remote from the repelled pulsed electrode, and the ion screening pulsed electrode and the ion detector being disposed on the detection zone; the interior of the field-free flight zone is an equipotential zone so that ions can pass through the field-free flight zone at a uniform speed.
4. A device for acquiring an initial energy distribution state of a plasma according to claim 3, wherein the accelerating region comprises a plurality of metal pole pieces hollow in the interior, the plurality of metal pole pieces are arranged in parallel, the hollow positions of the metal pole pieces are sequentially communicated for allowing ions to pass through, and ceramic gaskets are arranged between adjacent metal pole pieces for insulation.
5. The apparatus of claim 4, wherein the metal pole pieces are annular or square in shape, the spacing between adjacent metal pole pieces is uniform, and the metal pole pieces are spaced a distance from the field-free flight zone.
6. The apparatus of claim 4, wherein the same high voltage resistor is used to divide the voltage between each two metal electrode plates to form a uniform electric field, and ions pass through the accelerating region and then enter the electric field to obtain a certain flying speed.
7. The device for acquiring the initial energy distribution state of the plasma according to claim 1, wherein the field-free flight area and the detection area are surrounded by a stainless steel sheet metal to form an internal hollow structure, the field-free flight area is arranged on the front half part of the stainless steel sheet metal, the detection area is arranged on the rear half part of the stainless steel sheet metal, the ion screening pulse electrode and the ion detector are arranged on the stainless steel sheet metal, and one surface of the stainless steel sheet metal, which is close to the acceleration area, is an opening surface so that ions can pass through.
8. The apparatus of claim 7, wherein the ion detectors comprise a first detector, a second detector and a third detector disposed on stainless steel sheet metal, respectively, and the ion screening pulse electrodes comprise a first screening pulse electrode disposed opposite the second detector and a second screening pulse electrode disposed opposite the third detector; the ion screening pulse electrode is used for pushing ions to an ion detector opposite to the ion screening pulse electrode, and when the ion screening pulse electrode pushes ions, a needed potential difference is provided through an ion pulse circuit.
9. The apparatus for acquiring the initial energy distribution state of the plasma according to claim 8, wherein the stainless steel sheet metal encloses a shape of a hollow cylinder, wherein a flight direction of the ions is a length direction of the stainless steel sheet metal, a first side surface of a surface enclosed by a width and a height of the stainless steel sheet metal is set, the surface enclosed by the length and the height of the stainless steel sheet metal is a second side surface, the surface enclosed by the length and the width of the stainless steel sheet metal is a third side surface, the first side surface is positioned at a surface far from the acceleration region, the first detector is arranged on the first side surface, the second detector and the first screening pulse electrode are respectively arranged on the second side surface and are opposite, and the third detector and the third screening pulse electrode are respectively arranged on the third side surface and are opposite.
10. The apparatus of claim 1, wherein the ion detector comprises a microchannel plate and a fluorescent screen connected in sequence, ions entering the ion detector collide with the microchannel plate first, secondary electron amplification is generated, and then the secondary electrons are applied to the fluorescent screen and converted into optical signals through the fluorescent screen, thereby obtaining ion energy distribution information;
Or the ion detector comprises a micro-channel plate and an anode plate which are connected in sequence, ions entering the ion detector collide with the micro-channel plate first, secondary electrons are generated for amplification and then strike the anode plate, and ion signals are formed through the derivation of the anode plate, so that the intensity of ion flow is obtained.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311787025.6A CN117912933A (en) | 2023-12-22 | 2023-12-22 | Device for acquiring initial energy distribution state of plasma |
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| CN202311787025.6A CN117912933A (en) | 2023-12-22 | 2023-12-22 | Device for acquiring initial energy distribution state of plasma |
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