CN117545162B - Pre-excitation ignition device of remote plasma source and control method thereof - Google Patents
Pre-excitation ignition device of remote plasma source and control method thereof Download PDFInfo
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- CN117545162B CN117545162B CN202311489136.9A CN202311489136A CN117545162B CN 117545162 B CN117545162 B CN 117545162B CN 202311489136 A CN202311489136 A CN 202311489136A CN 117545162 B CN117545162 B CN 117545162B
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- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
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- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 description 2
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- 229960000909 sulfur hexafluoride Drugs 0.000 description 2
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/36—Circuit arrangements
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2242/00—Auxiliary systems
- H05H2242/20—Power circuits
- H05H2242/22—DC, AC or pulsed generators
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2245/00—Applications of plasma devices
- H05H2245/40—Surface treatments
- H05H2245/42—Coating or etching of large items
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
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Abstract
The invention discloses a pre-excitation ignition device of a remote plasma source and a control method thereof in the technical field of plasma sources. The pre-ignition device comprises: the device comprises a control unit, a PWM driving unit, a resonant converter, an ignition circuit, an output sampling unit and an ignition current sampling unit; the resonant converter comprises a transformer T, the ignition circuit comprises secondary windings N2, N3, N2 and N3 which are connected in series and respectively coupled with the transformer T, and two ends of the secondary winding N3 are connected with a plasma load. In addition, the device adopts the controllable ignition circuit to sample voltage and current in real time, and the ignition state is evaluated in real time through the control unit, so that the system performs the operation of successfully igniting, reporting errors or circularly igniting to re-drive the PWM unit, the success rate of gas pre-excitation is improved, and the stable operation of the device is ensured.
Description
Technical Field
The invention relates to the technical field of plasma sources, in particular to a pre-excitation ignition device of a remote plasma source and a control method thereof.
Background
Periodic removal of thin film deposits in Chemical Vapor Deposition (CVD) chambers is an important requirement in semiconductor fabrication technology. Plasma etching using fluorine-containing gases such as sulfur hexafluoride SF6 and nitrogen trifluoride NF3 is most commonly used widely due to the efficient reaction of fluorine radicals with residues and the high volatility of the resulting fluoride products. The ionization of fluorine-containing gases such as sulfur hexafluoride SF6 and nitrogen trifluoride NF3 is difficult, and the stable operation can be ensured by means of the excitation and the activation of easily activated gases such as argon or helium and the like and then the introduction of reaction gases.
In conventional plasma sources, a higher ignition voltage is selected to address adverse gas conditions that may inhibit ignition. These adverse conditions may include, for example, high gas pressure, low gas flow, or poisoning (i.e., the presence of contaminants in the gas), or lack of sufficient electron density to produce an initial plasma breakdown. The high ignition voltage results in a high electric field which in turn increases the likelihood of gas avalanche breakdown (where some electrons in the high electric field region gain enough energy to ionize the gas molecules, thereby releasing more electrons in the high electric field region, resulting in gas avalanche breakdown). In such conventional systems, by implementing such voltage regulation, high voltages are applied even under favorable gas conditions, which can cause faster wear of the electronics and can increase the chance of arcing inside the plasma vessel. High voltage ignition pulse trains can cause arcing and degradation, which in turn can create particle defects that can reduce the yield of high performance chips in advanced semiconductor processing applications. Meanwhile, the higher ignition voltage is selected to solve the adverse gas condition that ignition is possibly inhibited, but the higher ignition voltage can bring a surge current problem to a certain extent to the system, so that the service life of the device is greatly shortened, the input voltage waveform collapses, the power supply quality is deteriorated, and the success rate of ignition is further influenced.
Therefore, how to optimize the ignition mode is one of the main technical problems that the skilled person needs to solve.
Disclosure of Invention
The application solves the technical problem that the service life of a device can be shortened in a high-voltage ignition mode in the prior art by providing the pre-excitation ignition device of the remote plasma source and the control method thereof, and realizes the effect of guaranteeing the stable operation of the device.
The embodiment of the application provides a pre-excitation ignition device of a remote plasma source, which comprises:
the device comprises a control unit, a PWM driving unit, a resonant converter, an ignition circuit, an output sampling unit and an ignition current sampling unit;
The ignition circuit is used for realizing ignition starting of gas, and the ignition circuit generates a high-voltage ignition signal to enable plasma load to vibrate and ionize at high frequency;
The resonant converter is connected with the ignition circuit and is used for converting an input direct current source into an alternating current source and providing the input alternating current source for the ignition circuit;
the output sampling unit is connected with the control unit and is used for collecting output voltage and current of the resonant converter and sending the output voltage and current to the control unit;
The ignition current sampling unit is connected with the control unit, and is used for collecting the current of the ignition circuit and sending the current to the control unit;
The control unit sends a driving signal to the PWM driving unit according to the received voltage and current information;
the PWM driving unit outputs PWM signal waves according to the driving signals to control the output current of the resonant converter;
The resonant converter comprises a transformer T, the ignition circuit comprises a secondary winding N2, a secondary winding N3 and a relay S, the secondary winding N2 and the secondary winding N3 are respectively coupled with the transformer T, the secondary winding N2 is connected in series with the relay S and the secondary winding N3 in series, two ends of the secondary winding N3 are connected with the plasma load, and the relay S is controlled by the control unit.
The beneficial effects of the above embodiment are that: in addition, the device adopts the controllable ignition circuit to sample voltage and current in real time, and the ignition state is evaluated in real time through the control unit, so that the system performs the operation of successfully igniting, reporting errors or circularly igniting to drive the PWM unit again, the success rate of gas pre-excitation is improved, and the stable operation of the device is ensured.
On the basis of the above embodiments, the present application can be further improved, and specifically, the following steps are provided:
In one embodiment of the present application, the resonant converter includes a MOS transistor T1, a MOS transistor T2, a MOS transistor T3, a MOS transistor T4, an inductor L r、Lk, a capacitor C r, and a transformer T, where a source of the MOS transistor T1 is connected to a drain of the MOS transistor T2, a source of the MOS transistor T3 is connected to a drain of the MOS transistor T4, a drain of the MOS transistor T1 is connected to a drain of the MOS transistor T3, a source of the MOS transistor T2 is connected to a source of the MOS transistor T4, one end of the inductor L r is connected to a source of the MOS transistor T1, another end of the inductor L k is connected to one end of the inductor L k and another end of the capacitor C r, and another end of the capacitor Cr is connected to another end of the primary winding N1 of the transformer T and another end of the MOS transistor T4. T1& T2, T3& T4 are respectively connected in series and then connected in parallel to form a resonant converter, an input direct current source is applied to two ends of T1& T2, T3& T4, and a PWM driving unit outputs PWM signal waves to control the switching frequency or the duty ratio of an MOS tube so as to regulate the output current or the output power of the resonant converter.
In one embodiment of the present application, the ignition circuit further includes a capacitor C, and the capacitor C is connected in series with the relay S. The relay S is connected in series with a capacitor C, so that the required excitation voltage can be adjusted, and the gas protection ignition circuit can be excited by the lowest voltage.
In one embodiment of the present application, the output sampling unit is configured to collect a voltage across the primary winding N1 of the transformer T and a current flowing through the primary winding N1.
The embodiment of the application also provides a control method of the pre-excitation ignition device of the remote plasma source, which comprises the following steps:
s1, introducing excitation gas;
S2, continuously introducing excitation gas until an ignition instruction is received, and driving and outputting an attraction relay S when the ignition instruction is received;
s3, the PWM driving unit controls output current according to the driving signal;
S4, judging whether ignition is successful or not according to the current I p, the current I s and the voltage U ab, if so, executing the step S5, and if not, executing the step S6;
S5, judging whether ignition is normal, if so, switching off the relay S, ending the control flow, and if not, returning to the step S3;
S6, judging whether an error exists, wherein if the error exists in the I p>Ipmax, the I s>Ismax or the U ab>Umax, the system reports the error and turns off the relay S; if I p＜Ipmax and I s＜ Ismax and U ab＜Umax, directly return to step S3.
The beneficial effects of the above embodiment are that: by adopting the controllable ignition circuit, the ignition state is evaluated in real time, and the stable operation of the device is ensured; the relay S is turned off timely after ignition is successful, so that a high-current breakdown device can be effectively avoided, and an ignition circuit module is protected; the excitation state is judged by sampling the voltage and the current in real time, so that the gas pre-excitation success rate is improved.
In one embodiment of the present application, the determining in step S4 whether the ignition is successful is specifically: if I set≤Ip≤Ipmax is maintained for more than 500ms, n is less than or equal to I s≤Ismax and U ref≤Uab≤Uabmax, judging that the ignition is successful, otherwise judging that the ignition is unsuccessful; wherein I set、n、Uref is a set value, and I pmax、Umax、Ismax is the upper limit preset value of the output current, the voltage and the sampling ignition current of the resonant converter respectively.
In one embodiment of the present application, in the step S5, if abnormal, the counted number of cycles is increased while returning to the step S3, and after the number of cycles exceeds the limit value, the step S3 is not returned, but the relay S is turned off and the control flow is terminated.
One or more technical solutions provided in the embodiments of the present application at least have the following technical effects or advantages:
1. the pre-excitation ignition device can realize high-efficiency transmission of energy in a variable-pressure coupling mode, and is low in cost; the ignition circuit has better reliability and stronger anti-interference capability;
2. the control method of the pre-excitation ignition device is simpler in design and easy to realize in engineering.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. Like elements or portions are generally identified by like reference numerals throughout the several figures. In the drawings, elements or portions thereof are not necessarily drawn to scale.
FIG. 1 is a block diagram of a remote plasma source pre-ignition device according to an embodiment;
FIG. 2 is a schematic diagram of circuit connections of a resonant converter and an ignition circuit in an embodiment;
FIG. 3 is a flow chart of steps of a method of controlling a pre-ignition device of a remote plasma source according to an embodiment;
FIG. 4 is a schematic diagram of pre-ignition waveforms of a pre-ignition device of a remote plasma source in an embodiment.
Detailed Description
The present application is further illustrated below in conjunction with the specific embodiments, it being understood that these embodiments are meant to be illustrative of the application only and not limiting the scope of the application, and that modifications of the application, which are equivalent to those skilled in the art to which the application pertains, will fall within the scope of the application as defined in the appended claims.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In the description of the present invention, the schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the various embodiments or examples of the invention described and the features of the various embodiments or examples may be combined and combined by those skilled in the art without contradiction.
The embodiment of the application solves the technical problem that the service life of a device can be shortened in a high-voltage ignition mode in the prior art by providing the pre-excitation ignition device of the remote plasma source and the control method thereof, and realizes the effect of guaranteeing the stable operation of the device.
The technical scheme in the embodiment of the application aims to solve the problems, and the overall thought is as follows:
Example 1:
as shown in fig. 1, a pre-ignition device for a remote plasma source, comprising:
The device comprises a control unit, a PWM driving unit, a resonant converter, an ignition circuit, an output sampling unit and an ignition current sampling unit; the ignition circuit is used for realizing ignition starting of gas, and generates a high-voltage ignition signal to enable the plasma load to vibrate and ionize at high frequency; the resonant converter is connected with the ignition circuit and is used for converting an input direct current source into an alternating current source and providing the input alternating current source for the ignition circuit; the output sampling unit is connected with the control unit and is used for collecting the output voltage and current of the resonant converter and sending the output voltage and current to the control unit; the ignition current sampling unit is connected with the control unit, and is used for collecting the current of the ignition circuit and sending the current to the control unit; the control unit sends a driving signal to the PWM driving unit according to the received voltage and current information; the PWM driving unit outputs PWM signal waves to control the output current of the resonant converter according to the driving signals.
As shown in fig. 2, the resonant converter includes MOS transistors T1, T2, T3, T4, an inductor L r、Lk, a capacitor C r and a transformer T, where the source of the MOS transistor T1 is connected to the drain of the MOS transistor T2, the source of the MOS transistor T3 is connected to the drain of the MOS transistor T4, the drain of the MOS transistor T1 is connected to the drain of the MOS transistor T3, the source of the MOS transistor T2 is connected to the source of the MOS transistor T4, one end of the inductor L r is connected to the source of the MOS transistor T1, the other end is connected to one end of the inductor L k and one end of the capacitor C r, the other end of the inductor L k is connected to one end of the primary winding N1 of the transformer T, and the other end of the capacitor C r is connected to the other end of the primary winding N1 of the transformer T and the drain of the MOS transistor T4. The ignition circuit comprises a secondary winding N2, a secondary winding N3, a relay S and a capacitor C, wherein the secondary winding N2 and the secondary winding N3 are respectively coupled with the transformer T, the secondary winding N2 is connected with the relay S and the capacitor C in series and then is connected with the secondary winding N3 in series, two ends of the secondary winding N3 are connected with a plasma load, and the relay S is controlled by the control unit. Wherein the number of turns of the secondary winding N3 is smaller than the number of turns of the secondary winding N2.
As shown in fig. 2, the output sampling unit is configured to collect a voltage U ab across the primary winding N1 of the transformer T and a current I p flowing through the primary winding N1. The ignition current sampling unit is used for collecting the current I s of the ignition circuit.
Example 2:
As shown in fig. 3, a control method of a pre-ignition device based on a remote plasma source in embodiment 1 includes the steps of:
S1, setting the maximum value of current I p during excitation as I set, and introducing excitation gas;
The upper limit preset value I pmax、Umax、Ismax of the output current, voltage and sampling ignition current of the resonant converter is synchronously set.
S2, continuously introducing excitation gas until an ignition instruction is received, driving and outputting an attracting relay S when the ignition instruction is received, and starting the relay S at zero voltage;
At this time, the magnitudes of the output voltage U ab at the primary winding end and the output voltage U cd at the secondary winding N3 end of the resonant converter are constant; u cd is applied to the load at two ends of the cavity to form a capacitive coupling plasma CCP, and electrons move under the constraint of a magnetic field to impact and excite gas ionization.
S3: the PWM driving unit controls output current according to the driving signal;
Starting ignition, and collecting voltage U ab and current I p output by the resonant converter and current I s of an ignition circuit in real time; the PWM driving unit outputs PWM signal waves to control the switching frequency or the duty ratio of the MOS tube to adjust the output current of the resonant converter.
And S4, judging whether ignition is successful or not according to the current I p, the current I s and the voltage U ab, if so, executing the step S5, and if not, executing the step S6.
If I set≤Ip≤Ipmax is maintained for more than 500ms, n is less than or equal to I s≤Ismax and U ref≤Uab≤Uabmax, the ignition is judged to be successful, otherwise, the ignition is judged to be unsuccessful. If I p＜Iset or I s is less than n or U ab＜Uref, the ignition is also judged to be unsuccessful; wherein n and U ref are also set values, which can be set synchronously in step S1. N is conventionally set to 1A.
And S5, judging whether ignition is normal, if so, opening the relay S, ending the control flow, and if not, returning to the step S3.
And judging whether ignition is normal or not according to signals received by a system upper computer, and the primary winding voltage current U ab、Ip and the ignition current I s sampled by the secondary winding end of the resonant converter which meet reference values. If not, returning to the step S3, counting the increase of the cycle times, and after the cycle times exceed a limit value (such as 10 times), the system fault-reporting and switching off the relay S to end the control flow.
S6, judging whether an error exists, wherein if the error exists in the I p>Ipmax, the I s>Ismax or the U ab>Umax, the system reports the error and turns off the relay S; if I p＜Ipmax and I s＜ Ismax and U ab＜Umax, directly return to step S3. Wherein I pmax、Umax、Ismax is the upper limit preset value of the output current, voltage and sampling ignition current of the resonant converter, respectively. The system fault turns off the relay S to stop ignition, thereby protecting an ignition circuit and preventing a device from being broken down by high current.
As shown in FIG. 4, the system is in a state of successful ignition at the time T1, meets I set≤Ip≤Ipmax and maintains above 500ms, and simultaneously, 1A is less than or equal to I s≤Ismax,Uref≤Uab≤Uabmax; when the relay S is turned off at the time of successful ignition t2, the ignition sampling current I s is reduced, the secondary winding voltage U cd is also reduced, and the output current value I p of the system resonant converter is maintained to be I set, so that the next ignition setting is facilitated.
In the above method, the output current I p is adjusted as follows:
；
；
；
；
Wherein: u in is the input voltage amplitude; n is the transformation ratio of the number of turns of the primary side and the number of turns of the secondary side of the transformer; equivalent gain h=8n/pi 2; q is the quality factor, Z n is the characteristic impedance; omega 0 is the resonant frequency, f is the switching frequency; l r、Cr is the inductance and capacitance of the resonant converter; r p is the plasma load.
The technical scheme provided by the embodiment of the application at least has the following technical effects or advantages:
1. the pre-excitation ignition device can realize high-efficiency transmission of energy in a variable-pressure coupling mode, and is low in cost; the ignition circuit has better reliability and stronger anti-interference capability;
2. the control method of the pre-excitation ignition device is simpler in design and easy to realize in engineering.
3. By sampling the ignition voltage and the ignition current, the overvoltage and overcurrent of the system can be avoided, the error reporting function of the system is added, and a user can know the current running state of the machine in time;
4. And the success rate of ignition is improved by using a repeated cycle ignition mode.
While embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the invention.
Claims (5)
1. A pre-ignition device for a remote plasma source, comprising:
the device comprises a control unit, a PWM driving unit, a resonant converter, an ignition circuit, an output sampling unit and an ignition current sampling unit;
The ignition circuit is used for realizing ignition starting of gas, and the ignition circuit generates a high-voltage ignition signal to enable plasma load to vibrate and ionize at high frequency;
The resonant converter is connected with the ignition circuit and is used for converting an input direct current source into an alternating current source and providing the input alternating current source for the ignition circuit;
the output sampling unit is connected with the control unit and is used for collecting output voltage and current of the resonant converter and sending the output voltage and current to the control unit;
The ignition current sampling unit is connected with the control unit, and is used for collecting the current of the ignition circuit and sending the current to the control unit;
The control unit sends a driving signal to the PWM driving unit according to the received voltage and current information;
the PWM driving unit outputs PWM signal waves according to the driving signals to control the output current of the resonant converter;
the resonant converter comprises a transformer T, the ignition circuit comprises a secondary winding N2, a secondary winding N3 and a relay S, the secondary winding N2 and the secondary winding N3 are respectively coupled with the transformer T, the secondary winding N2 is connected with the relay S in series and then is connected with the secondary winding N3 in series, two ends of the secondary winding N3 are connected with the plasma load, and the relay S is controlled by the control unit; the resonant converter further comprises MOS tubes T1, T2, T3, T4, an inductor L r、Lk and a capacitor C r, wherein the source electrode of the MOS tube T1 is connected with the drain electrode of the MOS tube T2, the source electrode of the MOS tube T3 is connected with the drain electrode of the MOS tube T4, the drain electrode of the MOS tube T1 is connected with the drain electrode of the MOS tube T3, the source electrode of the MOS tube T2 is connected with the source electrode of the MOS tube T4, one end of the inductor L r is connected with the source electrode of the MOS tube T1, the other end of the inductor L k is connected with one end of a primary winding N1 of the transformer T, and the other end of the capacitor C r is connected with the other end of the primary winding N1 of the transformer T and the drain electrode of the MOS tube T4.
2. The pre-ignition device of claim 1, wherein: the ignition circuit further comprises a capacitor C, and the capacitor C is connected with the relay S in series.
3. The pre-ignition device of claim 1, wherein: the output sampling unit is used for collecting voltages at two ends of a primary winding N1 of the transformer T and currents flowing through the primary winding N1.
4. A control method of a pre-ignition device as claimed in any one of claims 1 to 3, comprising the steps of:
s1, introducing excitation gas;
S2, continuously introducing excitation gas until an ignition instruction is received, and driving and outputting an attraction relay S when the ignition instruction is received;
s3, the PWM driving unit controls output current according to the driving signal;
s4, judging whether ignition is successful or not according to the current I p, the current I s and the voltage U ab, if so, executing the step S5, and if not, executing the step S6, wherein the judgment of whether ignition is successful or not specifically comprises: if I set≤Ip≤Ipmax is maintained for more than 500ms, n is less than or equal to I s≤Ismax and U ref≤Uab≤Uabmax, judging that the ignition is successful, otherwise judging that the ignition is unsuccessful; wherein I set、n、Uref is a set value, and I pmax、Umax、Ismax is the upper limit preset value of the output current, the voltage and the sampling ignition current of the resonant converter respectively;
S5, judging whether ignition is normal, if so, switching off the relay S, ending the control flow, and if not, returning to the step S3;
S6, judging whether an error exists, wherein if the error exists in the I p>Ipmax, the I s> Ismax or the U ab>Umax, the system reports the error and turns off the relay S; if I p＜Ipmax and I s＜ Ismax and U ab＜Umax, directly return to step S3.
5. The control method according to claim 4, characterized in that: in the step S5, if not normal, the counted number of cycles is increased while returning to the step S3, and after the number of cycles exceeds the limit value, the step S3 is not returned, but the relay S is wrongly reported and disconnected, and the control flow is ended.
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