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CN117531553A - Micro-nanofluidic chip and parallel enrichment detection method of biochemical marker molecules - Google Patents

Micro-nanofluidic chip and parallel enrichment detection method of biochemical marker molecules Download PDF

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CN117531553A
CN117531553A CN202311340117.XA CN202311340117A CN117531553A CN 117531553 A CN117531553 A CN 117531553A CN 202311340117 A CN202311340117 A CN 202311340117A CN 117531553 A CN117531553 A CN 117531553A
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王玮
郭业昌
王少峰
李沛玥
张盼
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Abstract

本发明属于微纳流体和生化传感技术领域,并具体涉及一种微纳流控芯片及生化标志物分子的并行富集检测方法,所述芯片包括芯片本体,所述芯片本体上设有第一通道、多个第二通道、第三通道和纳流通道,其中,所述第一通道上设有第一进液口;每个所述第二通道均设有检测区,并与所述第一通道连通;所述第三通道与第二进液口连通;所述纳流通道具有离子选择功能,所述纳流通道的一侧与第三通道连通,另一侧分别与多个第二通道连通。本申请微纳流控芯片通过并行第二通道设计,可实现数十乃至上百种生化标志物分子的同时富集检测,极大地降低了疾病筛查成本,为疾病的早期筛查、病情监测和治疗效果评估提供有力支持。

The invention belongs to the technical field of micro-nano fluidics and biochemical sensing, and specifically relates to a micro-nano fluidic chip and a parallel enrichment detection method of biochemical marker molecules. The chip includes a chip body, and the chip body is provided with a third One channel, a plurality of second channels, a third channel and a nanoflow channel, wherein the first channel is provided with a first liquid inlet; each of the second channels is provided with a detection area and is connected to the The first channel is connected; the third channel is connected with the second liquid inlet; the nanoflow channel has an ion selection function, one side of the nanoflow channel is connected with the third channel, and the other side is connected with a plurality of third channels respectively. The two channels are connected. The micro-nanofluidic chip of this application can realize the simultaneous enrichment and detection of dozens or even hundreds of biochemical marker molecules through the parallel second channel design, which greatly reduces the cost of disease screening and provides early screening and disease monitoring for diseases. and provide strong support for treatment effectiveness evaluation.

Description

微纳流控芯片及生化标志物分子的并行富集检测方法Micro-nanofluidic chip and parallel enrichment detection method of biochemical marker molecules

技术领域Technical field

本发明属于微纳流体和生化传感技术领域,并具体涉及一种微纳流控芯片及生化标志物分子的并行富集检测方法。The invention belongs to the technical fields of micro-nano fluidics and biochemical sensing, and specifically relates to a micro-nano fluidic chip and a parallel enrichment detection method of biochemical marker molecules.

背景技术Background technique

血液等临床样品中含有丰富的生化信息,如蛋白质、核酸等疾病标志物,在临床诊断中具有广泛应用的巨大潜力。目前相关的血液检测技术中,例如毛细管电泳、胶体金免疫层析技术等,大多一份样品只能检测一种或少数几种标志物,且大多检测技术灵敏度低,无法为临床诊断提供足够多的生化信息,无法满足应用需求。Clinical samples such as blood contain rich biochemical information, such as proteins, nucleic acids and other disease markers, and have great potential for wide application in clinical diagnosis. Among the current related blood testing technologies, such as capillary electrophoresis, colloidal gold immunochromatography, etc., most of the samples can only detect one or a few markers, and most detection technologies have low sensitivity and cannot provide enough for clinical diagnosis. The biochemical information cannot meet the application needs.

发明内容Contents of the invention

本发明的目的在于提供一种微纳流控芯片及生化标志物分子的并行富集检测方法,以解决现有技术中微纳流控芯片无法为临床诊断提供足够多的生化信息的问题。The purpose of the present invention is to provide a micro-nanofluidic chip and a parallel enrichment detection method of biochemical marker molecules to solve the problem in the prior art that micro-nanofluidic chips cannot provide enough biochemical information for clinical diagnosis.

本发明提供了微纳流控芯片,包括芯片本体,所述芯片本体上设有:The invention provides a micro-nanofluidic chip, which includes a chip body, and the chip body is provided with:

第一通道,所述第一通道上设有第一进液口;A first channel, the first channel is provided with a first liquid inlet;

多个第二通道,每个所述第二通道均设有检测区,并每个所述第二通道均与所述第一通道连通;A plurality of second channels, each second channel is provided with a detection area, and each second channel is connected to the first channel;

第三通道,所述第三通道与第二进液口连通;a third channel, the third channel is connected with the second liquid inlet;

纳流通道,所述纳流通道具有离子选择功能,所述纳流通道的一侧与第三通道连通,另一侧分别与多个第二通道连通。A nanoflow channel has an ion selection function, one side of the nanoflow channel is connected to the third channel, and the other side is connected to a plurality of second channels respectively.

本发明提供的微纳流控芯片还可具有如下附加技术特征:The micro-nanofluidic chip provided by the present invention can also have the following additional technical features:

本发明的一个具体实施方式中,所述第三通道的数量为两个,两个所述第三通道分设所述第一通道两侧。In a specific embodiment of the present invention, the number of the third channels is two, and the two third channels are located on both sides of the first channel.

本发明的一个具体实施方式中,所述第三通道包括第三主通道和多个与所述第三主通道连通的第三支通道,每个所述第三支通道通过所述纳流通道与多个所述第二通道连通。In a specific embodiment of the present invention, the third channel includes a third main channel and a plurality of third branch channels connected to the third main channel, and each of the third branch channels passes through the nanoflow channel. Connected to a plurality of second channels.

本发明的一个具体实施方式中,两个所述第三通道关于所述第一通道对称设置。In a specific embodiment of the present invention, the two third channels are arranged symmetrically with respect to the first channel.

本发明的一个具体实施方式中,所述第一通道和所述第三通道呈弯曲状设置。In a specific embodiment of the present invention, the first channel and the third channel are arranged in a curved shape.

本发明的一个具体实施方式中,所述第一通道和/或所述第三通道的弯曲位置呈弧形设置,或In a specific embodiment of the present invention, the bending position of the first channel and/or the third channel is arranged in an arc shape, or

所述第一通道和/或所述第三通道的弯曲位置呈直角设置。The bending position of the first channel and/or the third channel is arranged at a right angle.

本发明的一个具体实施方式中,所述第二通道呈直线型、折线型和/或曲线形设置;和/或所述第二通道的特征尺寸为5-30um。In a specific embodiment of the present invention, the second channel is arranged in a linear, zigzag and/or curved shape; and/or the characteristic size of the second channel is 5-30um.

本发明的一个具体实施方式中,所述第二通道呈折线型设置时,所述第二通道包括一个或多个折角,每个所述折角的角度在30-150°之间。In a specific embodiment of the present invention, when the second channel is arranged in a folded line shape, the second channel includes one or more folded corners, and the angle of each folded corner is between 30-150°.

本发明的一个具体实施方式中,所述第一通道和所述第三通道层叠设置,多个所述第二通道均与所述第一通道和所述第三通道垂直设置。In a specific embodiment of the present invention, the first channel and the third channel are arranged in a stack, and a plurality of the second channels are arranged perpendicularly to the first channel and the third channel.

本发明第二方面还提供了生化标志物分子的并行富集检测方法,利用上述任意一项所述的微纳流控芯片完成,包括:The second aspect of the present invention also provides a parallel enrichment and detection method of biochemical marker molecules, which is completed by using any of the above-mentioned micro-nanofluidic chips, including:

向第一注液口、第二注液口中加入缓冲液,静置至缓冲液填充满第一通道、第二通道、第三通道和纳流通道后封装保存;Add the buffer solution to the first injection port and the second injection port, and let it stand until the buffer solution fills the first channel, the second channel, the third channel and the nanoflow channel, and then it is packaged and stored;

将待测样品注入第一注液口,同时向第一注液口和第二注液口上加载大小不同的电压以形成由第二注液口指向第一注液口的电场,使生化标志物分子富集于第二通道;Inject the sample to be tested into the first injection port, and at the same time load voltages of different sizes on the first and second injection ports to form an electric field directed from the second injection port to the first injection port, so that the biochemical markers Molecules are enriched in the second channel;

针对富集于第二通道检测区的生化标志物分子进行传感分析。Sensing analysis is performed on the biochemical marker molecules enriched in the detection area of the second channel.

本申请实施例基于纳流体原理并结合微电子工艺技术构建了一种用于生化靶标分子高效富集的微纳流控芯片。该微纳流控芯片结合了微流体技术对微量流体的精确操控和纳流体技术对靶标分子动态可控调控的优势,把包括加样、特异性分离、富集、检测等整套检测流程集成在微纳流控芯片上,使得整个检测流程微型化、自动化、一体化,同时通过并行第二通道设计,可实现数十乃至上百种生化标志物分子的同时富集检测,从而为临床诊断提供足够多的生化信息,这极大地降低了疾病筛查成本,为疾病的早期筛查、病情监测和治疗效果评估提供有力支持。The embodiment of this application constructs a micro-nanofluidic chip for efficient enrichment of biochemical target molecules based on the principle of nanofluidics and combined with microelectronics technology. This micro-nanofluidic chip combines the advantages of microfluidic technology for precise control of microfluids and nanofluidic technology for dynamically controllable regulation of target molecules. It integrates the entire detection process including sample addition, specific separation, enrichment, and detection. On the micro-nanofluidic chip, the entire detection process is miniaturized, automated and integrated. At the same time, through the parallel second channel design, the simultaneous enrichment and detection of dozens or even hundreds of biochemical marker molecules can be achieved, thereby providing clinical diagnosis. Sufficient biochemical information greatly reduces the cost of disease screening and provides strong support for early screening of diseases, disease monitoring and treatment effect evaluation.

附图说明Description of drawings

为了更清楚地说明本发明具体实施方式或现有技术中的技术方案,下面将对具体实施方式或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图是本发明的一些实施方式,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly explain the specific embodiments of the present invention or the technical solutions in the prior art, the accompanying drawings that need to be used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description The drawings illustrate some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without exerting any creative effort.

图1为本发明一个实施例中微纳流控芯片的结构示意图;Figure 1 is a schematic structural diagram of a micro-nanofluidic chip in one embodiment of the present invention;

图2为本发明一个实施例中微纳流控芯片的结构示意图;Figure 2 is a schematic structural diagram of a micro-nanofluidic chip in one embodiment of the present invention;

图3为本发明一个实施例中微纳流控芯片的结构示意图;Figure 3 is a schematic structural diagram of a micro-nanofluidic chip in one embodiment of the present invention;

图4为本发明一个实施例中微纳流控芯片的结构示意图;Figure 4 is a schematic structural diagram of a micro-nanofluidic chip in one embodiment of the present invention;

图5为本发明一个实施例中微纳流控芯片的结构示意图;Figure 5 is a schematic structural diagram of a micro-nanofluidic chip in one embodiment of the present invention;

图6为本发明一个实施例中微纳流控芯片的结构示意图;Figure 6 is a schematic structural diagram of a micro-nanofluidic chip in one embodiment of the present invention;

图7为本发明一个实施例中微纳流控芯片的结构示意图;Figure 7 is a schematic structural diagram of a micro-nanofluidic chip in one embodiment of the present invention;

图8为本发明一个实施例中微纳流控芯片的结构示意图;Figure 8 is a schematic structural diagram of a micro-nanofluidic chip in one embodiment of the present invention;

图9为图2的主视图;Figure 9 is a front view of Figure 2;

图10为本发明一个实施例中微纳流控芯片的结构示意图;Figure 10 is a schematic structural diagram of a micro-nanofluidic chip in one embodiment of the present invention;

图11为本发明一个实施例中微纳流控芯片的结构示意图;Figure 11 is a schematic structural diagram of a micro-nanofluidic chip in one embodiment of the present invention;

图12为本发明一个实施例中微纳流控芯片的结构示意图。Figure 12 is a schematic structural diagram of a micro-nanofluidic chip in one embodiment of the present invention.

附图标记说明:Explanation of reference symbols:

100-微纳流控芯片;100-Micro-nanofluidic chip;

10-芯片本体,20-第二通道,21-检测区;30-纳流通道;40-第三通道,41-第二进液口,42-第三主通道,43-第三支通道;50-第一通道,51-第一进液口,52-第一主通道,53-第一支通道。10-chip body, 20-second channel, 21-detection area; 30-nanoflow channel; 40-third channel, 41-second liquid inlet, 42-third main channel, 43-third branch channel; 50-the first channel, 51-the first liquid inlet, 52-the first main channel, 53-the first branch channel.

具体实施方式Detailed ways

下面将参照附图更详细地描述本发明的示例性实施方式。虽然附图中显示了本发明的示例性实施方式,然而应当理解,可以以各种形式实现本发明而不应被这里阐述的实施方式所限制。相反,提供这些实施方式是为了能够更透彻地理解本发明,并且能够将本发明的范围完整的传达给本领域的技术人员。Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a thorough understanding of the invention, and to fully convey the scope of the invention to those skilled in the art.

应理解的是,文中使用的术语仅出于描述特定示例实施方式的目的,而无意于进行限制。除非上下文另外明确地指出,否则如文中使用的单数形式“一”、“一个”以及“所述”也可以表示包括复数形式。术语“包括”、“包含”、“含有”以及“具有”是包含性的,并且因此指明所陈述的特征、步骤、操作、元件和/或部件的存在,但并不排除存在或者添加一个或多个其它特征、步骤、操作、元件、部件、和/或它们的组合。文中描述的方法步骤、过程、以及操作不解释为必须要求它们以所描述或说明的特定顺序执行,除非明确指出执行顺序。还应当理解,可以使用另外或者替代的步骤。It is to be understood that the terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise. The terms "comprises", "includes", "contains" and "having" are inclusive and thus indicate the presence of stated features, steps, operations, elements and/or parts but do not exclude the presence or addition of one or Various other features, steps, operations, elements, components, and/or combinations thereof. The method steps, procedures, and operations described herein are not to be construed as requiring that they be performed in the particular order described or illustrated, unless an order of performance is expressly indicated. It should also be understood that additional or alternative steps may be used.

尽管可以在文中使用术语第一、第二、第三等来描述多个元件、部件、区域、层和/或部段,但是,这些元件、部件、区域、层和/或部段不应被这些术语所限制。这些术语可以仅用来将一个元件、部件、区域、层或部段与另一区域、层或部段区分开。除非上下文明确地指出,否则诸如“第一”、“第二”之类的术语以及其它数字术语在文中使用时并不暗示顺序或者次序。因此,以下讨论的第一元件、部件、区域、层或部段在不脱离示例实施方式的教导的情况下可以被称作第二元件、部件、区域、层或部段。Although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections shall not be referred to as restricted by these terms. These terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Terms such as "first," "second," and other numerical terms when used herein do not imply a sequence or order unless clearly indicated by the context. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the example embodiments.

为了便于描述,可以在文中使用空间相对关系术语来描述如图中示出的一个元件或者特征相对于另一元件或者特征的关系,这些相对关系术语例如为“内部”、“外部”、“内侧”、“外侧”、“下面”、“下方”、“上面”、“上方”等。这种空间相对关系术语意于包括除图中描绘的方位之外的在使用或者操作中装置的不同方位。例如,如果在图中的装置翻转,那么描述为“在其它元件或者特征下面”或者“在其它元件或者特征下方”的元件将随后定向为“在其它元件或者特征上面”或者“在其它元件或者特征上方”。因此,示例术语“在……下方”可以包括在上和在下的方位。装置可以另外定向(旋转90度或者在其它方向)并且文中使用的空间相对关系描述符相应地进行解释。For ease of description, spatially relative terms may be used herein to describe the relationship of one element or feature to another element or feature as shown in the figures. These relative terms, such as "inner", "outer", "inner" ”, “outside”, “below”, “below”, “above”, “above”, etc. Such spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" or "beneath" the other elements or features. Features above". Thus, the example term "below" may include an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

在外加偏压的驱动下,带电粒子会通过电泳定向迁移。当带电粒子迁移至具有粒子选择性的纳米结构处时,会受到纳米结构壁面电荷的作用,通常情况下与壁面电荷电性相同的离子可以通过,与壁面电荷电性相反的离子会受到阻碍,该现象是纳米尺寸流体的特有现象,被称为离子选择性,当纳米结构内表面双电层厚度接近或大于纳米结构特征尺寸时,纳米结构便产生离子选择性。Driven by an external bias voltage, charged particles will migrate directionally through electrophoresis. When charged particles migrate to a nanostructure with particle selectivity, they will be affected by the charge on the wall of the nanostructure. Normally, ions with the same electrical charge as the wall charge can pass through, but ions with the opposite electrical charge as the wall charge will be hindered. This phenomenon is unique to nano-sized fluids and is called ion selectivity. When the thickness of the electric double layer on the inner surface of the nanostructure is close to or larger than the characteristic size of the nanostructure, the nanostructure will produce ion selectivity.

在百纳米尺度以下,流道结构具有非常高的面体比,产生的物理现象也会不同于微流体领域,在这个尺度下,流道表面发挥的作用将占主导,其中最需要考虑的物理现象便是双电层。当固体物质与液体接触时,由于表面分子团的解离作用,固体表面会带有一层固定电荷,溶液中的离子会受到固体表面固定电荷的库伦力作用而产生同离子排斥、反离子在固体表面汇聚,来维持固体表面处的电中性条件。这样会在溶液靠近固体表面处形成一层屏蔽区域,该区域主要由反离子组成,我们称这层区域为双电层。Below the scale of hundreds of nanometers, the flow channel structure has a very high surface-to-body ratio, and the physical phenomena produced will be different from the field of microfluidics. At this scale, the role played by the flow channel surface will be dominant. Among them, the most important physical phenomena need to be considered. It's the electric double layer. When a solid substance comes into contact with a liquid, due to the dissociation of surface molecular groups, the solid surface will have a layer of fixed charge. The ions in the solution will be affected by the Coulomb force of the fixed charge on the solid surface, resulting in repulsion of same ions and counter ions in the solid. Surface convergence to maintain electrically neutral conditions at the solid surface. This will form a shielding area in the solution close to the solid surface. This area is mainly composed of counterions. We call this area an electric double layer.

在微流体研究中,流道尺寸为微米量级,双电层的影响完全可以忽略,但是到了纳流体领域,流道的特征长度已经不够大到可以忽略双电层。通常表征双电层特征厚度的物理量为德拜长度λD。对于1mM的KCl溶液,德拜长度λD就已经达到了10nm,这个数值与纳米通道的特征长度接近,甚至大于很多情形下的纳米通道特征尺寸,因此对于纳米通道,德拜长度近似等于或大于通道特性尺寸,通道内的液体是带电的,反离子的浓度远远高于同离子。这也使得纳米通道具备了离子选择性,只允许反离子通过。In microfluidic research, the size of the flow channel is on the order of microns, and the influence of the electric double layer can be completely ignored. However, in the field of nanofluidics, the characteristic length of the flow channel is no longer large enough to ignore the electric double layer. The physical quantity that usually characterizes the characteristic thickness of the electric double layer is the Debye length λD. For a 1mM KCl solution, the Debye length λD has reached 10nm. This value is close to the characteristic length of the nanochannel, and even larger than the characteristic size of the nanochannel in many cases. Therefore, for the nanochannel, the Debye length is approximately equal to or larger than the channel. Characteristic size, the liquid in the channel is charged, and the concentration of counter ions is much higher than that of the same ions. This also makes the nanochannel ion selective, allowing only counterions to pass through.

双电层和离子选择性是纳流体领域特有的现象,通常与纳米结构的尺寸以及内表面电荷密度相关。纳米结构尺寸和内表面电荷密度由材料本身特性和加工参数决定,一旦微纳流控器件制备完成便固定下来。Electric double layers and ion selectivity are phenomena unique to the field of nanofluidics and are often related to the size of the nanostructure and the charge density on the inner surface. The nanostructure size and internal surface charge density are determined by the material's own characteristics and processing parameters, and are fixed once the micro-nanofluidic device is prepared.

基于此,本发明实施例提出了一种微纳流控芯片100,其利用纳米结构的上述特性进行生化标志物分子的富集。Based on this, an embodiment of the present invention proposes a micro-nanofluidic chip 100 that utilizes the above characteristics of nanostructures to enrich biochemical marker molecules.

参照图1-图12,本发明实施例提供的一种微纳流控芯片100包括芯片本体10,芯片本体10上设有第一通道50、多个第二通道20、第三通道40和纳流通道30,其中,第一通道50上设有第一进液口51;每个第二通道20均设有检测区21,且每个第二通道20均与第一通道50连通;第三通道40与第二进液口41连通;纳流通道30具有离子选择功能,纳流通道30的一侧与第三通道40连通,另一侧分别与多个第二通道20连通。Referring to Figures 1-12, a micro-nanofluidic chip 100 provided by an embodiment of the present invention includes a chip body 10. The chip body 10 is provided with a first channel 50, a plurality of second channels 20, a third channel 40 and a nanofluidic chip. Flow channel 30, wherein the first channel 50 is provided with a first liquid inlet 51; each second channel 20 is provided with a detection area 21, and each second channel 20 is connected with the first channel 50; the third The channel 40 is connected to the second liquid inlet 41; the nanoflow channel 30 has an ion selection function. One side of the nanoflow channel 30 is connected to the third channel 40, and the other side is connected to the plurality of second channels 20 respectively.

第一通道50设有第一进液口51,用于通过第一进液口51将待富集样品引入到微纳流控芯片100,还用于将待富集样品引导至第二通道20。第一通道50通常为大通道,尺寸在百微米量级,并具有很低的流阻。具体的,可以通过微纳流控技术精确控制第一通道50中样品的流速和流量,以确保样品在经第一通道50进入后在第二通道20中得到充分的接触和交互。此外,第一通道50还可以通过引入缓冲液、稀释液或其他辅助液体来调节样品的浓度和pH值,以进一步优化富集效果。The first channel 50 is provided with a first liquid inlet 51 for introducing the sample to be enriched into the micro-nanofluidic chip 100 through the first liquid inlet 51 and for guiding the sample to be enriched to the second channel 20 . The first channel 50 is usually a large channel, with dimensions on the order of hundreds of microns, and has very low flow resistance. Specifically, the flow rate and flow rate of the sample in the first channel 50 can be precisely controlled through micro-nanofluidic technology to ensure that the sample is fully contacted and interacted with in the second channel 20 after entering through the first channel 50 . In addition, the first channel 50 can also adjust the concentration and pH value of the sample by introducing buffer, diluent or other auxiliary liquids to further optimize the enrichment effect.

第二通道20与微纳流通道30相连,是生化靶标最终富集的位置。带电粒子在电场的驱动下迁移至第二通道20内,但又受到微纳流通道30的限制无法通过,则会留在第二通道20内并积累,最终实现带电粒子的高倍数富集(104-107倍富集)。为实现多靶标的同时富集检测,微纳流控芯片100上设计有数十乃至上百根并行的第二通道20,每根第二通道20都通过微纳流通道30与第三通道40相连,形成完成的电流回路。The second channel 20 is connected to the micro-nano flow channel 30 and is the location where the biochemical target is finally enriched. Charged particles migrate into the second channel 20 driven by the electric field, but are restricted by the micro-nano flow channel 30 and cannot pass through, so they will stay in the second channel 20 and accumulate, ultimately achieving high-fold enrichment of charged particles ( 10 4 -10 7 times enriched). In order to achieve simultaneous enrichment detection of multiple targets, dozens or even hundreds of parallel second channels 20 are designed on the micro-nanofluidic chip 100. Each second channel 20 passes through the micro-nanofluidic channel 30 and the third channel 40. connected to form a complete current loop.

检测区21位于第二通道20内,通常在第二通道20远离第一进液口51的尖端位置。通过在检测区21做探针修饰,可以实现富集后的生化标志物分子的特异性分析。检测区21可以采用不同的传感技术,如表面等离子共振(SPR)、电化学方法、荧光检测、化学发光等,以实现对富集后标志物分子的定量检测或定性分析。通过微纳流控技术的精确控制,可以在检测区21实现高灵敏度和高选择性的生物传感。The detection area 21 is located in the second channel 20 , usually at the tip of the second channel 20 away from the first liquid inlet 51 . By modifying the probe in the detection area 21, specific analysis of the enriched biochemical marker molecules can be achieved. The detection area 21 can use different sensing technologies, such as surface plasmon resonance (SPR), electrochemical methods, fluorescence detection, chemiluminescence, etc., to achieve quantitative detection or qualitative analysis of enriched marker molecules. Through precise control of micro-nanofluidic technology, high sensitivity and high selectivity biosensing can be achieved in the detection zone 21.

探针包被可通过吸附的方式的进行,器件键合前通过微点样的方式在检测区21滴加直径10-30um的探针溶液,探针会自然而然地吸附到界面上。也可以先将探针包被在纳米颗粒上,包括聚苯乙烯颗粒、氧化硅颗粒、磁珠,然后将颗粒溶液点样在检测区21,待溶液蒸发干后纳米颗粒会牢牢吸附在界面上,不容易掉或者重新溶于水溶液。或者先完成器件键合,等实际工作时,通过电场将修饰探针的纳米颗粒限位至检测区21。The probe coating can be carried out by adsorption. Before device bonding, a probe solution with a diameter of 10-30um is dropped in the detection area 21 by micro-spotting, and the probe will naturally adsorb to the interface. The probe can also be coated on nanoparticles first, including polystyrene particles, silica particles, and magnetic beads, and then the particle solution is spotted on the detection area 21. After the solution evaporates to dryness, the nanoparticles will be firmly adsorbed on the interface. It is not easy to fall off or redissolve in aqueous solution. Alternatively, the device bonding may be completed first, and then during actual work, the nanoparticles of the modified probe may be limited to the detection area 21 through an electric field.

第三通道40与第二通道20相对应,位于纳流通道30另一侧。外加偏压作用下,纳流通道30两侧会发生离子浓度极化现象,即一侧发生离子富集,另一侧发生离子耗尽,第三通道40则对应离子浓度极化耗尽一侧。与第二通道20不同,第三通道40的电阻率会增大很多倍,为了降低第三通道40内的压降,第三通道40通常设计为大通道,在百微米量级,这样可以增大对流及扩散,降低第三通道40内的压降和对富集过程的干扰。The third channel 40 corresponds to the second channel 20 and is located on the other side of the nanofluid channel 30 . Under the action of an external bias voltage, ion concentration polarization will occur on both sides of the nanoflow channel 30, that is, ion enrichment occurs on one side and ion depletion occurs on the other side. The third channel 40 corresponds to the ion concentration polarization depletion side. . Different from the second channel 20, the resistivity of the third channel 40 will increase many times. In order to reduce the voltage drop in the third channel 40, the third channel 40 is usually designed as a large channel, in the order of hundreds of microns, which can increase Large convection and diffusion reduce the pressure drop in the third channel 40 and interfere with the enrichment process.

纳流通道30是指特征尺寸在纳米量级的通道阵列,并因此具有粒子选择性,当带电粒子迁移至具有离子选择性的纳流通道30处时,会受到纳流通道30壁面电荷的作用,通常情况下与壁面电荷电性相同的离子可以通过,与壁面电荷电性相反的离子则会受到阻碍。The nanoflow channel 30 refers to a channel array with a characteristic size on the nanometer scale, and therefore has particle selectivity. When the charged particles migrate to the nanoflow channel 30 with ion selectivity, they will be affected by the charge on the wall of the nanoflow channel 30 , usually ions with the same electrical charge as the wall can pass through, but ions with the opposite electrical charge as the wall will be blocked.

纳流通道30连通于第二通道20和第三通道40之间,因此当与纳流通道30壁面电荷极性相反的带电粒子迁移至第二通道20后,由于受到纳流通道30壁面电荷的作用,带电粒子无法进入纳流通道30,而是会沿着第二通道20一直迁移至第二通道20尖端位置处。同时纳流通道30在外加偏压的驱动下会产生电渗流(一种电场驱动的流体流动现象,通常只发生在微米/纳米尺度),因此第二通道20内带电粒子同时受到电渗流曳力和电场力的作用。对于高迁移率分子,其会富集在第二通道20内,而对于低迁移率分子,则会被电渗流冲出第二通道20。通过合理设计,可以实现生化标志物分子的富集,而杂质分子被电渗流冲走,最终起到生化标志物分子富集及纯化效果,避免细胞碎片等进入第二通道20引起堵塞,或者过多背景蛋白分子富集而发生蛋白沉淀现象。The nanoflow channel 30 is connected between the second channel 20 and the third channel 40. Therefore, when the charged particles with opposite polarity to the wall charge of the nanoflow channel 30 migrate to the second channel 20, they are affected by the charge on the wall of the nanoflow channel 30. As a result, the charged particles cannot enter the nanofluid channel 30 , but will migrate along the second channel 20 to the tip of the second channel 20 . At the same time, the nanofluid channel 30 will generate electroosmotic flow (a fluid flow phenomenon driven by an electric field, which usually only occurs at the micron/nano scale) driven by an external bias voltage. Therefore, the charged particles in the second channel 20 are simultaneously subject to the electroosmotic flow drag force. and the effect of electric field force. For high mobility molecules, they will be enriched in the second channel 20, while for low mobility molecules, they will be flushed out of the second channel 20 by the electroosmotic flow. Through reasonable design, the enrichment of biochemical marker molecules can be achieved, and the impurity molecules are washed away by the electroosmotic flow, which ultimately achieves the enrichment and purification effect of biochemical marker molecules and prevents cell debris and the like from entering the second channel 20 to cause blockage or overflow. Protein precipitation occurs due to the enrichment of multiple background protein molecules.

工作时,通过第一进液口51加入缓冲液,静置1-3min,待缓冲液通过毛细作用填充满第二通道20和纳流通道30后,通过第二进液口41加入缓冲液,缓冲液为PBS,或者KCl等,缓冲液离子浓度1-10mM。微纳流控芯片100内的流道结构中填充满缓冲液后便可用Scotch胶带暂时封装保存。测试时,将待测样品加到第一进液口51,替换掉预先加入的缓冲液。第一进液口51接地,第二进液口41接正电位/工作电极,待测样品中的带电粒子会受到电场力的作用迁移进入第二通道20。负电粒子受第二通道20两侧纳流通道30的限制,会在第二通道20内持续富集。该富集过程稳定,不易受环境因素影响,同时所需工作电压较低(<10V),可实现生化靶标分子10分钟内上万倍原位富集。When working, add the buffer solution through the first liquid inlet 51 and let it stand for 1-3 minutes. After the buffer liquid fills the second channel 20 and the nanoflow channel 30 through capillary action, add the buffer liquid through the second liquid inlet 41. The buffer is PBS, or KCl, etc., and the buffer ion concentration is 1-10mM. After the flow channel structure in the micro-nanofluidic chip 100 is filled with buffer solution, it can be temporarily sealed and stored with Scotch tape. During testing, the sample to be tested is added to the first liquid inlet 51 to replace the pre-added buffer. The first liquid inlet 51 is connected to the ground, and the second liquid inlet 41 is connected to the positive potential/working electrode. The charged particles in the sample to be measured will migrate into the second channel 20 under the action of the electric field force. The negatively charged particles are restricted by the nanoflow channels 30 on both sides of the second channel 20 and will continue to be enriched in the second channel 20 . The enrichment process is stable and not easily affected by environmental factors. At the same time, the required operating voltage is low (<10V), and it can achieve tens of thousands of times in-situ enrichment of biochemical target molecules within 10 minutes.

后续可采用生化传感技术对富集后的生化分子进行定量检测。检测区21可以集成多种传感器,如光学传感器、电化学传感器等,用于实时监测富集后的生化分子的特征。这些传感器能够对生化分子进行高灵敏度、高选择性的检测,并将检测信号转化为电信号或光信号。对于光学传感器,可以使用荧光、吸收光谱、表面等离子体共振等技术进行检测。电化学传感器可以通过测量电流或电势变化来实现对生化分子的检测。生物传感器则利用生物识别元件(如酶、抗体、核酸等)与目标生化分子的特异性结合反应,产生特定的生物信号,从而实现对生化分子的检测。Subsequently, biochemical sensing technology can be used to quantitatively detect the enriched biochemical molecules. The detection area 21 can integrate a variety of sensors, such as optical sensors, electrochemical sensors, etc., for real-time monitoring of the characteristics of enriched biochemical molecules. These sensors can detect biochemical molecules with high sensitivity and selectivity, and convert detection signals into electrical or optical signals. For optical sensors, techniques such as fluorescence, absorption spectroscopy, and surface plasmon resonance can be used for detection. Electrochemical sensors can detect biochemical molecules by measuring changes in current or potential. Biosensors use specific binding reactions between biological recognition elements (such as enzymes, antibodies, nucleic acids, etc.) and target biochemical molecules to generate specific biological signals, thereby realizing the detection of biochemical molecules.

本申请实施例基于纳流体原理并结合微电子工艺技术构建了一种用于生化靶标分子高效富集的微纳流控芯片100,该微纳流控芯片100结合了微流体技术对微量流体的精确操控和纳流体技术对靶标分子动态可控调控的优势,把包括加样、特异性分离、富集、检测等整套检测流程集成在微纳流控芯片100上,使得整个检测流程微型化、自动化、一体化。一方面微纳流控芯片100通过多个第二通道20并行设计,能够实现多通道并行富集和检测,实现多种生化标志物的同时检测,提供全面的生化信息,这极大地降低了疾病筛查成本,为疾病的早期筛查、病情监测和治疗效果评估提供有力支持。一方面微纳流控芯片100通过先进的生物传感技术实现对富集后生化分子的精确检测,具有高灵敏度和高选择性。一方面微纳流控芯片100利用微纳流体技术实现快速分离和多通道富集,能够节省时间和提高效率。一方面微纳流控芯片100采用微纳加工技术制备,不仅低成本且小型化,便于应用于现场诊断环境。The embodiment of the present application constructs a micro-nanofluidic chip 100 for efficient enrichment of biochemical target molecules based on the principle of nanofluidics and combined with microelectronic process technology. The micro-nanofluidic chip 100 combines the microfluidic technology with microfluidic control of microfluids. With the advantages of precise control and nanofluidic technology for dynamic controllable regulation of target molecules, the entire detection process including sample addition, specific separation, enrichment, and detection is integrated on the micro-nanofluidic chip 100, making the entire detection process miniaturized and Automation and integration. On the one hand, the micro-nanofluidic chip 100 is designed in parallel through multiple second channels 20 to achieve multi-channel parallel enrichment and detection, realize simultaneous detection of multiple biochemical markers, and provide comprehensive biochemical information, which greatly reduces the risk of disease. Screening costs provide strong support for early disease screening, condition monitoring and treatment effect evaluation. On the one hand, the micro-nanofluidic chip 100 achieves precise detection of enriched biochemical molecules through advanced biosensing technology, with high sensitivity and selectivity. On the one hand, the micro-nanofluidic chip 100 uses micro-nanofluidic technology to achieve rapid separation and multi-channel enrichment, which can save time and improve efficiency. On the one hand, the micro-nano fluidic chip 100 is prepared using micro-nano processing technology, which is low-cost and miniaturized, and can be easily applied in on-site diagnostic environments.

一个具体实施例中,一个具体实施例中,纳流通道30通过设置以下结构形成特征尺寸小于100nm的多个微通道:纳米孔阵列、纳米通道阵列、纳米浅槽阵列、纳米缝隙。In a specific embodiment, the nanofluid channel 30 forms multiple microchannels with a characteristic size less than 100 nm by arranging the following structures: a nanohole array, a nanochannel array, a nanoshallow groove array, and a nanoslit.

可选的,纳流通道30被设置为纳米孔阵列、纳米通道阵列、纳米浅槽阵列,纳米孔阵列、纳米通道阵列、纳米浅槽阵列可通过对芯片本体10进行微加工制备形成,也可以将多孔硅、PAA、nafion、MOF等具有纳米孔阵列、纳米通道阵列、纳米浅槽阵列的非微加工制备的纳米材料堆叠于芯片本体10上形成。Optionally, the nanofluidic channel 30 is configured as a nanohole array, a nanochannel array, and a nanoshallow groove array. The nanohole array, nanochannel array, and nanoshallow groove array can be formed by micromachining the chip body 10, or they can be formed. Non-micromachined nanomaterials such as porous silicon, PAA, nafion, and MOF with nanohole arrays, nanochannel arrays, and nanoshallow groove arrays are stacked on the chip body 10 to form.

可选的,纳流通道30被设置为纳米缝隙,纳米缝隙采用纳米颗粒组装形成。Optionally, the nanoflow channel 30 is set as a nanogap, and the nanogap is formed by assembling nanoparticles.

可选的,纳流通道30被设置为填充有纳米材料的纳米孔阵列、纳米通道阵列、纳米浅槽阵列,其中,填充材料可以是nafion,纳米孔阵列、纳米通道阵列、纳米浅槽阵列可以是微加工制备形成,也可以是多孔硅、PAA等非微加工制备的纳米材料形成。Optionally, the nanoflow channel 30 is configured as a nanohole array, a nanochannel array, or a nanoshallow groove array filled with nanomaterials, where the filling material can be nafion, and the nanohole array, nanochannel array, or nanoshallow groove array can be It is formed by micro-machining, or it can be formed by non-micro-machining nanomaterials such as porous silicon and PAA.

纳流通道30的特征尺寸小于100nm,其中特征尺寸可以指纳米浅槽或纳米通道的宽度和深度,还可以指纳米孔的直径。优选的,为保证纳流通道30的离子选择性,避免发生泄漏,纳流通道30的特征尺寸优选低于50nm。The characteristic size of the nanofluid channel 30 is less than 100 nm, where the characteristic size may refer to the width and depth of the nano-shallow groove or nano-channel, or may also refer to the diameter of the nanopore. Preferably, in order to ensure the ion selectivity of the nanoflow channel 30 and avoid leakage, the characteristic size of the nanoflow channel 30 is preferably less than 50 nm.

一个具体实施例中,第二通道20通常100-800um长、5-30um宽、1-5um深,具体尺寸需要根据实际需求来定。In a specific embodiment, the second channel 20 is usually 100-800um long, 5-30um wide, and 1-5um deep. The specific dimensions need to be determined according to actual needs.

一个具体实施例中,可以通道表面修饰,在第二通道20内引入生化标志物分子对应的探针,将富集后的生化标志物特异性识别并捕捉。例如通过核酸适配体、或者核酸修饰的抗体特异性标记目标生化分子,可使其荷体比远大于背景蛋白及其他杂质,从而可以实现只把目标生化分子及比其荷体比大的少量分子富集至第二通道20内。In a specific embodiment, the channel surface can be modified, and a probe corresponding to the biochemical marker molecule can be introduced into the second channel 20 to specifically identify and capture the enriched biochemical marker. For example, by specifically labeling a target biochemical molecule with a nucleic acid aptamer or a nucleic acid-modified antibody, the charge-to-body ratio can be much greater than the background protein and other impurities, so that only a small amount of the target biochemical molecule and its charge-to-body ratio can be achieved. The molecules are enriched into the second channel 20.

一个实施例中,第三通道40的数量为两个,两个第三通道40分设第一通道50两侧。通过设置两个第三通道40,能够进一步提高微纳流控芯片100的设计灵活度,进而增加第二通道20的数量,进而提高分离的标志物种类。In one embodiment, the number of the third channels 40 is two, and the two third channels 40 are located on both sides of the first channel 50 . By setting two third channels 40 , the design flexibility of the micro-nanofluidic chip 100 can be further improved, thereby increasing the number of second channels 20 and thereby increasing the types of separated markers.

一个实施例中,第三通道40包括第三主通道42和多个与第三主通道42连通的第三支通道43,每个第三支通道43通过纳流通道30与多个第二通道20连通。通过将第三通道40设置为相连通的第三主通道42和多个第三支通道43,并使每个第三支通道43与多个第二通道20连通,能够进一步增加第二通道20的数量,进而提高分离的标志物种类。In one embodiment, the third channel 40 includes a third main channel 42 and a plurality of third branch channels 43 connected with the third main channel 42. Each third branch channel 43 communicates with a plurality of second channels through the nanoflow channel 30. 20 connected. By configuring the third channel 40 to be a connected third main channel 42 and a plurality of third branch channels 43, and making each third branch channel 43 connected to a plurality of second channels 20, the number of second channels 20 can be further increased. quantity, thereby increasing the types of separated markers.

可选的,如图3所示,当第三通道40的数量为一个时,通过优化第一通道50,并使其包括第一主通道52和多个与第一主通道52相连通的第一支通道53,并且第一支通道53叉于相邻两第三支通道43之间以形成相互交叉的叉指状结构。第三支通道43临近相邻第一支通道53的一侧设有纳流通道30,该纳流通道30通过多个第二通道20与对应侧相邻的第一支通道53连通。此时,第一进液口51设于第一主通道52的两端和第一支通道53的自由端。第二进液口41设于第三主通道42的两端和第三支通道43的自由端。Optionally, as shown in FIG. 3 , when the number of the third channel 40 is one, the first channel 50 is optimized and includes a first main channel 52 and a plurality of third channels connected to the first main channel 52 . A branch channel 53 is formed, and the first branch channel 53 is forked between two adjacent third branch channels 43 to form an interdigitated interdigitated structure. The third branch channel 43 is provided with a flow channel 30 on a side adjacent to the adjacent first branch channel 53. The flow channel 30 is connected to the adjacent first branch channel 53 on the corresponding side through a plurality of second channels 20. At this time, the first liquid inlet 51 is provided at both ends of the first main channel 52 and the free end of the first branch channel 53 . The second liquid inlet 41 is provided at both ends of the third main channel 42 and the free end of the third branch channel 43 .

进一步的,第一主通道52和第三主通道42可以呈夹角设置,优选呈平行设置。Furthermore, the first main channel 52 and the third main channel 42 may be arranged at an angle, preferably in parallel.

进一步的,第一支通道53和第三支通道43可以呈夹角设置,优选呈平行设置。Furthermore, the first branch channel 53 and the third branch channel 43 may be arranged at an angle, preferably in parallel.

进一步的,连接于相邻第一支通道53和第三支通道43之间的多个第二通道20可以呈夹角设置,优选呈平行设置。Furthermore, the plurality of second channels 20 connected between the adjacent first branch channels 53 and the third branch channels 43 can be arranged at an angle, preferably in parallel.

可选的,如图4所示,当第三通道40的数量为两个并分设于第一通道50两侧时,其中一个第三通道40的第三支通道43叉于另一个第三通道40的相邻两第三支通道43之间以形成相互交叉的叉指状结构,此时,第一通道50呈S型并沿着叉指状结构之间的缝隙布设。每个第三支通道43的两侧均设有纳流通道30,每个纳流通道30均通过多个第二通道20与第一通道50连通。此时,第一进液口51设置于第一通道50的两端,第二进液口41设于第三主通道42的两端和第三支通道43的自由端。Optionally, as shown in FIG. 4 , when the number of the third channels 40 is two and they are arranged on both sides of the first channel 50 , the third branch channel 43 of one of the third channels 40 forks into the other third channel. An interdigitated interdigitated structure is formed between two adjacent third branch channels 43 of 40. At this time, the first channel 50 is in an S shape and is arranged along the gap between the interdigitated structures. Nanoflow channels 30 are provided on both sides of each third branch channel 43 , and each nanoflow channel 30 is connected to the first channel 50 through a plurality of second channels 20 . At this time, the first liquid inlet 51 is provided at both ends of the first channel 50 , and the second liquid inlet 41 is provided at both ends of the third main channel 42 and the free end of the third branch channel 43 .

进一步的,两个第三主通道42可以呈夹角设置,优选呈平行设置。Furthermore, the two third main channels 42 can be arranged at an angle, preferably in parallel.

进一步的,多个第三支通道43可以呈夹角设置,优选呈平行设置。Furthermore, the plurality of third branch channels 43 can be arranged at angles, preferably in parallel.

进一步的,第一通道50中与第三支通道43通过第二通道20和纳流通道30连通的部分与第三支通道43平行设置。Furthermore, the portion of the first channel 50 that communicates with the third branch channel 43 through the second channel 20 and the nanoflow channel 30 is arranged in parallel with the third branch channel 43 .

进一步的,连接于相邻第一通道50和第三支通道43之间的多个第二通道20可以呈夹角设置,优选呈平行设置。Furthermore, the plurality of second channels 20 connected between the adjacent first channels 50 and the third branch channel 43 can be arranged at an angle, preferably in parallel.

如图2所示,一个实施例中,两个第三通道40关于第一通道50对称设置。通过使两个第三通道40关于第一通道50对称,能够将第二通道20的数目翻倍,如此可获得更多的第二通道20,进而提高分离的标志物种类。As shown in FIG. 2 , in one embodiment, two third channels 40 are arranged symmetrically with respect to the first channel 50 . By making the two third channels 40 symmetrical about the first channel 50, the number of the second channels 20 can be doubled, so that more second channels 20 can be obtained, thereby increasing the types of separated markers.

进一步的,对称设置的两个第三通道40可以呈夹角设置,优选呈平行设置。Furthermore, the two symmetrically arranged third channels 40 may be arranged at an angle, preferably in parallel.

第二进液口41可设置于第三通道40的两端,也可以通过与第三通道40连通并呈角度设置的折线通道与第三通道40连通。具体的,折线通道向远离第一通道50一侧偏移以避免第一进液口51和第二进液口41距离太近而出现进液干扰。The second liquid inlet 41 can be provided at both ends of the third channel 40 , or can be connected to the third channel 40 through a folded line channel that is connected to the third channel 40 and arranged at an angle. Specifically, the folded channel is shifted away from the first channel 50 to avoid liquid inlet interference caused by the first liquid inlet 51 and the second liquid inlet 41 being too close to each other.

一个实施例中,第一通道50和第三通道40呈弯曲状设置。此时,第一进液口51设置于第一通道50的两端,第三进液口设置于第三通道40的两端。如此可通过弯曲延长第一通道50和第三通道40的长度,进而增加第二通道20的数量。In one embodiment, the first channel 50 and the third channel 40 are arranged in a curved shape. At this time, the first liquid inlet 51 is provided at both ends of the first channel 50 , and the third liquid inlet is provided at both ends of the third channel 40 . In this way, the lengths of the first channel 50 and the third channel 40 can be extended by bending, thereby increasing the number of the second channels 20 .

可选的,纳流通道30可沿着第一通道50或第三通道40的延伸方向连续设置,也可以沿着第一通道50或第三通道40的延伸方向间隔设置。Optionally, the nanofluid channels 30 may be continuously arranged along the extension direction of the first channel 50 or the third channel 40 , or may be arranged at intervals along the extension direction of the first channel 50 or the third channel 40 .

一个实施例中,第一通道50和/或第三通道40的弯曲位置呈弧形设置,或第一通道50和/或第三通道40的弯曲位置呈夹角设置。如此可进一步拓展了微纳流控芯片100的设计灵活度,方案按需设计。In one embodiment, the bending positions of the first channel 50 and/or the third channel 40 are arranged in an arc shape, or the bending positions of the first channel 50 and/or the third channel 40 are arranged in an included angle. This can further expand the design flexibility of the micro-nano fluidic chip 100, and the solution can be designed on demand.

第一通道50、第三通道40上可设置一个或多个弯曲位置。弯曲位置可成弧形设置,其中弯曲的弧形可以为优弧、劣弧或半圆弧,弯曲位置还可以呈夹角设置,其中夹角的角度的范围为45°-150°,具体如60°、90°、120°等。当同一通道上的弯曲位置为多个时,多个弯曲位置的设置方式可以相同,也可以不同。不同通道上的弯曲位置的设置方式可以相同,也可以不同。One or more bending positions may be provided on the first channel 50 and the third channel 40 . The bending position can be set in an arc shape, in which the bending arc shape can be a superior arc, a minor arc or a semi-circular arc. The bending position can also be set in an included angle, where the included angle ranges from 45° to 150°, specifically as follows 60°, 90°, 120°, etc. When there are multiple bending positions on the same channel, the setting methods of the multiple bending positions may be the same or different. The bending positions on different channels can be set in the same way or in different ways.

可选的,如图5所示,第一通道50、第三通道40和纳流通道30均设有两个弯曲位置,且每个弯曲位置均呈半圆弧设置。Optionally, as shown in FIG. 5 , the first channel 50 , the third channel 40 and the nanofluid channel 30 are each provided with two bending positions, and each bending position is arranged in a semicircular arc.

可选的,如图6所示,第一通道50、第三通道40和纳流通道30均设有六个弯曲位置,且每个弯曲位置均呈直角设置。Optionally, as shown in FIG. 6 , the first channel 50 , the third channel 40 and the nanofluid channel 30 are each provided with six bending positions, and each bending position is arranged at a right angle.

一个实施例中,第二通道20呈直线型、折线型和/或曲线形设置。如此可根据电渗流通量需求和富集性能需求设计第二通道20,从而进一步保证了微纳流控芯片100的并行分类富集需求。In one embodiment, the second channel 20 is arranged in a linear, zigzag and/or curved shape. In this way, the second channel 20 can be designed according to the electroosmotic flux requirements and enrichment performance requirements, thereby further ensuring the parallel classification and enrichment requirements of the micro-nanofluidic chip 100.

第二通道20中相对于检测区21的另一端与第一通道50呈夹角设置,具体的,该夹角的角度的取值范围为30°-90°。The other end of the second channel 20 relative to the detection area 21 is arranged at an included angle with the first channel 50. Specifically, the included angle ranges from 30° to 90°.

第二通道20中检测区21一端与纳流通道30连通,具体的,如图8所示,当第二通道20呈直线型时,第二通道20仅通过检测区21与纳流通道30连通。如图9-12所示,当第二通道20为折线形或曲线形时,除检测区21外,部分第二通道20沿纳流通道30的长度方向延伸并与纳流通道30连通。One end of the detection area 21 in the second channel 20 is connected to the nanofluid channel 30. Specifically, as shown in Figure 8, when the second channel 20 is linear, the second channel 20 is only connected to the nanofluid channel 30 through the detection area 21. . As shown in FIGS. 9-12 , when the second channel 20 is in a zigzag or curved shape, except for the detection area 21 , part of the second channel 20 extends along the length direction of the nanoflow channel 30 and is connected with the nanoflow channel 30 .

同一微纳流控芯片100中,如图9所示,多个第二通道20的形状可以相同,如图10-12所示,多个第二通道20的形状也可以不同。In the same micro-nanofluidic chip 100, as shown in FIG. 9, the shapes of the plurality of second channels 20 may be the same. As shown in FIGS. 10-12, the shapes of the plurality of second channels 20 may also be different.

一个实施例中,第二通道20呈折线型设置时,第二通道20包括一个或多个折角,每个折角的角度在30-150°之间。In one embodiment, when the second channel 20 is arranged in a folded line shape, the second channel 20 includes one or more folded corners, and the angle of each folded corner is between 30-150°.

可选的,如图9所示,第二通道20具有一个折角,每个折角的角度在90°,当然,折角的角度还可以是30-150°之间的任意角度,例如45°、60°、120°、150°等。如图10所示,第二通道20中,呈折角设置的两个通道可与第一通道50或纳流通道30的长度方向垂直或呈夹角设置。Optionally, as shown in FIG. 9 , the second channel 20 has a folding angle, and the angle of each folding angle is 90°. Of course, the angle of the folding angle can also be any angle between 30° and 150°, such as 45°, 60°. °, 120°, 150°, etc. As shown in FIG. 10 , in the second channel 20 , the two channels arranged at an angle may be arranged perpendicularly or at an angle to the length direction of the first channel 50 or the nanoflow channel 30 .

一个实施例中,第二通道20的宽度为5-30um,例如,第二通道20的宽度可以为8um、10um、15um、20um、24um、28um,具体可根据需要自行选择。如图10所示,同一微纳流控芯片100中,多条第二通道20的宽度可以相同,也可以不同,并且同一第二通道20中,第二通道20的宽度可相同,也可以根据折线分段设置成不同宽度。In one embodiment, the width of the second channel 20 is 5-30um. For example, the width of the second channel 20 can be 8um, 10um, 15um, 20um, 24um, or 28um, which can be selected according to needs. As shown in FIG. 10 , in the same micro-nanofluidic chip 100 , the widths of the plurality of second channels 20 can be the same or different, and in the same second channel 20 , the widths of the second channels 20 can be the same, or can be based on Polyline segments are set to different widths.

图10-12都展示了8种不同的第一通道50设计,这是为了全面展示各种可能的结构选项,并不意味着实际应用的芯片会同时包含这8种设计。在实际芯片中,通常是从这8种设计中选取一种,然后以并行的方式排列数十至上百根。Figures 10-12 all show 8 different first channel 50 designs. This is to fully demonstrate various possible structural options, and does not mean that the actual application chip will contain all 8 designs at the same time. In actual chips, one of these eight designs is usually selected, and then dozens to hundreds of wires are arranged in parallel.

一个实施例中,第一通道50和第三通道40层叠设置,多个第二通道20均与第一通道50和第三通道40垂直设置。如图7所示,本实施例通过将第一通道50、第二通道20、第三通道40和纳流通道30进行三维排布设置,实现超高密度的富集通道阵列设计。In one embodiment, the first channel 50 and the third channel 40 are arranged in a stack, and the plurality of second channels 20 are arranged perpendicularly to the first channel 50 and the third channel 40 . As shown in FIG. 7 , this embodiment achieves an ultra-high-density enrichment channel array design by arranging the first channel 50 , the second channel 20 , the third channel 40 and the nanoflow channel 30 in a three-dimensional arrangement.

上述实施例通过对第二通道20形状、宽度以及弯折角度等方面拓展第二通道20的设计形式,如此可进一步丰富第二通道20的设计形式,从而方便对第二通道20进行区分设计,从而便于使第二通道20富集具有不同特征的标志物分子。The above embodiment expands the design form of the second channel 20 in terms of the shape, width, and bending angle of the second channel 20, which can further enrich the design form of the second channel 20, thereby facilitating the differentiated design of the second channel 20. This facilitates enrichment of marker molecules with different characteristics in the second channel 20 .

一个具体实施例中,本体包括衬底和盖板,纳流通道30设于衬底上;第一通道50和第三通道40设于盖板上,第二通道20可设于衬底上,还可设于盖板上,盖板与衬底适配键合封装。In a specific embodiment, the body includes a substrate and a cover plate, the nanofluid channel 30 is provided on the substrate; the first channel 50 and the third channel 40 are provided on the cover plate, and the second channel 20 can be provided on the substrate, It can also be provided on the cover plate, and the cover plate and the substrate are adapted for bonding and packaging.

为了制备微纳流控芯片100,采用MEMS(微机电系统)工艺对器件流道结构进行加工,可选择硅、玻璃、石英等材料作为衬底材料。纳流通道30可以采用微加工制备的纳米孔、纳米通道、纳米浅槽等,也可以选择多孔硅、PAA、nafion、MOF等非微加工制备的纳米材料,或者采用纳米颗粒自组装形成纳米缝隙。第一通道50尺寸参数要求严格,采用微加工的方式制备,精确控制其尺寸,第一通道50可以加工在衬底上,也可以加工在盖板材料上。第三通道40和第二通道20尺寸较大,通常百微米量级,且对其尺寸精度要求不严格,通常加工在盖板上。最后键合封装,完成整个微纳流控芯片100的搭建。为了降低制备成本,盖板材料可以选择PMMA等高分子材料。In order to prepare the micro-nanofluidic chip 100, the device flow channel structure is processed using MEMS (micro-electromechanical systems) technology, and materials such as silicon, glass, and quartz can be selected as substrate materials. The nanofluid channel 30 can use nanopores, nanochannels, nanoshallow grooves, etc. prepared by micromachining, or can choose nanomaterials prepared by non-micromachining such as porous silicon, PAA, nafion, MOF, or use nanoparticles to self-assemble to form nanogaps. . The first channel 50 has strict dimensional parameters and is prepared by micro-machining to precisely control its size. The first channel 50 can be processed on the substrate or on the cover material. The size of the third channel 40 and the second channel 20 are relatively large, usually in the order of hundreds of microns, and their dimensional accuracy is not strictly required, and they are usually processed on the cover plate. Finally, bonding and packaging are completed to complete the construction of the entire micro-nanofluidic chip 100. In order to reduce the preparation cost, polymer materials such as PMMA can be selected as the cover plate material.

本发明实施例还提供了生化标志物分子的并行富集检测方法,利用上述中任意一项所述的微纳流控芯片完成,包括:Embodiments of the present invention also provide a method for parallel enrichment and detection of biochemical marker molecules, which is accomplished using any one of the above micro-nanofluidic chips, including:

向第一注液口、第二注液口中加入缓冲液,静置至缓冲液填充满第一通道、第二通道、第三通道和纳流通道后封装保存;Add the buffer solution to the first injection port and the second injection port, and let it stand until the buffer solution fills the first channel, the second channel, the third channel and the nanoflow channel, and then seals and saves;

将待测样品注入第一注液口,同时向第一注液口和第二注液口上加载大小不同的电压以形成由第二注液口指向第一注液口的电场,使生化标志物分子富集于第二通道;Inject the sample to be tested into the first injection port, and at the same time load voltages of different sizes on the first and second injection ports to form an electric field directed from the second injection port to the first injection port, so that the biochemical markers Molecules are enriched in the second channel;

针对富集于第二通道检测区的生化标志物分子进行传感分析。Sensing analysis is performed on the biochemical marker molecules enriched in the detection area of the second channel.

实施例一:Example 1:

本实施例图2所示的微纳流控芯片100为例,进一步说明本申请中微纳流控芯片100的制备工艺和使用方法。The micro-nanofluidic chip 100 shown in FIG. 2 of this embodiment is taken as an example to further illustrate the preparation process and usage method of the micro-nanofluidic chip 100 in this application.

具体的,微纳流控芯片100的衬底材料采用石英玻璃,其优势是自身绝缘,无需额外绝缘化处理步骤,可采用MEMS工艺微加工;纳流通道30采用纳米浅槽阵列,可标准化制备,纳米浅槽特征尺寸小于50nm,满足离子选择性要求;第二通道20和第一通道50通过PDMS翻模制备。Specifically, the substrate material of the micro-nanofluidic chip 100 is quartz glass, which has the advantage of being self-insulating and does not require additional insulation processing steps. It can be micro-processed using MEMS technology; the nanofluidic channel 30 uses a nano-shallow groove array and can be prepared in a standardized manner. , the characteristic size of the nano-shallow groove is less than 50nm, which meets the ion selectivity requirements; the second channel 20 and the first channel 50 are prepared by flipping the PDMS mold.

一、器件制备:1. Device preparation:

1.通过stepper光刻,在石英玻璃衬底上制备出百纳米浅槽阵列,线宽400nm,长度3mm,周期2um,阵列数目2000,每个衬底尺寸为15mm*15mm,纳米浅槽阵列位于单元中心位置,然后利用刻蚀技术,如IBE,刻蚀石英50nm,最后激光划片,便完成器件衬底的制备。1. Prepare a 100-nanometer shallow groove array on a quartz glass substrate through stepper photolithography. The line width is 400nm, the length is 3mm, the period is 2um, the number of arrays is 2000, and the size of each substrate is 15mm*15mm. The nanometer shallow groove array is located at Then use etching technology, such as IBE, to etch the quartz to 50nm, and finally laser scribe to complete the preparation of the device substrate.

2.SU-8光刻制备PDMS翻模模具,该模具设计为SU-8双层结构,第一层结构代表第二通道20,第二层结构代表第一通道50和第三通道40。第二通道20为弯折结构阵列,于第一通道50两侧对称分布,总共120根。第二通道20深度2um,宽度7.5um,长度100um+100um,周期150um,第二通道20尖端处为圆盘状,直径30um,深2um,作为检测区21。第一通道50和第三通道40深度50um,宽度200um。模具制备完成后,采用翻模工艺制备第二通道20等结构,材料为PDMS,PDMS和固化剂的比例为5:1,不采用常用的10:1是为了增强PDMS的硬度,防止后续键合过程中的塌陷。2. Use SU-8 photolithography to prepare a PDMS flip mold. The mold is designed as a SU-8 double-layer structure. The first layer structure represents the second channel 20, and the second layer structure represents the first channel 50 and the third channel 40. The second channel 20 is an array of bent structures, symmetrically distributed on both sides of the first channel 50, with a total of 120 channels. The second channel 20 has a depth of 2um, a width of 7.5um, a length of 100um+100um, and a period of 150um. The tip of the second channel 20 is disc-shaped, with a diameter of 30um and a depth of 2um, serving as the detection area 21. The first channel 50 and the third channel 40 have a depth of 50um and a width of 200um. After the mold preparation is completed, the mold flipping process is used to prepare the second channel 20 and other structures. The material is PDMS. The ratio of PDMS to curing agent is 5:1. The commonly used 10:1 is not used to enhance the hardness of PDMS and prevent subsequent bonding. collapse during the process.

3.采用共价键结合的方式,将捕获抗体修饰在200nm聚苯乙烯颗粒上,之后采用微点样的方式,将修饰了抗体的纳米颗粒悬浊液点样在检测区21,点样直径为20um,等待其干燥后放入密封袋中保存备用。如需同时检测20种标志物,可分别点样20类捕获抗体。3. Use covalent bonding to modify the capture antibody on 200nm polystyrene particles, and then use micro-spotting to spot the modified antibody nanoparticle suspension in the detection area 21. The spotting diameter 20um, wait for it to dry and then put it in a sealed bag for later use. If you need to detect 20 markers at the same time, 20 types of capture antibodies can be spotted separately.

4.PDMS与石英衬底键合面用氧等离子体处理表面,设备:氧等离子体清洗机(PDC-MG),功率150w,时间30s,之后在显微镜下对准键合。为增强键合强度,可放在90度热板上烘5~10min。4. The bonding surface of PDMS and quartz substrate is treated with oxygen plasma. Equipment: oxygen plasma cleaning machine (PDC-MG), power 150w, time 30s, and then aligned and bonded under a microscope. In order to enhance the bonding strength, it can be baked on a 90 degree hot plate for 5 to 10 minutes.

二、配制测试所需试剂2. Preparation of reagents required for testing

1.1mMPBS缓冲液:用1×PBS配制富集检测所需的缓冲液,用去离子水将1×PBS稀释150倍;1.1mMPBS buffer: Use 1×PBS to prepare the buffer required for enrichment detection, and dilute 1×PBS 150 times with deionized water;

2.封闭液:在1mMPBS缓冲液中,加入0.1%的BSA和0.05%的tween-20;2. Blocking solution: Add 0.1% BSA and 0.05% tween-20 to 1mMPBS buffer;

3.洗涤液:在1mMPBS缓冲液中,加入0.05%的tween-20;3. Washing solution: Add 0.05% tween-20 to 1mMPBS buffer;

4.准备好待测样品。4. Prepare the sample to be tested.

三、富集检测3. Enrichment detection

工作时,第一进液口51依次加入封闭液,静置1-3min,待封闭液通过毛细作用填充满第二通道20和纳流通道30后,多个第二进液口41依次加入封闭液。微纳流控芯片100内的流道结构中填充满封闭液后用Scotch胶带封装4度保存。封闭30min左右,然后用洗涤液替换掉封闭液。最后将待测样品加到其中一个第一进液口51。两个第一进液口51接地,多个第二进液口41接正电位/工作电极,待测样品中的带电粒子会受到电场力的作用迁移进入并行第二通道20。During operation, the sealing liquid is added to the first liquid inlet 51 in sequence and left for 1-3 minutes. After the sealing liquid fills the second channel 20 and the nanoflow channel 30 through capillary action, multiple second liquid inlets 41 are added to the sealing liquid in sequence. liquid. The flow channel structure in the micro-nanofluidic chip 100 is filled with sealing liquid and then sealed with Scotch tape and stored at 4 degrees. Block for about 30 minutes, then replace the blocking solution with washing solution. Finally, the sample to be tested is added to one of the first liquid inlets 51. The two first liquid inlets 51 are connected to the ground, and the plurality of second liquid inlets 41 are connected to the positive potential/working electrode. The charged particles in the sample to be measured will be affected by the electric field force and migrate into the parallel second channel 20 .

最后应说明的是:以上各实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述各实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分或者全部技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention, but not to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: The technical solutions described in the foregoing embodiments can still be modified, or some or all of the technical features can be equivalently replaced; and these modifications or substitutions do not deviate from the essence of the corresponding technical solutions from the technical solutions of the embodiments of the present invention. scope.

Claims (10)

1.一种微纳流控芯片,其特征在于,包括芯片本体,所述芯片本体上设有:1. A micro-nanofluidic chip, characterized in that it includes a chip body, and the chip body is provided with: 第一通道,所述第一通道上设有第一进液口;A first channel, the first channel is provided with a first liquid inlet; 多个第二通道,每个所述第二通道均设有检测区,并且每个所述第二通道均与所述第一通道连通;A plurality of second channels, each second channel is provided with a detection area, and each second channel is connected to the first channel; 第三通道,所述第三通道与第二进液口连通;a third channel, the third channel is connected with the second liquid inlet; 纳流通道,所述纳流通道具有离子选择功能,所述纳流通道的一侧与第三通道连通,另一侧分别与多个第二通道连通。A nanoflow channel has an ion selection function. One side of the nanoflow channel is connected to the third channel, and the other side is connected to a plurality of second channels. 2.根据权利要求1所述的微纳流控芯片,其特征在于,所述第三通道的数量为两个,两个所述第三通道分设所述第一通道两侧。2. The micro-nanofluidic chip according to claim 1, wherein the number of the third channels is two, and the two third channels are respectively located on both sides of the first channel. 3.根据权利要求1或2所述的微纳流控芯片,其特征在于,所述第三通道包括第三主通道和多个与所述第三主通道连通的第三支通道,每个所述第三支通道通过所述纳流通道与多个所述第二通道连通。3. The micro-nanofluidic chip according to claim 1 or 2, characterized in that the third channel includes a third main channel and a plurality of third branch channels connected to the third main channel, each The third branch channel is connected to a plurality of second channels through the nanoflow channel. 4.根据权利要求2所述的微纳流控芯片,其特征在于,两个所述第三通道关于所述第一通道对称设置。4. The micro-nanofluidic chip according to claim 2, wherein the two third channels are arranged symmetrically with respect to the first channel. 5.根据权利要求1或2所述的微纳流控芯片,其特征在于,所述第一通道和所述第三通道呈弯曲状设置。5. The micro-nanofluidic chip according to claim 1 or 2, characterized in that the first channel and the third channel are arranged in a curved shape. 6.根据权利要求5所述的微纳流控芯片,其特征在于,所述第一通道和/或所述第三通道的弯曲位置呈弧形设置,或6. The micro-nanofluidic chip according to claim 5, characterized in that the bending position of the first channel and/or the third channel is arranged in an arc shape, or 所述第一通道和/或所述第三通道的弯曲位置呈夹角设置。The bending positions of the first channel and/or the third channel are arranged at an included angle. 7.根据权利要求1所述的微纳流控芯片,其特征在于,所述第二通道呈直线型、折线型和/或曲线形设置;和/或所述第二通道的特征尺寸为5-30um。7. The micro-nanofluidic chip according to claim 1, characterized in that the second channel is arranged in a linear, zigzag and/or curved shape; and/or the characteristic size of the second channel is 5 -30um. 8.根据权利要求7所述的微纳流控芯片,其特征在于,所述第二通道呈折线型设置时,所述第二通道包括一个或多个折角,每个所述折角的角度在30-150°之间。8. The micro-nanofluidic chip according to claim 7, characterized in that when the second channel is arranged in a folded line, the second channel includes one or more folded corners, and the angle of each folded corner is between Between 30-150°. 9.根据权利要求1所述的微纳流控芯片,其特征在于,所述第一通道和所述第三通道层叠设置,多个所述第二通道均与所述第一通道和所述第三通道垂直设置。9. The micro-nanofluidic chip according to claim 1, wherein the first channel and the third channel are stacked, and a plurality of the second channels are connected with the first channel and the third channel. The third channel is set vertically. 10.一种生化标志物分子的并行富集检测方法,其特征在于,利用权利要求1-9中任意一项所述的微纳流控芯片完成,包括:10. A parallel enrichment detection method of biochemical marker molecules, characterized in that it is completed using the micro-nanofluidic chip according to any one of claims 1 to 9, including: 向第一注液口、第二注液口中加入缓冲液,静置至缓冲液填充满第一通道、第二通道、第三通道和纳流通道后封装保存;Add the buffer solution to the first injection port and the second injection port, and let it stand until the buffer solution fills the first channel, the second channel, the third channel and the nanoflow channel, and then it is packaged and stored; 将待测样品注入第一注液口,同时向第一注液口和第二注液口上加载大小不同的电压以形成由第二注液口指向第一注液口的电场,使生化标志物分子富集于第二通道;Inject the sample to be tested into the first injection port, and at the same time load voltages of different sizes on the first and second injection ports to form an electric field directed from the second injection port to the first injection port, so that the biochemical markers Molecules are enriched in the second channel; 针对富集于第二通道检测区的生化标志物分子进行传感分析。Sensing analysis is performed on the biochemical marker molecules enriched in the detection area of the second channel.
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