CN117488278A - Buffer gas bag device for pipeline and atomic layer deposition equipment - Google Patents
Buffer gas bag device for pipeline and atomic layer deposition equipment Download PDFInfo
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- CN117488278A CN117488278A CN202311752463.9A CN202311752463A CN117488278A CN 117488278 A CN117488278 A CN 117488278A CN 202311752463 A CN202311752463 A CN 202311752463A CN 117488278 A CN117488278 A CN 117488278A
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- pipeline
- interface
- gas
- valve
- gas bag
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- 238000000231 atomic layer deposition Methods 0.000 title claims abstract description 13
- 238000003860 storage Methods 0.000 claims abstract description 25
- 238000007789 sealing Methods 0.000 claims description 17
- 239000002775 capsule Substances 0.000 claims description 9
- 238000003466 welding Methods 0.000 claims description 8
- 210000000621 bronchi Anatomy 0.000 claims description 2
- 238000004806 packaging method and process Methods 0.000 claims 4
- 230000003139 buffering effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000012423 maintenance Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 239000002184 metal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000013618 particulate matter Substances 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Buffer Packaging (AREA)
Abstract
The application relates to the technical field of semiconductor manufacturing process equipment, and discloses a buffer gas bag device for a pipeline, which comprises: the air bag body is provided with a first interface and a second interface at two ends; the first valve is fixedly connected with the first interface through a first pipeline; the second valve is fixedly connected with the second interface through a second pipeline, and the first pipeline and the second pipeline are arranged in parallel; and a gas storage inner cavity communicated with the first interface and the second interface is formed in the gas bag body, wherein the shape of the gas storage inner cavity and the shape of the gas bag body are formed in a manner of being arranged and combined according to a plurality of preset shapes. The application also discloses an atomic layer deposition device.
Description
Technical Field
The application relates to the technical field of semiconductor manufacturing process equipment, for example, to a buffer gas pocket device for a pipeline and atomic layer deposition equipment.
Background
Currently, atomic layer deposition (Atomic Layer Deposition, ALD) equipment typically uses buffer packets for in-line gas storage. The buffer gas bag is a device with more gas storage and is also a key device which is easy to corrode or pollute.
In the process of implementing the embodiments of the present disclosure, it is found that at least the following problems exist in the related art:
first, the long piping and the many elbow lines of the existing gas bag result in a decay in the delivery pressure. Secondly, the cavity structure of the existing gas bag is easy to lead the process gas to stay in dead areas, so that corrosive gas with longer stay time is caused, the cavity of the buffer gas bag device is subjected to quality change or corrosion, and the pipe wall is polluted by metal or particles. Thirdly, the sealing performance of the buffer gas bag device needs to be ensured when the existing gas bag is maintained, so that the maintenance difficulty is high and the maintenance cost is high. Finally, the existing gas bag has more joints of the pipeline, so that the leakage points of the process gas are more, and the possibility of misoperation is higher.
It should be noted that the information disclosed in the foregoing background section is only for enhancing understanding of the background of the present application and thus may include information that does not form the prior art that is already known to those of ordinary skill in the art.
Disclosure of Invention
The following presents a simplified summary in order to provide a basic understanding of some aspects of the disclosed embodiments. This summary is not an extensive overview, and is intended to neither identify key/critical elements nor delineate the scope of such embodiments, but is intended as a prelude to the more detailed description that follows.
The embodiment of the disclosure provides a buffer gas pocket device and atomic layer deposition equipment for a pipeline, which are used for reasonably optimizing layout, reducing dead zones, reducing maintenance difficulty and maintenance cost, reducing leakage points and reducing the possibility of misoperation.
In some embodiments, the buffer gas packet apparatus for a pipeline includes:
the air bag body is provided with a first interface and a second interface at two ends;
the first valve is fixedly connected with the first interface through a first pipeline;
the second valve is fixedly connected with the second interface through a second pipeline; the first pipeline and the second pipeline are arranged in parallel;
and a gas storage inner cavity communicated with the first interface and the second interface is formed in the gas bag body, wherein the shape of the gas storage inner cavity and the shape of the gas bag body are formed in a manner of being arranged and combined according to a plurality of preset shapes.
Optionally, the first interface corresponds to an air inlet end of the air bag body, and the first valve is an air inlet valve;
the first interface is connected with the first valve in a welding mode through a first pipeline.
Optionally, the second interface corresponds to an air outlet end of the air bag body, and the second valve is an air outlet valve;
the second interface is connected with the second valve in a welding mode through a second pipeline.
Optionally, the second pipeline is provided with a branch gas pipeline, and the buffer gas packet device further includes:
the sealing joint is fixedly connected with the bronchus pipeline;
and the functional piece is connected with the sealing joint.
Optionally, the sealing joint is a VCR joint, the sealing joint is connected with the bronchial tube in a welding manner, and the functional component is a pressure gauge.
Optionally, the first pipeline and the second pipeline are both single-section straight pipes.
Optionally, the arrangement and combination mode refers to selecting any one of the preset shapes as an external shape of the air bag body, and simultaneously selecting any one of the preset shapes as an internal shape of the air storage cavity.
Optionally, the plurality of preset shapes includes a shuttle shape, a capsule shape, and a cylindrical shape.
Optionally, the buffer gas bag device is an integrated integrally formed structure.
In some embodiments, the atomic layer deposition apparatus includes:
an air box and an equipment cavity;
the buffer gas bag device comprises a gas box, a first valve, a second valve, a first interface, a second interface, a first device cavity and a second device cavity.
The buffer gas bag device and the atomic layer deposition equipment for the pipeline provided by the embodiment of the disclosure can realize the following technical effects:
through the pipeline of straight line structure with the valve fixed connection at gas pocket body and its both ends for the buffer memory gas pocket device of this application shortens, the volume reduces in whole. Therefore, the length of the pipeline of the buffer gas bag device is reduced, an elbow pipeline is avoided, the conveying pressure is ensured, the tightness of the gas bag is improved, the maintenance difficulty and the maintenance cost are reduced, the number of joints of the pipeline is reduced, and the leakage point of process gas and the possibility of misoperation are reduced. Meanwhile, the shapes of the gas storage inner cavity and the gas bag body are formed in a mode of being formed by a plurality of preset shapes in a permutation and combination mode, so that the dead zone of the gas bag is reduced together by matching with a pipeline with a linear structure, the detention time of corrosive gas is shortened, and the service life of the gas bag is prolonged.
The foregoing general description and the following description are exemplary and explanatory only and are not restrictive of the application.
Drawings
One or more embodiments are illustrated by way of example and not limitation in the figures of the accompanying drawings, in which like references indicate similar elements, and in which like reference numerals refer to similar elements, and in which:
FIG. 1 is a schematic diagram of a related art air bag structure;
fig. 2 is a schematic structural diagram of a buffer air-bag device according to an embodiment of the present disclosure;
FIG. 3 is a schematic cross-sectional view of a buffer gas pocket apparatus provided in an embodiment of the present disclosure;
FIG. 4 is a schematic view of a gas storage cavity provided in an embodiment of the present disclosure;
FIG. 5 is a schematic view of another gas storage cavity provided in an embodiment of the present disclosure;
FIG. 6 is a schematic view of another gas storage cavity provided in an embodiment of the present disclosure;
fig. 7 is a schematic structural diagram of an atomic layer deposition apparatus according to an embodiment of the present disclosure.
Reference numerals:
1-an air bag body; 101-a first interface; 102-a second interface; 103-a gas storage inner cavity; 2-a first valve; 3-a second valve; 4-a first pipeline; 5-a second pipeline; 6-branch gas pipeline; 7-sealing the joint; 8-function parts; 9-shuttle shape; 10-capsule shape; 11-a cylindrical shape; 12-an air box; 13-device cavity.
Detailed Description
So that the manner in which the features and techniques of the disclosed embodiments can be understood in more detail, a more particular description of the embodiments of the disclosure, briefly summarized below, may be had by reference to the appended drawings, which are not intended to be limiting of the embodiments of the disclosure. In the following description of the technology, for purposes of explanation, numerous details are set forth in order to provide a thorough understanding of the disclosed embodiments. However, one or more embodiments may still be practiced without these details. In other instances, well-known structures and devices may be shown simplified in order to simplify the drawing.
The terms first, second and the like in the description and in the claims of the embodiments of the disclosure and in the above-described figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate in order to describe embodiments of the present disclosure. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion.
In the embodiments of the present disclosure, the terms "upper", "lower", "inner", "middle", "outer", "front", "rear", and the like indicate an azimuth or a positional relationship based on that shown in the drawings. These terms are used primarily to better describe embodiments of the present disclosure and embodiments thereof and are not intended to limit the indicated device, element, or component to a particular orientation or to be constructed and operated in a particular orientation. Also, some of the terms described above may be used to indicate other meanings in addition to orientation or positional relationships, for example, the term "upper" may also be used to indicate some sort of attachment or connection in some cases. The specific meaning of these terms in the embodiments of the present disclosure will be understood by those of ordinary skill in the art in view of the specific circumstances.
In addition, the terms "disposed," "connected," "secured" and "affixed" are to be construed broadly. For example, "connected" may be in a fixed connection, a removable connection, or a unitary construction; may be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements, or components. The specific meaning of the above terms in the embodiments of the present disclosure may be understood by those of ordinary skill in the art according to specific circumstances.
The term "plurality" means two or more, unless otherwise indicated.
In the embodiment of the present disclosure, the character "/" indicates that the front and rear objects are an or relationship. For example, A/B represents: a or B.
The term "and/or" is an associative relationship that describes an object, meaning that there may be three relationships. For example, a and/or B, represent: a or B, or, A and B.
It should be noted that, without conflict, the embodiments of the present disclosure and features of the embodiments may be combined with each other.
In the related art, as shown in fig. 1, both the inlet end and the outlet end of the existing air bag are provided with vacuum connection radial seal (Vacuum Coupling Radius, VCR) interfaces for controlling the connection of valves and other pipes. A pressure gauge for measuring the pressure of the gas in the gas bag is arranged at the front end of the gas inlet end of the gas bag. An air inlet valve and an air outlet valve are arranged at two ends of the air bag. However, V01 is routed to the far end using long distance tubing due to insufficient real space and other special reasons. This can lead to problems with existing gas bags, for example, long piping and multiple bends leading to attenuation of the delivery pressure. The gas bag has dead zones, and the gas bag carries an elbow pipeline, so that the process gas is easy to stay in the dead zones, especially excessive corrosive gas, and the gas with long residence time is easy to generate quality change or corrode the pipe wall to generate metal or particle pollution and the like. The gas bag is a device with more gas storage and is also a key device easy to corrode or pollute, so that the gas storage inner cavity inside the gas bag cannot contact air, valves at two ends of the gas bag are not required to be kept sealed during equipment maintenance, and maintenance difficulty is increased and cost is high. The number of joints on the whole pipeline of the air bag is large, so that leakage points are increased, and the probability of misoperation is also increased.
In view of the above technical problems, an embodiment of the disclosure provides a buffer air bag device for a pipeline, as shown in fig. 2, including an air bag body 1, a first valve 2 and a second valve 3, wherein a first interface 101 and a second interface 102 are disposed at two ends of the air bag body 1. The first valve 2 is fixedly connected with the first connector 101 through a first pipeline 4. The second valve 3 is fixedly connected with the second connector 102 through a second pipeline 5, the first pipeline 4 and the second pipeline 5 are arranged in parallel, and the first pipeline and the second pipeline which are parallel to each other can be aligned along the same straight line or can be staggered with each other; a gas storage cavity 103 which is respectively communicated with the interface and the second interface 102 is formed inside the gas bag body 1, wherein the shape of the gas storage cavity 103 and the shape of the gas bag body 1 are formed in a mode of being arranged and combined according to a plurality of preset shapes.
Adopt the buffer memory air pocket device for pipeline that this disclosed embodiment provided, through parallel arrangement's pipeline with the air pocket body rather than the valve fixed connection at both ends for the buffer memory air pocket device of this application shortens, the volume reduces in whole length. Therefore, the length of the pipeline of the buffer gas bag device is reduced, an elbow pipeline is avoided, the conveying pressure is ensured, the tightness of the gas bag is improved, the maintenance difficulty and the maintenance cost are reduced, the number of joints of the pipeline is reduced, and the leakage point of process gas and the possibility of misoperation are reduced. Meanwhile, the shapes of the gas storage inner cavity and the gas bag body, which are formed by a plurality of preset shapes in a permutation and combination mode, are formed, so that the dead zone of the gas bag is reduced together by matching with pipelines aligned along the same straight line, the residence time of corrosive gas is reduced, and the service life of the gas bag is prolonged.
In one embodiment of the present application, as shown in connection with fig. 2 and 3, the first interface 101 of the present application may be an air inlet end of the air bag body 1, and the first valve 2 may be an air inlet valve. The first connection 101 is connected to the first valve 2 by means of a first line 4 by means of welding. The second port 102 of the present application may be an air outlet end of the air bag body 1, and the second valve 3 may be an air outlet valve. The second connection 102 is connected to the second valve 3 by means of a second line 5 by means of welding. Meanwhile, the buffer gas bag device does not contain an elbow pipeline on the whole, the length of the first pipeline 4 and the second pipeline 5 are straight pipes, as an embodiment, the length of the first pipeline 4 and the second pipeline 5 are single-section straight pipes, the length is smaller than the pipeline design adopting an elbow, connection processing between multiple sections of pipes is avoided, the structure is simpler, and the control cost and leakage risk are facilitated.
Like this, through with air pocket and admission valve and air outlet valve welding as an organic wholely for the buffer memory air pocket device of this application forms integrated into one piece structure, when reducing the joint, also shortens whole length, and the volume reduces. And reduces the possible leakage points, and also provides convenience for maintenance. Furthermore, because the gas line piping typically used in the industry also requires periodic maintenance and replacement, the associated valves also require periodic cleaning or replacement. Therefore, for the integrated cache gas bag device, two ends of the cache gas bag device are only required to be disconnected integrally, and the cache gas bag device is replaced or cleaned after being removed integrally. Meanwhile, the integrated structure can also prevent the air from being exposed after the buffer air bag is cleaned to increase the pollution to the inside of the air bag. In particular, it is possible to prevent contamination caused by an artificial malfunction, such as opening a certain interface.
In one embodiment of the present application, as shown in connection with fig. 2 and 3, the second conduit 5 of the present application is provided with a branch conduit 6 such that the second conduit 5 forms a three-way straight conduit structure. The buffer air bag device further comprises a sealing joint 7 and a functional piece 8, wherein the sealing joint 7 is fixedly connected with the bronchial pipeline 6, and the functional piece 8 is connected with the sealing joint 7.
Alternatively, the sealing joint 7 of the present application may be a vacuum-bonded radial seal VCR joint, which is one of the face-seal joints, and the sealing element is a metal gasket. The metal gasket is pressed by interlocking the internal thread and the external thread, so that the gasket is deformed to a certain extent, and the sealing effect is achieved. VCR joints were first used in the aerospace industry and are currently in common use in the semiconductor photovoltaic fabrication industry. In particular, the sealing joint of the present application is connected to the bronchial line 6 in a welded manner, and the functional element 8 may be a pressure gauge.
Thus, by providing the pressure gauge at the position of the air outlet end of the air bag body, the pressure value closer to the actual pressure value can be measured better.
In one embodiment of the present application, the preset shapes of the present application include a shuttle shape 9, a capsule shape 10, and a cylindrical shape. Meanwhile, any one of the preset shapes is selected as the external shape of the gas bag body, and any one of the preset shapes is selected as the internal shape of the gas storage inner cavity. For example, any one shape is selected from the shuttle shape 9, the capsule shape 10, and the cylindrical shape as the outer shape of the air bag body 1, while any one shape is selected from the shuttle shape 9, the capsule shape 10, and the cylindrical shape as the inner shape of the air storage chamber 103.
Specifically, as shown in fig. 3 to 6, the shape of the air bag body 1 may be a shuttle shape 9, a lateral capsule shape 10, a cylindrical shape, or the like, both ends of which are narrower than the middle. The shape of the air storage cavity 103 can be a shuttle shape 9, a transverse capsule shape 10 or a cylinder shape with two ends narrower than the middle part, etc. Of course, it should be understood that the outer shape and the inner shape may form various arrangements and combinations, for example, the air bag body 1 is in the shape of a shuttle 9, the air storage cavity 103 is in the shape of a capsule 10, or the bag body is in the shape of a cylinder, the air storage cavity 103 is in the shape of a shuttle 9, etc.
The buffer gas pocket device can reduce dead zones through reasonable optimization layout, so that particle pollution and other pollution to process results are reduced. The buffer gas bag device is short in overall length, small in size, convenient to maintain and low in cost, and possible leakage points are reduced.
Referring to fig. 7, an embodiment of the present disclosure provides an atomic layer deposition apparatus, including an air box 12, an apparatus cavity 13, and a buffer air bag device of the present disclosure, where the air box 12 is connected to a first interface 101 of an air bag body 1 through a first valve 2, and the apparatus cavity 13 is connected to a second interface 102 of the air bag body 1 through a second valve 3.
The above description and the drawings illustrate embodiments of the disclosure sufficiently to enable those skilled in the art to practice them. Other embodiments may include structural and other modifications. The embodiments represent only possible variations. Individual components and functions are optional unless explicitly required, and the sequence of operations may vary. Portions and features of some embodiments may be included in, or substituted for, those of others. The embodiments of the present disclosure are not limited to the structures that have been described above and shown in the drawings, and various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.
Claims (10)
1. A buffer gas packet apparatus for a pipeline, comprising:
the air bag body is provided with a first interface and a second interface at two ends;
the first valve is fixedly connected with the first interface through a first pipeline;
the second valve is fixedly connected with the second interface through a second pipeline, and the first pipeline and the second pipeline are arranged in parallel;
and a gas storage inner cavity communicated with the first interface and the second interface is formed in the gas bag body, wherein the shape of the gas storage inner cavity and the shape of the gas bag body are formed in a manner of being arranged and combined according to a plurality of preset shapes.
2. The buffer gas bag device according to claim 1, wherein the first interface corresponds to an air inlet end of a gas bag body, and the first valve is an air inlet valve;
the first interface is connected with the first valve in a welding mode through a first pipeline.
3. The buffer gas bag device according to claim 1, wherein the second interface corresponds to an air outlet end of the gas bag body, and the second valve is an air outlet valve;
the second interface is connected with the second valve in a welding mode through a second pipeline.
4. The buffer gas packaging device according to claim 1, wherein the second pipeline is provided with a branch gas pipeline, the buffer gas packaging device further comprising:
the sealing joint is fixedly connected with the bronchus pipeline;
and the functional piece is connected with the sealing joint.
5. The buffer gas bag device according to claim 4, wherein the sealing joint is a VCR joint, the sealing joint is connected with the bronchial tube in a welded manner, and the functional component is a pressure gauge.
6. The buffer gas bag device according to claim 1, wherein the first pipeline and the second pipeline are each a single-section straight pipe.
7. The apparatus for buffering a gas bag according to claim 1, wherein the arrangement and combination means that any one of the plurality of preset shapes is selected as an external shape of the gas bag body, and any one of the plurality of preset shapes is selected as an internal shape of the gas storage cavity.
8. The buffer gas-bag device of claim 7, wherein the plurality of preset shapes includes a shuttle shape, a capsule shape, and a cylinder shape.
9. The buffer gas packaging device of any of claims 1 to 8, wherein the buffer gas packaging device is an integrated, one-piece structure.
10. An atomic layer deposition apparatus, comprising:
an air box and an equipment cavity;
the buffer gas bag device according to any one of claims 1 to 9, wherein the gas tank is connected to a first interface of the gas bag body through a first valve, and the equipment cavity is connected to a second interface of the gas bag body through a second valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311752463.9A CN117488278A (en) | 2023-12-18 | 2023-12-18 | Buffer gas bag device for pipeline and atomic layer deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311752463.9A CN117488278A (en) | 2023-12-18 | 2023-12-18 | Buffer gas bag device for pipeline and atomic layer deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117488278A true CN117488278A (en) | 2024-02-02 |
Family
ID=89683165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311752463.9A Pending CN117488278A (en) | 2023-12-18 | 2023-12-18 | Buffer gas bag device for pipeline and atomic layer deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117488278A (en) |
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2023
- 2023-12-18 CN CN202311752463.9A patent/CN117488278A/en active Pending
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