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CN117369062A - Multi-light source high-resolution optical imaging device and method based on optical switch - Google Patents

Multi-light source high-resolution optical imaging device and method based on optical switch Download PDF

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CN117369062A
CN117369062A CN202311215194.2A CN202311215194A CN117369062A CN 117369062 A CN117369062 A CN 117369062A CN 202311215194 A CN202311215194 A CN 202311215194A CN 117369062 A CN117369062 A CN 117369062A
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light
optical switch
optical
light source
spectrometer
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林杰文
张秋坤
钟舜聪
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Fuzhou University
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4296Coupling light guides with opto-electronic elements coupling with sources of high radiant energy, e.g. high power lasers, high temperature light sources
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206Optical features

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

本发明提供一种基于光开关的多光源高分辨率光学成像装置及方法,利用光开关将两种带宽范围的超辐射发光二极管与光纤耦合器相连接,在被测目标的同一个检测位置,上位机通过控制光开关的状态与光谱仪的采集实现两种带宽范围的干涉信号测量。通过在软件上将两干涉信号进行合成,以实现光源带宽范围的拓展,从而提高系统的深度分辨率,实现光学非接触式、无损伤的超高精度三维光学成像。

The invention provides a multi-light source high-resolution optical imaging device and method based on an optical switch. The optical switch is used to connect super-radiant light-emitting diodes with two bandwidth ranges and an optical fiber coupler. At the same detection position of the measured target, The host computer realizes interference signal measurement in two bandwidth ranges by controlling the state of the optical switch and the collection of the spectrometer. By synthesizing the two interference signals on the software, the bandwidth range of the light source is expanded, thereby improving the depth resolution of the system and achieving optical non-contact, damage-free ultra-high-precision three-dimensional optical imaging.

Description

基于光开关的多光源高分辨率光学成像装置及方法Multi-light source high-resolution optical imaging device and method based on optical switch

技术领域Technical field

本发明属于非接触式光学相干成像技术领域,具体涉及一种基于光开关的多光源高分辨率光学成像装置及方法。The invention belongs to the technical field of non-contact optical coherent imaging, and specifically relates to a multi-light source high-resolution optical imaging device and method based on optical switches.

背景技术Background technique

光学相干层析(Optical Coherence Tomography,OCT)是集非接触式、无损伤、微米级高分辨率、高速实时成像等优点于一体的内部结构成像技术。内部结构成像技术指穿透物体表面,探知目标的内部结构并进行图像重构与显示的技术。在探测过程中,介质载体起穿透物体表面及物体结构信息携带的作用。OCT系统的深度分辨率与光源的中心波长和带宽相关联,光源中心波长越短,带宽越宽则系统的深度分辨率越高。然而,受制造技术的限制超辐射发光二极管的带宽难以无限制加宽,导致OCT系统深度分辨率受限。Optical Coherence Tomography (OCT) is an internal structure imaging technology that integrates the advantages of non-contact, non-destructive, micron-level high resolution, and high-speed real-time imaging. Internal structure imaging technology refers to technology that penetrates the surface of an object, detects the internal structure of the target, and reconstructs and displays the image. During the detection process, the media carrier plays the role of penetrating the surface of the object and carrying information about the structure of the object. The depth resolution of the OCT system is related to the central wavelength and bandwidth of the light source. The shorter the central wavelength of the light source and the wider the bandwidth, the higher the depth resolution of the system. However, due to limitations in manufacturing technology, the bandwidth of superluminescent diodes is difficult to widen indefinitely, resulting in limited depth resolution of the OCT system.

发明内容Contents of the invention

有鉴于此,针对现有技术存在的缺陷和不足本发明的主要目的是提供一种基于光开关的多光源高分辨率光学成像装置及方法,突破光源带宽对OCT系统深度分辨率的限制,大大提高系统的深度分辨率,实现超高精度三维成像。In view of this, in view of the defects and shortcomings of the existing technology, the main purpose of the present invention is to provide a multi-light source high-resolution optical imaging device and method based on optical switches, breaking through the limitation of the light source bandwidth on the depth resolution of the OCT system, and greatly improving the depth resolution of the OCT system. Improve the depth resolution of the system and achieve ultra-high-precision three-dimensional imaging.

本发明解决其技术问题具体采用的技术方案是:The technical solutions specifically adopted by the present invention to solve the technical problems are:

一种基于光开关的多光源高分辨率光学成像装置,其特征在于:利用光开关将两种带宽范围的超辐射发光二极管与光纤耦合器相连接,在被测目标的同一个检测位置,上位机通过控制光开关的状态与光谱仪的采集实现两种带宽范围的干涉信号测量。A multi-light source high-resolution optical imaging device based on an optical switch, which is characterized in that: an optical switch is used to connect superradiant light-emitting diodes with two bandwidth ranges and an optical fiber coupler. At the same detection position of the measured target, the upper position The machine realizes interference signal measurement in two bandwidth ranges by controlling the state of the optical switch and the collection of the spectrometer.

进一步地,包括两带宽范围不同的超辐射发光二极管、一光开关、一2×2单模光纤耦合器、一参考臂、一探测臂、一探测臂镜架、一光谱仪和一用于系统控制与数据采集的上位机;Further, it includes two superluminescent diodes with different bandwidth ranges, an optical switch, a 2×2 single-mode optical fiber coupler, a reference arm, a detection arm, a detection arm frame, a spectrometer and a system control device. PC with data collection;

两所述超辐射发光二极管辐射出不同带宽的宽带光源进入光开关;光开关经TTL信号控制选择超辐射发光二极管与2×2光纤耦合器相连接,2×2光纤耦合器将入射的宽带光按照耦合器分光比分为参考光与探测光;参考光经参考臂中的准直透镜准直成平行光并被凸透镜聚焦至反射镜,反射镜将参考光原路反射回光纤耦合器中;探测光被准直透镜准直成平行光并被聚焦物镜聚焦至被测目标,被测目标的不同结构层将探测光反射或背向散射回光纤耦合器中;从被测目标不同结构层反射或背向散射而回的探测光与从反射镜反射而回的参考光在光纤耦合器处相遇并形成干涉;干涉信号进入到光谱仪中,被光谱仪中的准直镜准直成平行光后照射到透射式光栅中,光束被光栅按波长展开后聚焦至CMOS相机并通过GIGE通讯协议传输至上位机。The two super-radiant light-emitting diodes radiate broadband light sources with different bandwidths into the optical switch; the optical switch is controlled by a TTL signal to select the super-radiant light-emitting diode and connect it to a 2×2 optical fiber coupler, and the 2×2 optical fiber coupler converts the incident broadband light According to the splitting ratio of the coupler, it is divided into reference light and detection light; the reference light is collimated into parallel light by the collimating lens in the reference arm and focused by the convex lens to the reflector, which reflects the original path of the reference light back to the fiber coupler; detection The light is collimated by the collimating lens into parallel light and focused by the focusing objective lens to the target being measured. Different structural layers of the measured target will reflect or backscatter the detection light back into the fiber coupler; reflection or backscatter from different structural layers of the measured target or The backscattered detection light and the reference light reflected from the mirror meet at the fiber coupler and form interference; the interference signal enters the spectrometer and is collimated into parallel light by the collimating mirror in the spectrometer and then illuminated. In the transmission grating, the light beam is expanded by the grating according to the wavelength and then focused to the CMOS camera and transmitted to the host computer through the GIGE communication protocol.

进一步地,所述参考臂为长度可调式的参考臂,用于调节参考光与探测光的光程差。Furthermore, the reference arm is a length-adjustable reference arm for adjusting the optical path difference between the reference light and the detection light.

进一步地,还包括一XY位移台,用于控制被测样品移动,以实现高精度三维扫描。Furthermore, it also includes an XY displacement stage for controlling the movement of the tested sample to achieve high-precision three-dimensional scanning.

进一步地,所述光开关,用于接收上位机发出的TTL触发信号,控制两光源与光纤耦合器的通断。Further, the optical switch is used to receive the TTL trigger signal sent by the host computer and control the on and off of the two light sources and the optical fiber coupler.

进一步地,其成像方法包括以下步骤:Further, the imaging method includes the following steps:

步骤S1:两带宽不同的超辐射发光二极管辐射出宽带光源进入到光开关中,上位机发出TTL方波信号控制光开关与一个脉冲信号控制光谱仪,光开关使得超辐射发光二极管与光纤耦合器分别完成一次连通;Step S1: Two super-radiant light-emitting diodes with different bandwidths radiate broadband light sources into the optical switch. The host computer sends out a TTL square wave signal to control the optical switch and a pulse signal to control the spectrometer. The optical switch makes the super-radiant light-emitting diodes and the fiber coupler respectively Complete a connection;

步骤S2:连通后的光源进入到光纤耦合器后分成参考光与探测光,探测光将携带有被测样品的分层结构信息与参考光形成多频干涉信号进入到光谱仪中;Step S2: The connected light source enters the fiber coupler and is divided into reference light and detection light. The detection light carries the layered structure information of the sample under test and the reference light to form a multi-frequency interference signal and enters the spectrometer;

步骤S3:光谱仪接收到脉冲信号后开始采集,采集一次两个超辐射发光二极管分别探测到的干涉信号;Step S3: The spectrometer starts collecting after receiving the pulse signal, and collects the interference signals detected by the two superradiant light-emitting diodes respectively;

步骤S4:将采集到的两种干涉信号进行合成,转换至波数域并进行傅里叶变换得到样品的深度结构信息;Step S4: Combine the two collected interference signals, convert them to the wavenumber domain and perform Fourier transform to obtain the depth structure information of the sample;

步骤S5:控制XY线性位移台带动被测样品移动至下一个被测点位,并循环步骤S1-S4完成被测样品的三维信息采集与成像。Step S5: Control the XY linear displacement stage to drive the measured sample to move to the next measured point, and loop through steps S1-S4 to complete the three-dimensional information collection and imaging of the measured sample.

进一步地,在步骤S3中,光谱仪所采集到的以第一个超辐射发光二极管为探测源时的多频干涉信号如下:Further, in step S3, the multi-frequency interference signal collected by the spectrometer using the first superradiant light-emitting diode as the detection source is as follows:

其中,第1项为直流项,第2项为自相干项,第3项为干涉信号项,其将被测样品的内部结构信息调制至干涉信号的频率中;Sr(λ)为参考光的谱功率分布函数;Sn(λ)、Sm(λ)为不同样品层反射或背向散射而回的探测光谱功率分布函数;λ为光的波长;2dn表示从样品第n层反射或背向散射而回的探测光与参考光的光程差;2dnm表示从样品第n与第m层反射或背向散射而回的探测光的光程差;Re表示复数域干涉信号的实部部分。Among them, the first term is the DC term, the second term is the autocoherence term, and the third term is the interference signal term, which modulates the internal structure information of the measured sample into the frequency of the interference signal; S r (λ) is the reference light The spectral power distribution function of Or the optical path difference between the detection light and the reference light that is backscattered; 2d nm represents the optical path difference of the detection light that is reflected or backscattered from the nth and mth layers of the sample; Re represents the complex domain interference signal real part.

光谱仪所采集到的以第二个超辐射发光二极管为探测源时的多频干涉信号如下:The multi-frequency interference signal collected by the spectrometer when using the second superluminescent diode as the detection source is as follows:

其中,λ1<λ3<λ2<λ4Among them, λ 1 < λ 3 < λ 2 < λ 4 .

进一步地,在步骤S4中,将式(1)和式(2)的多频干涉信号进行合成信号如下,具体为:Further, in step S4, the multi-frequency interference signals of formula (1) and formula (2) are synthesized into the following signals, specifically:

其中,Sr'(λ)为合成后参考光的谱功率分布函数;S'n(λ)、S'm(λ)为合成后不同样品层反射或背向散射而回的探测光谱功率分布函数。Among them, S r '(λ) is the spectral power distribution function of the reference light after synthesis; S' n (λ) and S' m (λ) are the detection spectral power distribution returned by reflection or backscattering from different sample layers after synthesis. function.

将式(3)转换至波数域,具体为:Convert equation (3) to the wave number domain, specifically:

其中,k为波数,其与波长之间的关系为 Among them, k is the wave number, and its relationship with wavelength is

进一步地,在步骤S4中,对式(4)的干涉信号进行快速傅里叶变换即可得到被测样品的内部结构信息,具体为:Further, in step S4, the internal structure information of the measured sample can be obtained by performing fast Fourier transform on the interference signal of equation (4), specifically as follows:

其中,δ为尤拉克函数。Among them, δ is the Yurac function.

相比于现有技术,本发明及其优选方案利用光开关将两种带宽范围的超辐射发光二极管与光纤耦合器相连接,在被测目标的同一个检测位置,上位机通过控制光开关的状态与光谱仪的采集实现两种带宽范围的干涉信号测量。通过在软件上将两干涉信号进行合成,以实现光源带宽范围的拓展,从而提高系统的深度分辨率,实现光学非接触式、无损伤的超高精度三维光学成像。Compared with the existing technology, the present invention and its preferred solution use optical switches to connect superluminescent diodes with two bandwidth ranges and optical fiber couplers. At the same detection position of the measured target, the host computer controls the optical switch. The acquisition of state and spectrometer realizes the measurement of interference signals in two bandwidth ranges. By synthesizing the two interference signals on the software, the bandwidth range of the light source is expanded, thereby improving the depth resolution of the system and achieving optical non-contact, damage-free ultra-high-precision three-dimensional optical imaging.

附图说明Description of the drawings

下面结合附图和具体实施方式对本发明进一步详细的说明:The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments:

图1为本发明实施例的系统结构图,其中,1、2为两种带宽范围的超辐射发光二极管,3为光开关,4为2×2单模光纤耦合器,5为参考臂,6为准直镜,7为聚焦透镜,8为反射镜,9为探测臂,10为准直镜,11为聚焦物镜,12为探测臂镜架,13为XY位移台,14为被测样品(包括:生物样品、复合材料和光学元件等),15为光纤准直镜,16为透射式光栅,17为聚焦透镜,18为CMOS相机,19为光谱仪,20为上位机。Figure 1 is a system structure diagram of an embodiment of the present invention, in which 1 and 2 are superradiant light-emitting diodes with two bandwidth ranges, 3 is an optical switch, 4 is a 2×2 single-mode optical fiber coupler, 5 is a reference arm, and 6 is the collimating lens, 7 is the focusing lens, 8 is the reflecting mirror, 9 is the detection arm, 10 is the collimating lens, 11 is the focusing objective lens, 12 is the detection arm frame, 13 is the XY displacement stage, and 14 is the measured sample ( Including: biological samples, composite materials and optical components, etc.), 15 is the fiber collimator, 16 is the transmission grating, 17 is the focusing lens, 18 is the CMOS camera, 19 is the spectrometer, and 20 is the host computer.

图2为本发明实施例的光谱仪采集信号。Figure 2 shows the signal collected by the spectrometer according to the embodiment of the present invention.

图3为本发明实施例的信号处理过程图。Figure 3 is a signal processing process diagram of the embodiment of the present invention.

图4为本发明实施例的单一带宽光源系统与本系统的成像分辨率对比图。FIG. 4 is a comparison diagram of imaging resolution between the single-bandwidth light source system and this system according to the embodiment of the present invention.

具体实施方式Detailed ways

为让本专利的特征和优点能更明显易懂,下文特举实施例,作详细说明如下:In order to make the features and advantages of this patent more obvious and easy to understand, examples are given below and explained in detail as follows:

应该指出,以下详细说明都是例示性的,旨在对本申请提供进一步的说明。除非另有指明,本说明书使用的所有技术和科学术语具有与本申请所属技术领域的普通技术人员通常理解的相同含义。It should be noted that the following detailed description is illustrative and is intended to provide further explanation of the present application. Unless otherwise specified, all technical and scientific terms used in this specification have the same meanings commonly understood by one of ordinary skill in the art to which this application belongs.

需要注意的是,这里所使用的术语仅是为了描述具体实施方式,而非意图限制根据本申请的示例性实施方式。如在这里所使用的,除非上下文另外明确指出,否则单数形式也意图包括复数形式,此外,还应当理解的是,当在本说明书中使用术语“包含”和/或“包括”时,其指明存在特征、步骤、操作、器件、组件和/或它们的组合。It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular forms are also intended to include the plural forms unless the context clearly indicates otherwise. Furthermore, it will be understood that when the terms "comprises" and/or "includes" are used in this specification, they indicate There are features, steps, operations, means, components and/or combinations thereof.

如图1-图4所示,本发明实施例提供一种基于光开关的多光源高分辨率光学成像装置,提供一样品,包括两种带宽范围的超辐射发光二极管1和2,光开关3,单模光纤耦合器4,参考臂5,准直镜6,聚焦透镜7,反射镜8,探测臂9,准直镜10,聚焦物镜11,探测臂镜架12,XY位移台13,被测样品14(包括:生物样品、复合材料和光学元件等),光纤准直镜15,透射式光栅16,聚焦透镜17,CMOS相机18,光谱仪19,上位机20。As shown in Figures 1 to 4, an embodiment of the present invention provides a multi-light source high-resolution optical imaging device based on an optical switch. A sample is provided, including superradiant light-emitting diodes 1 and 2 in two bandwidth ranges, and an optical switch 3 , single-mode fiber coupler 4, reference arm 5, collimating lens 6, focusing lens 7, reflecting mirror 8, detection arm 9, collimating lens 10, focusing objective lens 11, detection arm frame 12, XY displacement stage 13, by Test samples 14 (including biological samples, composite materials and optical components, etc.), fiber collimator 15, transmission grating 16, focusing lens 17, CMOS camera 18, spectrometer 19, host computer 20.

其中,两超辐射发光二极管1和2辐射出不同带宽的宽带光源进入到光开关中3;光开关3受上位机20发出的TTL信号控制后选择超辐射发光二极管与光纤耦合器4相连接,光纤耦合器4将入射的宽带光按照耦合器分光比分为参考光与探测光;参考光被参考臂5中的准直透镜6准直成平行光并被凸透镜7聚焦至反射镜8上,反射镜8将参考光原路反射回光纤耦合器4中;探测光被准直透镜10准直成平行光并被聚焦物镜11聚焦至被测目标14(包括:生物样品、复合材料和光学元件等)上,被测目标14的不同结构层将探测光反射或背向散射回光纤耦合器4中;从被测目标14不同结构层反射或背向散射而回的探测光与从反射镜反射而回的参考光在光纤耦合器4处相遇并形成干涉;干涉信号进入到光谱仪19中,被光谱仪19中的光纤准直器15准直成平行光后照射到透射式光栅16中,光束被光栅16按波长展开后聚焦至CMOS相机18并通过GIGE通讯协议传输至上位机20。Among them, two super-radiant light-emitting diodes 1 and 2 radiate broadband light sources with different bandwidths into the optical switch 3; the optical switch 3 is controlled by the TTL signal sent by the host computer 20 and then selects the super-radiant light-emitting diode to be connected to the optical fiber coupler 4. The optical fiber coupler 4 divides the incident broadband light into reference light and detection light according to the coupler splitting ratio; the reference light is collimated into parallel light by the collimating lens 6 in the reference arm 5 and focused by the convex lens 7 onto the reflector 8 and reflected The mirror 8 reflects the original path of the reference light back to the optical fiber coupler 4; the detection light is collimated by the collimating lens 10 into parallel light and focused by the focusing objective lens 11 to the measured target 14 (including biological samples, composite materials and optical elements, etc. ), the different structural layers of the measured target 14 will reflect or backscatter the detection light back into the optical fiber coupler 4; the detection light reflected or backscattered from the different structural layers of the measured target 14 is different from the detection light reflected from the mirror. The reference light returned meets and interferes at the fiber coupler 4; the interference signal enters the spectrometer 19, is collimated into parallel light by the fiber collimator 15 in the spectrometer 19, and then irradiates into the transmission grating 16, and the light beam is 16 is expanded according to wavelength and then focused to the CMOS camera 18 and transmitted to the host computer 20 through the GIGE communication protocol.

在本实例中,参考臂5的长度可调节,用于调节参考光与探测光的光程差。In this example, the length of the reference arm 5 is adjustable to adjust the optical path difference between the reference light and the detection light.

在本实例中,XY位移台用于控制被测目标移动,以实现高精度三维扫描。In this example, the XY displacement stage is used to control the movement of the measured target to achieve high-precision three-dimensional scanning.

在本实例中,光开关用于接收上位机发出的TTL触发信号,控制两光源与光纤耦合器的通断。In this example, the optical switch is used to receive the TTL trigger signal sent by the host computer and control the on and off of the two light sources and the fiber coupler.

优选的,本装置可用于生物样品、复合材料和光学元件等样品的检测。Preferably, the device can be used for the detection of biological samples, composite materials, optical components and other samples.

优选的,在本实施例中,还提供一种基于光开关的多光源高分辨率光学成像方法,包括以下步骤:Preferably, in this embodiment, a multi-light source high-resolution optical imaging method based on optical switches is also provided, including the following steps:

步骤S1:两带宽不同的超辐射发光二极管辐射出宽带光源进入到光开关中,上位机发出TTL方波信号控制光开关与一个脉冲信号控制光谱仪,光开关使得超辐射发光二极管与光纤耦合器分别完成一次连通;Step S1: Two super-radiant light-emitting diodes with different bandwidths radiate broadband light sources into the optical switch. The host computer sends out a TTL square wave signal to control the optical switch and a pulse signal to control the spectrometer. The optical switch makes the super-radiant light-emitting diodes and the fiber coupler respectively Complete a connection;

步骤S2:连通后的光源进入到光纤耦合器后分成参考光与探测光,探测光将携带有被测样品的分层结构信息与参考光形成多频干涉信号进入到光谱仪中;Step S2: The connected light source enters the fiber coupler and is divided into reference light and detection light. The detection light carries the layered structure information of the sample under test and the reference light to form a multi-frequency interference signal and enters the spectrometer;

步骤S3:光谱仪接收到脉冲信号后开始采集,分别采集一次超辐射发光二极管1和2所探测到的干涉信号;Step S3: The spectrometer starts collecting after receiving the pulse signal, and collects the interference signals detected by the superradiant light-emitting diodes 1 and 2 respectively;

步骤S4:将采集到的两种干涉信号进行合成,转换至波数域并进行傅里叶变换便可得到样品的深度结构信息;Step S4: Combine the two collected interference signals, convert them to the wave number domain and perform Fourier transform to obtain the depth structure information of the sample;

步骤S5:控制XY线性位移台带动被测样品移动至下一个被测点位,并循环步骤S1-S4完成被测样品的三维信息采集与成像。Step S5: Control the XY linear displacement stage to drive the measured sample to move to the next measured point, and loop through steps S1-S4 to complete the three-dimensional information collection and imaging of the measured sample.

本专利不局限于上述最佳实施方式,任何人在本专利的启示下都可以得出其它各种形式的基于光开关的多光源高分辨率光学成像装置及方法,凡依本发明申请专利范围所做的均等变化与修饰,皆应属本专利的涵盖范围。This patent is not limited to the above-mentioned best embodiments. Under the inspiration of this patent, anyone can come up with various other forms of optical switch-based multi-light source high-resolution optical imaging devices and methods. Anyone who applies for a patent according to this invention All changes and modifications made equally shall fall within the scope of this patent.

Claims (9)

1. An optical switch-based multi-light source high-resolution optical imaging device is characterized in that: the superradiation light emitting diode with two bandwidth ranges is connected with the optical fiber coupler by utilizing the optical switch, and the upper computer realizes interference signal measurement with two bandwidth ranges by controlling the state of the optical switch and the acquisition of the spectrometer at the same detection position of the detected target.
2. The optical switch-based multi-light source high resolution optical imaging apparatus of claim 1, wherein: the system comprises two super-radiation light emitting diodes with different bandwidth ranges, an optical switch, a 2X 2 single-mode optical fiber coupler, a reference arm, a detection arm bracket, a spectrometer and an upper computer for system control and data acquisition;
the two super-radiation light-emitting diodes radiate broadband light sources with different bandwidths into an optical switch; the optical switch is connected with a 2X 2 optical fiber coupler through a TTL signal control selection superradiation light emitting diode, and the 2X 2 optical fiber coupler divides incident broadband light into reference light and detection light according to the splitting ratio of the coupler; the reference light is collimated into parallel light by a collimating lens in the reference arm and focused to a reflecting mirror by a convex lens, and the reflecting mirror reflects the reference light in a primary way back to the optical fiber coupler; the detection light is collimated into parallel light by a collimating lens and focused to a detected target by a focusing objective lens, and different structural layers of the detected target reflect or back scatter the detection light back to the optical fiber coupler; the detection light reflected or back scattered from different structural layers of the detected target meets the reference light reflected from the reflecting mirror and forms interference at the optical fiber coupler; the interference signal enters the spectrometer, is collimated into parallel light by a collimating mirror in the spectrometer and irradiates into a transmission type grating, and the light beam is unfolded by the grating according to the wavelength, focused to a CMOS camera and transmitted to an upper computer through a GIGE communication protocol.
3. The optical switch-based multi-light source high resolution optical imaging apparatus of claim 2, wherein: the reference arm is a length-adjustable reference arm and is used for adjusting the optical path difference of the reference light and the detection light.
4. The optical switch-based multi-light source high resolution optical imaging apparatus of claim 2, wherein: the device also comprises an XY displacement table for controlling the movement of the tested sample so as to realize high-precision three-dimensional scanning.
5. The optical switch-based multi-light source high resolution optical imaging apparatus of claim 2, wherein: the optical switch is used for receiving TTL trigger signals sent by the upper computer and controlling the on-off of the two light sources and the optical fiber coupler.
6. The optical switch-based multi-light source high resolution optical imaging apparatus of claim 2, wherein:
the imaging method comprises the following steps:
step S1: the super-radiation light-emitting diodes with different bandwidths radiate a broadband light source to enter the optical switch, the upper computer sends TTL square wave signals to control the optical switch and a pulse signal to control the spectrometer, and the optical switch enables the super-radiation light-emitting diode and the optical fiber coupler to be communicated once respectively;
step S2: the communicated light source is divided into reference light and detection light after entering the optical fiber coupler, and the detection light forms a multi-frequency interference signal with the reference light by carrying layered structure information of a sample to be detected and enters the spectrometer;
step S3: the spectrometer starts to collect after receiving the pulse signals, and interference signals detected by the two super-radiation light-emitting diodes at a time are collected;
step S4: synthesizing the two collected interference signals, converting the two interference signals into a wave number domain, and carrying out Fourier transformation to obtain depth structure information of a sample;
step S5: and controlling the XY linear displacement platform to drive the tested sample to move to the next tested point, and circularly performing steps S1-S4 to complete three-dimensional information acquisition and imaging of the tested sample.
7. The imaging method of the optical switch-based multi-light source high resolution optical imaging apparatus according to claim 6, wherein:
in step S3, the multi-frequency interference signal acquired by the spectrometer when the first superluminescent diode is used as the detection source is as follows:
wherein, the 1 st item is a direct current item, the 2 nd item is an auto-coherent item, and the 3 rd item is an interference signal item, which modulates the internal structure information of the tested sample into the frequency of the interference signal; s is S r (lambda) is the spectral power distribution function of the reference light; s is S n (λ)、S m (lambda) is the detected spectral power distribution function of the back reflection or back scattering of the different sample layers; lambda is the wavelength of light; 2d n Indicating reflection or back-scattering from the nth layer of the sampleOptical path difference between the detection light and the reference light; 2d nm Indicating the optical path difference of the probe light reflected or back-scattered from the nth and mth layers of the sample; re represents the real part of the complex domain interference signal.
The multi-frequency interference signals acquired by the spectrometer by taking the second super-radiation light-emitting diode as a detection source are as follows:
wherein lambda is 1 <λ 3 <λ 2 <λ 4
8. The imaging method of the optical switch-based multi-light source high resolution optical imaging apparatus according to claim 6, wherein:
in step S4, the multi-frequency interference signals of the formula (1) and the formula (2) are synthesized as follows:
wherein S is r 'lambda' is the spectral power distribution function of the synthesized reference light; s'. n (λ)、S' m (lambda) is the detected spectral power distribution function of the back reflection or back scattering of the different sample layers after synthesis.
Converting formula (3) into the wavenumber domain, specifically:
wherein k is the wavenumber and its relation to the wavelength is
9. The imaging method of the optical switch-based multi-light source high resolution optical imaging apparatus according to claim 6, wherein:
in step S4, the interference signal of formula (4) is subjected to fast fourier transform to obtain internal structure information of the sample to be measured, specifically:
where δ is the especially Rake function.
CN202311215194.2A 2023-09-20 2023-09-20 Multi-light source high-resolution optical imaging device and method based on optical switch Pending CN117369062A (en)

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