[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

CN116906394A - Double-piezoelectric ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve - Google Patents

Double-piezoelectric ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve Download PDF

Info

Publication number
CN116906394A
CN116906394A CN202310740404.3A CN202310740404A CN116906394A CN 116906394 A CN116906394 A CN 116906394A CN 202310740404 A CN202310740404 A CN 202310740404A CN 116906394 A CN116906394 A CN 116906394A
Authority
CN
China
Prior art keywords
control valve
valve core
piezoelectric ring
oil return
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310740404.3A
Other languages
Chinese (zh)
Inventor
李跃松
王棒
李新法
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Henan University of Science and Technology
Original Assignee
Henan University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Henan University of Science and Technology filed Critical Henan University of Science and Technology
Priority to CN202310740404.3A priority Critical patent/CN116906394A/en
Publication of CN116906394A publication Critical patent/CN116906394A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/06Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
    • F16K11/065Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
    • F16K11/07Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members with cylindrical slides
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Servomotors (AREA)

Abstract

The double piezoelectric ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve has symmetrical structure, and left and right control valve cores are bent and driven by the left and right piezoelectric rings. Due to the piezoelectric effect, the piezoelectric ring generates a voltage signal proportional to the bending deformation during driving, and the voltage signal is extracted by the self-sensing circuit and then transmitted to the control circuit to form self-sensing closed-loop control for controlling the displacement of the valve core. The control valve core moves in the control valve sleeve to enable the control valve port to be opened, oil liquid for driving the main valve core to move is generated, the main valve core moves to drive the feedback rod to rotate around the center of the spring tube, and the upper end of the feedback rod drives the control valve sleeve to move towards the closing direction of the control valve port. When the control valve port is completely closed, the main valve core stops moving, so that the mechanical closed-loop control on the position of the main valve core is formed. The invention adopts double-piezoelectric ring driving and double-closed-loop control without a sensor, and has the advantages of quick response, high precision, small volume, small temperature influence on performance and the like.

Description

Double-piezoelectric ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve
Technical Field
The invention belongs to the field of electrohydraulic servo control, and particularly relates to a double-piezoelectric-ring self-sensing bend-driving two-stage slide valve electrohydraulic servo valve.
Background
The electrohydraulic servo valve is used as a core basic member of high-end electrohydraulic equipment, the frequency response, the precision and the reliability of the electrohydraulic servo valve directly restrict the control precision and the response speed of the whole high-end electrohydraulic equipment servo system and directly influence the reliability and the service life of the whole system, so the high-speed precise high-reliability electrohydraulic servo valve is always a great demand of the national high-end electrohydraulic servo equipment.
From the development process of the electrohydraulic servo valve, the improvement of the frequency response and the dynamic load carrying capacity of the electromechanical converter for the servo valve is a precondition for improving the dynamic performance of the electrohydraulic servo valve. The advent of high precision, high frequency response, high reliability electro-mechanical transducers, represented by piezoelectric actuators, has provided opportunities for the development of high speed, precision electro-hydraulic servo valves. The piezoelectric actuator has the advantages of low energy consumption, no heat generation, long service life, no electromagnetic interference, short response time and large energy saving potential, and is always a hot spot for researching the novel electro-hydraulic servo valve in the application research of the electro-hydraulic servo valve. At present, piezoelectric bimorph, piezoelectric stack and amplifying piezoelectric driver are applied to electro-hydraulic servo valves in many researches, and piezoelectric ring bending drive type drivers are started in the research of electro-hydraulic servo valves, but compared comprehensively from the aspects of volume, performance, price and the like, the piezoelectric ring bending drive type drivers have larger advantages.
As with other piezoelectric actuators, the piezoelectric ring-bending drive actuator has better dynamic performance, but the output is also hysteretic nonlinear, and the volume is still larger when the displacement and output force are larger. Therefore, the piezoelectric ring bending drive type electrohydraulic servo valve has better dynamic performance, but the whole valve has larger volume and the output can show hysteresis nonlinearity. In order to reduce the volume and the nonlinearity under the condition of ensuring the flow, the conventional piezoelectric ring bending drive type electrohydraulic servo valve generally adopts a two-stage structure, and two displacement sensors are adopted to perform electric feedback closed-loop control on two-stage valve cores, wherein the first sensor performs closed-loop control on the position of a control-stage valve core, and the second sensor performs closed-loop control on the position of a power-stage main valve core. The addition of two sensors, while improving performance, can result in increased cost, increased volume, and reduced reliability of the overall valve.
Disclosure of Invention
In order to overcome the defects, the invention provides the double-piezoelectric-ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve, which divides a control valve core into a left part and a right part, and is driven by a left piezoelectric ring bend-driving driver and a right piezoelectric ring bend-driving driver respectively, wherein a control stage adopts self-sensing closed-loop control, and a power stage adopts mechanical closed-loop control, so that the electrohydraulic servo valve has the advantages of high response speed, high control precision, high reliability, small volume and the like.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
the double-piezoelectric ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve comprises a left piezoelectric ring, a right piezoelectric ring, a left output rod, a right output rod, a feedback rod, a left control valve core, a right control valve core, a control valve sleeve and a control valve body, wherein the left piezoelectric ring is arranged in a left end cavity of the control valve body, the side surface of the left piezoelectric ring is glued with the side wall of the cavity of the control valve body, the inner wall of a middle circular hole of the left piezoelectric ring is glued with the side surface of a left support seat, the left end of the left output rod is in threaded connection with the left support seat and is locked through a left zero adjusting nut, and the left control valve core is arranged in the control valve sleeve and is in threaded connection with the right end of the left output rod; the right piezoelectric ring is arranged in a right end cavity of the valve body, the side surface of the right piezoelectric ring is glued with the side wall of the cavity of the control valve body, the inner wall of a middle round hole of the right piezoelectric ring is glued with the side wall of the right supporting seat, the right end of the right output rod is connected with the right supporting seat in a threaded manner and locked through a right zeroing nut, and the right control valve core is arranged in the control valve sleeve and is connected with the left end of the right output rod in a threaded manner.
Further preferably, the control valve sleeve is arranged in the control valve body, and the control valve sleeve and the control valve body are in clearance fit.
Further optimized, the left control valve core and the right control valve core are symmetrically distributed on two sides of the control valve sleeve, the left end of the left control valve core is a threaded hole, the right end blind hole of the left control valve core is a left control valve core oil return cavity, an annular groove is arranged on the periphery of the left control valve core, an oil hole communicated with the left control valve core oil return cavity is arranged in the annular groove, and an outlet of the left control valve core oil return cavity is communicated with the control valve oil return cavity; the right end of the right control valve core is provided with a threaded hole, the left end of the right control valve core oil return cavity is provided with an annular groove, an oil hole communicated with the right control valve core oil return cavity is arranged in the annular groove, the outlet of the right control valve core oil return cavity is communicated with the control valve oil return cavity, the control valve oil return cavity is communicated with the main valve oil return cavity through a control valve oil return channel, and the main valve oil return cavity is communicated with the oil return port T.
Further preferably, a left annular groove and a right annular groove are arranged in the inner hole of the control valve sleeve, the right end of the annular groove on the left control valve core and the left end of the left annular groove form a left control valve port, and the left end of the annular groove on the right control valve core and the right end of the right annular groove form a right control valve port.
Further optimized, the left piezoelectric ring drives the left control valve core to move in the control valve sleeve, so that the opening of the left control valve port is changed, and the right piezoelectric ring drives the right control valve core to move in the control valve sleeve, so that the opening of the right control valve port is changed.
Further optimizing, the left piezoelectric ring and the right piezoelectric ring generate bending deformation and generate voltage signals proportional to the deformation of the left piezoelectric ring and the right piezoelectric ring, and the voltage signals are detected and processed by the self-sensing circuit and fed back to the controller, so that self-sensing closed-loop control of the displacement of the left control valve core and the right control valve core is realized.
Further optimizing, oil from the left control valve port or the right control valve port drives the main valve core to move and drives the lower end of the feedback rod to move, so that the feedback rod rotates around the center of the spring tube, the upper end of the feedback rod pushes the control valve sleeve to move towards the closing direction of the left control valve port and the right control valve port, when the left control valve port and the right control valve port are completely closed, the main valve core stops moving, closed-loop control of the position of the main valve core is formed, and the displacement of the main valve core is proportional to the displacement generated by the left control valve core and the right control valve core.
Further optimizing, left output pole and left supporting seat threaded connection and through left zeroing nut locking, right output pole and right supporting seat threaded connection and through right zeroing nut locking, above-mentioned connecting thread are thin tooth, loosen left zeroing nut or right zeroing nut to realize rotatory left output pole, right output pole make left control case and right control case remove, accomplish the zero adjustment of control valve.
Further preferably, the two ends of the feedback rod are spheres, the upper ends of the feedback rod penetrate through an inner hole of the spring tube to form spherical hinge connection with the control valve sleeve, the spring tube is installed on a central line of the control valve body, the lower ends of the feedback rod and the main valve core form spherical hinge connection, the main valve core is positioned in the main valve sleeve and is in clearance fit, and the main valve sleeve is positioned in the main valve body and is in interference fit with the main valve sleeve.
Further preferably, the distance from the upper end of the feedback rod to the rotation center of the feedback rod is larger than the distance from the lower end of the feedback rod to the rotation center, so that the displacement of the main valve core is larger than the displacement of the left control valve core and the right control valve core.
The beneficial effects of the invention are as follows:
1. the control valve core is divided into a left control valve core and a right control valve core, the left control valve core and the right control valve core are respectively driven by a left piezoelectric ring and a right piezoelectric ring, compared with the whole control valve core driven by a single piezoelectric ring, the driving load of the piezoelectric ring is effectively reduced, so that a smaller piezoelectric ring driver can be selected, in addition, the bilateral symmetry structure can eliminate the thermally induced displacement caused by temperature change and improve the accuracy of self-sensing control;
2. the displacement of the control valve core is obtained through a self-sensing signal generated by a piezoelectric effect of the piezoelectric ring, the self-sensing electric feedback closed-loop control on the displacement of the control valve core is formed by feeding back the displacement to the controller through extraction processing, the motion precision and the response speed of the control valve core can be improved through adjusting the parameters of the controller, the displacement of the main valve core feeds back the displacement signal to the control valve sleeve through the feedback rod, so that the control valve port of the main valve core is driven to be closed, the mechanical feedback closed-loop control on the displacement of the main valve core is formed, and the two-stage closed-loop feedback of the whole electro-hydraulic servo valve does not need an additional sensor, so that the cost can be effectively reduced, the volume is reduced, and the reliability is improved.
In summary, the dual-piezoelectric ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve designed by the invention divides a control stage valve core into two parts, the left piezoelectric ring and the right piezoelectric ring are respectively bent and driven, the control stage adopts self-sensing closed-loop control, and the power stage forms mechanical closed-loop control through a feedback rod without an additional sensor, so that the electrohydraulic servo valve designed by the invention has the remarkable advantages of high response speed, high control precision, small volume, low cost, high reliability and the like.
Drawings
FIG. 1 is a block diagram of a dual piezoelectric ring self-sensing bend-driven two-stage spool valve electro-hydraulic servo valve;
FIG. 2 is a diagram of the oil passage of a dual piezoelectric ring self-sensing bend-driven two-stage spool valve electro-hydraulic servo valve;
FIG. 3 is a schematic diagram of a piezoelectric ring self-sensing drive circuit;
FIG. 4 is a bending deformation diagram of the piezoelectric ring;
the marks in the figure: 1. left piezoelectric ring, 2, right piezoelectric ring, 3, left support seat, 4, right support seat, 5, left zeroing nut, 6, right zeroing nut, 7, left output rod, 8, right output rod, 9, main valve sleeve, 10, main valve spool, 11, left fixed orifice, 12, right fixed orifice, 13, main valve body, 14, feedback rod, 15, spring tube, 16, left control spool, 17, right control spool, 18, control valve housing, 19, control valve body, 20, left control chamber, 21, right control chamber, 22, left inlet channel, 23, right inlet channel, 24, left high pressure oil chamber, 25, right high pressure oil chamber, 26, main valve return chamber, 27, control valve housing left annular groove, 28, control valve housing right annular groove, 29, left control spool return chamber, 30, right control spool return chamber, 31, left control valve port, 32, right control valve chamber, 33, control valve return chamber port, 34, control valve return channel.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.
The utility model provides a two-stage spool valve formula electrohydraulic servo valve is driven to two piezoelectricity ring self-sensing bend, including left piezoelectricity ring 1, right piezoelectricity ring 2, left output rod 7, right output rod 8, feedback rod 14, left control valve core 16, right control valve core 17, control valve housing 18, control valve body 19, left piezoelectricity ring 1 sets up in the left end cavity of control valve body 19, its side and the cavity lateral wall of control valve body 19 are glued, the middle round hole of left piezoelectricity ring 1 passes through gluing and connects left supporting seat 3, the left end threaded connection of left output rod 7 left supporting seat 3 to lock through left zero adjustment nut 5, left control valve core 17 sets up in control valve housing 18, and passes through the right-hand member of threaded connection left output rod 7; the right piezoelectric ring 2 is arranged in a right end cavity of the control valve body 19, the side surface of the right piezoelectric ring is glued with the side wall of the cavity of the control valve body 19, the inner wall of a middle circular hole of the right piezoelectric ring 2 is glued with the side wall of the right supporting seat 4, the right end of the right output rod 8 is connected with the right supporting seat 4 through threads and locked through the right zeroing nut 6, the right control valve core 17 is arranged in the control valve sleeve 18 and is connected with the left end of the right output rod 8 through threads, the control valve sleeve 18 is arranged in the control valve body 19, and the right piezoelectric ring are in clearance fit.
The left control valve core 16 and the right control valve core 17 are symmetrically distributed on two sides of the control valve sleeve 18, the left end of the left control valve core 16 is a threaded hole, the right end of the left control valve core 16 is a left control valve core oil return cavity 29, an annular groove is arranged on the periphery of the left control valve core, an oil return hole communicated with the left control valve core oil return cavity 29 is arranged in the left control valve core 16, and an outlet of the left control valve core oil return cavity 29 is communicated with the control valve oil return cavity 33; the right end of the right control valve core 17 is provided with a threaded hole, the left end is provided with a right control valve core oil return cavity 30, the periphery of the right control valve core oil return cavity is provided with an annular groove, an oil return hole communicated with the right control valve core oil return cavity 30 is arranged in the right control valve core 17, an outlet of the right control valve core oil return cavity 30 is communicated with a control valve oil return cavity 33, the control valve oil return cavity 33 is communicated with a main valve oil return cavity 26 through a control valve oil return channel 34, and the main valve oil return cavity 26 is communicated with an oil return port T.
A left annular groove 27 and a right annular groove 28 are arranged in the inner hole of the control valve sleeve 18, the right end of the annular groove on the left control valve core 16 and the left end of the left annular groove 27 of the control valve sleeve form a left control valve port 31, and the left end of the annular groove on the right control valve core 17 and the right end of the right annular groove 28 of the control valve sleeve form a right control valve port 32.
The left piezoelectric ring 1 drives the left control valve core 16 to move in the control valve sleeve 18 so as to change the opening of the left control valve port 31, and the right piezoelectric ring 2 drives the right control valve core 17 to move in the control valve sleeve 18 so as to change the opening of the right control valve port 32. The left piezoelectric ring 1 and the right piezoelectric ring 2 generate bending deformation and generate voltage signals proportional to the deformation of the left piezoelectric ring and the right piezoelectric ring, and the voltage signals are detected and processed by a self-sensing circuit and fed back to the controller so as to realize self-sensing closed-loop control of the displacement of the left control valve core 16 and the right control valve core 17. The oil liquid of the left control valve port 31 and the right control valve port 32 drives the main valve core 10 to move and drives the lower end of the feedback rod 14 to move, the feedback rod 14 rotates around the center of the spring tube 15, the rigidity of the feedback rod 14 is high, and bending deformation cannot be generated. The upper end of the feedback rod 14 pushes the control valve sleeve 18 to move towards the closing direction of the left control valve port and the right control valve port, when the left control valve port and the right control valve port are completely closed, the main valve core 10 stops moving, closed-loop control on the position of the main valve core 10 is formed, and the displacement of the main valve core 10 is proportional to the displacement of the left control valve core and the right control valve core.
The left output rod 7 is in threaded connection with the left supporting seat 3 and is locked through the left zeroing nut 5, the right output rod 8 is in threaded connection with the right supporting seat 4 and is locked through the right zeroing nut 6, the connecting threads are fine teeth, the left zeroing nut 5 or the right zeroing nut 6 is loosened, and therefore the left control valve core and the right control valve core are enabled to move through rotation of the left output rod and the right output rod, and zero adjustment of the control valve is completed.
The two ends of the feedback rod 14 are spheres, the upper ends of the feedback rod penetrate through the inner holes of the spring tubes 15 to be connected with the control valve sleeve 18, the spring tubes 15 are installed on the central line of the control valve body 19, the lower ends of the feedback rod 14 are connected with the main valve core 10, the main valve core 10 is located in the main valve sleeve 9 and is in clearance fit, the main valve sleeve 9 is located in the main valve body 13 and is in interference fit. The distance from the upper end of the feedback rod 14 to the rotation center is larger than the distance from the lower end to the rotation center, so that the displacement of the main valve core 10 is larger than the movement displacement of the left control valve core and the right control valve core.
The piezoelectric ring bending actuator adopts three-wire bipolar driving when inputting voltageuWhen the piezoelectric ring is 0, the piezoelectric ring does not bend and deform; when the voltage is inputuWhen the range is-100V-0, the piezoelectric ring bends rightwards; when the voltage is inputuWhen the voltage is in the range of 0-100V, the piezoelectric ring bends leftwards, and the shape after bending deformation is shown in fig. 4. The piezoelectric material has the dual functions of driving and sensing, and the piezoelectric annular bending driving actuator can have the capacity of sensing self deformation through the measurement of self-induced voltage. Building a bridge circuit based on fig. 3 by selecting a suitable capacitanceC 3 The voltage proportional to the displacement of the two ends when the piezoelectric ring bending actuator works can be measuredu f
The working principle of the double-piezoelectric ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve is shown in fig. 1 and 2, after the system is supplied with oil, high-pressure oil flows into a main valve body 8 through an oil inlet P and then is divided into three paths along an oil duct, a middle path flows into a power main valve, a left path flows into a left control cavity 20 and a left annular groove 27 of a control valve sleeve through a left oil inlet duct 22 and a left fixed orifice 11, and a right path flows into a right control cavity 21 and a right annular groove 28 of the control valve sleeve through a right oil inlet duct 23 and a right fixed orifice 12. When the input voltage of the left piezoelectric ring 1 and the right piezoelectric ring 2 is 0 and the input command of the controller is zero, the two piezoelectric rings are not bent and deformed, and the left control valve port 31 and the right control valve port 32 are in a closed state. The oil in the left control cavity 20 and the right control cavity 21 generate equal pressure, so that the hydraulic pressure born by the left end and the right end of the main valve core 10 are equal, the main valve core 10 is in zero position and is not moved, and the control oil ports A and B have no flow output.
When the controller inputs command positive, the left piezoelectric ring 1 inputs voltageuIs negative, bends and deforms leftwards, pushes the left control valve core 16 to move leftwards through the left supporting seat 3 and the left output rod 7, and the left control valve port 31 is in a closed state. Right piezoelectric ring 2 input voltageuIs positive, bends and deforms leftwards, pushes the right control valve core 17 to move leftwards through the right supporting seat 4 and the right output rod 8, and opens the right control valve port 32. The oil in the right annular groove 28 of the control valve sleeve flows back to the oil tank through the right control valve port 32, the right control valve core oil return cavity 30, the control valve oil return cavity 33, the control valve oil return channel 34, the main valve oil return cavity 26 and the oil return port T, so that the right control cavity 21 is communicated with the oil tank, the pressure in the right control cavity 21 is reduced, the leftward hydraulic pressure of the oil in the cavity acts on the main valve core 10 is reduced, the pressure in the left control cavity 20 is unchanged, the rightward hydraulic pressure acting on the main valve core 10 is unchanged, the main valve core 10 is subjected to resultant force rightward and rightward movement, the lower end of the feedback rod 14 is driven to move, the feedback rod 14 rotates around the spring tube, the upper end of the feedback rod pushes the control valve sleeve 18 to leftward movement, the right control valve port 32 is gradually closed, the pressure in the right control cavity 21 gradually rises in the process, the oil pressure in the right control cavity 21 is equal to the oil pressure in the left control cavity 20 after the right control valve port 32 is completely closed, the hydraulic pressure born by the two ends of the main valve core 10 is equal, the movement is stopped, the displacement of the main valve core 10 is in proportion to the displacement of the control valve sleeve 18, and the valve sleeve of the control valve sleeve 1 is controlledThe 8 displacement is equal to the leftward movement displacement of the right control spool 17. At a constant load pressure differential, control port a outputs a flow proportional to the displacement of main spool 10.
When the input instruction of the controller is negative, the right piezoelectric ring 2 inputs voltageuIs negative, bends and deforms rightwards, pushes the right control valve core 17 to move rightwards through the right supporting seat 4 and the right output rod 8, and the right control valve port 32 is in a closed state. Input voltage of left piezoelectric ring 1uThe left control valve core 16 is pushed to move rightwards by the left supporting seat 3 and the left output rod 7 to open the left control valve port 31. The oil in the left annular groove 27 of the control valve sleeve flows back to the oil tank through the left control valve port 31, the left control valve core oil return cavity 29, the control valve oil return cavity 33, the control valve oil return channel 34, the main valve oil return cavity 26 and the oil return port T, so that the left control cavity 20 is communicated with the oil tank, the pressure in the cavity is reduced, the rightward hydraulic pressure on the main valve core 10 is reduced, the pressure in the right control cavity 21 is unchanged, the leftward hydraulic pressure on the main valve core 10 is unchanged, therefore, the main valve core 10 is subjected to leftward external force, moves leftward, drives the lower end of the feedback rod 14 to move leftward, enables the feedback rod 14 to rotate clockwise around the center of the spring tube, and the upper end of the feedback rod pushes the control valve sleeve 18 to move rightward, so that the left control valve port 31 is gradually closed, the pressure in the left control cavity 20 is gradually increased, the pressure in the left control cavity 20 is equal to the pressure in the right control cavity 21 after the left control valve port 31 is completely closed, the hydraulic pressure on both ends of the main valve core 10 is equal, the movement is stopped, the movement of the left control valve sleeve 18 is in proportion to the movement displacement, and the movement of the left control valve sleeve 18 is equal to the movement displacement of the left control valve core 16. At a constant load pressure differential, the control port B outputs a flow rate proportional to the displacement of the main spool 10.
To sum up, when the load pressure difference is constant, the output flow of the valve is proportional to the displacement of the main spool 10, and the displacement of the main spool 10 is proportional to the displacement of the control spool, the ratio of the distance from the lower end of the feedback lever 14 to the rotation center to the distance from the upper end of the feedback lever 14 to the rotation center is the ratio. Under self-sensing closed-loop control, the control spool displacement is again approximately proportional to the input command, so that the output flow of the entire valve is approximately proportional to the magnitude of the input command, the direction, and the polarity of the controller input command.
The foregoing has outlined and described the main features, methods of use, basic principles, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the above-described embodiments, and that the above-described embodiments and descriptions are merely illustrative of the principles of the present invention, and that various changes and modifications may be made in the invention without departing from the spirit and scope of the invention, which is defined by the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (10)

1. The double-piezoelectric-ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve is characterized by comprising a left piezoelectric ring (1), a right piezoelectric ring (2), a left output rod (7), a right output rod (8), a feedback rod (14), a left control valve core (16), a right control valve core (17), a control valve sleeve (18) and a control valve body (19), wherein the left piezoelectric ring (1) is arranged in a left end cavity of the control valve body (19), the side surface of the left piezoelectric ring is glued with the left end cavity side wall of the control valve body (19), the inner wall of a middle circular hole of the left piezoelectric ring (1) is glued with the side surface of a left supporting seat (3), the left end of the left output rod (7) is connected with the left supporting seat (3) in a threaded manner and locked through a left zero adjusting nut (5), and the left control valve core (16) is arranged in the control valve sleeve (18) and is connected with the right end of the left output rod (7) through threads; the right piezoelectric ring (2) is arranged in a right end cavity of the control valve body (19), the side surface of the right piezoelectric ring is glued with the side wall of the right end cavity of the control valve body (19), the inner wall of a middle circular hole of the right piezoelectric ring (2) is glued with the side wall of the right supporting seat (4), the right end of the right output rod (8) is connected with the right supporting seat (4) in a threaded manner and locked through the right zeroing nut (6), and the right control valve core (17) is arranged in the control valve sleeve (18) and is connected with the left end of the right output rod (8) in a threaded manner.
2. A two-stage spool valve type electrohydraulic servo valve with self sensing and bending driving dual piezoelectric rings as in claim 1, wherein said control valve sleeve (18) is disposed in a control valve body (19) and is in clearance fit with the two.
3. The dual-piezoelectric ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve according to claim 1, characterized in that the left control valve core (16) and the right control valve core (17) are symmetrically distributed on both sides of the control valve sleeve (18), the left end of the left control valve core (16) is a threaded hole, the right end blind hole is a left control valve core oil return cavity (29), an annular groove is arranged at the periphery, an oil hole communicated with the left control valve core oil return cavity (29) is arranged in the annular groove, and the outlet of the left control valve core oil return cavity (29) is communicated with the control valve oil return cavity (33); the right end of the right control valve core (17) is provided with a threaded hole, the left end is a right control valve core oil return cavity (30), the outer periphery of the right control valve core oil return cavity is provided with an annular groove, an oil hole communicated with the right control valve core oil return cavity (30) is arranged in the annular groove, an outlet of the right control valve core oil return cavity (30) is communicated with a control valve oil return cavity (33), the control valve oil return cavity (33) is communicated with a main valve oil return cavity (26) through a control valve oil return channel (34), and the main valve oil return cavity (26) is communicated with an oil return port T.
4. The dual piezoelectric ring self-sensing bend-driven two-stage slide valve type electrohydraulic servo valve according to claim 2, characterized in that a left annular groove (27) and a right annular groove (28) are arranged in an inner hole of the control valve sleeve (18), a left control valve port (31) is formed by the right end of the annular groove on the left control valve core (16) and the left end of the left annular groove (27) of the control valve sleeve, and a right control valve port (32) is formed by the left end of the annular groove on the right control valve core (17) and the right end of the right annular groove (28) of the control valve sleeve.
5. A dual piezoelectric ring self-sensing bend-driven two-stage spool valve type electrohydraulic servo valve according to claim 1, characterized in that said left piezoelectric ring (1) drives the left control valve core (16) to move in the control valve sleeve (18) to change the opening of the left control valve port (31), and the right piezoelectric ring (2) drives the right control valve core (17) to move in the control valve sleeve (18) to change the opening of the right control valve port (32).
6. The dual-piezoelectric ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve according to claim 1, characterized in that the left piezoelectric ring (1) and the right piezoelectric ring (2) generate bending deformation and generate voltage signals proportional to the deformation, and the voltage signals are fed back to a controller after being detected and processed by a self-sensing circuit so as to realize self-sensing closed-loop control of the motion displacement of a left control valve core (16) and a right control valve core (17).
7. A dual piezoelectric ring self-sensing bend-driven two-stage spool valve type electrohydraulic servo valve according to claim 1, characterized in that oil from left control valve port (31) or right control valve port (32) drives main spool (10) to move and drives the lower end of feedback rod (14) to move, so that feedback rod (14) rotates around the center of spring tube (15), the upper end of feedback rod (14) pushes control valve sleeve (18) to move towards the closing direction of left control valve port (31) and right control valve port (32), when left control valve port (31) and right control valve port (32) are completely closed, main spool (10) stops moving, forming closed loop control of the position of main spool (10), so that the displacement of main spool (10) is proportional to the displacement generated by left control spool (16) and right control spool (17).
8. The dual piezoelectric ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve according to claim 1, characterized in that the left output rod (7) is in threaded connection with the left supporting seat (3) and locked by the left zeroing nut (5), the right output rod (8) is in threaded connection with the right supporting seat (4) and locked by the right zeroing nut (6), the connecting threads are fine teeth, the left zeroing nut (5) or the right zeroing nut (6) is loosened, and therefore the left output rod (7) and the right output rod (8) are rotated to enable the left control valve core (16) and the right control valve core (17) to move, and zero adjustment of the control valve is completed.
9. The dual-piezoelectric-ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve according to claim 1, characterized in that two ends of the feedback rod (14) are spheres, the upper ends of the feedback rod penetrate through an inner hole of the spring tube (15) to form spherical hinge connection with the control valve sleeve (18), the spring tube (15) is arranged on a central line of the control valve body (19), the lower end of the feedback rod (14) is in spherical hinge connection with the main valve core (10), the main valve core (10) is arranged in the main valve sleeve (9), the main valve sleeve (9) is in clearance fit with the main valve body (13), and the main valve sleeve are in interference fit with each other.
10. A dual piezoelectric ring self-sensing bend-driven two-stage spool valve electro-hydraulic servo valve as claimed in claim 1, wherein the distance from the upper end of the feedback rod (14) to the rotation center thereof is greater than the distance from the lower end to the rotation center thereof, so that the displacement of the main spool (10) is greater than the displacement of the left control spool (16) and the right control spool (17).
CN202310740404.3A 2023-06-21 2023-06-21 Double-piezoelectric ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve Pending CN116906394A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310740404.3A CN116906394A (en) 2023-06-21 2023-06-21 Double-piezoelectric ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310740404.3A CN116906394A (en) 2023-06-21 2023-06-21 Double-piezoelectric ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve

Publications (1)

Publication Number Publication Date
CN116906394A true CN116906394A (en) 2023-10-20

Family

ID=88357249

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310740404.3A Pending CN116906394A (en) 2023-06-21 2023-06-21 Double-piezoelectric ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve

Country Status (1)

Country Link
CN (1) CN116906394A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117673699A (en) * 2023-12-15 2024-03-08 西安轻工业钟表研究所有限公司 Multi-rotating-shaft conjugate movement device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117673699A (en) * 2023-12-15 2024-03-08 西安轻工业钟表研究所有限公司 Multi-rotating-shaft conjugate movement device

Similar Documents

Publication Publication Date Title
CN109630491B (en) Electric control compensation two-way proportional flow valve
CN103615573B (en) Prestretching-pretwist type full-bridge type 2D electro-hydraulic proportion reversing valves
CN101929482A (en) Proportional flow valve controlled by pilot flow closed loop
CN102808811A (en) Two-stage electro-hydraulic servo valve based on giant magnetostrictive electro-mechanical actuator GMA
CN116906394A (en) Double-piezoelectric ring self-sensing bend-driving two-stage slide valve type electrohydraulic servo valve
CN101225881A (en) High speed electrohydraulic open and close valve driven directly by ultra-magnetostriction actuator
CN102878139B (en) Piezoelectric-liquid-actuated elastic-membrane-position electric feedback two-stage servo valve and control method thereof
CN111350875A (en) Micro-flow proportional control valve
CN110307203B (en) Servo variable mechanism for hydraulic pump motor
CN105864491B (en) A kind of straight drive valve is driven with ultra-magnetic telescopic and displacement amplification device
CN101846109B (en) Two-way flow rate continuous control valve
CN110805583B (en) Piezoelectric sheet driven nozzle blocking disc pressure servo valve with main valve core hydraulic compensation
Long et al. A new kind of pilot controlled proportional direction valve with internal flow feedback
CN101598150B (en) Two-stage slide valve electro-hydraulic servo valve driven by giant magnetostrictive actuator
CN112594243B (en) Piezoelectric electrohydraulic servo valve and control method thereof
CN201531479U (en) Large-flow jet servo valve driven by ultra-magnetostrictive actuator
JPH07305786A (en) Actuator for driving valve
CN116498785A (en) Piezoelectric ring bending driving type two-stage slide valve type electrohydraulic servo valve
CN202707662U (en) Two-stage electro-hydraulic servo valve based on giant magnetostrictive electromechanical converter GMA
CN201110285Y (en) Two-phase contraposition magnetostriction self-sensing force feedback B-grade servo valve
CN202040140U (en) Floating type servo valve
CN102434516A (en) Electromagnet differential motion driving method for double-electromagnet proportional directional-flow valve
CN102072352A (en) Piezoelectric valve
CN203239998U (en) Water-based hydraulic symmetric electrostrictive type high-speed on-off valve
CN112049982A (en) Small-sized integrated speed-changing main valve actuator

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination