CN116874129A - Recycling system of acid-base wastewater in semiconductor industry - Google Patents
Recycling system of acid-base wastewater in semiconductor industry Download PDFInfo
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- CN116874129A CN116874129A CN202311040399.1A CN202311040399A CN116874129A CN 116874129 A CN116874129 A CN 116874129A CN 202311040399 A CN202311040399 A CN 202311040399A CN 116874129 A CN116874129 A CN 116874129A
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- 239000002351 wastewater Substances 0.000 title claims abstract description 97
- 239000004065 semiconductor Substances 0.000 title claims abstract description 50
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- 229910021642 ultra pure water Inorganic materials 0.000 claims description 36
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- 238000010525 oxidative degradation reaction Methods 0.000 claims description 6
- 150000003839 salts Chemical class 0.000 claims description 6
- 239000002253 acid Substances 0.000 claims description 5
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
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Classifications
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/02—Treatment of water, waste water, or sewage by heating
- C02F1/04—Treatment of water, waste water, or sewage by heating by distillation or evaporation
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/30—Treatment of water, waste water, or sewage by irradiation
- C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/441—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by reverse osmosis
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/469—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
- C02F1/4691—Capacitive deionisation
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/66—Treatment of water, waste water, or sewage by neutralisation; pH adjustment
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
- C02F2001/427—Treatment of water, waste water, or sewage by ion-exchange using mixed beds
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
- C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A20/00—Water conservation; Efficient water supply; Efficient water use
- Y02A20/124—Water desalination
- Y02A20/131—Reverse-osmosis
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- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The application provides a recycling system of acid-base wastewater in the semiconductor industry, which is characterized in that the recycling system of the acid-base wastewater in the semiconductor industry, which comprises a wastewater recycling module, a reuse water tank, a raw water tank, a filtering module and a purifying module which are sequentially connected, is used for treating the wastewater after the treatment of a semiconductor enterprise to obtain pure water capable of being recycled.
Description
Technical Field
The application relates to the technical field of wastewater recovery, in particular to a system for recycling acid-base wastewater in the semiconductor industry.
Background
In recent years, the semiconductor industry has rapidly developed, mainly in two aspects: on the one hand, the number of semiconductor enterprises is continuously increased; on the other hand, the quality of semiconductor enterprises is continuously improved. The semiconductor production process is complex and fine, the production process is complex and various, not only a plurality of chemical reagents are used, but also a large amount of ultrapure water is used for cleaning, flushing and other processes. This results in a large amount of wastewater, such as acid-base wastewater, fluorine-containing wastewater, and mechanical polishing wastewater, generated in the semiconductor manufacturing process. The continuous expansion of the number of semiconductor enterprises causes the wastewater amount to be increased, and the continuous improvement of the quality of the semiconductor enterprises causes the water quality requirement of the pure water to be higher and higher. At present, the semiconductor enterprises generally treat the wastewater to reach the standard and then directly discharge the wastewater to the urban sewage treatment plant.
Therefore, how to recycle the acid-base wastewater in the semiconductor industry is a problem to be solved.
Disclosure of Invention
In order to solve the problems, the embodiment of the application aims to provide a recycling system for acid-base wastewater in the semiconductor industry.
In a first aspect, an embodiment of the present application provides a system for recycling acid-base wastewater in the semiconductor industry, including: the device comprises a wastewater recovery module, a reuse water tank, a raw water tank, a filtering module and a purifying module which are sequentially connected;
the wastewater recovery module is used for treating acid-base wastewater to obtain reuse water, and conveying the reuse water to the reuse water tank;
the recycling water tank is used for conveying the recycling water tank into the raw water tank;
the raw water pool can uniformly mix the recycled water and fresh raw water in the raw water pool to obtain mixed tap water, and the obtained mixed tap water is conveyed into the filtering module for filtering;
the filtering module can filter the mixed tap water to obtain filtered mixed tap water;
the purification module can purify the filtered mixed tap water to obtain ultrapure water.
In the scheme provided by the first aspect of the embodiment of the application, the recycling system of the acid-base wastewater in the semiconductor industry, which comprises the wastewater recycling module, the reuse water tank, the raw water tank, the filtering module and the purifying module which are sequentially connected, is arranged to treat the wastewater treated by the semiconductor enterprises to obtain pure water capable of being recycled, and compared with the mode that the wastewater is generally treated by the semiconductor enterprises and then discharged to the urban sewage treatment plant in the related art, the method can treat and recycle the wastewater treated by the semiconductor enterprises, reduces environmental pollution, realizes recycling of the wastewater, and has the advantages of environmental protection and energy conservation.
In order to make the above objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 shows a schematic overview of a system for recycling acid-base wastewater in the semiconductor industry according to an embodiment of the present application;
fig. 2 shows a detailed schematic diagram of a system for recycling acid-base wastewater in the semiconductor industry according to an embodiment of the present application.
Icon: 100. a recycling pool; 102. a raw water pool; 104. a neutralization unit; 106. a middle pool; 108. a filtration system; 110. a first reverse osmosis system; 112. an evaporative crystallization device; 114. an ultrafiltration system; 116. a heat exchange system; 122. a cartridge filter; 118. a second reverse osmosis system; 120. reverse osmosis water producing tank; 120. a UV reactor; 124. an EDI device; 126. an ultrapure water tank; 128. TOC-UV device.
Detailed Description
In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present application, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.
In recent years, the semiconductor industry has rapidly developed, mainly in two aspects: on the one hand, the number of semiconductor enterprises is continuously increased; on the other hand, the quality of semiconductor enterprises is continuously improved. The semiconductor production process is complex and fine, the production process is complex and various, not only a plurality of chemical reagents are used, but also a large amount of ultrapure water is used for cleaning, flushing and other processes. This results in a large amount of wastewater, such as acid-base wastewater, fluorine-containing wastewater, and mechanical polishing wastewater, generated in the semiconductor manufacturing process. The continuous expansion of the number of semiconductor enterprises causes the wastewater amount to be increased, and the continuous improvement of the quality of the semiconductor enterprises causes the water quality requirement of the pure water to be higher and higher. At present, the semiconductor enterprises generally treat the wastewater to reach the standard and then directly discharge the wastewater to the urban sewage treatment plant.
However, the semiconductor industry has large water consumption and various water use procedures, and the generated sewage has different properties, but the waste water in the industry is usually collected and discharged after being classified, different treatment methods are adopted according to the characteristics of the waste water, the pertinence is strong, the efficiency is high, and the cost of waste water treatment can be reduced after the classified treatment.
A large amount of various acid-base reagents are added in the production process of the semiconductor industry, so that a large amount of acid-base wastewater is generated, and the acid-base wastewater in the semiconductor industry is collected in a classified manner, so that the wastewater quality contains fewer organic pollutants and fewer toxic and harmful substances, and therefore, how to recycle the wastewater and reduce the water quantity of fresh tap water in pure water preparation is a problem to be solved urgently.
Based on the above, the following embodiments of the present application provide a recycling system for acid-base wastewater in the semiconductor industry, which is configured to treat wastewater after treatment of a semiconductor enterprise to obtain pure water capable of being recycled by arranging a recycling system for acid-base wastewater in the semiconductor industry including a wastewater recovery module, a reuse water tank, a raw water tank, a filtration module and a purification module which are sequentially connected, so that the recycling system can treat and recycle the wastewater after treatment of the semiconductor enterprise, reduce environmental pollution, and realize recycling of the wastewater at the same time, and has the advantages of green environmental protection and energy saving.
In order that the above-recited objects, features and advantages of the present application will become more apparent, a more particular description of the application will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.
Examples
Referring to a general schematic diagram of a recycling system of acid-base wastewater in the semiconductor industry shown in fig. 1 and a detailed schematic diagram of a recycling system of acid-base wastewater in the semiconductor industry shown in fig. 2, this embodiment provides a recycling system of acid-base wastewater in the semiconductor industry, including: the device comprises a wastewater recovery module, a reuse water tank 100, a raw water tank 102, a filtering module and a purifying module which are connected in sequence; the wastewater recovery module is used for treating acid-base wastewater to obtain reuse water, and conveying the reuse water to the reuse water tank 100; the reuse water tank 100 is used for conveying the reuse water tank into the raw water tank 102; the raw water pool 102 can uniformly mix the recycled water and fresh raw water in the raw water pool to obtain mixed tap water, and convey the obtained mixed tap water into the filtering module for filtering; the filtering module can filter the mixed tap water to obtain filtered mixed tap water; the purification module can purify the filtered mixed tap water to obtain ultrapure water.
Specifically, as shown in fig. 2, the wastewater recovery module includes: a neutralization unit 104, an intermediate pond 106, a filtration system 108, and a first reverse osmosis system 110 connected in sequence; the first reverse osmosis system 110 is further connected to the reuse water tank 100; the neutralization unit 104 is capable of adjusting the PH value of acid-base wastewater to obtain wastewater with adjusted PH value, and delivering the obtained wastewater with adjusted PH value to the intermediate water tank 106; the filtering system 108 pre-filters the effluent of the intermediate water tank 106 to obtain pre-filtered wastewater; the first reverse osmosis system 110 is capable of treating the pre-filtered wastewater, reducing the inorganic salt concentration of the pre-filtered wastewater, removing the organic matters of the pre-filtered wastewater, obtaining reuse water, and delivering the obtained reuse water to the reuse water tank 100.
Specifically, in order to neutralize the PH value (PH value) of the acid-base wastewater, the neutralization unit 104 includes: a dosing pump and a neutralization reaction tank; the dosing pump, the neutralization reaction tank and the middle water tank are sequentially connected; the dosing pump can add acid or alkali into the acid-base wastewater of the neutralization reaction tank; and the neutralization reaction tank is used for stirring the acid or alkali added by the dosing pump and the acid-base wastewater, adjusting the pH value of the acid-base wastewater to obtain wastewater with the adjusted pH value, and conveying the obtained wastewater with the adjusted pH value to the middle water tank.
Optionally, the neutralization reaction tank can adopt three-stage neutralization reaction tanks, so that the PH value is adjusted more accurately.
The PH of the PH adjusted wastewater is between 6 and 8 to reduce the risk of corrosion to subsequent filtration systems 108 and to the membrane treatment systems of the first reverse osmosis system 110.
Here, the intermediate water tank 106 can uniformly neutralize the effluent quality of the unit 104 and adjust the amount of effluent of the neutralization reaction tank.
In one embodiment, the filtration system 108 may employ a multi-media filter and/or an activated carbon filter.
In order to more effectively utilize the acid or the alkali added by the dosing pump to neutralize the PH value of the acid-base wastewater, a stirrer or an aerator is arranged in the neutralization reaction tank. Thereby achieving the purposes of accelerating the reaction speed and improving the reaction efficiency.
In addition to the reuse water, the first reverse osmosis system further generates concentrated water, and in order to recycle the concentrated water generated by the first reverse osmosis system, the recycling system of acid-base wastewater in the semiconductor industry provided in this embodiment further includes: an evaporative crystallization device 112; the evaporation crystallization device 112 is respectively connected with the first reverse osmosis system 110 and the reuse water tank 100; the first reverse osmosis system 110 delivers the produced concentrate to the evaporative crystallization device 112; the evaporative crystallization device 112 processes the concentrated water by means of evaporative crystallization, separates salt in the concentrated water from water to obtain reuse water, and transmits the reuse water to the reuse water tank 100.
Specifically, the filtration module includes: an ultrafiltration system 114, a heat exchange system 116, a cartridge filter 122, a second reverse osmosis system 118 and a reverse osmosis water producing tank 120 which are connected in sequence; the ultrafiltration system 114 is also connected with the raw water tank 102, the reverse osmosis water producing tank 120 is also connected with the purification module; the ultrafiltration system 114 can remove suspended matters, colloid and microorganism in the mixed tap water to obtain the mixed tap water after ultrafiltration treatment; the heat exchange system 116 can heat the mixed tap water after ultrafiltration treatment to obtain heated mixed tap water; the cartridge filter can be used for treating the heated mixed tap water and removing inorganic salts and organic matters in the heated mixed tap water; the second reverse osmosis system 118 is capable of treating the mixed tap water treated by the cartridge filter, continuously reducing the inorganic salt concentration of the heated mixed tap water, removing the organic matters of the mixed tap water again to obtain the mixed tap water treated by reverse osmosis, and delivering the obtained mixed tap water treated by reverse osmosis to the reverse osmosis water production tank 120.
Wherein, the heat exchange system 116 can heat the produced water of the ultrafiltration system to 22-25 ℃ to ensure the stability of the quality and the quantity of the produced water of the subsequent second reverse osmosis system 118.
Optionally, a cartridge filter 122 is used to treat the effluent of the heat exchange system 116 with a 10 μm cartridge filter, to remove inorganic salts and residual organic matters in the effluent of the heat exchange system, and the water treated by the cartridge filter enters the second reverse osmosis system 118.
Specifically, the first reverse osmosis system 110 and the second reverse osmosis system 118 each include: a first reverse osmosis membrane, a second reverse osmosis membrane, and a high pressure water pump; the high-pressure water pump is arranged between the first reverse osmosis membrane and the second reverse osmosis membrane; and the high-pressure water pump conveys the water treated by the first reverse osmosis membrane to the second reverse osmosis membrane for treatment.
The reverse osmosis water producing tank 120 can uniformly mix the water quality and the water quantity of tap water after the reverse osmosis treatment by the second reverse osmosis system 118.
Specifically, the purification module includes: a UV reactor 120, an EDI device 124, an ultrapure water tank 126, and a TOC-UV device 128 connected in sequence; the UV reactor 120 is also connected with the reverse osmosis water producing tank; the UV reactor 120 can sterilize the effluent of the reverse osmosis water producing tank to obtain sterilized mixed tap water; the EDI device 124 is capable of removing impurities in the sterilized mixed tap water to obtain ultrapure water, and delivering the ultrapure water into the ultrapure water tank 126; the TOC-UV device 128 is capable of performing oxidative degradation on the effluent of the ultrapure water tank 126 to obtain ultrapure water after oxidative degradation.
In one embodiment, the UV reactor 120 includes: UV lamps and filters; wherein, the UV lamp adopts a UV lamp with the wavelength of 185 nanometers (nm) in the ultraviolet wave band; the filter used was a 0.45 micrometer (μm) filter.
The UV lamp firstly performs a sterilization treatment on the effluent of the reverse osmosis water producing tank 120, and then intercepts killed bacteria in the water by using a filter, so that the water quality of the mixed tap water obtained after the sterilization treatment of the UV reactor 120 can meet the water quality requirement of ultrapure water.
The EDI device 124 removes impurities in the mixed tap water after the filtering treatment, that is, further removes salt and purifies the mixed tap water obtained after the sterilization treatment of the UV reactor 120, thereby achieving the purpose of removing impurity ions in the mixed tap water and improving the resistivity of the mixed tap water to obtain ultrapure water.
In one embodiment, in order to further increase the quality of the ultrapure water in the ultrapure water tank, nitrogen is introduced into the ultrapure water tank 126, and the ultrapure water in the ultrapure water tank is isolated from air, so that the oxygen content in the produced ultrapure water quality meets the water quality requirement.
The TOC-UV device 128 adopts a UV-C wave band 185nm wavelength and combines an ultraviolet sterilizer of UV-254nm, generates OH hydroxyl free radicals in the ultrapure water through high-dose ultraviolet catalysis, and oxidizes and degrades organic matters in the ultrapure water so that the control quantity of TOC in the ultrapure water meets the requirement.
In order to further improve the water quality of the ultrapure water, a polishing mixed bed can be arranged at the tail end of a recycling system of acid-base wastewater in the semiconductor industry. In the recycling system of acid-base wastewater in the semiconductor industry provided in this embodiment, the system further includes: a polishing mixed bed 130 connected to the TOC-UV device; the polishing mixed bed 130 purifies the ultra-pure water after the oxidative degradation. Thereby further improving the water quality of the ultrapure water and meeting the water requirement.
In summary, this embodiment provides a recycle system of semiconductor trade acid-base waste water, through setting up the recycle system of semiconductor trade acid-base waste water including connecting gradually waste water recovery module, retrieval and utilization pond, raw water pond, filtration module and purification module, the waste water after the semiconductor enterprise handles, obtain the pure water that can recycle, compare with the mode that semiconductor enterprise generally discharged the waste water after handling to urban sewage treatment plant in the correlation technique, can handle and recycle the waste water after the semiconductor enterprise handles, realized the resource recycle of waste water when reducing environmental pollution, have green's energy-conserving advantage.
The foregoing is merely illustrative of the present application, and the present application is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. The utility model provides a semiconductor trade acid-base waste water's recycle system which characterized in that includes: the device comprises a wastewater recovery module, a reuse water tank, a raw water tank, a filtering module and a purifying module which are sequentially connected;
the wastewater recovery module is used for treating acid-base wastewater to obtain reuse water, and conveying the reuse water to the reuse water tank;
the recycling water tank is used for conveying the recycling water tank into the raw water tank;
the raw water pool can uniformly mix the recycled water and fresh raw water in the raw water pool to obtain mixed tap water, and the obtained mixed tap water is conveyed into the filtering module for filtering;
the filtering module can filter the mixed tap water to obtain filtered mixed tap water;
the purification module can purify the filtered mixed tap water to obtain ultrapure water.
2. The system of claim 1, wherein the wastewater recovery module comprises: the neutralization unit, the middle water tank, the filtering system and the first reverse osmosis system are connected in sequence;
the first reverse osmosis system is also connected with the reuse water tank;
the neutralization unit can regulate the pH value of acid-base wastewater to obtain wastewater with regulated pH value, and the obtained wastewater with regulated pH value is conveyed to the middle water tank;
the filtering system is used for prefiltering the effluent of the middle water tank to obtain prefiltered wastewater;
the first reverse osmosis system can treat the pre-filtered wastewater, reduce the inorganic salt concentration of the pre-filtered wastewater, remove organic matters of the pre-filtered wastewater, obtain reuse water, and convey the obtained reuse water to the reuse water pool.
3. The system of claim 2, further comprising: an evaporative crystallization device;
the evaporation crystallization device is respectively connected with the first reverse osmosis system and the reuse water tank;
in addition to the reuse water, the first reverse osmosis system produces concentrated water, which is fed to the evaporative crystallization device;
the evaporation crystallization device is used for treating the concentrated water in an evaporation crystallization mode, separating salt in the concentrated water from water to obtain reuse water, and conveying the obtained reuse water to the reuse water pool.
4. The system of claim 2, wherein the neutralization unit comprises: a dosing pump and a neutralization reaction tank;
the dosing pump, the neutralization reaction tank and the middle water tank are sequentially connected;
the dosing pump can add acid or alkali into the acid-base wastewater of the neutralization reaction tank;
and the neutralization reaction tank is used for stirring the acid or alkali added by the dosing pump and the acid-base wastewater, adjusting the pH value of the acid-base wastewater to obtain wastewater with the adjusted pH value, and conveying the obtained wastewater with the adjusted pH value to the middle water tank.
5. The system of claim 2, wherein the filtration module comprises: the ultrafiltration system, the heat exchange system, the cartridge filter, the second reverse osmosis system and the reverse osmosis water producing tank are connected in sequence;
the ultrafiltration system is also connected with the raw water tank, and the reverse osmosis water producing tank is also connected with the purification module;
the ultrafiltration system can remove suspended matters, colloid and microorganisms in the mixed tap water to obtain the mixed tap water after ultrafiltration treatment;
the heat exchange system can heat the mixed tap water after ultrafiltration treatment to obtain heated mixed tap water;
the cartridge filter can be used for treating the heated mixed tap water and removing inorganic salts and organic matters in the heated mixed tap water;
the second reverse osmosis system can process the mixed tap water processed by the cartridge filter, continuously reduce the inorganic salt concentration of the mixed tap water, remove the organic matters of the mixed tap water again to obtain the mixed tap water processed by reverse osmosis, and convey the obtained mixed tap water processed by reverse osmosis into the reverse osmosis water production tank.
6. The system of claim 1, wherein the purification module comprises: the device comprises a UV reactor, an EDI device, an ultrapure water tank and a TOC-UV device which are connected in sequence;
the UV reactor is also connected with the reverse osmosis water producing tank;
the UV reactor can sterilize the effluent of the reverse osmosis water producing tank to obtain sterilized mixed tap water;
the EDI device can remove impurities in the mixed tap water after the sterilization treatment to obtain ultrapure water, and the ultrapure water is conveyed into the ultrapure water tank;
the TOC-UV device can carry out oxidative degradation on the effluent of the ultrapure water tank to obtain ultrapure water after oxidative degradation.
7. The system of claim 6, further comprising: a polishing mixed bed connected with the TOC-UV device;
and the polishing mixed bed is used for purifying the ultrapure water after oxidative degradation.
8. The system of claim 6, wherein nitrogen is introduced into the ultrapure water tank to isolate the ultrapure water in the ultrapure water tank from air.
9. The system of claim 5, wherein the first reverse osmosis system and the second reverse osmosis system each comprise: a first reverse osmosis membrane, a second reverse osmosis membrane, and a high pressure water pump;
the high-pressure water pump is arranged between the first reverse osmosis membrane and the second reverse osmosis membrane;
and the high-pressure water pump conveys the water treated by the first reverse osmosis membrane to the second reverse osmosis membrane for treatment.
10. The system of claim 2, wherein the filtration system employs a multi-media filter and/or an activated carbon filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311040399.1A CN116874129A (en) | 2023-08-17 | 2023-08-17 | Recycling system of acid-base wastewater in semiconductor industry |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311040399.1A CN116874129A (en) | 2023-08-17 | 2023-08-17 | Recycling system of acid-base wastewater in semiconductor industry |
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| CN116874129A true CN116874129A (en) | 2023-10-13 |
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| CN202311040399.1A Pending CN116874129A (en) | 2023-08-17 | 2023-08-17 | Recycling system of acid-base wastewater in semiconductor industry |
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| CN (1) | CN116874129A (en) |
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- 2023-08-17 CN CN202311040399.1A patent/CN116874129A/en active Pending
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