CN116791042A - Preparation device and method for outer surface arc ion plating - Google Patents

Abstract

The preparation device and method of the arc ion plating on the outer surface enable the planetary gear to perform rotation and revolution motions through the design of a workpiece turntable with a planetary gear structure, and simultaneously drive a plurality of thrust chamber bodies to perform rotation and revolution motions; the horizontal distance between the surface of the target material and the outer surface of the thrust chamber body is kept consistent through the structural design of the target material matched with the shape of the thrust chamber body; the arc spots do up-and-down spiral motion on the target, the rotation and revolution motion of the thrust chamber body are matched with the surface of the target and the outer surface of the thrust chamber body, and finally, the uniformity of the coating on the outer surface of the thrust chamber body and the preparation efficiency of the coating are improved. The invention obviously improves the thickness uniformity of the ultra-high temperature protective coating on the outer surface of the thrust chamber body, and greatly improves the production efficiency.

Description

A preparation device and method for external surface arc ion plating

Technical field

The invention belongs to the field of engine design and relates to a device and method for preparing arc ion plating on the outer surface of a thrust chamber body of a high-performance engine, which can be applied to orbital attitude control engines of aerospace vehicles.

Background technique

The bicomponent liquid propellant orbital attitude control engine is an important part of modern space vehicles and is widely used in orbit control, attitude adjustment, etc.

In recent years, the development of new aircraft has continuously increased the requirements for engine performance, requiring it to increase specific impulse and extend service life, thereby improving the orbit change efficiency and on-orbit life of the aircraft or weapon. The allowable temperature of the engine is one of the main factors that determines the specific impulse of the engine. The performance of the engine thrust chamber body matrix material and the high-temperature anti-oxidation coating on its internal and external surfaces determines the engine's allowable temperature and service life.

At present, the base material of the thrust chamber body of the dual-component liquid propellant orbit attitude control engine used in my country's spacecraft orbit introduction and attitude control is niobium alloy, and the coating system is a silicon-chromium-titanium material system. The main preparation methods are as follows Slurry sintering method. The allowable engine temperature of this coating system does not exceed 1450°C, and the service life does not exceed 25,000s.

In order to further improve the operating temperature and service life of the engine nozzle, arc ion plating is used to prepare ultra-high temperature protective coatings, such as molybdenum, iridium, etc., which can effectively increase the allowable temperature of the engine. However, its low production efficiency hinders the ultra-high temperature protective coating. Large-scale promotion and use of layers.

Contents of the invention

The object of the present invention is to overcome the deficiencies of the prior art and provide a preparation device and method for arc ion plating on the outer surface of the thrust chamber body of a bicomponent liquid propellant orbital attitude control engine, so as to protect the outer surface of the thrust chamber body from ultra-high temperatures. The thickness uniformity of the coating has been significantly improved, and the production efficiency has been greatly improved.

The above objects of the present invention are mainly achieved through the following technical solutions:

A preparation device for external surface arc ion plating, including a planetary gear structure workpiece turntable and a cathode arc source system;

The planetary gear structure workpiece turntable includes a sun gear, four planetary gears, a gear carrier and a gear ring. The planetary gears are evenly distributed around the sun gear. The external teeth of the planetary gear mesh with the external teeth of the sun gear. The four planetary gears It is fixed by a gear carrier; the gear ring is located outside the planetary gear, and the inner gear of the gear ring meshes with the outer gear of the planetary gear; the sun gear serves as the driving wheel and is driven by the motor, and the planetary gear serves as the driven wheel. The gear ring is fixed and the planet The gear rotates around the axis of the sun gear and rotates around its own axis at the same time; the thrust chamber body is placed on the planetary gear and moves synchronously with the planetary gear;

The cathode arc source system is placed on the sun wheel and rotates together with the sun wheel; the cathode arc source system includes a permanent magnet, an electromagnetic induction coil with an iron core, an arc starter, and a target. The arc starter is placed at the lower end of the target. The electromagnetic induction coil with an iron core is located directly under the target. The arc-stabilizing power supply is connected to the target and the magnetic field power is connected to the electromagnetic induction coil. The permanent magnet is located directly below the electromagnetic induction coil with the iron core. During the operation of the cathode arc source system, The arc spot makes an up-and-down spiral motion along the target, combined with the rotation and revolution motion of the thrust chamber body, so that the ions excited on the target are evenly deposited on the outer surface of the thrust chamber body.

Preferably, the sun gear and gear ring adopt hollow inner cavities, and cooling water flows through the inner cavities to play a cooling role.

Preferably, the planetary gear has a groove in the center, and the workpiece platform is placed in the planetary gear groove.

Preferably, the workpiece platform adopts the form of two cylinders, one cylinder is embedded in the groove of the planet gear, the other cylinder has a groove above it, and the thrust chamber body is embedded in the groove.

Preferably, the arc starter is made of stainless steel. An arc-starting needle is inserted into the opening of the arc-starter shell. Teflon insulation is used between the arc-starting needle and the arc starter. The arc-starting needle is externally connected to a high-voltage pulse power supply with a voltage of 10,000 to 50,000V.

Preferably, the shape of the target matches the outer profile of the thrust chamber body, the horizontal distance between the target profile and the outer profile of the thrust chamber body is consistent, and the arc starter forms an arc on the surface of the target through pulse ignition. Arc spot, the electromagnetic field formed by the electromagnetic induction coil with an iron core and the magnetic field formed by the permanent magnet act on the arc spot, causing the arc spot to spiral up and down on the target.

Preferably, the magnetic field power supply current is 0~50A, the arc stabilizing current is 50~150A, and the working time is 1~15h.

Preferably, the target material is pure molybdenum or iridium.

Preferably, the sun gear, planet gear, and gear ring are all made of stainless steel.

A new method for preparing external surface arc ion plating, including:

Place the workpiece platform on the planetary gear, and place the thrust chamber body on the workpiece platform;

Turn on the control motor of the sun gear, the cathode arc source system rotates together with the sun gear, and the thrust chamber body rotates and revolutions together with the planetary gear;

Turn on the magnetic field power supply, stable arc power supply and high-voltage pulse power supply in the cathode arc source system. The arc spot will make an upward and downward spiral movement along the target surface, and molybdenum or iridium coating will be evenly deposited on the outer surface of the thrust chamber body.

Compared with the prior art, the present invention has the following beneficial effects:

The present invention provides a new method for preparing the outer surface arc ion plating for the outer surface of the engine thrust chamber body. Through the design of the planetary gear structure workpiece turntable, the planetary gears can perform rotation and revolution movements, and at the same time drive the bodies of multiple thrust chambers to perform rotation and revolution movements. Through the design of the target structure that matches the shape of the thrust chamber body, the target The horizontal distance between the profile surface and the outer surface of the thrust chamber body is consistent; the arc spot makes an up and down spiral motion on the target, the thrust chamber body rotates and revolutions, and the target profile is consistent with the thrust chamber body outer surface. Matching, ultimately improving the uniformity of the coating on the outer surface of the thrust chamber body and increasing the coating preparation efficiency.

Description of the drawings

Figure 1 is a schematic diagram of the external surface arc ion plating preparation device.

Detailed ways

The invention provides a new type of external surface arc ion plating preparation device. The device includes a planetary gear structure workpiece turntable and a cathode arc source system. As shown in Figure 1.

The planetary gear structure workpiece turntable is made of stainless steel and includes a sun gear, four planetary gears, a gear rack and a gear ring. The sun gear is located in the center of the structure, and the planetary gears are evenly distributed around the sun gear. The external teeth of the planetary gears are in contact with the sun gear. The external teeth mesh, and the four planetary gears are fixed by a gear frame; the gear ring is located outside the planetary gear, and the internal gear of the gear ring meshes with the external gear of the planetary gear; the sun gear serves as the driving wheel and is driven by the motor, and the planetary gear serves as the slave. The moving wheel and the gear ring are fixed, and the planetary gear rotates around the axis of the sun gear and rotates around its own axis at the same time; the thrust chamber body is placed on the planetary gear and moves synchronously with the planetary gear. The inner cavity of the sun gear and gear ring adopts a hollow structure, and cooling water is passed outside. The water temperature is 10~15℃, which plays a cooling role. The sun gear has 15 to 40 teeth, the planet gear has 30 to 70 teeth, and the gear ring has 90 to 150 teeth. The sun gear speed is controlled to 30 to 60 r/min, and the planet gear rotation speed and revolution speed are adjusted. The diameter of the root circle of the planetary gear is 100~150mm. The center of the planetary gear is grooved. The workpiece platform is placed in the groove of the planetary gear and moves synchronously with the planetary gear. The workpiece platform adopts a two-section cylindrical method. One section of the cylinder is embedded in the groove of the planetary gear, with an outer diameter of 78~128mm. The other section of the cylinder is grooved, the groove is 3mm deep, and the thrust chamber body is embedded in the groove.

The cathode arc source system is placed on the sun wheel and rotates together with the sun wheel. The cathode arc source system includes a permanent magnet, an electromagnetic induction coil with an iron core, an arc starter, and a target material; the arc starter is placed on the lower end of the target material. The electromagnetic induction coil with an iron core is located directly below the target. The arc-stabilizing power supply is connected externally to the target, and the magnetic field power supply is externally connected to the electromagnetic induction coil. The permanent magnet is located directly below the electromagnetic induction coil with an iron core. The arc starter is made of stainless steel. The arc starting needle is inserted into the opening of the arc starter shell. The arc starting needle and the arc starter are insulated with polytetrafluoroethylene. The arc starting needle is externally connected to a high-voltage pulse power supply with a voltage of 10,000 to 50,000V. The shape of the target matches the outer surface of the thrust chamber body. The horizontal distance between the target profile and the outer surface of the thrust chamber body is consistent. The outer surface of the thrust chamber body is a straight line segment + a concave arc + an expansion segment. The target material is a rotating body, and the outer surface is a straight line segment + a convex arc + a convergent segment. The target material is pure molybdenum or iridium. The arc starter forms an arc spot on the target surface through pulse ignition. The electromagnetic field formed by the electromagnetic induction coil with an iron core and the magnetic field formed by the permanent magnet act on the arc spot, thereby causing the arc spot to form on the target. Up and down spiral movement.

Place the workpiece platform on the planetary gear, place the thrust chamber body on the workpiece platform, turn on the control motor of the sun gear, the cathode arc source system will rotate together with the sun gear, and the thrust chamber body will rotate and revolve together with the planetary gear. Movement, turn on the magnetic field power supply, stable arc power supply and high-voltage pulse power supply in the cathode arc source system, and the arc spot will make an up and down spiral movement along the target surface, thereby uniformly depositing molybdenum or iridium coating on the outer surface of the thrust chamber body.

The preparation method of the present invention is as follows:

Step (1): Prepare the planetary gear structure workpiece turntable device. The specific method is as follows:

(1.1) The planetary gear transmission structure uses a sun gear, 4 planetary gears, 1 gear carrier and 1 gear ring. The sun gear is located in the center of the structure, and the 4 planetary gears are evenly distributed around the sun gear. The four planetary gears are fixed by a gear carrier. The gear ring is located outside the planetary gears. The planetary gear structure is made of stainless steel.

(1.2) The inner cavity of the sun gear and gear ring adopts a hollow structure, and cooling water is passed outside. The water temperature is 10~15℃, which plays a cooling role.

(1.3). The sun gear serves as the driving wheel and is driven by the motor. The gear ring is fixed. The planetary gear serves as the driven wheel and performs rotation and revolution movements. .

(1.4), the sun gear has 15 to 40 teeth, the planet gear has 30 to 70 teeth, the gear ring has 90 to 150 teeth, controls the sun gear speed to 30 to 60 r/min, and adjusts the planet gear rotation speed and revolution speed. (1.5). The diameter of the root circle of the planetary gear is 100~150mm. The thrust chamber body has a groove in the center of the planetary gear. The inner diameter of the groove is 80~130mm and the depth is 5mm;

(1.6) The workpiece platform adopts a two-section cylindrical method. One section of the cylinder is embedded in the groove of the planetary gear, with an outer diameter of 78~128mm. The other section of the cylinder has a groove with a depth of 3mm, and the thrust chamber body is embedded in the groove.

Step (2): Prepare the cathode arc source system that matches the shape of the thrust chamber body. The specific method is as follows:

(2.1) The cathode arc source system includes permanent magnets, electromagnetic induction coils with iron cores, arc starters, and targets.

(2.2) The target material is made of molybdenum, iridium and other materials. The arc starter is placed at the lower end of the target. The electromagnetic induction coil with an iron core is located directly below the target. The target is connected to an arc-stabilizing power supply and the electromagnetic induction coil is connected to a high-voltage pulse. For the power supply, the permanent magnet is located just below the electromagnetic induction coil with an iron core. (2.3) The arc starter is made of stainless steel. The arc starting needle is inserted into the opening of the arc starter shell. The arc starting needle and the arc starter are insulated with polytetrafluoroethylene. The arc starting needle is externally connected to a high-voltage pulse power supply with a voltage of 10000~50000V. .

(2.4). The shape of the target material matches the outer surface of the thrust chamber body. The outer surface of the thrust chamber body is a straight line segment + a concave arc + an expansion segment. The target material is a rotating body and the outer surface is a straight line segment + a convex section. Arc + convergence segment.

(2.5) The arc starter forms an arc spot on the target surface through pulse ignition. The electromagnetic field and the permanent magnet act on the arc spot, causing the arc spot to spiral up and down on the target.

(2.5), the electromagnetic coil magnetic field current is 0~50A, the arc stabilizing current is 100~150A, and the arc starting time is 1~15h.

(2.6) Place the workpiece platform on the planetary gear, place the thrust chamber body on the workpiece platform, turn on the control motor of the sun gear, the cathode arc source system will rotate together with the sun gear, and the thrust chamber body will work with the planetary gear. Perform rotation and revolution movements, turn on the magnetic field power supply in the cathode arc source system, control the magnetic field current 0~50A, turn on the arc stabilizing power supply in the cathode arc source system, control the arc stabilizing current 100~150A, and turn on the high voltage in the cathode arc source system Pulse power supply, control voltage 10000~50000V, after the arc spot is formed, it will make an upward and downward spiral movement along the target surface, and evenly deposit molybdenum or iridium coating on the outer surface of the thrust chamber body.

Example:

Taking the manufacture of an engine thrust chamber body with a size of φ50×100mm (φ50mm is the maximum outer diameter of the engine thrust chamber body, and 100mm is the height of the engine thrust chamber body) as an example, a molybdenum coating is deposited on the outer surface of the engine thrust chamber body. , illustrate the specific implementation of the method of the present invention.

(a) Preparation of planetary gear structure workpiece turntable device:

(1) Prepare 1 sun gear, 4 planetary gears, 1 gear carrier and 1 gear ring. The material is made of stainless steel. The sun gear is located in the center of the structure. The 4 planetary gears are evenly distributed around the sun gear. 4 The planetary gear is fixed by a gear carrier, and the gear ring is located outside the planetary gear.

(2) The inner cavity of the sun gear and gear ring adopts a hollow structure, and cooling water is passed outside. The water temperature is 12°C, which plays a cooling role.

(3) The sun gear serves as the driving wheel and is driven by the motor. The gear ring is fixed and the planetary gear serves as the driven wheel and performs rotation and revolution movements.

(4) The sun gear has 20 teeth, the planetary gear has 50 teeth, and the gear ring has 100 teeth. The sun gear speed is driven by the motor speed. The sun gear speed is controlled at 60r/min, the planetary gear rotation speed is 24r/min, and the revolution speed is 10r/min. . .

(5) The planetary gear tooth root circle diameter is 100mm, the workpiece platform has a groove in the center, the groove inner diameter is 81mm, and the groove depth is 5mm;

(6) The workpiece platform adopts a two-section cylindrical method. One section of the cylinder is embedded in the groove of the planetary gear, with an outer diameter of 80mm. The other section of the cylinder has a groove with a depth of 3mm, and the thrust chamber body is embedded in the groove.

(c) Preparation of the cathode arc source system that matches the shape of the thrust chamber body:

(1) Process the target. The material is molybdenum. The shape of the target matches the outer surface of the thrust chamber body. The outer surface of the thrust chamber body is a straight segment + concave arc + expansion segment. The target is a rotating body. The outer surface is a straight line segment + a convex arc + a convergent segment.

(2) The cathode arc source system includes permanent magnets, electromagnetic induction coils with iron cores, arc starters, and targets.

(3) The arc starter is placed at the lower end of the target. The electromagnetic induction coil with an iron core is located directly below the target. The arc stabilizing power supply is connected to the target, the magnetic field power is supplied to the electromagnetic induction coil, and the permanent magnet is located in the electromagnetic coil with the iron core. Directly below the magnetic induction coil.

(4) The arc starter is made of stainless steel. The arc starting needle is inserted into the opening of the arc starter shell. Polytetrafluoroethylene is used as insulation between the arc starting needle and the arc starter. The arc starting needle is externally connected to a high-voltage pulse power supply with a voltage of 10000~50000V. .

(5) The arc starter forms an arc spot on the target surface through pulse ignition. The electromagnetic field and the permanent magnet act on the arc spot, and the arc spot makes an up and down spiral motion on the target.

(6) Place the workpiece platform on the planetary gear, place the thrust chamber body on the workpiece platform, turn on the control motor of the sun gear, the cathode arc source system will rotate together with the sun gear, and the thrust chamber body will work with the planetary gear. Perform rotation and revolution movements, turn on the magnetic field power supply in the cathode arc source system, control the magnetic field current 0~12A, turn on the arc stabilizing power supply in the cathode arc source system, control the arc stabilizing current 120A, and turn on the high voltage pulse power supply in the cathode arc source system , the control voltage is 10000~50000V. After the arc spot is formed, it will make an upward and downward spiral movement along the target surface. The working time is 4 hours, and the molybdenum or iridium coating is evenly deposited on the outer surface of the thrust chamber body.

Tests show that the outer surface arc ion plating achieves uniform deposition of molybdenum coating on the outer surface of the engine thrust chamber with a size of φ50×100mm. The thickness uniformity of the molybdenum layer in each part reaches ±5μm, and the deposition efficiency is improved by 4 compared with before. times.

This invention proposes for the first time a new method for preparing ultra-high temperature anti-oxidation coatings by arc ion plating on external surfaces. This preparation method will increase production efficiency by 4 to 6 times, further improve coating uniformity, and help promote ultra-high temperature anti-oxidation coatings such as molybdenum and iridium. The promotion and application of high-temperature protective coatings will help promote the development and progress of space vehicles.

The present invention provides a new method for preparing an outer surface arc ion plating for the outer surface of an engine thrust chamber body. Through the design of the planetary gear structure workpiece turntable, the planetary gears can perform rotation and revolution movements, and at the same time drive multiple thrust chamber bodies to perform rotation and revolution movements; through the target structure design that matches the shape of the thrust chamber body, the target The horizontal distance between the profile and the outer surface of the thrust chamber body is consistent; the arc spot makes an up and down spiral motion on the target, the thrust chamber body rotates and revolutions, and the target profile matches the outer surface of the thrust chamber body. , ultimately achieving an improvement in coating uniformity on the outer surface of the thrust chamber body and an increase in coating preparation efficiency.

This invention proposes for the first time a new method for preparing external surface arc ion plating. This preparation method will increase the production efficiency of ultra-high temperature protective coating on the outer surface of the thrust chamber body from the existing 0.5 to 1 unit/day to 2 to 2 4 units/day; the axial uniformity of the ultra-high temperature protective coating on the outer surface of the thrust chamber body: increased from the existing ±20 μm to ±10 μm; the uniformity of the ultra-high temperature protective coating on the thrust chamber body of multiple units reaches ±10 μm . This preparation method helps to improve the service stability and reliability of ultra-high temperature protective coatings such as molybdenum and iridium, promotes the promotion and use of ultra-high temperature protective coatings, and is of great significance to further improving the performance of orbital attitude control engines.

Contents not described in detail in the specification of the present invention belong to the prior art known to those skilled in the art.

Claims (10)

1. A preparation device for external surface arc ion plating, characterized by: including a planetary gear structure workpiece turntable and a cathode arc source system; The planetary gear structure workpiece turntable includes a sun gear, four planetary gears, a gear carrier and a gear ring. The planetary gears are evenly distributed around the sun gear. The external teeth of the planetary gear mesh with the external teeth of the sun gear. The four planetary gears It is fixed by a gear carrier; the gear ring is located outside the planetary gear, and the inner gear of the gear ring meshes with the outer gear of the planetary gear; the sun gear serves as the driving wheel and is driven by the motor, and the planetary gear serves as the driven wheel. The gear ring is fixed and the planet The gear rotates around the axis of the sun gear and rotates around its own axis at the same time; the thrust chamber body is placed on the planetary gear and moves synchronously with the planetary gear; The cathode arc source system is placed on the sun wheel and rotates together with the sun wheel; the cathode arc source system includes a permanent magnet, an electromagnetic induction coil with an iron core, an arc starter, and a target. The arc starter is placed at the lower end of the target. The electromagnetic induction coil with an iron core is located directly under the target. The arc-stabilizing power supply is connected to the target and the magnetic field power is connected to the electromagnetic induction coil. The permanent magnet is located directly below the electromagnetic induction coil with the iron core. During the operation of the cathode arc source system, The arc spot makes an up-and-down spiral motion along the target, combined with the rotation and revolution motion of the thrust chamber body, so that the ions excited on the target are evenly deposited on the outer surface of the thrust chamber body. 2. An outer surface arc ion plating preparation device according to claim 1, characterized in that: the sun gear and the gear ring adopt hollow inner cavities, and cooling water is passed through the inner cavities to play a cooling role. 3. An outer surface arc ion plating preparation device according to claim 1, characterized in that: a groove is formed in the center of the planetary gear, and the workpiece platform is placed in the groove of the planetary gear. 4. A preparation device for outer surface arc ion plating according to claim 3, characterized in that: the workpiece platform adopts the form of two sections of cylinders, one section of the cylinder is embedded in the groove of the planetary gear, and the other section of the cylinder has a groove above it. , the thrust chamber body is embedded in the groove. 5. A preparation device for outer surface arc ion plating according to claim 1, characterized in that: the arc starter is made of stainless steel, and an arc-starting needle is inserted into the opening of the arc-starter shell. The space is insulated with polytetrafluoroethylene, and the arc igniting needle is externally connected to a high-voltage pulse power supply with a voltage of 10,000 to 50,000V. 6. A preparation device for outer surface arc ion plating according to claim 5, characterized in that: the shape of the target matches the outer profile of the thrust chamber body, and the target profile matches the outer profile of the thrust chamber body. The horizontal distance is kept consistent. The arc starter forms an arc spot on the target surface through pulse ignition. The electromagnetic field formed by the electromagnetic induction coil with an iron core and the magnetic field formed by the permanent magnet act on the arc spot, thereby making the arc arc The spot makes an up and down spiral motion on the target. 7. An external surface arc ion plating preparation device according to claim 6, characterized in that: the magnetic field power supply current is 0-50A, the arc stabilizing current is 50-150A, and the working time is 1-15 hours. 8. A preparation device for external surface arc ion plating according to claim 4, characterized in that: the target material is pure molybdenum or iridium. 9. An external surface arc ion plating preparation device according to claim 1, characterized in that: the sun gear, the planet gear, and the gear ring are all made of stainless steel. 10. A method for preparing external surface arc ion plating, which is characterized by comprising: Place the workpiece platform on the planetary gear, and place the thrust chamber body on the workpiece platform; Turn on the control motor of the sun gear, the cathode arc source system rotates together with the sun gear, and the thrust chamber body rotates and revolutions together with the planetary gear; Turn on the magnetic field power supply, stable arc power supply and high-voltage pulse power supply in the cathode arc source system. The arc spot will make an upward and downward spiral movement along the target surface, and molybdenum or iridium coating will be evenly deposited on the outer surface of the thrust chamber body.