CN116791042A - Preparation device and method for outer surface arc ion plating - Google Patents
Preparation device and method for outer surface arc ion plating Download PDFInfo
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- CN116791042A CN116791042A CN202310552390.2A CN202310552390A CN116791042A CN 116791042 A CN116791042 A CN 116791042A CN 202310552390 A CN202310552390 A CN 202310552390A CN 116791042 A CN116791042 A CN 116791042A
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- planetary gear
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- 238000007733 ion plating Methods 0.000 title claims abstract description 25
- 238000002360 preparation method Methods 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims abstract description 14
- 230000033001 locomotion Effects 0.000 claims abstract description 41
- 239000013077 target material Substances 0.000 claims abstract description 36
- 238000000576 coating method Methods 0.000 claims abstract description 18
- 239000011248 coating agent Substances 0.000 claims abstract description 17
- 230000005674 electromagnetic induction Effects 0.000 claims description 23
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 18
- 239000007858 starting material Substances 0.000 claims description 18
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 16
- 229910052750 molybdenum Inorganic materials 0.000 claims description 16
- 239000011733 molybdenum Substances 0.000 claims description 16
- 229910052741 iridium Inorganic materials 0.000 claims description 12
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 11
- 239000010935 stainless steel Substances 0.000 claims description 10
- 229910001220 stainless steel Inorganic materials 0.000 claims description 10
- 230000000087 stabilizing effect Effects 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 5
- 239000000498 cooling water Substances 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 5
- 230000005672 electromagnetic field Effects 0.000 claims description 5
- -1 polytetrafluoroethylene Polymers 0.000 claims description 5
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 5
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 claims description 2
- 238000010891 electric arc Methods 0.000 claims 1
- 239000011253 protective coating Substances 0.000 abstract description 11
- 238000013461 design Methods 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000009286 beneficial effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000003380 propellant Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910001257 Nb alloy Inorganic materials 0.000 description 1
- RCZQOTNWXWGLSL-UHFFFAOYSA-N [Ti].[Si].[Cr] Chemical compound [Ti].[Si].[Cr] RCZQOTNWXWGLSL-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
The preparation device and method of the arc ion plating on the outer surface enable the planetary gear to perform rotation and revolution motions through the design of a workpiece turntable with a planetary gear structure, and simultaneously drive a plurality of thrust chamber bodies to perform rotation and revolution motions; the horizontal distance between the surface of the target material and the outer surface of the thrust chamber body is kept consistent through the structural design of the target material matched with the shape of the thrust chamber body; the arc spots do up-and-down spiral motion on the target, the rotation and revolution motion of the thrust chamber body are matched with the surface of the target and the outer surface of the thrust chamber body, and finally, the uniformity of the coating on the outer surface of the thrust chamber body and the preparation efficiency of the coating are improved. The invention obviously improves the thickness uniformity of the ultra-high temperature protective coating on the outer surface of the thrust chamber body, and greatly improves the production efficiency.
Description
Technical Field
The invention belongs to the field of engine design, and relates to a preparation device and a preparation method for arc ion plating on the outer surface of a thrust chamber body of a high-performance engine, which can be applied to a rail attitude control engine of an aerospace vehicle.
Background
The dual-component liquid propellant track attitude control engine is an important component of a modern space vehicle and is widely applied to track control, attitude adjustment and the like.
In recent years, the development of novel aircrafts has continuously improved requirements on engine performance, and the improvement of specific impulse and the extension of service life are required, so that the orbit transfer efficiency and the orbit service life of aircrafts or weapons are improved. The allowable temperature of the engine is one of the main factors for determining the specific impulse of the engine, and the performance of the high-temperature oxidation-resistant coating on the body base material of the thrust chamber of the engine and the inner surface and the outer surface of the base material of the thrust chamber of the engine determines the allowable temperature, service life and other performances of the engine.
At present, the matrix material of the thrust chamber body of the dual-component liquid propellant track attitude control engine applied to the track introduction and attitude control of the space vehicle in China is niobium alloy, the coating system is a silicon-chromium-titanium material system, and the preparation method is mainly a slurry sintering method. The allowable engine temperature of the coating system is not more than 1450 ℃, and the service life is not more than 25000s.
In order to further improve the working temperature and service life of the engine spray pipe, the ultra-high temperature protective coating, such as molybdenum, iridium and the like, is prepared by adopting an arc ion plating method, so that the allowable temperature of the engine can be effectively improved, and the low production efficiency of the ultra-high temperature protective coating prevents the large-scale popularization and use of the ultra-high temperature protective coating.
Disclosure of Invention
The invention aims to overcome the defects of the prior art, and provides a device and a method for preparing arc ion plating on the outer surface of a thrust chamber body of a dual-component liquid propellant track attitude control engine, which can obviously improve the thickness uniformity of an ultra-high temperature protective coating on the outer surface of the thrust chamber body and greatly improve the production efficiency.
The above object of the present invention is mainly achieved by the following technical solutions:
the preparation device for outer surface arc ion plating comprises a workpiece turntable with a planetary gear structure and a cathode arc source system;
the planetary gear structure workpiece turntable comprises a sun gear, four planetary gears, a gear carrier and a gear ring, wherein the planetary gears are uniformly distributed around the sun gear, external teeth of the planetary gears are meshed with external teeth of the sun gear, and the four planetary gears are fixed by the gear carrier; the gear ring is positioned at the outer side of the planetary gear, and the inner gear of the gear ring is meshed with the outer gear of the planetary gear; the sun gear is used as a driving wheel and driven by a motor, the planetary gear is used as a driven wheel, the gear ring is fixed, the planetary gear revolves around the axis of the sun gear and simultaneously rotates around the axis of the planetary gear; the thrust chamber body is arranged on the planetary gear and moves synchronously with the planetary gear;
the cathode arc source system is arranged on the sun gear and performs autorotation movement together with the sun gear; the cathode arc source system comprises a permanent magnet, an electromagnetic induction coil with an iron core, an arc generator and a target, wherein the arc generator is sleeved at the lower end of the target, the electromagnetic induction coil with the iron core is positioned right below the target, an arc stabilizing power supply is externally conducted to the target, a magnetic field power supply is externally conducted to the electromagnetic induction coil, and the permanent magnet is positioned right below the electromagnetic induction coil with the iron core; in the working process of the cathode arc source system, the arc spots do up-and-down spiral motion along the target material and combine the rotation and revolution motion of the thrust chamber body, so that ions excited on the target material are uniformly deposited on the outer surface of the thrust chamber body.
Preferably, the sun gear and the gear ring adopt hollow inner cavities, and cooling water is filled in the inner cavities to play a role in cooling.
Preferably, the center of the planetary gear is provided with a groove, and the workpiece platform is placed in the groove of the planetary gear.
Preferably, the workpiece platform is in a two-section cylindrical form, one section of cylinder is embedded into the planetary gear groove, the groove is formed above the other section of cylinder, and the thrust chamber body is embedded into the groove.
Preferably, the arc starter is made of stainless steel, an arc striking needle is inserted into an opening of an arc starter shell, polytetrafluoroethylene is used for insulation between the arc striking needle and the arc starter, and the arc striking needle is externally connected with a high-voltage pulse power supply, and the voltage is 10000-50000V.
Preferably, the shape of the target material is matched with the outer profile of the thrust chamber body, the horizontal distance between the profile of the target material and the outer profile of the thrust chamber body is kept consistent, the arc starter forms arc spots on the surface of the target material in a pulse ignition mode, and an electromagnetic field formed by an electromagnetic induction coil with an iron core and a magnetic field formed by a permanent magnet act on the arc spots, so that the arc spots do up-and-down spiral motion on the target material.
Preferably, the magnetic field power supply current is 0-50A, the arc stabilizing current is 50-150A, and the working time is 1-15 h.
Preferably, the target material is pure molybdenum or iridium.
Preferably, the sun gear, the planetary gear and the gear ring are all made of stainless steel materials.
A preparation method of novel outer surface arc ion plating comprises the following steps:
placing a workpiece platform on the planetary gear, and placing the thrust chamber body on the workpiece platform;
turning on a control motor of the sun gear, and enabling the cathode arc source system to perform autorotation movement together with the sun gear and enabling the thrust chamber body to perform autorotation and revolution movement together with the planetary gear;
and (3) turning on a magnetic field power supply, a stable arc power supply and a high-voltage pulse power supply in the cathode arc source system, enabling arc spots to do up-and-down spiral motion along the surface of the target material, and uniformly depositing a molybdenum or iridium coating on the outer surface of the thrust chamber body.
Compared with the prior art, the invention has the following beneficial effects:
the invention provides a novel preparation method of outer surface arc ion plating aiming at the outer surface of a thrust chamber body of an engine. Through the design of a workpiece turntable with a planetary gear structure, the planetary gear can perform rotation and revolution motions, and simultaneously, a plurality of thrust chamber body parts are driven to perform rotation and revolution motions; the horizontal distance between the surface of the target material and the outer surface of the thrust chamber body is kept consistent through the structural design of the target material matched with the shape of the thrust chamber body; the arc spots do up-and-down spiral motion on the target, the rotation and revolution motion of the thrust chamber body are matched with the surface of the target and the outer surface of the thrust chamber body, and finally, the uniformity of the coating on the outer surface of the thrust chamber body and the preparation efficiency of the coating are improved.
Drawings
FIG. 1 is a schematic view of an apparatus for preparing arc ion plating on an outer surface.
Detailed Description
The invention provides a novel preparation device for outer surface arc ion plating, which comprises a workpiece turntable with a planetary gear structure and a cathode arc source system. As shown in fig. 1.
The planetary gear structure workpiece turntable is made of stainless steel materials and comprises a sun gear, four planetary gears, a gear carrier and a gear ring, wherein the sun gear is positioned at the center of the structure, the planetary gears are uniformly distributed around the sun gear, external teeth of the planetary gears are meshed with external teeth of the sun gear, and the four planetary gears are fixed by the gear carrier; the gear ring is positioned at the outer side of the planetary gear, and the inner gear of the gear ring is meshed with the outer gear of the planetary gear; the sun gear is used as a driving wheel and driven by a motor, the planetary gear is used as a driven wheel, the gear ring is fixed, the planetary gear revolves around the axis of the sun gear and simultaneously rotates around the axis of the planetary gear; the thrust chamber body is placed on the planetary gear and moves synchronously with the planetary gear. The inner cavities of the sun gear and the gear ring are hollow, cooling water is externally introduced, and the water temperature is 10-15 ℃, so that the cooling effect is achieved. The number of teeth of the sun gear is 15-40, the number of teeth of the planet gear is 30-70, the number of teeth of the gear ring is 90-150, the rotating speed of the sun gear is controlled to be 30-60 r/min, and the rotation speed and revolution speed of the planet gear are adjusted. The diameter of the root circle of the planet gear is 100-150 mm, the center of the planet gear is provided with a groove, and the workpiece platform is placed in the groove of the planet gear and moves synchronously with the planet gear. The workpiece platform adopts a two-section cylindrical mode, one section of cylinder is embedded into the planetary gear groove, the outer diameter is 78-128 mm, the other section of cylinder is provided with a groove, the groove depth is 3mm, and the thrust chamber body is embedded into the groove.
The cathode arc source system is arranged on the sun wheel and performs autorotation motion together with the sun wheel, and comprises a permanent magnet, an electromagnetic induction coil with an iron core, an arc starter and a target; the arc starter is sleeved at the lower end of the target, the electromagnetic induction coil with the iron core is positioned under the target, the arc stabilizing power supply is externally connected with the target, the magnetic field power supply is externally connected with the electromagnetic induction coil, and the permanent magnet is positioned under the electromagnetic induction coil with the iron core. The arc starter is made of stainless steel, an arc striking needle is inserted into an opening of the shell of the arc starter, polytetrafluoroethylene is adopted between the arc striking needle and the arc starter for insulation, and the arc striking needle is externally connected with a high-voltage pulse power supply with the voltage of 10000-50000V. The shape of the target material is matched with the outer profile of the thrust chamber body, the horizontal distance between the target material profile and the outer profile of the thrust chamber body is kept consistent, the outer profile of the thrust chamber body is a straight line section, a concave circular arc and an expansion section, the target material is a revolving body, and the outer profile is a straight line section, a convex circular arc and a convergence section. The target material is pure molybdenum or iridium. The arc starter forms arc spots on the surface of the target material in a pulse ignition mode, and an electromagnetic field formed by an electromagnetic induction coil with an iron core and a magnetic field formed by a permanent magnet act on the arc spots, so that the arc spots do up-and-down spiral motion on the target material.
The method comprises the steps of placing a workpiece platform on a planetary gear, placing a thrust chamber body on the workpiece platform, turning on a control motor of a sun gear, enabling a cathode arc source system to perform autorotation motion together with the sun gear, enabling the thrust chamber body to perform autorotation and revolution motion together with the planetary gear, turning on a magnetic field power supply, a stable arc power supply and a high-voltage pulse power supply in the cathode arc source system, enabling arc spots to perform up-and-down spiral motion along the surface of a target material, and accordingly enabling the outer surface of the thrust chamber body to be uniformly deposited with molybdenum or iridium coatings.
The preparation method of the invention comprises the following steps:
step (1), preparing a planetary gear structure workpiece turntable device, wherein the specific method comprises the following steps of:
the planetary gear transmission structure comprises 1 sun gear, 4 planetary gears, 1 gear frame and 1 gear ring, wherein the sun gear is positioned at the center of the structure, the 4 planetary gears are uniformly distributed around the sun gear, the 4 planetary gears are fixed by the 1 gear frame, the gear ring is positioned at the outer side of the planetary gears, and the planetary gear structure is made of stainless steel materials.
(1.2), the inner cavities of the sun gear and the gear ring adopt hollow structures, cooling water is externally introduced, and the water temperature is 10-15 ℃, so that the cooling effect is achieved.
(1.3) the sun wheel is used as a driving wheel, the motor drives the sun wheel to work, the gear ring is fixed, and the planetary gear is used as a driven wheel to do rotation and revolution motions. .
(1.4), the number of teeth of the sun gear is 15-40, the number of teeth of the planet gear is 30-70, the number of teeth of the gear ring is 90-150, the rotating speed of the sun gear is controlled to be 30-60 r/min, and the rotation speed and revolution speed of the planet gear are adjusted. (1.5) the root circle diameter of the planet gear is 100-150 mm, the center of the planet gear at the body part of the thrust chamber is provided with a groove, the inner diameter of the groove is 80-130 mm, and the depth is 5mm;
(1.6) the workpiece platform adopts a two-section cylindrical mode, one section of cylinder is embedded into the planetary gear groove, the outer diameter is 78-128 mm, the other section of cylinder is provided with a groove, the groove depth is 3mm, and the thrust chamber body is embedded into the groove.
Step (2), preparing a cathode arc source system matched with the external shape of the thrust chamber body, wherein the specific method comprises the following steps:
and (2.1) the cathode arc source system comprises a permanent magnet, an electromagnetic induction coil with an iron core, an arc starter and a target.
(2.2) selecting materials such as molybdenum and iridium as targets, sleeving an arc starter at the lower end of the targets, enabling an electromagnetic induction coil with an iron core to be positioned right below the targets, enabling an arc stabilizing power supply to be conducted outside the targets, enabling a high-voltage pulse power supply to be conducted outside the electromagnetic induction coil, and enabling a permanent magnet to be positioned right below the electromagnetic induction coil with the iron core. (2.3) the arc starting device is made of stainless steel, an arc starting needle is inserted into an opening of the shell of the arc starting device, polytetrafluoroethylene insulation is adopted between the arc starting needle and the arc starting device, and the arc starting needle is externally connected with a high-voltage pulse power supply, and the voltage is 10000-50000V.
(2.4) the shape of the target material is matched with the outer molded surface of the thrust chamber body, the outer molded surface of the thrust chamber body is a straight line section, a concave circular arc and an expansion section, the target material is a revolving body, and the outer molded surface is a straight line section, a convex circular arc and a convergence section.
(2.5) forming an arc spot on the surface of the target by the arc starter in a pulse ignition mode, wherein an electromagnetic field and a permanent magnet act on the arc spot, so that the arc spot performs up-and-down spiral motion on the target.
(2.5), magnetic field current of the electromagnetic coil is 0-50A, arc stabilizing current is 100-150A, and arcing time is 1-15 h.
(2.6) placing the workpiece platform on the planetary gear, placing the thrust chamber body on the workpiece platform, turning on a control motor of the sun gear, enabling the cathode arc source system to perform autorotation movement together with the sun gear, enabling the thrust chamber body to perform autorotation and revolution movement together with the planetary gear, turning on a magnetic field power supply in the cathode arc source system, controlling magnetic field current to be 0-50A, turning on a stable arc power supply in the cathode arc source system, controlling stable arc current to be 100-150A, turning on a high-voltage pulse power supply in the cathode arc source system, controlling voltage to be 10000-50000V, performing up-and-down spiral movement along the surface of a target after arc spots are formed, and uniformly depositing molybdenum or iridium coating on the outer surface of the thrust chamber body.
Examples:
taking an example of manufacturing an engine thrust chamber body with a dimension phi 50 x 100mm (phi 50mm is the maximum outer diameter of the engine thrust chamber body, and 100mm is the height of the engine thrust chamber body), a molybdenum coating is deposited on the outer surface of the engine thrust chamber body, and a specific embodiment of the method of the invention is described.
(a) Preparing a planetary gear structure workpiece turntable device:
(1) The method comprises the steps of preparing 1 sun gear, 4 planetary gears, 1 gear frame and 1 gear ring, wherein stainless steel materials are selected as materials, the sun gear is located at the center of the structure, the 4 planetary gears are uniformly distributed around the sun gear, the 4 planetary gears are fixed by the 1 gear frame, and the gear ring is located on the outer side of the planetary gears.
(2) The inner cavities of the sun gear and the gear ring are hollow, cooling water is externally introduced, the water temperature is 12 ℃, and the cooling effect is achieved.
(3) The sun wheel is used as a driving wheel, the motor drives the sun wheel to work, the gear ring is fixed, and the planetary gear is used as a driven wheel to do rotation and revolution motions.
(4) The number of teeth of the sun gear is 20, the number of teeth of the planet gear is 50, the number of teeth of the gear ring is 100, the rotation speed of the sun gear is driven by the rotation speed of the motor, the rotation speed of the sun gear is controlled to be 60r/min, the rotation speed of the planet gear is 24r/min, and the revolution speed is 10r/min. .
(5) The diameter of the root circle of the planetary gear is 100mm, the center of the workpiece platform is provided with a groove, the inner diameter of the groove is 81mm, and the depth of the groove is 5mm;
(6) The workpiece platform adopts a two-section cylindrical mode, one section of cylinder is embedded into the planetary gear groove, the outer diameter is 80mm, the other section of cylinder is provided with a groove, the groove depth is 3mm, and the thrust chamber body is embedded into the groove.
(c) Preparing a cathode arc source system matched with the shape of the thrust chamber body:
(1) And processing the target material, wherein molybdenum is selected as a material, the shape of the target material is matched with the outer molded surface of the thrust chamber body, the outer molded surface of the thrust chamber body is a straight line section, a concave circular arc and an expansion section, the target material is a revolving body, and the outer molded surface is a straight line section, a convex circular arc and a convergence section.
(2) The cathode arc source system comprises a permanent magnet, an electromagnetic induction coil with an iron core, an arc starter and a target.
(3) The arc starting device is sleeved at the lower end of the target, the electromagnetic induction coil with the iron core is positioned under the target, the arc stabilizing power supply is externally connected with the target, the magnetic field power supply is externally connected with the electromagnetic induction coil, and the permanent magnet is positioned under the electromagnetic induction coil with the iron core.
(4) The arc starting device is made of stainless steel, an arc starting needle is inserted into an opening of the shell of the arc starting device, polytetrafluoroethylene is adopted to insulate the arc starting needle from the arc starting device, and the arc starting needle is externally connected with a high-voltage pulse power supply, and the voltage is 10000-50000V.
(5) The arc generator forms arc spots on the surface of the target material in a pulse ignition mode, the electromagnetic field and the permanent magnet act on the arc spots, and the arc spots do up-and-down spiral motion on the target material.
(6) The method comprises the steps of placing a workpiece platform on a planetary gear, placing a thrust chamber body on the workpiece platform, turning on a control motor of a sun gear, enabling a cathode arc source system to perform autorotation motion together with the sun gear, enabling the thrust chamber body to perform autorotation and revolution motion together with the planet gear, turning on a magnetic field power supply in the cathode arc source system, controlling magnetic field current to be 0-12A, turning on a stable arc power supply in the cathode arc source system, controlling stable arc current to be 120A, turning on a high-voltage pulse power supply in the cathode arc source system, controlling voltage to be 10000-50000V, enabling arc spots to perform up-and-down spiral motion along the surface of a target after being formed, and enabling the outer surface of the thrust chamber body to be uniformly deposited with a molybdenum or iridium coating for 4 hours.
The test shows that: the outer surface arc ion plating realizes the uniform deposition of the molybdenum coating on the outer surface of the engine thrust chamber body with the size phi 50 multiplied by 100mm, the thickness uniformity of the molybdenum layer at each part reaches +/-5 mu m, and the deposition efficiency is improved by 4 times compared with the prior art.
The invention provides a preparation method for preparing the ultrahigh-temperature oxidation-resistant coating by arc ion plating on the outer surface for the first time, the preparation method can improve the production efficiency by 4-6 times, the uniformity of the coating is further improved, the promotion and application of the ultrahigh-temperature protective coating such as molybdenum and iridium are facilitated, and the development and progress of a spacecraft are facilitated.
The invention provides a novel preparation method of outer surface arc ion plating for the outer surface of a thrust chamber body of an engine. Through the design of a workpiece turntable with a planetary gear structure, the planetary gear can perform rotation and revolution motions, and simultaneously, a plurality of thrust chamber body parts are driven to perform rotation and revolution motions; the horizontal distance between the surface of the target material and the outer surface of the thrust chamber body is kept consistent through the structural design of the target material matched with the shape of the thrust chamber body; the arc spots do up-and-down spiral motion on the target, the rotation and revolution motion of the thrust chamber body are matched with the surface of the target and the outer surface of the thrust chamber body, and finally, the uniformity of the coating on the outer surface of the thrust chamber body and the preparation efficiency of the coating are improved.
The invention provides a preparation method of novel outer surface arc ion plating for the first time, which improves the production efficiency of the ultra-high temperature protective coating for the outer surface of the thrust chamber body part from 0.5 to 1 station/day to 2 to 4 stations/day; axial uniformity of ultra-high temperature protective coating on outer surface of thrust chamber body: lifting from the existing + -20 μm to + -10 μm; the uniformity of the ultra-high temperature protective coating of the body parts of the plurality of thrust chambers reaches +/-10 mu m. The preparation method is beneficial to improving the service stability and reliability of the ultra-high temperature protective coating such as molybdenum, iridium and the like, is beneficial to promoting the popularization and the use of the ultra-high temperature protective coating, and has important significance for further improving the performance of the rail attitude control engine.
What is not described in detail in the present specification belongs to the prior art known to those skilled in the art.
Claims (10)
1. The preparation facilities of surface electric arc ion plating, its characterized in that: comprises a workpiece turntable with a planetary gear structure and a cathode arc source system;
the planetary gear structure workpiece turntable comprises a sun gear, four planetary gears, a gear carrier and a gear ring, wherein the planetary gears are uniformly distributed around the sun gear, external teeth of the planetary gears are meshed with external teeth of the sun gear, and the four planetary gears are fixed by the gear carrier; the gear ring is positioned at the outer side of the planetary gear, and the inner gear of the gear ring is meshed with the outer gear of the planetary gear; the sun gear is used as a driving wheel and driven by a motor, the planetary gear is used as a driven wheel, the gear ring is fixed, the planetary gear revolves around the axis of the sun gear and simultaneously rotates around the axis of the planetary gear; the thrust chamber body is arranged on the planetary gear and moves synchronously with the planetary gear;
the cathode arc source system is arranged on the sun gear and performs autorotation movement together with the sun gear; the cathode arc source system comprises a permanent magnet, an electromagnetic induction coil with an iron core, an arc generator and a target, wherein the arc generator is sleeved at the lower end of the target, the electromagnetic induction coil with the iron core is positioned right below the target, an arc stabilizing power supply is externally conducted to the target, a magnetic field power supply is externally conducted to the electromagnetic induction coil, and the permanent magnet is positioned right below the electromagnetic induction coil with the iron core; in the working process of the cathode arc source system, the arc spots do up-and-down spiral motion along the target material and combine the rotation and revolution motion of the thrust chamber body, so that ions excited on the target material are uniformly deposited on the outer surface of the thrust chamber body.
2. The apparatus for preparing the arc ion plating on the outer surface according to claim 1, wherein: the sun gear and the gear ring adopt hollow inner cavities, and cooling water is filled in the inner cavities to play a role in cooling.
3. The apparatus for preparing the arc ion plating on the outer surface according to claim 1, wherein: the center of the planetary gear is provided with a groove, and the workpiece platform is placed in the groove of the planetary gear.
4. A preparation device for arc ion plating on an outer surface according to claim 3, wherein: the workpiece platform is in a two-section cylindrical form, one section of cylinder is embedded into the planetary gear groove, the groove is formed above the other section of cylinder, and the thrust chamber body is embedded into the groove.
5. The apparatus for preparing the arc ion plating on the outer surface according to claim 1, wherein: the arc starter is made of stainless steel, an arc striking needle is inserted into an opening of the shell of the arc starter, polytetrafluoroethylene is adopted between the arc striking needle and the arc starter for insulation, and the arc striking needle is externally connected with a high-voltage pulse power supply with the voltage of 10000-50000V.
6. The apparatus for preparing arc ion plating on an outer surface according to claim 5, wherein: the shape of the target material is matched with the outer profile of the thrust chamber body, the horizontal distance between the profile of the target material and the outer profile of the thrust chamber body is kept consistent, an arc spot is formed on the surface of the target material by the arc starter in a pulse ignition mode, and an electromagnetic field formed by an electromagnetic induction coil with an iron core and a magnetic field formed by a permanent magnet act on the arc spot, so that the arc spot performs up-and-down spiral motion on the target material.
7. The apparatus for preparing the arc ion plating on the outer surface according to claim 6, wherein: the magnetic field power supply current is 0-50A, the arc stabilizing current is 50-150A, and the working time is 1-15 h.
8. The apparatus for preparing arc ion plating on an outer surface according to claim 4, wherein: the target material is pure molybdenum or iridium.
9. The apparatus for preparing the arc ion plating on the outer surface according to claim 1, wherein: the sun gear, the planetary gear and the gear ring are all made of stainless steel materials.
10. A method for preparing arc ion plating on the outer surface, which is characterized by comprising the following steps:
placing a workpiece platform on the planetary gear, and placing the thrust chamber body on the workpiece platform;
turning on a control motor of the sun gear, and enabling the cathode arc source system to perform autorotation movement together with the sun gear and enabling the thrust chamber body to perform autorotation and revolution movement together with the planetary gear;
and (3) turning on a magnetic field power supply, a stable arc power supply and a high-voltage pulse power supply in the cathode arc source system, enabling arc spots to do up-and-down spiral motion along the surface of the target material, and uniformly depositing a molybdenum or iridium coating on the outer surface of the thrust chamber body.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310552390.2A CN116791042A (en) | 2023-05-16 | 2023-05-16 | Preparation device and method for outer surface arc ion plating |
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| CN202310552390.2A CN116791042A (en) | 2023-05-16 | 2023-05-16 | Preparation device and method for outer surface arc ion plating |
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| CN202310552390.2A Pending CN116791042A (en) | 2023-05-16 | 2023-05-16 | Preparation device and method for outer surface arc ion plating |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117577498A (en) * | 2024-01-15 | 2024-02-20 | 苏州益腾电子科技有限公司 | Rotary anode structure and X-ray tube |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117577498A (en) * | 2024-01-15 | 2024-02-20 | 苏州益腾电子科技有限公司 | Rotary anode structure and X-ray tube |
| CN117577498B (en) * | 2024-01-15 | 2024-04-02 | 苏州益腾电子科技有限公司 | Rotary anode structure and X-ray tube |
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