CN116779400A - Ion source fixing mechanism for ion implanter - Google Patents
Ion source fixing mechanism for ion implanter Download PDFInfo
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- CN116779400A CN116779400A CN202311006830.0A CN202311006830A CN116779400A CN 116779400 A CN116779400 A CN 116779400A CN 202311006830 A CN202311006830 A CN 202311006830A CN 116779400 A CN116779400 A CN 116779400A
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- 230000007246 mechanism Effects 0.000 title claims abstract description 39
- 230000005540 biological transmission Effects 0.000 claims abstract description 44
- 230000001360 synchronised effect Effects 0.000 claims abstract description 21
- 239000012530 fluid Substances 0.000 claims abstract description 18
- 238000010438 heat treatment Methods 0.000 claims description 16
- 230000001105 regulatory effect Effects 0.000 claims description 12
- 238000001816 cooling Methods 0.000 claims 2
- 238000000034 method Methods 0.000 abstract description 22
- 230000008569 process Effects 0.000 abstract description 22
- 230000009471 action Effects 0.000 abstract description 9
- 230000005484 gravity Effects 0.000 abstract description 6
- 238000009434 installation Methods 0.000 abstract description 6
- 238000007689 inspection Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 230000002035 prolonged effect Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The application relates to the ion implanter technology, which is used for solving the problems that the disassembly of an ion source fixing mechanism consumes time, the fixing structure is easy to lose, a disassembled connecting wire occupies space and installation errors are easy to occur, in particular to an ion source fixing mechanism for an ion implanter, which comprises a rotary bottom plate; according to the application, the lower sliding block slowly slides down under the action of self gravity and is influenced by non-Newtonian fluid in the speed reducing box, so that the damage to the connecting wire is prevented, the upper sliding block is driven by the synchronous inserting plate to comb the connecting wire together, the scattered connecting wire occupation space is reduced, meanwhile, the inspection of workers on each section of connecting wire is facilitated, each transmission rotating wheel on the lifting frame is driven to rotate in the transmission process through the transmission toothed belt, synchronous loosening operation is carried out on the elastic bolts in the rotation process of the transmission rotating wheel, the dismounting time of the ion source is shortened, and the detached elastic bolts are limited by the clamping frame and cannot be lost.
Description
Technical Field
The application relates to the technology of ion implanters, in particular to an ion source fixing mechanism for an ion implanter.
Background
The ion source is a device for ionizing neutral atoms or molecules and extracting an ion beam therefrom, and is an indispensable component of various types of ion accelerators, mass spectrometers, electromagnetic isotope separators, ion implanters, ion beam etching devices, ion thrusters, neutral beam implanters in controlled fusion devices, and the like;
in the prior art, when the maintenance operation of the ion source is performed, the disassembly of the elastic bolts on the fixing mechanism limiting the ion source on the second module plate is required to be performed sequentially, and in order to ensure the stability of the ion source, the fixing mechanism is limited by a plurality of elastic bolts, the sequential disassembly and the assembly of the plurality of elastic bolts take more time, and the disassembled elastic bolts are easy to lose due to smaller size; in the process of disassembling and maintaining the ion source, workers need to firstly remove the connecting wires connected with the ion source fixing mechanism one by one, the number of the connecting wires is large, the occupied space of the connecting wires after the removal is large, the smooth operation of the workers is influenced, and after the maintenance is finished, the plurality of connecting wires are reinstalled and easily generate errors, so that the ion implanter equipment cannot normally operate;
the application provides a solution to the technical problem.
Disclosure of Invention
The application aims to prevent a connecting wire from being pulled and damaged by the influence of non-Newtonian fluid in a speed reducing box through a lower sliding block under the action of self gravity, and the upper sliding block is driven by a synchronous plugboard to comb the connecting wire together, so that the inspection of scattered connecting wires is facilitated for workers while the occupied space of each section of connecting wire is reduced, and the transmission toothed belt drives each transmission rotating wheel on a lifting frame to rotate in the transmission process, so that the dismounting time of an ion source is shortened due to synchronous loosening operation of an elastic bolt in the rotation process of the transmission rotating wheel, the dismounting elastic bolt is limited by a clamping frame and cannot be lost, the problems that the dismounting of an ion source fixing mechanism consumes time, the fixing structure is easy to lose, the dismounted connecting wire occupies space and installation errors are easy to occur are solved.
The aim of the application can be achieved by the following technical scheme:
the utility model provides an ion source fixed establishment for ion implanter, includes the rotating bottom plate, module board one is installed to rotating bottom plate lateral wall one side, the rotating bottom plate lateral wall is close to module board one-to-one installs module board two, the rotating bottom plate lateral wall is close to module board two one side installs module board three, the rotating bottom plate lateral wall corresponds connecting wire position department and installs the carriage, limit baffle is installed to carriage lateral wall both sides, carriage lateral wall sliding connection has the joint board, the joint board lateral wall installs the line joint of a plurality of evenly distributed, and the joint line lateral wall cover is equipped with the banding festival of a plurality of evenly distributed, the rotating bottom plate lateral wall is close to the regulating plate is installed to carriage one side, the spread groove has been seted up to the regulating plate lateral wall both sides, the regulating plate lateral wall corresponds the spread groove one side sliding connection has last sliding block, the regulating plate lateral wall corresponds the sliding connection of slide groove opposite side has down the sliding block, go up the sliding block with the lower sliding block upper surface rotation is connected with the rotating frame, regulating plate lateral wall intermediate position department synchronous picture peg.
As a preferred embodiment of the application, a reset gear is rotationally connected to the middle position of the upper surface of the synchronous inserting plate, a speed reducing inserting rod is sleeved on the outer side wall of the lower sliding block, a speed reducing box is installed at the position of the outer side wall of the rotary bottom plate corresponding to the speed reducing inserting rod, non-Newtonian fluid is filled in the speed reducing box, and an adjusting mechanism I is arranged at the position of the outer side wall of the rotary bottom plate corresponding to the reset gear.
As a preferred implementation mode of the application, a temperature regulating box is arranged on the outer side wall of the rotating bottom plate, which is close to the lower part of the module plate, a driving motor is arranged on one side of the outer side wall of the temperature regulating box, the output end of the driving motor is connected with a driving rotating shaft, a rotating magnet is connected to the middle position of the outer side wall of the driving rotating shaft, fixed magnets are arranged on the upper side and the lower side of the inner side of the temperature regulating box, which correspond to the rotating magnet, a sleeve pipe is sleeved on one side, which is far away from the rotating magnet, of the outer side wall of the fixed magnets, transmission pipes are integrally formed on the two sides of the outer side wall of the sleeve pipe, two heating boxes are arranged on one side of the outer side wall of the driving rotating shaft, two refrigerating boxes are arranged on the other side of the outer side wall of the driving rotating shaft, and a rotating plate is arranged in the inner parts of the heating boxes, which correspond to the driving rotating shaft.
As a preferred implementation mode of the application, the refrigerating box and the heating box are both provided with the supporting frame, the outer side wall of the supporting frame is rotatably connected with the reciprocating screw, the upper side and the lower side of the outer side wall of the reciprocating screw are slidably connected with the reciprocating plates, the upper end of the reciprocating screw is provided with the reciprocating rotating wheel, one side, close to the reciprocating screw, of the outer side wall of the supporting frame is provided with the telescopic hose, and the position of the outer side wall of the supporting frame corresponding to the telescopic hose is provided with the limiting rod.
As a preferred implementation mode of the application, one side of the outer side wall of the reciprocating rotating wheel is connected with a driving rotating wheel through a second transmission of an adjusting mechanism, a lifting frame is arranged at the position, corresponding to the module plate, of the outer side wall of the rotating bottom plate, a limiting plate is arranged at the position, corresponding to the middle position, of the outer side of the lifting frame, the four corner positions of the outer side wall of the lifting frame are rotatably connected with the driving rotating wheel, a hexagonal hole is formed at the middle position of the upper surface of the driving rotating wheel, the driving rotating wheel and the outer side of the driving rotating wheel are connected with a driving toothed belt, a clamping frame is integrally formed at the middle position of the lower surface of the lifting frame, and an elastic bolt is arranged at the position, corresponding to the clamping frame, of the lower surface of the driving rotating wheel.
As a preferred implementation mode of the application, the second adjusting mechanism comprises a first adjusting rotating wheel, one side of the outer side wall of the first adjusting rotating wheel is provided with a second adjusting rotating wheel, one side of the outer side wall of the first adjusting rotating wheel is provided with a third adjusting rotating wheel, the first adjusting rotating wheel, the second adjusting rotating wheel and the third adjusting rotating wheel are in transmission connection through a transmission belt, the outer side wall of the first adjusting rotating wheel is connected with an electric push rod through a connecting frame, and the first adjusting mechanism and the second adjusting mechanism are identical in structure.
Compared with the prior art, the application has the beneficial effects that:
1. the lower sliding block slowly slides downwards under the action of self gravity and is influenced by non-Newtonian fluid in the speed reduction box, so that the connecting wires are prevented from being damaged by pulling, the upper sliding block is driven by the synchronous inserting plate to comb the connecting wires together, the occupied space of scattered connecting wires is reduced, and meanwhile, the inspection of workers on each section of connecting wires is facilitated;
2. the transmission toothed belt drives each transmission rotating wheel on the lifting frame to rotate in the transmission process, and the transmission rotating wheels synchronously loosen the elastic bolts in the rotation process, so that the disassembly time of the ion source is shortened, and the disassembled elastic bolts are limited by the clamping frame and cannot be lost.
Drawings
The present application is further described below with reference to the accompanying drawings for the convenience of understanding by those skilled in the art.
FIG. 1 is a main block diagram of the present application;
FIG. 2 is a block diagram of an adjustment plate of the present application;
FIG. 3 is a block diagram of a deceleration jack of the present application;
FIG. 4 is a diagram of a rotary magnet structure according to the present application;
FIG. 5 is an enlarged view of the portion A of FIG. 4 according to the present application;
FIG. 6 is a second structural view of the adjusting mechanism of the present application;
FIG. 7 is a diagram of a lifting frame structure of the present application;
in the figure: 1. rotating the base plate; 2. a first module board; 3. a second module board; 4. a third module board; 51. a limit baffle; 52. a carriage; 53. a joint plate; 54. binding the joints; 55. an upper slider; 56. a rotating frame; 57. an adjusting plate; 58. a reset gear; 59. a sliding groove; 510. a synchronous plugboard; 511. a lower slider; 512. a wire joint; 513. a speed reducing inserted link; 61. a temperature regulating box; 62. a transmission tube; 63. driving the rotating shaft; 64. a heating box; 65. a rotary magnet; 66. sleeving a ring pipe; 67. a fixed magnet; 68. a refrigeration box; 69. a support frame; 610. a rotating plate; 611. a reciprocating runner; 612. a shuttle plate; 613. a limit rod; 614. a reciprocating screw; 615. a flexible hose; 71. a lifting frame; 72. a driving toothed belt; 73. a drive wheel; 74. a limiting plate; 75. hexagonal holes; 76. driving a rotating wheel; 77. tightening the bolt; 78. a clamping frame; 81. an adjusting mechanism I; 82. an adjusting mechanism II; 821. adjusting a first rotating wheel; 822. adjusting a second rotating wheel; 823. a transmission belt; 824. and adjusting a rotating wheel III.
Detailed Description
The technical solutions of the present application will be clearly and completely described in connection with the embodiments, and it is obvious that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
Example 1:
referring to fig. 1-3, an ion source fixing mechanism for an ion implanter comprises a rotary bottom plate 1, a first module plate 2 is installed on one side of the outer side wall of the rotary bottom plate 1, a second module plate 3 is installed on one side of the outer side wall of the rotary bottom plate 1, which is close to the first module plate 2, an ion source is installed on the second module plate 3 through a fixing mechanism and an elastic bolt 77, the ion source is installed on the second module plate 3 to facilitate the installation and the disassembly in the process of maintaining the ion source, a third module plate 4 is installed on one side, which is close to the second module plate 3, of the outer side wall of the rotary bottom plate 1, the module on the first module plate 2 is respectively connected with devices on the second module plate 3 and the third module plate 4 through connecting lines, a sliding frame 52 is installed at the position, corresponding to the connecting lines, the length of the sliding frame 52 is equal to the length between the two connecting devices, limiting baffles 51 are installed on two sides of the outer side wall of the sliding frame 52, the outer side wall of the sliding frame 52 is slidingly connected with a joint plate 53, the joint plate 53 limits the position of a connecting joint 512, the position of the connecting joint 512 on the joint plate 53 corresponds to the position of the connecting joint 512 when being connected with connecting equipment, the pulled connecting joint 512 is not disordered, a plurality of uniformly distributed connecting joints 512 are arranged on the outer side wall of the joint plate 53, a plurality of uniformly distributed binding joints 54 are sleeved on the outer side wall of the connecting joint, the binding joints 54 bind the connecting wires of the connecting joints 512 together, an adjusting plate 57 is arranged on the outer side wall of the rotating base plate 1 near the sliding frame 52, the connecting wires after the binding joints 54 are clamped at the middle positions of the two adjusting plates 57, the space between the two adjusting plates 57 is larger than the size of the binding joints 54 after binding, the two adjusting plates are not rubbed, sliding grooves 59 are arranged on the two sides of the outer side wall of the adjusting plate 57, an upper sliding block 55 is slidably connected to one side of the outer side wall of the adjusting plate 57 corresponding to the sliding groove 59, a lower sliding block 511 is slidably connected to the other side of the outer side wall of the adjusting plate 57 corresponding to the sliding groove 59, the weight of the upper sliding block 55 is light, the weight of the lower sliding block 511 is large, when the reset gear 58 is not limited, a binding wire can automatically move along with the descending of the lower sliding block 511 under the action of gravity of the lower sliding block 511, a rotating frame 56 is rotatably connected to the upper surfaces of the upper sliding block 55 and the lower sliding block 511, the rotating frame 56 is sleeved outside the synchronous inserting plate 510, rotation adjustment of angles is carried out along with the rotation of the synchronous inserting plate 510, a synchronous inserting plate 510 is rotatably connected to the middle position of the outer side wall of the adjusting plate 57, a reset gear 58 is rotatably connected to the middle position of the upper surface of the synchronous inserting plate 510, the outer side of the rotating plate 1 is correspondingly provided with a latch, the latch is capable of moving under the action of limiting the reset gear 58, the rotation of the reset gear 58 is synchronously rotated, the reset gear 58 is connected to the synchronous inserting plate 510, the outer side wall of the lower sliding block 511 is sleeved with the synchronous inserting plate is provided with a reducing gear 513, the diameter of the inner side of the rotating mechanism is correspondingly arranged at the inner side of the lower gear 58, and the diameter of the inner side of the synchronous inserting box is in a small transmission gear 81 is arranged, and is internally and is inserted into the small transmission and has a diameter of the small transmission gear 81;
the second adjusting mechanism 82 comprises a first adjusting rotating wheel 821, one side of the outer side wall of the first adjusting rotating wheel 821 is provided with a second adjusting rotating wheel 822, one side of the outer side wall of the second adjusting rotating wheel 822 is provided with a third adjusting rotating wheel 824, the first adjusting rotating wheel 821, the second adjusting rotating wheel 822 and the third adjusting rotating wheel 824 are in transmission connection through a transmission belt 823, the outer side wall of the second adjusting rotating wheel 822 is connected with an electric push rod through a connecting frame, the outer side of the electric push rod is provided with an infrared distance sensor, the infrared distance sensor monitors the length of the electric push rod, and the first adjusting mechanism 81 and the second adjusting mechanism 82 are identical in structure;
in the prior art, in the process of disassembling and maintaining an ion source, workers need to firstly remove connecting wires connected with an ion source fixing mechanism one by one, the number of the connecting wires is large, the occupied space of the connecting wires after the removal is large, the smooth operation of the maintenance work of the workers is influenced, and after the maintenance is finished, errors are easy to occur when the plurality of connecting wires are reinstalled, so that the ion implanter equipment cannot normally operate;
when the ion source is detached and maintained, a worker needs to disconnect the connection between the connection joint 512 and the connection equipment, then the rotation limitation on the reset gear 58 is relieved through the electric push rod, the lower sliding block 511 drives the connection wire to move downwards in the sliding process under the action of self gravity, in the moving process, the descending inserting rod 513 sleeved on the outer side of the lower sliding block 511 is inserted into the non-Newtonian fluid in the lower descending box, the descending speed of the lower sliding block 511 is slow under the influence of the non-Newtonian fluid, the connection wire cannot be pulled due to rapid descending, the connection wire is damaged, the lower sliding block 511 slides downwards, the synchronous inserting plate 510 is driven to rotate around the central rotation shaft through the rotating frame 56, the connection wire is pushed upwards to move in the sliding process through the upper sliding block 55 sleeved on the other side of the synchronous inserting plate 510, the connection wire is tidily carded under the action of the upper sliding block 55, the carded connection wire is mutually dispersed, and the connection wire on the outer side cannot be curled like the connection wire on the outer side of the winding roller, and the connection wire on the inner side of the worker is blocked from checking the connection wire.
Example 2:
referring to fig. 1 and 4-6, a temperature adjusting box 61 is installed on the outer side wall of the rotating bottom plate 1 near the lower part of the third module plate 4, the temperature adjusting box 61 isolates the magnetic field emitted by the internal magnet to prevent adverse effects on the ion source, a driving motor is installed on one side of the outer side wall of the temperature adjusting box 61, the output end of the driving motor is connected with a driving rotating shaft 63, a rotating magnet 65 is connected to the middle position of the outer side wall of the driving rotating shaft 63, a fixed magnet 67 is installed on the inner side of the temperature adjusting box 61 corresponding to the upper side and the lower side of the rotating magnet 65, the magnetic moment disorder and the order of the fixed magnet 67 on the two sides are changed in the rotating process of the rotating magnet 65, the fixed magnet 67 absorbs and releases heat to achieve the effects of refrigeration and heating, a sleeve ring pipe 66 is sleeved on one side of the outer side wall of the fixed magnet 67 far from the rotating magnet 65, the temperature of the fluid in the sleeve pipe 66 rises or drops when passing through the fixed magnet 67, the fluid in the sleeved annular pipe 66 can conduct the temperature, the transmission pipes 62 are integrally formed on the two sides of the outer side wall of the sleeved annular pipe 66, two heating boxes 64 are arranged on one side of the outer side wall of the driving rotating shaft 63, two refrigerating boxes 68 are arranged on the other side of the outer side wall of the driving rotating shaft 63, rotating plates 610 are arranged in the heating boxes 64 and the refrigerating boxes 68 and correspond to the positions of the driving rotating shaft 63, supporting frames 69 are arranged on the outer side walls of the refrigerating boxes 68 and the heating boxes 64, the outer side walls of the supporting frames 69 are rotationally connected with reciprocating screws 614, the upper side and the lower side of the outer side wall of the reciprocating screws 614 are slidingly connected with reciprocating plates 612, reciprocating rotating wheels 611 are arranged at the upper end of the reciprocating screws 614, the rotating wheels outside the driving rotating shaft 63 can drive the reciprocating rotating wheels 611 to rotate through driving belts 823, telescopic hoses 615 are arranged on one side, close to the outer side of the reciprocating screws 614, of the supporting frames 69, the telescopic hose 615 can conduct the fluid in the heating box 64 and the refrigerating box 68 to a designated position, the heat dissipation relieves the temperature dissipation at the working position of the ion source, the temperature at the installation position of the ion source is stable, the cold air can relieve the temperature generated by the operation of other equipment on the rotating bottom plate 1, the service life of the equipment is prolonged, and the outer side wall of the supporting frame 69 is provided with a limiting rod 613 corresponding to the position of the telescopic hose 615;
in the prior art, in order to keep the ion implanter stable during ion implantation, constant temperature stable control is realized on the temperature of an ion source, when the ion implanter is low in external environment temperature, the constant temperature control on the temperature is not achieved, the power consumption of the ion implanter is aggravated, the constant temperature required to be kept by the ion source is high, and the high temperature easily causes adverse effects on the service life of other equipment;
the driving motor drives the rotary magnet 65 to rotate through the driving rotating shaft 63 in the rotating process, so that cold and hot changes generated at the positions of the fixed magnets 67 on two sides are taken away by fluid passing through the inner side of the sleeved ring pipe 66, the fluid flows into the inner side of the heating box 64 or the refrigerating box 68 corresponding to two sides, the rotating wheel on the driving rotating shaft 63 drives the reciprocating rotating wheel 611 to rotate through the driving belt 823, the reciprocating plate 612 transmits cold and hot fluid in the heating box 64 or the refrigerating box 68 to the appointed position in the compressing and stretching process of the flexible pipe 615 under the driving of the reciprocating screw 614, the heat dissipation relieves the temperature loss at the working position of the ion source, the temperature stability at the installation position of the ion source in the cold environment is facilitated, the temperature generated by the working of other equipment on the rotary bottom plate 1 can be relieved, and the service life of the equipment is prolonged.
Example 3:
referring to fig. 4 and fig. 6-7, one side of the outer side wall of the reciprocating runner 611 is in transmission connection with a driving runner 76 through a second adjusting mechanism 82, a lifting frame 71 is installed at a position of the outer side wall of the rotating base plate 1 corresponding to the second module plate 3, the lifting frame 71 is limited by limiting plates 74 in four directions in the lifting process, the lifting frame 71 can only move stably up and down in the extending direction of the limiting plates 74, the limiting plates 74 are installed at the middle position of the outer side wall of the rotating base plate 1 corresponding to the lifting frame 71, a transmission runner 73 is rotationally connected at the four corner positions of the outer side wall of the lifting frame 71, tooth grooves are formed at the positions of the inner side of the transmission runner 73 corresponding to the transmission toothed belt 72, the transmission runner 73 cannot slip under the driving of the transmission toothed belt 72, a hexagonal hole 75 is formed at the middle position of the upper surface of the transmission runner 73, the size of the hexagonal hole 75 is identical to that of a hexagonal hole at the upper end of an elastic bolt 77, the transmission runner 73 and the outer side of the driving runner 76 are connected with the toothed belt 72, a clamping frame 78 is integrally formed at the middle position of the lower surface of the lifting frame 71, and the elastic bolt 77 is prevented from being separated from the corresponding position of the transmission runner 77;
in the prior art, when the maintenance operation of the ion source is performed, the disassembly of the elastic bolts 77 on the fixing mechanism for limiting the ion source on the second module plate 3 is required to be performed sequentially, and in order to ensure the stability of the ion source, the fixing mechanism is limited by a plurality of elastic bolts 77, the sequential disassembly and the assembly of the plurality of elastic bolts 77 take more time, and the disassembled elastic bolts 77 are easy to lose due to smaller size;
when the operator needs to detach the ion source fixing mechanism, the control device of the ion implanter can control the electric push rod connected with the second adjusting runner 822 to extend the length, so that the transmission belt 823 connected to the outer sides of the first adjusting runner 821, the second adjusting runner 822 and the third adjusting runner 824 is tightened, the driving rotating shaft 63 can drive the driving rotating runner 76 to rotate in the rotating process, the driving toothed belt 72 can drive each driving rotating runner 73 on the lifting frame 71 to rotate in the transmission process, the driving rotating runner 73 can synchronously loosen the elastic bolts 77 in the rotating process, the detachment time of the ion source is shortened, and the detached elastic bolts 77 are limited by the clamping frame 78 and cannot be lost.
When the application is used, a worker needs to disconnect the connection between the connection joint 512 and the connection equipment when dismantling and maintaining the ion source, then the rotation restriction on the reset gear 58 is released through the electric push rod, the lower sliding block 511 drives the connection wire to move downwards in the process of sliding downwards under the action of self gravity, in the moving process, the descending inserting rod 513 sleeved outside the lower sliding block 511 is inserted into the non-Newtonian fluid in the lower descending box, the descending speed of the lower sliding block 511 is slow under the influence of the non-Newtonian fluid, the connection wire is not pulled due to the fast descending, the breakage of the connection wire is caused, the rotation of the synchronous insertion plate 510 around the central rotation shaft is driven by the rotating frame 56 when the lower sliding block 511 slides downwards, the upper sliding block 55 sleeved on the other side of the synchronous insertion plate 510 pushes the connection wire upwards to move in the position in the process of sliding upwards, the connection wire is tidily combed under the action of the upper sliding block 55 and the lower sliding block 511, and the combed connection wire is not mutually like the connection wire curled outside the rolling-up roller, so that the connection wire is blocked by the inspection worker on the outer side;
the driving motor drives the rotary magnet 65 to rotate through the driving rotating shaft 63 in the rotating process, so that cold and hot changes generated at the positions of the fixed magnets 67 at the two sides are taken away by fluid passing through the inner sides of the sleeved annular pipes 66, the fluid flows into the inner sides of the heating boxes 64 or the refrigerating boxes 68 corresponding to the two sides, the rotating wheel on the driving rotating shaft 63 drives the reciprocating rotating wheel 611 to rotate through the driving belt 823, the reciprocating plate 612 transmits cold and hot fluid in the heating boxes 64 or the refrigerating boxes 68 to the appointed position in the compressing and stretching process of the flexible hose 615 under the driving of the reciprocating screw 614, the heat dissipation relieves the temperature loss at the working position of the ion source, the temperature at the installation position of the ion source is stable in the cold environment, the cold air can relieve the temperature generated by the working of other equipment on the rotary bottom plate 1, and the service life of the equipment is prolonged;
when the operator needs to detach the ion source fixing mechanism, the control device of the ion implanter can control the electric push rod connected with the second adjusting runner 822 to extend the length, so that the transmission belt 823 connected to the outer sides of the first adjusting runner 821, the second adjusting runner 822 and the third adjusting runner 824 is tightened, the driving rotating shaft 63 can drive the driving rotating runner 76 to rotate in the rotating process, the driving toothed belt 72 can drive each driving rotating runner 73 on the lifting frame 71 to rotate in the transmission process, the driving rotating runner 73 can synchronously loosen the elastic bolts 77 in the rotating process, the detachment time of the ion source is shortened, and the detached elastic bolts 77 are limited by the clamping frame 78 and cannot be lost.
The preferred embodiments of the application disclosed above are intended only to assist in the explanation of the application. The preferred embodiments are not intended to be exhaustive or to limit the application to the precise form disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the application and the practical application, to thereby enable others skilled in the art to best understand and utilize the application. The application is limited only by the claims and the full scope and equivalents thereof.
Claims (6)
1. The utility model provides an ion source fixed establishment for ion implanter, includes rotating bottom plate (1), module board one (2) is installed to rotating bottom plate (1) lateral wall one side, rotating bottom plate (1) lateral wall is close to module board one (2) one side is installed module board two (3), rotating bottom plate (1) lateral wall is close to module board two (3) one side is installed module board three (4), a serial communication port, rotating bottom plate (1) lateral wall corresponds connecting wire position department and installs carriage (52), limit baffle (51) are installed to carriage (52) lateral wall both sides, carriage (52) lateral wall sliding connection has joint board (53), joint board (53) lateral wall install a plurality of evenly distributed's line joint (512), the connecting wire lateral wall cover is equipped with a plurality of evenly distributed's binding knot (54), rotating bottom plate (1) lateral wall is close to carriage (52) one side is installed regulating plate (57), sliding groove (59) have been seted up to regulating plate (57) lateral wall both sides, regulating plate (57) lateral wall correspond sliding groove (59) lateral wall (59), the upper sliding block (55) and the upper surface of the lower sliding block (511) are rotatably connected with a rotating frame (56), and the middle position of the outer side wall of the adjusting plate (57) is rotatably connected with a synchronous inserting plate (510).
2. The ion source fixing mechanism for an ion implanter according to claim 1, wherein a reset gear (58) is rotatably connected to a middle position of an upper surface of the synchronous insert plate (510), a speed reducing insert rod (513) is sleeved on an outer side wall of the lower sliding block (511), a speed reducing box is mounted at a position of an outer side wall of the rotating bottom plate (1) corresponding to the speed reducing insert rod (513), non-newton fluid is filled in the speed reducing box, and an adjusting mechanism I (81) is arranged at a position of an outer side wall of the rotating bottom plate (1) corresponding to the reset gear (58).
3. The ion source fixing mechanism for an ion implanter according to claim 1, wherein a temperature adjusting box (61) is installed below the module plate three (4) and is close to the outer side wall of the rotating base plate (1), a driving motor is installed on one side of the outer side wall of the temperature adjusting box (61), a driving rotating shaft (63) is connected to the output end of the driving motor, a rotating magnet (65) is connected to the middle position of the outer side wall of the driving rotating shaft (63), fixed magnets (67) are installed inside the temperature adjusting box (61) corresponding to the upper side and the lower side of the rotating magnet (65), a sleeve ring pipe (66) is sleeved on one side, far away from the rotating magnet (65), of the outer side wall of the sleeve ring pipe (66), two heating boxes (64) are installed on one side of the outer side wall of the driving rotating shaft (63), two cooling boxes (68) are installed on the other side of the outer side wall of the driving rotating shaft (63), and the rotating plate (610) is installed inside the heating boxes (64) corresponding to the position of the driving rotating shaft (63).
4. The ion source fixing mechanism for an ion implanter according to claim 3, wherein the outer side walls of the cooling box (68) and the heating box (64) are respectively provided with a supporting frame (69), the outer side walls of the supporting frames (69) are rotatably connected with reciprocating screw rods (614), the upper side and the lower side of the outer side walls of the reciprocating screw rods (614) are slidably connected with reciprocating plates (612), reciprocating rotating wheels (611) are arranged at the upper ends of the reciprocating screw rods (614), a telescopic hose (615) is arranged on one side, close to the reciprocating screw rods (614), of the outer side walls of the supporting frames (69), and a limiting rod (613) is arranged at the position, corresponding to the telescopic hose (615), of the outer side walls of the supporting frames (69).
5. The ion source fixing mechanism for an ion implanter according to claim 4, wherein one side of an outer side wall of the reciprocating rotary wheel (611) is in transmission connection with a driving rotary wheel (76) through a second adjusting mechanism (82), a lifting frame (71) is installed at a position of an outer side wall of the rotary base plate (1) corresponding to the second module plate (3), a limiting plate (74) is installed at a position of an outer side middle of the rotary base plate (1) corresponding to the lifting frame (71), a transmission rotary wheel (73) is in rotation connection with four corner positions of the outer side wall of the lifting frame (71), a hexagonal hole (75) is formed at a position of an upper surface middle of the transmission rotary wheel (73), a transmission toothed belt (72) is connected to the outer side of the driving rotary wheel (76), a clamping frame (78) is integrally formed at a position of a lower surface middle of the lifting frame (71), and an elastic bolt (77) is installed at a position of the lower surface of the transmission rotary wheel (73) corresponding to the clamping frame (78).
6. The ion source fixing mechanism for an ion implanter according to claim 5, wherein the second adjusting mechanism (82) comprises a first adjusting runner (821), a second adjusting runner (822) is arranged on one side of an outer side wall of the first adjusting runner (821), a third adjusting runner (824) is arranged on one side of an outer side wall of the second adjusting runner (822), the first adjusting runner (821), the second adjusting runner (822) and the third adjusting runner (824) are in transmission connection through a transmission belt (823), an electric push rod is connected to the outer side wall of the second adjusting runner (822) through a connecting frame, and the first adjusting mechanism (81) and the second adjusting mechanism (82) are identical in structure.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311006830.0A CN116779400B (en) | 2023-08-11 | 2023-08-11 | Ion source fixing mechanism for ion implanter |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311006830.0A CN116779400B (en) | 2023-08-11 | 2023-08-11 | Ion source fixing mechanism for ion implanter |
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| CN213635894U (en) * | 2020-11-10 | 2021-07-06 | 无锡凯世通科技有限公司 | Analyzer for ion implanter |
| CN114578259A (en) * | 2021-11-25 | 2022-06-03 | 江苏叶迪车灯股份有限公司 | A kind of fault monitoring method and device for automobile lamp |
| CN115674155A (en) * | 2022-10-21 | 2023-02-03 | 英飞智信（苏州）科技有限公司 | Multi-axis robot for collecting solid particle material samples and using method |
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2023
- 2023-08-11 CN CN202311006830.0A patent/CN116779400B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1583133A2 (en) * | 2004-03-31 | 2005-10-05 | Sumitomo Eaton Nova Corporation | Wafer scanning device |
| CN212674602U (en) * | 2020-07-06 | 2021-03-09 | 山东梵思汽车科技有限公司 | Clamp for detecting three-phase power connecting line of electric automobile |
| CN213635894U (en) * | 2020-11-10 | 2021-07-06 | 无锡凯世通科技有限公司 | Analyzer for ion implanter |
| CN114578259A (en) * | 2021-11-25 | 2022-06-03 | 江苏叶迪车灯股份有限公司 | A kind of fault monitoring method and device for automobile lamp |
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| CN116779400B (en) | 2024-09-06 |
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