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CN116765070B - Purging vertical warehouse, vertical warehouse cleaning system and cleaning method thereof - Google Patents

Purging vertical warehouse, vertical warehouse cleaning system and cleaning method thereof Download PDF

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Publication number
CN116765070B
CN116765070B CN202311045890.3A CN202311045890A CN116765070B CN 116765070 B CN116765070 B CN 116765070B CN 202311045890 A CN202311045890 A CN 202311045890A CN 116765070 B CN116765070 B CN 116765070B
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space
purging
cleaning
vertical warehouse
fan
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CN116765070A (en
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陈飞
刘志远
朱成昊
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Chengchuan Technology Suzhou Co ltd
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Chengchuan Technology Suzhou Co ltd
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Abstract

The application provides a sweeping vertical warehouse, a vertical warehouse cleaning system and a cleaning method thereof, wherein the cleaning method comprises the following steps: the outer warehouse is internally provided with a first purging space, and the top of the outer warehouse is connected with at least one top fan; the vertical warehouse body is located in the first purging space, the second purging space is arranged in the vertical warehouse body and is communicated with the outside, the side wall of the vertical warehouse body is connected with a plurality of side fans, and gas enters the second purging space from the first purging space. This clean system in storehouse stands provides vertical purge gas through the top fan, provides horizontal purge gas through the lateral part fan, and both combine and can realize the omnidirectional cleanness to the material from different directions, through detecting, the second sweeps the requirement that the space can stably keep Class1 level cleanliness factor. The vertical warehouse cleaning system and the cleaning method thereof can discharge the gas in the second purging space through the raised floor, realize the circulation of the purging gas, prevent vortex generation and simultaneously avoid secondary pollution to the product.

Description

Purging vertical warehouse, vertical warehouse cleaning system and cleaning method thereof
Technical Field
The application relates to the technical field of clean storage equipment, in particular to a purging vertical warehouse, a vertical warehouse cleaning system and a cleaning method thereof.
Background
Along with technological development, the requirements of various industries on product storage are higher and higher, particularly aiming at precision machining industries such as semiconductor related materials and the like, and the storage environment of the products is required to have stable, clean and safe performances, and most of the existing clean material storage space can achieve the purpose of stably and safely storing the materials, but for clean storage, the requirement of stably keeping the cleanliness of Class1 cannot be met for a long time.
The equipment such as storage bin, large-scale material case at present all is through arranging the fan that has filter unit to blow purification to its space inside, and although this kind of operation can get rid of the floating ash impurity on product surface to a certain extent, still there are a great deal of drawbacks in the in-service use, on the one hand, it often sets up to the constant speed of single wind direction and sweeps, can not in time adjust wind direction and wind speed to the storage space that has different volumes to cause the clean dead angle many, the poor problem of cleaning effect, on the other hand, dust concentrates in air outlet department after sweeping, very easily causes the secondary pollution of product in the twinkling of an eye at headstock gear, in addition, based on the seal of storage space, the purge gas also forms the vortex easily, consequently can further reduce its cleaning effect.
Disclosure of Invention
Therefore, the technical problem to be solved by the application is to overcome the problem that the material storage space in the prior art cannot stably maintain high cleanliness, and provide a purging vertical warehouse, a vertical warehouse cleaning system and a cleaning method thereof.
In order to solve the technical problems, the application provides a vertical warehouse cleaning system, which cleans materials by using the vertical warehouse cleaning system, wherein the vertical warehouse cleaning system comprises:
the outer warehouse is internally provided with a first purging space, and the top of the outer warehouse is connected with at least one top fan for supplying air towards the first purging space;
the vertical warehouse body is positioned in the first purging space, a second purging space is arranged in the vertical warehouse body, the bottom of the second purging space is communicated with the outside, a plurality of side fans which supply air towards the second purging space are connected to the side wall of the vertical warehouse body, and air enters the second purging space from the first purging space;
the surface of the raised floor is provided with a plurality of through holes, the outer warehouse and the vertical warehouse body are arranged on the raised floor, the vertical warehouse body is communicated with the through holes, and gas is discharged from the through holes after flowing through the second blowing space from the first blowing space;
the cleaning method of the vertical warehouse cleaning system specifically comprises the following steps:
s1, initial air supply speed V of top fan 1 Then, gas supply is carried out, and the gas flow Q between the first purging space and the second purging space in unit time is measured on the basis 1 And measuring the initial air supply speed V of the side fan in unit time 2 Total amount of supplied air Q 2
When Q is 1 ≤Q 2 When the air supply speed of the top fan is increased, the air supply speed of the side fans is reduced;
when Q is 1 >Q 2 During the time, the reverse flow of the gas from the raised floor to the first purging space due to the negative pressure can be avoided, and then the gas supply speed of the top fan is measured to be V 3 At this time, the air supply speed of the side fan is V 4
S2, at V 3 V (V) 4 Under the condition of measuring the air supply direction X of the top fan 1 Simultaneously measuring the air supply speed direction X of the combination of the top fan and the side fans,
when X and X 1 When the included angle is larger than or equal to a preset angle, increasing the air supply speed of the top fan and reducing the air supply speed of the side fan;
when X and X 1 When the included angle is smaller than the preset angle, the air flow can directionally flow to the raised floor from the second blowing space, and the air supply speed of the top fan at the moment is measured to be V 5
S3, calculating the ventilation times N=h/(H/V) of the vertical warehouse cleaning system by measuring the vertical height distance H between the top fan and the raised floor and the preset time H 5 ),
When N is less than or equal to the preset times, the air supply speed of the top fan and the air supply speed of the side fans are increased in equal proportion;
when N is larger than the preset times, the cycle times of purging can be ensured to meet the requirement of cleanliness, and the actual working wind speed V of the top fan is measured at the moment 6 Actual working speed V of side fan 7 The construction of the cleaning method of the vertical warehouse cleaning system is completed.
In one embodiment of the present application, in step S2, the preset angle is 40 °.
In one embodiment of the present application, in step S3, the preset number of times is 200, and the open hole ratio of the raised floor is 20%.
In one embodiment of the present application, the vertical warehouse body is provided with a plurality of side brackets and connecting pieces for connecting the side brackets, and the plurality of side fans are respectively connected to the side brackets.
In one embodiment of the application, the side wall of the outer warehouse is provided with a first window, the side wall of the upright warehouse body is provided with a second window communicated with the first window, and the top of the second window is connected with an ion wind bar.
In an embodiment of the present application, the vertical warehouse body further includes a material storage mechanism, where the material storage mechanism is disposed in the second purge space and includes a transfer robot and a plurality of material carriers, where the plurality of material carriers are respectively connected to the side support to carry materials, and the transfer robot moves between the second window and the material carriers.
In one embodiment of the application, the vertical warehouse body further comprises a sealing mechanism, wherein the sealing mechanism is connected to the second window and comprises a shielding door, a linear module and a negative pressure device, the linear module is arranged around the second window, and the shielding door moves along the linear module under the driving of the negative pressure device.
In one embodiment of the application, the top blower is an FFU blower and the side blowers are EFU blowers.
Compared with the prior art, the technical scheme of the application has the following advantages:
according to the vertical warehouse cleaning system, the longitudinal purge gas is provided through the top fan, the transverse purge gas is provided through the side fans, the two are combined, the materials can be cleaned in all directions, and the second purge space can stably maintain the requirement of Class1 cleanliness through detection. The vertical warehouse cleaning system provided by the application can discharge the gas in the second purging space through the raised floor, so that the circulation of the purging gas is realized, the generation of vortex is avoided, and meanwhile, the secondary pollution to the product is avoided.
Drawings
In order that the application may be more readily understood, a more particular description of the application will be rendered by reference to specific embodiments thereof that are illustrated in the appended drawings.
FIG. 1 is a perspective view of an outer garage and a vertical garage body according to a preferred embodiment of the present application;
FIG. 2 is a schematic view of the internal structure of the outer library and the vertical library body in FIG. 1;
FIG. 3 is a perspective view of the outer garage and the vertical garage body of FIG. 1;
FIG. 4 is a perspective view of the seal frame and seal mechanism of FIG. 3;
FIG. 5 is an enlarged schematic view of FIG. 4 at A;
FIG. 6 is a vector diagram of air flow rate when the sealing mechanism is opened in the operating state of the cleaning system of the preferred embodiment of the present application;
FIG. 7 is a vector diagram of air flow rate when the sealing mechanism is closed in the operating state of the cleaning system in accordance with the preferred embodiment of the present application.
Fig. 8 is a perspective view of a neutral base cleaning system in accordance with a preferred embodiment of the present application.
Description of the specification reference numerals: 110. a housing; 111. a second purge space; 112. a side bracket; 113. an air port bracket; 1131. an ion wind bar; 114. a second window; 115. a connecting piece; 120. a material storage mechanism; 121. a transfer robot; 122. a material carrier plate; 1221. an avoidance groove; 123. a cross brace; 130. a sealing mechanism; 131. a shielding door; 132. a linear module; 133. a negative pressure device; 1331. a vacuum generator; 140. a side fan; 200. an external library; 210. a first purge space; 220. a top blower; 230. a first window; 240. a sidewall; 300. a raised floor; 310. a through hole; 320. a floor body.
Detailed Description
The present application will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the application and practice it.
Examples
The embodiment provides a cleaning method of a vertical warehouse cleaning system, which uses the vertical warehouse cleaning system to clean materials, wherein the vertical warehouse cleaning system comprises: the outer warehouse 200, the inside of the outer warehouse 200 is provided with a first purging space 210, and the top of the outer warehouse 200 is connected with at least one top fan 220 for supplying air towards the first purging space 210; the vertical warehouse body is positioned in the first purging space 210, a second purging space 111 is arranged in the vertical warehouse body, the bottom of the second purging space 111 is communicated with the outside, a plurality of side fans 140 which supply air towards the second purging space 111 are connected to the side wall 240 of the vertical warehouse body, and the air enters the second purging space 111 from the first purging space 210; the elevated floor 300 with a plurality of through holes 310 distributed on the surface thereof, the outer warehouse 200 and the upright warehouse body are arranged on the elevated floor 300, the upright warehouse body is communicated with the through holes 310, and the gas is discharged from the through holes 310 after flowing through the second purging space 111 from the first purging space 210.
According to the vertical warehouse cleaning system, longitudinal purge gas is provided through the top fan 220, transverse purge gas is provided through the side fans 140, the two are combined to realize all-round cleaning of materials from different directions, and through detection, the second purge space 111 can stably maintain the requirement of Class 1-level cleanliness.
Referring to fig. 1 and 2, in this embodiment, the outer warehouse 200 is a hollow cuboid element, the upright warehouse cleaning system shown in fig. 1 is used as a reference, the front, rear, left and right side walls 240 of the outer warehouse 200 are rectangular steel plates capable of being detachably connected, four identical rectangular top fans 220 are arranged at the top of the outer warehouse 200, the four top fans 220 are all detachably connected to the top ends of the side walls 240, and further, the top fans 220 and the side walls 240 together enclose a first purging space 210. Referring to fig. 1, a first window 230 is provided on a side wall 240 of the outer container 200, in this embodiment, the first window 230 is disposed at a central portion of the front side wall 240 of the outer container 200, and is used for communicating with the inside and the outside of the outer container 200 to realize material transportation, and further, in this embodiment, the top fan 220 is preferably a FFU (Fan Filter Unit) fan, so that it has a filtering function while supplying air. In other embodiments, the outer container 200 may be configured in other shapes according to actual situations, and accordingly, the top blower 220 may be configured in other numbers that are convenient to match the shape of the outer container 200, and the present application is not limited in particular.
Referring to fig. 1 to 3, the vertical base body is configured as a hollow hexagonal prism-shaped member, six sides of which together define a second purge space 111, and further, an upper end of the second purge space 111 is communicated with the first purge space 210. In this embodiment, the housing 110 of the vertical warehouse body is composed of side brackets 112 and a plurality of side fans 140 connected to the side brackets 112, specifically, in this embodiment, six side brackets 112 capable of being connected detachably to each other are included, wherein the side fans 140 are connected to the five side brackets 112 in total, and the second windows 114 communicating with the first windows 230 are provided on the remaining side brackets 112, and in this embodiment, the side fans 140 are preferably EFU (Equipment fan filter unit) fans to realize uniform air delivery after suction and filtration. Further, the second window 114 is used for cooperating with the first window 230 for material transfer, in this embodiment, the second window 114 is configured as a rectangular window, and includes a tuyere support 113 connected to the side support 112, the tuyere support 113 is connected to the second purge space 111, and an ion wind rod 1131 is connected to the top of the tuyere support 113 for removing static electricity on the surface of the tuyere support during material transfer, so that the possibility that particles such as dust adhere to a storage room is greatly reduced, and the cleanliness inside the vertical warehouse is further improved.
Referring to fig. 1 to 3, the vertical warehouse body is provided with a plurality of side brackets 112 and a connecting piece 115 connected to the side brackets 112, and a plurality of side fans 140 are respectively connected to the side brackets 112 to define a second purge space 111. In this embodiment, two adjacent side brackets 112 are connected by a connecting piece 115 with a V-shaped cross section, in this embodiment, five connecting pieces 115 are provided in total, any connecting piece 115 extends along the height direction of the vertical warehouse, two adjacent side brackets 112 are respectively connected to the V-shaped side surfaces of the connecting piece 115, and in other embodiments, a user can correspondingly adjust the angle of the connecting piece 115 according to the shape of the vertical warehouse.
Referring to fig. 4, the vertical garage body further includes a sealing mechanism 130, where the sealing mechanism 130 is connected to the second window 114 and includes a shielding door 131, a linear module 132, and a negative pressure device 133, where the linear module 132 is disposed around the second window 114, and the shielding door 131 is driven by the negative pressure device 133 to move along the linear module 132. In this embodiment, the sealing mechanism 130 is specifically connected to the tuyere support 113 and used for communicating/sealing the second purging space 111, specifically, when the material is required to be transported, the sealing mechanism 130 is opened so as to cooperate with the first window 230 for transporting the material, and when the purging and cleaning are required, the airtight environment can prevent the purging gas from being dispersed from the second window 114 and further generate vortex, so that the sealing mechanism 130 is required to seal the first purging space 210 to ensure the directional transportation of the airflow. In this embodiment, the vertical warehouse includes two linear modules 132 extending along the height direction of the vertical warehouse body, the two linear modules 132 are respectively connected to two sides of the tuyere support 113, the shielding door 131 is slidably connected to the linear modules 132, and any linear module 132 is connected with a negative pressure device 133 for driving the shielding door 131 to slide along the linear modules, further, in this embodiment, as shown in fig. 5, the negative pressure device 133 specifically includes a vacuum generator 1331 for driving the shielding door 131 through negative pressure. In this embodiment, fig. 6 and 7 show the air flow velocity vector diagrams when the sealing mechanism 130 is opened and closed, so it can be seen that the present vertical warehouse cleaning system can achieve the purpose of directional air supply and cleaning during actual use.
Referring to fig. 2, the vertical garage body further includes a material storage mechanism 120, where the material storage mechanism 120 is disposed in the second purge space 111, and includes a transfer robot 121 and a plurality of material carriers 122, where the plurality of material carriers 122 are respectively connected to the side supports 112 to carry materials, and the transfer robot 121 moves between the second window 114 and the material carriers 122. In this embodiment, the transfer robot 121 is disposed at the center of the second purge space 111, and is preferably a transfer robot dedicated for high cleanliness in the industry, the plurality of material carriers 122 are uniformly disposed on the five side supports 112, specifically, the side supports 112 are each provided with a cross brace 123 for connecting the material carriers 122, and the cross brace 123 is detachably connected with the material carriers 122 and the side supports 112, so that the load-bearing space can be adjusted according to the shape and size of the actual material, and further, the arbitrary material carriers 122 are each provided with a load-bearing portion for bearing the material and a avoiding groove 1221 for avoiding the transfer robot 121. Specifically, in this embodiment, the structures and the positional relationships of the material carrier plates 122 at different positions can be adjusted, so as to finally realize that the materials on the material carrier plates 122 form an annular array structure around the transfer robot 121, and the arrangement not only can make the air flow distribution and trend in the material storage space more uniform, but also is beneficial to the material taking and discharging operation of the transfer robot 121. In this embodiment, the outer tank 200 and the tank body together form a purge tank.
Referring to fig. 8, the outer warehouse 200 and the upright warehouse body are supported on the raised floor 300, and the second purge space 111 is communicated with the outside through the through hole 310 of the raised floor 300, so that the purpose that the gas is discharged from the through hole 310 after flowing through the second purge space 111 from the first purge space 210 can be achieved, and further, a plurality of upright warehouse cleaning systems can be arranged on the raised floor 300 at intervals, so that the cleaning efficiency is further improved, and specifically, the opening ratio of the raised floor 300 in this embodiment is 20%.
The following describes the specific use and principle of the present embodiment of the neutral zone cleaning system:
before the cleaning operation, the first window 230 and the second window 114 are all communicated with the outside, the carrying robot 121 is disposed at the center of the second purge space 111, the operator connects the corresponding material carrier plates 122 according to the number and the size of the actual materials, and then the carrying robot 121 carries the materials onto the corresponding material carrier plates 122 through the first window 230 and the second window 114.
Next, the second window 114 is closed under the driving of the sealing mechanism 130, and the top blower 220 and the side blower 140 are turned on to start cleaning and purging, specifically: the top fan 220 sucks air and supplies the air towards the first blowing space 210, so that the first blowing space 210 forms blowing air from top to bottom, meanwhile, the side fans 140 suck air between the first blowing space 210 and the second blowing space 111 and supply the air towards the central part of the second blowing space 111, so that the second blowing space 111 forms blowing air flowing from the periphery to the center, and at the moment, gas flowing in an overall inclined downward direction is formed in the second blowing space 111, so that impurities and dust on materials are carried out of the vertical warehouse from the overhead floor 300 at the bottom of the second blowing space 111, and one cleaning blowing operation is completed.
In summary, this clean system in a vertical warehouse provides vertical purge gas through top fan 220, provides horizontal purge gas through lateral part fan 140, and the two combines the omnidirectional cleanness of material that can realize from different directions, and through detecting, second purge space 111 can stably keep the requirement of the cleanliness factor of second Class1 level.
The embodiment provides a cleaning method of a vertical warehouse cleaning system, which specifically comprises the following steps:
s1, the top fan 220 is at its initial air supply speed V 1 The gas supply is performed, and the gas flow Q between the first purge space 210 and the second purge space 111 in unit time is measured 1 And measures the initial air supply speed V of the side blower 140 for a unit time 2 Total amount of supplied air Q 2
When Q is 1 ≤Q 2 When the air supply speed of the top blower 220 is increased, the air supply speed of the side blower 140 is decreased;
when Q is 1 >Q 2 At this time, it is possible to prevent the gas from flowing backward from the raised floor 300 to the first purge space 210 due to the negative pressure at this time, and then the gas supply speed of the top fan at this time is measured as V 3 At this time, the air supply speed of the side fan is V 4
S2, at V 3 V (V) 4 Under the condition of (2) the measured wind speed is V 3 Air supply direction X of top blower 220 1 Simultaneously, the resultant air supply speed direction X of the top blower 220 and the side blower 140 is measured,
when X and X 1 When the included angle is larger than or equal to a preset angle, the air supply speed of the top fan 220 is increased, and the air supply speed of the side fan 140 is reduced;
when X and X 1 When the included angle is smaller than the preset angle, the air flow can directionally flow from the second blowing space 111 to the raised floor 300, and the air supply speed of the top fan at the moment is measured to be V 5
S3, calculating the ventilation times N=h/(H/V) of the vertical warehouse cleaning system by measuring the vertical height distance H between the top fan 220 and the raised floor 300 5 ),
When N is less than or equal to the preset times, the air supply speed of the top fan 220 and the air supply speed of the side fans 140 are increased in equal proportion;
when N is larger than the preset times, the cycle times of the purging can be ensured to meet the requirement of cleanliness, and the actual working wind speed V of the top fan 220 is measured at the moment 6 Actual operating speed V of side blower 140 7 The construction of the cleaning method of the vertical warehouse cleaning system is completed.
The vertical warehouse cleaning system of the embodiment can discharge the gas in the second purging space 111 through the raised floor 300, thereby realizing the circulation of the purging gas, avoiding the generation of vortex and avoiding the secondary pollution of the product.
In this embodiment, the specific steps are:
s1, measuring the gas flow Q between the first purge space 210 and the second purge space 111 in unit time under the condition that the initial gas supply speed of the top fan 220 is 0.45m/S 1 =10.08m 3 And measuring the total air supply quantity Q of the side fans 140 per unit time at an initial air supply speed of 0.3m/s 2 =6.72m 3 /s,
When Q is 1 >Q 2 At this time, it is possible to prevent the gas from flowing backward from the raised floor 300 to the first purge space 210 due to the negative pressure at this time, and then the gas supply speed of the top fan at this time is measured as V 3 At this time, the air supply speed of the side fan is V 4
At this time, Q 1 >Q 2 The reverse flow of the gas from the raised floor 300 back to the first purge space 210 due to the negative pressure at this time can be prevented, and then the gas supply speed of the top blower at this time is measured to be 0.45m/s, and the gas supply speed of the side blower at this time is measured to be V 4 Is 0.3m/s. Based on the gas required by the side blower 140 to supply the gas to the second purge space 111 from the top blower 220 to the first purge space 210, in order to enable the purge gas to smoothly flow from the first purge space 210 to the second purge space, the gas supply amount in the first purge space 210 and the gas supply amount outside the second purge space 111 need to be larger than the gas supply amount in the second purge space 111, otherwise, the raised floor communicated with the outside can enable the self-standing warehouse to generate negative pressure adsorption, further the gas is caused to flow back to the first purge space 210 from the raised floor 300, and finally phenomena such as dust emission and the like are causedThe cleaning effect of the vertical warehouse is improved. In this embodiment, the air supply speed may be adjusted by changing the fan power and the number of fans in the on-off state, or by an external control system, after the plurality of top fans 220 and the plurality of side fans 140 are respectively connected to the control system by signals, parameters are preset to achieve the air supply speed adjustment.
S2, at V 3 V (V) 4 Is measured in the air supply direction X of the top fan 220 at a wind speed of 0.45m/s 1 Simultaneously, the actual resultant air supply direction X of the top blower 220 and the side blower 140 is measured, in this embodiment, X 1 The direction of the air flow is from top to bottom along the height direction of the vertical warehouse body, and the included angle between the synthetic air supply speed direction X of the top fan 220 and the side fan 140 and the air supply speed direction X of the top fan 220 is acrtan (v) 4 /v 3 )=33.69°。
At this time X and X 1 Included angle < 40 DEG, resulting in a top fan air supply speed V that enables the air flow from the second purge space 111 to flow directionally to the raised floor 300 5 =0.45m/s;
S3 by measuring the vertical height distance h=3m between the top blower 220 and the raised floor 300 and at V 5 The ventilation times of the present library cleaning system, n=3600/(H/V), were calculated by combining 0.45m/s with a preset time of 3600 seconds 5 ) The number of times =540,
at this time, N is more than 200 times, and the actual working wind speed V of the top fan 220 is obtained 6 =0.45 m/s and the actual working speed V of the side blower 140 7 =0.3m/s, thus far the construction of the library cleaning system was completed. In the present embodiment, V 1 、V 3 、V 5 、V 6 Is the same as the value of V 2 、V 4 、V 7 In other embodiments, the values are the sameThe actual numerical value is calculated or measured according to the actual use condition change.
In summary, by the cleaning method of the vertical warehouse cleaning system in this embodiment, the actual purge wind speed of the top blower 220 and the actual purge wind speed of the side blower 140 with the best cleaning effect can be obtained, so that the high cleaning effect can be achieved, and meanwhile, it is ensured that the combined purge wind can flow from the raised floor 300 through the second purge space 111 from the first purge space 210 without generating vortex, and the whole purge process is efficient and stable.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations and modifications of the present application will be apparent to those of ordinary skill in the art in light of the foregoing description. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present application.

Claims (7)

1. A method for cleaning a vertical warehouse cleaning system, comprising: cleaning the material with a vertical warehouse cleaning system, wherein the vertical warehouse cleaning system comprises:
the outer warehouse is internally provided with a first purging space, and the top of the outer warehouse is connected with at least one top fan for supplying air towards the first purging space;
the vertical warehouse body is positioned in the first purging space, a second purging space is arranged in the vertical warehouse body, the bottom of the second purging space is communicated with the outside, a plurality of side fans which supply air towards the second purging space are connected to the side wall of the vertical warehouse body, and air enters the second purging space from the first purging space;
the surface of the raised floor is provided with a plurality of through holes, the outer warehouse and the vertical warehouse body are arranged on the raised floor, the vertical warehouse body is communicated with the through holes, and gas is discharged from the through holes after flowing through the second blowing space from the first blowing space;
the cleaning method of the vertical warehouse cleaning system specifically comprises the following steps:
s1, initial air supply speed V of top fan 1 Then, gas supply is carried out, and the gas flow Q between the first purging space and the second purging space in unit time is measured on the basis 1 And measuring the initial air supply speed V of the side fan in unit time 2 Total amount of supplied air Q 2
When Q is 1 ≤Q 2 When the air supply speed of the top fan is increased, the air supply speed of the side fans is reduced;
when Q is 1 >Q 2 During the time, the reverse flow of the gas from the raised floor to the first purging space due to the negative pressure can be avoided, and then the gas supply speed of the top fan is measured to be V 3 At this time, the air supply speed of the side fan is V 4
S2, at V 3 V (V) 4 Under the condition of measuring the air supply direction X of the top fan 1 Simultaneously measuring the air supply speed direction X of the combination of the top fan and the side fans,
when X and X 1 When the included angle is larger than or equal to a preset angle, increasing the air supply speed of the top fan and reducing the air supply speed of the side fan;
when X and X 1 When the included angle is smaller than the preset angle, the air flow can directionally flow to the raised floor from the second blowing space, and the air supply speed of the top fan at the moment is measured to be V 5
S3, calculating the ventilation times N=h/(H/V) of the vertical warehouse cleaning system by measuring the vertical height distance H between the top fan and the raised floor and the preset time H 5 ),
When N is less than or equal to the preset times, the air supply speed of the top fan and the air supply speed of the side fans are increased in equal proportion;
when N is larger than the preset times, the cycle times of purging can be ensured to meet the requirement of cleanliness, and the actual working wind speed V of the top fan is measured at the moment 6 Actual working speed V of side fan 7 The construction of the cleaning method of the vertical warehouse cleaning system is completed.
2. The method of cleaning a clean room in a clean room system of claim 1, wherein: the top fan is an FFU fan, the side fans are EFU fans, and in step S2, the preset angle is 40 degrees.
3. The method of cleaning a clean room in a clean room system of claim 1, wherein: in step S3, the preset times are 200 times, and the aperture ratio of the raised floor is 20%.
4. The method of cleaning a clean room in a clean room system of claim 1, wherein: the vertical warehouse body is provided with a plurality of side brackets and connecting pieces for connecting the side brackets, and the side fans are respectively connected to the side brackets.
5. The method of cleaning a clean room in a clean room system of claim 1, wherein: the side wall of the outer warehouse is provided with a first window, the side wall of the vertical warehouse body is provided with a second window communicated with the first window, and the top of the second window is connected with an ion wind rod.
6. The method of cleaning a clean room in accordance with claim 5, wherein: the vertical warehouse body further comprises a material storage mechanism, wherein the material storage mechanism is arranged in the second purging space and comprises a transfer robot and a plurality of material carrier plates, the material carrier plates are respectively connected with the side support to bear materials, and the transfer robot moves between the second window and the material carrier plates.
7. The method of cleaning a clean room in accordance with claim 5, wherein: the vertical warehouse body further comprises a sealing mechanism, the sealing mechanism is connected to the second window and comprises a shielding door, a linear module and a negative pressure device, wherein the linear module is arranged around the second window, and the shielding door is driven by the negative pressure device to move along the linear module.
CN202311045890.3A 2023-08-18 2023-08-18 Purging vertical warehouse, vertical warehouse cleaning system and cleaning method thereof Active CN116765070B (en)

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Application Number Priority Date Filing Date Title
CN202311045890.3A CN116765070B (en) 2023-08-18 2023-08-18 Purging vertical warehouse, vertical warehouse cleaning system and cleaning method thereof

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Application Number Priority Date Filing Date Title
CN202311045890.3A CN116765070B (en) 2023-08-18 2023-08-18 Purging vertical warehouse, vertical warehouse cleaning system and cleaning method thereof

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1146778A (en) * 1967-03-22 1969-03-26 Krantz Verwaltungs G M B H H Fume cupboards for chemical laboratories
US4851018A (en) * 1986-11-28 1989-07-25 Commissariat A L'energie Atomique Installation for the storage and transfer of objects in a very clean atmosphere
CN2107325U (en) * 1991-12-30 1992-06-17 北京核工程研究设计院比尼新技术公司 Article blowing transfering window
JP2002059097A (en) * 2000-08-22 2002-02-26 Amano Corp Air shower apparatus
JP2008080307A (en) * 2006-09-29 2008-04-10 Fulta Electric Machinery Co Ltd Nozzle structure
CN103381411A (en) * 2012-05-04 2013-11-06 昆山协多利金属有限公司 Pass box special for clean room of pharmaceutical factory
CN105834166A (en) * 2016-05-05 2016-08-10 亿丰洁净科技江苏股份有限公司 Multifunctional air shower
CN109733336A (en) * 2019-02-28 2019-05-10 中铁第四勘察设计院集团有限公司 A kind of the convection type intelligence purge system and method for single-sided tracks
CN112644841A (en) * 2020-12-03 2021-04-13 Tcl华星光电技术有限公司 Cartridge and automatic clean storage
CN218455271U (en) * 2022-09-16 2023-02-07 江苏捷顺机电工程有限公司 Novel air return structure of clean room

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1146778A (en) * 1967-03-22 1969-03-26 Krantz Verwaltungs G M B H H Fume cupboards for chemical laboratories
US4851018A (en) * 1986-11-28 1989-07-25 Commissariat A L'energie Atomique Installation for the storage and transfer of objects in a very clean atmosphere
CN2107325U (en) * 1991-12-30 1992-06-17 北京核工程研究设计院比尼新技术公司 Article blowing transfering window
JP2002059097A (en) * 2000-08-22 2002-02-26 Amano Corp Air shower apparatus
JP2008080307A (en) * 2006-09-29 2008-04-10 Fulta Electric Machinery Co Ltd Nozzle structure
CN103381411A (en) * 2012-05-04 2013-11-06 昆山协多利金属有限公司 Pass box special for clean room of pharmaceutical factory
CN105834166A (en) * 2016-05-05 2016-08-10 亿丰洁净科技江苏股份有限公司 Multifunctional air shower
CN109733336A (en) * 2019-02-28 2019-05-10 中铁第四勘察设计院集团有限公司 A kind of the convection type intelligence purge system and method for single-sided tracks
CN112644841A (en) * 2020-12-03 2021-04-13 Tcl华星光电技术有限公司 Cartridge and automatic clean storage
CN218455271U (en) * 2022-09-16 2023-02-07 江苏捷顺机电工程有限公司 Novel air return structure of clean room

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