CN1166984C - Method and apparatus for production of structure by focused laser radiation on photosensitively coated substrate - Google Patents
Method and apparatus for production of structure by focused laser radiation on photosensitively coated substrate Download PDFInfo
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- CN1166984C CN1166984C CNB971815836A CN97181583A CN1166984C CN 1166984 C CN1166984 C CN 1166984C CN B971815836 A CNB971815836 A CN B971815836A CN 97181583 A CN97181583 A CN 97181583A CN 1166984 C CN1166984 C CN 1166984C
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Abstract
The present invention relates to a method by which the described pattern in input data is written on the photosurface by that at least one modulation laser beam is scanned in a parallel scanning line and moves along a scanning belt in a direction vertical to the scanning line at the same time. The method comprises the following steps that the input data is divided into scanning-belt pattern data which is partially overlapped and is corresponding to the scanning belt with the overlapping zone of the scanning belt; a predetermined mixed function exposed along a scanning line is provided, and the starting value and the stopping value of the mixed function are 0 % and are 100% further approaching the center of the scanning line; furthermore, the laser beam is modulated by the product of the exposed mixed function and the scanning-belt pattern data. The present invention also comprises a device for writing in patterns according to the method.
Description
Background of invention
1. invention field
The method and apparatus that the present invention relates on photosensitive coated substrates, to utilize the surfacial pattern of focussed laser beam making and be used to make this kind figure.Target particularly of the present invention is the method and apparatus that is suitable for use as the chromium structure of mask in the semiconductor production or registering in making on glass.
2. previous problem
Mask with the extremely accurately chromium structure of making on glass substrate is used for making photolithographic structures or figure in semiconductor production with the system that is called registering (reticle).The 5X registering, promptly adopt photographic process dwindle 5 times transfer to figure on the semiconductor wafer or structure and be can constitute in the near future the most widely used a kind of mask by a size be having of 150mm * 150mm the piezoid of opaque chromium structure constitute.This structure is that the responsive overlayer of the photosensitive overlayer on the chromium thin film or electronics is formed light or electron beam exposure.Afterwards, the responsive overlayer of photosensitive overlayer or electronics is removed through chemical development and with exposed portion.In follow-up etching operation, the locational chromium of having removed at overlayer is etched and removes, and residual chromium thin film then forms figure or structure.
The minimum feature of known 5 times of registerings is about 2 microns.But desired precision is much higher.Acceptable registering error, promptly the acceptable difference between the position on the chromium limit in the same registering of making in two series-operations is approximately 0.05 micron magnitude.
Registering is mainly used in and makes accurate structure or figure in semi-conductor industry.Yet, many other application are also arranged, such as in integrated optics, diffraction optics, computer-generated hologram, the micromachined of small sensor, fields such as optical information storage and superconductive device.Other important application have the direct exposure of semiconductor wafer figure and the figure generation that large tracts of land shows.Utilize current production devices, particularly adopt the electron beam registering to write machine, the sky high cost of making sufficiently high surfacial pattern of precision or structure forms obstacle for exploitation new equipment in these little definite fields, particularly in university and less company.
The common point of all known pattern generators is that mask or registering are to utilize the numerical data thesaurus that comprises all structures or figure and have the list of its geometric data to be described.Structure is carried out write before, geometric data is converted to writes the employed form of software.In this conversion operations, geometric coordinate promptly writes address grid according to hardware, addressing resolution block.
Most Modern Graphic generators adopt scanning beam raster scanning principle, scanning beam or electron beam, or laser beam, and this scanning beam is along the parallel lines deflection that is coated with on the radiosensitive tectal substrate.The break-make of scanning beam is decided according to the bitmap that is stored in the structure in the control system.Another selection is that scanning beam generated in the write time, and this write time utilizes the data with the storage of intermediate compression form to derive.
Can generate one of each net point (bit) for having 0.5 micron the address grid or the figure or the surface structure of grating, each pixel, i.e. each separately controllable surface elemant, the bitmap of a digit order number.
In principle, addressing capability be 0.5 micron figure write the sweep trace that can adopt to be spaced apart 0.05 micron and 0.05 micron pixel separation along sweep trace.But the bitmap with the bitmap of 0.05 micron grid and above-mentioned surface coverage is corresponding to per second 2-4 kilomegabit.With such rate modulation single write the bundle be impossible.In addition, data volume can't be handled than big 100 times under 0.5 micron grid situation at all.Even it is all right obstructed to carry out real-time extension from the packed data form, because data stream can make the data bus of most processors block.Because the technical limitation of modulation rate and data stream aspect can seriously limit writing speed and can't adopt the registering of the full bitmap with 0.05 micron address grid to write machine.
3. the solution of previous problem and the introduction of prior art
The present inventor has proposed the method and apparatus that addresses the above problem in German patent DE-P 40 22 732.4.To introduce this method and this device below in detail.When being included in laser beam flying, this device controls the data link of described modulator input.Say that generally data link comprises that the clock with predetermined clock recurrence interval is to generate regular clock pulse sequence.Also be provided with the scanning beam position data that a data processing unit is used for accepting to import data and calculating or definite scanning beam intensity data and pattern edge place.As the part of data link, this device comprises also that a signal processing unit is used for the scanning beam position data is converted to makes the equivalent time of laser beam in the location when sweep trace scans.Particularly, this equivalent time is that the integer that is converted to time clock adds the mark remainder.For generating the corresponding time pulse of equivalent time therewith, the digital counting device can be set to generate timing pip, and time delay circuit can be set make timing pip postpone to equal the time delay of mark remainder with the corresponding time of integer time clock.In case generate corresponding time pulse, the digital scanning beam intensity data in the time of just can utilizing a circuit that modulating input signal is set at timing pip arrival.
Below with reference to preferred embodiment shown in Figure 1.The frequency that run length encoding (RLE) data item repeats to be encased in modulators drives logical unit 6 is usually less than dot frequency.It is to occur with the speed of data transmission clock that data are packed into, and this data transmission clock has and IC standard (integrated circuit) series, such as TTL (transistor-transistor logic circuit) fast, and compatible clock speed.Two data item can combine provides a data word so that effectively utilize available position (bit).Modulators drives logical unit 6 was separated power field and change of location field and providing power control signal to modulating device 5 after the time of two or one derivation of last location field in the input.If the frequency ratio dot frequency of data transmission clock low (all being this situation usually) then can't help counter produce to postpone in modulator control signal, and preferably produce by among the various clock signals that have delay therebetween, selecting.
The modulation of scanning beam power both can also can be undertaken by the modulator that utilization has a continuous light source by modulated light source.Also can allow provides nonlinear relationship by tabling look-up or reading formality or other trimming process between the displacement at the exposure of the pixel of the ragged edge of structural element edge and edge.Also can revise along the exposure of the pixel more than the delegation at edge so that produce exposure gradients with the location independent of relative scanning line.
Apparatus and method can be used as follows, make writing of the constant contiguous pixels of power not need to generate more than one control word exactly.
Below with reference to Fig. 1 that preferred embodiment is shown, device wherein is used for making film pattern or structure on photosensitive coated substrates or substrate.In the illustrated embodiment, substrate 3 is the glass sheet form, is coated with photosensitive coating on it, such as photoresist.Glass sheet 3 is positioned at can be on the Target Station 19 that moves on directions X and the Y direction.Write head with condenser lens 15 and inflector assembly 14 is set to fix on X and Y direction, and inflector assembly 14 wherein is the acousto-optical deflection device form preferably.But condenser lens 15 can move freely on vertical direction (Z direction).It is arranged on the air cushion, several microns places in glass sheet 3 surfaces.Because air cushion only bears condenser lens 15 weight, the height of air cushion can remain unchanged, because irrelevant with the Z coordinate, so the surface of glass sheet will remain on the focal plane forever, even air spots is also like this.
For monitoring the location of work stage 19, this device is furnished with position monitoring apparatus 18x and 18y, and both are used for monitoring work stage 19 location of relative write head (inflector assembly 14 and condenser lens 15) on directions X and Y direction. Position monitoring apparatus 18x and 18y form one with motor 17x and 17y makes work stage 19 produce accurately controlled mobile servo control mechanism.
This servo control mechanism can be worked on directions X, can work stage 19 moved on the directions X so that generate the scanning strip 30 of given width when sweep trace 2 scans in laser beam 1 with regular speed by motor (preferably linear electric motors) 17x.When a corresponding scanning strip 30 was finished, the X servo control mechanism was carried out the stroke of turning back and is moved and get back to reference position, and work stage 19 is then moved the width of a scanning strip on the Y direction by motor (preferably also being stepper motor) 17y.
Herein with reference to figure 3, shown in Fig. 3 above with reference to the preferred embodiment of figure 1 described modulators drives logical unit 6.This device has position word (bit words) memory storage of two registers 605 and 608 forms.Register 605 is packed into is intensity or power data 7 from data link shown in Figure 1 24.What register 608 was packed into is position or delayed data 25, also is from data link 24.It is that basis is by clock signal 31 caused transfers.When adopting this configuration, digital to analog converter 606 is also by the power data operation that is stored in advance in the memory storage 607.Memory storage 607 also can be a register form.A numerically controlled delay circuit 609 is transferred to its outgoing side with clock signal 31 through depending on the delay of the data of being stored in the register 608.After this postponed, the effective edge of clock signal provided the output 610 of giving delay circuit 609.Be stored in the value load register 607 in the register 605 and be sent to the outgoing side of digital to analog converter 606.In the output of the modulators drives level of modem devices 5, occur one through the internal latency in the digital to analog converter 606 and refresh simulated power control signal 7.
Return Fig. 1 below.Thick edge among Fig. 1 is represented the data stream of relevant structure, and fine rule is represented control signal wire.Embodiment among Fig. 1 also comprises an into control device 29 that can be the processor form.These into control device 29 startups are used for controlling moving of work stage 19 from the operation of memory storage 23 sense datas and to 27 transmission instructions of XY servo control unit or command signal.Clock signal generator 28 generates clock signal 31 and is used for making the operation of data link 24, modulators drives logical unit 6 and deflection circuit 26 synchronous.Servocontrol device 27 also provides independent " ready " signal 32 to give deflection circuit 26." ready " signal 32 can guarantee that the operation of inflector assembly 14 can not take place before work stage 19 arrives correct X position.This just can make work stage 19 relative inflector assembly 14 accurately locate.Because modem devices 5 and inflector assembly 14 are to operate and driven by same clock signal 31 in the noninertia mode, so this configuration can provide high position precision.
Like this, XY servo control unit 27 is just with timing synchronized relation and servo- drive system 17x, 17y, 18x, 18y and deflection circuit 26 concerted actions, thus guaranteed scanning tape 30, inflector assembly 14 in the width of corresponding scanning strip scanning and the modulation of modem devices 5 can carry out synchronously.
This device also can adopt a plurality of bundles that write to replace the single bundle that writes.Adopt the multi beam mode just to require to be equipped with modulator, lens, parallel data path of right quantity or the like.
Location field comprises enough data and is used for changing the calculating absolute position at power, but location field might not be encoded to the absolute position.Particularly when adopting paired power and length of stroke data, run length encoding can be realized with following any way: as the room so that before the next one changes, keep currency, or as the room so that keep next currency, or as the next absolute position that is worth beginning, or as the next absolute position that is worth termination, or as any other suitable coding.In addition, location field can comprise two son fields, and one is absolute, and another is relative.Also can adopt modulated light source to replace modem devices 5, such as adopting one or more semiconductor lasers.Continue to describe device shown in Figure 1 below again.Data input device 20 comprises the input data that are used to prepare the structure 9 of making on substrate 3.This data can occur with the list form of structure or graphic element 12 and 16 or regular structure fomula form or constant form, so that can calculate structural element.The specification of exposure can be standardized as maximum exposure to all figures or in the assumed value in secret of single exposure occasion.On all occasions, the angle of X and Y length scale, between centers and absolute exposure dose can be made amendment to the numerical value of defined in the input data by operating personnel.Also can carry out other data processing operation, such as the precompensation operation of mirror image, inverting, gray correction and etching deficiency and Contact Effect.Transfer clock can be single-phase or multi-phase clock, and packing into of run length encoding data item can utilize a register or two or more register to realize.Decode logic can comprise in advance call operation or other impact dampers to increase travelling speed again.
Also can increase the partial data path for increasing travelling speed, such as a plurality of modulators drives logical units are provided, even only adopt a laser beam.
Otherwise as between write head and the substrate relatively move can by the write head that moves with respect to stationary substrate generate or.Also can be that write head moves to a direction, and substrate move to perpendicular direction.
Be described further below with reference to Fig. 2 a.Fixed mesh shown in Fig. 2 a, the small circle that has on it are represented the size of each pixel of being limited by diffraction.The center of pixel is on pixel compartments 504, and scanning tape 503 is made up of continuous sweep trace 502.Pixel be centered close on the sweep trace 502 and its interval between mutually equates.The interval of pixel separation and continuous sweep line 506 is identical.Fig. 2 a illustrates the sweep trace 502 of an exposure and one and fills up pixel and extend zone above 3 scanning strips 503.This zone has the edge 506 of edge 505 extension of relative horizontal line inclination with of a relative vertical line inclination extension.Structure shown in the employing can not make the edge be positioned the fraction pixel point, so the configuration of this sloping edge is uneven zigzag.
Relative therewith, the picture element density along sweep trace 502 in the arrangement of the pixel shown in Fig. 2 b is higher, more particularly, is at least 4 times of density on the direction of the longitudinal extension direction of scanning strip 503 or vertical scan line 502.This point is also shown by interval A1 and A2 among Fig. 2 b.A1 represents corresponding address pixels interval in the sweep trace 502, and A2 represents corresponding sweep trace 502 interval each other.From Fig. 2 b as can be known, this just can guarantee to form at vertical edge the addressing of very fine.So it is just may obtain quite level and smooth configuration, even also like this in the edge 508 this occasions of vertical line inclination extension relatively.
It can also be seen that from Fig. 2 b the power modulation effect also can be improved the edge 509 that relative horizontal line tilts to extend.
Being in operation, with reference to figure 1, the geometric properties of structure to be generated 9 or structural element 12,16 being arranged, with its exposure, is with the format specification that is transferred to data processing equipment 21 in data input device 20.Data processing equipment 21 is converted to intermediate compression form 22 with geometric data.Intermediate compression form 22 is input to digital memeory device 23.This compressed format also is transferred to data link 24, and the data of being stored therein provide internal data format to form paired data content 7 and 25 through handling, i.e. a data content relevant with beam power 7 and a data content 25 relevant with the position.Described with reference to figure 3 as top, data content 25 can comprise delayed data.The data content 7 relevant with beam power is sent to modulators drives level 6 with the form of power control signal 7, and the data content 25 relevant with the position is sent to modulators drives level 6 with the form of position signalling 25.The modulators drives level 6 of logical circuit form proposes these data from data link 24.Modulators drives level 6 provides modulated drive signal 4, and this signal is the variable that extends the pixel of arranging 8 with rule at interval along sweep trace 2 vertical scanning bands 30.
4. prior art problems
An important performance standard of scanning patter generator is the ability of printing off little graphic element on the border between two scanning strips error freely.Usually, each scanning strip can slightly move relative to the scanning strip of adjacency, because they are not to write at one time, and all there are certain drift and position noise in any system.Mismatch between the figure on the both sides, scanning strip border is called the butt joint error herein.Therefore, if a little graphic element is positioned on the scanning strip border, usually can be because the butt joint error makes graphic element scale error occur.
Illustrate with example below, but be not limited to this scale error.At a 5X mask that is used for the VLSI (very large scale integrated circuit) device of 0.5 μ m, transistor gate is that 2.5 μ m are long.Required absolute positional accuracy can be 100nm (3 times of standard deviation values) in the mask.But, be ± 100nm that then the somewhere two relative displacements in abutting connection with scanning strip may occur and probably can reach 170nm in mask as the scanning strip random file.If transistor gate is positioned on the border of this scanning strip, 7% of then their 170nm that can expand, or 2.5 μ m.This scale error can influence characteristics of transistor and can cause entire circuit to lose efficacy, and perhaps reduces the tolerance limit of other operation errors, thereby reduces yield rate.
A kind of known method that reduces to dock error is just to write when scanning strip is subjected to displacement in each time ablation process for several times.The butt joint error just can be average, but this method too waste because in fact same figure need write the several.
Brief introduction of the present invention
Adopt parallel scan lines to form the scanning strip that extends along substrate and sweep trace extended across separately scanning strip, the present invention includes the end boundaries that the device of the write structure between the adjacency scanning strip those not so can be by the photosurface at substrate of the end boundaries that can suppress scanning strip-particularly produces-the method and apparatus of visibility.According to the present invention, scanning strip overlaps each other.
According to an aspect of the present invention, the transition of taking another scanning strip to from a scanning be with the time the position synchronous of edge feature.
According to another aspect of the present invention, scanning strip mixes in the overlay region according to predetermined stepped change function.Utilize this method, advantage of the present invention can keep on the border of scanning strip, can make these borders that all are effectively imported data and be actually invisible.The cost that obtains aspect increase complicacy, data capacity and data processing of this point is little.
Should be appreciated that no matter be top general description, or following detailed all is exemplary and only be for illustration purpose, is not the restriction to claim of the present invention.Other characteristics of the present invention and advantage can be seen from the following description.
Brief description
As content that the present invention comprised and the accompanying drawing that constitutes an instructions part the preferred embodiments of the present invention are shown, and are used for illustrating principle of the present invention with this description.
Fig. 1 illustrates the device that is used for making surfacial pattern or structure according to prior art.
Fig. 2 a is the fixed pixel grid.
Fig. 2 b illustrates according to the pixel of prior art and arranges.
Fig. 3 illustrates the embodiment of the modulators drives logical unit of the device that can be used among Fig. 1.
Shown in Fig. 4 is the graphical examples that has slightly across the extension area on scanning strip border, and this district is little than desired minimum feature size.
Fig. 5 is the example of one aspect of the present invention, does not wherein like this do meeting graph area less than desired minimum dimension to each sweep trace is mobile to some extent to eliminate in abutting connection with the scanning strip border between the scanning strip.
Fig. 6 is the example of another aspect of the present invention, and figure wherein is divided into partly overlapping scanning strip and exposure is mixed in the overlay region by the exposure mixed function.
Fig. 7 illustrates an embodiment of the modulators drives logical unit that the overlapping scan band that can be used to Fig. 6 of the present invention mixes.
Fig. 8 is the position time diagram that the function of Fig. 7 embodiment is shown.
Preferred embodiment describes in detail
Adopt said method and device can accurately and efficiently realize writing of arbitrary graphic.But preferably can satisfy following two conditions.At first, modulator driving signal should be only to change its numerical value once in each clock cycle.Secondly, the time between in the modulator control signal two continuously change should be not less than a particular value, hereinafter is called minimum feature size.According to first condition, the feature longer than clock cycle can write forever and no matter the position of its relative grid how.The minimum feature size of second condition is commonly considered as a clock cycle.
In practice, the part of figure might be less than minimum feature size when the figure cutting is scanning strip.Below with reference to Fig. 4 so that describe.Such as, there are two groups of parallel scanning beams 701,702 to form the scanning strip of two adjacency and a public boundary 703 is arranged.Along with the position of the corresponding sweep trace of time clock with 704 expressions, and minimum feature size equals a clock cycle 705.Can not throw into question on scanning strip border 703 although long feature 706 is divisible, the feature that only slightly protrudes in the scanning strip will generate little graphic element 707, and they might run counter to the minimum feature size condition when cutting apart.
The application's the people that assigns is that to avoid running counter to second method that condition adopted be to generate can satisfy minimal characteristic and require and extend to feature outside the scanning strip.Adopt independently strobe pulse or window signal (start pulse signal) in scanning strip border cutting feature then.Adopt this mode just can generate very short pulse when needed.But the low-pass characteristic of modulator and the non-linear short pulse that makes distort, and image pattern 4 such characteristics still are difficult to it is write and unlikely generation obvious defects.
Therefore, according to a further aspect of the invention, the method and apparatus that implement in this place can prevent that any graphic element less than minimum feature size from writing.In fact, method and apparatus of the present invention is according to writing the scanning strip boundary position that figure changes each bar sweep trace.The border that Fig. 5 illustrates multiple occasion is provided with, and is to utilize the make and break process of different power level rather than modulator realization to unexposed element 801 with 802 transition by the exposure element wherein.In each occasion, the determining of the position on border to make exposure element and unexposed element at least with the general size of minimum feature size so that second condition determining above can not running counter to.Fig. 5 also illustrates the overlay region that doubles minimum feature size 806 at least 803 that sweep trace 804 and 805 might occur.In this overlay region 803, or have transition in the modulator driving signal, or graphic feature length reaches and can be cut into two parts that can satisfy the minimum feature size condition.
According to an important aspect of the present invention, the method and apparatus that provides can reduce to dock the influence of error and the turnout loss is minimum.In the present invention, having introduced moderate overlapping and scanning strip between continuous scanning strip mixes in the overlay region.It is not unexpected taking Next transition to from a scanning, and the butt joint error can be distributed in overlay region, the normally 5-10% of scanning strip width effectively.Therefore, with reference to the accompanying drawing of above-mentioned example, the butt joint error is deployable on the overlay region of 10 μ m.Like this, the feature of 2.5 μ m will only account for 1/4th of total butt joint error, i.e. 42nm or less than 2% of scale error.
Fig. 6 is the synoptic diagram of lap of the present invention and mixed function of the present invention.Graph data 901 cuts or is divided into data scanning band 902,903, and data scanning band 902 and 903 is wherein overlapped mutually.The exposure energy that exposure mixed function 904 is judged along sweep trace.The foundation of mixed function 904 wants to make the data scanning band can produce uniform graph exposure when mixing.Specifically, mixed function is to be used for modulating the exposure level of graph data of each data scanning band so that make exposure become the product of graph data and mixed function,
Thereby in order to carry out the influence that mixed function also reduces to dock error, can allow light beam pass through the modulator of two serial connections, one is used for data, and one is used for mixed function.But, way is data and mixed function to be combined into single electronic signal be input to a modulator more easily.The way of modulator of this employing rather than two modulators can obtain higher optical efficiency, because each modulator all can produce about 20% insertion loss.In addition, the optical system with a modulator is much smaller compared with the complexity of the optical system of the modulator with two serial connections, and cost is more cheap, and easier adjusting.
Fig. 7 illustrates a preferred embodiment of the device that can be used to carry out this hybrid modulation.This modulators drives logic 6 comprises identical and adopt the parts of same label with Fig. 3, and the optional feature that is used for carrying out the exposure mixed function.
As mentioned above, high frequency modulated drive signal 4 is to utilize time delay data 25 and power data 7 to generate.The exposure mixed function is stored in consults storer 1001, can pack into by processor interface 1002.Intensity data 7 within the sweep trace and clock pulse count 1003 are used in consulting storer 1001 at every turn to an element address.Export a corresponding intensity level 1004 that also passes through the gamma correction of modulator of the product with power mixed function and power data in each clock cycle and consult storer 1001.In addition, time delay circuit 608, working condition and Fig. 3 of 609,607 are just the same, have only latch 607 not only when power input data 7 change timing and also in each timing clock cycle so that utilize the new numerical value of exposure mixed function to upgrade the digital to analog converter this point out.
Cycle count is from counter 1006, and the cycle of these counter 1006 enumeration data time clock 31 is also reset when each sweep trace begins by sweep-initiating pulse 1007.Added an information congestion detector 1005 and can not run counter to, and as run counter to and then cancel a time clock with assurance minimum feature size condition.The time clock that is cancelled is the transfer that does not relate to power data 7.The function that this process causes is unpredicted in advance, will judge according to the input data fully.The work just the same and circuit in two scanning strips in lap of figure in the scanning strip is identical.Thereby this principle is mixed regularly exposure makes the figure in two scanning strips identical synchronously with graph data definitely.
Fig. 8 illustrates the position time diagram how two scanning strips mix in the overlay region.The composition of figure 1101 to be written comprises the element with two different exposure level 1102,1103.Curve 1104 is the to be written exposure E corresponding with figure 1101.The longitudinal axis is not only represented position axis but also represent time shaft, because scanning is linear sweep from left to right.Two scanning strips are respectively by edge 1105 and 1106 expressions, and its overlay region is by label 1107 representatives.Z-axis 1108 in the time diagram of position is represented time clock.
The right-hand member of exposure mixed function and left end are by curve 1109 and 1110 expressions.Equally, the modulator driving signal value of each in two scanning strips is respectively by curve 1111 and 1112 expressions.Curve 1111 is shown is 1104 and 1109 product, and curve 1112 is 1104 and 1110 product.In addition, for as example, also be illustrated in step in 1109 in a clock cycle with data in step synchronous, except the step 1113, at step 1113 information congestion detector it is postponed one-period again, in himself, occur to run counter to above-mentioned minimum feature size condition clock cycle because if allow it.
When combining, 1111 and 1112 and equal 1104.So and data 1104 graphs of a correspondence 1101 just mix by mixed function 1109,1110 in the overlay region between scanning strip 1105 and 1106, and the timing of mixed function and data sync are to generate modulator driving signal 1111 and 1112.In addition, scanning strip preferably all is two clock cycles of the outer extension in zone of zero two of mixed functions.This is in order to be sure of that figure in two scanning strips is identical and not have end effect changes all exposure in mixed function and two scanning strips data synchronization.
The shape of exposure mixed function, the length of overlay region estimates that from 0% to 100% number of steps is determined by system software, and parameter can be by user of service's input of pattern generator.For very crucial figure, half and number of steps that the overlay region can increase the scanning strip width increase, and for non-key figure, and the overlay region can reduce and increase turnout.The content of consulting storer can be by measuring actual beam power calibration so that the follower theory mixed function that exposes really changes.
In another embodiment of the present invention, also comprise the information of relevant exposure variations along sweep trace in the exposure mixed signal the mixed information in the overlay region.By measure along the actual exposure of sweep trace and to the exposure mixed function in addition suitable correction can remove any unwanted exposure variations.It is very little to proofread and correct value, is about 2% usually, and the Unpredictability of the synchronization timing that is caused by the information congestion detector is generally unimportant.
Above-mentioned synchronously and the use of can separately or interosculating of mixed function method.Therefore the border that can be dependent on the border on the exposed synchronously or before exposure, in the input data of control laser beam, detect.
Should be appreciated that the example of above-mentioned description of this invention pure lines, and under the situation that does not break away from the spirit and scope of the present invention, can carry out various changes and modification the present invention to principle of the present invention.
Claims (17)
1. one kind is being moved to be written in the method for the figure described in the input data in the direction of vertical scan line along scanning strip by at least a modulating lasering beam again on photosurface in the parallel sweep line sweep, and the step that comprises is:
Described input data are divided into and the corresponding partly overlapping scanning strip graph data of scanning strip with scanning strip overlay region,
A predetermined exposure mixed function along sweep trace is provided, and described mixed function begins and stop value is 0% and is being 100% near the sweep trace center further, and
Utilize the product of exposure mixed function and scanning strip graph data that laser beam is modulated.
2. method as claimed in claim 1, the mixed function that wherein exposes has intermediate value in the overlay region, and is two or more intermediate values.
3. method as claimed in claim 2, the shape of the mixed function that wherein exposes are also can be changed by operating personnel by software control.
4. method as claimed in claim 1, wherein the width of the overlay region of scanning strip is also can be changed by operating personnel by software control.
5. method as claimed in claim 1 wherein can be combined into single modulation signal and be sent to single modulator each laser beam exposure mixed function and scanning strip graph data.
6. method as claimed in claim 5, the data that wherein are sent to modulator are through depending on the time delay of figure, and wherein the timing of the different numerical value middle transitional in the exposure mixed signal that takes place near the transit time in the scanning strip graph data and scanning strip graph data is synchronous.
7. method as claimed in claim 6, wherein the scanning strip graph data is at least than a non-zero exposure mixed function district wide clock cycle.
8. method as claimed in claim 6 wherein has an information congestion detector Looking Out Time delayed data with the appearance of pointing out two transition in the modulator signal when interval less than a clock cycle, and changes the timing of one of them transition.
9. method as claimed in claim 5, combination wherein are by tabling look-up, and the calibration of tabling look-up is by the mensuration to the power of laser beam.
10. as any one method among the claim 2-9, wherein the border between the intermediate value in the mixed function in the scanning strip overlay region is to carry out synchronously according to the input data of the figure in the overlay region.
11., wherein be before exposure, to control synchronously according to the border in the input data as the method for claim 10.
12. as the method for claim 10, synchro control wherein is to carry out as the transition of the modulator driving signal of stipulating for laser beam in the input data relatively according to the edge in the exposure region.
13. method as claimed in claim 1, wherein writing in the sweep trace end at a scanning strip and when starting from the corresponding sweep trace of scanning strip of adjacency the border of the scanning strip of this sweep trace with synchronous as the transition of the modulator driving signal of in the input data, stipulating for laser beam.
14. as the method for claim 13, wherein the laser beam data in the overlay region of two scanning strips be identical and scanning strip border and laser beam data in transition between line-line locking be to write fashionable finishing by synchronizing circuit.
15. one kind is being moved to be written in the device of the figure described in the input data in the direction of vertical scan line along scanning strip by at least a modulating lasering beam again on photosurface in the parallel sweep line sweep, comprising:
One be used for the input data are converted to and the scanning strip of overlapping in the data handling system of the corresponding figure modulating data of figure, scanning strip wherein has the scanning strip overlay region,
One has at scanning line terminal numerical value is 0% and be 100% stored digital exposure mixed function near the sweep trace center value, and
Be used for utilizing the figure modulating data and the modulating device of the product modulated laser beam of the mixed function that exposes.
16. as the device of claim 15, wherein the formation of mixed function comprises the intermediate value with corresponding position, scanning strip overlay region.
17. the device as claim 15 also comprises:
For obtaining the time delay circuit that the resolution higher than corresponding clock pulse is used for postponing the transition in the modulating data, and
Be used for making transition in the exposure mixed function and the synchronous synchronizing circuit of the transition that is delayed in the figure modulating data.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB971815836A CN1166984C (en) | 1997-01-29 | 1997-01-29 | Method and apparatus for production of structure by focused laser radiation on photosensitively coated substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB971815836A CN1166984C (en) | 1997-01-29 | 1997-01-29 | Method and apparatus for production of structure by focused laser radiation on photosensitively coated substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1245565A CN1245565A (en) | 2000-02-23 |
| CN1166984C true CN1166984C (en) | 2004-09-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB971815836A Expired - Lifetime CN1166984C (en) | 1997-01-29 | 1997-01-29 | Method and apparatus for production of structure by focused laser radiation on photosensitively coated substrate |
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| Country | Link |
|---|---|
| CN (1) | CN1166984C (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2579099B1 (en) * | 2010-06-04 | 2019-12-04 | Think Laboratory Co., Ltd. | Laser exposure method |
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1997
- 1997-01-29 CN CNB971815836A patent/CN1166984C/en not_active Expired - Lifetime
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| Publication number | Publication date |
|---|---|
| CN1245565A (en) | 2000-02-23 |
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