CN116505536B - Pressure stabilizing system and method for microwave source of MPCVD equipment - Google Patents
Pressure stabilizing system and method for microwave source of MPCVD equipment Download PDFInfo
- Publication number
- CN116505536B CN116505536B CN202310791211.0A CN202310791211A CN116505536B CN 116505536 B CN116505536 B CN 116505536B CN 202310791211 A CN202310791211 A CN 202310791211A CN 116505536 B CN116505536 B CN 116505536B
- Authority
- CN
- China
- Prior art keywords
- voltage
- module
- control signal
- capacitor
- diode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000000087 stabilizing effect Effects 0.000 title claims abstract description 60
- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000000259 microwave plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract 14
- 238000001914 filtration Methods 0.000 claims abstract description 146
- 238000004146 energy storage Methods 0.000 claims abstract description 109
- 238000006243 chemical reaction Methods 0.000 claims abstract description 63
- 238000007599 discharging Methods 0.000 claims abstract description 38
- 239000003990 capacitor Substances 0.000 claims description 155
- 230000009466 transformation Effects 0.000 claims 1
- 230000005611 electricity Effects 0.000 abstract description 6
- 230000002457 bidirectional effect Effects 0.000 description 12
- 230000008859 change Effects 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000011217 control strategy Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J3/00—Circuit arrangements for ac mains or ac distribution networks
- H02J3/12—Circuit arrangements for ac mains or ac distribution networks for adjusting voltage in ac networks by changing a characteristic of the network load
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J3/00—Circuit arrangements for ac mains or ac distribution networks
- H02J3/28—Arrangements for balancing of the load in a network by storage of energy
- H02J3/32—Arrangements for balancing of the load in a network by storage of energy using batteries with converting means
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J7/00—Circuit arrangements for charging or depolarising batteries or for supplying loads from batteries
- H02J7/0068—Battery or charger load switching, e.g. concurrent charging and load supply
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J7/00—Circuit arrangements for charging or depolarising batteries or for supplying loads from batteries
- H02J7/007—Regulation of charging or discharging current or voltage
- H02J7/00712—Regulation of charging or discharging current or voltage the cycle being controlled or terminated in response to electric parameters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J7/00—Circuit arrangements for charging or depolarising batteries or for supplying loads from batteries
- H02J7/02—Circuit arrangements for charging or depolarising batteries or for supplying loads from batteries for charging batteries from ac mains by converters
- H02J7/04—Regulation of charging current or voltage
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J7/00—Circuit arrangements for charging or depolarising batteries or for supplying loads from batteries
- H02J7/34—Parallel operation in networks using both storage and other dc sources, e.g. providing buffering
- H02J7/345—Parallel operation in networks using both storage and other dc sources, e.g. providing buffering using capacitors as storage or buffering devices
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
- H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
- H02M3/10—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M3/145—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M3/155—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/156—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators
- H02M3/158—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators including plural semiconductor devices as final control devices for a single load
- H02M3/1582—Buck-boost converters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M5/00—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
- H02M5/40—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc
- H02M5/42—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters
- H02M5/44—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac
- H02M5/453—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal
- H02M5/458—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
- H02M7/04—Conversion of ac power input into dc power output without possibility of reversal by static converters
- H02M7/06—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J2207/00—Indexing scheme relating to details of circuit arrangements for charging or depolarising batteries or for supplying loads from batteries
- H02J2207/20—Charging or discharging characterised by the power electronics converter
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J2207/00—Indexing scheme relating to details of circuit arrangements for charging or depolarising batteries or for supplying loads from batteries
- H02J2207/50—Charging of capacitors, supercapacitors, ultra-capacitors or double layer capacitors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inverter Devices (AREA)
- Particle Accelerators (AREA)
Abstract
The invention discloses a voltage stabilizing system and a voltage stabilizing method for a microwave source of MPCVD equipment, wherein the system is respectively connected with a power supply end and a load end, a rectifying and filtering module in the system is used for rectifying and filtering a first voltage which is transmitted by the power supply end and is filtered, and transmitting an obtained second voltage to a voltage conversion module; the voltage conversion module is used for comparing the second voltage with a preset rated voltage and transmitting the generated charging control signal and discharging control signal to the energy storage module; the energy storage module is used for carrying out charge-discharge adjustment on the second voltage according to the charge control signal and the discharge control signal and transmitting the obtained third voltage to the inversion module; the inversion module is used for converting the third voltage into a fourth voltage and transmitting the fourth voltage to the load end. And comparing the second voltage with a preset rated voltage, and carrying out charge and discharge adjustment on the second voltage according to a comparison result, so as to stably output the voltage to ensure the electricity utilization safety.
Description
Technical Field
The invention relates to the technical field of power supply control, in particular to a voltage stabilizing system and method of a microwave source of MPCVD equipment.
Background
With the widespread use of MPCVD (MPCVD: microwave Plasma Chemical Vapor Deposition, entitled microwave plasma chemical vapor deposition technology) in the field of diamond manufacturing, the influence of power supply fluctuations on a microwave source has become a problem that is not negligible today. The stability of the microwave source plays a vital role in the normal operation of the MPCVD equipment, the fluctuation of the supply voltage can enable the anode voltage of the microwave source to fluctuate, the working state of the internal magnetron is unstable, the output power and the output frequency are unstable, the magnetron is triggered to fire under severe conditions, and the service life of the magnetron is shortened. When the voltage fluctuation is large, even an emergency protection mechanism and a shutdown of a microwave power supply are caused, so that the MPCVD equipment is abnormally stopped, and the diamonds are broken, so that serious economic loss is caused.
The current industry adopts the voltage stabilizing measure to the microwave source of MPCVD equipment to connect a high-power UPS (UPS: uninterruptible Power System/Uninterruptible Power Supply, which is called uninterruptible power supply in China), a storage battery (mostly lead-acid maintenance-free storage battery) is connected with a host, and direct current is converted into system equipment of commercial power through a module circuit such as a host inverter and the like, so that a local micro-grid is formed to isolate the influence of power supply voltage fluctuation on the equipment, and the stable power supply of the microwave source is achieved. However, the UPS has high price, low conversion efficiency and high cost of a voltage stabilizing mode; and new failure points are added, which can cause new power quality problems when UPS power is in trouble. Secondly, the improvement of the power quality of the power grid is also a scheme for stabilizing the voltage of the microwave source of the MPCVD equipment, and the power supply end can change the system design so as to minimize the voltage disturbance at the user equipment when a fault occurs, or adopt a fuse to limit the current, and the like. However, the absolute stability of power supply is still unavoidable in the prior art, and the cost is huge, and the implementation is almost impossible from the aspect of enterprises.
There is thus a need for improvements and improvements in the art.
Disclosure of Invention
The invention mainly aims to provide a voltage stabilizing system and method for an MPCVD equipment microwave source, and aims to solve the problem of unsafe electricity consumption caused by unstable power supply when the MPCVD equipment microwave source is stabilized in the prior art.
In order to achieve the above purpose, the invention adopts the following technical scheme:
a voltage stabilizing system of MPCVD equipment microwave source is connected with a power supply end and a load end respectively, the voltage stabilizing system of MPCVD equipment microwave source includes:
the device comprises a rectification filtering module, a voltage conversion module, an inversion module and an energy storage module; the voltage conversion module is respectively connected with the rectifying and filtering module, the inversion module and the energy storage module; the rectification filter module is also connected with the inversion module; the inversion module is also connected with the load end;
the rectification filter module is used for rectifying and filtering the first voltage which is transmitted by the power supply end and is filtered, and transmitting the obtained second voltage to the voltage conversion module; the voltage conversion module is used for comparing the second voltage with a preset rated voltage, generating a charging control signal or a discharging control signal according to a comparison result, and transmitting the charging control signal or the discharging control signal to the energy storage module; the energy storage module is used for carrying out charge-discharge adjustment on the second voltage according to the charge control signal or the discharge control signal, and transmitting the obtained third voltage to the inversion module; the inversion module is used for converting the third voltage into a fourth voltage and transmitting the fourth voltage to the load end.
In the voltage stabilizing system of the MPCVD equipment microwave source, the voltage stabilizing system of the MPCVD equipment microwave source further comprises: a filtering module; the filtering module is respectively connected with the rectifying and filtering module and the power supply end; the filtering module is used for filtering the fifth voltage provided by the power supply end to obtain a filtered first voltage, and transmitting the filtered first voltage to the rectifying and filtering module.
In the voltage stabilizing system of the MPCVD equipment microwave source, the voltage conversion module comprises: a switching unit and a control unit; the switch unit is respectively connected with the control unit, the rectifying and filtering module, the inversion module and the energy storage module, and the control unit is also respectively connected with the rectifying and filtering module and the inversion module; the control unit is used for comparing the second voltage with the preset rated voltage, transmitting the generated first switch control signal to the switch unit when the second voltage is smaller than the preset rated voltage, and transmitting the generated second switch control signal to the switch unit when the second voltage is not smaller than the preset rated voltage; the switch unit is used for outputting the charging control signal to the energy storage module according to the first switch control signal, and outputting the discharging control signal to the energy storage module according to the second switch control signal.
In the voltage stabilizing system of the MPCVD equipment microwave source, the filtering module comprises: the device comprises a first filtering unit, a second filtering unit and a third filtering unit;
the second filtering unit is respectively connected with the first filtering unit and the third filtering unit, the first filtering unit is also connected with the power supply end, and the third filtering unit is also connected with the rectifying and filtering module;
the first filtering unit is used for performing a first filtering operation on the fifth voltage and transmitting the fifth voltage subjected to the first filtering to the second filtering unit; the second filtering unit is used for performing a second filtering operation on the fifth voltage after the first filtering and transmitting the fifth voltage after the second filtering to the second filtering unit; the third filtering unit is used for performing a third filtering operation on the fifth voltage subjected to the secondary filtering to obtain the first voltage, and transmitting the filtered first voltage to the rectifying and filtering module.
In the voltage stabilizing system of the MPCVD equipment microwave source, the rectifying and filtering module comprises: a rectifying unit and a fourth filtering unit; the rectification filter module is respectively connected with the third filter unit and the fourth filter unit, and the fourth filter unit is also respectively connected with the inversion module and the voltage conversion module;
The rectification unit is used for rectifying the first voltage and transmitting the obtained rectified first voltage to the fourth filtering unit; the fourth filtering unit is used for performing fourth filtering operation on the rectified first voltage to obtain the second voltage, and transmitting the second voltage to the voltage conversion module.
In the voltage stabilizing system of the MPCVD equipment microwave source, the switch unit comprises: the first switch tube, the second switch tube, the first diode, the second diode, the first capacitor and the first inductor;
the 1 st pin of the first switching tube is respectively connected with the cathode of the first diode, one end of the first capacitor and the rectifying and filtering module, the 2 nd pin of the first switching tube is connected with the anode of the first diode, the cathode of the second diode, the 1 st pin of the second switching tube and one end of the first inductor in pairs, and the 3 rd pin of the first switching tube is connected with the control unit; the 2 nd pin of the second switching tube is respectively connected with the anode of the second diode, the energy storage module, the other end of the first capacitor, the rectifying and filtering module and the inversion module; and the 3 rd pin of the second switching tube is connected with the control unit.
In the voltage stabilizing system of the MPCVD equipment microwave source, the control unit comprises: an input interface for presetting rated voltage, a multiplier, a comparator, a voltage proportional integral regulator, a signal arithmetic unit and a pulse width modulation controller; the multiplier, the voltage proportional integral regulator, the signal arithmetic unit and the input end of the pulse width modulation controller are sequentially connected, the comparator is also respectively connected with the signal arithmetic unit, the rectifying and filtering module, the inversion module and the input interface of the preset rated voltage, and the multiplier is also respectively connected with the input interface of the preset rated voltage, the rectifying and filtering module and the inversion module; the first output end of the pulse width modulation controller is connected with the 3 rd pin of the first switching tube, and the second output end of the pulse width modulation controller is connected with the 3 rd pin of the second switching tube.
In the voltage stabilizing system of the MPCVD equipment microwave source, the filtering module comprises: a first resistor, a second resistor, a third resistor, a fourth resistor, a fifth resistor, a sixth resistor, a second capacitor, a third capacitor, a fourth capacitor, a fifth capacitor, a sixth capacitor, a seventh capacitor, an eighth capacitor, a second inductor, a third inductor and a fourth inductor;
One end of the second inductor is respectively connected with an A-phase electric interface of the power supply end, one end of the first resistor and one end of the second capacitor, one end of the third inductor is respectively connected with a B-phase electric interface of the power supply end, one end of the second resistor and one end of the third capacitor, one end of the fourth inductor is respectively connected with a C-phase electric interface of the power supply end, one end of the third resistor and one end of the fourth capacitor, the other end of the second inductor is respectively connected with one end of the rectifying and filtering module, one end of the fourth resistor and one end of the fifth capacitor, the other end of the third inductor is respectively connected with one end of the rectifying and filtering module, one end of the fifth resistor and one end of the sixth capacitor, and the other end of the fourth inductor is respectively connected with one end of the rectifying and filtering module, one end of the sixth resistor and one end of the seventh capacitor; the other end of the first resistor, the other end of the second capacitor, the other end of the second resistor, the other end of the third capacitor, the other end of the third resistor and the other end of the fourth capacitor are connected with each other; the other end of the fourth resistor, the other end of the fifth capacitor, the other end of the fifth resistor, the other end of the sixth capacitor, the other end of the sixth resistor, the other end of the seventh capacitor and one end of the eighth capacitor are connected with each other, and the other end of the eighth capacitor is grounded.
In the voltage stabilizing system of the MPCVD equipment microwave source, the rectifying and filtering module comprises: a third diode, a fourth diode, a fifth diode, a sixth diode, a seventh diode, an eighth diode, a fifth inductance, a sixth inductance, an eighth capacitance, a tenth capacitance, and an eleventh capacitance;
the anode of the third diode is respectively connected with the anode of the fourth diode, the other end of the second inductor, one end of the fourth resistor and one end of the fifth capacitor, the anode of the fifth diode is respectively connected with the anode of the sixth diode, the other end of the third inductor, one end of the fifth resistor and one end of the sixth capacitor, the anode of the seventh diode is respectively connected with the anode of the eighth diode, the other end of the fourth inductor, one end of the sixth resistor and one end of the seventh capacitor, the cathode of the third diode, the cathode of the seventh diode and one end of the fifth inductor are mutually connected, the cathode of the fourth diode, the cathode of the sixth diode and one end of the sixth inductor are mutually connected, the other end of the fifth inductor is mutually connected with one end of the eighth capacitor, the other end of the tenth capacitor and one end of the tenth capacitor are mutually connected with the voltage conversion module, the other end of the eighth inductor is mutually connected with the voltage conversion module, the voltage conversion module is mutually connected with the other end of the eighth inductor and the energy storage module.
In the voltage stabilizing method of the microwave source of the MPCVD equipment, the inversion module comprises: the switching tube control signal end, the third switching tube, the fourth switching tube, the fifth switching tube, the sixth switching tube, the ninth diode, the twelfth diode, the eleventh diode, the twelfth capacitor, the thirteenth capacitor, the fourteenth capacitor and the fifteenth capacitor;
the 2 nd pin of the third switching tube is respectively connected with the 2 nd pin of the fifth switching tube, the cathode of the eleventh diode, one end of the fourteenth capacitor, the cathode of the ninth diode, one end of the twelfth capacitor and the other end of the fifth inductor, the 1 st pin of the third switching tube is connected with the switching tube control signal end, and the 3 rd pin of the third switching tube is respectively connected with the 2 nd pin of the fourth switching tube, the anode of the ninth diode, the cathode of the tenth diode, the other end of the twelfth capacitor, one end of the thirteenth capacitor and the positive input end of the load end; the 1 st pin of the fourth switching tube is connected with the control signal end of the switching tube, and the 3 rd pin of the fourth switching tube is connected with the anode of the twelfth electrode tube, the other end of the thirteenth capacitor, the voltage conversion module and the other end of the sixth inductor; the 1 st pin of the fifth switching tube is connected with the switching tube control signal end, and the 3 rd pin of the fifth switching tube is respectively connected with the 2 nd pin of the sixth switching tube, the anode of the eleventh diode, the cathode of the twelfth diode, the other end of the fourteenth capacitor, one end of the fifteenth capacitor and the negative input end of the load end; the 1 st pin of the sixth switching tube is connected with the control signal end of the switching tube, and the 3 rd pin of the sixth switching tube is connected with the anode of the twelfth diode, the other end of the fifteenth capacitor, the voltage conversion module and the other end of the sixth inductor.
A voltage stabilizing method of an MPCVD apparatus microwave source based on the voltage stabilizing system of an MPCVD apparatus microwave source as described above, the voltage stabilizing method of an MPCVD apparatus microwave source comprising the steps of:
the filtering module performs filtering operation on the fifth voltage provided by the power supply end to obtain a filtered first voltage, and transmits the filtered first voltage to the rectifying and filtering module;
the rectification and filtering module performs rectification and filtering operation on the first voltage to obtain a second voltage, and transmits the second voltage to the voltage conversion module;
the voltage conversion module compares the second voltage with a preset rated voltage, generates a charging control signal or a discharging control signal according to a comparison result, and transmits the charging control signal or the discharging control signal to the energy storage module;
the energy storage module performs charge-discharge adjustment on the second voltage according to the charge control signal or the discharge control signal to obtain a third voltage, and transmits the third voltage to the inversion module;
the inversion module converts the third voltage into a fourth voltage and transmits the fourth voltage to the load terminal.
In the voltage stabilizing method of the microwave source of the MPCVD equipment, the voltage conversion module compares the second voltage with a preset rated voltage, generates a charging control signal or a discharging control signal according to a comparison result, and transmits the charging control signal or the discharging control signal to the energy storage module, and specifically includes:
the control unit compares the second voltage with the preset rated voltage;
if the control unit compares that the second voltage is smaller than the preset rated voltage, a first switch control signal is generated, and the control unit transmits the first switch control signal to the switch unit;
and if the control unit compares that the second voltage is not smaller than the preset rated voltage, generating a second switch control signal, and transmitting the second switch control signal to the switch unit by the control unit.
In the voltage stabilizing method of the microwave source of the MPCVD equipment, the energy storage module performs charge-discharge adjustment on the second voltage according to the charge control signal or the discharge control signal to obtain a third voltage, and transmits the third voltage to the inversion module, which specifically includes:
the energy storage module carries out charging adjustment on the second voltage according to the charging control signal to obtain a second voltage subjected to charging adjustment, and transmits the second voltage subjected to charging adjustment to the inversion module;
The energy storage module performs discharge adjustment on the second voltage according to the discharge control signal to obtain a second voltage after discharge adjustment, and transmits the second voltage after discharge adjustment to the inversion module; wherein the third voltage comprises: a second voltage after charge adjustment and a second voltage after discharge adjustment.
Compared with the prior art, the voltage stabilizing system and the voltage stabilizing method for the microwave source of the MPCVD equipment are provided, wherein the system is respectively connected with a power supply end and a load end, and a rectifying and filtering module in the system is used for rectifying and filtering the first voltage which is transmitted by the power supply end and is filtered, and transmitting the obtained second voltage to a voltage conversion module; the voltage conversion module is used for comparing the second voltage with a preset rated voltage and transmitting the generated charging control signal and discharging control signal to the energy storage module; the energy storage module is used for carrying out charge-discharge adjustment on the second voltage according to the charge control signal and the discharge control signal and transmitting the obtained third voltage to the inversion module; the inversion module is used for converting the third voltage into a fourth voltage and transmitting the fourth voltage to the load end. And comparing the second voltage with a preset rated voltage, and carrying out charge and discharge adjustment on the second voltage according to a comparison result, so as to stably output the voltage to ensure the electricity utilization safety.
Drawings
FIG. 1 is a block diagram of a preferred embodiment of a voltage stabilizing system for microwave sources of MPCVD apparatus according to the present invention;
FIG. 2 is a schematic diagram of a circuit structure of a voltage conversion module in a voltage stabilizing system of a microwave source of MPCVD equipment;
FIG. 3 is a schematic diagram of a circuit structure of a voltage stabilizing system of a microwave source of MPCVD equipment;
FIG. 4 is a flow chart of a preferred embodiment of a method for stabilizing voltage based on microwave sources of MPCVD equipment according to the present invention;
FIG. 5 is a flowchart of step S300 in a preferred embodiment of a method for stabilizing voltage based on microwave source of MPCVD equipment according to the present invention;
FIG. 6 is a functional flow chart of a preferred embodiment of a voltage stabilizing method based on microwave sources of MPCVD equipment provided by the invention;
fig. 7 is a flowchart of step S400 in a preferred embodiment of the voltage stabilizing method based on the microwave source of the MPCVD apparatus according to the present invention.
Reference numerals: 1: a voltage stabilizing system of a microwave source of the MPCVD equipment; 2: a power supply end; 3: a load end; 10: a filtering module; 20: a rectifying and filtering module; 30: a voltage conversion module; 31: a switching unit; 32: a control unit; 40: an inversion module; 50: an energy storage module; r1: a first resistor; r2: a second resistor; r3: a third resistor; r4: a fourth resistor; r5: a fifth resistor; r6: a sixth resistor; c1: a first capacitor; c2: a second capacitor; and C3: a third capacitor; and C4: a fourth capacitor; c5: a fifth capacitor; c6: a sixth capacitor; c7: a seventh capacitance; and C8: an eighth capacitor; c9: a ninth capacitor; c10: a tenth capacitor; c11: an eleventh capacitance; and C12: a twelfth capacitance; c13: a thirteenth capacitance; c14: a fourteenth capacitor; and C15: a fifteenth capacitor; l1: a first inductance; l2: a second inductor; l3: a third inductance; l4: a fourth inductance; l5: a fifth inductance; l6: a sixth inductance; d1: a first diode; d2: a second diode; d3: a third diode; d4: a fourth diode; d5: a fifth diode; d6: a sixth diode; d7: a seventh diode; d8: an eighth diode; d9: a ninth diode; d10: a twelfth pole tube; d11: an eleventh diode; d12: a twelfth diode; t1: a first switching tube; t2: a second switching tube; t3: a third switching tube; t4: a fourth switching tube; t5: a fifth switching tube; t6: and a sixth switching tube.
Detailed Description
In order to make the objects, technical solutions and effects of the present invention clearer and more specific, the present invention will be described in further detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless expressly stated otherwise, as understood by those skilled in the art. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present. Further, "connected" or "coupled" as used herein may include wirelessly connected or wirelessly coupled. The term "and/or" as used herein includes all or any element and all combination of one or more of the associated listed items.
It will be understood by those skilled in the art that all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs unless defined otherwise. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The invention provides a voltage stabilizing system and method for a microwave source of MPCVD equipment. The voltage conversion module is used for comparing the second voltage with a preset rated voltage to generate a charging control signal and a discharging control signal, and the energy storage module is used for carrying out charging and discharging adjustment on the second voltage according to the charging control signal and the discharging control signal so as to finally output a fourth voltage with a small fluctuation range to a load end, so that the stability of power supply is effectively improved, and the electricity safety is ensured.
The following description will describe the design scheme of the voltage stabilizing system of the microwave source of the MPCVD equipment through specific exemplary embodiments, and it should be noted that the following embodiments are only used for explaining the technical scheme of the invention, and are not limited in particular:
Referring to fig. 1, a voltage stabilizing system 1 of an MPCVD apparatus microwave source provided by the present invention is connected to a power supply end 2 and a load end 3, respectively, where the voltage stabilizing system 1 of the MPCVD apparatus microwave source includes:
the device comprises a rectification filter module 20, a voltage conversion module 30, an inversion module 40 and an energy storage module 50; the voltage conversion module 30 is respectively connected with the rectifying and filtering module 20, the inversion module 40 and the energy storage module 50; the rectifying and filtering module 20 is also connected with the inversion module 40; the inverter module 40 is also connected to the load terminal 3.
The rectifying and filtering module 20 is configured to rectify and filter the first voltage that is transmitted and filtered by the power supply terminal, and transmit the obtained second voltage to the voltage conversion module 30; the voltage conversion module 30 is configured to compare the second voltage with a preset rated voltage, generate a charging control signal or a discharging control signal according to a comparison result, and transmit the charging control signal or the discharging control signal to the energy storage module 50; the energy storage module 50 is configured to perform charge-discharge adjustment on the second voltage according to the charge control signal or the discharge control signal, and transmit the obtained third voltage to the inverter module 40; the inverter module 40 is configured to convert the third voltage into a fourth voltage, and transmit the fourth voltage to the load terminal 3.
The power supply end 2 is an interface of ac power in the city, the power supply end 2 is an anode power supply module, the energy storage module 50 is an energy storage device (may be a super capacitor or a high-power battery pack), the voltage conversion module 30 includes a bidirectional DC/DC converter and a control unit, and the preset rated voltage is set according to the input rated voltage of the anode (forward input end) of the load end 3, so that the main purpose is to provide a stable input voltage when the anode is powered.
Specifically, when the microwave source of the MPCVD apparatus is stabilized in the prior art, the problem that the power supply is unstable, which causes unsafe power consumption, or the conversion efficiency is low and the cost of the stabilizing mode is high is easily caused. Then, to integrate the voltage stabilizing cost and feasibility, the invention designs a voltage stabilizing system 1 of an MPCVD equipment microwave source between a power supply bus and an anode power supply module (a load end 3) of a microwave power supply, wherein the voltage stabilizing system 1 of the MPCVD equipment microwave source realizes the process of stabilizing the voltage of the equipment microwave source as follows:
firstly, filtering operation is performed on the commercial alternating current provided by the power supply terminal 2 (commercial alternating current), so as to obtain a filtered first voltage. Then, the rectifying and filtering module 20 rectifies and filters the filtered first voltage to obtain the second voltage, and the rectifying and filtering module 20 transmits the second voltage to the voltage conversion module 30; the voltage conversion module 30 compares the second voltage with the preset rated voltage, generates the charging control signal or the discharging control signal according to different comparison results, and transmits the charging control signal or the discharging control signal to the energy storage module 50.
Next, the energy storage module 50 performs charge-discharge adjustment on the second voltage according to the charge control signal or the discharge control signal, and transmits the obtained third voltage to the inverter module 40. Finally, the inverter module 40 inverts the third voltage of the direct current into the fourth voltage of the alternating current, and transmits the fourth voltage to the load terminal 3.
That is, the voltage conversion module 30 compares the rectified voltage (second voltage) with the preset rated voltage, when the rectified voltage is higher than the preset rated voltage, the voltage at two ends of the energy storage device (energy storage module 50) is lower than the whole voltage, the charge amount of the energy storage device is in a low level, at this time, the current is transmitted from the main circuit to the energy storage device, the energy storage device is in a charging state, and the bidirectional DC/DC converter is in a step-down chopper circuit working state, so that the voltage of the anode power supply end 2 (anode power supply module) of the input microwave source is reduced. When the rectified voltage is lower than the preset rated voltage, the voltage at two ends of the energy storage device is higher than the whole voltage of the circuit, at the moment, the current is transmitted from the energy storage device to the main circuit, the energy storage device is in a discharging state, the bidirectional DC/DC converter is in a boost chopper circuit working state, so that the voltage of the anode power supply end 2 of the input microwave source is increased, the fluctuation range of the input voltage of the load end 3 is regulated, the input of the anode power supply module of the microwave source is kept to be in small fluctuation near the rated value, the equipment shutdown problem caused by voltage fluctuation is solved, and the equipment can normally operate.
In the invention, the voltage conversion module 30 compares the second voltage with the preset rated voltage to generate the charge control signal or the discharge control signal, and the energy storage module 50 performs charge and discharge adjustment on the second voltage according to the charge control signal or the discharge control signal, that is, the voltage is compensated during sag through the matching of the energy storage device and the bidirectional DC/DC converter, and is reduced during overshoot, so as to maintain the stability of the voltage, thereby maintaining the input voltage of the load terminal 3 within a certain range, reducing the voltage fluctuation, maintaining the stability of the voltage, further guaranteeing the electricity use safety, and greatly improving the problem of abnormal influence of the voltage fluctuation on equipment by a low-cost method.
Still further, the voltage stabilizing system 1 of the microwave source of the MPCVD apparatus further comprises: a filtering module 10; the filtering module 10 is respectively connected with the rectifying and filtering module 20 and the power supply end 2; the filtering module 10 is configured to filter the fifth voltage provided by the power supply terminal 2 to obtain a filtered first voltage, and transmit the filtered first voltage to the rectifying and filtering module 20.
Specifically, the power supply terminal 2 (ac mains) provides a fifth ac voltage to the filtering module 10, the filtering module 10 performs a filtering operation on the fifth ac voltage to obtain a filtered first voltage, and the filtering module 10 transmits the filtered first voltage to the rectifying and filtering module 20.
Still further, the voltage conversion module 30 includes: a switching unit 31 and a control unit 32; the switch unit 31 is respectively connected with the control unit 32, the rectifying and filtering module 20, the inversion module 40 and the energy storage module 50, and the control unit 32 is also respectively connected with the rectifying and filtering module 20 and the inversion module 40; the control unit 32 is configured to compare the second voltage with the preset rated voltage, and when the second voltage is compared to be smaller than the preset rated voltage, the control unit 32 transmits the generated first switch control signal to the switch unit 31, and when the second voltage is compared to be not smaller than the preset rated voltage, the control unit 32 transmits the generated second switch control signal to the switch unit 31; the switching unit 31 is configured to output the charge control signal to the energy storage module 50 according to the first switch control signal, and output the discharge control signal to the energy storage module 50 according to the second switch control signal.
Specifically, after the rectifying and filtering module 20 rectifies and filters the filtered first voltage to obtain the second voltage, the rectifying and filtering module 20 transmits the second voltage to the control unit 32. Then, the control unit 32 compares the magnitude of the second voltage with the magnitude of the preset rated voltage, to obtain a comparison result: if the second voltage is smaller than the preset rated voltage, the control unit 32 generates the first switch control signal and transmits the first switch control signal to the switch unit 31; and if the second voltage is not less than the preset rated voltage, the control unit 32 generates the second switch control signal and transmits the second switch control signal to the switch unit 31.
Next, the switch unit 31 outputs the charging control signal according to the first switch control signal and outputs the discharging control signal according to the second switch control signal, and the switch unit 31 further sends the charging control signal or the discharging control signal to the energy storage module 50, so that the energy storage module 50 performs charging/discharging adjustment on the second voltage according to the charging control signal or the discharging control signal.
In the present invention, the control unit 32 compares the second voltage with the preset rated voltage to generate the first switch control signal or the second switch control signal, the switch unit 31 generates a corresponding charge control signal or the discharge control signal according to the first switch control signal or the second switch control signal, and transmits the charge control signal or the discharge control signal to the energy storage module 50, so that the energy storage module 50 performs charge and discharge adjustment on the second voltage according to the charge control signal or the discharge control signal, that is, the control unit 32 compares the second voltage with the preset rated voltage to control the switch on state of the switch unit 31, thereby controlling the energy storage module 50 to perform charge and discharge accordingly, and further adjusting the voltage input to the load end 3.
Still further, the switching unit 31 includes: the first switch tube T1, the second switch tube T2, the first diode D1, the second diode D2, the first capacitor C1 and the first inductor L1; the 1 st pin of the first switching tube T1 is respectively connected with the cathode of the first diode D1, one end of the first capacitor C1 and the rectifying and filtering module 20, the 2 nd pin of the first switching tube T1 is connected with the anode of the first diode D1, the cathode of the second diode D2, the 1 st pin of the second switching tube T2 and one end of the first inductor L1 in pairs, and the 3 rd pin of the first switching tube T1 is connected with the control unit 32; the second pin 2 of the second switching tube T2 is connected to the anode of the second diode D2, the energy storage module 50, the other end of the first capacitor C1, the rectifying and filtering module 20 and the inverting module 40, respectively; the 3 rd pin of the second switching tube T2 is connected to the control unit 32.
Still further, the control unit 32 includes: an input interface for presetting rated voltage, a multiplier, a comparator, a voltage proportional integral regulator, a signal arithmetic unit and a pulse width modulation controller; the multiplier, the voltage proportional integral regulator, the signal arithmetic unit and the input end of the pulse width modulation controller are sequentially connected, the comparator is also respectively connected with the signal arithmetic unit, the rectifying and filtering module 20, the inversion module 40 and the input interface of the preset rated voltage, and the multiplier is also respectively connected with the input interface of the preset rated voltage, the rectifying and filtering module 20 and the inversion module 40; the first output end of the pulse width modulation controller is connected with the 3 rd pin of the first switching tube T1, and the second output end of the pulse width modulation controller is connected with the 3 rd pin of the second switching tube T2.
The schematic circuit structure of the voltage conversion module 30 is shown in fig. 2, the switching unit 31 and the control unit 32 form a bidirectional DC/DC converter, which may also be referred to as a chopper circuit, and the bidirectional DC/DC converter is regulated and controlled by an outer ring voltage control strategy to set a preset rated voltage V ref Preset rated voltage V ref Then is rated by the presetThe input interface of the voltage is input to the multiplier, and the bidirectional DC/DC converter plays a role of boosting and boosting.
The triode is used as a switching device, and the voltage is generally increased or decreased by adjusting the on and off time of the triode to change the duty ratio; the diode plays a role of follow current, and simultaneously, as a larger transient reverse current is generated when the triode is turned off, the parallel reverse diode can inhibit the reverse current; the capacitor and the inductor are energy storage elements, and the chopper circuit regulates and controls the voltage by controlling the charge and discharge of the energy storage elements.
Specifically, after the rectifying and filtering module 20 rectifies and filters the filtered first voltage to obtain the second voltage, the rectifying and filtering module 20 first rectifies the second voltage V DC Transmitting to the multiplier and the comparator, the comparator outputting a predetermined rated voltage V ref And an output voltage (second voltage V) on a dc bus (two outputs of the rectifying and filtering module 20) DC ) The comparison is performed to control the current flow, and the inflow and outflow of the current are controlled.
Then, the deviation is calculated and adjusted using the multiplier and the voltage proportional integral regulator: the comparison result is fed into a voltage PI regulator (voltage proportional integral regulator, which is a linear control that constitutes a control deviation from the actual output value based on a given value.
Secondly, the proportion and the integral of the deviation are combined linearly to form a control quantity, the controlled object is controlled), the signal is processed by the signal arithmetic unit, and then a switch control signal (the first switch control signal and the second switch control signal) is output by a PWM controller (pulse width modulation controller) to control the on-off of the first switch tube T1 and the second switch tube T2, so that the switch on-state of the switch unit 31 is controlled, the charging control signal or the discharging control signal is generated to adjust the second voltage, and the voltage value finally input to the load end 3 always fluctuates around the preset rated voltage (the preset rated voltage) in a small amplitude. In the bidirectional DC/DC converter, the input voltage can be increased or decreased by adjusting the duty ratio of the charge/discharge time of the energy storage element, and in this way, the cost is low and the anti-interference capability is high.
Then, the process of on-off controlling the first switching tube T1 and the second switching tube T2 is implemented as follows:
the multiplier will preset rated voltage V ref And an output voltage (second voltage V) on a dc bus (positive output of the rectifying and filtering module 20) DC ) Comparison is performed:
when the second voltage V DC Higher than the preset rated voltage V ref At this time, the first switching tube T1 and the second switching tube T2 are controlled to be closed, and after a period of time, the second switching tube T2 is controlled to be opened, and then the energy stored in the first capacitor C1 is released to charge the energy storage module 50. At this time, the bidirectional DC/DC converter is in a buck mode.
When the second voltage V DC Below said preset nominal voltage V ref At this time, the first switching tube T1 is controlled to be opened and the second switching tube T2 is controlled to be closed, the second voltage is used for charging the first inductor L1, then, the first switching tube T1 is controlled to be closed and the second switching tube T2 is controlled to be opened, and the electric energy stored in the first inductor L1 can be released to the direct current bus to achieve the effect of discharging, and the charging and discharging time can be adjusted. At this time, the bidirectional DC/DC converter is in a boost operating mode.
In the invention, the energy storage device (the energy storage module 50) is charged when the voltage overshoots; when the voltage is reduced, the energy storage device discharges, so that the input voltage of the microwave source anode power supply module is maintained within a certain range, and a series of problems caused by voltage fluctuation are reduced.
Still further, the filtering module 10 includes: the first resistor R1, the second resistor R2, the third resistor R3, the fourth resistor R4, the fifth resistor R5, the sixth resistor R6, the second capacitor C2, the third capacitor C3, the fourth capacitor C4, the fifth capacitor C5, the sixth capacitor C6, the seventh capacitor C7, the eighth capacitor C8, the second inductor L2, the third inductor L3 and the fourth inductor L4.
One end of the second inductor L2 is respectively connected with an a-phase electrical interface of the power supply end 2, one end of the first resistor R1 and one end of the second capacitor C2, one end of the third inductor L3 is respectively connected with a B-phase electrical interface of the power supply end 2, one end of the second resistor R2 and one end of the third capacitor C3, one end of the fourth inductor L4 is respectively connected with a C-phase electrical interface of the power supply end 2, one end of the third resistor R3 and one end of the fourth capacitor C4, the other end of the second inductor L2 is respectively connected with one end of the rectifying and filtering module 20, one end of the fourth resistor R4 and one end of the fifth capacitor C5, the other end of the third inductor L3 is respectively connected with one end of the rectifying and filtering module 20, one end of the fifth resistor R5 and one end of the sixth capacitor C6, and the other end of the fourth inductor L4 is respectively connected with one end of the rectifying and filtering module 20, one end of the sixth resistor R6 and the first end of the seventh capacitor C7; the other end of the first resistor R1, the other end of the second capacitor C2, the other end of the second resistor R2, the other end of the third capacitor C3, the other end of the third resistor R3 and the other end of the fourth capacitor C4 are connected with each other; the other end of the fourth resistor R4, the other end of the fifth capacitor C5, the other end of the fifth resistor R5, the other end of the sixth capacitor C6, the other end of the sixth resistor R6, the other end of the seventh capacitor C7 and one end of the eighth capacitor C8 are connected to each other, and the other end of the eighth capacitor C8 is grounded.
Specifically, referring to fig. 3, the first resistor R1 and the second capacitor C2, the second resistor R2 and the third capacitor C3, the third resistor R3 and the fourth capacitor C4, the fourth resistor R4 and the fifth capacitor C5, the fifth resistor R5 and the sixth capacitor C6, and the sixth resistor R6 and the seventh capacitor C7 are combined to form an RC filter unit for performing RC filtering, that is, each resistor is combined with the capacitor group connected in parallel to each resistor and forms an RC filter unit, and the inductor is combined with the capacitor connected in series to each resistor to form an LC filter unit for performing LC filtering.
Still further, the rectifying and filtering module 20 includes: the third diode D3, the fourth diode D4, the fifth diode D5, the sixth diode D6, the seventh diode D7, the eighth diode D8, the fifth inductance L5, the sixth inductance L6, the eighth capacitance C8, the tenth capacitance C10, and the eleventh capacitance C11.
The anodes of the third diode D3 are respectively connected with the anode of the fourth diode D4, the other end of the second inductor L2, one end of the fourth resistor R4 and one end of the fifth capacitor C5, the anodes of the fifth diode D5 are respectively connected with the anode of the sixth diode D6, the other end of the third inductor L3, one end of the fifth resistor R5 and one end of the sixth capacitor C6, the anodes of the seventh diode D7 are respectively connected with the anode of the eighth diode D8, the other end of the fourth inductor L4, one end of the sixth resistor R6 and one end of the seventh capacitor C7, the cathodes of the third diode D3, the cathodes of the fifth diode D5, the cathodes of the seventh diode D7 and one end of the fifth inductor L5 are respectively connected with each other, the cathodes of the sixth diode D6, the cathodes of the eighth diode D8, the voltage conversion module C8, the other end of the capacitor C5 are respectively connected with the other end of the eighth inductor L8, the voltage conversion module C5 and the other end of the capacitor C5 are respectively connected with the other end of the eighth inductor C8, the voltage conversion module C10 and the other end of the capacitor C5 are respectively connected with the other end of the capacitor C5.
Specifically, in the filter circuit (filter module 10), the capacitor has high impedance under the low-frequency signal, and has the function of passing high-frequency resistance and low frequency; the inductor has high impedance under high frequency and has the function of passing low frequency resistance high frequency; the parameters of capacitance and resistance can be adjusted to select the filtering of harmonics by the desired frequency electrical signal.
The third diode D3 and the fourth diode D4, the fifth diode D5 and the sixth diode D6, the seventh diode D7 and the eighth diode D8 are combined to form a three-phase diode bridge rectifier circuit for converting the alternating current into the direct current. And the fifth inductor L5 and the sixth inductor L6 are respectively combined with the eighth capacitor C8, the tenth capacitor C10 and the eleventh capacitor C11 to form an LC filter circuit, and are configured to perform a second filtering on the rectified dc to obtain a dc (the second voltage) after the second filtering.
Still further, the inverter module 40 includes: the switching tube control signal terminal P, the third switching tube T3, the fourth switching tube T4, the fifth switching tube T5, the sixth switching tube T6, the ninth diode D9, the tenth diode D10, the eleventh diode D11, the twelfth diode D12, the twelfth capacitor C12, the thirteenth capacitor C13, the fourteenth capacitor C14 and the fifteenth capacitor C15.
A 2 nd pin of the third switching tube T3 is connected to a 2 nd pin of the fifth switching tube T5, a cathode of the eleventh diode D11, one end of the fourteenth capacitor C14, a cathode of the ninth diode D9, one end of the twelfth capacitor C12 and the other end of the fifth inductor L5, a 1 st pin of the third switching tube T3 is connected to the switching tube control signal end P, and a 3 rd pin of the third switching tube T3 is connected to a 2 nd pin of the fourth switching tube T4, an anode of the ninth diode D9, a cathode of the tenth diode D10, the other end of the twelfth capacitor C12, one end of the thirteenth capacitor C13 and a positive input end of the load end 3, respectively; the 1 st pin of the fourth switching tube T4 is connected with the switching tube control signal end P, and the 3 rd pin of the fourth switching tube T4 is connected with the anode of the twelfth electrode tube D10, the other end of the thirteenth capacitor C13, the voltage conversion module 30 and the other end of the sixth inductor L6; the 1 st pin of the fifth switching tube T5 is connected with the switching tube control signal end P, and the 3 rd pin of the fifth switching tube T5 is connected with the 2 nd pin of the sixth switching tube T6, the anode of the eleventh diode D11, the cathode of the twelfth diode D12, the other end of the fourteenth capacitor C14, one end of the fifteenth capacitor C15 and the negative input end of the load end 3, respectively; the 1 st pin of the sixth switching tube T6 is connected to the switching tube control signal end P, and the 3 rd pin of the sixth switching tube T6 is connected to the anode of the twelfth diode D12, the other end of the fifteenth capacitor C15, the voltage conversion module 30, and the other end of the sixth inductor L6.
The third switching tube T3, the fourth switching tube T4, the ninth diode D9 and the tenth diode D10, and the fifth switching tube T5, the sixth switching tube T6, the eleventh diode D11 and the twelfth diode D12 respectively form two inverter circuits for inverting a third voltage of the direct current to obtain the fourth voltage; the ninth diode D9, the tenth diode D10, the eleventh diode D11 and the twelfth diode D12 are all freewheeling diodes, and are used for preventing abrupt changes of voltage and current in the circuit and providing a power consumption path for the reverse electromotive force; the twelfth capacitance C12, the thirteenth capacitance C13, the fourteenth capacitance C14, and the fifteenth capacitance C15 are filter capacitances.
Specifically, when the processed third voltage passes through the inverter circuit, the power device is controlled by: the signal of the gate of a switching transistor, e.g. an IGBT (IGBT: insulated Gate Bipolar Transistor, chinese name insulated gate transistor) or a MOSFET (MOSFET: metal Oxide Semiconductor Field Effect Transistor, chinese name MOS transistor), can change the on-state of the power device and ultimately affect the direction and path of current flow, and in combination with a freewheeling diode can effect inversion of dc power to ac power.
Further, referring to fig. 4, the method for stabilizing the microwave source of the MPCVD apparatus based on the stabilizing system 1 of the microwave source of the MPCVD apparatus according to the present invention includes the following steps:
and S100, the filtering module 10 performs filtering operation on the fifth voltage provided by the power supply end 2 to obtain a filtered first voltage, and transmits the filtered first voltage to the rectifying and filtering module 20.
Specifically, firstly, the utility ac (power supply end 2) provides the fifth voltage to the filtering module 10, the filtering module 10 performs a filtering operation on the fifth voltage to obtain a filtered first voltage, and the filtering module 10 transmits the filtered first voltage to the rectifying and filtering module 20. The filtering module 10 is used for filtering the fifth voltage, so as to effectively filter out multiple harmonics and perform reactive compensation.
Further, S200, the rectifying and filtering module 20 rectifies and filters the first voltage to obtain a second voltage, and transmits the second voltage to the voltage conversion module 30;
specifically, after the filtering module 10 transmits the filtered first voltage to the rectifying and filtering module 20, the rectifying and filtering module 20 rectifies and filters the first voltage to obtain the second voltage, and the rectifying and filtering module 20 transmits the second voltage to the voltage conversion module 30. The rectifying and filtering module 20 converts the alternating voltage with positive and negative changes into unidirectional pulsating voltage, and further filters the unidirectional pulsating voltage, so that harmonic waves are further filtered, and the output voltage is more stable.
Further, S300, the voltage conversion module 30 compares the second voltage with a preset rated voltage, generates a charging control signal or a discharging control signal according to the comparison result, and transmits the charging control signal or the discharging control signal to the energy storage module 50.
Specifically, after the rectifying and filtering module 20 transmits the second voltage to the voltage conversion module 30, the voltage conversion module 30 compares the second voltage with the preset rated voltage, generates the charging control signal or the discharging control signal according to the comparison result, and transmits the charging control signal or the discharging control signal to the energy storage module 50, so that the energy storage module 50 performs charging and discharging according to the charging control signal or the discharging control signal, and finally adjusts the magnitude of the second voltage, so that the voltage input to the load terminal 3 is adapted to the rated input voltage of the load terminal 3.
Still further, referring to fig. 5, fig. 5 is a flowchart of step S300 in fig. 4, where S300, the voltage conversion module 30 compares the second voltage with a preset rated voltage, generates a charging control signal or a discharging control signal according to a comparison result, and transmits the charging control signal or the discharging control signal to the energy storage module 50, and specifically includes:
S310, the control unit 32 compares the second voltage with the preset rated voltage;
s320, if the control unit 32 compares that the second voltage is smaller than the preset rated voltage, a first switch control signal is generated, and the control unit 32 transmits the first switch control signal to the switch unit 31;
s330, the switch unit 31 outputs the charging control signal to the energy storage module 50 according to the first switch control signal;
s340, if the control unit 32 compares that the second voltage is not less than the preset rated voltage, generating a second switch control signal, and transmitting the second switch control signal to the switch unit 31 by the control unit 32;
s350, the switching unit 31 outputs the discharge control signal to the energy storage module 50 according to the second switch control signal.
Specifically, referring to fig. 6, after the rectifying and filtering module 20 transmits the second voltage to the control unit 32, the control unit 32 compares the dc bus voltage (the output voltage of the two ends of the rectifying and filtering module 20, that is, the second voltage) with the preset rated voltage, and determines whether the voltage is an overvoltage or an undervoltage when the two voltages deviate from each other: when the rectified voltage is higher than the preset rated voltage, that is, the second voltage is smaller than the preset rated voltage, the control unit 32 generates a first switch control signal and transmits the first switch control signal to the switch unit 31, and the switch unit 31 outputs the charge control signal to the energy storage module 50 according to the first switch charge control signal, so that the energy storage module 50 adjusts the second voltage according to the charge control signal.
However, when the rectified voltage is higher than the preset rated voltage, that is, the second voltage is not lower than the preset rated voltage, the control unit 32 transmits a generated second switch control signal to the switch unit 31, and the switch unit 31 outputs the charge control signal to the energy storage module 50 according to the first switch charge control signal, so that the energy storage module 50 adjusts the second voltage according to the discharge control signal.
Specifically, in other embodiments of the present invention, the following variant implementation schemes of the voltage stabilizing method of the MPCVD apparatus microwave source may also exist:
1 changing the predetermined rated voltage to a predetermined range, such as a threshold for the operation of the energy storage device, assuming that the upper threshold is set to be V DCH The lower threshold is V DCL The rectified input voltage (second voltage) is V DC 。
When V is DCL ≤V DC ≤V DCH When the energy storage device is not operated.
When V is DC ＜V DCL When the bidirectional DC/DC converter operates in a boost operating mode, the energy storage device is discharged.
When V is DC ＞V DCL When the bidirectional DC/DC converter operates in a step-down mode, the energy storage device is charged.
2. And optimizing the energy storage device. The energy storage device may be a supercapacitor, a battery pack, or a lithium battery-supercapacitor hybrid energy storage device, or employ multiple battery packs to coordinate operation, or the like.
3. The DC/DC converter may be replaced by a direct current transformer to achieve voltage boosting and lowering, but the circuit cost may be higher.
Further, referring to fig. 4, in S400, the energy storage module 50 performs charge-discharge adjustment on the second voltage according to the charge control signal or the discharge control signal to obtain a third voltage, and transmits the third voltage to the inverter module 40.
Specifically, after the voltage conversion module 30 transmits the charge control signal or the discharge control signal to the energy storage module 50, the energy storage module 50 performs charge-discharge adjustment on the second voltage according to the charge control signal or the discharge control signal to obtain the third voltage, that is, the energy storage module 50 performs charge-discharge adjustment according to the comparison result, so as to adjust the second voltage, thereby effectively performing feedback adjustment on the second voltage, so that the fluctuation range of the second voltage is small, that is, the fluctuation range of the input voltage of the load end 3 is small, which is conducive to the stability of the input voltage, and further ensures the power consumption safety.
Further, referring to fig. 7, fig. 7 is a specific flowchart of step S400 in fig. 4 provided by the present invention, in which S400, the energy storage module 50 performs charge-discharge adjustment on the second voltage according to the charge control signal or the discharge control signal to obtain a third voltage, and transmits the third voltage to the inverter module 40, which specifically includes:
S410, the energy storage module 50 performs charging adjustment on the second voltage according to the charging control signal to obtain a second voltage after charging adjustment, and transmits the second voltage after charging adjustment to the inversion module 40;
s420, the energy storage module 50 performs discharge adjustment on the second voltage according to the discharge control signal to obtain a second voltage after discharge adjustment, and transmits the second voltage after discharge adjustment to the inversion module 40; wherein the third voltage comprises: a second voltage after charge adjustment and a second voltage after discharge adjustment.
Specifically, as shown in fig. 6, after the voltage conversion module 30 transmits the charging control signal to the energy storage module 50, the energy storage module 50 performs charging adjustment on the second voltage according to the charging control signal to obtain a second voltage after charging adjustment, and transmits the second voltage after charging adjustment to the inverter module 40, that is, at this time, the energy storage device (energy storage module 50) is in an overvoltage state, charges the energy storage device, the input voltage (the second voltage) is reduced, and then, it is determined whether the rectified voltage is equal to the preset rated voltage.
However, after the voltage conversion module 30 transmits the charge control signal to the energy storage module 50, the energy storage module 50 performs discharge adjustment on the second voltage according to the discharge control signal, so as to obtain a second voltage after discharge adjustment, and transmits the second voltage after discharge adjustment to the inverter module 40, that is, at this time, the energy storage device is in an under-voltage state, at this time, the energy storage device performs discharge, the input voltage increases, and then, it is similarly determined whether the rectified voltage is equal to the preset rated voltage. And finally, finishing the adjustment of the rectified voltage when the rectified voltage is equal to the preset rated voltage, otherwise, continuing to carry out charge-discharge adjustment on the second voltage.
Further, referring to fig. 4, S500, the inverter module 40 converts the third voltage into a fourth voltage, and transmits the fourth voltage to the load terminal 3.
Specifically, after the energy storage module 50 transmits the third voltage to the inverter module 40, the inverter module 40 inverts the third voltage of the direct current into the fourth voltage of the alternating current and transmits the fourth voltage to the load terminal 3, thereby providing the input voltage to the load terminal 3.
In summary, according to the voltage stabilizing system and method for the microwave source of the MPCVD equipment provided by the invention, the system is respectively connected with the power supply end and the load end, and the rectifying and filtering module in the system is used for rectifying and filtering the first voltage transmitted by the power supply end and filtered, and transmitting the obtained second voltage to the voltage conversion module; the voltage conversion module is used for comparing the second voltage with a preset rated voltage and transmitting the generated charging control signal and discharging control signal to the energy storage module; the energy storage module is used for carrying out charge-discharge adjustment on the second voltage according to the charge control signal and the discharge control signal and transmitting the obtained third voltage to the inversion module; the inversion module is used for converting the third voltage into a fourth voltage and transmitting the fourth voltage to the load end. And comparing the second voltage with a preset rated voltage, and carrying out charge and discharge adjustment on the second voltage according to a comparison result, so as to stably output the voltage to ensure the electricity utilization safety.
It will be understood that equivalents and modifications will occur to those skilled in the art in light of the present invention and their spirit, and all such modifications and substitutions are intended to be included within the scope of the present invention as defined in the following claims.
Claims (8)
1. The utility model provides a steady voltage system of MPCVD equipment microwave source, is connected with power supply end and load end respectively, its characterized in that, MPCVD equipment microwave source's steady voltage system includes:
the device comprises a rectification filtering module, a voltage conversion module, an inversion module and an energy storage module; the voltage conversion module is respectively connected with the rectifying and filtering module, the inversion module and the energy storage module; the rectification filter module is also connected with the inversion module; the inversion module is also connected with the load end;
the rectification filter module is used for rectifying and filtering the first voltage which is transmitted by the power supply end and is filtered, and transmitting the obtained second voltage to the voltage conversion module; the voltage conversion module is used for comparing the second voltage with a preset rated voltage, generating a charging control signal or a discharging control signal according to a comparison result, and transmitting the charging control signal or the discharging control signal to the energy storage module; the energy storage module is used for carrying out charge and discharge adjustment on the second voltage according to the charge control signal or the discharge control signal, and transmitting the obtained third voltage to the inversion module; the inversion module is used for converting the third voltage into a fourth voltage and transmitting the fourth voltage to the load end;
The preset rated voltage is in a preset range, wherein the energy storage module does not act when the second voltage is in the preset range;
the voltage conversion module includes: a switching unit and a control unit; the switch unit is respectively connected with the control unit, the rectifying and filtering module, the inversion module and the energy storage module, and the control unit is also respectively connected with the rectifying and filtering module and the inversion module; the control unit is used for comparing the second voltage with the preset rated voltage, transmitting the generated first switch control signal to the switch unit when the second voltage is smaller than the preset rated voltage, and transmitting the generated second switch control signal to the switch unit when the second voltage is not smaller than the preset rated voltage; the switch unit is used for outputting the charging control signal to the energy storage module according to the first switch control signal and outputting the discharging control signal to the energy storage module according to the second switch control signal;
the switching unit includes: the first switch tube, the second switch tube, the first diode, the second diode, the first capacitor and the first inductor;
The 1 st pin of the first switching tube is respectively connected with the cathode of the first diode, one end of the first capacitor and the rectifying and filtering module, the 2 nd pin of the first switching tube is connected with the anode of the first diode, the cathode of the second diode, the 1 st pin of the second switching tube and one end of the first inductor in pairs, and the 3 rd pin of the first switching tube is connected with the control unit; the 2 nd pin of the second switching tube is respectively connected with the anode of the second diode, the energy storage module, the other end of the first capacitor, the rectifying and filtering module and the inversion module; the 3 rd pin of the second switching tube is connected with the control unit;
one end of the first capacitor and the 1 st pin of the first switching tube are connected to a rectifying and filtering module in a sharing mode, and the other end of the first capacitor and the 2 nd pin of the second switching tube are connected to a connecting path of the rectifying and filtering module and the inversion module in a sharing mode;
the control unit includes: an input interface for presetting rated voltage, a multiplier, a comparator, a voltage proportional integral regulator, a signal arithmetic unit and a pulse width modulation controller; the multiplier, the voltage proportional integral regulator, the signal arithmetic unit and the input end of the pulse width modulation controller are sequentially connected, the comparator is also respectively connected with the signal arithmetic unit, the rectifying and filtering module, the inversion module and the input interface of the preset rated voltage, and the multiplier is also respectively connected with the input interface of the preset rated voltage, the rectifying and filtering module and the inversion module; the first output end of the pulse width modulation controller is connected with the 3 rd pin of the first switching tube, and the second output end of the pulse width modulation controller is connected with the 3 rd pin of the second switching tube;
The rectifying and filtering module transmits the second voltage to the multiplier and the comparator.
2. The system for stabilizing the microwave source of an MPCVD apparatus according to claim 1, wherein the system for stabilizing the microwave source of an MPCVD apparatus further comprises: a filtering module; the filtering module is respectively connected with the rectifying and filtering module and the power supply end; the filtering module is used for filtering the fifth voltage provided by the power supply end to obtain a filtered first voltage, and transmitting the filtered first voltage to the rectifying and filtering module.
3. The system for stabilizing microwave source of MPCVD apparatus according to claim 2, wherein the filtering module comprises: a first resistor, a second resistor, a third resistor, a fourth resistor, a fifth resistor, a sixth resistor, a second capacitor, a third capacitor, a fourth capacitor, a fifth capacitor, a sixth capacitor, a seventh capacitor, an eighth capacitor, a second inductor, a third inductor and a fourth inductor;
one end of the second inductor is respectively connected with an A-phase electric interface of the power supply end, one end of the first resistor and one end of the second capacitor, one end of the third inductor is respectively connected with a B-phase electric interface of the power supply end, one end of the second resistor and one end of the third capacitor, one end of the fourth inductor is respectively connected with a C-phase electric interface of the power supply end, one end of the third resistor and one end of the fourth capacitor, the other end of the second inductor is respectively connected with one end of the rectifying and filtering module, one end of the fourth resistor and one end of the fifth capacitor, the other end of the third inductor is respectively connected with one end of the rectifying and filtering module, one end of the fifth resistor and one end of the sixth capacitor, and the other end of the fourth inductor is respectively connected with one end of the rectifying and filtering module, one end of the sixth resistor and one end of the seventh capacitor; the other end of the first resistor, the other end of the second capacitor, the other end of the second resistor, the other end of the third capacitor, the other end of the third resistor and the other end of the fourth capacitor are connected with each other; the other end of the fourth resistor, the other end of the fifth capacitor, the other end of the fifth resistor, the other end of the sixth capacitor, the other end of the sixth resistor, the other end of the seventh capacitor and one end of the eighth capacitor are connected with each other, and the other end of the eighth capacitor is grounded.
4. A voltage stabilizing system for microwave source of MPCVD equipment according to claim 3, wherein the rectifying and filtering module comprises: a third diode, a fourth diode, a fifth diode, a sixth diode, a seventh diode, an eighth diode, a fifth inductance, a sixth inductance, an eighth capacitance, a tenth capacitance, and an eleventh capacitance;
the anode of the third diode is respectively connected with the anode of the fourth diode, the other end of the second inductor, one end of the fourth resistor and one end of the fifth capacitor, the anode of the fifth diode is respectively connected with the anode of the sixth diode, the other end of the third inductor, one end of the fifth resistor and one end of the sixth capacitor, the anode of the seventh diode is respectively connected with the anode of the eighth diode, the other end of the fourth inductor, one end of the sixth resistor and one end of the seventh capacitor, the cathode of the third diode, the cathode of the seventh diode and one end of the fifth inductor are mutually connected, the cathode of the fourth diode, the cathode of the sixth diode and one end of the sixth inductor are mutually connected, the other end of the fifth inductor is mutually connected with one end of the eighth capacitor, the other end of the tenth capacitor and one end of the tenth capacitor are mutually connected with the voltage conversion module, the other end of the eighth inductor is mutually connected with the voltage conversion module, the voltage conversion module is mutually connected with the other end of the eighth inductor and the energy storage module.
5. The system for stabilizing microwave source of MPCVD apparatus of claim 4, wherein the inversion module comprises: the switching tube control signal end, the third switching tube, the fourth switching tube, the fifth switching tube, the sixth switching tube, the ninth diode, the twelfth diode, the eleventh diode, the twelfth capacitor, the thirteenth capacitor, the fourteenth capacitor and the fifteenth capacitor;
the 2 nd pin of the third switching tube is respectively connected with the 2 nd pin of the fifth switching tube, the cathode of the eleventh diode, one end of the fourteenth capacitor, the cathode of the ninth diode, one end of the twelfth capacitor and the other end of the fifth inductor, the 1 st pin of the third switching tube is connected with the switching tube control signal end, and the 3 rd pin of the third switching tube is respectively connected with the 2 nd pin of the fourth switching tube, the anode of the ninth diode, the cathode of the tenth diode, the other end of the twelfth capacitor, one end of the thirteenth capacitor and the positive input end of the load end; the 1 st pin of the fourth switching tube is connected with the control signal end of the switching tube, and the 3 rd pin of the fourth switching tube is connected with the anode of the twelfth electrode tube, the other end of the thirteenth capacitor, the voltage conversion module and the other end of the sixth inductor; the 1 st pin of the fifth switching tube is connected with the switching tube control signal end, and the 3 rd pin of the fifth switching tube is respectively connected with the 2 nd pin of the sixth switching tube, the anode of the eleventh diode, the cathode of the twelfth diode, the other end of the fourteenth capacitor, one end of the fifteenth capacitor and the negative input end of the load end; the 1 st pin of the sixth switching tube is connected with the control signal end of the switching tube, and the 3 rd pin of the sixth switching tube is connected with the anode of the twelfth diode, the other end of the fifteenth capacitor, the voltage conversion module and the other end of the sixth inductor.
6. A method for stabilizing a microwave source of an MPCVD apparatus based on the stabilizing system of a microwave source of an MPCVD apparatus according to any one of claims 1 to 5, characterized in that the method for stabilizing a microwave source of an MPCVD apparatus comprises the steps of:
the filtering module performs filtering operation on the fifth voltage provided by the power supply end to obtain a filtered first voltage, and transmits the filtered first voltage to the rectifying and filtering module;
the rectification and filtering module performs rectification and filtering operation on the first voltage to obtain a second voltage, and transmits the second voltage to the voltage conversion module;
the voltage conversion module compares the second voltage with a preset rated voltage, generates a charging control signal or a discharging control signal according to a comparison result, and transmits the charging control signal or the discharging control signal to the energy storage module;
the energy storage module performs charge-discharge adjustment on the second voltage according to the charge control signal or the discharge control signal to obtain a third voltage, and transmits the third voltage to the inversion module;
the inversion module converts the third voltage into a fourth voltage and transmits the fourth voltage to the load terminal.
7. The method for stabilizing microwave source of MPCVD equipment according to claim 6, wherein the voltage transformation module compares the second voltage with a preset rated voltage, generates a charge control signal or a discharge control signal according to the comparison result, and transmits the charge control signal or the discharge control signal to the energy storage module, and specifically comprises:
the control unit compares the second voltage with the preset rated voltage;
if the control unit compares that the second voltage is smaller than the preset rated voltage, a first switch control signal is generated, and the control unit transmits the first switch control signal to the switch unit;
the switch unit outputs the charging control signal to the energy storage module according to the first switch control signal;
if the control unit compares that the second voltage is not smaller than the preset rated voltage, generating a second switch control signal, and transmitting the second switch control signal to the switch unit by the control unit;
the switch unit outputs the discharge control signal to the energy storage module according to the second switch control signal.
8. The method for stabilizing voltage of microwave source of MPCVD equipment according to claim 7, wherein the energy storage module performs charge-discharge adjustment on the second voltage according to the charge control signal or the discharge control signal to obtain a third voltage, and transmits the third voltage to the inversion module, specifically comprising:
the energy storage module carries out charging adjustment on the second voltage according to the charging control signal to obtain a second voltage subjected to charging adjustment, and transmits the second voltage subjected to charging adjustment to the inversion module;
the energy storage module performs discharge adjustment on the second voltage according to the discharge control signal to obtain a second voltage after discharge adjustment, and transmits the second voltage after discharge adjustment to the inversion module; wherein the third voltage comprises: a second voltage after charge adjustment and a second voltage after discharge adjustment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310791211.0A CN116505536B (en) | 2023-06-30 | 2023-06-30 | Pressure stabilizing system and method for microwave source of MPCVD equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310791211.0A CN116505536B (en) | 2023-06-30 | 2023-06-30 | Pressure stabilizing system and method for microwave source of MPCVD equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116505536A CN116505536A (en) | 2023-07-28 |
| CN116505536B true CN116505536B (en) | 2024-02-09 |
Family
ID=87318811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310791211.0A Active CN116505536B (en) | 2023-06-30 | 2023-06-30 | Pressure stabilizing system and method for microwave source of MPCVD equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116505536B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160031154A (en) * | 2014-09-12 | 2016-03-22 | 한국전기연구원 | Bidirectional Power Converter |
| CN107171309A (en) * | 2017-07-20 | 2017-09-15 | 北方工业大学 | A kind of micro-grid system dc bus voltage stabilizing control method |
| CN109067154A (en) * | 2018-08-31 | 2018-12-21 | 北京交通大学 | A kind of active filter and the method for eliminating train DC bus secondary resonance |
| CN107395026B (en) * | 2017-09-11 | 2020-02-18 | 镇江市产品质量监督检验中心 | Alternating current constant current source system |
| CN113224935A (en) * | 2020-01-21 | 2021-08-06 | 科德数控股份有限公司 | Alternating current filter with wide frequency range |
| CN113690873A (en) * | 2021-08-16 | 2021-11-23 | 三峡大学 | Photovoltaic direct-current micro-grid coordination control method containing hybrid energy storage |
| CN114977108A (en) * | 2022-05-19 | 2022-08-30 | 连云港杰瑞电子有限公司 | Converter short-circuit protection circuit and method based on parasitic parameters |
-
2023
- 2023-06-30 CN CN202310791211.0A patent/CN116505536B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160031154A (en) * | 2014-09-12 | 2016-03-22 | 한국전기연구원 | Bidirectional Power Converter |
| CN107171309A (en) * | 2017-07-20 | 2017-09-15 | 北方工业大学 | A kind of micro-grid system dc bus voltage stabilizing control method |
| CN107395026B (en) * | 2017-09-11 | 2020-02-18 | 镇江市产品质量监督检验中心 | Alternating current constant current source system |
| CN109067154A (en) * | 2018-08-31 | 2018-12-21 | 北京交通大学 | A kind of active filter and the method for eliminating train DC bus secondary resonance |
| CN113224935A (en) * | 2020-01-21 | 2021-08-06 | 科德数控股份有限公司 | Alternating current filter with wide frequency range |
| CN113690873A (en) * | 2021-08-16 | 2021-11-23 | 三峡大学 | Photovoltaic direct-current micro-grid coordination control method containing hybrid energy storage |
| CN114977108A (en) * | 2022-05-19 | 2022-08-30 | 连云港杰瑞电子有限公司 | Converter short-circuit protection circuit and method based on parasitic parameters |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116505536A (en) | 2023-07-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Jung et al. | High efficiency bidirectional LLC resonant converter for 380V DC power distribution system using digital control scheme | |
| CN203674793U (en) | On-line power frequency uninterrupted power supply | |
| US20140087215A1 (en) | Temperature controlling system and method of battery | |
| CN113489308B (en) | Step-down power factor correction converter without input current dead zone and control method | |
| US20220231509A1 (en) | Vehicle-grid-home power interface | |
| CN108964450B (en) | Composite circuit for connecting DC power supply to AC power supply | |
| CN102255356B (en) | Efficient uninterruptible power supply | |
| CN116505536B (en) | Pressure stabilizing system and method for microwave source of MPCVD equipment | |
| CN109510489A (en) | A kind of the uninterruptible power supply rectification circuit and its working method of wide input range | |
| CN109660120A (en) | Switching circuit, the control method of switching circuit, power supply device and air conditioner | |
| CN112436500B (en) | Direct current microgrid power generation, transmission and distribution system | |
| CN112054590B (en) | Capacitor direct-current guarantee power supply | |
| CN209571963U (en) | A kind of uninterruptible power supply rectification circuit of wide input range | |
| CN114336647A (en) | Bidirectional charging device of dynamic voltage restorer and control method thereof | |
| CN201570983U (en) | DC generating set | |
| CN109039087B (en) | Boost compensation system and method for widening MPPT voltage range of solar panel string | |
| CN111641334B (en) | Variable frequency control device and air conditioner | |
| CN219918724U (en) | Power supply device for energy storage converter control system | |
| CN218888142U (en) | Direct-current active filter for improving electric energy quality of direct-current micro-grid | |
| CN216357402U (en) | LED power supply controller | |
| CN221614650U (en) | High-gain differential direct-current power router | |
| CN112260567B (en) | Non-isolated grid-connected inverter with active power decoupling function | |
| CN213990157U (en) | Bidirectional energy storage converter | |
| EP4358358A1 (en) | Charging module, charging device, and charging system | |
| CN211397849U (en) | Novel power plant alternating-current variable-frequency accident oil pump power supply device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |