CN116448292A - Four-arm temperature-drift-resistant pressure sensor based on LTCC - Google Patents
Four-arm temperature-drift-resistant pressure sensor based on LTCC Download PDFInfo
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- CN116448292A CN116448292A CN202310454158.5A CN202310454158A CN116448292A CN 116448292 A CN116448292 A CN 116448292A CN 202310454158 A CN202310454158 A CN 202310454158A CN 116448292 A CN116448292 A CN 116448292A
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- strain
- pressure sensor
- strain gauge
- base plate
- substrate
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- 239000000758 substrate Substances 0.000 claims description 42
- 239000004593 Epoxy Substances 0.000 claims description 2
- 230000003247 decreasing effect Effects 0.000 claims 1
- 239000011888 foil Substances 0.000 abstract description 14
- 238000005259 measurement Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- CLOMYZFHNHFSIQ-UHFFFAOYSA-N clonixin Chemical compound CC1=C(Cl)C=CC=C1NC1=NC=CC=C1C(O)=O CLOMYZFHNHFSIQ-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/225—Measuring circuits therefor
- G01L1/2262—Measuring circuits therefor involving simple electrical bridges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2268—Arrangements for correcting or for compensating unwanted effects
- G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Force In General (AREA)
Abstract
The application discloses four arm temperature-resistant pressure sensor that floats based on LTCC has solved current pressure sensor and has lead to the inaccurate problem of data acquisition when the temperature floats excessively, mainly include first sensing base plate, second sensing base plate and recess base plate, first sensing base plate upside includes first foil gage, the second foil gage, second sensing base plate downside includes the third foil gage, the fourth foil gage, be provided with the recess that is suitable for the biggest deformation of foil gage on the recess base plate, when the measured object is to placing on pressure sensor, first foil gage and second foil gage produce deformation to recess direction, the third foil gage produces the resistance when the foil gage receives deformation to recess opposite direction, the resistance that produces through four foil gages forms the wheatstone bridge, the wheatstone bridge can reduce temperature to data measurement's influence through the balanced condition of bridge, improve pressure sensor's measurement accuracy, guaranteed the accuracy of measuring result in complicated environment well.
Description
Technical Field
The application relates to the field of data acquisition and correction, in particular to a four-arm temperature drift resistance pressure sensor based on LTCC.
Background
The resistance strain sensor is a sensor which is formed by combining a measuring circuit consisting of resistance strain gauges and an elastic sensitive element. When the elastic sensing element is acted by external pressure, strain is generated, the resistance strain gauge stuck on the surface also generates strain, and the resistance value is changed. The deformation of the elastomer is converted into a change in the resistance of the resistive strain gage. Under the theoretical state, the strain gauge only generates strain change on an object to be measured in the measuring process of the sensor, and in the actual measuring process, the temperature drift can be generated due to the too high temperature, and the measuring result can be greatly influenced.
Disclosure of Invention
Based on the not enough of prior art, to the problem that current pressure sensor measured temperature and float too high, this application really provides a four arm temperature resistant pressure sensor that floats based on LTCC, its characterized in that includes: a sensing substrate and a recess substrate, wherein the sensing substrate comprises: the sensing device comprises a first sensing substrate and a second sensing substrate, wherein a groove substrate is arranged between the first sensing substrate and the second sensing substrate; the strain gauge comprises a first strain gauge and a second strain gauge which are arranged on the upper side of the first sensing substrate, and a third strain gauge and a fourth strain gauge which are arranged on the lower side of the second sensing substrate; and the groove is formed in the groove substrate and is suitable for the deformation of the strain gauge.
Optionally, the first strain gauge is aligned up and down with the fourth strain gauge, and the second strain gauge is aligned up and down with the third strain gauge.
Optionally, the first strain gauge and the second strain gauge are bilaterally symmetrical, and the third strain gauge and the fourth strain gauge are bilaterally symmetrical.
Optionally, the resistors generated by the first strain gauge, the second strain gauge, the third strain gauge and the fourth strain gauge form a wheatstone bridge, and the wheatstone bridge reduces the temperature drift through a bridge balance condition.
Optionally, the wheatstone bridge is a four-arm full bridge, and the first strain gauge, the second strain gauge, the third strain gauge and the fourth strain gauge of the wheatstone bridge are stressed simultaneously.
Optionally, the resistances generated by the first strain gauge and the third strain gauge are a first strain resistance pair, the resistances generated by the second strain gauge and the fourth strain gauge are a second strain resistance pair, when the pressure sensor senses pressure, the resistance of the first strain resistance pair increases, and the resistance of the second strain resistance pair decreases.
Optionally, the resistance values generated by the first strain gauge, the second strain gauge, the third strain gauge and the fourth strain gauge are equal under the condition of no strain force.
Optionally, the first sensing substrate and the groove substrate and the second sensing substrate are connected through epoxy resin adhesion.
The beneficial effects of this application are: the first strain gauge and the second strain gauge are attached to the first sensing substrate through the LTCC technology, the third strain gauge and the fourth strain gauge are attached to the second sensing substrate, the middle groove substrate is provided with a groove which is suitable for the maximum deformation of the strain gauge, the first strain gauge and the second strain gauge are located on the upper side of the first sensing substrate, the third strain gauge and the fourth strain gauge are located on the lower side of the second sensing substrate, the four strain gauges generate resistance when an external object passes through, the four-arm Wheatstone bridge is formed, the Wheatstone bridge is influenced through bridge balance, the influence of temperature on a measuring result can be effectively eliminated, and the accuracy of data measurement is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute an undue limitation to the application. In the drawings:
FIG. 1 is a block diagram of a four-arm temperature drift resistance pressure sensor provided in an embodiment of the present application;
FIG. 2 is a schematic diagram of a pressure sensor bridge provided in FIG. 1 in accordance with an embodiment of the present application;
wherein the above figures include the following reference numerals:
1-first sensing substrate, 2-recess base plate, 3-second sensing substrate, 4-first foil gage, 5-second foil gage, 6, third foil gage, 7-fourth foil gage, 8-recess.
Detailed Description
In order to enable those skilled in the art to better understand the present application, the following description will make clear and complete descriptions of the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. It will be apparent that the described embodiments are merely some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, shall fall within the scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and claims of the present application and in the above-described figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that embodiments of the present application described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
The embodiment of the application provides a four-arm temperature and drift resistance pressure sensor based on LTCC (low temperature ceramic) mainly includes that installation first sensing base plate 1, recess base plate 2, second sensing base plate 3 are provided with recess base plate 2 between first sensing base plate 1 and second sensing base plate 3, and the three-layer base plate includes first sensing base plate 1 and recess base plate 2, between and between recess base plate 2 second sensing base plate 3 is through LTCC (low temperature ceramic co-fired) technique with the three-layer base plate through epoxy paste the connection.
The first sensing substrate 1 is provided with a first strain gauge 4 and a second strain gauge 5 through flexible sealing glue, the second sensing substrate 3 is provided with a third strain gauge 6 and a fourth strain gauge 7, and the groove substrate 2 is provided with a groove capable of bearing the maximum deformation of the strain gauge.
Preferably, the flexible sealing glue can be silica gel, so that the strain gauge can be protected from deformation under the condition of no pressure.
Preferably, the first strain gauge 4 and the second strain gauge 5 are arranged on the upper side of the first sensing substrate 1, the third strain gauge 6 and the fourth strain gauge 7 are arranged on the lower side of the second sensing substrate 3, and the three-layer substrate forms a pressure sensor.
Preferably, the first strain gage 4 and the fourth strain gage 7 are aligned up and down, and the second strain gage 5 and the third strain gage 6 are aligned up and down.
Preferably, the first strain gage 4 and the second strain gage 5 are bilaterally symmetrical, and the third strain gage 6 and the fourth strain gage 7 are bilaterally symmetrical.
When an external object to be measured is placed on the upper side of the pressure sensor, the four strain gages deform, the first strain gage 4 and the second strain gage 5 deform concavely towards the inner side direction of the groove, the third strain gage 6 and the fourth strain gage 7 deform the sensor towards the outer side direction of the groove, and the deformation size is the data measurement pressure size.
When the four strain gauges are deformed due to the pressure generated by the object, the deformation generated by the strain gauges is changed into corresponding resistance values, and the resistance values generated by the four strain gauges form a four-arm Wheatstone bridge. When the temperature is too high, temperature drift can be generated, so that the data measured by the sensor have larger deviation, and the bridge generated by the structure is needed to reduce the influence caused by the temperature.
Fig. 2 is a schematic diagram of a resistance circuit based on deformation generated when the pressure sensor shown in fig. 1 senses the pressure of an object to be measured, and fig. 2 is a four-arm full bridge, namely a wheatstone bridge composed of four strain gauges which generate deformation to generate corresponding resistance values.
When the object to be measured generates pressure in the direction of the first sensing substrate, the first strain gauge 4 and the second strain gauge 5 deform downwards, and the resistance generated by deformation is R 1 And R is 2 The third strain gage 6 and the fourth strain gage 7 deform towards the outer side of the groove, and the resistance generated by deformation is R 3 And R is 4 Balance generated at this timeThe bridge output voltage is the following formula:
∪ 0 as the input voltage, u is the reference voltage.
When no pressure is generated and no strain is generated, the influence of temperature drift generated by the temperature difference process on the resistance is delta R', and under the condition of the influence of temperature drift,
input voltage
Can be simplified and obtained
At this time, R in the absence of pressure 1 、R 2 、R 3 、R 4 The resistance value of the bridge is equal, and the output voltage is approximately equal to the original output voltage after the resistance change caused by temperature because of delta R' < R, and the bridge relative balance is not affected when no pressure exists.
R is due to the different positions of the strain gauge in the pressure sensor 1 And R is 3 Is a strain resistance pair, R 2 And R is 4 For a pair of strain resistors, R can be obtained when the pressure sensor senses pressure 1 And R is 3 Increase DeltaR, R 2 And R is 4 When the delta R is reduced and the pressure generates temperature drift,
output voltage
Can be simplified and obtained
At this time, since DeltaR' < R, deltaR < R, and (R) 1 +R 2 )(R 3 +R 4 ) Far greater than4ΔR′ 2 -2ΔR′(R 1 +R 2 +R 3 +R 4 ) Therefore, the output voltage calculated by the full-bridge circuit is close to the output voltage under the balanced bridge.
It follows that the four-arm full bridge formed by the pressure sensor of the structure of fig. 1 described above counteracts the effect of temperature on the measurement results.
The foregoing embodiment numbers of the present application are merely for describing, and do not represent advantages or disadvantages of the embodiments.
In the foregoing embodiments of the present application, the descriptions of the embodiments are emphasized, and for a portion of this disclosure that is not described in detail in this embodiment, reference is made to the related descriptions of other embodiments.
In the several embodiments provided in the present application, it should be understood that the disclosed technology content may be implemented in other manners. The above-described embodiments of the apparatus are merely exemplary, and the division of the units, for example, may be a logic function division, and may be implemented in another manner, for example, a plurality of units or components may be combined or may be integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some interfaces, units or modules, or may be in electrical or other forms.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
The foregoing is merely a preferred embodiment of the present application and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present application and are intended to be comprehended within the scope of the present application.
Claims (8)
1. LTCC-based temperature drift resistant four-arm pressure sensor is characterized by comprising:
a sensing substrate and a recess substrate, wherein the sensing substrate comprises: the sensing device comprises a first sensing substrate and a second sensing substrate, wherein a groove substrate is arranged between the first sensing substrate and the second sensing substrate;
the strain gauge comprises a first strain gauge and a second strain gauge which are arranged on the upper side of the first sensing substrate, and a third strain gauge and a fourth strain gauge which are arranged on the lower side of the second sensing substrate;
and the groove is formed in the groove substrate and is suitable for the deformation of the strain gauge.
2. The LTCC based temperature drift resistant four-arm pressure sensor of claim 1, wherein the first strain gauge is aligned up and down with the fourth strain gauge and the second strain gauge is aligned up and down with the third strain gauge.
3. The LTCC based temperature drift resistant four-arm pressure sensor of claim 1, wherein the first and second strain gages are bilaterally symmetric and the third and fourth strain gages are bilaterally symmetric.
4. The LTCC based temperature drift resistant four-armed pressure sensor of claim 1, wherein the resistances generated by the first, second, third and fourth strain gages form a wheatstone bridge that reduces temperature drift through bridge balancing conditions.
5. The LTCC based temperature drift resistant four-armed pressure sensor of claim 3, wherein the wheatstone bridge is a four-armed full bridge, the first, second, third and fourth strain gages of the wheatstone bridge being simultaneously stressed.
6. The LTCC based four-arm pressure sensor of claim 1, wherein the resistance produced by the first and third strain gages is a first pair of strain resistors, the resistance produced by the second and fourth strain gages is a second pair of strain resistors, the resistance of the first pair of strain resistors increasing and the resistance of the second pair of strain resistors decreasing when the pressure sensor is subjected to pressure.
7. The LTCC based four-arm pressure sensor of claim 1, wherein the first, second, third, and fourth strain gages have equal resistance values in the absence of strain forces.
8. The LTCC based four-arm pressure sensor of claim 1, wherein the first sensing substrate and the recess substrate and the second sensing substrate are bonded together with epoxy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310454158.5A CN116448292A (en) | 2023-04-25 | 2023-04-25 | Four-arm temperature-drift-resistant pressure sensor based on LTCC |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310454158.5A CN116448292A (en) | 2023-04-25 | 2023-04-25 | Four-arm temperature-drift-resistant pressure sensor based on LTCC |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116448292A true CN116448292A (en) | 2023-07-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310454158.5A Pending CN116448292A (en) | 2023-04-25 | 2023-04-25 | Four-arm temperature-drift-resistant pressure sensor based on LTCC |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116448292A (en) |
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2023
- 2023-04-25 CN CN202310454158.5A patent/CN116448292A/en active Pending
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