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CN116398582A - Vibration isolation assembly and molecular pump with same - Google Patents

Vibration isolation assembly and molecular pump with same Download PDF

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Publication number
CN116398582A
CN116398582A CN202310505645.XA CN202310505645A CN116398582A CN 116398582 A CN116398582 A CN 116398582A CN 202310505645 A CN202310505645 A CN 202310505645A CN 116398582 A CN116398582 A CN 116398582A
Authority
CN
China
Prior art keywords
vibration
vibration isolation
connecting end
isolation assembly
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310505645.XA
Other languages
Chinese (zh)
Inventor
陈林
陈刚
邓高飞
罗守庚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Zhongke Jiuwei Technology Co ltd
Original Assignee
Beijing Zhongke Jiuwei Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Zhongke Jiuwei Technology Co ltd filed Critical Beijing Zhongke Jiuwei Technology Co ltd
Priority to CN202310505645.XA priority Critical patent/CN116398582A/en
Publication of CN116398582A publication Critical patent/CN116398582A/en
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/08—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with rubber springs ; with springs made of rubber and metal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/046—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means using combinations of springs of different kinds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M7/00—Details of attaching or adjusting engine beds, frames, or supporting-legs on foundation or base; Attaching non-moving engine parts, e.g. cylinder blocks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/10—Process efficiency

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

The invention relates to the technical field of molecular pumps, in particular to a vibration isolation assembly and a molecular pump with the vibration isolation assembly. A vibration isolation assembly comprising: the shock absorption base is provided with a group of shock absorption side plates which are arranged oppositely, and the inner walls of the shock absorption side plates are respectively extended with a first connecting end; the support seat is suitable for being connected with the vibration isolation table and comprises a support side plate which is arranged corresponding to the vibration absorption side plate, a second connecting end facing the vibration absorption side plate extends out of the support side plate, and the second connecting end and the first connecting end are arranged in a staggered manner along the vertical direction of the vibration isolation assembly; and one end of the elastic piece is connected with the first connecting end, and the other end of the elastic piece is connected with the second connecting end, so that vibration transmitted to the damping base from the supporting base or vibration transmitted to the supporting base from the damping base is buffered through the elastic piece. The vibration isolator solves the problem that the vibration is generated by the workbench under the influence of the external environment, the vibration is transmitted to the vibration table by the workbench, and then the vibration isolator influences the dynamic balance or stability of the molecular pump.

Description

Vibration isolation assembly and molecular pump with same
Technical Field
The invention relates to the technical field of molecular pumps, in particular to a vibration isolation assembly and a molecular pump with the vibration isolation assembly.
Background
The sensor is very sensitive to low-frequency vibration in the fields of precision measurement, microscopic imaging and the like, and the low-frequency vibration brought by the external environment can lead to inaccurate measurement and introduce measurement errors. Therefore, the molecular pump vibration isolation table is required to provide measurement conditions for the scientific research fields and industrial production with high precision and high stability respectively.
Following the steps of industry development, molecular pump vibration isolation platforms were developed in order to remove vibrations that affect the measurement equipment. The molecular pump vibration isolation table can effectively isolate low-frequency vibration transmitted from the ground and plays an important role in precise research and development and industrial production.
In the actual use process, the vibration isolation effect of the vibration isolation platform of the molecular pump is mainly influenced by two factors, namely the natural vibration frequency of the vibration insulator and the vibration of the external environment, on-site personnel often place the vibration isolation platform on the workbench, and other molecular pumps, mechanical pumps, personnel walking, material movement and the like in the environment can generate vibration, the vibration is transmitted to the vibration platform by the workbench, and the vibration is influenced by the vibration isolation platform on the dynamic balance or stability of the molecular pump.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to overcome the defect that the workbench in the prior art is affected by external environment to generate vibration, the vibration is transmitted to the vibration table by the workbench, and then the vibration table affects the dynamic balance or stability of the molecular pump, so that the vibration isolation assembly and the molecular pump with the vibration isolation assembly are provided.
In order to solve the above problems, the present invention provides a vibration isolation assembly, comprising:
the shock absorption base is provided with a group of shock absorption side plates which are arranged oppositely, and the inner walls of the shock absorption side plates are respectively extended with a first connecting end;
the support seat is suitable for being connected with the vibration isolation table and comprises a support side plate which is arranged corresponding to the vibration absorption side plate, a second connecting end facing the vibration absorption side plate extends out of the support side plate, and the second connecting end and the first connecting end are arranged in a staggered manner along the vertical direction of the vibration isolation assembly;
and one end of the elastic piece is connected with the first connecting end, and the other end of the elastic piece is connected with the second connecting end, so that vibration transmitted to the damping base from the supporting base or vibration transmitted to the supporting base from the damping base is buffered through the elastic piece.
Optionally, the elastic element is in an annular rectangular structure, and two opposite ends of the elastic element are respectively connected with the first connecting end and the second connecting end.
Optionally, the device further comprises a pressing plate, wherein the elastic piece is fixed on the first connecting end through the pressing plate by the first connecting end; and/or the number of the groups of groups,
the second connecting end fixes the elastic piece on the second connecting end through the pressing plate.
Optionally, gaskets are respectively arranged between the elastic piece and the first connecting end and between the elastic piece and the second connecting end.
Optionally, the support base further comprises a top plate, and the top plate is suitable for being fixedly connected with the bottom of the molecular pump.
Optionally, the shock-absorbing base still is equipped with the bottom plate, bottom plate and shock-absorbing curb plate fixed connection, be equipped with the recess on the bottom surface of bottom plate that deviates from the shock-absorbing curb plate, be suitable for the embedding vibration isolation rubber pad in the recess.
Optionally, two sides of the shock attenuation curb plate are connected with a guard plate respectively.
A molecular pump comprises the vibration isolation assembly.
Optionally, the vibration isolation table is connected with the top plate of the supporting seat.
The technical scheme of the invention has the following advantages:
1. the vibration isolation assembly comprises a vibration absorption base, wherein a group of opposite vibration absorption side plates are arranged on the vibration absorption base, and first connecting ends respectively extend out of the inner walls of the vibration absorption side plates; the support seat is suitable for being connected with the vibration isolation table and comprises a support side plate which is arranged corresponding to the vibration absorption side plate, a second connecting end facing the vibration absorption side plate extends out of the support side plate, and the second connecting end and the first connecting end are arranged in a staggered manner along the vertical direction of the vibration isolation assembly; and one end of the elastic piece is connected with the first connecting end, and the other end of the elastic piece is connected with the second connecting end, so that vibration transmitted to the damping base from the supporting base or vibration transmitted to the supporting base from the damping base is buffered through the elastic piece. The vibration damping base is connected with the supporting base only through the elastic piece, when a molecular pump or other precise equipment placed on the supporting base runs, vibration can be generated, and when the vibration is transmitted to the vibration damping base, the elastic piece can buffer the vibration amplitude, so that the influence of the vibration of the supporting base on the vibration damping base is reduced; when the vibration damping base is affected by vibration of the external environment, the vibration damping base can be transmitted to the supporting seat, and the elastic piece can buffer the vibration amplitude, so that the influence of the vibration damping base on the supporting seat is reduced.
2. According to the vibration isolation assembly, the elastic piece is of the annular rectangular structure, the annular rectangular structure has the advantage of light weight, and the opposite ends of the elastic piece are respectively connected with the first connecting end and the second connecting end, so that elastic connection between the damping base and the supporting seat is realized through the elastic piece.
3. The vibration isolation assembly provided by the invention further comprises a pressing plate, wherein the elastic piece is fixed on the first connecting end through the pressing plate by the first connecting end; the second connecting end is used for fixing the elastic piece on the second connecting end through the pressing plate, and the first connecting end and the elastic piece are fixed through the pressing plate.
4. According to the vibration isolation assembly provided by the invention, the gaskets are respectively arranged between the elastic piece and the first connecting end and between the elastic piece and the second connecting end, and play a role in buffering, so that the elastic piece is prevented from being directly connected with the first connecting end and the second connecting end.
5. The vibration isolation assembly provided by the invention has the advantages that the supporting seat also comprises the top plate, the top plate is suitable for being fixedly connected with the bottom of the molecular pump, the connection between the top plate and the molecular pump is realized, and the supporting seat is used for supporting the molecular pump.
6. The vibration isolation assembly provided by the invention is characterized in that the vibration isolation base is further provided with the bottom plate, the bottom plate is fixedly connected with the vibration isolation side plate, the bottom surface of the bottom plate, which is far away from the vibration isolation side plate, is provided with the groove, and the vibration isolation rubber pad is suitable for being embedded in the groove so as to change the rigid connection between the vibration isolation base and the external environment.
7. According to the vibration isolation assembly provided by the invention, the two side surfaces of the damping side plate are respectively connected with the protection plate, so that the support seat is prevented from moving to the side surface of the damping base, and accidents are prevented.
8. The molecular pump provided by the invention has the advantages of any one of the above because the vibration isolation assembly is adopted, and the molecular pump further comprises a vibration isolation table, wherein the vibration isolation table is connected with the top plate of the supporting seat so as to reduce vibration through the dual action of the vibration isolation table and the vibration isolation assembly.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural view of a vibration isolation assembly provided in an embodiment of the present invention;
fig. 2 is a schematic structural view of a vibration isolation assembly provided in an embodiment of the present invention;
fig. 3 is a schematic structural view of a vibration isolation assembly according to an embodiment of the present invention with a guard plate removed;
fig. 4 is a schematic view of the vibration isolation assembly provided in an embodiment of the present invention with the guard plate removed.
Reference numerals illustrate: 1. a top plate; 2. a shock absorbing side plate; 3. a first connection end; 4. an elastic member; 5. supporting the side plates; 6. a pressing plate; 7. a gasket; 8. a bottom plate; 9. a protection plate; 10. a second connection end; 11. a screw; 12. a nut; 13. a groove.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
One embodiment of the vibration isolation assembly as shown in fig. 1-4, comprises: the damping base and the supporting seat are connected through the elastic piece 4, wherein the elastic piece 4 is of an annular rectangular structure. Specifically, the elastic member 4 is a rectangular spring.
As shown in fig. 1, 3 and 4, the shock absorbing base includes a bottom plate 8 and a pair of opposite shock absorbing side plates 2 extending from the bottom plate 8 in the same direction and arranged at intervals, the bottom plate 8 and the shock absorbing side plates 2 are integrally formed, wherein a first connecting end 3 extends from an inner wall of each shock absorbing side plate 2, that is, the first connecting end 3 extending from one shock absorbing side plate 2 is arranged towards the other shock absorbing side plate 2. As shown in fig. 2, two rectangular grooves 13 are formed in the bottom surface of the bottom plate 8 facing away from the shock-absorbing side plate 2, and vibration-isolating rubber pads are suitable for being embedded in the grooves 13. As shown in fig. 1, two side surfaces of the shock absorbing side plate 2 are fixedly connected with a protection plate 9 respectively through screws 11.
As shown in fig. 3 and 4, the supporting seat comprises a top plate 1 and a pair of spaced supporting side plates 5 arranged from the top plate 1 towards the direction of a bottom plate 8 of the shock-absorbing base, each supporting side plate 5 is extended with a second connecting end 10 arranged towards the shock-absorbing side plate 2, the second connecting end 10 and the first connecting end 3 are vertically arranged along the height direction of the shock-absorbing base, and the first connecting end 3 and the second connecting end 10 are respectively provided with three through holes arranged at equal intervals. As shown in fig. 3, the first connecting end 3 fixes the elastic member 4 on the first connecting end 3 through the pressing plate 6, and a gasket 7 is further disposed between the elastic member 4 and the first connecting end 3, that is, the screw 11 sequentially passes through the shock absorbing side plate 2, the first connecting end 3, the gasket 7, the elastic member 4 and the pressing plate 6 and then is in threaded connection with the nut 12, so as to fix the first connecting end 3 and the elastic member 4; the second connecting end 10 fixes the elastic element 4 on the second connecting end 10 through the pressing plate 6, and a gasket 7 is further arranged between the elastic element 4 and the second connecting end 10, that is, the screw 11 sequentially passes through the supporting side plate 5, the second connecting end 10, the gasket 7, the elastic element 4 and the pressing plate 6 and then is in threaded connection with the nut 12, so that the second connecting end 10 and the elastic element 4 are fixed.
The molecular pump comprises the vibration isolation assembly and further comprises a vibration isolation table, wherein the vibration isolation table is connected with the top plate 1 of the supporting seat.
In the actual use process, the vibration damping base is placed on the workbench, the molecular pump is fixedly connected with the supporting seat through the vibration isolation table, after the molecular pump starts to run, vibration generated by the molecular pump is transmitted to the vibration damping base through the supporting seat, the vibration amplitude is buffered by the elastic piece 4, and the influence of the vibration of the supporting seat on the vibration damping base is reduced through the deformation change of the elastic piece 4; when vibration of shock-absorbing mount received external environment influences, vibration can be transmitted to the supporting seat through shock-absorbing mount, and elastic component 4 can cushion vibration amplitude to reduce shock-absorbing mount's vibration to the influence of supporting seat.
As an alternative embodiment, the number of through holes of the first connection terminal 3 and the second connection terminal 10 may also be 1, 2, or even more.
As an alternative embodiment, the elastic member 4 may also be a rectangular-shaped rubber pad.
As an alternative embodiment, a clamping groove is arranged above the first connecting end 3, a clamping groove is arranged below the second connecting end 10, and two opposite sides of the elastic piece 4 are respectively fixed with the first connecting end 3 and the second connecting end 10 in a clamping manner.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present invention.

Claims (9)

1. A vibration isolation assembly for a molecular pump, comprising:
the shock absorption base is provided with a group of shock absorption side plates (2) which are oppositely arranged, and the inner walls of the shock absorption side plates (2) are respectively extended with a first connecting end (3);
the support seat is suitable for being connected with the vibration isolation table and comprises a support side plate (5) which is arranged corresponding to the vibration absorption side plate (2), a second connecting end (10) facing the vibration absorption side plate (2) extends out of the support side plate (5), and the second connecting end (10) and the first connecting end (3) are arranged in a staggered mode along the vertical direction of the vibration isolation assembly;
and one end of the elastic piece (4) is connected with the first connecting end (3), and the other end of the elastic piece (4) is connected with the second connecting end (10) so as to buffer the vibration transmitted to the damping base from the supporting base or the vibration transmitted to the supporting base from the damping base through the elastic piece (4).
2. Vibration isolation assembly according to claim 1, wherein the elastic member (4) has a circular rectangular structure, and opposite ends of the elastic member (4) are connected to the first connection end (3) and the second connection end (10), respectively.
3. The vibration isolation assembly according to claim 2, further comprising a pressure plate (6), said first connection end (3) securing said elastic member (4) to the first connection end (3) by means of said pressure plate (6); and/or the number of the groups of groups,
the second connecting end (10) fixes the elastic piece (4) on the second connecting end (10) through the pressing plate (6).
4. A vibration isolation assembly according to claim 3, wherein gaskets (7) are provided between the elastic member (4) and the first connecting end (3) and the second connecting end (10), respectively.
5. The vibration isolation assembly according to claim 1, wherein the support base further comprises a top plate (1), the top plate (1) being adapted to be fixedly connected to the bottom of the molecular pump.
6. Vibration isolation assembly according to claim 1, characterized in that the vibration isolation base is further provided with a bottom plate (8), the bottom plate (8) is fixedly connected with the vibration isolation side plate (2), a groove (13) is arranged on the bottom surface of the bottom plate (8) facing away from the vibration isolation side plate (2), and a vibration isolation rubber pad is suitable to be embedded in the groove (13).
7. The vibration isolation assembly according to claim 6, wherein two side surfaces of the shock absorbing side plate (2) are respectively connected with a protection plate (9).
8. A molecular pump comprising the vibration isolation assembly of any one of claims 1-7.
9. Molecular pump according to claim 8, further comprising a vibration isolation table connected to the top plate (1) of the support base.
CN202310505645.XA 2023-05-06 2023-05-06 Vibration isolation assembly and molecular pump with same Pending CN116398582A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310505645.XA CN116398582A (en) 2023-05-06 2023-05-06 Vibration isolation assembly and molecular pump with same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310505645.XA CN116398582A (en) 2023-05-06 2023-05-06 Vibration isolation assembly and molecular pump with same

Publications (1)

Publication Number Publication Date
CN116398582A true CN116398582A (en) 2023-07-07

Family

ID=87018041

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310505645.XA Pending CN116398582A (en) 2023-05-06 2023-05-06 Vibration isolation assembly and molecular pump with same

Country Status (1)

Country Link
CN (1) CN116398582A (en)

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