CN116233610A - High-speed imaging device and method for camera - Google Patents
High-speed imaging device and method for camera Download PDFInfo
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Abstract
The invention discloses a camera high-speed imaging device and a camera high-speed imaging method. By referring to the time delay integration realization principle of the TDI camera, the area array camera is fixed on the motion mechanism, and the motion speed of the area array camera is matched with the motion speed of the object side detection workpiece, so that the imaging surface of the area array camera and the image surface image of the detection workpiece imaging area are relatively static, the exposure integration time of the camera is increased, and the imaging contrast of the camera is improved. Compared with a conventional area-array camera fixed mounting imaging mode, the method can only realize the time-consuming exposure time of the camera for movement, which is required by the single pixel corresponding to the size of the object field, on the premise of avoiding motion blur; according to the invention, the camera synchronous motion mechanism is added, so that the exposure time of the camera can be increased by two to three orders of magnitude on the premise of not reducing the detection efficiency.
Description
Technical Field
The invention belongs to the technical field of automatic optical detection, and particularly relates to a camera high-speed imaging device and method.
Background
In the field of automatic optical detection technology, cameras are the most basic imaging photosensitive devices. The linear array camera and the combination thereof can obtain one-dimensional or two-dimensional image signals, and the area array camera and the combination thereof can obtain two-dimensional or three-dimensional image information. Therefore, in order to obtain the two-dimensional image information of the surface of the inspection workpiece, the two-dimensional image information may be obtained by a combination arrangement of line cameras or an area camera, and the combination arrangement of line cameras or the area camera may be selected to be obtained according to the condition of the inspection workpiece. For example, if the detection area of the workpiece is far greater than the optical field of view of the detection system in at least one dimension of length and width, a linear array camera is generally adopted to match and detect the movement speed of the workpiece to perform interval triggering, and the image information of the surface of the whole workpiece is spliced, such as application of metal strip, wafer microscopic defect detection and the like; if the detection area of the workpiece is equivalent to the optical field of view of the detection system, the area array camera is adopted for imaging, so that the hardware cost can be reduced, and the imaging efficiency can be improved, for example, the fields of AOI detection of 3C parts and the like. In general, in the field of industrial detection, the linear array camera has higher flexibility in application level than the area array camera, and can cover most application scenes of the area array camera; however, for some cameras facing scientific research applications and high-end industrial detection scenes, the cameras existing in the market are all area-array cameras, such as EMCCD cameras and qCMOS cameras introduced in recent years of japan bingo.
In order to improve the detection resolution of the optical system, the resolution of the area of the fixed area on the surface of the workpiece needs to be improved, and the object space size corresponding to a single pixel of the camera is reduced; in order to avoid motion blur generated by detection during the movement of the workpiece, exposure imaging needs to be completed within a time range of the workpiece movement single pixel corresponding to the object space size. Therefore, for industrial situations requiring high resolution, high throughput detection, there is a need to greatly improve the imaging efficiency of automated optical detection techniques. From the perspective of the whole optical detection system, the imaging efficiency can be improved mainly by improving the brightness of a light source, improving the clear aperture of the optical system, improving the quantum efficiency of an imaging camera and other factors. In the TDI linear array camera introduced in recent years, an area array pixel structure is arranged, integrated charges of single-row pixels are transferred row by row, the transfer speed is matched with the movement speed of a detection workpiece, and finally the effects of delaying integration on the surface of the workpiece and improving imaging contrast are achieved. The time delay integration structure of the TDI camera needs the line-by-line transfer and integration of charges, so that the time delay integration structure can only be realized for a linear array camera, but cannot be realized by arranging pixels of the area array camera, and the application of the area array camera in a high-speed detection scene is further limited. For scenes detected by very weak light signals, cameras such as EMCCD and qCMOS improve imaging contrast by improving the internal structure of the camera, but generally require longer exposure imaging time, which is often acceptable for the scientific research field, but has lower feasibility for the industrial high-end high-speed detection field.
Therefore, providing a camera high-speed imaging device and method for an area-array camera is a technical problem to be solved by those skilled in the art.
Disclosure of Invention
In order to solve the problems in the background technology, the invention provides a camera high-speed imaging device and a camera high-speed imaging method.
The technical scheme adopted by the invention is as follows:
1. high-speed imaging device of camera
The device comprises a camera motion mechanism, an imaging camera, an imaging optical system, a camera motion mechanism control driver, a camera motion mechanism grating ruler, a detection workpiece, a carrying motion table, a motion table grating ruler and a motion table control driver; the detection workpiece is placed on the object carrying moving table, the imaging camera is rigidly connected with the camera moving mechanism through the camera fixing device, and the imaging camera acquires an image of the surface of the detection workpiece through the imaging optical system; the moving table grating ruler and the camera moving mechanism grating ruler are respectively arranged on the carrying moving table and the camera moving mechanism, the moving table control driver is connected with the camera moving mechanism control driver through a cable, the moving table control driver obtains the real-time position of the carrying moving table through the moving table grating ruler and completes the closed-loop control of the movement, and the camera moving mechanism control driver obtains the real-time position of the camera moving mechanism through the camera moving mechanism grating ruler and completes the closed-loop control of the movement.
The object carrying moving table drives the detection workpiece to move along the horizontal direction, and the imaging optical system images the image of the surface of the detection workpiece to the imaging camera through the imaging light path; the magnification of the imaging optical system is alpha, that is, the spatial dimension of the workpiece surface area after the dimension W is mapped by the imaging optical system becomes alpha×w.
The camera movement mechanism adopts a worm and gear transmission mechanism, a linear motor transmission mechanism or a movement mechanism combining piezoelectric ceramics and a flexible hinge to drive the imaging camera to realize bidirectional movement in a movement direction parallel to the object carrying movement table.
The motion table control driver and the camera motion mechanism control driver are connected through pulse level signals, or realize synchronous control through EtherCAT, profinet, RS485 and other bus technologies, or are connected to the same motion controller, and the motion relation of the two motion mechanisms (the object carrying motion table and the camera motion mechanism) is matched by planning the motion paths of the two motion axes.
The camera motion mechanism control driver is connected with the imaging camera through a pulse level signal, and sends a trigger signal to the imaging camera through the camera motion mechanism control driver to control the imaging camera to start exposure and end exposure.
The motion platform control driver can send a control motion instruction to the camera motion mechanism control driver according to the position signal of the motion platform grating ruler, and the camera motion mechanism control driver receives the motion instruction and drives the camera motion mechanism to move.
2. A method for high-speed imaging of a camera, comprising the steps of:
step 1) imaging one view field of the surface of the detected workpiece, and starting from an initial position point A, using V to carry the object moving table 1 The motion stage control driver continuously obtains a carrier motion stage position signal by reading a motion stage grating ruler signal;
step 2), the object carrying moving table reaches a set position point B, a moving table control driver sends a moving instruction to a camera moving mechanism control driver through a pulse level signal or a bus instruction, and the camera moving mechanism control driver starts to drive a camera moving mechanism to drive an imaging camera to accelerate, wherein the moving direction is opposite to the moving direction of the object carrying moving table;
step 3) when the movement speed of the camera movement mechanism is accelerated to V 2 When the object carrying moving table reaches a position point C, triggering the imaging camera to start exposure; at this time, the moving speed of the imaging camera is the same as the moving speed of the light intensity signal of the surface of the detection workpiece after being processed and transformed by the imaging optical system, and the imaging surface of the imaging camera and the conjugate image surface of the detection workpiece after being processed by the imaging optical system are relatively static.
Step 4) continuously maintaining V by a camera movement mechanism 2 Until the object carrying moving table reaches a position point D, triggering the imaging camera to stop exposure at the moment, and then starting to slow down the camera moving mechanism until the speed reaches zero, wherein the object carrying moving table reaches a position point O;
step 5) the camera moving mechanism starts to move in the opposite direction, and before the object carrying moving table reaches the position point H, the distance of the camera moving mechanism moving in the opposite direction needs to reach S 1 +S 2 +S 3 Namely, the camera movement mechanism drives the imaging camera to return to the position before acceleration in the step 2;
step 6), the object carrying moving table moves to a position point H, and the position point A and the position point H are separated by the height dimension of one view field of the imaging camera;
step 7) continuing to circulate the steps 1) to 6), and realizing imaging of different view field divided areas on the surface of the detection workpiece.
In the step 1), the position interval of the trigger signal of the grating ruler of the moving table is configured according to the field size of the camera, and the surface of the detection workpiece is divided into imaging areas with different fields of view before imaging.
Setting the imaging camera to accelerate to V in the camera movement mechanism 2 The movement distance of the acceleration section is S 1 At this time, the carrying platform moves from the position point B to the position point C, S 1 <α×bc, BC is the distance between the position point B and the position point C;
wherein V is 2 ＝α*V 1 Alpha is the magnification of the imaging optical system;
set imaging camera to keep V in camera movement mechanism 2 The uniform speed section movement distance at the movement speed is S 2 At this time, the carrying platform moves from the position point C to the position point D, S 2 α×cd, CD is the distance between the position point C and the position point D, and the motion time corresponding to the distance between the position point C and the position point D is the exposure time of the imaging camera;
let S be the motion distance of the imaging camera at the deceleration section of the camera motion mechanism decelerating to zero 3 At this time, the carrying platform moves from the point D to the point O, S 3 <α.DO is the distance between location point D and location point O.
The camera movement mechanism or the object-carrying movement table has to satisfy the following conditions:
1) The image space view field size of the imaging optical system is larger than the photosensitive imaging surface size of the imaging camera plus the movement distance S of the camera movement mechanism 1 +S 2 +S 3 ；
2) The size of a photosensitive imaging surface of the imaging camera is alpha x AH, wherein AH is the distance between a position point A and a position point H;
wherein S is 0 For detecting the moving distance of the conjugate image of the surface of the workpiece after being processed by the imaging optical system when the object carrying moving table moves from the position point A to the position point B, S 0 ＝α*AB，S 4 For detecting the moving distance of the conjugate image of the surface of the workpiece after being processed by the imaging optical system when the object carrying moving table moves from the position point O to the position point H, S 4 ＝α*OH；
α*AH＝α*(AB+BC+CD+DO+OH)＝S 0 +α*BC+S 2 +α*DO+S4>S 0 +S 1 +S 2 +S 3 +S 4 ；
3) Movement distance S of camera movement mechanism 1 +S 2 +S 3 The size of a photosensitive imaging surface of the imaging camera is less than or equal to that of the photosensitive imaging surface of the imaging camera;
by compression S 0 、S 1 、S 3 、S 4 To increase S2 uniform velocity section movement distance, thereby increasing imaging cameraThe maximum limit of S2 is the size of the imaging surface of all pixels of the imaging camera.
In the step 5), exposure imaging is not carried out on the imaging camera in the process of returning movement of the camera movement mechanism to the opposite direction; therefore, there is no requirement that there is a constant velocity motion segment during the return motion, so long as the camera motion mechanism completes the return motion before the object-carrying motion stage 202 moves to the next field of view imaging start position.
The beneficial effects of the invention are as follows:
according to the camera high-speed imaging device and method, the time delay integration implementation principle of the TDI camera is used for reference, the area array camera is fixed on the motion mechanism, the motion speed of the area array camera is matched with the motion speed of the object side detection workpiece, so that the imaging surface of the area array camera and the image surface image of the detection workpiece imaging area are relatively static, the exposure integration time of the camera is increased, and the imaging contrast of the camera is improved. Compared with a conventional area-array camera fixed mounting imaging mode, the method can only realize the time-consuming exposure time of the camera for movement, which is required by the single pixel corresponding to the size of the object field, on the premise of avoiding motion blur; according to the invention, the camera synchronous motion mechanism is added, so that the exposure time of the camera can be increased by two to three orders of magnitude on the premise of not reducing the detection efficiency.
Description of the drawings:
FIG. 1 is a schematic diagram of an operating scenario for a line camera and an area camera;
fig. 2 is a schematic diagram of the working principle of a TDI line camera;
FIG. 3 is a schematic diagram of a traditional camera operating scenario;
FIG. 4 is a view of a camera capturing a motion blur free image of a workpiece surface and its pixel level features;
FIG. 5 is a schematic diagram of imaging exposure start and end positions of a conventional camera;
FIG. 6 is a schematic diagram of a high-speed imaging device of a camera according to an embodiment of the present invention;
FIG. 7 is a schematic view of the workpiece surface segmented by the field of view size moving with the inspected workpiece, starting at time T1, with the object-carrying motion stage moving by a distance of one field of view height at time T2 and time T3, respectively;
FIG. 8 is an explanatory diagram of a camera high-speed imaging device for detecting workpiece motion in a matching manner, wherein a middle white frame corresponds to an imaging field range, a left lower diagram is a velocity-time relation curve, a left upper diagram is a motion distance-time relation curve, a solid line curve corresponds to a carrying motion table, a dotted line curve corresponds to a camera motion mechanism, a left diagram draws velocity and position relation curves of the carrying motion table and the camera motion mechanism, the time ranges from T1 to T2 and from T2 to T3, and the image space motion distance ranges from point A to point H and from point A 'to point H' respectively correspond to a complete imaging flow;
fig. 9 is a schematic diagram of camera imaging exposure start and end positions according to an embodiment of the invention.
In the figure: camera motion mechanism (101), camera fixing device (102), imaging camera (103), imaging light path (104), imaging optical system (105), camera motion mechanism control driver (106), camera motion mechanism grating ruler (107), detection workpiece (201), carrying motion table (202), motion table grating ruler (203), motion table control driver (204)
The specific embodiment is as follows:
the present invention will be described in more detail below with reference to the drawings, in which preferred embodiments of the invention are shown, it being understood that one skilled in the art can modify the invention described herein while still achieving the advantageous effects of the invention. Accordingly, the following description is to be construed as broadly known to those skilled in the art and not as limiting the invention.
In the interest of clarity, not all features of an actual implementation are described. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail. It should be appreciated that in the development of any such actual embodiment, numerous implementation details must be made to achieve the developer's specific goals, such as compliance with system-related or business-related constraints, which will vary from one implementation to another. In addition, it will be appreciated that such a development effort might be complex and time-consuming, but would nevertheless be a routine undertaking for those of ordinary skill in the art.
In order to make the objects and features of the present invention more comprehensible, embodiments accompanied with figures are described in detail below. It is noted that the drawings are in a very simplified form and utilize non-precise ratios, and are intended to facilitate a convenient, clear, description of the embodiments of the invention.
Specific examples:
fig. 1 is a schematic diagram of working scenes of a linear array camera and an area array camera, and when the area of a workpiece detection area is far larger than the imaging field of view of the camera and the camera is required to perform motion-scanning-splicing operation relative to the workpiece, the working flows of the linear array camera and the area array camera are the same, and the linear array camera can be used for matching and replacing the application scene of the area array camera. However, when the area of the workpiece detection area is smaller than the imaging field of view of the camera, all the information on the surface of the workpiece can be directly obtained through the area array camera for analysis, such as the scene of AOI size detection of 3C parts.
Unlike scientific research, industrial detection requires requirements on the efficiency of detection in addition to the resolution of detection. One of the common methods for improving the detection resolution is to reduce the detection field, which further puts higher demands on the efficiency of monoscopic detection. Therefore, a high-speed measurement scene in the industrial field, TDI (Time Delayed and Integration) line camera, has been developed. As shown in fig. 2, the TDI camera matches the inter-line pixel transfer speed with the workpiece running speed by providing a multi-line linear array pixel structure, thereby realizing longer exposure in the workpiece running process. Aiming at the area-array camera, the pixels in adjacent rows respectively store the light intensity electronic information of the corresponding space positions, and the transfer integration function of the pixels in the middle cannot be realized, so that the pixel structure and the exposure extension function similar to the TDI linear-array camera cannot be realized.
Fig. 3 is a schematic diagram of a working scene of a conventional camera, in order to improve detection efficiency, a shooting camera imaging mode is often adopted in an industrial scene, that is, a workpiece is always in a continuous motion state in a camera imaging process. Therefore, under this condition, in order to avoid blurring of the photographed image, the camera is required to complete exposure within the movement time of the object field size corresponding to a single pixel.
As shown in fig. 4, a camera is used for photographing an image without motion blur on the surface of a workpiece, and the pixel-level features of the image are visible from a partial enlarged view of the right image. If the exposure time of the camera is longer than the corresponding movement time of the object space of the single pixels, the detail characteristics of the single pixels cannot be seen clearly. Fig. 5 is a schematic view showing imaging exposure start positions and end positions of a conventional camera, the interval between the imaging exposure start positions and the end positions being smaller than the object space size of a single pixel.
Fig. 6 is a schematic diagram of a camera high-speed imaging device according to an embodiment of the present invention, which includes a camera motion mechanism 101, a camera fixing device 102, an imaging camera 103, an imaging optical path 104, an imaging optical system 105, a camera motion mechanism control driver 106, a camera motion mechanism grating scale 107, a detection workpiece 201, a carrying motion stage 202, a motion stage grating scale 203, and a motion stage control driver 204. Detecting that the workpiece 201 is placed above the carrying moving table 202, and acquiring the real-time position of the carrying moving table 202 by a moving table grating ruler through a moving table control driver 204 to complete closed-loop control of movement; the imaging camera 103 is rigidly connected with the camera motion mechanism 101 through the camera fixing device 102, and the camera motion mechanism control driver 106 acquires the real-time position of the camera motion mechanism 101 through the camera motion mechanism grating ruler 107 and completes the closed-loop control of the motion; the imaging camera 103 acquires the light intensity signal 104 after processing the transformation by the imaging optical system 105. The object carrying moving table 202 drives the detection workpiece 201 to move from left to right, so that the image acquisition of the imaging camera 103 on the surface of the detection workpiece 201 is realized, and the subsequent further image analysis, detection and discrimination are facilitated. The motion stage control driver 204 is connected with the camera motion mechanism control driver 106 through a cable, and the motion stage control driver 204 can send a control motion instruction to the camera motion mechanism control driver 106 according to the position signal of the motion stage grating ruler 203.
The camera motion mechanism 101 may be a worm gear transmission mechanism, a linear motor transmission mechanism or a motion mechanism combining piezoelectric ceramics and a flexible hinge, and mainly realizes the bidirectional motion capability of the imaging camera 103 in a motion direction parallel to the object carrying motion table 202.
The motion table control driver 204 and the camera motion mechanism control driver 106 can be connected through pulse level signals, can realize synchronous control through bus technology such as EtherCAT, profinet, RS485, can also be connected with the same motion controller, and can realize motion relation matching of two motion mechanisms by planning motion paths of two motion axes.
The camera motion mechanism control driver 106 is connected with the imaging camera 103 through a pulse level signal, and when the motion parameter of the camera motion mechanism 101 meets a specific condition, the camera motion mechanism control driver 106 sends a trigger signal to the imaging camera 103 for controlling the imaging camera 103 to start exposure and end exposure.
The magnification of the imaging optical system 105 is α, that is, the spatial dimension of the workpiece surface area W mapped by the imaging optical system 105 becomes α×w.
FIG. 7 is a schematic illustration of the movement of a workpiece surface with inspection of the workpiece, segmented by field of view size. On the basis, fig. 8 illustrates a camera high-speed imaging method according to an embodiment of the present invention. The camera high-speed imaging method based on the camera high-speed imaging device comprises the following steps of:
step 1) stage 202 begins with V 1 Is performed by the velocity of motion stage control drive 204 by reading the motion stage grating ruler 203 signal to continuously obtain the carrier motion stage 202 position signal.
Step 2), the object carrying moving table 202 reaches the designated position point B, the moving table control driver 204 sends a trigger signal to the camera moving mechanism control driver 106 through a pulse level signal or a bus command, and the camera moving mechanism control driver 106 starts to drive the camera moving mechanism 101 to drive the imaging camera 103 to accelerate to move in the opposite moving direction of the object carrying moving table 202.
Step 3) the object carrying moving table 202 reaches the position point C, and the moving speed of the camera moving mechanism 101 reaches V 2 The movement distance of the accelerating section is S 1 Camera movement mechanism 101 movement speed V 2 And a movement speed V of the stage 202 1 Satisfy the relation V between 2 ＝α*V 1 . At this time, the movement speed of the imaging camera 103 is the same as the movement speed of the light intensity signal 104 processed and transformed by the imaging optical system 105 on the surface of the detection workpiece 201, and reaches relative rest, and the imaging camera 103 is triggered by 106 to start exposure.
Step 4) the imaging camera 103 keeps V at all times 2 The motion distance of the camera motion mechanism 101 at the constant speed section is S 2 Until the object carrying moving table 202 reaches the position point D, the imaging camera 103 is triggered to stop exposure at this time, and the moving time corresponding to the distance between the position point C and the position point D is the exposure time of the imaging camera 103. Subsequently, the camera movement mechanism 101 starts decelerating until the speed reaches zero, and the movement distance of the deceleration section thereof is S 3 At this time, the object carrying moving table reaches the position point O
Step 5) the camera movement mechanism 101 starts to move in the opposite direction, and before the object carrying movement table 202 reaches the position point H, the movement distance of the camera movement mechanism 101 reaches S 1 +S 2 +S 3 I.e. the camera movement mechanism 101 drives the imaging camera 103 to return to the corresponding position in step 2. The distance of the camera movement mechanism (101) moving in the opposite direction reaches S 1 +S 2 +S 3 When the object carrying platform (202) reaches the position point G.
Step 6) the object moving stage 202 moves to the position point H, and the space between the position point a and the position point H is the height dimension of one object field of view of the imaging camera 103.
Step 7) continuing to circulate the steps 1) to 6), and realizing imaging of different view field divided areas on the surface of the detection workpiece.
As shown in fig. 8, the movement position of the camera movement mechanism 101 or the carriage movement stage 202 needs to satisfy the following conditions:
1) During uniform motion of camera motion mechanism 101 and stage 202 at a fixed proportional speed, exposure imaging is performed on imaging camera 103, thus requiring imaging optical system 105 to have an image-side field of view that is at least greater than the photosensitive imaging surface size of imaging camera 103 plus the camera motion mechanismTotal movement distance S of 101 1 +S 2 +S 3 。
2) The size of a photosensitive imaging surface of the imaging camera is alpha x AH, wherein AH is the distance between a position point A and a position point H;
wherein S is 0 For detecting the moving distance of the conjugate image of the surface of the workpiece after being processed by the imaging optical system when the object carrying moving table moves from the position point A to the position point B, S 0 α×ab, AB is the distance between position point a and position point B; s is S 4 For detecting the moving distance of the conjugate image of the surface of the workpiece after being processed by the imaging optical system when the object carrying moving table moves from the position point O to the position point H, S 4 =α×oh, OH being the distance between position point OH and position point H;
α*AH＝α*(AB+BC+CD+DO+OH)＝S 0 +α*BC+S 2 +α*DO+S4>S 0 +S 1 +S 2 +S 3 +S 4 。
3) Movement distance S of camera movement mechanism 1 +S 2 +S 3 The size of a photosensitive imaging surface of the imaging camera is less than or equal to that of the photosensitive imaging surface of the imaging camera;
S 2 corresponding to the movement distance of the camera movement mechanism 101 at a constant speed section, the time required for the distance movement corresponds to the exposure time of the imaging camera 103, thus by compressing S 0 、S 1 、S 3 、S 4 To increase S2 the uniform velocity segment movement distance, the exposure time of the imaging camera 103 may be increased. From the inequality described above, S 2 The maximum limit is the imaging plane size (1024) of all pixels of the imaging camera 103, which is much larger than the corresponding single pixel imaging plane size (1) of the prior art camera for avoiding motion blur.
In the step 5), the camera movement mechanism 101 does not perform exposure imaging on the imaging camera 103 during the backward return movement, so long as the camera movement mechanism completes the return movement before the object carrying movement table 202 moves to the imaging start position of the next field of view.
Fig. 9 is a schematic diagram showing a camera imaging exposure start position and an end position according to an embodiment of the present invention. The center position of the image field of view is positioned near the imaging exposure starting position of the camera, and the imaging exposure ending position of the camera can be far larger than the object space size of a single pixel by matching the synchronous movement of the camera. For example, the resolution of a single image is 1024 x 1024, and the exposure time of 1024 pixels corresponding to the object space size can be realized by adopting the device and the method of the invention. Therefore, the invention can prolong the exposure time of the camera by two to three orders of magnitude, and is beneficial to improving the imaging contrast of the camera.
Claims (10)
1. The camera high-speed imaging device is characterized by comprising a camera moving mechanism (101), an imaging camera (103), an imaging optical system (105), a camera moving mechanism control driver (106), a camera moving mechanism grating ruler (107), a detection workpiece (201), a carrying moving table (202), a moving table grating ruler (203) and a moving table control driver (204); the detection workpiece (201) is arranged on the object carrying moving table (202), the imaging camera (103) is rigidly connected with the camera moving mechanism (101) through the camera fixing device (102), and the imaging camera (103) acquires an image of the surface of the detection workpiece (201) through the imaging optical system (105); the object carrying moving table (202) and the camera moving mechanism (101) are respectively provided with a moving table grating ruler (203) and a camera moving mechanism grating ruler (107), a moving table control driver (204) is connected with a camera moving mechanism control driver (106) through a cable, the moving table control driver (204) obtains the real-time position of the object carrying moving table (202) through the moving table grating ruler (203), and the camera moving mechanism control driver (106) obtains the real-time position of the camera moving mechanism (101) through the camera moving mechanism grating ruler (107).
2. The camera high-speed imaging device according to claim 1, wherein the object carrying moving table (202) drives the detection workpiece (201) to move along the horizontal direction, and the imaging optical system (105) images the image of the surface of the detection workpiece (201) to the imaging camera (103) through the imaging optical path (104);
the magnification of the imaging optical system (105) is alpha, that is, the spatial dimension of the workpiece surface area W mapped by the imaging optical system (105) becomes alpha x W.
3. The high-speed imaging device of claim 1, wherein the camera movement mechanism (101) adopts a worm gear transmission mechanism, a linear motor transmission mechanism or a movement mechanism combining piezoelectric ceramics and a flexible hinge, so as to drive the imaging camera (103) to realize bidirectional movement in a movement direction parallel to the object carrying movement table (202).
4. The camera high-speed imaging device according to claim 1, wherein the motion stage control driver (204) and the camera motion mechanism control driver (106) are connected through pulse level signals, or realize synchronous control through EtherCAT, profinet, RS485, or access the same motion controller, and realize motion relationship matching of two motion mechanisms by planning motion paths of two motion axes.
5. The high-speed imaging apparatus according to claim 1, wherein the camera movement mechanism control driver (106) is connected to the imaging camera (103) through a pulse level signal, and the camera movement mechanism control driver (106) sends a trigger signal to the imaging camera (103) to control the start exposure and the end exposure of the imaging camera (103).
6. The high-speed imaging apparatus according to claim 1, wherein the motion stage control driver (204) is capable of sending a control motion instruction to the camera motion mechanism control driver (106) according to the position signal of the motion stage grating ruler (203), and the camera motion mechanism control driver (106) drives the camera motion mechanism (101) to move after receiving the motion instruction.
7. A camera high-speed imaging method of the camera high-speed imaging device according to any one of claims 1 to 6, comprising the steps of:
step 1) imaging one view field of the surface of the detected workpiece, and starting from an initial position point A, a carrying motion table (202) starts at a V 1 Is driven by the control of the motion tableThe actuator (204) continuously obtains a position signal of the object carrying moving table (202) by reading a signal of the moving table grating ruler (203);
step 2), a carrying moving table (202) reaches a set position point B, a moving table control driver (204) sends a moving instruction to a camera moving mechanism control driver (106) through a pulse level signal or a bus instruction, and the camera moving mechanism control driver (106) starts to drive a camera moving mechanism (101) to drive an imaging camera (103) to accelerate, and the moving direction is opposite to the moving direction of the carrying moving table (202);
step 3) when the movement speed of the camera movement mechanism (101) is accelerated to V 2 When the object carrying moving table (202) reaches a position point C, triggering the imaging camera (103) to start exposure;
step 4) the camera movement mechanism (101) continuously maintains V 2 Until the object carrying platform (202) reaches the position point D, triggering the imaging camera (103) to stop exposure at the moment, and then starting the camera moving mechanism (101) to slow down until the speed reaches zero, wherein the object carrying platform reaches the position point O;
step 5) the camera moving mechanism (101) starts to move in the opposite direction, and before the object carrying moving table (202) reaches the position point H, the distance of the camera moving mechanism (101) moving in the opposite direction needs to reach S 1 +S 2 +S 3 Namely, the camera movement mechanism (101) drives the imaging camera (103) to return to the position before acceleration in the step 2;
step 6), the object carrying moving table (202) moves to a position point H, and the position point A and the position point H are separated by the height dimension of one view field of the imaging camera (103);
step 7) continuing to circulate the steps 1) to 6), and realizing imaging of different view field divided areas on the surface of the detection workpiece.
8. The method according to claim 7, wherein in the step 1), the position interval of the trigger signal of the moving stage grating ruler is configured according to the size of the field of view of the camera, and the surface of the workpiece to be inspected is divided into imaging areas with different fields of view before imaging.
9. The method for high-speed imaging of a camera according to claim 7, wherein,
an imaging camera (103) is arranged to accelerate to V in a camera movement mechanism (101) 2 The movement distance of the acceleration section is S 1 At this time, the carrying platform moves from the position point B to the position point C, S 1 <α×bc, BC is the distance between the position point B and the position point C;
wherein V is 2 ＝α*V 1 Alpha is the magnification of the imaging optical system;
an imaging camera (103) is arranged to hold V in a camera movement mechanism (101) 2 The uniform speed section movement distance at the movement speed is S 2 At this time, the carrying platform moves from the position point C to the position point D, S 2 α×cd, CD is the distance between the position point C and the position point D, and the motion time corresponding to the distance between the position point C and the position point D is the exposure time of the imaging camera (103);
let S be the motion distance of the imaging camera (103) at the deceleration section where the camera motion mechanism (101) decelerates to zero 3 At this time, the carrying platform moves from the point D to the point O, S 3 <α.DO is the distance between location point D and location point O.
10. The method for high-speed imaging of a camera according to claim 9, wherein,
1) The imaging optical system (105) has an image-side field of view size greater than the photosensitive imaging surface size of the imaging camera (103) plus the movement distance S of the camera movement mechanism (101) 1 +S 2 +S 3 ；
2) The size of a photosensitive imaging surface of the imaging camera is alpha x AH, wherein AH is the distance between a position point A and a position point H;
wherein S is 0 For detecting the moving distance of the conjugate image of the surface of the workpiece after being processed by the imaging optical system when the object carrying moving table moves from the position point A to the position point B, S 0 ＝α*AB，S 4 For detecting the moving distance of the conjugate image of the surface of the workpiece after being processed by the imaging optical system when the object carrying moving table moves from the position point O to the position point H, S 4 ＝α*OH；
α*AH＝α*(AB+BC+CD+DO+OH)＝S 0 +α*BC+S 2 +α*DO+S4>S 0 +S 1 +S 2 +S 3 +S 4 ；
3) Movement distance S of camera movement mechanism (101) 1 +S 2 +S 3 A photosensitive imaging surface size of the imaging camera (103);
by compression S 0 、S 1 、S 3 、S 4 To increase S2 the uniform velocity segment movement distance, thereby increasing the exposure time of the imaging camera (103), the S2 maximum limit being the imaging surface size of all pixels of the imaging camera (103).
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