CN116043235B - Environment-friendly film stripping agent and application thereof in film stripping process - Google Patents
Environment-friendly film stripping agent and application thereof in film stripping process Download PDFInfo
- Publication number
- CN116043235B CN116043235B CN202211072723.3A CN202211072723A CN116043235B CN 116043235 B CN116043235 B CN 116043235B CN 202211072723 A CN202211072723 A CN 202211072723A CN 116043235 B CN116043235 B CN 116043235B
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- CN
- China
- Prior art keywords
- agent
- film stripping
- film
- environment
- friendly
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- 238000000034 method Methods 0.000 title claims abstract description 29
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 98
- 230000007797 corrosion Effects 0.000 claims abstract description 44
- 238000005260 corrosion Methods 0.000 claims abstract description 44
- 239000003112 inhibitor Substances 0.000 claims abstract description 36
- 230000000149 penetrating effect Effects 0.000 claims abstract description 19
- 239000008139 complexing agent Substances 0.000 claims abstract description 15
- 239000003960 organic solvent Substances 0.000 claims abstract description 15
- 239000004094 surface-active agent Substances 0.000 claims abstract description 14
- 239000012752 auxiliary agent Substances 0.000 claims abstract description 12
- 230000002378 acidificating effect Effects 0.000 claims abstract description 10
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 claims description 39
- 229910019142 PO4 Inorganic materials 0.000 claims description 24
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 claims description 22
- 239000010452 phosphate Substances 0.000 claims description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical group [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims description 17
- 229910017053 inorganic salt Inorganic materials 0.000 claims description 17
- 238000001179 sorption measurement Methods 0.000 claims description 17
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 claims description 16
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 12
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 claims description 12
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 11
- 239000011734 sodium Substances 0.000 claims description 11
- 229910052708 sodium Inorganic materials 0.000 claims description 11
- BWDBEAQIHAEVLV-UHFFFAOYSA-N 6-methylheptan-1-ol Chemical compound CC(C)CCCCCO BWDBEAQIHAEVLV-UHFFFAOYSA-N 0.000 claims description 10
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 9
- 235000019270 ammonium chloride Nutrition 0.000 claims description 8
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims description 6
- IYDGMDWEHDFVQI-UHFFFAOYSA-N phosphoric acid;trioxotungsten Chemical compound O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.OP(O)(O)=O IYDGMDWEHDFVQI-UHFFFAOYSA-N 0.000 claims description 6
- 229910001961 silver nitrate Inorganic materials 0.000 claims description 6
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 claims description 4
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 claims description 4
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 4
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 4
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052921 ammonium sulfate Inorganic materials 0.000 claims description 4
- 235000011130 ammonium sulphate Nutrition 0.000 claims description 4
- 239000012964 benzotriazole Substances 0.000 claims description 4
- 239000011591 potassium Substances 0.000 claims description 4
- 229910052700 potassium Inorganic materials 0.000 claims description 4
- SFNALCNOMXIBKG-UHFFFAOYSA-N ethylene glycol monododecyl ether Chemical compound CCCCCCCCCCCCOCCO SFNALCNOMXIBKG-UHFFFAOYSA-N 0.000 claims description 3
- 229940051841 polyoxyethylene ether Drugs 0.000 claims description 3
- 229920000056 polyoxyethylene ether Polymers 0.000 claims description 3
- 235000019832 sodium triphosphate Nutrition 0.000 claims description 3
- FJLUATLTXUNBOT-UHFFFAOYSA-N 1-Hexadecylamine Chemical compound CCCCCCCCCCCCCCCCN FJLUATLTXUNBOT-UHFFFAOYSA-N 0.000 claims description 2
- URDCARMUOSMFFI-UHFFFAOYSA-N 2-[2-[bis(carboxymethyl)amino]ethyl-(2-hydroxyethyl)amino]acetic acid Chemical compound OCCN(CC(O)=O)CCN(CC(O)=O)CC(O)=O URDCARMUOSMFFI-UHFFFAOYSA-N 0.000 claims description 2
- ACOQOLIJGGKILA-UHFFFAOYSA-N 2-methylpentane-1,1-diol Chemical compound CCCC(C)C(O)O ACOQOLIJGGKILA-UHFFFAOYSA-N 0.000 claims description 2
- JSGVZVOGOQILFM-UHFFFAOYSA-N 3-methoxy-1-butanol Chemical compound COC(C)CCO JSGVZVOGOQILFM-UHFFFAOYSA-N 0.000 claims description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 claims description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 claims description 2
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 claims description 2
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 claims description 2
- ZGTMUACCHSMWAC-UHFFFAOYSA-L EDTA disodium salt (anhydrous) Chemical compound [Na+].[Na+].OC(=O)CN(CC([O-])=O)CCN(CC(O)=O)CC([O-])=O ZGTMUACCHSMWAC-UHFFFAOYSA-L 0.000 claims description 2
- 239000004471 Glycine Substances 0.000 claims description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 2
- IOVCWXUNBOPUCH-UHFFFAOYSA-M Nitrite anion Chemical compound [O-]N=O IOVCWXUNBOPUCH-UHFFFAOYSA-M 0.000 claims description 2
- REYJJPSVUYRZGE-UHFFFAOYSA-N Octadecylamine Chemical compound CCCCCCCCCCCCCCCCCCN REYJJPSVUYRZGE-UHFFFAOYSA-N 0.000 claims description 2
- 229920000289 Polyquaternium Polymers 0.000 claims description 2
- 229920001214 Polysorbate 60 Polymers 0.000 claims description 2
- YDONNITUKPKTIG-UHFFFAOYSA-N [Nitrilotris(methylene)]trisphosphonic acid Chemical compound OP(O)(=O)CN(CP(O)(O)=O)CP(O)(O)=O YDONNITUKPKTIG-UHFFFAOYSA-N 0.000 claims description 2
- 150000001412 amines Chemical class 0.000 claims description 2
- SWLVFNYSXGMGBS-UHFFFAOYSA-N ammonium bromide Chemical compound [NH4+].[Br-] SWLVFNYSXGMGBS-UHFFFAOYSA-N 0.000 claims description 2
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 claims description 2
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 claims description 2
- 125000004177 diethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 2
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 claims description 2
- 150000002191 fatty alcohols Chemical class 0.000 claims description 2
- MEFBJEMVZONFCJ-UHFFFAOYSA-N molybdate Chemical compound [O-][Mo]([O-])(=O)=O MEFBJEMVZONFCJ-UHFFFAOYSA-N 0.000 claims description 2
- 229910017604 nitric acid Inorganic materials 0.000 claims description 2
- MCLZMWVEJOJWRA-UHFFFAOYSA-I pentasodium;pentaacetate Chemical compound [Na+].[Na+].[Na+].[Na+].[Na+].CC([O-])=O.CC([O-])=O.CC([O-])=O.CC([O-])=O.CC([O-])=O MCLZMWVEJOJWRA-UHFFFAOYSA-I 0.000 claims description 2
- 229920000136 polysorbate Polymers 0.000 claims description 2
- CGFYHILWFSGVJS-UHFFFAOYSA-N silicic acid;trioxotungsten Chemical compound O[Si](O)(O)O.O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1.O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1.O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1.O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 CGFYHILWFSGVJS-UHFFFAOYSA-N 0.000 claims description 2
- 239000003760 tallow Substances 0.000 claims description 2
- PBYZMCDFOULPGH-UHFFFAOYSA-N tungstate Chemical compound [O-][W]([O-])(=O)=O PBYZMCDFOULPGH-UHFFFAOYSA-N 0.000 claims description 2
- LSGOVYNHVSXFFJ-UHFFFAOYSA-N vanadate(3-) Chemical compound [O-][V]([O-])([O-])=O LSGOVYNHVSXFFJ-UHFFFAOYSA-N 0.000 claims description 2
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 abstract description 27
- 229910052782 aluminium Inorganic materials 0.000 abstract description 16
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 14
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 abstract description 10
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 9
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 abstract description 8
- 239000003513 alkali Substances 0.000 abstract description 8
- 239000007788 liquid Substances 0.000 abstract description 6
- 239000002994 raw material Substances 0.000 abstract description 6
- 239000000126 substance Substances 0.000 abstract description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 abstract description 4
- 229910052731 fluorine Inorganic materials 0.000 abstract description 4
- 239000011737 fluorine Substances 0.000 abstract description 4
- 239000002699 waste material Substances 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 150000001875 compounds Chemical class 0.000 abstract description 2
- 238000011161 development Methods 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 abstract description 2
- 238000004065 wastewater treatment Methods 0.000 abstract description 2
- 235000021317 phosphate Nutrition 0.000 description 21
- 239000002253 acid Substances 0.000 description 10
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- 238000011282 treatment Methods 0.000 description 8
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 7
- 230000007794 irritation Effects 0.000 description 7
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 7
- 230000004580 weight loss Effects 0.000 description 7
- 238000004377 microelectronic Methods 0.000 description 5
- 239000001488 sodium phosphate Substances 0.000 description 5
- 229910000406 trisodium phosphate Inorganic materials 0.000 description 5
- 235000019801 trisodium phosphate Nutrition 0.000 description 5
- 238000005498 polishing Methods 0.000 description 4
- 235000019830 sodium polyphosphate Nutrition 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000003595 mist Substances 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 239000004575 stone Substances 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 2
- 229910002651 NO3 Inorganic materials 0.000 description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 2
- 206010040880 Skin irritation Diseases 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000004115 Sodium Silicate Substances 0.000 description 2
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 2
- -1 aluminum ions Chemical class 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 125000003354 benzotriazolyl group Chemical group N1N=NC2=C1C=CC=C2* 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- YIXJRHPUWRPCBB-UHFFFAOYSA-N magnesium nitrate Chemical compound [Mg+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O YIXJRHPUWRPCBB-UHFFFAOYSA-N 0.000 description 2
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 230000036556 skin irritation Effects 0.000 description 2
- 231100000475 skin irritation Toxicity 0.000 description 2
- 239000010802 sludge Substances 0.000 description 2
- GCLGEJMYGQKIIW-UHFFFAOYSA-H sodium hexametaphosphate Chemical compound [Na]OP1(=O)OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])O1 GCLGEJMYGQKIIW-UHFFFAOYSA-H 0.000 description 2
- 235000019982 sodium hexametaphosphate Nutrition 0.000 description 2
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Chemical compound [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 description 2
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 2
- 229910052911 sodium silicate Inorganic materials 0.000 description 2
- 239000007785 strong electrolyte Substances 0.000 description 2
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 description 2
- LWIHDJKSTIGBAC-UHFFFAOYSA-K tripotassium phosphate Chemical compound [K+].[K+].[K+].[O-]P([O-])([O-])=O LWIHDJKSTIGBAC-UHFFFAOYSA-K 0.000 description 2
- JTNCEQNHURODLX-UHFFFAOYSA-N 2-phenylethanimidamide Chemical compound NC(=N)CC1=CC=CC=C1 JTNCEQNHURODLX-UHFFFAOYSA-N 0.000 description 1
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 1
- 235000008733 Citrus aurantifolia Nutrition 0.000 description 1
- 239000003109 Disodium ethylene diamine tetraacetate Substances 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 235000011941 Tilia x europaea Nutrition 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000003973 alkyl amines Chemical class 0.000 description 1
- APUPEJJSWDHEBO-UHFFFAOYSA-P ammonium molybdate Chemical compound [NH4+].[NH4+].[O-][Mo]([O-])(=O)=O APUPEJJSWDHEBO-UHFFFAOYSA-P 0.000 description 1
- 239000011609 ammonium molybdate Substances 0.000 description 1
- 235000018660 ammonium molybdate Nutrition 0.000 description 1
- 229940010552 ammonium molybdate Drugs 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000001506 calcium phosphate Substances 0.000 description 1
- 229910000389 calcium phosphate Inorganic materials 0.000 description 1
- 235000011010 calcium phosphates Nutrition 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 239000013522 chelant Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000010668 complexation reaction Methods 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 235000019301 disodium ethylene diamine tetraacetate Nutrition 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 150000002169 ethanolamines Chemical class 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 239000004571 lime Substances 0.000 description 1
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 1
- 239000000347 magnesium hydroxide Substances 0.000 description 1
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 210000004400 mucous membrane Anatomy 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- LQPLDXQVILYOOL-UHFFFAOYSA-I pentasodium;2-[bis[2-[bis(carboxylatomethyl)amino]ethyl]amino]acetate Chemical group [Na+].[Na+].[Na+].[Na+].[Na+].[O-]C(=O)CN(CC([O-])=O)CCN(CC(=O)[O-])CCN(CC([O-])=O)CC([O-])=O LQPLDXQVILYOOL-UHFFFAOYSA-I 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229910000343 potassium bisulfate Inorganic materials 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- 229910000160 potassium phosphate Inorganic materials 0.000 description 1
- 235000011009 potassium phosphates Nutrition 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 1
- 235000017557 sodium bicarbonate Nutrition 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 1
- 235000010344 sodium nitrate Nutrition 0.000 description 1
- 239000004317 sodium nitrate Substances 0.000 description 1
- 229910052979 sodium sulfide Inorganic materials 0.000 description 1
- GRVFOGOEDUUMBP-UHFFFAOYSA-N sodium sulfide (anhydrous) Chemical compound [Na+].[Na+].[S-2] GRVFOGOEDUUMBP-UHFFFAOYSA-N 0.000 description 1
- QORWJWZARLRLPR-UHFFFAOYSA-H tricalcium bis(phosphate) Chemical compound [Ca+2].[Ca+2].[Ca+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O QORWJWZARLRLPR-UHFFFAOYSA-H 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
- C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
- C23G5/032—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing oxygen-containing compounds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
- C23G1/16—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions using inhibitors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
- C23G1/22—Light metals
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- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
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- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Detergent Compositions (AREA)
Abstract
The invention relates to G03F7, in particular to an environment-friendly film stripping agent and application thereof in a film stripping process. The raw materials of the environment-friendly film stripping agent comprise an alkaline stripping agent, an acidic auxiliary agent, a penetrating agent, an accelerator, a corrosion inhibitor, a complexing agent, a surfactant and an organic solvent. The environment-friendly film stripping agent provided by the invention does not contain fluorine-containing substances such as hydrofluoric acid, strong alkali compounds such as potassium hydroxide and sodium hydroxide, does not generate waste liquid such as phosphoric acid and sulfuric acid, is environment-friendly, is simple in wastewater treatment and small in harm to human bodies, has low dimensional change of workpieces in a film stripping process using the environment-friendly film stripping agent, causes little loss in film stripping, has particularly obvious film stripping effect on the workpieces with film thickness of 10-15 mu m, has long dead time which can reach 3min, and provides time for the subsequent process of re-coating the workpieces; after film stripping, no flow mark exists on the surface of the aluminum substrate workpiece, and the market development requirement is met.
Description
Technical Field
The invention relates to G03F7, in particular to an environment-friendly film stripping agent and application thereof in a film stripping process.
Background
In general, a layer of oxide film is formed on the surface of an aluminum workpiece to protect and decorate the workpiece, however, in the anodic oxidation process of the product, the oxide film is unqualified inevitably due to uneven coloring, poor film thickness or hole sealing defects, and the oxide film needs to be reoxidized after film removal.
The patent No. CN113151830A provides an aluminum polishing solution and application thereof, and potassium bisulfate, alkylamine and ammonium molybdate are added on the basis of sulfuric acid and phosphoric acid, so that the polishing glossiness is improved. The patent No. CN103122475B provides an aluminum alloy electrochemical polishing solution and an aluminum alloy electrochemical polishing method, sodium sulfide is added on the basis of sodium hydroxide, and the phenomenon that crystal faces flash due to corrosion of a workpiece is avoided.
The traditional tri-acid film stripping agent can generate a large amount of waste liquid of phosphoric acid and sulfuric acid in the film stripping process, and the waste liquid is discharged to ensure that COD in water is increased, and sludge is required to be subjected to specific treatment, so that the method is extremely environment-friendly; the alkaline film stripping agent mainly comprising sodium hydroxide not only can generate alkali fog, but also can corrode aluminum materials, and has large size change and low reworking times.
Disclosure of Invention
In order to solve the problems, the first aspect of the invention provides an environment-friendly film stripping agent, wherein the environment-friendly film stripping agent comprises an alkaline stripping agent, an acidic auxiliary agent, a penetrating agent, an accelerator, a corrosion inhibitor, a complexing agent, a surfactant and an organic solvent.
Preferably, the raw materials of the environment-friendly stripping agent comprise 21-24g of alkaline stripping agent, 2-4.5g of acid auxiliary agent, 4-6g of penetrating agent, 3-5.5g of accelerator, 2-4.5g of corrosion inhibitor, 6-8g of complexing agent, 2-3g of surfactant and 12-15g of organic solvent.
As a preferred embodiment of the present invention, the alkaline exfoliating agent is selected from one or more of hydroxide, ethanolamine, alkaline carbonate, alkaline phosphate, alkaline nitrate.
Preferably, the hydroxide is selected from one or more of lithium hydroxide, magnesium hydroxide, potassium hydroxide.
Preferably, the ethanolamine is selected from one or more of triethanolamine, diethanolamine, monoethanolamine.
Preferably, the alkaline carbonate is selected from one or more of sodium carbonate, potassium carbonate, sodium bicarbonate.
Preferably, the alkaline phosphate is selected from one or more of trisodium phosphate, potassium phosphate, sodium hypophosphite, sodium polyphosphate.
Further preferably, the pH of the sodium polyphosphate is 7.8-9.9.
Still more preferably, the sodium polyphosphate is selected from one or more of sodium tripolyphosphate, sodium tetrapolyphosphate, sodium pentapolyphosphate, sodium hexapolyphosphate.
Preferably, the nitrate is selected from one or more of sodium nitrate, potassium nitrate, magnesium nitrate.
Further preferred alkaline exfoliants are hydroxides, ethanolamines and alkaline phosphates. In the alkaline stripping agent, the weight ratio of the hydroxide to the ethanolamine to the alkaline phosphate is (2-3.7): (5-9): (10-14.5).
Further preferably, in the alkaline exfoliating agent, the weight ratio of hydroxide, ethanolamine and alkaline phosphate is (2.8-3.4): (6.5-8.2): (11.4-13.7).
In order to ensure the film stripping effect and reduce the corrosion of the film stripping agent to the workpiece, the applicant finds that hydroxide, ethanolamine and alkaline phosphate are added, and the weight ratio of the hydroxide to the ethanolamine to the alkaline phosphate is controlled to be (2.8-3.4): (6.5-8.2): (11.4-13.7) can be changed to achieve the effects, the corrosion of the film stripping agent to the workpiece is reduced while the film stripping effect is ensured, the weight loss rate of the workpiece after film stripping is reduced, and the weight ratio of triethanolamine to monoethanolamine in the ethanolamine is controlled to be 5: in the case of (2-2.5), not only the above-mentioned effects are further improved, but also the holes, holes and uneven surfaces of the aluminum base material work piece are unexpectedly prevented from generating air marks without adding an anti-punching agent. The applicant speculates that in the alkaline environment where a small amount of hydroxide and a proper amount of ethanolamine exist, the alkaline phosphate can influence the crystallization property of the oxide film, so that the aluminum ions are slowly increased in the film stripping process, and the corrosiveness of the film stripping agent is reduced; meanwhile, the speed of aluminum ion formation is controlled, and the catalysis of the accelerator is cooperated, so that the effect of each molecule of the film stripping agent on the oxide film molecules is improved, and the film stripping effect is improved.
Still more preferably, the hydroxide is lithium hydroxide.
Still more preferably, the ethanolamine is triethanolamine and monoethanolamine, and the weight ratio of triethanolamine to monoethanolamine is 5: (2-2.5).
Still more preferably, the alkaline phosphate is trisodium phosphate and sodium hexapolyphosphate; in alkaline phosphate, the weight ratio of trisodium phosphate to sodium hexametaphosphate is (2-3.5): (8-10).
As a preferred embodiment of the present invention, the acidic auxiliary is selected from one or more of ammonium chloride, ammonium bromide and ammonium fluoride.
Preferably, the acidic auxiliary is ammonium chloride.
In order to further reduce the alkalinity of the film stripping agent and reduce the generation of alkali mist, an acid auxiliary agent is added into the system. Ammonium chloride is a weak acid and is also relatively stable when added to a solution system because it is a strong electrolyte, but is also corrosive to metals when heated because it is a strong electrolyte. However, the applicant found through a great deal of experiments that the addition of ammonium chloride to the system not only reduces the generation of acid mist, but also reduces the corrosion of aluminum workpieces during film stripping, and in addition, unexpectedly improves the glossiness of the workpieces after film stripping. This is probably due to the fact that ammonium chloride and sodium polyphosphate cooperate to chelate metal ions to a certain extent, the viscosity of the system is properly reduced, the adhesive mucous membrane layer attached to the surface of an aluminum product is affected, and diffusion of substances in an oxide film is inhibited, so that corrosion of the oxide film is more uniform in the film stripping process, and the surface of a workpiece after film stripping is softer and finer.
As a preferable technical scheme of the invention, the alkali resistance of the penetrating agent is more than or equal to 200NaOHg/L, and the penetrating power is within 8 s.
Preferably, the penetrating agent is one or more selected from isooctyl alcohol ammonium sulfate HA-08, isooctyl alcohol ether phosphate OEP-70 and fatty alcohol polyoxyethylene ether JEC-E.
Further preferably, the penetrating agent is isooctyl alcohol ammonium sulfate HA-08 and/or isooctyl alcohol ether phosphate OEP-70.
As a preferable technical scheme of the invention, the accelerator is selected from one or more of ammonium metatungstate, sodium metatungstate, phosphotungstic acid, nitric acid, silicotungstic acid, potassium phosphotungstate, potassium metatungstate and silver nitrate.
Preferably, the accelerator is phosphotungstic acid, sodium phosphotungstate, or silver nitrate.
Further preferably, in the accelerator, the weight ratio of phosphotungstic acid, sodium phosphotungstate and silver nitrate is 1:3: 1.1.
As a preferable technical scheme of the invention, the corrosion inhibitor comprises inorganic salt and adsorption film type corrosion inhibitor; the inorganic salt is selected from one or more of silicate, chromate, tungstate, borate, molybdate, vanadate and nitrite, and the adsorption film type corrosion inhibitor is selected from one or more of hexadecylamine, tallow amine, octadecylamine, mercaptobenzothiazole and benzotriazole.
Preferably, in the corrosion inhibitor, the weight ratio of the inorganic salt to the adsorption film type corrosion inhibitor is (1-1.8): 1.2.
In order to inhibit corrosion of the film stripping agent, a corrosion inhibitor is generally required to be added into the system. In experiments, the applicant has unexpectedly found that by compounding the inorganic salt and the adsorption film type corrosion inhibitor, the weight ratio of the inorganic salt to the adsorption film type corrosion inhibitor is controlled to be (1-1.8): 1.2, unexpectedly, the dead time of the stripping is prolonged, and the odor and skin irritation of the stripping agent are reduced. This is probably due to the fact that in the system, the inorganic salt and the adsorption film type corrosion inhibitor form a specific complexation with the organic solvent, the complexing agent, and the penetrating agent of a specific penetrating power, thereby affecting the film stripping process.
Further preferably, in the corrosion inhibitor, the weight ratio of the inorganic salt to the adsorption film type corrosion inhibitor is 1.4:1.2.
Still more preferably, the inorganic salt is a silicate, the silicate being sodium silicate; the adsorption film type corrosion inhibitor is benzotriazole.
As a preferred technical scheme of the invention, the complexing agent is selected from one or more of amino trimethylene phosphonic acid, glycine, malonic acid, sodium tripolyphosphate, diethyl triamine penta sodium pentaacetate and hydroxyethyl ethylenediamine triacetic acid.
As a preferable technical scheme of the invention, the surfactant is one or more selected from laureth, disodium ethylenediamine tetraacetate, polyquaternium, diethylenetriamine, tween 40 and tween 60.
As a preferred technical scheme of the invention, the organic solvent is selected from one or more of glycerol, propylene glycol, dipropylene glycol, 3-methoxybutanol and 2-methylpentanediol.
Preferably, the preparation method of the environment-friendly film stripping agent comprises the following steps: adding water of 0.8-3.1 times of film removing agent into a container, and sequentially adding complexing agent, organic solvent, corrosion inhibitor, surfactant, penetrating agent, promoter, alkaline stripping agent and acidic auxiliary agent.
The second aspect of the invention provides application of an environment-friendly film stripping agent in a film stripping process, wherein in the film stripping process, the film stripping agent concentration is 17-21wt%, the film stripping temperature is 55-60 ℃, the film stripping time is 3-8min, and the film thickness is 10-15 mu m.
Compared with the prior art, the invention has the following beneficial effects:
Adding hydroxide, ethanolamine and alkaline phosphate, and controlling the weight ratio of the hydroxide to the ethanolamine to the alkaline phosphate to be (2.8-3.4): (6.5-8.2): (11.4-13.7), not only can the film stripping effect be ensured, but also the corrosion of the film stripping agent to the workpiece can be reduced, the weight loss rate of the workpiece after film stripping is reduced, and the holes, holes and concave-convex surfaces of the aluminum base material workpiece can not generate air marks on the premise of not adding the anti-punching agent; the ammonium chloride is added, so that the generation of acid mist can be reduced, the corrosion of an aluminum workpiece can be reduced during film stripping, and the glossiness of the workpiece after film stripping treatment is improved; the inorganic salt and the adsorption film type corrosion inhibitor are compounded, and particularly the weight ratio of the inorganic salt to the adsorption film type corrosion inhibitor is controlled to be (1-1.8): 1.2, the dead time of the film stripping is prolonged, and the smell and skin irritation of the film stripping agent are reduced. The environment-friendly film stripping agent provided by the invention does not contain fluorine-containing substances such as hydrofluoric acid, strong alkali compounds such as potassium hydroxide and sodium hydroxide, does not generate waste liquid such as phosphoric acid and sulfuric acid, is environment-friendly, has little harm to human bodies, is simple in wastewater treatment, does not need a large amount of lime to treat phosphorus-containing substances in wastewater, reduces the discharge of calcium phosphate sludge, does not need a large amount of sulfuric acid for neutralization, and saves the use cost of acid. In the film stripping process using the environment-friendly film stripping agent, the dimensional change of the workpiece is low, the loss caused by film stripping is less, particularly, the film stripping effect is particularly remarkable for the workpiece with the film thickness of 10-15 mu m, the dead time is long and can reach 3min, and the time is provided for the subsequent process of re-coating the workpiece; after film stripping, no flow mark exists on the surface of the aluminum substrate workpiece, and the market development requirement is met.
Drawings
FIG. 1 is a graph showing the weight change of the test piece before and after film stripping according to example 1 of the present invention.
FIG. 2 is a graph showing the thickness change of the test piece before and after film stripping in example 1.
Detailed Description
Examples
The materials in the examples are all commercially available, wherein triethanolamine and monoethanolamine are both purchased from the chemical industry of Jiaxing, the penetrants in examples 1,3 and 4 are different in sources, isooctyl alcohol ammonium sulfate HA-08 is purchased from sea-stone flowers, alkali resistance is 280g NaOH/L, the permeability is within 5s, isooctyl alcohol ether phosphate OEP-70 is purchased from sea-stone flowers, alkali resistance is 200g NaOH/L, the permeability is within 8s, isooctyl alcohol ether phosphate sodium salt AEP-98 is purchased from sea-stone flowers, alkali resistance is 200g NaOH/L, the permeability is within 10s, laureth is purchased from Asahi, model number AEO-3 is obtained from Nanjin crown organisms, and the pH is 8.0.
Example 1
The example provides an environment-friendly stripping agent, which comprises 22.6g of alkaline stripping agent, 2.7g of acid auxiliary agent, 5.1g of penetrating agent, 5.1g of accelerator, 2.6g of corrosion inhibitor, 7.5g of complexing agent, 2.4g of surfactant and 14g of organic solvent.
The alkaline exfoliating agent is hydroxide, ethanolamine and alkaline phosphate. In the alkaline exfoliating agent, the weight ratio of hydroxide, ethanolamine and alkaline phosphate is 3.12:7.28:12.2.
The hydroxide is lithium hydroxide. The ethanolamine is triethanolamine and monoethanolamine, and the weight ratio of the triethanolamine to the monoethanolamine is 5:2.28. alkaline phosphates are trisodium phosphate and sodium hexapolyphosphate; in alkaline phosphate, trisodium phosphate and sodium hexametaphosphate were present in a weight ratio of 3.2:9.
The acidic auxiliary agent is ammonium chloride. The penetrating agent is HA-08.
The promoter is phosphotungstic acid, sodium phosphotungstate and silver nitrate. In the accelerator, the weight ratio of phosphotungstic acid to sodium phosphotungstate to silver nitrate is 1:3:1.1.
The corrosion inhibitor comprises inorganic salt and adsorption film type corrosion inhibitor; in the corrosion inhibitor, the weight ratio of the inorganic salt to the adsorption film type corrosion inhibitor is 1.4:1.2.
The inorganic salt is silicate, and the silicate is sodium silicate; the adsorption film type corrosion inhibitor is benzotriazole.
The complexing agent is pentasodium diethylenetriamine pentaacetate. The surfactant is laurinol polyoxyethylene ether. The organic solvent is glycerol.
The preparation method of the environment-friendly film removing agent comprises the following steps: adding 2.5 times of water of the film stripping agent into a container, and sequentially adding a complexing agent, an organic solvent, a corrosion inhibitor, a surfactant, a penetrating agent, an accelerator, an alkaline stripping agent and an acidic auxiliary agent.
The example also provides application of the environment-friendly film stripping agent in a film stripping process, wherein in the film stripping process, the film stripping agent is diluted to a concentration of 20wt% by adding water, the film stripping temperature is 60 ℃, the film stripping time is 5min, and the film thickness is 10-12 mu m.
Example 2
The present example provides an environmentally friendly stripping agent, which is different from example 1 in that the raw materials of the environmentally friendly stripping agent comprise 22.6g of alkaline stripping agent, 3g of acidic auxiliary agent, 6g of penetrating agent, 5.1g of accelerator, 2.6g of corrosion inhibitor, 7g of complexing agent, 3g of surfactant and 15g of organic solvent.
The example also provides an application of the environment-friendly film stripping agent in the film stripping process, which is the same as that of the example 1.
Example 3
This example provides an environmentally friendly stripping agent, which is different from example 1 in that the source of the penetrant is OEP-70, and the raw materials of the environmentally friendly stripping agent comprise 22.6g of alkaline stripping agent, 2.5g of acid auxiliary agent, 4.9g of penetrant, 5.1g of accelerator, 2.6g of corrosion inhibitor, 7.5g of complexing agent, 2.8g of surfactant and 12g of organic solvent.
The example also provides an application of the environment-friendly film stripping agent in a film stripping process, and the difference from the embodiment 1 is that the film stripping agent concentration in the film stripping process is 18wt%, the film stripping temperature is 60 ℃, the film stripping time is 6min, and the film thickness is 10-12 mu m.
Example 4
The example provides an environment-friendly film stripping agent, which is different from the example 1 in that the source of the penetrating agent is different from that of the example 1, the penetrating agent is isooctyl alcohol ether phosphate sodium salt AEP-98, and the raw materials of the environment-friendly film stripping agent comprise 22.6g of alkaline stripping agent, 2.1g of acid auxiliary agent, 4.3g of penetrating agent, 5.1g of accelerator, 2.6g of corrosion inhibitor, 7g of complexing agent, 2.5g of surfactant and 13g of organic solvent.
The example also provides an application of the environment-friendly film stripping agent in a film stripping process, and the difference from the embodiment 1 is that the film stripping agent concentration in the film stripping process is 21wt%, the film stripping temperature is 58 ℃, the film stripping time is 5min, and the film thickness is 10-12 mu m.
Example 5
This example provides an environmentally friendly stripping agent, which, unlike example 1, comprises raw materials of 22.6g of alkaline stripping agent, 4.9g of penetrant, 5.1g of accelerator, 2.6g of corrosion inhibitor, 7.5g of complexing agent, 2.8g of surfactant and 12g of organic solvent.
The example also provides an application of the environment-friendly film stripping agent in the film stripping process, which is the same as that of the example 1.
Example 6
This example provides an environmentally friendly stripping agent, which is different from example 1 in that the alkaline stripping agent is hydroxide and alkaline phosphate. In the alkaline exfoliating agent, the weight ratio of the hydroxide to the alkaline phosphate is 3:12.
The example also provides an application of the environment-friendly film stripping agent in the film stripping process, which is the same as that of the example 1.
Example 7
The example provides an environment-friendly film stripping agent, which is different from the example 1 in that the weight ratio of inorganic salt to adsorption film type corrosion inhibitor is 1.3:0.5.
The example also provides an application of the environment-friendly film stripping agent in the film stripping process, which is the same as that of the example 1.
Performance test:
1. Gloss test: aluminum workpieces (available from the company of microelectronic materials, zhejiang, ruitte) 80mm long by 35mm wide by 2.65mm high were each subjected to film stripping treatment using the environment-friendly film stripping agents obtained in examples 1 to 7, and the gloss of the film-stripped workpieces was measured using a 60-degree angle gloss meter, and the results are shown in Table 1:
TABLE 1
| Examples | Gloss level |
| 1 | 130 |
| 2 | 127 |
| 3 | 128 |
| 4 | 119 |
| 5 | 107 |
| 6 | 96 |
| 7 | 111 |
2. Weight loss ratio test one: the aluminum work pieces (from the company of the microelectronic materials of Zhejiang, 35mm wide by 2.65mm high) were subjected to respective film stripping treatments under the same conditions using a sodium hydroxide film stripping solution (from the company of the microelectronic materials of Zhejiang, inc.), a fluorine-containing film stripping solution (from Hua Beian, model HA-002) and the environment-friendly film stripping agent obtained in example 1, and after the film stripping treatments were tested for 1min,2min, 3min,4min and 5min, the weights of the work pieces before and after film stripping were tested, the weight loss was calculated, and the results were shown in FIG. 1 and Table 2, and the plate thicknesses before and after film stripping of the work pieces were tested, and the plate thickness changes were shown in FIG. 2 and Table 3.
TABLE 2
| Type of stripping solution | 1min(％) | 2min(％) | 3min(％) | 4min(％) | 5min(％) |
| Example 1 | 0.36 | 0.86 | 0.95 | 1.10 | 1.15 |
| Fluorine-containing film removing liquid | 1.11 | 1.13 | 1.17 | 1.29 | 1.71 |
| Sodium hydroxide film removing liquid | 1.20 | 1.50 | 1.61 | 1.96 | 2.22 |
TABLE 3 Table 3
3. And a weight loss rate test II: aluminum workpieces (from the company of microelectronic materials, inc. of Zhejiang Ruiter) 80mm long by 35mm wide by 2.65mm high were subjected to film stripping treatment with the environment-friendly film stripping agents obtained in examples 1 and 4 to 7, respectively, and the weights of the workpieces before and after film stripping were measured, and the weight loss ratios were calculated, and the results are shown in Table 4:
TABLE 4 Table 4
| Examples | Weight loss ratio (%) |
| 1 | 1.15 |
| 4 | 1.35 |
| 5 | 1.99 |
| 6 | 1.72 |
| 7 | 1.64 |
4. Appearance test: aluminum workpieces (available from Zhejiang Ruiter microelectronics materials Co., ltd.) 80mm long by 35mm wide by 2.65mm high were each subjected to a film stripping treatment using the environmentally friendly film stripping agents obtained in examples 1 to 7, and after the treatment, the surface appearance of the workpieces was observed, and the results are shown in Table 5:
TABLE 5
| Examples | Appearance of |
| 1 | The surface of the workpiece has no flow mark, holes and concave-convex surfaces have no air marks, and the hand feeling is soft and fine |
| 2 | The surface of the workpiece has no flow mark, holes and concave-convex surfaces have no air marks, and the hand feeling is soft and fine |
| 3 | The surface of the workpiece has no flow mark, holes and concave-convex surfaces have no air marks, and the hand feeling is soft and fine |
| 4 | The surface of the workpiece has flow marks, holes and concave-convex surfaces have air marks, and the hand feeling is rough |
| 5 | The surface of the workpiece has no flow mark, holes and concave-convex surfaces have air marks and has rough hand feeling |
| 6 | The surface of the workpiece has flow marks, holes and concave-convex surfaces have air marks, and the hand feeling is rough |
| 7 | The surface of the workpiece has no flow mark, holes and concave-convex surfaces have air marks, and the hand feeling is soft and fine |
5. Odor test: the environmental protection film-removing agents obtained in examples 1 to 7 were subjected to odor test, and the results are shown in Table 6:
TABLE 6
| Examples | Smell of |
| 1 | No irritation |
| 2 | No irritation |
| 3 | No irritation |
| 4 | No irritation |
| 5 | Has irritation |
| 6 | Has irritation |
| 7 | No irritation |
Claims (6)
1. The environment-friendly film stripping agent is characterized in that the environment-friendly film stripping agent comprises an alkaline stripping agent, an acidic auxiliary agent, a penetrating agent, an accelerator, a corrosion inhibitor, a complexing agent, a surfactant and an organic solvent;
The alkaline stripping agent is hydroxide, ethanolamine and alkaline phosphate; in the alkaline stripping agent, the weight ratio of the hydroxide to the ethanolamine to the alkaline phosphate is (2.8-3.4): (6.5-8.2): (11.4-13.7);
The penetrating agent is one or more selected from isooctyl alcohol ammonium sulfate HA-08, isooctyl alcohol ether phosphate OEP-70 and fatty alcohol polyoxyethylene ether JEC-E;
the promoter is one or more selected from ammonium metatungstate, sodium metatungstate, phosphotungstic acid, nitric acid, silicotungstic acid, potassium phosphotungstate, potassium metatungstate and silver nitrate;
The corrosion inhibitor comprises inorganic salt and adsorption film type corrosion inhibitor; in the corrosion inhibitor, the weight ratio of the inorganic salt to the adsorption film type corrosion inhibitor is (1-1.8): 1.2;
The complexing agent is selected from one or more of amino trimethylene phosphonic acid, glycine, malonic acid, sodium tripolyphosphate, diethyl triamine penta sodium pentaacetate and hydroxyethyl ethylene diamine triacetic acid.
2. The environmentally friendly film remover according to claim 1, wherein the acidic auxiliary is one or more selected from the group consisting of ammonium chloride, ammonium bromide and ammonium fluoride.
3. The environment-friendly film stripping agent according to claim 1, wherein the inorganic salt is selected from one or more of silicate, chromate, tungstate, borate, molybdate, vanadate and nitrite, and the adsorption film type corrosion inhibitor is selected from one or more of hexadecylamine, tallow amine, octadecylamine, mercaptobenzothiazole and benzotriazole.
4. The environment-friendly film stripping agent according to claim 1, wherein the surfactant is one or more selected from the group consisting of laureth, disodium edetate, polyquaternium, diethylenetriamine, tween 40 and tween 60.
5. The environmentally friendly film remover according to any of claims 1-4, wherein the organic solvent is selected from one or more of glycerol, propylene glycol, dipropylene glycol, 3-methoxybutanol, 2-methylpentanediol.
6. The use of the environment-friendly film stripping agent according to any one of claims 1-5 in film stripping process, wherein in the film stripping process, the film stripping agent concentration is 17-21wt%, the film stripping temperature is 55-60 ℃, the film stripping time is 3-8min, and the film thickness is 10-15 μm.
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| CN116043235A (en) | 2023-05-02 |
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