CN116026372B - Broadband flexible dynamic sensor based on preloaded design and preparation method thereof - Google Patents
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Abstract
A broadband flexible dynamic sensor based on preloaded design and a preparation method thereof are provided, wherein the flexible dynamic sensor comprises an electrode film with uniform internal tension, a flexible limiting ring, microstructure ion hydrogel and a lower electrode layer; the invention also discloses a preparation method of the flexible dynamic sensor, which is characterized in that an electrode film with uniform internal tension is fixed on a flexible limiting ring, and the electrode film and a lower electrode layer are utilized to precompress the interlayer of the microstructure ion hydrogel, so that the sensing of dynamic signals is realized; the pre-loading design of the invention is that the pre-stretching of the electrode film is used for making the electrode film have internal tension, and the frequency response bandwidth of the flexible dynamic sensor under complex dynamic load is improved by combining interlayer pre-compression, thereby realizing the broadband effect of the sensor. The invention has the advantages of flexibility, wide frequency band and the like, provides a general design method for dynamic sensing of flexible materials, and can be used in the fields of dynamic signal sensing such as human health monitoring, voice recognition, man-machine interaction and the like.
Description
Technical Field
The invention relates to the technical field of flexible dynamic sensors, in particular to a broadband flexible dynamic sensor based on a preloading design and a preparation method thereof.
Background
The flexible dynamic sensor is widely applied in the fields of human health monitoring, voice recognition, man-machine interaction and the like. Compared with the traditional hard dynamic sensor, the flexible dynamic sensor can be integrated with a human body for a long time, tightly and comfortably, and is more suitable for use scenes closely related to the human body. The flexible dynamic sensor is a sensor device which is designed and prepared based on soft materials or flexible structures and is sensitive to dynamic loads. Bandwidth and sensitivity are important indicators of the performance of a flexible dynamic sensor, which are affected by various factors such as sensing principles, material characteristics, device structure, etc. Bandwidth refers to the frequency range of the signal where the sensor output response drops or rises to one-half the root of its maximum response, and within the operating bandwidth range, the sensor output should be as flat or less fluctuating as possible. Sensitivity refers to the ratio of the output signal of the sensor to the applied load in the bandwidth range, and the higher the ratio is, the more sensitive the dynamic sensor is.
In daily environment, the frequency range of dynamic signals such as respiration, pulse and voice communication of a human body is mainly concentrated on about 0.2Hz to 1400 Hz. Because the main body material of the flexible sensor is soft material, the resonance frequency is about 5-30Hz, so the frequency response of the traditional flexible dynamic sensor is mostly nonlinear, and obvious peaks exist near low frequency, and the requirement of practical application on the working frequency band of the device cannot be met. In the prior art, in order to obtain a larger bandwidth and higher sensitivity, a flexible dynamic sensor using sensing principles such as resistance, polymer piezoelectricity and the like generally uses a multi-formant combination technology, and the bandwidth is widened by combining a plurality of formants at different frequencies, but the working principle of the device determines that the frequency response of the device still has the defects of non-flatness and non-monotone, and the sensitivity is obviously reduced outside a resonance frequency adjacent region.
Disclosure of Invention
Aiming at the problems existing in the prior art, the invention aims to provide a broadband flexible dynamic sensor based on a preloading design and a preparation method thereof, and the problem of narrow bandwidth of the conventional flexible dynamic sensor is solved by utilizing a general design method, so that the application range of the flexible dynamic sensor is widened.
In order to achieve the above purpose, the present invention is realized by the following technical scheme:
A broadband flexible dynamic sensor based on a preloading design comprises a tightly matched sensing device which is composed of an electrode film with uniform internal tension, a flexible limiting ring, microstructure ion hydrogel and a lower electrode layer; the electrode film with uniform internal tension is fixed on the flexible limiting ring, and the microstructure ion hydrogel is precompressed and fixed between the electrode film with uniform internal tension and the lower electrode layer; the preloaded design leads to a widened response frequency band range, namely an increased bandwidth, of the flexible dynamic sensor.
The electrode film with uniform internal tension is composed of a biaxially oriented polyethylene terephthalate film and a metal electrode layer sprayed on one side surface of the biaxially oriented polyethylene terephthalate film;
The flexible limiting ring is a polymer ring integrally formed by hard and soft phases which are printed in a 3D way, on one hand, the hard phase in the flexible limiting ring can be adhered and fixed with an electrode film with uniform internal tension, so that the internal tension of the film surface is ensured, and on the other hand, the flexible limiting ring has high flexibility and can adapt to bending deformation to a certain degree;
The microstructure ionic hydrogel is formed by polymerizing a prepolymerization liquid by utilizing a silicon die with a concave microstructure; the conductive ions adopt Li + and Cl -, and the hydrogel adopts polyacrylamide hydrogel;
The lower electrode layer is formed by a flexible polymer substrate integrally formed by 3D printing and a metal electrode film on the flexible polymer substrate.
The metal type and thickness of the sprayed metal electrode layer are not limited; the kind and thickness of the metal electrode thin film on the lower electrode layer are not limited either.
The pre-loading is designed as pre-stretching of the electrode film with uniform internal tension and the upper and lower electrode layers pre-compress the microstructured ionic hydrogels between layers.
The sensing principle of the broadband flexible dynamic sensor adopts an electric double layer capacitor formed by a metal electrode and an ionic hydrogel interface, and the size of the electric double layer capacitor is in direct proportion to the area of a contact interface; when external load acts on the flexible dynamic sensor, the contact area of the metal electrode and the ion hydrogel interface changes along with the change of external load, so that the sensor is used for sensing.
The working bandwidth deltaf of the broadband flexible dynamic sensor is related to the in-plane tension T, the in-plane density rho s and the radius r m of the electrode film with uniform internal tension, the initial height D of the microstructure ion hydrogel, the initial precompression strain epsilon pre of the microstructure, the spacing s of the microstructure, the bottom side length b of the microstructure and the Young's modulus E of gel, and the calculation formula is as follows:
By selecting the electrode film parameters and pre-stretching tension with uniform internal tension, and adjusting the material properties, geometric dimensions and initial pre-compression strain of the microstructure ion hydrogel, the first-order resonance frequency of the flexible dynamic sensor can be shifted backward, so that flat frequency response in a wider frequency range is obtained.
The flexible limiting ring is provided with ribs, the lower electrode layer is provided with grooves, and the flexible dynamic sensor which is sealed and can prevent water and dust is formed by tightly matching and gluing the rib grooves.
The preparation method of the broadband flexible dynamic sensor based on the preloading design comprises the following specific steps:
Firstly, an electrode film with uniform internal tension is glued and fixed on a flexible limiting ring to be used as an upper electrode layer; then, gluing and fixing the metal electrode film on a flexible polymer substrate printed in 3D (three-dimensional) mode to serve as a lower electrode layer; the upper electrode layer and the lower electrode layer are led out through leads for leading out sensing signals; secondly, placing the microstructure ion hydrogel between an upper electrode layer and a lower electrode layer, and precisely controlling the distance between the upper electrode layer and the lower electrode layer by utilizing a high-precision displacement platform so as to generate initial precompression on the microstructure ion hydrogel; finally, after fixing the initially precompressed strain, it is fixed by means of gluing to form a completely sealed flexible dynamic sensor.
The preparation method of the broadband flexible dynamic sensor based on the preloading design is suitable for the design of most flexible dynamic sensors.
Compared with the prior art, the invention has the following advantages and beneficial effects:
(A) The preloading strategy of the invention improves the first-order resonance frequency of the flexible dynamic sensor through the uniform pre-stretching of the electrode film and the initial pre-compression of the microstructure gel, thereby realizing a larger working bandwidth range;
(B) The flexible limiting ring adopts a soft and hard phase composite structure, so that the electrode film can be fixed in a cementing manner, in-plane tension is provided for the electrode film, and the flexible limiting ring has the characteristic of flexibility and bending;
(C) The material modulus, the microstructure size, the initial pre-compaction amount, the in-plane tension of the electrode film layer and the like of the microstructure ion hydrogel can be flexibly adjusted and accurately controlled, so that the working bandwidth of the microstructure ion hydrogel can be accurately adjusted and controlled according to application requirements;
(D) The upper electrode and the lower electrode are tightly matched with each other through the flexible limiting ring with ribs and the grooves of the lower electrode layer and are bonded to form a sealed thin-layer flexible dynamic sensor in an adhesive mode during assembly, and the flexible dynamic sensor has the characteristics of being waterproof and dustproof;
(E) The invention has simple structure, easy realization and lower cost, and can fully exert the advantages of the flexible dynamic sensor.
Drawings
FIG. 1 is an exploded view and assembled schematic view of a flexible dynamic sensor according to the present invention.
Fig. 2a, fig. 2b and fig. 2c are schematic diagrams of the preparation methods of the upper electrode layer, the microstructure ion hydrogel and the lower electrode layer of the flexible dynamic sensor according to the present invention, respectively.
FIG. 3 is a schematic diagram of the precompression assembly method of the present invention.
Fig. 4 is a frequency response diagram of the present invention.
Detailed Description
The following specific embodiments of the present application are provided, and it should be noted that the present application is not limited to the following specific embodiments, and all equivalent changes and modifications made on the basis of the technical solution of the present application fall within the protection scope of the present application.
According to the above technical scheme, as shown in fig. 1, 2a, 2b, 2c and 3, the present embodiment provides a broadband flexible dynamic sensor based on a preloaded design and a preparation method thereof.
As shown in FIG. 1, the broadband flexible dynamic sensor based on the preloading design is simple in structure, and comprises an electrode film with uniform internal tension, a flexible limiting ring, a microstructure ion hydrogel and a lower electrode layer, wherein the electrode film with uniform internal tension is fixed on the flexible limiting ring, and the microstructure ion hydrogel is precompressed and fixed between the electrode film with uniform internal tension and the lower electrode layer; the flexible limiting ring and the lower electrode layer are made of flexible materials, so that the device is allowed to deform to a certain extent. The device is formed after assembly by precompression.
The following describes the preparation method of the flexible dynamic sensor in detail:
As shown in fig. 2a, a polyethylene terephthalate film (PET) is uniformly stretched by an equibiaxial stretching machine to have uniform tension T in the surface thereof, and then is glued on a flexible limiting ring attached with an electrode lead; cutting off the redundant PET film by scissors after the adhesive is completely solidified, and then uniformly spraying the electrode on the inner side of the PET film to conduct the electrode with the electrode lead; finally, the upper electrode layer I is formed.
As shown in fig. 2b, the pre-polymerized droplets of ionic hydrogel are dropped into an etched silicon mold with concave microstructure and the thickness of the composite material is controlled by a spacer; the ionic hydrogel is cured and formed by using a heat curing mode, and is peeled from a silicon die; and finally forming the microstructure ion hydrogel II.
As shown in fig. 2c, a 3D printed fluted flexible polymer is utilized as the flexible substrate; bonding the electrode lead and the electrode thin layer adhesive on the surface of the electrode lead, leading the electrode lead out from the lower part of the flexible substrate, and waiting for the bonding adhesive to be cured completely; finally forming the lower electrode layer III.
As shown in fig. 3, the above three parts are pre-compressed and assembled by using a high-precision longitudinal assembling platform, namely, the pre-compression of the micro-structure ionic hydrogel II by the upper electrode layer I and the lower electrode layer III is precisely controlled, so that the initial height of the micro-structure is changed from the synthesized D to D. Since the deformation amount in this process is not large, the influence on the microstructure bottom side length b and the microstructure pitch s is not large, and it remains uniform before and after assembly. The initial pre-compression strain is defined as epsilon pre = (D-D)/D. Finally, the gaps are bonded by using glue to form the complete and sealed broadband flexible dynamic sensor.
In one specific embodiment, the experimental parameters of gel young's modulus e= 190.95kPa, epsilon pre =0.02, s/b=0.2 are used. And then, carrying out frequency response test on the flexible dynamic sensor, placing the flexible dynamic sensor in an experimental device capable of emitting a uniform sound field, carrying out-of-plane measurement on the central point of the flexible dynamic sensor by utilizing the laser displacement sensor, and recording the sensor responses under different loads in real time. The flexible dynamic sensor was tested using a sweep frequency signal of 10-5000 Hz. The output result of the flexible dynamic sensor is shown in fig. 4, and it can be obviously seen that the flexible dynamic sensor breaks the characteristic of low natural frequency of the soft material, resonates near 765Hz, and ensures the stability of sensitivity to a greater extent in the frequency range lower than 765Hz, and the out-of-plane displacement of the center point reaches 0.239 μm. Finally, the theory and the experiment are compared, and under the same parameters, the difference between the theory and the experiment is not large, so that the feasibility and the universality of the flexible dynamic sensor are demonstrated, and the bandwidth and the sensitivity of the flexible dynamic sensor can be accurately regulated and controlled by changing the key parameters.
The invention provides a reliable technical approach for widening the frequency response bandwidth of the existing flexible sensor.
Application range:
The flexible dynamic sensor can be applied to the dynamic signal sensing fields such as human health monitoring, voice recognition, man-machine interaction and the like.
The invention can produce economic benefit:
The dynamic signals are closely related to our daily lives, and compared with the traditional hard dynamic sensor, the flexible dynamic sensor can be integrated with a human body for a long time, tightly and comfortably, and is more suitable for use scenes closely related to the human body. At present, although there is no flexible dynamic sensor on the market, taking wearable devices such as hard smart watches, bracelets and the like capable of monitoring human health and interacting voice as an example, according to research data issued by IDC market research companies, the global wearable devices have a trend of rising year by year from 2013 to 2021, the starting and growing speed is higher, and the recent 2 years are more in an explosion and growing situation. The global shipment of 2021 is 1.275 billions, so that the average selling price of each selling price is 200 yuan, and the economic benefit of the last year is 255 billions. The economic benefit of the flexible dynamic sensor can reach billions of yuan per year. And the attention and scientific research investment in the field are continuously increasing.
The invention has influence on the domestic future technical market:
In the prior art market, the dynamic sensing device based on piezoelectric ceramics is not suitable for sensing medium-low frequency dynamic signals related to human bodies because the material is hard in nature. In recent years, the flexible dynamic sensor can be integrated with a human body for a long time, tightly and comfortably, and is more suitable for use scenes closely related to the human body. Dynamic sensors fabricated with flexible sensing materials have become a research hotspot. Because the main body material of the flexible sensor is soft material, the resonance frequency is about 5-30Hz, so that the frequency response of the traditional flexible dynamic sensor is mostly nonlinear, and obvious peaks exist near low frequency, and the requirement of practical application on the working width of the device cannot be met. According to the literature report in the field, in order to obtain a larger bandwidth and higher sensitivity, a flexible dynamic sensor using sensing principles such as resistance, polymer piezoelectricity and the like generally uses a multi-formant combination technology, and the bandwidth of the flexible dynamic sensor is widened through the combination of a plurality of formants at different frequencies, but the working principle of the device determines that the frequency response of the flexible dynamic sensor still has the defects of non-flatness and non-monotone, and the sensitivity is obviously reduced outside a resonance frequency adjacent region. The invention can solve the defects in the prior art to a certain extent.
Claims (6)
1. A broadband flexible dynamic sensor based on a preloading design is characterized in that: the broadband flexible dynamic sensor comprises a tightly matched sensing device which is composed of an electrode film with uniform internal tension, a flexible limiting ring, microstructure ion hydrogel and a lower electrode layer; the electrode film with uniform internal tension is fixed on the flexible limiting ring, and the microstructure ion hydrogel is precompressed and fixed between the electrode film with uniform internal tension and the lower electrode layer; the response frequency band range of the flexible dynamic sensor is widened, namely the bandwidth is increased through the preloading design;
The electrode film with uniform internal tension is composed of a biaxially oriented polyethylene terephthalate film and a metal electrode layer sprayed on one side surface of the biaxially oriented polyethylene terephthalate film;
The flexible limiting ring is a polymer ring integrally formed by hard and soft phases which are printed in a 3D way, on one hand, the hard phase in the flexible limiting ring can be adhered and fixed with an electrode film with uniform internal tension, so that the internal tension of the film surface is ensured, and on the other hand, the flexible limiting ring has high flexibility and can adapt to bending deformation to a certain degree;
The microstructure ionic hydrogel is formed by polymerizing a prepolymerization liquid by utilizing a silicon die with a concave microstructure; the conductive ions adopt Li + and Cl -, and the hydrogel adopts polyacrylamide hydrogel;
the lower electrode layer is formed by a flexible polymer substrate integrally formed by 3D printing and a metal electrode film on the flexible polymer substrate;
The working bandwidth deltaf of the broadband flexible dynamic sensor is related to the in-plane tension T, the in-plane density rho s and the radius r m of the electrode film with uniform internal tension, the initial height D of the microstructure ion hydrogel, the initial precompression strain epsilon pre of the microstructure, the spacing s of the microstructure, the bottom side length b of the microstructure and the Young's modulus E of gel, and the calculation formula is as follows:
By selecting the electrode film parameters and pre-stretching tension with uniform internal tension, and adjusting the material properties, geometric dimensions and initial pre-compression strain of the microstructure ion hydrogel, the first-order resonance frequency of the flexible dynamic sensor can be shifted backward, so that flat frequency response in a wider frequency range is obtained.
2. A broadband flexible dynamic sensor based on a preloaded design according to claim 1, characterized in that: the metal type and thickness of the sprayed metal electrode layer are not limited; the kind and thickness of the metal electrode thin film on the lower electrode layer are not limited either.
3. A broadband flexible dynamic sensor based on a preloaded design according to claim 1, characterized in that: the pre-loading is designed as pre-stretching of the electrode film with uniform internal tension and the lower electrode layer pre-compress the micro-structure ion hydrogel layer.
4. A broadband flexible dynamic sensor based on a preloaded design according to claim 1, characterized in that: the sensing principle of the broadband flexible dynamic sensor adopts an electric double layer capacitor formed by a metal electrode and an ionic hydrogel interface, and the size of the electric double layer capacitor is in direct proportion to the area of a contact interface; when external load acts on the flexible dynamic sensor, the contact area of the metal electrode and the ion hydrogel interface changes along with the change of external load, so that the sensor is used for sensing.
5. A broadband flexible dynamic sensor based on a preloaded design according to claim 1, characterized in that: the flexible limiting ring is provided with ribs, the lower electrode layer is provided with grooves, and the flexible dynamic sensor which is sealed and can prevent water and dust is formed by tightly matching and gluing the rib grooves.
6. The method for manufacturing a broadband flexible dynamic sensor based on a preloaded design according to any one of claims 1 to 5, wherein: the method comprises the following specific steps:
Firstly, an electrode film with uniform internal tension is glued and fixed on a flexible limiting ring to be used as an upper electrode layer; then, gluing and fixing the metal electrode film on a flexible polymer substrate printed in 3D (three-dimensional) mode to serve as a lower electrode layer; the upper electrode layer and the lower electrode layer are led out through leads for leading out sensing signals; secondly, placing the microstructure ion hydrogel between an upper electrode layer and a lower electrode layer, and precisely controlling the distance between the upper electrode layer and the lower electrode layer by utilizing a high-precision displacement platform so as to generate initial precompression on the microstructure ion hydrogel; finally, after fixing the initially precompressed strain, it is fixed by means of gluing to form a completely sealed flexible dynamic sensor.
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| CN110243506A (en) * | 2018-03-08 | 2019-09-17 | 中国科学院深圳先进技术研究院 | A kind of piezoresistive pressure sensor and preparation method thereof |
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| WO2020214808A1 (en) * | 2019-04-17 | 2020-10-22 | The Regents Of The University Of California | Scalable and high-performance pressure sensors for wearable electronics |
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