CN115978918A - Method for reducing air release amount of rubber sealing gasket for vacuum sealing - Google Patents
Method for reducing air release amount of rubber sealing gasket for vacuum sealing Download PDFInfo
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- CN115978918A CN115978918A CN202211710771.0A CN202211710771A CN115978918A CN 115978918 A CN115978918 A CN 115978918A CN 202211710771 A CN202211710771 A CN 202211710771A CN 115978918 A CN115978918 A CN 115978918A
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- rubber
- vacuum
- sealing gasket
- gasket
- rubber sealing
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- 238000007789 sealing Methods 0.000 title claims abstract description 106
- 238000000034 method Methods 0.000 title claims abstract description 41
- 238000001291 vacuum drying Methods 0.000 claims abstract description 37
- 238000009434 installation Methods 0.000 claims abstract description 15
- 238000010943 off-gassing Methods 0.000 claims abstract description 15
- 230000007935 neutral effect Effects 0.000 claims abstract description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 32
- 239000007789 gas Substances 0.000 claims description 16
- 229910052757 nitrogen Inorganic materials 0.000 claims description 16
- 239000004033 plastic Substances 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000012856 packing Methods 0.000 claims 4
- 238000010521 absorption reaction Methods 0.000 abstract description 3
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- WSWMGHRLUYADNA-UHFFFAOYSA-N 7-nitro-1,2,3,4-tetrahydroquinoline Chemical compound C1CCNC2=CC([N+](=O)[O-])=CC=C21 WSWMGHRLUYADNA-UHFFFAOYSA-N 0.000 description 1
- 229910015900 BF3 Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 description 1
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Abstract
The invention discloses a method for reducing the outgassing amount of a rubber sealing gasket for vacuum sealing, which comprises the following steps: step 1, carrying out vacuum drying on the rubber sealing gasket for 24-200 hours under the conditions that the absolute pressure is less than 30Pa and the temperature is the highest allowable use temperature of the rubber sealing gasket; and 2, after the high-temperature vacuum drying of the rubber sealing gasket is finished, placing the rubber sealing gasket in an atmospheric environment, installing the rubber sealing gasket at the target installation position, and enabling the target installation position to be in a vacuum environment or filling dry neutral gas. The invention can remove the volatile components of the rubber sealing gasket before the rubber sealing gasket is installed at the target installation position, and simultaneously, the invention reduces the absorption of the rubber sealing gasket to the moisture in the air after the vacuum drying treatment and reduces the air release amount of the rubber sealing gasket in a vacuum system.
Description
Technical Field
The invention relates to the technical field of vacuum sealing, in particular to a method for reducing the air release amount of a rubber sealing gasket for vacuum sealing.
Background
The sealing forms of vacuum pipelines, valves and equipment are various, and rubber sealing is a common one. The rubber seal has the characteristics of low price, good sealing performance, convenient assembly and disassembly and the like. However, during long-term operation, the rubber sealing material volatilizes a small amount of water vapor and organic gas, and chemically reacts with process gases in the vacuum pipe, such as chemically active gases used in the semiconductor industry, for example, molybdenum hexafluoride, tungsten hexafluoride, and boron trifluoride. This not only results in the consumption of process gases, but also results in the generation of impurity gases and solid powders, and causes the corrosion of various materials in the vacuum system to be aggravated, affecting various performances of the vacuum system.
Generally, the vacuum rubber gasket needs to be dried during the production process to remove moisture introduced during the processing process, but the drying process is short in time and low in temperature, and is performed under atmospheric conditions, so that only part of organic matters with low boiling points and part of moisture can be removed. And because the rubber sealing gasket is stored in the atmospheric environment for a long time after being produced, the moisture in the air can be adsorbed in the gap structure on the surface of the rubber sealing gasket. When the rubber sealing gaskets are used in a vacuum system for a long time, still more volatile components are released into a process pipeline to react with process gas.
Disclosure of Invention
The invention aims to provide a method for reducing the outgassing amount of a rubber sealing gasket for vacuum sealing, aiming at the technical defects in the prior art.
The technical scheme adopted for realizing the purpose of the invention is as follows:
a method of reducing outgassing of a rubber seal for vacuum sealing, the method comprising:
step 1, carrying out vacuum drying on the rubber sealing gasket for 24-200 hours under the conditions that the absolute pressure is less than 30Pa and the temperature is the highest allowable use temperature of the rubber sealing gasket;
and 2, after the high-temperature vacuum drying of the rubber sealing gasket is finished, placing the rubber sealing gasket in an atmospheric environment, installing the rubber sealing gasket at the target installation position, and enabling the target installation position to be in a vacuum environment or filling dry neutral gas.
In the above technical solution, the step 2 of making the target installation location in a vacuum environment includes: the target installation position is under a condition that an absolute pressure is less than 30 Pa.
In the above technical solution, the time period for placing the rubber gasket in the atmospheric environment in the step 2 cannot exceed 48 hours.
In the technical scheme, the rubber sealing gasket comprises a vacuum rubber sealing gasket made of A-type rubber and a vacuum rubber sealing gasket made of B-type rubber; the vacuum rubber gasket made of A-type rubber is allowed to have the maximum use temperature of 100 ℃; the vacuum rubber gasket made of the B-type rubber allows the maximum use temperature to be 250 ℃.
A method for reducing the outgassing amount of a vacuum rubber sealing gasket made of A-type rubber for vacuum sealing comprises the following steps:
step 1, placing a vacuum rubber sealing gasket made of A-type rubber in a heatable vacuum container;
step 2, continuously evacuating the container by using a vacuum pump to enable the absolute pressure in the container to be less than 30Pa, heating the rubber sealing gasket to 50 ℃, and maintaining for 120 hours;
and 3, mounting the vacuum rubber sealing gasket made of the A-type rubber on a vacuum system pipeline within 24 hours after the vacuum rubber sealing gasket made of the A-type rubber is subjected to high-temperature vacuum drying, and filling dry nitrogen into the pipeline.
In the technical scheme, after the vacuum rubber gasket made of the A-type rubber is subjected to high-temperature vacuum drying, the rubber gasket is taken out of the container and weighed, and if the weight of the rubber gasket is reduced by 0.3% compared with the weight of the rubber gasket before the high-temperature vacuum drying is finished, volatile components overflow from the rubber gasket in the vacuum drying process.
A method for reducing the outgassing amount of a vacuum rubber sealing gasket made of B-type rubber for vacuum sealing comprises the following steps:
step 1, placing a vacuum rubber sealing gasket made of B-type rubber in a heatable vacuum container;
step 2, continuously evacuating the container by using a vacuum pump, enabling the absolute pressure in the container to be less than 30Pa, heating the rubber sealing gasket to 120 ℃, and maintaining for 30 hours;
and 3, after the vacuum rubber sealing gasket made of the B-type rubber is subjected to high-temperature vacuum drying, putting the vacuum rubber sealing gasket made of the B-type rubber into the plastic bag, replacing air in the plastic bag with dry nitrogen until the plastic bag is completely filled with the dry nitrogen, sealing the plastic bag, and storing the rubber sealing gasket in a dry nitrogen environment.
In the technical scheme, after the vacuum rubber gasket made of the B-type rubber is subjected to high-temperature vacuum drying, the rubber gasket is taken out of the container and weighed, and if the weight of the rubber gasket is reduced by 0.1% compared with the weight of the rubber gasket before the high-temperature vacuum drying is finished, volatile components overflow from the rubber gasket in the vacuum drying process.
In the technical scheme, after the vacuum rubber gasket made of the B-type rubber is stored for a long time in a dry nitrogen environment, if the quality of the rubber gasket is not obviously changed, the vacuum rubber gasket does not absorb water vapor in air.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention provides a method for reducing the outgassing amount of a rubber gasket for vacuum sealing, which can remove volatile components of the rubber gasket by a vacuum drying method before the rubber gasket is installed at a target installation position.
2. According to the invention, the target installation position is in a vacuum environment or is filled with dry neutral gas, so that the absorption of the rubber sealing gasket to moisture in air after vacuum drying treatment is reduced, and the rubber sealing gasket after vacuum drying treatment is ensured not to increase the air release amount due to the fact that moisture is absorbed again.
3. The invention can effectively reduce the amount of organic gas and water vapor volatilized from the rubber sealing gasket to the vacuum environment in the long-term use process, namely reduce the gas emission amount, reduce the chemical reaction of the volatile components and the process gas in the vacuum system, reduce the consumption of the process gas, reduce the generation of impurity gas and solid powder, simultaneously reduce the corrosion of various materials and effectively improve the economical efficiency and the safety of the operation of the vacuum system.
Drawings
Fig. 1 is a flow chart of a method for reducing the outgassing amount of a rubber sealing gasket for vacuum sealing according to the present invention.
Fig. 2 is a flow chart of a method for reducing the outgassing amount of a vacuum rubber gasket made of type a rubber for vacuum sealing according to the present invention.
FIG. 3 is a flow chart of a method for reducing the outgassing amount of a vacuum rubber gasket made of B-type rubber for vacuum sealing according to the present invention.
Detailed Description
The present invention will be described in further detail with reference to specific examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the invention.
Example 1
A method of reducing outgassing of a rubber seal for vacuum sealing, referring to fig. 1, the method comprising:
step 1, carrying out vacuum drying on the rubber sealing gasket for 24-200 hours under the conditions that the absolute pressure is less than 30Pa and the temperature is the highest allowable use temperature of the rubber sealing gasket;
and 2, after the high-temperature vacuum drying of the rubber sealing gasket is finished, placing the rubber sealing gasket in an atmospheric environment, installing the rubber sealing gasket at the target installation position, and enabling the target installation position to be in a vacuum environment or filling dry neutral gas.
Further, the step 2 of making the target installation position in a vacuum environment includes: the target mounting position is under a condition of an absolute pressure of less than 30 Pa.
The target installation position is in a vacuum environment or is filled with dry neutral gas, and the absorption of moisture in air by the rubber sealing gasket placed in an atmospheric environment after the high-temperature vacuum drying of the rubber sealing gasket is finished can be reduced.
Furthermore, the rubber sealing gasket comprises a vacuum rubber sealing gasket made of A-type rubber and a vacuum rubber sealing gasket made of B-type rubber. The vacuum rubber gasket made of A-type rubber is allowed to have the maximum use temperature of 100 ℃; the vacuum rubber gasket made of the B-type rubber is allowed to have the maximum use temperature of 250 ℃.
And (2) drying the rubber sealing gasket in vacuum for 24-200 hours in step 1, so that volatile components in the rubber sealing gasket can be removed from the rubber sealing gasket.
Further, the rubber gasket is placed in an atmospheric environment for a period of time not exceeding 48 hours.
Example 2
On the basis of the embodiment 1, a method for reducing the outgassing amount of a vacuum rubber gasket made of A-type rubber for vacuum sealing is disclosed, and referring to fig. 2, the method comprises the following steps:
step 1, placing a vacuum rubber sealing gasket made of A-type rubber in a heatable vacuum container;
step 2, continuously evacuating the container by using a vacuum pump, enabling the absolute pressure in the container to be less than 30Pa, heating the rubber sealing gasket to 50 ℃, and maintaining for 120 hours;
and 3, mounting the vacuum rubber sealing gasket made of the A-type rubber on a vacuum system pipeline within 24 hours after the vacuum rubber sealing gasket made of the A-type rubber is subjected to high-temperature vacuum drying, and filling dry nitrogen into the pipeline.
Further, after the vacuum rubber gasket made of the type a rubber is subjected to high-temperature vacuum drying, the rubber gasket is taken out of the container and weighed, and if the weight of the rubber gasket is reduced by 0.3% from the weight of the rubber gasket before the high-temperature vacuum drying is finished, it indicates that volatile components overflow from the rubber gasket during the vacuum drying.
The vacuum rubber sealing gasket made of A-type rubber is arranged on a vacuum system pipeline, dry nitrogen is filled in the pipeline, and the surface of the rubber sealing gasket in contact with the inner space of the vacuum system can be reduced to absorb moisture in air.
Example 3
In addition to examples 1 to 2, a method for reducing the outgassing amount of a vacuum rubber gasket made of type B rubber for vacuum sealing, referring to fig. 3, comprises the following steps:
step 1, placing a vacuum rubber sealing gasket made of B-type rubber in a heatable vacuum container;
step 2, continuously evacuating the container by using a vacuum pump to enable the absolute pressure in the container to be less than 30Pa, heating the rubber sealing gasket to 120 ℃, and maintaining for 30 hours;
and 3, after the vacuum rubber sealing gasket made of the B-type rubber is subjected to high-temperature vacuum drying, putting the vacuum rubber sealing gasket made of the B-type rubber into a plastic bag, replacing air in the plastic bag with dry nitrogen until the plastic bag is completely filled with the dry nitrogen, sealing the plastic bag, and storing the rubber sealing gasket in a dry nitrogen environment.
Further, after the vacuum rubber gasket made of the B-type rubber is subjected to high-temperature vacuum drying, the rubber gasket is taken out of the container and weighed, and if the weight of the rubber gasket is reduced by 0.1% compared with the weight of the rubber gasket before the high-temperature vacuum drying is finished, it indicates that volatile components overflow from the rubber gasket during the vacuum drying process.
After the vacuum rubber sealing gasket made of the B-type rubber is stored for a long time in a dry nitrogen environment, if the quality of the rubber sealing gasket does not change obviously, the vacuum rubber sealing gasket does not absorb water vapor in air.
The invention has been described in an illustrative manner, and it is to be understood that any simple variations, modifications or other equivalent changes which can be made by one skilled in the art without departing from the spirit of the invention fall within the scope of the invention.
Claims (9)
1. A method for reducing the outgassing amount of a rubber sealing gasket for vacuum sealing, which is characterized by comprising the following steps:
step 1, carrying out vacuum drying on the rubber sealing gasket for 24-200 hours under the conditions that the absolute pressure is less than 30Pa and the temperature is the maximum allowable use temperature of the rubber sealing gasket;
step 2, after the high-temperature vacuum drying of the rubber sealing gasket is finished, placing the rubber sealing gasket in an atmospheric environment, and removing volatile components of the rubber sealing gasket; and mounting the rubber sealing gasket on the target mounting position, and enabling the target mounting position to be in a vacuum environment or filled with dry neutral gas.
2. The method of claim 1, wherein the step 2 of subjecting the target installation location to a vacuum environment comprises: the target installation position is under a condition that an absolute pressure is less than 30 Pa.
3. The method of claim 1, wherein the step 2 of placing the rubber seal in an atmospheric environment does not exceed 48 hours.
4. The method of claim 1, wherein the rubber gasket comprises a vacuum rubber gasket of type a rubber and a vacuum rubber gasket of type B rubber; the vacuum rubber gasket made of A-type rubber is allowed to have the maximum use temperature of 100 ℃; the vacuum rubber gasket made of the B-type rubber allows the maximum use temperature to be 250 ℃.
5. The method of claim 4, wherein the method of reducing outgassing of a vacuum rubber seal comprising type A rubber comprises:
step 1, placing a vacuum rubber sealing gasket made of A-type rubber in a heatable vacuum container;
step 2, continuously evacuating the container by using a vacuum pump, enabling the absolute pressure in the container to be less than 30Pa, heating the rubber sealing gasket to 50 ℃, and maintaining for 120 hours;
and 3, mounting the vacuum rubber sealing gasket made of the A-type rubber on a vacuum system pipeline within 24 hours after the vacuum rubber sealing gasket made of the A-type rubber is subjected to high-temperature vacuum drying, and filling dry nitrogen into the pipeline.
6. The method according to claim 5, wherein the vacuum rubber packing made of type A rubber is taken out of the container and weighed after the completion of the high-temperature vacuum drying, and when the weight of the rubber packing is reduced by 0.3% from the weight of the rubber packing before the completion of the high-temperature vacuum drying, it indicates that volatile components are overflowed from the rubber packing during the vacuum drying.
7. The method of claim 4, wherein the method of reducing the outgassing of the vacuum rubber gasket, which is made of type B rubber, comprises:
step 1, placing a vacuum rubber sealing gasket made of B-type rubber in a heatable vacuum container;
step 2, continuously evacuating the container by using a vacuum pump, enabling the absolute pressure in the container to be less than 30Pa, heating the rubber sealing gasket to 120 ℃, and maintaining for 30 hours;
and 3, after the vacuum rubber sealing gasket made of the B-type rubber is subjected to high-temperature vacuum drying, putting the vacuum rubber sealing gasket made of the B-type rubber into the plastic bag, replacing air in the plastic bag with dry nitrogen until the plastic bag is completely filled with the dry nitrogen, sealing the plastic bag, and storing the rubber sealing gasket in a dry nitrogen environment.
8. The method according to claim 7, wherein the rubber gasket is taken out of the container and weighed after the vacuum drying of the vacuum rubber gasket made of the type B rubber at the high temperature is completed, and when the weight of the rubber gasket is reduced by 0.1% from the weight of the rubber gasket before the completion of the high temperature vacuum drying, it means that the volatile component is overflowed from the rubber gasket during the vacuum drying.
9. The method of claim 7, wherein after the vacuum rubber seal made of type B rubber is stored in a dry nitrogen environment for a long period of time, if the quality of the rubber seal does not change significantly, it indicates that water vapor in the air has not been absorbed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211710771.0A CN115978918A (en) | 2022-12-29 | 2022-12-29 | Method for reducing air release amount of rubber sealing gasket for vacuum sealing |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211710771.0A CN115978918A (en) | 2022-12-29 | 2022-12-29 | Method for reducing air release amount of rubber sealing gasket for vacuum sealing |
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| CN115978918A true CN115978918A (en) | 2023-04-18 |
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| CN202211710771.0A Pending CN115978918A (en) | 2022-12-29 | 2022-12-29 | Method for reducing air release amount of rubber sealing gasket for vacuum sealing |
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Citations (9)
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| CN101348983A (en) * | 2007-09-13 | 2009-01-21 | 南京乐金熊猫电器有限公司 | Method for removing wet gas of seal pad of drum-type washing machine with drying function |
| WO2013037771A1 (en) * | 2011-09-12 | 2013-03-21 | Abb Technology Ag | Vapour phase drying apparatus |
| JP2013194966A (en) * | 2012-03-17 | 2013-09-30 | Seiko Engineering Kk | Vacuum dryer using both steam and microwave, and method of producing dry food and the like |
| US20160114304A1 (en) * | 2013-05-07 | 2016-04-28 | Guangwu LI | Method and apparatus for preparing aerogel by drying under reduced pressure |
| CN105645742A (en) * | 2014-11-19 | 2016-06-08 | 戴长虹 | Groove sealed vacuum glass and preparing method thereof |
| CN110091445A (en) * | 2019-03-29 | 2019-08-06 | 昆明理工大学 | A kind of method and device of the dry natural rubber of microwave heating combined vacuum |
| CN211953563U (en) * | 2020-03-27 | 2020-11-17 | 温州应飞应用工程塑料有限公司 | Dryer for producing sealing gasket |
| CN212870456U (en) * | 2020-07-08 | 2021-04-02 | 重庆盖博试验设备有限公司 | Explosion-proof vacuum dryer |
| CN114179270A (en) * | 2021-11-30 | 2022-03-15 | 西安交通大学 | Stirring sealing device for preparing epoxy-inorganic filler composite material and operation method |
-
2022
- 2022-12-29 CN CN202211710771.0A patent/CN115978918A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101348983A (en) * | 2007-09-13 | 2009-01-21 | 南京乐金熊猫电器有限公司 | Method for removing wet gas of seal pad of drum-type washing machine with drying function |
| WO2013037771A1 (en) * | 2011-09-12 | 2013-03-21 | Abb Technology Ag | Vapour phase drying apparatus |
| JP2013194966A (en) * | 2012-03-17 | 2013-09-30 | Seiko Engineering Kk | Vacuum dryer using both steam and microwave, and method of producing dry food and the like |
| US20160114304A1 (en) * | 2013-05-07 | 2016-04-28 | Guangwu LI | Method and apparatus for preparing aerogel by drying under reduced pressure |
| CN105645742A (en) * | 2014-11-19 | 2016-06-08 | 戴长虹 | Groove sealed vacuum glass and preparing method thereof |
| CN110091445A (en) * | 2019-03-29 | 2019-08-06 | 昆明理工大学 | A kind of method and device of the dry natural rubber of microwave heating combined vacuum |
| CN211953563U (en) * | 2020-03-27 | 2020-11-17 | 温州应飞应用工程塑料有限公司 | Dryer for producing sealing gasket |
| CN212870456U (en) * | 2020-07-08 | 2021-04-02 | 重庆盖博试验设备有限公司 | Explosion-proof vacuum dryer |
| CN114179270A (en) * | 2021-11-30 | 2022-03-15 | 西安交通大学 | Stirring sealing device for preparing epoxy-inorganic filler composite material and operation method |
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