CN115833648A - Drive-enhanced piezoelectric stick-slip rotary driver and drive method - Google Patents
Drive-enhanced piezoelectric stick-slip rotary driver and drive method Download PDFInfo
- Publication number
- CN115833648A CN115833648A CN202210841275.2A CN202210841275A CN115833648A CN 115833648 A CN115833648 A CN 115833648A CN 202210841275 A CN202210841275 A CN 202210841275A CN 115833648 A CN115833648 A CN 115833648A
- Authority
- CN
- China
- Prior art keywords
- rotor
- drive
- piezoelectric
- piezoelectric stack
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a drive-enhanced piezoelectric stick-slip rotary driver and a drive method, relates to the technical field of piezoelectric precision drive, solves the problems of low load capacity and poor output performance of the conventional piezoelectric stick-slip driver, improves the output performance and adaptability of the driver, and has the following specific scheme: including the base, rotate the rotor that sets up on the base and be used for driving rotor pivoted stator, the rotor passes through positioning mechanism and fixes the setting on the base, the stator comprises piezoelectric stack and the fixed lever amplification mechanism that sets up at piezoelectric stack both ends, and two lever amplification mechanisms are central symmetry and arrange, the one end of lever amplification mechanism is fixed to be set up on the base, and the other end contacts with the inner circle of rotor, the displacement that piezoelectric stack circular telegram extension produced is enlargied the displacement and is transmitted to the inner circle of rotor through the lever amplification mechanism at its both ends.
Description
Technical Field
The invention relates to the technical field of piezoelectric precision driving, in particular to a drive-enhanced piezoelectric stick-slip rotary driver and a drive method.
Background
The statements herein merely provide background information related to the present disclosure and may not necessarily constitute prior art.
The piezoelectric stick-slip driving mainly applies a sawtooth excitation electric signal to a piezoelectric element to excite a stator to generate alternate-speed motion deformation, controls the mutual conversion of the stator and a rotor between a 'stick' motion state and a 'slip' motion state, and drives the rotor to realize mechanical motion output by utilizing friction force.
The inventor finds that the existing piezoelectric stick-slip driver is mostly driven by single moment, so that the output force is insufficient, the large load is difficult to bear, the driving speed is slow, the requirement of high-speed driving is difficult to meet, and the output performance of the piezoelectric driver is limited; in addition, the output displacement of the stick-slip driving principle inevitably has a rollback phenomenon, and the output performance of the stick-slip driving principle is also reduced.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a drive-enhanced piezoelectric stick-slip rotary driver and a drive method, wherein lever amplification mechanisms which are distributed in a central symmetry manner are arranged at two ends of a piezoelectric stack, a pair of force couples are utilized to drive an inner ring of a rotor to rotate, so that the load capacity of the driver is greatly improved, and meanwhile, the drive mode of firstly boosting, then stabilizing and then reducing the pressure is adopted, so that the influence of inertia and friction force on the rotation of the inner ring of the rotor when the lever amplification mechanisms retract is eliminated, the output performance of the driver is ensured, and the problems of low load capacity and poor output performance of the traditional piezoelectric stick-slip driver are solved.
In order to achieve the purpose, the invention is realized by the following technical scheme:
in a first aspect, the invention provides a drive-enhanced piezoelectric stick-slip rotary driver, which comprises a base, a rotor rotationally arranged on the base, and a stator for driving the rotor to rotate, wherein the rotor is fixedly arranged on the base through a positioning mechanism, the stator is composed of a piezoelectric stack and lever amplification mechanisms fixedly arranged at two ends of the piezoelectric stack, the two lever amplification mechanisms are arranged in a central symmetry manner, one end of each lever amplification mechanism is fixedly arranged on the base, the other end of each lever amplification mechanism is in contact with an inner ring of the rotor, and displacement generated by the electrification and elongation of the piezoelectric stack is amplified and transmitted to the inner ring of the rotor through the lever amplification mechanisms at the two ends of the piezoelectric stack.
As a further implementation manner, the positioning mechanism is composed of two arc-shaped protrusions which are oppositely arranged, the rotor is arranged between the two arc-shaped protrusions, and the outer ring of the rotor is in interference fit with the arc-shaped protrusions.
As a further implementation mode, the lever amplification mechanism is composed of a fixed end, a flexible hinge, a displacement input end, a cross beam and a displacement output end which are connected in sequence, and the fixed end is fixedly arranged on the base through a fixing bolt.
As a further implementation manner, two sides of the flexible hinge are in the shape of an inward concave semi-circular arc.
In a further implementation manner, the displacement input end is connected with an end portion of the piezoelectric stack, and the end portion of the piezoelectric stack is embedded into the displacement input end through a pre-tightening bolt and fixed.
As a further implementation manner, the end of the displacement output end is in rigid contact with the inner ring of the rotor, and the position output end is perpendicular to the cross beam.
As a further implementation manner, the inner ring surface of the rotor is plated with a wear-resistant layer, and the surface of the wear-resistant layer is provided with protrusions for increasing friction.
As a further implementation manner, the piezoelectric stack is arranged along the radial direction of the rotor, the piezoelectric stack is arranged coaxially with the rotor, and the piezoelectric stack drives the inner ring of the rotor to rotate through a pair of force couples.
In a second aspect, the present invention provides a driving method, the piezoelectric stack is energized such that the driving voltage gradually rises from 0 to a peak value, then steadily continues at the peak value for a set time, and finally the driving voltage rapidly decreases to 0 to complete one energization cycle.
As a further implementation, the power-on cycle is repeated.
The beneficial effects of the invention are as follows:
(1) The two ends of the piezoelectric stack are provided with the lever amplifying mechanisms which are distributed in a central symmetry manner, so that the inner ring of the rotor can be driven to rotate by utilizing a pair of force couples, the lever amplifying mechanisms can also increase output displacement, the output force is greater than the driving force provided by the piezoelectric stack, the output rotating speed of the rotor is greatly increased, and the load capacity of the driver is effectively improved.
(2) The lever amplification mechanism has the advantages of simple integral structure, convenient processing and use, small occupied space, convenient realization of light-weight and miniaturized production, and greatly expanded application range of the piezoelectric stick-slip rotary driver.
(3) The two sides of the flexible hinge are both inwards sunken semi-circular arcs, so that the rigidity of the flexible hinge can be reduced, and the movement obstruction is further reduced.
(4) The driving method of the invention sets a voltage stabilization stage before voltage reduction, which not only can ensure more sufficient extension and more effective extension of the piezoelectric stack and reduce the influence of the creep characteristic, but also can eliminate the influence of inertia and friction force on the rotation of the rotor inner ring when the lever amplification mechanism retracts, and ensure the output performance of the driver.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate exemplary embodiments of the invention and together with the description serve to explain the invention and not to limit the invention.
Fig. 1 is a schematic diagram of the overall structure of a drive-enhanced piezoelectric stick-slip rotary drive according to one or more embodiments of the present invention;
FIG. 2 is a schematic diagram of a first lever amplification mechanism according to one or more embodiments of the invention;
FIG. 3 is a schematic diagram of the motion of a drive enhanced piezoelectric stick-slip rotary drive according to one or more embodiments of the present disclosure;
FIG. 4 is a periodic drive voltage timing diagram of a drive enhanced piezoelectric stick-slip rotary drive in accordance with one or more embodiments of the present invention;
FIG. 5 is a timing diagram of a periodic sawtooth driving voltage used by a conventional piezoelectric stick-slip driver;
in the figure: the mutual spacing or size is exaggerated to show the position of each part, and the schematic diagram is only used for illustration;
wherein, 1, a base; 2. a rotor; 3. a first lever amplification mechanism; 301. a fixed end; 302. a flexible hinge; 303. a displacement input end; 304. a cross beam; 305. a displacement output end; 4. a piezoelectric stack; 5. pre-tightening the bolts; 6. a second lever amplification mechanism; 7. fixing the bolt; 8. and an arc-shaped bulge.
Detailed Description
It is to be understood that the following detailed description is exemplary and is intended to provide further explanation of the invention as claimed. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
As introduced in the background art, most piezoelectric stick-slip drivers have a low abutment contact area, which results in insufficient output force, difficulty in bearing large loads, low driving speed, difficulty in meeting the requirements of high-speed driving, and limitation on the output performance of the piezoelectric drivers; in addition, the output displacement of the stick-slip driving principle inevitably has the problems of backspacing and reducing the output performance, and in order to solve the technical problems, the invention provides a drive enhanced piezoelectric stick-slip rotary driver and a drive method.
Example 1
In an exemplary embodiment of the present invention, as shown in fig. 1-3, a drive-enhanced piezoelectric stick-slip rotary driver is provided, which includes a base 1, a rotor 2 and a stator, wherein the rotor 2 is horizontally disposed on the base 1 and can rotate on the base 1, the stator is fixedly disposed on the base 1 and located at a central position of the rotor 2, and the stator can drive the rotor 2 to move.
Specifically, be equipped with on base 1 because 2 fixed in position's of rotor positioning mechanism, this positioning mechanism comprises the protruding 8 of arc of two relative settings, and rotor 2 sets up between two arc are protruding 8, and the arcwall face of the protruding 8 of arc and the laminating of rotor 2's outer lane to realize the fixed of rotor 2 position, the installation and the change of rotor 2 have been made things convenient for greatly in the setting of the protruding 8 of arc.
The rotor 2 is of an annular structure similar to a bearing and comprises an outer ring and an inner ring, the outer ring and the inner ring are coaxially arranged, the outer ring of the rotor 2 is in interference fit with the arc-shaped protrusion 8 to fix the position of the rotor 2, and the inner ring of the rotor 2 can freely rotate around the axis of the rotor 2.
The stator is fixedly arranged in the inner ring of the rotor 2 and consists of a first lever amplification mechanism 3, a piezoelectric stack 4 and a second lever amplification mechanism 6, wherein the first lever amplification mechanism 3 and the second lever amplification mechanism 6 are oppositely arranged and are connected through the piezoelectric stack 4, and the stator is of a centrosymmetric structure, and the first lever amplification mechanism 3 and the second lever amplification mechanism 6 are distributed in centrosymmetric positions.
In this embodiment, the piezoelectric stack 4 is a piezoelectric stack ceramic having an inverse piezoelectric effect, and when the piezoelectric stack is energized, the piezoelectric stack ceramic extends, and the displacement generated by the piezoelectric stack ceramic can be transmitted to the lever amplification mechanisms at the two ends of the piezoelectric stack ceramic, and the displacement is amplified by the lever amplification mechanisms and drives the rotor 2 to rotate.
The first lever amplification mechanism 3 and the second lever amplification mechanism 6 have the same structure and shape, specifically, as shown in fig. 2, the first lever amplification mechanism 3 is composed of a fixed end 301, a flexible hinge 302, a displacement input end 303, a cross beam 304 and a displacement output end 305, wherein the fixed end 301 is provided with at least one mounting hole, and the first lever amplification mechanism 3 can be fixedly mounted on the base 1 through a fixing bolt 7.
It can be understood that the base 1 is provided with threaded holes for matching with the fixing bolts 7, and the number and positions of the threaded holes correspond to the mounting holes on the fixing end 301 one by one.
One side of the fixed end 301 is connected with the displacement input end 303 through a flexible hinge 302, the flexible hinge 302 is of a waist-contracting structure, namely, both sides of the flexible hinge 302 are provided with inwards-concave semi-circular arcs so as to reduce the rigidity of the flexible hinge 302 and further reduce the resistance to movement.
The displacement input end 303 is mainly used for fixing the piezoelectric stack 4, specifically, one end of the piezoelectric stack 4 is embedded into the displacement input end 303 through the pre-tightening bolt 5 and fixed, and the pre-tightening bolt 5 can change the pressure applied to the piezoelectric stack 4 by the first lever amplification mechanism 3, so that when the displacement generated by electrifying the piezoelectric stack 4 can be input to the displacement input end 303, the displacement input end 303 can rotate around the flexible hinge 302 to generate the amplified displacement.
One side of the displacement input end 303 far away from the flexible hinge 302 is fixedly connected with a displacement output end 305 through a cross beam 304, wherein the displacement output end 305 is perpendicular to the cross beam 304, the end part of the displacement output end 305 is in rigid contact with the inner ring of the rotor 2, the displacement input end 303 can drive the displacement output end 305 to move through the cross beam 304, the displacement output end 305 can drive the amplified displacement to rotate through the inner ring of the static friction drive rotor 2, the first lever amplification mechanism 3 can increase the output displacement, and the output rotating speed of the rotor 2 is greatly increased.
The inner ring surface of the rotor 2 is plated with a wear-resistant layer which can be of a diamond film structure and the like, and the surface of the wear-resistant layer is etched by ion beams to form regular micro-protrusions, so that the wear resistance is improved, and meanwhile, the driving efficiency and the load capacity are effectively improved.
Since the first lever amplification mechanism 3 and the second lever amplification mechanism 6 have the same structure and shape, the structure of the second lever amplification mechanism 6 will not be described in detail in this embodiment.
The first lever amplification mechanism 3 and the second lever amplification mechanism 6 are distributed in central symmetry, the piezoelectric stack 4 is arranged along the radial direction of the rotor 2, the piezoelectric stack 4 and the rotor 2 are coaxially arranged, specifically, the center point of the piezoelectric stack 4 coincides with the circle center of the rotor 2, one end of the piezoelectric stack 4 is connected with the displacement input end 303 of the first lever amplification mechanism 3, and the other end of the piezoelectric stack 4 is connected with the displacement input end 303 of the second lever amplification mechanism 6, so that the displacement output end 305 on the first lever amplification mechanism 3 and the displacement output end on the second lever amplification mechanism 6 are oppositely arranged on two sides of the piezoelectric stack 4, and the inner ring of the rotor 2 can be driven to move through a pair of force couples, and meanwhile, the load capacity of the rotor 2 is increased.
Specifically, as shown in fig. 3, output displacement generated when the piezoelectric stack 4 is energized is respectively transmitted to the displacement input end 303 of the first lever amplification mechanism 3 and the displacement input end of the second lever amplification mechanism 6, the beam 304 of the first lever amplification mechanism 3 rotates counterclockwise around the flexible hinge 302, and the generated amplified displacement drives the inner ring of the rotor 2 to rotate counterclockwise through static friction under the action of the displacement output end 305; meanwhile, the displacement output end 305 of the second lever amplification mechanism 6 also rotates counterclockwise, so as to drive the inner ring of the rotor 2 to rotate counterclockwise.
The inner ring of the rotor 2 rotates under the action of the couple, and the driving force is increased through the couple, so that the abrasion of the inner ring of the rotor 2 is reduced, and the load capacity of the driver is greatly improved.
First lever amplification mechanism 3, second lever amplification mechanism 6 in this embodiment have improved the bearing capacity of driver through centrosymmetric arrangement, and first lever amplification mechanism 3, second lever amplification mechanism 6 overall structure are simple, and processing, convenient to use occupy that space is little, are convenient for realize lightweight, miniaturized production, have enlarged the application scope of piezoelectricity viscid smooth rotary actuator greatly.
Example 2
In another exemplary embodiment of the present invention, as shown in fig. 4, a driving method for driving an enhanced piezoelectric stick-slip rotary driver is proposed, in which the driving voltage gradually reaches a peak value from 0, then is smoothed at the peak value for a set time, and finally, the driving voltage is rapidly decreased to 0.
The method comprises the following specific steps:
t 0 to t 1 Time period, the driving voltage gradually rises from 0 to reach the peak value U 1 When the piezoelectric stack 4 is electrified and gradually extends, the displacement output ends 305 of the first lever amplification mechanism 3 and the second lever amplification mechanism 6 drive the inner ring of the rotor 2 to rotate anticlockwise through static friction force;
t 1 to t 2 Time period, drive voltage at peak value U 1 A short stop is made, during which time the piezoelectric stack 4 is no longer extended, and the displacement output ends 305 of the first lever amplification mechanism 3 and the second lever amplification mechanism 6 are no longer extended;
t 2 to t 3 In the time period, the driving voltage is rapidly reduced to 0, the piezoelectric stack 4 rapidly retracts to the natural length, and the first lever amplification mechanism 3 and the second lever amplification mechanism 6 recover to the original shapes due to the elasticity;
repeating t 0 To t 3 The continuous driving can be realized.
In contrast to the conventional periodic sawtooth driving voltage (as shown in fig. 5), the present embodiment provides a voltage stabilization phase, t, before the step-down 1 To t 2 In the time period, on one hand, the piezoelectric stack 4 can be ensured to be more fully extended and more effectively extended, and the influence of the creep characteristic of the piezoelectric stack 4 is reduced, on the other hand, the displacement output end 305 cannot be immediately retracted after the inner ring of the rotor 2 is driven to rotate, but the piezoelectric stack 4 is kept in the extended state in the counterclockwise rotation process of the rotor 2, the influence of the coupling effect of inertia (the lever amplification mechanism is in a bent state and has clockwise inertia) and friction force between the displacement output end 305 and the rotor 2 in the counterclockwise rotation process of the rotor 2 is effectively avoided, the rotor 2 cannot rotate backwards (clockwise) by a small angle, namely, the retraction phenomenon cannot occur, the displacement retraction caused by the traditional stick-slip driving mode can be effectively reduced or even eliminated, and the continuity of output angular displacement is favorably improved, so that the output displacement in each time period is increased, namely, the rotating speed of the rotor is increased, and the driving efficiency and the load capacity of the driver are effectively improved.
It is understood that the duration of each time period can be set according to the actual design requirement, and is not limited too much here.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The utility model provides a drive enhancement mode's piezoelectricity stick-slip rotary actuator which characterized in that, includes the base, rotates the rotor that sets up on the base and is used for driving rotor pivoted stator, the rotor passes through positioning mechanism fixed setting on the base, the stator comprises piezoelectric stack and the lever amplification mechanism of fixed setting at piezoelectric stack both ends, and two lever amplification mechanisms are central symmetry and arrange, the one end of lever amplification mechanism is fixed setting on the base, and the other end contacts with the inner circle of rotor, the displacement that piezoelectric stack circular telegram extension produced is enlargied the displacement and is transmitted to the inner circle of rotor through the lever amplification mechanism at its both ends.
2. The drive-enhanced piezoelectric stick-slip rotary driver as claimed in claim 1, wherein the positioning mechanism is formed by two arc-shaped protrusions arranged oppositely, the rotor is arranged between the two arc-shaped protrusions, and an outer ring of the rotor is in interference fit with the arc-shaped protrusions.
3. The drive-enhanced piezoelectric stick-slip rotary driver as claimed in claim 1, wherein the lever amplification mechanism comprises a fixed end, a flexible hinge, a displacement input end, a beam and a displacement output end, which are connected in sequence, and the fixed end is fixed on the base through a fixing bolt.
4. The drive enhanced piezoelectric stick-slip rotary drive of claim 3, wherein the flexible hinge is flanked by inwardly concave semi-circular arcs.
5. The drive enhanced piezoelectric stick-slip rotary driver according to claim 3, wherein the displacement input end is connected with an end of the piezoelectric stack, and the end of the piezoelectric stack is embedded in the displacement input end and fixed through a pre-tightening bolt.
6. A drive enhanced piezoelectric stick-slip rotary actuator as claimed in claim 3 wherein the displacement output end has an end rigidly contacting the inner ring of the rotor and a position where the output end is perpendicular to the beam.
7. A drive enhanced piezoelectric stick-slip rotary drive according to claim 1, wherein the inner race surface of the rotor is coated with a wear layer having friction enhancing protrusions on the surface.
8. The drive enhanced piezoelectric stick-slip rotary driver of claim 1, wherein the piezoelectric stack is arranged along a radial direction of the rotor, the piezoelectric stack is arranged coaxially with the rotor, and the piezoelectric stack drives the inner ring of the rotor to rotate through a pair of force couples.
9. A driving method using a drive enhanced piezoelectric stick-slip rotary driver as claimed in any of claims 1-8, wherein the piezoelectric stack is energized such that the driving voltage gradually rises from 0 to a peak, then steadily continues at the peak for a set time, and finally the driving voltage rapidly decreases to 0 for one energization cycle.
10. A driving method according to claim 9, wherein the energization cycle is repeated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210841275.2A CN115833648A (en) | 2022-07-18 | 2022-07-18 | Drive-enhanced piezoelectric stick-slip rotary driver and drive method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210841275.2A CN115833648A (en) | 2022-07-18 | 2022-07-18 | Drive-enhanced piezoelectric stick-slip rotary driver and drive method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115833648A true CN115833648A (en) | 2023-03-21 |
Family
ID=85522843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210841275.2A Pending CN115833648A (en) | 2022-07-18 | 2022-07-18 | Drive-enhanced piezoelectric stick-slip rotary driver and drive method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115833648A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116015097A (en) * | 2023-03-28 | 2023-04-25 | 睿恩光电有限责任公司 | Piezoelectric driving assembly, rotary motor and electronic device |
-
2022
- 2022-07-18 CN CN202210841275.2A patent/CN115833648A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116015097A (en) * | 2023-03-28 | 2023-04-25 | 睿恩光电有限责任公司 | Piezoelectric driving assembly, rotary motor and electronic device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108092545B (en) | Multi-degree-of-freedom piezoelectric stick-slip micro-nano positioning platform and driving method thereof | |
| CN108270369B (en) | Differential rotation piezoelectric stepping motor and electric excitation mode | |
| CN110138264B (en) | Piezoelectric inchworm rotating motor | |
| CN115833648A (en) | Drive-enhanced piezoelectric stick-slip rotary driver and drive method | |
| CN110752771A (en) | Novel efficient piezoelectric rotation precision driving platform based on parasitic inertia principle | |
| CN117411346A (en) | Smooth motion piezoelectric driving device and method based on mantis-like forefoot flexible mechanism | |
| CN115955141A (en) | Integrated two-degree-of-freedom stepping actuator based on piezoelectric drive | |
| CN101870359A (en) | Method and device for driving trailing edge winglet of rotor blade of helicopter | |
| CN210431263U (en) | Novel piezoelectric rotation precision driving platform | |
| CN110995058A (en) | Novel piezoelectric rotation precision driving platform based on parasitic inertia principle | |
| CN106911264A (en) | Small-sized single piezoelectric stack drive-type bidirectional rotation inertia actuator and start method | |
| CN110912448B (en) | Piezoelectric driving platform based on asymmetric triangle flexible hinge mechanism | |
| CN108092549B (en) | Compact precise piezoelectric stick-slip lifting platform and driving method thereof | |
| CN110855181A (en) | Rotation type piezoelectric drive device based on asymmetric triangle the hinge mechanism | |
| CN111193435A (en) | Rotary actuator | |
| CN109818528B (en) | Stepping type rotary piezoelectric motor and driving method thereof | |
| CN206115005U (en) | Large -scale astronomical telescope panel actuator | |
| CN110630673B (en) | Novel broadband vibration damper | |
| EP2875578A1 (en) | Improved torque rotary motor | |
| CN109698638B (en) | Parallel driving type single-phase linear ultrasonic motor | |
| CN114567206A (en) | Piezoelectric stick-slip rotary motion platform | |
| CN114257124A (en) | Coupling type piezoelectric driving platform of bionic frog leg and driving method thereof | |
| CN109256982B (en) | Piezoelectric driving motor | |
| CN112910310A (en) | Inertial impact type piezoelectric driver capable of carrying large load and driving method thereof | |
| CN106371192A (en) | Large-size astronomical telescope panel actuator and control method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |