CN115451894A - Device for measuring slit depth and calibration method and measurement method thereof - Google Patents
Device for measuring slit depth and calibration method and measurement method thereof Download PDFInfo
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- CN115451894A CN115451894A CN202210920044.0A CN202210920044A CN115451894A CN 115451894 A CN115451894 A CN 115451894A CN 202210920044 A CN202210920044 A CN 202210920044A CN 115451894 A CN115451894 A CN 115451894A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/18—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring depth
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/04—Chucks
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/06—Special adaptations of indicating or recording means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/067—Parameter measured for estimating the property
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Abstract
The invention relates to the field of length measurement, in particular to a device for measuring the depth of a slit and a calibration and measurement method thereof, wherein the device for measuring the depth of the slit comprises: a two-dimensional altimeter and a measuring head; the measuring head is fixedly connected to the two-dimensional height indicator through a fixing piece; the two-dimensional height measuring instrument obtains the height value of the measuring head by controlling the movement of the measuring head; the measuring head is sheet-shaped, and the thickness of the measuring head is matched with the width of the slit; the measuring head is detachably fixed on the fixing piece. According to the invention, the measuring head is arranged into the sheet measuring head, and the thickness of the measuring head is arranged to be matched with the width of the slit, so that compared with the needle-shaped measuring head with the thickness below millimeter level, the measuring head can reduce the measuring error caused by the bending deformation of the measuring head, improve the precision of the slit depth measuring device for measuring the slit depth, disassemble and replace the measuring heads with different thicknesses, conveniently and quickly adapt to the depth of the slit with different widths, and improve the measuring efficiency.
Description
Technical Field
The invention relates to the technical field of measurement, in particular to a device for measuring slit depth and a calibration method and a measurement method thereof.
Background
There are many devices that can perform geometry detection, such as: the measuring device comprises a steel tape, a steel ruler, a caliper, a micrometer, a length measuring instrument, a height measuring instrument, an optical meter, an image measuring instrument, a coordinate measuring machine, a laser tracker and the like, wherein the measuring precision is from millimeter level, silk meter, micrometer level to nanometer level, and the measurement of the geometric dimension and the angle can be realized in different modes in different degrees. However, the existing length measurement technology is almost impossible to separate into two ways: contact measurement and non-contact measurement, the contact measurement method is a measurement method that a sensor of a measuring instrument is in direct contact with the surface of a measured part, and the measurement part is in contact measurement by using a vernier caliper, a percentile scale, a comparator and the like. The contact measurement method is widely applied to production fields, and has the advantages of ensuring certain measurement force between a measuring instrument and a measured part and higher measurement reliability. The non-contact measurement is a measurement method for obtaining object surface parameter information without contacting the surface of the measured object based on photoelectric and electromagnetic technologies, and typical non-contact measurement methods are laser triangulation, eddy current method, ultrasonic measurement method and machine vision measurement.
In recent years, with the development of advanced processing methods, the manufactured parts are more and more precise, in order to match the installation of tight parts, a slit with a width of less than millimeter level may exist, and the depth of the slit with a width of less than millimeter level needs to be measured, for example, as shown in fig. 1, a workpiece to be measured 100 to be measured, a workpiece to be measured with a slit with a width of 0 slit of only 0.2mm, for the depth measurement of a slit with a smaller width, a common method at home and abroad is an image measuring instrument focusing measurement method, which belongs to non-contact measurement, because light or electric waves are subjected to burrs or physical obstacles in the slit during transmission, a precise imaging instrument is difficult to focus and image, or influence reflection of optical/electric waves, so that it is difficult to focus or focus and display an unclear slit, and light beams are difficult to enter the slit, resulting in many disadvantages of inaccurate measurement, large measurement error, and the like, therefore, the depth of the slit with the width below the millimeter level is measured, although the contact measurement is more accurate compared with the non-contact measurement, the conventional contact measurement tool is usually provided with a measuring head as a probe, in order to adapt to the slit with the width below the millimeter level, the probe with the thickness below the millimeter level is required, and the thin probe has lower strength, and is easy to bend and deform after contacting the slit or the workpiece to be measured, resulting in large error of the measured depth of the slit.
Disclosure of Invention
The invention aims to: aiming at the problems that the length of a measuring head is changed and the error is large because a probe of the device for measuring the slit depth in the prior art is thin in order to adapt to the slit width and is easy to bend and deform after contacting the slit or a workpiece to be measured, the device for measuring the slit depth and the calibration method and the measuring method thereof are provided.
In order to achieve the purpose, the invention adopts the technical scheme that:
an apparatus for measuring slit depth, comprising: a two-dimensional altimeter and a measuring head; the measuring head is fixedly connected to the two-dimensional altimeter through a fixing piece; the two-dimensional height indicator obtains a height value of the measuring head by controlling the movement of the measuring head; the measuring head is sheet-shaped, and the thickness of the measuring head is matched with the width of the slit; the measuring head is detachably fixed on the fixing piece.
Because the slit width is below the millimeter level, in order to adapt to the slit width, the traditional measuring head is set into a needle-shaped measuring head with the diameter below the millimeter level, the measuring head is set into a sheet-shaped measuring head, the thickness of the measuring head is set to be matched with the width of the slit, and compared with the needle-shaped measuring head with the diameter below the millimeter level, the section size of the sheet-shaped measuring head is increased, the compression strength and the tensile strength of the measuring head are increased, the bending deformation of the measuring head under the same axial force (acting force vertical to the section) is reduced, the measuring error caused by the bending deformation of the measuring head is reduced, and the precision of the slit depth measuring device for measuring the slit depth is improved; and, through setting up the mounting, can dismantle the measuring head and be fixed in the mounting, can dismantle the measuring head of changing different thickness according to slit width or slit degree of depth, can adapt to the degree of depth of measuring different width slits convenient and fast, improve measuring efficiency.
As a preferable scheme of the invention, the measuring head is provided with a plurality of measuring heads with different thicknesses. This preferred scheme is through being equipped with a plurality of that thickness is unequal with the measuring head, and the mode that the measuring head is fixed in the mounting sets up to detachable, and the measuring head of different thickness can be changed more conveniently in the cooperation each other, makes the measuring head of different thickness can get into the slit of different width to be adapted to the degree of depth of measuring multiple different width slits, strengthened this a measuring device for measuring the slit degree of depth's general moderate degree.
As a preferable aspect of the present invention, the measuring head is formed in a rectangular sheet shape, and the short-side end of the measuring head is used for contacting the slit; the thickness of the measuring head is 0.02 mm-0.2 mm; the width of the measuring head is greater than or equal to 10mm. As is apparent from the above description, the compressive strength and tensile strength of the measuring head against the axial force are proportional to the area of the cross section of the measuring head, that is, the compressive strength and tensile strength against the axial force increase as the area of the cross section increases.
The cross-sectional area of the measuring head is the product of the width and the thickness, and on the basis that the thickness of the measuring head is matched with the width of the slit, the measuring head is set to be in a rectangular sheet shape in the preferred scheme, so that the cross-sectional area of the measuring head can be the product of the width and the thickness, and under the condition that the thicknesses of a plurality of measuring heads with different thicknesses are set to be different fixed values and determined, the width of the measuring head is controlled, so that each measuring head can be matched with the width of the slit and meet the requirements of axial force compression resistance and tensile strength; for example, the maximum value of the thickness of the measuring head is set to 0.2mm, which is sufficient to enter a slit 0.2mm wide. The minimum value of the measuring head thickness of measuring head sets up to 0.02mm for under the compressive strength's of can taking into account the condition, the width maximum value is 10mm, avoids the too wide measuring head of width and causes and mismatch with the length of slit, has further strengthened the suitability of this a device for measuring the slit degree of depth.
As a preferable aspect of the present invention, one end of the measuring head for contacting the slit is provided as an arc-shaped edge, and the arc-shaped edge is bent toward one end away from the slit. According to the preferred scheme, the measuring head is set to be in a rectangular sheet shape, one end, used for being in contact with the slit, of the measuring head is set to be the arc-shaped edge, the arc-shaped edge extends along the width direction of the measuring head, the measuring head is thinner in thickness and wider in width, so that the arc-shaped edge is approximately represented by an arc line in the action of the acquisition position, when the measuring head stretches into the slit to be in contact with the bottom of the slit, the lowest contact slit of the arc-shaped edge is in contact with the bottom of the slit, and the part higher than the lowest part of the arc-shaped edge of the measuring head cannot be in contact with the bottom of the slit due to the support of the lowest part of the arc-shaped edge. Therefore, compared with the line contact or the surface contact of the end parts of measuring heads with other shapes, the measuring head with one arc-shaped edge can form approximate point contact with the bottom of the slit, so that the positioning of the measuring point is more accurate, the positioning deviation of the measuring point due to the uneven bottom of the slit is avoided, the measuring error can be further reduced, and the measuring precision is improved.
As a preferable aspect of the present invention, the arc-shaped edge has a circular arc structure or an elliptical arc structure. This preferred scheme is through setting up the arcuation edge into circular arc structure or oval arc structure for the both sides at arcuation edge form with the central axis symmetry's pitch arc to middle one point protrusion, through vertical fixed measuring head, make the measuring head plummet, the minimum of measuring head can contact the slit bottom very easily, avoids adjusting or looking for the minimum of measuring head, thereby makes this a device for measuring the slit depth use more portably.
As a preferable aspect of the present invention, the width of the measuring head is gradually reduced from the end for connecting the fixing member to the end for contacting the slit; the diameter of the arc-shaped edge is 2 mm-5 mm. According to the preferred scheme, one end of the measuring head, which is used for being in contact with the slit, is set to be smaller, the diameter of the arc-shaped edge is 2-5 mm, the diameter of the arc-shaped edge is smaller, the curvature is larger, the contact area at the lowest position is further reduced, the collecting point is closer to point contact, and the measuring accuracy is further improved.
As the preferable scheme of the invention, the fixing piece is provided with a clamping groove and a locking piece; the clamping groove is used for embedding the measuring head; the other end of the locking piece penetrates into the clamping groove and can abut against the measuring head. This preferred scheme is through setting up the mounting into pressing from both sides groove and retaining member for the upper portion of measuring head presss from both sides the groove through the embedding and arranges the inslot in, and rethread retaining member can support the measuring head tightly and lean on tightly in the inner wall that presss from both sides the groove, thereby has made things convenient for the installation and the dismantlement of measuring head.
As the preferred scheme of the invention, the clamping groove is a vertical through groove. The measuring head can be taken out from the lower part to be replaced by moving the fixing piece to enable the measuring head to be moved out of the measured slit, and the measuring head can be taken out from the lower part to be replaced; and, also be convenient for adjust the height position of measuring head, move the measuring head along logical groove up and down promptly, make the length that the measuring piece is not by the centre gripping moderate, be adapted to the little slit of degree of depth and measure.
In order to achieve the above object, the present invention further provides a calibration method for a measuring device, which is mainly used for calibrating a device for measuring a slit depth, and comprises the following steps:
A. mounting the measuring head on the fixing member; leveling the two-dimensional altimeter; setting the two-dimensional altimeter to be in an altimeter mode;
B. setting a plurality of calibration planes, and acquiring the height value of each calibration plane as a standard height value for the elevation of each calibration plane;
C. moving the measuring head to enable the measuring head to contact each calibration plane in sequence; acquiring each actual height measurement value of the two-dimensional height indicator; the absolute value of the difference between each real height value and each standard height value is an actual error value;
if each actual error value is smaller than or equal to the error allowable value, judging that the device for measuring the slit depth meets the measurement requirement; if a certain actual error value is larger than the error allowable value, adjusting the display value of the two-dimensional altimeter to enable the display value to be the standard height value.
According to the calibration method of the measuring device, the height measured by the device is calibrated by setting the two-dimensional height indicator to be in the height measurement mode after leveling, so that the interference caused by transverse movement to calibration is avoided, and the calibration precision is improved; setting a calibration plane and aligning the elevation of the calibration plane through steps B and C, aligning the elevation of the calibration plane by using an instrument with higher accuracy, acquiring the height value of the calibration plane as a standard height value, enabling a measuring head to be in contact with the calibration plane through steps B and C to measure the height of the calibration plane, judging whether the installation of the device meets the measurement requirement or not by comparing the actually measured value of the calibration plane actually measured by the measuring device with the standard height value, finding out the error existing in the measuring device, and if the actual error value is greater than the allowable error, enabling the height of the calibration plane acquired by the two-dimensional height gauge to be displayed as the standard height value by adjusting the height of the calibration plane measured by the two-dimensional height gauge to be the standard height value, thereby realizing the calibration of the measuring device and improving the accuracy of the measuring device; and a plurality of calibration planes are set, and each calibration plane is used for sequentially calibrating the measuring device, so that a plurality of height measuring points of the measuring device are calibrated, and the system error in calibration can be reduced, thereby further improving the calibration precision, and the calibration method is simple and easy to operate.
As a preferable aspect of the present invention, the calibration method of the measuring apparatus, step B, further includes the steps of: the height values of the set calibration planes are arranged in an arithmetic progression. According to the optimal scheme, the measuring device is calibrated by the aid of the calibration plane in which the height values are arranged in an arithmetic progression, the error range of the measuring device can be evaluated at a plurality of arithmetic height points, a plurality of height measuring points in which a plurality of arithmetic heights are sequentially arranged are calibrated, system errors of calibration can be further reduced, and calibration accuracy is further improved.
In order to achieve the above object, the present invention further provides a calibration block for use in calibration of a measuring apparatus, wherein a lower bottom surface of the calibration block is a plane, the calibration block is provided with a plurality of calibration planes with equal height difference, the calibration block is in a step shape, and each calibration plane corresponds to one step. This scheme has the calibration piece on a plurality of calibration plane of equal altitude difference through the setting, can satisfy in the calibration of altimeter on using the basis of a plurality of calibration planes, the lower bottom of calibration piece is the plane, place the calibration piece in the platform, then can keep a plurality of calibration plane to tend to the horizontal plane, the calibration piece sets up to the echelonment, every ladder correspondence sets up to a calibration plane, make a plurality of calibration plane keep the environmental uniformity, and satisfy the measuring head and rise or reduce the height along the ladder in proper order, every calibration plane of very convenient contact, satisfy the requirement that reduces calibration system error in the calibration, thereby further improve the precision of calibration.
To achieve the above object, the present invention also provides a method of measuring a slit depth, using an apparatus for measuring a slit depth, comprising the steps of:
the method comprises the following steps: placing a workpiece to be detected with a slit on a working platform, and leveling the workpiece to be detected; selecting a position to be detected of the slit, and marking the surface of the workpiece to be detected corresponding to the position to be detected; selecting the measuring head matched with the width of the slit to be measured; mounting the measuring head on the fixing piece, and setting the two-dimensional altimeter to be in an altimetry mode;
step two: moving the measuring head downwards to enable the measuring head to enter a slit of a position to be measured; when the measuring head is contacted with the bottom of the slit, acquiring that the height value of the bottom of the slit is a first height value; moving the measuring head upwards to remove the measuring head from the slit; moving the measuring head to enable the measuring head to be in contact with the mark position of the surface of the workpiece to be measured, and acquiring a height value of the surface of the workpiece to be measured corresponding to the position to be measured of the slit as a second height value; the absolute value of the difference between the first height value and the second height value is the depth value of the slit.
According to the scheme, the measuring head matched with the width of the slit to be measured is selected, so that the thickness of the measuring head can be matched with the width of the slit, the measuring head can enter the bottom of the slit and contact the bottom of the slit, errors caused by the fact that the needle-shaped measuring head is easy to bend when contacting the bottom of the slit are reduced by matching with the measuring head, and the measuring precision can be improved; the method also comprises the steps of selecting a position to be measured of the slit, marking the surface of the workpiece to be measured corresponding to the position to be measured, leveling the workpiece to be measured on the platform, setting the two-dimensional height measuring instrument to be in a height measuring mode, enabling the measuring head to be vertically parallel to the position to be measured of the slit, reducing errors caused by the fact that the measuring head inclines in the slit, increasing the accuracy of positioning sampling points of the measuring head through the marks, obtaining the height value of the bottom of the slit to be a first height value, moving the measuring head upwards to contact the mark of the surface of the workpiece to be measured, obtaining the height value of the surface of the workpiece to be measured corresponding to the position to be measured of the slit to be a second height value, enabling the bottom of the position to be measured of the slit to correspond to the surface of the workpiece to be measured, enhancing the accuracy of positioning of the sampling points, reducing errors caused by positioning deviation of the first height value and the second height value, enabling the absolute value obtained difference between the first height value and the second height value to be the slit depth, further improving the accuracy of slit depth measurement, being simple and convenient to improve the efficiency of slit depth measurement.
In conclusion, due to the adoption of the technical scheme, the invention has the beneficial effects that:
1. compared with a needle-shaped measuring head with the thickness below the millimeter level, the section size of the sheet measuring head is increased, the compression strength and the tensile strength of the measuring head are enhanced, the bending deformation of the measuring head under the action of axial force is reduced, so that the measuring error caused by the bending deformation of the measuring head is reduced, and the precision of the slit depth measuring device for measuring the slit depth is improved; and, through setting up the mounting, can dismantle the measuring head and be fixed in the mounting, can dismantle the measuring head of changing different thickness according to slit width or slit degree of depth, can adapt to the degree of depth of measuring different width slits convenient and fast, improve measuring efficiency.
2. According to the calibration method of the measuring device, the height measured by the device is calibrated by setting the two-dimensional height indicator to be in the height measurement mode after being leveled, so that interference caused by transverse movement to calibration is avoided; and through setting a calibration plane, for the elevation of the calibration plane, the height of the calibration plane can be measured by contacting the measuring head with the calibration plane through the steps B and C, and through comparing the actually measured value of the calibration plane actually measured by the measuring device with the standard height value, whether the device is installed to meet the measurement requirement can be judged, the error existing in the measuring device can be found, and the accuracy of the measuring device can be improved through the calibration of the measuring device;
3. according to the calibration method of the measuring device, the plurality of calibration planes are set, and each calibration plane is used for sequentially calibrating the measuring device, so that the system error in calibration can be reduced, the calibration precision is further improved, the calibration method is simple and easy to operate, and the calibration efficiency of the measuring device is improved.
4. The method for measuring the depth of the slit is matched with the measuring head, so that the error caused by the fact that the needle-shaped measuring head is easy to bend when contacting the bottom of the slit is reduced, and the measuring precision can be improved; by selecting the position to be measured of the slit and marking the surface of the workpiece to be measured corresponding to the position to be measured, the accuracy of positioning the point to be measured by the measuring head can be increased through the marking, and the point to be measured is contacted with the marked position on the surface of the workpiece, so that the bottom of the position to be measured of the slit corresponds to the surface of the workpiece to be measured, the error of the first height value and the second height value caused by positioning deviation is reduced, the accuracy of slit depth measurement is further improved, the measurement operation is simple and convenient, and the efficiency of slit depth measurement can be improved.
Drawings
FIG. 1 is a side view of a workpiece to be tested according to the present invention;
FIG. 2 is a three-dimensional block diagram of the apparatus for measuring slit depth of the present invention;
FIG. 3 is an enlarged view of a portion of coil A of FIG. 2;
FIG. 4 is a side view of a measuring head of the present invention;
FIG. 5 is a block diagram of the calibration block of the present invention;
FIG. 6 is a three-dimensional view of a workpiece to be tested according to the present invention;
icon: 0-slits; 1-two-dimensional altimeter; 2-a measuring head; 21-arc shaped edge; 3-a fixing piece; 31-a clamping groove; 32-a locking member; 4-a calibration block; 41-calibration plane; 100-a workpiece to be measured; 101-marking.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Example 1
As shown in fig. 2 to 4, the present invention provides an apparatus for measuring a slit depth, comprising: a two-dimensional altimeter 1 and a measuring head 2; the measuring head 2 is fixedly connected to the two-dimensional altimeter 1 through a fixing piece 3; the two-dimensional altimeter 1 acquires the height value of the measuring head 2 by controlling the movement of the measuring head 2; the measuring head 2 is sheet-shaped, and the thickness of the measuring head 2 is matched with the width of the slit 0; the measuring head 2 is detachably fixed to the fixing member 3.
It should be noted that, the thickness of the measuring head 2 is matched with the width of the slit 0, and the thickness of the measuring head 2 is matched with the width of the slit 0, which means that the slit 0 of the present invention is the slit 0 with the width below millimeter level, so that the thickness of the measuring head 2 needs to be processed into the thickness below millimeter level, and the width of the slit 0 is 0.2mm, and the thickness of the measuring head 2 is less than 0.2mm, so that the measuring head 2 can extend into the slit 0, and because the widths of different slits 0 may be different, the present invention may preferably set the measuring head 2 to be a plurality of different thicknesses, so that a measuring sheet with an appropriate or optimal thickness may be selected according to the width of the slit 0 to measure the slit 0 with a corresponding width, thereby enhancing the universality of the apparatus for measuring the depth of the slit 0.
It should be noted that the two-dimensional height indicator 1 is a device capable of measuring the height of a workpiece, the two-dimensional height indicator 1 capable of setting a height measurement mode is preferably selected in the invention, the measuring head 2 capable of measuring a slit 0 is matched, the measuring head 2 is fixed on the two-dimensional height indicator 1 through the fixing piece 3 and the transverse connecting rod, the transverse connecting rod can be driven to move up and down by operating the height indicator 1, so that the fixing piece 3 and the measuring head 2 are driven to move up and down, and workpieces with different heights are measured, wherein the digital display type two-dimensional height indicator 1 is preferably used, is a high-precision measuring instrument, the resolution is 0.1 μm, the maximum allowable error is 1.2 μm + (L/1000) μm, the repeatability reaches 0.5 μm, and the measuring range is 0-1000 mm.
It should be noted that the measuring head 2 may be configured as a measuring sheet with a regular shape, and in the measuring process, the height value of the bottom surface of the slit 0 can be acquired by fixing the upper end of the measuring sheet to the fixing member 3 and contacting the lower end of the measuring sheet to the bottom surface of the slit 0, where the measuring head 2 is preferably configured as a rectangular sheet, so that the long side or the short side of the rectangular sheet-shaped measuring head 2 can be used to contact the bottom of the slit 0 for acquisition, and in the present invention, it may also be preferable that the measuring head 2 is configured as a rectangular sheet with reference to fig. 4, and the short side of the measuring head 2 is used to contact the slit 0; the thickness of the measuring head 2 is 0.02 mm-0.2 mm; the measuring head 2 has a width greater than or equal to 10mm.
It should be noted that, in order to facilitate the measuring sheet to extend into the slit 0, the thinner the measuring head 2 is, the easier the measuring head 2 is to enter the slit 0, and according to knowledge of material mechanics, the cross-sectional area of the member is in direct proportion to the compressive strength and the tensile strength of the axial force acting on the member, so that the compressive strength and the tensile strength of the thinner measuring head 2 to the axial force are reduced, and therefore, the measuring head 2 can also be preferably set to be a rectangular sheet shape, the short side end of the measuring head 2 is used for contacting the slit 0, and the long side end can be set to be wider to compensate the reduced compressive strength or tensile strength due to the thinner thickness, so as to further enhance the strength of the measuring head 2, further reduce the bending caused by the abutting force, and further improve the measuring accuracy.
It is also preferred according to the invention that the measuring head 2 has a thickness of 0.02mm to 0.2mm; according to the knowledge of material mechanics, the cross sectional area of the component is in direct proportion to the compression resistance and the tensile strength of the component to resist axial force, the cross sectional area of the rectangular sheet measuring head 2 is the product of thickness and width, because the axial force for measuring the contact slit 0 of the measuring head 2 is fixed, the thickness and the width of the measuring head 2 are in inverse proportion, if the thickness is 0.02mm, the rectangular measuring head 2 is measured, the minimum width of the measuring head 2 is 10mm, and the proper strength can be realized, the preferable scheme sets the thickness of the measuring head 2 to be 0.02 mm-0.2 mm, namely, the preferable scheme can meet the requirement that the measuring head 2 is applicable to 0.02mm so that the width of the measuring head 2 is not too wide and not suitable for the length of the slit 0, the slit 0 can be more easily entered, and the use of the measuring head 2 is further facilitated.
According to the knowledge of material mechanics, the stress when the material fails is the ultimate stress, and the calculation formula of the ultimate stress is
σ is the allowable stress value of the material, F N When the cross section is designed for the axial force and the cross section area A of the cross section, if the load born by the component and the allowable stress of the material are known, the cross section size is designed according to the cross section shape, so that the cross section size meets the requirement
The steel material is Q215 steel, the average allowable stress value is 40Mpa, the acting force of the measuring head 2 abutting against the bottom of the slit 0 is 8N, and the section size of the measuring head 2 meets the requirement
A = L × d, L is the width of the measurement piece, d is the thickness of the measurement piece, and the width of the measurement head 2 satisfies the condition
It should be noted that, by providing a plurality of measuring heads 2 with different thicknesses, the width of each measuring head 2 can be controlled to correspond to the thickness of each measuring head 2 with a certain thickness, so as to meet the requirements of compression resistance, tensile strength and adaptation to the width of the slit 0.
In the present invention, it is preferable that one end of the measuring head 2 contacting the slit 0 is provided as an arc-shaped edge 21, and the arc-shaped edge 21 is bent toward the end away from the slit 0, and the arc-shaped edge 21 can be an elliptical arc or a circular arc, and it is preferable that one end of the measuring head 2 contacting the slit 0 is provided as an arc-shaped edge 21 as shown in fig. 4. It should be noted that, the arc-shaped edge 21 is bent towards the end away from the slit 0, it is understood that as shown in fig. 4, the center of the arc-shaped edge 21 is located on the vertical central axis of the measuring head 2, two ends of the arc-shaped edge 21 are located at two sides of the measuring head 2, as shown in fig. 4, the width direction of the measuring head 2 is the direction parallel to the axis P (the axial direction P is a dotted line P for conveniently marking and only used for illustrating the present invention, it is possible to realize that the arc-shaped edge 21 is bent towards the end away from the slit 0, it is also understood that the width of the measuring head 2 is matched with the length of the slit 0, the extending direction of the length of the slit 0 is the direction parallel to the axis P, it is understood that the thickness direction of the measuring head 2 is matched with the width direction of the slit 0, that is the direction transverse and perpendicular to the axis P.
Preferably, as shown in fig. 3, the fixing member 3 is provided with a clamping groove 31 and a locking member 32; the clamping groove 31 is used for embedding the measuring head 2; one end of the locking member 32 penetrates into the clamping groove 31 and is used to abut against the measuring head 2. Preferably, the fixing member 3 is detachably provided, and the clamping portion is loosened, so that the sheet-shaped measuring head 2 can be replaced at any time, the structure is stable, the operability is strong, and the sheet-shaped measuring head 2 is mounted on the fixing member 3 and fastened, so that the special measuring heads 2 can be formed. It should be noted that the fixing element 3 is understood as a component for fixing the measuring head 2, the fixing element 3 can be fixedly connected to the two-dimensional altimeter 1 through a cross rod, the width of the clamping groove 31 is set to be a clamping groove 31 matched with both the thickness and the width of the measuring head 2, the upper portion of the measuring head 2 can be embedded into the clamping groove 31, the clamping groove 31 is preferably vertically arranged, the locking element 32 is transversely arranged, the locking element 32 is preferably set to be a locking bolt with a nut located outside the clamping groove 31, a screw of the locking bolt is used for transversely penetrating into the clamping groove 31 to abut against the measuring head 2, the measuring head 2 is vertically embedded into the clamping groove 31, the locking element 32 transversely penetrates through the clamping groove 31, and the measuring head 2 is abutted against the inner wall of the clamping groove 31 by pushing the bolt into the clamping groove 31, so as to clamp the measuring head 2 to the fixing element 3; and the measuring head 2 is replaced or the measuring head 2 is detached, the measuring head 2 is taken out of the clamping groove 31 by screwing out the locking bolt outside the clamping groove 31.
It is also preferable that the clamping groove 31 is a vertical through groove, which means that the measuring head 2 can pass through the clamping groove 31 upwards along the vertical through groove, i.e. the upper end of the measuring head 2 cannot move upwards due to abutting against the top end of the clamping groove 31, and the measuring head 2 can be taken out along the vertical through groove from above when the measuring head 2 is replaced.
Example 2
On the basis of the embodiment 1, the calibration method of the measuring device provided by the invention is used for calibrating the device for measuring the slit depth, and comprises the following steps:
A. mounting the measuring head 2 on the fixing member 3; leveling the two-dimensional altimeter 1; setting a two-dimensional altimeter 1 in an altimeter mode;
B. setting a plurality of calibration planes 41, and acquiring the height value of each calibration plane 41 as a standard height value for the elevation of each calibration plane 41;
C. moving the measuring head 2 to make the measuring head 2 contact each calibration plane 41 in turn according to the height; acquiring each actual height measurement value of the two-dimensional height indicator 1; the absolute value of the difference between each real height value and each standard height value is an actual error value;
if each actual error value is less than or equal to the error allowable value, judging that the device for measuring the slit depth meets the measurement requirement; if each actual error value is larger than the error allowable value, the display value of the two-dimensional altimeter 1 is adjusted to be the standard height value.
It should be noted that the calibration plane 41 is a plane capable of supporting the measuring head 2 and allowing the measuring head 2 to measure the height of the plane, and preferably, as shown in fig. 5, the calibration plane 41 is a plane of a workpiece of the calibration block 4 capable of being used for calibration.
The actual height value is the height value of the calibration plane 41 actually measured by the two-dimensional altimeter 1, and the standard height value of the calibration plane 41 is the height value of the calibration plane 41 measured by the measuring instrument with higher accuracy and designed to have a more accurate height, that is, the standard height value of the calibration plane 41 remains unchanged, but the actual height value of the two-dimensional altimeter 1 differs depending on the accuracy of the two-dimensional altimeter 1.
The present invention is also preferable, and the step B of the calibration method of the measuring apparatus further includes the steps of: the height values of the set calibration planes 41 are arranged in an arithmetic progression. For example, the heights of the calibration plane 41 are standard values, the heights are respectively 3mm, 6mm, 9mm, 12mm and 15mm, the tolerance requirements of the heights are all +/-3 μm, the error range of the measuring device can be evaluated at a plurality of height measurement points with equal height difference, the measuring device can be calibrated at a plurality of height measurement points with equal height difference in sequence, the system error of calibration can be further reduced, and the calibration precision can be further improved.
Example 3
On the basis of the embodiment 2, preferably, as shown in fig. 5, in the calibration block 4 for use in calibration of a measuring apparatus provided by the present invention, a lower bottom surface of the calibration block 4 is a plane, the calibration block 4 is provided with a plurality of calibration planes 41 with equal height difference, the calibration block 4 is in a step shape, and each calibration plane 41 corresponds to one step. In the preferred embodiment, the height of each calibration plane 41 is a standard value, and the height is 3mm, 6mm, 9mm, 12mm, 15mm, and the tolerance requirement of the height is ± 3 μm.
Example 4
On the basis of embodiment 1, the invention provides a method for measuring the slit depth, which uses the device for measuring the slit depth to carry out measurement, and comprises the following steps:
the method comprises the following steps: placing a workpiece 100 to be tested with a slit 0 on a working platform, and leveling the workpiece 100 to be tested; selecting a position to be detected of the slit 0, and marking 101 corresponding to the position to be detected on the surface of the workpiece 100 to be detected; selecting a measuring head 2 matched with the width of the slit 0 to be measured; mounting a measuring head 2 on the fixing piece 3, and setting the two-dimensional altimeter 1 in an altimetry mode;
specifically, referring to fig. 6, the workpiece 100 to be measured is placed on the working platform, the workpiece 100 to be measured is leveled, and before measurement, the two-dimensional altimeter 1 is leveled with the workpiece 100 to be measured, so that the two-dimensional altimeter 1 and the workpiece 100 to be measured are both positioned horizontally, and the measurement head 2 moves up or down, both in the plumb direction, thereby reducing the inclination of the measurement head 2 in the slit 0 and facilitating improvement of the measurement accuracy.
It should be noted that the mark 101 may be a scratch or a note, the measuring head 2 is enabled to measure the depth of the slit 0 from the position of the mark 101 through the mark 101, and when the measuring head 2 is moved and the surface of the workpiece 100 to be measured needs to be measured, the mark 101 is enabled to find the surface of the workpiece 100 to be measured corresponding to the position to be measured of the slit 0, so as to reduce the deviation between the position of the collecting point at the bottom of the slit 0 and the position of the collecting point on the surface of the workpiece 100 to be measured at the upper part of the slit 0 as much as possible, thereby improving the measurement accuracy.
Step two: moving the measuring head 2 downwards to enable the measuring head 2 to enter a slit 0 of a position to be measured; when the measuring head 2 contacts the bottom of the slit 0, acquiring a height value of the bottom of the slit 0 as a first height value; moving the measuring head 2 upward to remove the measuring head 2 from the slit 0; moving the measuring head 2, so that the measuring head 2 is in contact with the mark 101 on the surface of the workpiece 100 to be measured, and acquiring the height value of the surface of the workpiece 100 to be measured corresponding to the position to be measured of the slit 0 as a second height value; the absolute value of the difference between the first height value and the second height value is the depth value of the slit 0.
Moving the measuring head 2 downwards to enable the measuring head 2 to enter a slit 0 of a position to be measured; when the measuring head 2 contacts the bottom of the slit 0, acquiring the height value of the bottom of the slit 0 as a first height value; moving the measuring head 2 upward to move the measuring head 2 out of the slit 0; moving the measuring head 2 again to enable the measuring head 2 to be in contact with the mark 101 on the surface of the workpiece 100 to be measured, and acquiring the height value of the surface of the workpiece 100 to be measured corresponding to the position to be measured of the slit 0 as a second height value; the absolute value of the difference between the first height value and the second height value is the depth value of the slit 0.
The present invention is not limited to the above preferred embodiments, and any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. An apparatus for measuring slit depth, comprising: the device comprises a two-dimensional altimeter (1) and a measuring head (2); the measuring head (2) is fixedly connected to the two-dimensional altimeter (1) through the fixing piece (3); the two-dimensional altimeter (1) acquires a height value of the measuring head (2) by controlling the movement of the measuring head (2); the measuring head (2) is flaky, and the thickness of the measuring head (2) is matched with the width of the slit (0); the measuring head (2) is detachably fixed on the fixing part (3).
2. Device for measuring slit depth according to claim 1, characterized in that the measuring head (2) is provided with several different thicknesses.
3. The device for measuring a slit depth according to claim 2, wherein the measuring head (2) is provided in a rectangular sheet shape, and a short-side end of the measuring head (2) is used to contact the slit (0); the thickness of the measuring head (2) is 0.02mm to 0.2mm; the measuring head (2) has a width greater than or equal to 10mm.
4. The device for measuring slit depth according to claim 1, characterized in that one end of the measuring head (2) for contacting the slit (0) is provided as an arc-shaped edge (21), and the arc-shaped edge (21) is bent toward one end away from the slit (0).
5. The device for measuring slit depth according to claim 4, wherein the measuring head (2) has a width gradually decreasing from one end for connecting the fixing member (3) to one end for contacting the slit; the diameter of the arc-shaped edge (21) is 2mm-5mm.
6. The device for measuring slit depth according to claim 1, wherein the fixing member (3) is provided with a clipping groove (31) and a locking member (32); the clamping groove (31) is used for the measuring head (2) to be embedded; one end of the locking piece (32) penetrates into the clamping groove (31) and is used for abutting against the measuring head (2).
7. Device for measuring slit depth according to claim 6, characterised in that the clamping groove (31) is a vertical through groove.
8. A method for calibrating a measuring device, characterized in that the device for measuring the depth of a slit according to any one of claims 1-6 is calibrated, comprising the steps of:
A. mounting the measuring head (2) on the fixing member (3); leveling the two-dimensional altimeter (1); setting the two-dimensional altimeter (1) to be in an altimeter mode;
B. setting a plurality of calibration planes (41), and acquiring the height value of each calibration plane (41) as a standard height value for the elevation of each calibration plane (41);
C. moving the measuring head (2) so that the measuring head (2) contacts each calibration plane (41) in turn; acquiring each actual height measurement value of the two-dimensional height indicator (1); the absolute value of the difference between each real height value and each standard height value is an actual error value;
if each actual error value is smaller than or equal to the error allowable value, judging that the device for measuring the slit depth meets the measurement requirement; if the actual error value is larger than the error allowable value, adjusting the display value of the two-dimensional altimeter (1) to enable the display value to be the standard altitude value.
9. Calibration block for calibration of a measuring device, characterized in that, in a calibration method for a measuring device according to claim 8, the lower base surface of the calibration block (4) is a flat surface, the calibration block (4) is provided with a plurality of calibration planes (41) of equal height difference, the calibration block (4) is stepped, and each calibration plane (41) corresponds to a step.
10. A method of measuring a slit depth, using the apparatus for measuring a slit depth according to any one of claims 1 to 7, comprising the steps of:
the method comprises the following steps: placing a workpiece (100) to be tested with a slit (0) on a working platform, and leveling the workpiece (100) to be tested; selecting a position to be detected of the slit (0), and marking (101) corresponding to the position to be detected on the surface of the workpiece (100) to be detected; selecting the measuring head (2) matched with the width of the slit (0) to be measured; the measuring head (2) is arranged on the fixing piece (3), and the two-dimensional altimeter (1) is set to be in an altimetry mode;
step two: moving the measuring head (2) downwards to enable the measuring head (2) to enter a slit (0) of a position to be measured; when the measuring head (2) is contacted with the bottom of the slit (0), acquiring that the height value of the bottom of the slit (0) is a first height value; moving the measuring head (2) upwards to remove the measuring head (2) from the slit (0); moving the measuring head (2) again to enable the measuring head (2) to be in contact with the mark (101) on the surface of the workpiece to be measured (100), and acquiring a height value of the surface of the workpiece to be measured (100) corresponding to the position to be measured of the slit (0) as a second height value; and the absolute value of the difference between the first height value and the second height value is the depth value of the slit.
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| CN202210920044.0A CN115451894A (en) | 2022-08-01 | 2022-08-01 | Device for measuring slit depth and calibration method and measurement method thereof |
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| CN202210920044.0A CN115451894A (en) | 2022-08-01 | 2022-08-01 | Device for measuring slit depth and calibration method and measurement method thereof |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN207751423U (en) * | 2018-01-24 | 2018-08-21 | 山东联友石化工程有限公司 | A kind of measurer for thickness |
| CN110084786A (en) * | 2019-04-04 | 2019-08-02 | 中国兵器科学研究院宁波分院 | Automatic defect identification method for digital X-ray image with gradually-changed background |
| CN112254693A (en) * | 2019-07-22 | 2021-01-22 | 佛山市南海华达高木模具有限公司 | Depth precision measurement method |
| CN114295072A (en) * | 2021-12-08 | 2022-04-08 | 中国航空工业集团公司北京长城计量测试技术研究所 | Multi-type curved surface sample plate |
| CN114623769A (en) * | 2020-12-10 | 2022-06-14 | 中国科学院微电子研究所 | Micro-bump height measuring device based on constant cross ratio and parameter calibration method |
-
2022
- 2022-08-01 CN CN202210920044.0A patent/CN115451894A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN207751423U (en) * | 2018-01-24 | 2018-08-21 | 山东联友石化工程有限公司 | A kind of measurer for thickness |
| CN110084786A (en) * | 2019-04-04 | 2019-08-02 | 中国兵器科学研究院宁波分院 | Automatic defect identification method for digital X-ray image with gradually-changed background |
| CN112254693A (en) * | 2019-07-22 | 2021-01-22 | 佛山市南海华达高木模具有限公司 | Depth precision measurement method |
| CN114623769A (en) * | 2020-12-10 | 2022-06-14 | 中国科学院微电子研究所 | Micro-bump height measuring device based on constant cross ratio and parameter calibration method |
| CN114295072A (en) * | 2021-12-08 | 2022-04-08 | 中国航空工业集团公司北京长城计量测试技术研究所 | Multi-type curved surface sample plate |
Non-Patent Citations (2)
| Title |
|---|
| 国家技术监督局: "JJG929-1998数显测高仪检定规程", 1 August 1998, 中国科学院光电技术研究所, pages: 1 - 6 * |
| 罗福午等: "建筑结构", vol. 1, 30 November 2005, 武汉理工大学出版社 , pages: 28 - 29 * |
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