[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

CN115366546B - Drying device - Google Patents

Drying device Download PDF

Info

Publication number
CN115366546B
CN115366546B CN202110560158.4A CN202110560158A CN115366546B CN 115366546 B CN115366546 B CN 115366546B CN 202110560158 A CN202110560158 A CN 202110560158A CN 115366546 B CN115366546 B CN 115366546B
Authority
CN
China
Prior art keywords
heater
space
main body
heating
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110560158.4A
Other languages
Chinese (zh)
Other versions
CN115366546A (en
Inventor
杨佳伟
罗秋园
孙凌霄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong Juhua Printing Display Technology Co Ltd
Original Assignee
Guangdong Juhua Printing Display Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong Juhua Printing Display Technology Co Ltd filed Critical Guangdong Juhua Printing Display Technology Co Ltd
Priority to CN202110560158.4A priority Critical patent/CN115366546B/en
Publication of CN115366546A publication Critical patent/CN115366546A/en
Application granted granted Critical
Publication of CN115366546B publication Critical patent/CN115366546B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J11/00Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
    • B41J11/0015Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
    • B41J11/002Curing or drying the ink on the copy materials, e.g. by heating or irradiating

Landscapes

  • Drying Of Solid Materials (AREA)

Abstract

The embodiment of the application discloses a drying device, wherein a first heater is arranged in a cavity; the heat conducting plate is arranged on the first heater and used for drying materials to be dried, and a first space is formed between the heat conducting plate and the first heater; the heat transfer medium is filled in the first space. The heat conduction medium is filled in the first space, so that heat of the first heater is uniformly transferred to the heat conduction plate, and the uniformity of heating the solution type material is improved.

Description

Drying device
Technical Field
The application relates to the field of drying technology, in particular to a drying device.
Background
At present, a solution material in the ink-jet printing technology is dripped into a pixel groove on a patterned substrate to form a device luminous functional layer. The solution type luminescent material needs to be dried after being dripped into the pixel groove, so that the solvent in the pixel groove is completely evaporated, and the dried solute is left to form a stably combined molecular structure, thereby improving the mobility of electrons.
In the research and practice process of the prior art, the inventor of the application finds that, as the existing heating device adopts the resistance wire to heat, the mode is easy to generate local overhigh heat, so that the solution type material is heated unevenly, and then a drying trace appears.
Disclosure of Invention
The embodiment of the application provides a drying device, can improve the homogeneity to solution type material heating, reduces the risk that solution type material appears drying trace after the drying.
The embodiment of the application provides a drying device, it includes:
a chamber;
a first heater disposed within the chamber;
the heat conducting plate is arranged on the first heater and used for drying materials to be dried, and a first space is formed between the heat conducting plate and the first heater; and
and a heat transfer medium filled in the first space.
Optionally, in some embodiments of the present application, the heat transfer medium is a gas.
Optionally, in some embodiments of the present application, the drying device further includes a second heater, where the second heater is disposed on a side of the heat conducting plate away from the first heater, a second space is between the second heater and the heat conducting plate, and a third space is between the second heater and a side of the chamber away from the heat conducting plate;
the second heater includes a heating member provided with a plurality of through holes communicated with the second space and the third space.
Optionally, in some embodiments of the present application, the second heater further includes an adsorption layer disposed on a side of the heating member remote from the heat conductive plate.
Optionally, in some embodiments of the present application, the adsorption layer is further disposed on a side of the heating element adjacent to the heat conducting plate.
Optionally, in some embodiments of the present application, the heating component includes a substrate and a heating body disposed in the substrate, the heating body includes a plurality of main body portions, a first bending portion and a second bending portion, the plurality of main body portions are all disposed along a first direction, the plurality of main body portions are disposed along a second direction, and the first direction intersects the second direction;
the first bending part is arranged on one side of the plurality of main body parts, the second bending part is arranged on the other side of the plurality of main body parts, the nth main body part is connected with the (n+1) th main body part through the first bending part, the (n+1) th main body part is connected with the (n+2) th main body part through the second bending part, and n is an odd number;
the through hole is arranged on the periphery side of the heating body and penetrates through the substrate.
Optionally, in some embodiments of the present application, the drying apparatus further comprises a gas purifier and a channel structure, the gas purifier and the channel structure being disposed outside the chamber, the gas purifier being connected to the channel structure;
the channel structure is provided with a first channel port and a plurality of second channel ports, the first channel port is communicated with the second channel ports, the first channel port is connected to the gas purifier through a communicating pipe, and the second channel port is communicated with the third space and faces the second heater;
the second port and the through hole are arranged in a staggered manner.
Optionally, in some embodiments of the present application, the channel structure includes a cavity, the cavity is fixedly connected with the cavity, a fourth space is provided in the cavity, the first channel port is communicated with a side of the fourth space away from the cavity, and the second channel port is communicated with a side of the fourth space close to the cavity.
Optionally, in some embodiments of the present application, a height of the first space is less than or equal to 30 millimeters.
Optionally, in some embodiments of the present application, the heat conducting plate is a soaking plate, and a material of the heat conducting plate includes graphite and graphene.
According to the embodiment of the application, the heat conduction medium is filled in the first space, so that heat of the first heater is uniformly transferred to the heat conduction plate, and the uniformity of heating the solution type material is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the description of the embodiments will be briefly introduced below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural view of a drying device according to an embodiment of the present application;
fig. 2 is a schematic top view of a second heater in the drying device according to the embodiment of the present application;
fig. 3 is a schematic structural diagram of a channel structure in a drying device according to an embodiment of the present application.
Detailed Description
The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all, of the embodiments of the present application. All other embodiments, which can be made by those skilled in the art based on the embodiments herein without making any inventive effort, are intended to be within the scope of the present application. Furthermore, it should be understood that the detailed description is presented herein for purposes of illustration and explanation only and is not intended to limit the present application. In this application, unless otherwise indicated, terms of orientation such as "upper" and "lower" are used to generally refer to the upper and lower positions of the device in actual use or operation, and specifically the orientation of the drawing figures; while "inner" and "outer" are for the outline of the device.
The embodiment of the present application provides a drying apparatus 100, which will be described in detail below. The following description of the embodiments is not intended to limit the preferred embodiments.
Referring to fig. 1, an embodiment of the present application provides a drying apparatus 100, which includes a chamber 11, a first heater 12, a heat conducting plate 13, and a heat conducting medium 14.
The first heater 12 is disposed within the chamber 11. A heat conductive plate 13 is provided on the first heater 12. The heat-conducting plate 13 is used for drying the material to be dried. A first space K1 is provided between the heat conductive plate 13 and the first heater 12. The heat conductive medium 14 is filled in the first space K1.
The embodiment of the application adopts the heat conduction medium 14 filled in the first space K1 so as to uniformly transfer the heat of the first heater 12 to the heat conduction plate 13, thereby improving the uniformity of heating the solution type material.
Optionally, a gap is provided between, for example, the thermally conductive plate 13 and the side wall of the chamber 11.
In this embodiment, the heat conducting medium 14 includes a gas, that is, the heat conducting plate 13 is heated by the heat radiation generated by the first heater 12, so that the heat conducting plate 13 is heated uniformly and is dried uniformly, and the risk of drying traces of the device to be dried is reduced.
In some embodiments, the thermally conductive media 14 may also be a material with soaking effect, such as graphite, graphene, or silica gel.
Optionally, the height H of the first space K1 is less than or equal to 30 mm to ensure the heating effect of the heat radiation. Alternatively, the height H of the first space K1 is between 5 mm and 30 mm, such as 5 mm, 10 mm, 15 mm, 20 mm, 25 mm and 30 mm.
Optionally, the heat conducting plate 13 is a vapor chamber. The material of the heat-conducting plate 13 comprises graphite and/or graphene to improve the soaking effect of the heat-conducting plate 13 and reduce the risk of drying marks on the device to be dried.
In summary, the first heater 12 heats the heat conducting plate 13 through the gas in the first space K1 in a heating manner of heat radiation, so that the heat conducting plate 13 is heated uniformly; in addition, graphite or graphene is adopted as a material of the heat conducting plate 13, so that the soaking effect of the heat conducting plate 13 is further improved, the temperature difference of each point of the device to be dried when heated is ensured to be less than 2 ℃, and the risk of drying marks of the device to be dried is suppressed.
Alternatively, the first heater 12 may be heated by using a resistive wire, and other electric heating methods may be used, which is not limited in this application.
In the present embodiment, the drying device 100 may further include a second heater 15.
The second heater 15 is disposed on a side of the heat conductive plate 13 remote from the first heater 12. A second space K2 is provided between the second heater 15 and the heat conductive plate 13. A third space K3 is provided between the second heater 15 and the side of the chamber 11 remote from the heat-conducting plate 13.
The first space K1, the second space K2, and the third space K3 communicate with each other.
The second heater 15 includes a heating part 151. The heating member 151 is provided with a plurality of through holes 152. The through hole 152 is provided on the circumferential side of the heating member 151. The through hole 152 communicates with the second space K2 and the third space K3.
The second heater 15 is arranged, on one hand, the second space K2 and the third space K3 are communicated through the through hole 152, so that the vaporous solvent far away from the heat conducting plate 13 can be heated again conveniently, the stability of solvent evaporation is improved, namely the risk that the vaporous solvent changes the moving direction due to energy reduction is reduced; on the other hand, when the gas purifier 16 delivers gas to the chamber 11, part of the vapor solvent is blown by the gas to the device to be dried on the heat transfer plate 13, and the second heater 15 can buffer and change the moving direction of the part of the vapor solvent, and reduce the return of the vapor solvent to the solute surface of the device to be dried.
Meanwhile, the second heater 15 may further include an adsorption layer 153, the adsorption layer 153 being disposed at a side of the heating part 151 remote from the heat conductive plate 13. Because the adsorption layer 153 is arranged on the heating component 151, the adsorption layer 153 can adsorb part of the solvent, and the solvent adsorbed by the adsorption layer 153 can be heated by the heating component 151 and then continuously evaporated, so that the risk of solvent backflow of the device to be dried is further reduced.
Optionally, the adsorption layer 153 may also be disposed on a side of the heating part 151 near the heat conducting plate 13, further reducing the risk of solvent backflow to the device to be dried.
Alternatively, the material of the adsorption layer 153 may be an adsorption material such as activated carbon, organic polymer, high-temperature resistant high-polymer adsorption resin or zeolite (VoCs) molecular sieve.
In this embodiment, the drying apparatus 100 may further include a gas purifier 16 and a channel structure 17.
The gas purifier 16 and the channel structure 17 are arranged outside the chamber 11. The gas purifier 16 is connected to the channel structure 17. The channel structure 17 communicates with the interior space of the chamber 11. Specifically, the passage opening of the passage structure 17 is directed toward the second heater 15.
In the present embodiment, the channel structure 17 is provided with a first channel opening 17a and a plurality of second channel openings 17b. The first passage port 17a communicates with a plurality of second passage ports 17b. The first passage port 17a is connected to the gas purifier 16 through a communication pipe 18. The second port 17b communicates with the third space K3 and faces the second heater 15.
The second port 17b and the through hole 152 are arranged in a staggered manner, so that the air flow speed of the corresponding area of the second port 17b is reduced, and the risk of backflow of the vaporous solvent is reduced.
Alternatively, referring to fig. 2, the heating member 151 includes a substrate 1511 and a heating body 1512 disposed within the substrate 1511. The heating body 1512 includes a plurality of main body portions 1521, a first bending portion 1522, and a second bending portion 1523. The plurality of main body portions 1521 are each disposed to extend along the first direction X. The plurality of main body portions 1521 are arranged in a row along the second direction Y. The first direction X intersects the second direction Y. Alternatively, the first direction X is perpendicular to the second direction Y.
The first bending portion 1522 is disposed on one side of the plurality of main body portions 1521, and the second bending portion 1523 is disposed on the other side of the plurality of main body portions 1521. The nth body portion 1521 is connected to the (n+1) th body portion 1521 by a first bending portion 1522. The n+1th main body portion 1521 is connected to the n+2th main body portion 1521 through the second bending portion 1523, n being an odd number.
The heating body 1512 has a round trip structure, and has a uniform heating effect.
For example, when n is 1 to 5, the 1 st main body portion 1521 is connected to the 2 nd main body portion 1521 by the first bending portion 1522; the 3 rd main body portion 1521 is connected to the 4 th main body portion 1521 by a first bending portion 1522; the 5 th main body portion 1521 is connected to the 6 th main body portion 1521 by a first bent portion 1522. The 2 nd main body portion 1521 is connected to the 3 rd main body portion 1521 by a second bending portion 1523; the 4 th main body portion 1521 is connected to the 5 th main body portion 1521 by a second bending portion 1523; the 6 th main body portion 1521 is connected to the 7 th main body portion 1521 by a second bending portion 1523.
Optionally, the first bending portion 1522 and the second bending portion 1523 are semi-circular or V-shaped, but not limited thereto.
The through hole 152 is provided on the peripheral side of the heating body 1512 and penetrates the substrate 1511.
Referring to fig. 1 and 3, the channel structure 17 includes a cavity 171. The cavity 171 is fixedly connected with the chamber 11. A fourth space K4 is provided in the cavity 171. The first passage opening 17a communicates with a side of the fourth space K4 away from the chamber 11, and the second passage opening 17b communicates with a side of the fourth space K4 near the chamber 11. The second port 17b communicates with the inner space of the chamber 11.
Alternatively, the cavity 171 may be a box, or other structure having an interior space.
Alternatively, gas purifier 16 is a nitrogen purifier, but is not limited thereto.
The present embodiment is described by taking a dry display substrate as an example, but is not limited thereto. The drying process of this example is:
the display substrate is placed on the heat conducting plate 13, then the gas purifier 16 is started, part of the gas in the first space K1, the second space K2 and the third space K3 is sucked out by the gas purifier 16, and the pure nitrogen or inert gas with the same volume is discharged into the chamber 11 after the gas is purified. The inert gas may be argon, helium, or the like. This example illustrates the case of nitrogen purging; the steps of pumping, purifying and draining are repeated so that the space within the chamber 11 is in a nitrogen atmosphere at standard atmospheric pressure. The nitrogen atmosphere means that most of the gas in the chamber 11 is nitrogen, and not only nitrogen.
Then, the first heater 12 and the second heater 15 are activated and generate heat, which heats the heat transfer plate 13 in a heat radiation manner. The heat conductive plate 13 uniformly heats the display substrate.
Optionally, the volume of ink in the pixel cells of the display substrate is between 30 picoliters and 70 picoliters. The heating time of the first heater 12 and the second heater 15 is between 10 minutes and 30 minutes, and may be 10 minutes, 20 minutes, and 30 minutes, for example. The heating temperatures of the first heater 12 and the second heater 15 are between 100 degrees celsius and 230 degrees celsius, and may be, for example, 100 degrees celsius, 140 degrees celsius, 180 degrees celsius, 220 degrees celsius, and 230 degrees celsius. It will be appreciated that the higher the heating temperature, the shorter the heating time, and the magnitude of the heating temperature depends on the material properties of the ink and the volume of the ink.
Finally, the solvent of the solution type material in the display substrate is evaporated into the second space K2, and when encountering the second heater 15, is heated by the second heater 15 for the second time, the vapor solvent proceeds to the third space K3 through the through hole 152, and then the vapor solvent is pumped and discharged through the channel structure 17 by the gas purifier 16.
After the vapor solvent is discharged, the gas purifier 16 fills nitrogen into the chamber 11 through the channel structure 17, and at this time, the filled nitrogen promotes part of the vapor solvent to flow back, and part of the flowing back vapor solvent is blocked by the second heater 15; moreover, as the second channel opening 17b and the through hole 152 are arranged in a staggered manner, the air flow speed of the corresponding area of the second channel opening 17b is slowed down, and the risk that the vaporous solvent flows back to the device to be dried is reduced; in addition, the partially reflowed solvent is adsorbed by the adsorption layer 153 and is evaporated again and moves towards the second channel opening 17b under the heating of the second heater 15, so that the gaseous solvent is reduced to return to the solute surface on the device to be dried, and the phenomenon of water stain on the device to be dried is inhibited.
After a set time, the gas purifier 16 again sucks the vaporous solvent in the chamber 11, and then continues to charge nitrogen to maintain the chamber 11 at the standard atmospheric pressure; this is cycled until drying is complete.
Thus, the drying process of the drying apparatus 100 of the present embodiment is completed.
The foregoing has outlined a detailed description of a drying apparatus according to the embodiments of the present application, wherein specific examples are provided herein to illustrate the principles and embodiments of the present application, the above examples being provided only to assist in understanding the method and core ideas of the present application; meanwhile, those skilled in the art will have variations in the specific embodiments and application scope in light of the ideas of the present application, and the present description should not be construed as limiting the present application in view of the above.

Claims (8)

1. A drying apparatus, comprising:
a chamber;
a first heater disposed within the chamber;
the heat conducting plate is arranged on the first heater and used for drying materials to be dried, and a first space is formed between the heat conducting plate and the first heater; and
a heat transfer medium filled in the first space;
the drying device further comprises a second heater, wherein the second heater is arranged on one side, far away from the first heater, of the heat conducting plate, a second space is formed between the second heater and the heat conducting plate, and a third space is formed between the second heater and one side, far away from the heat conducting plate, of the chamber;
the second heater comprises a heating component and an adsorption layer, the adsorption layer is arranged on one side, far away from the heat conducting plate, of the heating component, the heating component is provided with a plurality of through holes, and the through holes are communicated with the second space and the third space;
the second heater is for heating the vaporous solvent when the drying device is in a drying mode.
2. The drying apparatus of claim 1, wherein the thermally conductive medium comprises a gas.
3. The drying apparatus according to claim 1, wherein the adsorption layer is further provided on a side of the heating member adjacent to the heat conductive plate.
4. The drying apparatus according to claim 1, wherein the heating member includes a substrate and a heating body provided in the substrate, the heating body including a plurality of main body portions, a first bending portion, and a second bending portion, the plurality of main body portions each extending along a first direction, the plurality of main body portions being arranged along a second direction, the first direction intersecting the second direction;
the first bending part is arranged on one side of the plurality of main body parts, the second bending part is arranged on the other side of the plurality of main body parts, the nth main body part is connected with the (n+1) th main body part through the first bending part, the (n+1) th main body part is connected with the (n+2) th main body part through the second bending part, and n is an odd number;
the through hole is arranged on the periphery side of the heating body and penetrates through the substrate.
5. The drying apparatus of claim 1, further comprising a gas purifier and a channel structure, the gas purifier and the channel structure being disposed outside the chamber, the gas purifier being connected to the channel structure;
the channel structure is provided with a first channel port and a plurality of second channel ports, the first channel port is communicated with the second channel ports, the first channel port is connected to the gas purifier through a communicating pipe, and the second channel port is communicated with the third space and faces the second heater;
the second port and the through hole are arranged in a staggered manner.
6. The drying apparatus according to claim 5, wherein the channel structure comprises a cavity, the cavity is fixedly connected with the chamber, a fourth space is provided in the cavity, the first channel port is communicated with a side of the fourth space away from the chamber, and the second channel port is communicated with a side of the fourth space close to the chamber.
7. Drying apparatus according to claim 2, wherein the height of the first space is less than or equal to 30 mm.
8. Drying apparatus according to claim 1 wherein the thermally conductive plate is a soaking plate and the material of the thermally conductive plate comprises graphite and/or graphene.
CN202110560158.4A 2021-05-21 2021-05-21 Drying device Active CN115366546B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110560158.4A CN115366546B (en) 2021-05-21 2021-05-21 Drying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110560158.4A CN115366546B (en) 2021-05-21 2021-05-21 Drying device

Publications (2)

Publication Number Publication Date
CN115366546A CN115366546A (en) 2022-11-22
CN115366546B true CN115366546B (en) 2024-03-29

Family

ID=84059381

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110560158.4A Active CN115366546B (en) 2021-05-21 2021-05-21 Drying device

Country Status (1)

Country Link
CN (1) CN115366546B (en)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05277323A (en) * 1992-04-01 1993-10-26 Kobe Steel Ltd Heat-insulated vessel
JP2000091186A (en) * 1998-09-07 2000-03-31 Dainippon Screen Mfg Co Ltd Substrate processing device
KR200387358Y1 (en) * 2005-03-10 2005-06-17 배민현 Dryer with electric heat pipe
CN104051674A (en) * 2013-03-14 2014-09-17 东京毅力科创株式会社 Dehydration device and dehydration treatment method
CN105727579A (en) * 2016-01-28 2016-07-06 苏州鼎烯聚材纳米科技有限公司 Low-cost high-efficiency supercritical spray drying method and equipment for slurry
CN110323161A (en) * 2018-03-30 2019-10-11 芝浦机械电子株式会社 Organic membrane formation device and organic film manufacturing method
CN210156432U (en) * 2019-09-05 2020-03-17 广东聚华印刷显示技术有限公司 Decompression drying device
CN110931658A (en) * 2019-11-14 2020-03-27 Tcl华星光电技术有限公司 Vacuum drying device
CN211000538U (en) * 2019-09-11 2020-07-14 广东聚华印刷显示技术有限公司 Substrate baking equipment
CN111987241A (en) * 2019-05-21 2020-11-24 东京毅力科创株式会社 Decompression drying device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5044931B2 (en) * 2005-10-31 2012-10-10 東京エレクトロン株式会社 Gas supply apparatus and substrate processing apparatus
US10242890B2 (en) * 2011-08-08 2019-03-26 Applied Materials, Inc. Substrate support with heater
JP5941589B1 (en) * 2015-09-14 2016-06-29 株式会社日立国際電気 Substrate processing apparatus, semiconductor device manufacturing method, program, and recording medium

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05277323A (en) * 1992-04-01 1993-10-26 Kobe Steel Ltd Heat-insulated vessel
JP2000091186A (en) * 1998-09-07 2000-03-31 Dainippon Screen Mfg Co Ltd Substrate processing device
KR200387358Y1 (en) * 2005-03-10 2005-06-17 배민현 Dryer with electric heat pipe
CN104051674A (en) * 2013-03-14 2014-09-17 东京毅力科创株式会社 Dehydration device and dehydration treatment method
CN105727579A (en) * 2016-01-28 2016-07-06 苏州鼎烯聚材纳米科技有限公司 Low-cost high-efficiency supercritical spray drying method and equipment for slurry
CN110323161A (en) * 2018-03-30 2019-10-11 芝浦机械电子株式会社 Organic membrane formation device and organic film manufacturing method
CN111987241A (en) * 2019-05-21 2020-11-24 东京毅力科创株式会社 Decompression drying device
CN210156432U (en) * 2019-09-05 2020-03-17 广东聚华印刷显示技术有限公司 Decompression drying device
CN211000538U (en) * 2019-09-11 2020-07-14 广东聚华印刷显示技术有限公司 Substrate baking equipment
CN110931658A (en) * 2019-11-14 2020-03-27 Tcl华星光电技术有限公司 Vacuum drying device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
包装印刷中部分技术难题的成因与应对措施;刘家聚;湖南包装;20031230(第04期);全文 *

Also Published As

Publication number Publication date
CN115366546A (en) 2022-11-22

Similar Documents

Publication Publication Date Title
KR101193169B1 (en) Apparatus and method for drying electrode plate
WO2021108127A1 (en) Method for a continuous wood modification by heating
CN115366546B (en) Drying device
CN107098603B (en) Activation method of built-in getter of vacuum glass
JP2002195755A5 (en)
CN1902021A (en) Reflow furnace and hot-air blowing-type heater
CN106704145A (en) Low-temperature pump system with regenerating function
CN110931658B (en) Vacuum drying device
US20130081300A1 (en) Vacuum cycling drying
CN114061348A (en) Vapor chamber and preparation method thereof
CN201158074Y (en) Superhigh-temperature lumber vacuum charing apparatus
CN206457419U (en) A kind of carbon carbon composite process equipment and system
US20210403327A1 (en) Heating furnace and production method for graphite
CN212619764U (en) Novel quick-drying type dripping frame
CN210740982U (en) Glass fiber preheating oven
CN221944863U (en) Sample adsorption device for vacuum tube furnace and vacuum tube furnace thereof
CN101775581B (en) Hot processing chamber
KR102614590B1 (en) High specific surface area activated carbon based on chemically-stabilized biomass and its manufacturing method
CN214398117U (en) Graphite spare storage device
CN109594057A (en) A kind of RF superconducting cavity ultrahigh vacuum heat-treatment furnace
CN204752846U (en) Growth carbon nanotube's plasma vapour deposition system
KR20200100483A (en) Reduced-pressure drying apparatus
CN205662585U (en) Small -size aura ion mould treatment facility
CN217560391U (en) Tail gas backflow dehumidification system utilizing waste heat
CN211204992U (en) Array silicon carbide heating device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant