CN115341196A - Reaction cavity door cover assembly and coating equipment - Google Patents
Reaction cavity door cover assembly and coating equipment Download PDFInfo
- Publication number
- CN115341196A CN115341196A CN202211009529.0A CN202211009529A CN115341196A CN 115341196 A CN115341196 A CN 115341196A CN 202211009529 A CN202211009529 A CN 202211009529A CN 115341196 A CN115341196 A CN 115341196A
- Authority
- CN
- China
- Prior art keywords
- hole
- plate
- reaction chamber
- cover body
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 64
- 239000011248 coating agent Substances 0.000 title abstract description 7
- 238000000576 coating method Methods 0.000 title abstract description 7
- 238000005507 spraying Methods 0.000 claims abstract description 31
- 239000007921 spray Substances 0.000 claims abstract description 16
- 238000007789 sealing Methods 0.000 claims description 13
- 238000009413 insulation Methods 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims 1
- 238000000231 atomic layer deposition Methods 0.000 description 7
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The application relates to the technical field of mechanical equipment, and provides a reaction cavity door cover assembly and coating equipment. The reaction cavity door cover assembly comprises a cover body, a spraying plate and a connecting shaft. The cover body is provided with a through hole. The connecting shaft is used for assembling the spray plate. One end of the connecting shaft is provided with a fixing part. The connecting shaft is detachably fixed on the cover body through the through hole, and can be detached from one side of the cover body back to the spraying plate by utilizing the through hole, so that the detachment of the spraying plate is simplified.
Description
Technical Field
The application relates to the technical field of mechanical equipment, in particular to a reaction cavity door cover assembly and coating equipment.
Background
In the door cover of the existing Atomic Layer Deposition (ALD) reaction cavity, a connecting shaft is arranged on a closed door, and a spraying plate is arranged on the connecting shaft. When the spray plate is disassembled and assembled, the sealing door needs to be taken down firstly, and then the spray plate works from one side, so that the disassembly is complex.
Disclosure of Invention
In view of this, the technical problem that the present application mainly solves is to provide a reaction chamber door cover assembly and a coating apparatus, which can simplify the disassembly of the spray plate.
In order to solve the technical problem, the application adopts a technical scheme that: a door cover assembly of a reaction cavity comprises a cover body, a spraying plate and a connecting shaft. The cover body is provided with a through hole. The connecting shaft is used for assembling the spray plate. One end of the connecting shaft is provided with a fixing part. The connecting shaft is detachably fixed on the cover body through the through hole, and can be detached from one side of the cover body back to the spraying plate by utilizing the through hole.
In some embodiments of the present application, the reaction chamber door assembly includes a fastener. The fixing piece penetrates through the through hole from one side of the cover body back to the spraying plate and is connected with the fixing portion of the connecting shaft so as to fix the connecting shaft on the cover body.
In some embodiments of the present application, the fixation portion is a cylindrical boss.
In some embodiments of the present application, the fixing member is a bolt. The end face of the fixing part facing to one end of the cover body is provided with a threaded hole.
In some embodiments of the present application, the number of the through holes is four, and the through holes are uniformly distributed on the cover body.
In some embodiments of the present application, a groove is disposed in a through hole region of one side of the cover body, which faces away from the spray plate, and the through hole is located at the bottom of the groove. The reaction cavity door cover component comprises a cover plate, and the cover plate is used for covering the groove.
In some embodiments of the present application, the reaction chamber door assembly comprises a seal. A seal is disposed about the lid rim.
In some embodiments of the present application, the sealing member is a plurality of sealing members, and the sealing members surround the through hole and are disposed in the groove.
In some embodiments of the present application, the shower plate has a slide hole. The connecting shaft penetrates through the sliding hole and is in sliding connection with the spraying plate. The reaction chamber door cover assembly comprises an elastic piece. The elastic piece is arranged between the cover body and the spraying plate.
In some embodiments of the present application, the reaction chamber door assembly comprises an insulating panel. The heat insulation plate is provided with an avoiding hole, the connecting shaft penetrates through the avoiding hole, and the heat insulation plate is arranged between the spraying plate and the cover body.
In order to solve the technical problem, one technical scheme adopted by the application is to provide a coating device, which comprises a reaction cavity door cover assembly and a shell in any one of the embodiments. One end of the housing has an opening. The cover body can selectively close the opening of the shell, and the spraying plate is positioned on the inner side of the opening.
The beneficial effect of this application is: the reaction cavity door cover assembly comprises a cover body, a spraying plate and a connecting shaft. The cover body is provided with a through hole. The connecting shaft is used for assembling the spray plate. One end of the connecting shaft is provided with a fixing part. The connecting shaft can be detachably fixed on one side of the cover body through the through hole, and can be detached from one side of the cover body back to the spraying plate by utilizing the through hole. This application need not to take off the lid earlier, can directly dismantle to spraying board one side from the lid back of the body, has simplified the dismantlement flow to spraying the board.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts. Wherein:
FIG. 1 is a front view of one embodiment of a reaction chamber door assembly of the present application;
FIG. 2 is a left side view of one embodiment of the reaction chamber door assembly of the present application.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying figures are described in detail below. It is to be understood that the specific embodiments described herein are merely illustrative of the application and are not limiting of the application. It should be further noted that, for the convenience of description, only some of the structures related to the present application are shown in the drawings, not all of the structures. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application without making any creative effort belong to the protection scope of the present application.
Please refer to fig. 1 and fig. 2. FIG. 1 is a front view of an embodiment of a reaction chamber door assembly of the present application, and FIG. 2 is a left side view of an embodiment of a reaction chamber door assembly of the present application.
In some embodiments, the reaction chamber door assembly includes a cover body 10, a shower plate 20, and a connecting shaft 30. The cover 10 is provided with a through hole 11. The link shaft 30 is used to assemble the shower plate 20. One end of the connecting shaft 30 is provided with a fixing portion 45. The connecting shaft 30 is detachably fixed to the cover 10 through the through hole 11, and can be detached from the side of the cover 10 opposite to the shower plate 20 by the through hole 11.
In some embodiments, the product is processed in the reaction chamber, and the cover 10 is used to close the reaction chamber, so that the reaction chamber forms a closed space. The shower plate 20 has shower holes. After the spraying plate 20 is communicated with the gas pipeline, the gas in the gas pipeline is uniformly input into the reaction cavity through the spraying holes.
The shape and size of the through hole 11 can be set according to actual conditions. Illustratively, the through-hole 11 is a circular hole.
In some embodiments, the connection shaft 30 is directly inserted into the through hole 11 and fixed with the cover 10. Illustratively, the fixing portion 45 of the connecting shaft 30 and the through hole 11 have threads that are engaged with each other. The fixing portion 45 of the connecting shaft 30 is fixed to the lid 10 by rotation. The other end of the connecting shaft 30 is fixed to the shower plate 20 so that the shower plate 20 is fixed to the cover body 10. The end face of the fixing portion 45 opposite to the end of the spraying plate 20 is provided with a hexagonal socket, so that a user can unscrew the fixing portion 45 through the through hole 11 on the side of the cover body 10 opposite to the spraying plate 20, and the connecting shaft 30 is separated from the cover body 10.
In some embodiments, the reaction chamber door assembly includes a fixture 40. The fixing member 40 passes through the through hole 11 from a side of the cover body 10 facing away from the shower plate 20 and is coupled with the fixing portion 45 of the coupling shaft 30 to fix the coupling shaft 30 to the cover body 10.
Illustratively, the fixing member 40 may be a screw. When the connecting shaft 30 is connected to the shower plate 20 and the shower plate 20 is placed on one side of the cover 10, the fixing member 40 passes through the through hole 11 from the other side of the cover 10 and is connected to the fixing portion 45. The cross-shaped groove is formed in the end face of the fixing piece 40, which is opposite to one end of the spray plate 20, so that a user can unscrew the fixing piece 40 through the through hole 11 on one side of the cover body 10, which is opposite to the spray plate 20, so that the connecting shaft 30 is separated from the cover body 10, and the spray plate 20 is separated from the cover body 10.
In some embodiments, the fixation portion 45 is a cylindrical boss. Illustratively, the radius of the cylindrical boss is greater than the radius of the connecting shaft 30. The contact area between the fixing portion 45 and the cover 10 is larger, so that the connection between the connecting shaft 30 and the cover 10 is more stable.
In some embodiments, the fasteners 40 are bolts. A screw hole 46 is provided in an end surface of the fixing portion 45 facing the lid 10. In some embodiments, the fixing portion 45 has a plurality of threaded holes 46, and the threaded holes 46 have the same size and are uniformly distributed on the fixing portion 45. The number and size of the threaded holes 46 can be set according to practical situations, for example, the weight of the shower plate 20 is larger, and the number and size of the threaded holes 46 can be increased to ensure that the connection shaft 30 and the cover body 10 are more firmly connected. The threads on the bolt mate with the threads on the fixing portion 45. In some embodiments, five threaded holes 46 are provided on the fixing portion 45. One of the threaded holes 46 is coaxial with the connecting shaft 30, and the diameter of this threaded hole 46 is larger than the remaining four threaded holes 46. The remaining four threaded holes 46 have the same diameter and uniformly surround the threaded hole 46 having the largest diameter. The different sized threaded holes 46 correspond to different sized fasteners 40, respectively. The four smaller fixing members 40 are inserted into the through holes 11 to be engaged with the four smaller threaded holes 46, and the connection shaft 30 and the cover body 10 are more stably connected by assisting the largest threaded hole 46 and the largest fixing member 40.
In some embodiments, the number of the through holes 11 is four, and the through holes are uniformly distributed on the cover 10. Illustratively, the number of connecting shafts 30 is also four. One connecting shaft 30 is provided corresponding to each through hole 11 to allow the shower plate 20 to be better fixed to the cover body 10. The number of the connecting shafts 30 is the same as the number of the through holes 11. The number of through holes 11 may also be five, six, etc. The more the number of the connecting shafts 30 is, the less the weight borne by a single connecting shaft 30 is, the less the connecting shaft 30 is bent and broken, and the more stably the shower plate 20 can be fixed on the cover 10.
In some embodiments, the through hole 11 region on the side of the cover 10 facing away from the shower plate 20 is provided with a groove 12, and the through hole 11 is located at the bottom of the groove 12. The reaction chamber door assembly includes a cover plate 80, and the cover plate 80 is used to cover the recess 12.
In some embodiments, the cover plate 80 is the same size as the recess 12 in order to further enhance the aesthetic appearance of the reaction chamber door assembly. The cover plate 80 covers the through-hole 11 completely while covering the recess 12. After the cover plate 80 covers the through hole 11, the door cover assembly of the reaction chamber is further improved, and the gas in the reaction chamber is prevented from flowing out through the through hole 11. In some embodiments, the cover plate 80 is fixedly connected to the cover 10 by screws.
In some embodiments, the reaction chamber door assembly includes a seal 50. The sealing member 50 is disposed around the edge of the cap body 10. In some embodiments, an Atomic Layer Deposition (ALD) reaction is performed in the reaction chamber to coat the product. The atomic layer deposition reaction is realized by separately introducing more than two chemical gas precursors into the reaction chamber, so that each precursor can generate fully saturated surface chemical reaction on the surface of the substrate. The atomic layer deposition reaction can plate substances on the surface of a substrate in a monoatomic film form, and the thickness and uniformity of the deposited thin film are accurately controlled within the atomic layer thickness range. To prevent the gas in the reaction chamber from overflowing, a sealing member 50 is disposed around the edge of the cover 10 to improve the sealing performance of the cover 10 for closing the opening of the reaction chamber. The seal 50 may be a rubber seal.
In some embodiments, the sealing member 50 is plural, and the sealing member 50 surrounds the through hole 11 and is disposed in the groove 12. Illustratively, there are five seals 50. Wherein four seals 50 are arranged in the four recesses 12 and surround the through hole 11. When the cover plate 80 covers the groove 12, the cover plate 80 cooperates with the sealing element 50 to seal the through hole 11, so as to prevent the gas in the reaction chamber from overflowing through the through hole 11. Another sealing member 50 is provided at the edge of the cover to improve the sealing property of the cover 10 for closing the opening of the reaction chamber.
In some embodiments, shower plate 20 has slide holes. The connecting shaft 30 passes through the sliding hole and is slidably connected with the shower plate 20. The reaction chamber door assembly includes a resilient member 60. The elastic member 60 is disposed between the cover 10 and the shower plate 20. Illustratively, the resilient member 60 is a spring.
In some embodiments, a shower plate 20 is used to close the opening of the reaction chamber. Specifically, the reaction chamber has an outer chamber and an inner chamber. The outer cavity and the inner cavity are provided with openings, and the openings are positioned on the same side. When the cover 10 closes the outer cavity opening, the shower plate 20 closes the inner cavity opening. The connecting shaft 30 adjusts the distance between the shower plate 20 and the cover body 10 by sliding. After the lid 10 is closed, the interval between 20 and the lid 10 of spraying diminishes, and the elastic component 60 extrusion between 20 and the lid 10 of spraying sprays board 20 for it is inseparabler that the opening terminal surface laminating of inner chamber body is sprayed board 20, the sealed effect of guarantee.
In some embodiments, the connection shaft 30 has elasticity, and the elastic member 60 is disposed between the cover 10 and the shower plate 20. When the cover 10 is closed, the connecting shaft 30 is contracted, and the distance between the cover 10 and the shower plate 20 is shortened. The elastic member 60 presses the shower plate 20, so that the shower plate 20 is more closely attached to the opening end surface of the inner cavity.
In some embodiments, the reaction chamber has a carrier on which the product is placed. When the reaction chamber is closed by the cover 10, the spraying holes of the spraying plate 20 output gas to the carrier, and the flowing direction of the gas is parallel to the product.
In some embodiments, the reaction chamber door assembly includes an insulating panel 70. The heat insulation plate 70 has an escape hole through which the connection shaft 30 passes, and the heat insulation plate 70 is disposed between the spray plate 20 and the cover body 10. In some embodiments, the atomic layer deposition reaction occurring within the reaction chamber requires a predetermined temperature to be reached. Therefore, the heating element heats the reaction cavity. In order to prevent the heat of the reaction chamber from being transferred to the cover 10 and causing a user to be scalded, a heat insulation plate 70 is disposed between the spray plate 20 and the cover 10 to block the heat from being transferred to the cover plate 80. Of course, the heat insulation plate 70 may be fixed to the connection shaft 30 by other structures and disposed between the cover body 10 and the shower plate 20.
In some embodiments, the fixing member 40, the connecting shaft 30 and the elastic member 60 are made of high temperature resistant materials so as to fix the shower plate 20 to the cover 10 at high temperature.
In order to solve the technical problem, one technical scheme adopted by the application is to provide a coating device, which comprises a reaction cavity door cover assembly and a shell in any one of the embodiments. One end of the housing has an opening. The cover 10 selectively closes the opening of the case, and the shower plate 20 is located inside the opening.
In some embodiments, the product enters through an opening in the housing and reacts within the housing. The cover 10 closes the opening of the case to seal the case. After the product is finished, the cover 10 is opened again to take out the product. When different products are processed and different spray plates 20 need to be replaced, a user can detach the cover body 10 from the side opposite to the spray plates 20 by using the through holes 11. Specifically, the user may remove the cover plate 80 and unscrew the bolts. Since the shower plate 20 is heavy, the shower plate 20 can be taken out of the cover 10 by using a hoisting method.
The above description is only for the purpose of illustrating embodiments of the present application and is not intended to limit the scope of the present application, and all modifications of equivalent structures and equivalent processes, which are made by the contents of the specification and the drawings of the present application or are directly or indirectly applied to other related technical fields, are also included in the scope of the present application.
Claims (11)
1. A reaction chamber door cover assembly, comprising:
the cover body is provided with a through hole;
a spray plate;
the connecting shaft is used for assembling the spraying plate, a fixing part is arranged at one end of the connecting shaft, the connecting shaft is detachably fixed on the cover body through the through hole, and the cover body can be back to the spraying plate by utilizing the through hole to be detached.
2. The reaction chamber door assembly of claim 1, comprising:
the fixing piece penetrates through the through hole from one side of the cover body back to the spraying plate and is connected with the fixing part of the connecting shaft so as to fix the connecting shaft on the cover body.
3. The reaction chamber door assembly of claim 2,
the fixing part is a cylindrical boss.
4. The reaction chamber door assembly of claim 3,
the fixing piece is a bolt;
the fixing part faces to one end face of the cover body and is provided with a threaded hole.
5. The reaction chamber door assembly of claim 4,
the number of the through holes is four, and the through holes are uniformly distributed on the cover body.
6. The reaction chamber door assembly of claim 1,
a groove is arranged in the through hole area on one side of the cover body, back to the spraying plate, and the through hole is positioned at the bottom of the groove;
the reaction cavity door cover assembly comprises a cover plate, and the cover plate is used for covering the groove.
7. The reaction chamber door assembly of claim 6, comprising:
a seal disposed around the lid rim.
8. The reaction chamber door assembly of claim 7,
the sealing elements are multiple and surround the through hole and are arranged in the groove.
9. The reaction chamber door assembly of claim 1,
the spraying plate is provided with a sliding hole, and the connecting shaft penetrates through the sliding hole and is in sliding connection with the spraying plate;
the reaction chamber door assembly includes:
the elastic piece is arranged between the cover body and the spraying plate.
10. The reaction chamber door assembly of claim 1, comprising:
the heat insulation plate is provided with an avoiding hole, the connecting shaft penetrates through the avoiding hole, and the heat insulation plate is arranged between the spraying plate and the cover body.
11. A plating apparatus, characterized by comprising:
the reaction chamber door assembly of any one of claims 1 to 10;
the shower plate comprises a shell, wherein one end of the shell is provided with an opening, the cover body can selectively close the opening of the shell, and the shower plate is positioned on the inner side of the opening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211009529.0A CN115341196A (en) | 2022-08-22 | 2022-08-22 | Reaction cavity door cover assembly and coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211009529.0A CN115341196A (en) | 2022-08-22 | 2022-08-22 | Reaction cavity door cover assembly and coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115341196A true CN115341196A (en) | 2022-11-15 |
Family
ID=83954953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211009529.0A Pending CN115341196A (en) | 2022-08-22 | 2022-08-22 | Reaction cavity door cover assembly and coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115341196A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116162922A (en) * | 2023-04-23 | 2023-05-26 | 江苏微导纳米科技股份有限公司 | Processing chamber, substrate processing method and processing device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000256857A (en) * | 1999-03-05 | 2000-09-19 | Sony Corp | Jig for loading/unloading gas manifold |
| JP2011258895A (en) * | 2010-06-11 | 2011-12-22 | Shin Etsu Handotai Co Ltd | Epitaxial growth system and method of manufacturing epitaxial wafer |
| CN105925960A (en) * | 2016-06-07 | 2016-09-07 | 江苏微导纳米装备科技有限公司 | Atomic layer deposition-based vacuum coating device for solar cell production |
| CN109023306A (en) * | 2018-09-30 | 2018-12-18 | 无锡松煜科技有限公司 | Apparatus for atomic layer deposition |
| CN211734467U (en) * | 2020-03-09 | 2020-10-23 | 江苏迈纳德微纳技术有限公司 | Capacitively coupled plasma atomic layer deposition reaction cavity |
| CN215288961U (en) * | 2021-05-26 | 2021-12-24 | 晶澳太阳能有限公司 | Inner cavity sealing device of atomic layer deposition equipment |
| US20220134362A1 (en) * | 2020-11-02 | 2022-05-05 | Changxin Memory Technologies, Inc. | Detaching and installing device for gas distribution plate of etching machine, and etching machine |
-
2022
- 2022-08-22 CN CN202211009529.0A patent/CN115341196A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000256857A (en) * | 1999-03-05 | 2000-09-19 | Sony Corp | Jig for loading/unloading gas manifold |
| JP2011258895A (en) * | 2010-06-11 | 2011-12-22 | Shin Etsu Handotai Co Ltd | Epitaxial growth system and method of manufacturing epitaxial wafer |
| CN105925960A (en) * | 2016-06-07 | 2016-09-07 | 江苏微导纳米装备科技有限公司 | Atomic layer deposition-based vacuum coating device for solar cell production |
| CN109023306A (en) * | 2018-09-30 | 2018-12-18 | 无锡松煜科技有限公司 | Apparatus for atomic layer deposition |
| CN211734467U (en) * | 2020-03-09 | 2020-10-23 | 江苏迈纳德微纳技术有限公司 | Capacitively coupled plasma atomic layer deposition reaction cavity |
| US20220134362A1 (en) * | 2020-11-02 | 2022-05-05 | Changxin Memory Technologies, Inc. | Detaching and installing device for gas distribution plate of etching machine, and etching machine |
| CN215288961U (en) * | 2021-05-26 | 2021-12-24 | 晶澳太阳能有限公司 | Inner cavity sealing device of atomic layer deposition equipment |
Non-Patent Citations (1)
| Title |
|---|
| 胡铁明 主编: "《高层建筑施工》", 30 June 2020, 武汉理工大学出版社, pages: 173 - 175 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116162922A (en) * | 2023-04-23 | 2023-05-26 | 江苏微导纳米科技股份有限公司 | Processing chamber, substrate processing method and processing device |
| CN116162922B (en) * | 2023-04-23 | 2023-09-22 | 江苏微导纳米科技股份有限公司 | Processing chamber, substrate processing method and processing device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN115341196A (en) | Reaction cavity door cover assembly and coating equipment | |
| JP6994502B2 (en) | Plasma screen for plasma processing chamber | |
| JP2008274437A5 (en) | ||
| US8448598B2 (en) | Coating device | |
| TWI693296B (en) | Atomic layer growth device | |
| WO2015043300A1 (en) | Dielectric filter and method of assembling same | |
| CN103903946A (en) | Gas spray head used for plasma reactor | |
| KR102376367B1 (en) | Substrate carrier that carries a substrate on each of two broad sides of the substrate carrier that face away from each other | |
| CN115341195A (en) | Film coating equipment | |
| KR20220050046A (en) | Fastening structure, plasma processing device and fastening method | |
| CN114134486B (en) | Uniform gas structure of reaction cavity | |
| JP2015017330A (en) | Barrel device for plating | |
| CN100554505C (en) | Gas-phase deposition system and method | |
| KR20070036844A (en) | Plasma enhanced chemical vapor deposition chamber for the fabrication of semiconductor and liquid crystal display panel | |
| JP2012200061A (en) | Method for fabricating watertight case, watertight case and on-vehicle electronic apparatus | |
| KR100463452B1 (en) | Door structure of drum washer and landry dryer | |
| KR200457336Y1 (en) | Showerhead unit for atomic layer deposition apparatus | |
| CN209818745U (en) | Waterproof sealing structure of electropneumatic valve positioner | |
| CN220352221U (en) | Connecting assembly for novel modularized PVD sputtering equipment | |
| CN220926930U (en) | Material box assembly for coating equipment and sublimation device | |
| KR20030077803A (en) | Gas distribution plate in semiconductor manufacturing apparatus | |
| CN108121093B (en) | Pressure regulating device and spraying cutter | |
| CN218146913U (en) | Clamping type sputtering target material | |
| US20230187181A1 (en) | Plasma-enhanced thin-film-deposition equipment | |
| CN216256548U (en) | Cup cover and cup |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: No. 27 Changjiang South Road, Xinwu District, Wuxi City, Jiangsu Province, China Applicant after: Jiangsu micro nano technology Co.,Ltd. Address before: 214000 No. 11 Lijiang Road, Xinwu District, Wuxi City, Jiangsu Province Applicant before: Jiangsu micro nano technology Co.,Ltd. |