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CN115213568A - A composite laser processing system and processing method - Google Patents

A composite laser processing system and processing method Download PDF

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CN115213568A
CN115213568A CN202110347126.6A CN202110347126A CN115213568A CN 115213568 A CN115213568 A CN 115213568A CN 202110347126 A CN202110347126 A CN 202110347126A CN 115213568 A CN115213568 A CN 115213568A
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workpiece
laser
processing
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laser processing
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张文武
张天润
赵文凌
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Ningbo Iii Lasers Technology Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

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Abstract

本发明公开了一种复合激光加工系统及加工方法,属于激光加工技术领域,能够解决现有的激光加工系统难以同时满足加工效率、加工精度和加工质量的综合要求的问题。所述系统包括:检测单元用于检测工件的定位特征点,获取工件的空间位置信息;高功率激光加工单元用于利用高功率激光按照第一预设轨迹切割工件;短脉冲激光加工单元用于利用短脉冲激光按照第二预设轨迹加工和修整工件;运动单元用于调整高功率激光加工单元和短脉冲激光加工单元的加工位置和加工角度;供气单元用于向高功率激光加工单元提供高压辅助气体;控制单元用于根据工件的加工信息和空间位置信息生成控制信息;并根据控制信息控制各单元工作。本发明用于工件的激光加工。

Figure 202110347126

The invention discloses a composite laser processing system and a processing method, belonging to the technical field of laser processing, and can solve the problem that the existing laser processing system is difficult to satisfy the comprehensive requirements of processing efficiency, processing accuracy and processing quality at the same time. The system includes: a detection unit is used to detect the positioning feature points of the workpiece and obtain the spatial position information of the workpiece; a high-power laser processing unit is used to cut the workpiece according to a first preset trajectory by using a high-power laser; the short-pulse laser processing unit is used to The short-pulse laser is used to process and trim the workpiece according to the second preset trajectory; the motion unit is used to adjust the processing position and processing angle of the high-power laser processing unit and the short-pulse laser processing unit; the air supply unit is used to provide the high-power laser processing unit. High-pressure auxiliary gas; the control unit is used to generate control information according to the processing information and spatial position information of the workpiece; and control the work of each unit according to the control information. The present invention is used for laser processing of workpieces.

Figure 202110347126

Description

一种复合激光加工系统及加工方法A composite laser processing system and processing method

技术领域technical field

本发明涉及一种复合激光加工系统及加工方法,属于激光加工技术领域。The invention relates to a composite laser processing system and a processing method, belonging to the technical field of laser processing.

背景技术Background technique

激光切割利用高功率密度激光照射工件,使材料迅速熔化、汽化或烧蚀,一般借助与光束同轴的高速气体,实现工件切割。激光切割一般使用大功率激光器,已经广泛用于各类板材的切割,尤其是金属。随着激光器功率的增加,适宜切割的工件厚度从10mm以内已经扩展到30~100mm,切割速度高,切缝锥度小。虽然可以将连续运行的激光器变为微秒到毫秒脉冲宽度的激光器,但由于这类激光加工所产生的热影响区及厚度方向上分辨率不足等问题,使其不适用于三维精密加工。三维精密加工需要在X、Y、Z方向上均达到100μm之内的分辨率,甚至于<10μm分辨率。Laser cutting uses a high-power density laser to irradiate the workpiece to rapidly melt, vaporize or ablate the material. Generally, the workpiece is cut with the help of high-speed gas coaxial with the beam. Laser cutting generally uses high-power lasers, which have been widely used in the cutting of various types of plates, especially metals. With the increase of laser power, the thickness of workpiece suitable for cutting has expanded from less than 10mm to 30-100mm, with high cutting speed and small slit taper. Although it is possible to turn a continuously operating laser into a laser with a pulse width of microseconds to milliseconds, the heat-affected zone and insufficient resolution in the thickness direction caused by such laser processing make it unsuitable for 3D precision machining. Three-dimensional precision machining requires resolution within 100 μm in X, Y, and Z directions, or even <10 μm resolution.

另一方面,现有激光精密加工所用激光器一般是短脉冲(<1μS)激光器,包括纳秒激光器、皮秒激光器、飞秒激光器等。该类激光器具有高亮度、小热影响等优点,一般配合高速扫描系统,实现复杂图形加工的同时还可避免热累积效应,已被应用于陶瓷、金属、复合材料等众多材料的精密加工上,包括打孔、表面微织构制备、激光刻蚀、微槽制备、三维雕刻、清洗等。虽然短脉冲激光器可以加工精密结构,加工分辨率高,热影响小,适宜于薄层材料加工,但加工大深度结构时,加工效率随深度增加下降严重,锥度问题需要特殊处理。On the other hand, the lasers used in the existing laser precision machining are generally short-pulse (<1 μS) lasers, including nanosecond lasers, picosecond lasers, femtosecond lasers, and the like. This type of laser has the advantages of high brightness and small thermal impact. Generally, it is combined with a high-speed scanning system to achieve complex graphics processing while avoiding the heat accumulation effect. It has been used in the precision processing of ceramics, metals, composite materials and many other materials. Including punching, surface microtexture preparation, laser etching, microgroove preparation, three-dimensional engraving, cleaning, etc. Although short-pulse lasers can process precise structures with high processing resolution and small thermal effects, they are suitable for thin-layer material processing, but when processing large-depth structures, the processing efficiency decreases seriously with the increase of depth, and the taper problem requires special treatment.

在加工领域,常常既要对工件进行快速切除,又要对工件进行局部精密加工。此外,一些加工部件由多种材料组成,如含脆性材料零件的金属部件。目前解决这类问题往往要用不同的机床,多次装夹定位工件,这对加工效率和加工精度造成了不利影响。现有的激光加工系统很难同时满足加工效率、加工精度和加工质量的综合要求。In the field of machining, it is often necessary to perform both rapid cutting of the workpiece and local precision machining of the workpiece. In addition, some machined parts are composed of multiple materials, such as metal parts containing brittle material parts. At present, to solve such problems, different machine tools are often used to clamp and position the workpiece multiple times, which adversely affects the processing efficiency and processing accuracy. It is difficult for the existing laser processing systems to meet the comprehensive requirements of processing efficiency, processing accuracy and processing quality at the same time.

发明内容SUMMARY OF THE INVENTION

本发明提供了一种复合激光加工系统及加工方法,能够解决现有的激光加工系统难以同时满足加工效率、加工精度和加工质量的综合要求的问题。The invention provides a composite laser processing system and a processing method, which can solve the problem that the existing laser processing system is difficult to satisfy the comprehensive requirements of processing efficiency, processing precision and processing quality at the same time.

一方面,本发明提供了一种复合激光加工系统,所述系统包括:控制单元,以及与所述控制单元均连接的检测单元、高功率激光加工单元、短脉冲激光加工单元、运动单元和供气单元;所述检测单元用于检测所述工件的定位特征点,获取所述工件的空间位置信息;所述高功率激光加工单元用于利用高功率激光按照第一预设轨迹切割工件;所述短脉冲激光加工单元用于利用短脉冲激光按照第二预设轨迹加工和修整所述工件;所述运动单元用于调整所述高功率激光加工单元和所述短脉冲激光加工单元的加工位置和加工角度;所述供气单元用于向所述高功率激光加工单元提供高压辅助气体,以吹走所述工件切缝内的熔渣,并冷却所述高功率激光加工单元;所述控制单元用于根据所述工件的加工信息和所述空间位置信息生成控制信息;并根据所述控制信息控制所述高功率激光加工单元、所述短脉冲激光加工单元、所述运动单元和所述供气单元进行工作。In one aspect, the present invention provides a compound laser processing system, the system comprising: a control unit, and a detection unit, a high-power laser processing unit, a short-pulse laser processing unit, a motion unit, and a supply unit all connected to the control unit. air unit; the detection unit is used to detect the positioning feature points of the workpiece, and obtain the spatial position information of the workpiece; the high-power laser processing unit is used to use the high-power laser to cut the workpiece according to the first preset trajectory; the The short-pulse laser processing unit is used for processing and trimming the workpiece according to the second preset trajectory by using the short-pulse laser; the motion unit is used for adjusting the processing positions of the high-power laser processing unit and the short-pulse laser processing unit and processing angle; the gas supply unit is used to provide high-pressure auxiliary gas to the high-power laser processing unit to blow away the slag in the workpiece slit and cool the high-power laser processing unit; the control The unit is configured to generate control information according to the processing information of the workpiece and the spatial position information; and control the high-power laser processing unit, the short-pulse laser processing unit, the motion unit and the The air supply unit works.

可选的,所述高功率激光加工单元包括高功率激光器、第一光学传输结构和激光切割头;所述高功率激光器用于发射高功率激光;所述第一光学传输结构用于将所述高功率激光传输至所述激光切割头中;所述激光切割头用于利用所述高功率激光按照第一预设轨迹切割工件。Optionally, the high-power laser processing unit includes a high-power laser, a first optical transmission structure, and a laser cutting head; the high-power laser is used to emit high-power laser light; the first optical transmission structure is used to The high-power laser is transmitted to the laser cutting head; the laser cutting head is used for cutting the workpiece according to the first preset trajectory by using the high-power laser.

可选的,所述第一光学传输结构为光纤或光管。Optionally, the first optical transmission structure is an optical fiber or a light pipe.

可选的,所述高功率激光器为光纤激光器、CO2激光器和固体激光器中的任意一种。Optionally, the high-power laser is any one of a fiber laser, a CO 2 laser, and a solid-state laser.

可选的,所述短脉冲激光加工单元包括短脉冲激光器、第二光学传输结构和光学扫描结构;所述短脉冲激光器用于发射短脉冲激光;所述第二光学传输结构用于将所述短脉冲激光传输至所述光学扫描结构中;所述光学扫描结构用于利用所述短脉冲激光按照第二预设轨迹对工件进行高速扫描,以加工和修整所述工件。Optionally, the short-pulse laser processing unit includes a short-pulse laser, a second optical transmission structure, and an optical scanning structure; the short-pulse laser is used for emitting short-pulse laser light; the second optical transmission structure is used for The short-pulse laser is transmitted to the optical scanning structure; the optical scanning structure is used to scan the workpiece at high speed according to the second preset trajectory by using the short-pulse laser, so as to process and trim the workpiece.

可选的,所述短脉冲激光器为光纤激光器或固体激光器。Optionally, the short-pulse laser is a fiber laser or a solid-state laser.

可选的,所述短脉冲激光器为纳秒激光器、皮秒激光器和飞秒激光器中的任意一种。Optionally, the short pulse laser is any one of a nanosecond laser, a picosecond laser and a femtosecond laser.

可选的,所述第二光学传输结构为光纤、光管和反射镜片中的任意一种。Optionally, the second optical transmission structure is any one of an optical fiber, a light pipe and a reflective mirror.

可选的,所述光学扫描结构为扫描振镜或基于光学器件旋转的旋光类扫描结构。Optionally, the optical scanning structure is a scanning galvanometer or an optical rotation scanning structure based on the rotation of an optical device.

可选的,所述检测单元包括成像结构和测距结构;所述成像结构用于对所述工件进行图像识别,检测所述工件的定位特征点,获取所述工件的位置数据;所述测距结构用于采集所述激光切割头、所述光学扫描结构分别与所述工件的实时加工高度;所述工件的位置数据和所述工件的实时加工高度构成所述工件的空间位置信息。Optionally, the detection unit includes an imaging structure and a ranging structure; the imaging structure is used to perform image recognition on the workpiece, detect the positioning feature points of the workpiece, and obtain position data of the workpiece; the measurement The distance structure is used to collect the real-time processing heights of the laser cutting head, the optical scanning structure and the workpiece respectively; the position data of the workpiece and the real-time processing height of the workpiece constitute the spatial position information of the workpiece.

可选的,所述成像结构为CCD图像传感器。Optionally, the imaging structure is a CCD image sensor.

可选的,所述测距结构为超声波测距传感器、激光测距传感器和电磁感应传感器中的任意一种。Optionally, the ranging structure is any one of an ultrasonic ranging sensor, a laser ranging sensor and an electromagnetic induction sensor.

可选的,所述运动单元包括底座、两条水平导轨、动力摆头、横梁、两条竖直导轨、切割头安装座和扫描结构安装座和驱动电机;两条所述水平导轨设置在所述底座上表面的两侧;所述动力摆头安装在所述底座的上表面上、且位于两条所述水平导轨之间,用于装夹所述工件,并带动所述工件在两个自由度上任意摆动;所述横梁横跨连接在两条所述水平导轨上;两条所述竖直导轨均连接在所述横梁上;所述切割头安装座和所述扫描结构安装座分别连接在两条所述竖直导轨上;所述切割头安装座用于放置所述激光切割头,所述扫描结构安装座用于放置所述光学扫描结构;所述驱动电机用于驱动所述动力摆头、所述切割头安装座和所述扫描结构安装座运动。Optionally, the motion unit includes a base, two horizontal guide rails, a power swing head, a beam, two vertical guide rails, a cutting head mounting seat, a scanning structure mounting seat, and a drive motor; the two horizontal guide rails are arranged at the Both sides of the upper surface of the base; the power swing head is installed on the upper surface of the base and located between the two horizontal guide rails, used to clamp the workpiece and drive the workpiece to move between the two horizontal guide rails. swing freely in the degree of freedom; the beam is connected across the two horizontal guide rails; the two vertical guide rails are both connected on the beam; the cutting head mounting seat and the scanning structure mounting seat are respectively connected on the two vertical guide rails; the cutting head mounting seat is used for placing the laser cutting head, the scanning structure mounting seat is used for placing the optical scanning structure; the driving motor is used for driving the The power swing head, the cutting head mount and the scan structure mount move.

可选的,所述系统还包括除尘单元,所述除尘单元用于收集所述工件加工后的废气、烟尘或废渣。Optionally, the system further includes a dedusting unit, and the dedusting unit is used to collect waste gas, smoke or waste residue after the workpiece is processed.

另一方面,本发明提供了一种应用于上述任一种所述的复合激光加工系统的复合激光加工方法,所述方法包括:S1、装夹工件,将原始工件模型输入至控制单元中;S2、检测工件,选取工件的定位特征点,根据所述定位特征点,调整原始工件坐标成为新的工件坐标,并根据新的工件坐标生成加工文件;S3、根据所述加工文件,用高功率激光对工件进行切割加工;S4、根据所述加工文件,用短脉冲激光对工件进行精密加工,并对工件高功率激光加工区进行精密修整;S5、检测工件,若满足加工要求,则完成加工;若不满足加工要求,则重复执行S2到S5,直至满足加工要求,完成加工。In another aspect, the present invention provides a composite laser processing method applied to any of the above-mentioned composite laser processing systems, the method comprising: S1, clamping a workpiece, and inputting an original workpiece model into a control unit; S2, detect the workpiece, select the positioning feature points of the workpiece, adjust the original workpiece coordinates to become new workpiece coordinates according to the positioning feature points, and generate a processing file according to the new workpiece coordinates; S3, according to the processing file, use high power Laser cutting and processing the workpiece; S4. According to the processing document, the workpiece is precisely processed with a short-pulse laser, and the high-power laser processing area of the workpiece is precisely trimmed; S5. The workpiece is detected, and if the processing requirements are met, the processing is completed. ; If the processing requirements are not met, repeat S2 to S5 until the processing requirements are met and the processing is completed.

可选的,所述精密加工为表面清洗、微织构加工、三维加工和打孔加工中的任意一种。Optionally, the precision machining is any one of surface cleaning, microtexturing, three-dimensional machining, and punching.

可选的,所述步骤S2具体为:在工件上设置3个或3个以上的定位特征点;通过成像结构和测距结构,进行工件高度和曲面法线的测量,并将测量的信息传输至控制单元;控制单元根据所测的定位特征点,对比工件CAD模型的定位特征点,将原始工件CAD模型中的坐标调整为工件在当前机床坐标系下的实际坐标,再根据调整后的工件坐标生成新的加工文件。Optionally, the step S2 is specifically as follows: setting three or more positioning feature points on the workpiece; measuring the height of the workpiece and the surface normal through the imaging structure and the ranging structure, and transmitting the measured information. To the control unit; the control unit compares the positioning feature points of the workpiece CAD model according to the measured positioning feature points, adjusts the coordinates in the original workpiece CAD model to the actual coordinates of the workpiece in the current machine tool coordinate system, and then adjusts the coordinates of the workpiece according to the adjusted workpiece. The coordinates generate a new machining file.

可选的,所述步骤S3具体为:根据所生成的新的加工文件,调整高功率激光加工的加工参数;打开高功率激光器和供气单元,分别提供高功率激光和高压辅助气体,对工件沿第一预设轨迹进行激光加工,并把工件快速切穿。Optionally, the step S3 is specifically: adjusting the processing parameters of the high-power laser processing according to the generated new processing file; turning on the high-power laser and the gas supply unit, respectively providing the high-power laser and the high-pressure auxiliary gas, to the workpiece. Laser processing is performed along the first preset trajectory, and the workpiece is quickly cut through.

可选的,所述步骤S4具体为:根据所生成的新的加工文件,针对不同材料调整短脉冲激光加工的加工参数;打开短脉冲激光器,控制光学扫描结构完成工件的精密加工,并对工件高功率激光加工区进行精密修整。Optionally, the step S4 is specifically as follows: according to the generated new processing file, adjusting the processing parameters of the short-pulse laser processing for different materials; turning on the short-pulse laser, controlling the optical scanning structure to complete the precision processing of the workpiece, and monitoring the workpiece. High-power laser processing area for precision trimming.

本发明能产生的有益效果包括:The beneficial effects that the present invention can produce include:

本发明提供的复合激光加工系统,使用高功率激光器,在气体防护下,首先对工件进行快速切割;然后利用短脉冲激光器和同一个精密运动系统下的光学扫描结构,在智能控制系统辅助下,对工件进行精密加工;进一步地,提供两者交互加工同一区域,以大功率切割保障切割效率,以短脉冲激光修边提高切缝质量。两种激光加工方式相互配合,从而完成工件加工效率、加工厚度和加工质量的综合性要求。与现有技术相比,本发明将传统高功率激光加工工艺和精密激光加工工艺进行有机复合,控制系统兼顾两种工艺,具备深度融合特征,而非简单的叠加组织。正因为有了两种激光加工工艺的融合,才有效地解决了工件在同一系统、一次装夹下,可以高效率完成多厚度异型材料综合性加工等工程问题。The compound laser processing system provided by the present invention uses a high-power laser, and under the protection of gas, the workpiece is firstly cut rapidly; then the short-pulse laser and the optical scanning structure under the same precise motion system are used, and under the assistance of the intelligent control system, Precise machining of the workpiece; further, provide the two to process the same area interactively, ensure the cutting efficiency with high-power cutting, and improve the quality of the kerf with short-pulse laser trimming. The two laser processing methods cooperate with each other to meet the comprehensive requirements of workpiece processing efficiency, processing thickness and processing quality. Compared with the prior art, the present invention organically combines the traditional high-power laser processing technology and the precision laser processing technology, and the control system takes into account the two processes, and has the characteristics of deep fusion, rather than a simple superimposed organization. It is precisely because of the fusion of the two laser processing technologies that the engineering problems such as the comprehensive processing of multi-thickness special-shaped materials can be efficiently completed under the same system and one clamping of the workpiece.

附图说明Description of drawings

图1为本发明实施例提供的复合激光加工系统结构框图;1 is a structural block diagram of a compound laser processing system provided by an embodiment of the present invention;

图2为本发明实施例提供的复合激光加工方法流程图;2 is a flowchart of a composite laser processing method provided by an embodiment of the present invention;

图3为本发明实施例提供的复合激光加工系统结构示意图;3 is a schematic structural diagram of a composite laser processing system provided by an embodiment of the present invention;

图4为本发明实施例提供的复合激光加工系统加工实施例1的工件展示图;FIG. 4 is a display diagram of a workpiece processed by the compound laser processing system provided in an embodiment of the present invention in Embodiment 1;

图5为本发明实施例提供的复合激光加工系统加工实施例2的工件展示图;FIG. 5 is a display diagram of a workpiece processed by the compound laser processing system provided in an embodiment of the present invention in Embodiment 2;

图6为本发明实施例提供的复合激光加工系统加工实施例3的工件展示图。FIG. 6 is a display diagram of a workpiece processed by the compound laser processing system provided in the embodiment of the present invention in Embodiment 3. FIG.

部件和附图标记列表:List of parts and reference numbers:

1、控制单元;2、检测单元;3、高功率激光加工单元;4、高功率激光器;5、第一光学传输结构;6、激光切割头;7、供气单元;8、运动单元;9、短脉冲激光器;10、第二光学传输结构;11、光学扫描结构;12、工件;13、除尘单元;14、短脉冲激光加工单元;15、底座;16、横梁;17、竖直导轨;18、动力摆头;19、第一线缆;20、第二线缆;21、第一气管;22、第二气管。1. Control unit; 2. Detection unit; 3. High-power laser processing unit; 4. High-power laser; 5. First optical transmission structure; 6. Laser cutting head; 7. Air supply unit; 8. Movement unit; 9 10, the second optical transmission structure; 11, the optical scanning structure; 12, the workpiece; 13, the dust removal unit; 14, the short pulse laser processing unit; 15, the base; 16, the beam; 17, the vertical guide rail; 18. Power swing head; 19. First cable; 20. Second cable; 21. First trachea; 22. Second trachea.

具体实施方式Detailed ways

下面结合实施例详述本发明,但本发明并不局限于这些实施例。The present invention will be described in detail below with reference to the examples, but the present invention is not limited to these examples.

本发明实施例提供了一种复合激光加工系统,如图1至图6所示,所述系统包括:控制单元1,以及与控制单元1均连接的检测单元2、高功率激光加工单元3、短脉冲激光加工单元14、运动单元8和供气单元7;检测单元2用于检测工件12的定位特征点,获取工件12的空间位置信息;高功率激光加工单元3用于利用高功率激光按照第一预设轨迹切割工件12;短脉冲激光加工单元14用于利用短脉冲激光按照第二预设轨迹加工和修整工件12;运动单元8用于调整高功率激光加工单元3和短脉冲激光加工单元14的加工位置和加工角度;供气单元7用于向高功率激光加工单元3提供高压辅助气体,以吹走工件12切缝内的熔渣,并冷却高功率激光加工单元3;控制单元1用于根据工件12的加工信息和空间位置信息生成控制信息;并根据控制信息控制高功率激光加工单元3、短脉冲激光加工单元14、运动单元8和供气单元7进行工作。An embodiment of the present invention provides a compound laser processing system, as shown in FIG. 1 to FIG. 6 , the system includes: a control unit 1, a detection unit 2 connected to the control unit 1, a high-power laser processing unit 3, The short-pulse laser processing unit 14, the motion unit 8 and the gas supply unit 7; the detection unit 2 is used to detect the positioning feature points of the workpiece 12 and obtain the spatial position information of the workpiece 12; the high-power laser processing unit 3 is used to use the high-power laser The first preset trajectory cuts the workpiece 12; the short-pulse laser processing unit 14 is used to process and trim the workpiece 12 according to the second preset trajectory using the short-pulse laser; the motion unit 8 is used to adjust the high-power laser processing unit 3 and the short-pulse laser processing. The processing position and processing angle of the unit 14; the gas supply unit 7 is used to provide high-pressure auxiliary gas to the high-power laser processing unit 3 to blow away the slag in the slit of the workpiece 12 and cool the high-power laser processing unit 3; Control unit 1 is used to generate control information according to the processing information and spatial position information of the workpiece 12; and control the high-power laser processing unit 3, the short-pulse laser processing unit 14, the motion unit 8 and the gas supply unit 7 to work according to the control information.

具体的,高功率激光加工单元3包括高功率激光器4、第一光学传输结构5和激光切割头6;高功率激光器4用于发射高功率激光;第一光学传输结构5用于将高功率激光传输至激光切割头6中;激光切割头6用于利用高功率激光按照第一预设轨迹切割工件12;优选的,第一光学传输结构5为光纤或光管。Specifically, the high-power laser processing unit 3 includes a high-power laser 4, a first optical transmission structure 5 and a laser cutting head 6; the high-power laser 4 is used to emit high-power laser light; the first optical transmission structure 5 is used to transmit the high-power laser It is transmitted to the laser cutting head 6; the laser cutting head 6 is used for cutting the workpiece 12 according to the first preset trajectory using a high-power laser; preferably, the first optical transmission structure 5 is an optical fiber or a light pipe.

高功率激光器4适用于快速切割多种厚度工件12,优选为高功率高品质千瓦级及千瓦以上级别的激光器,包括但不限于光纤激光器、CO2激光器、固体激光器等,尤其优选便于柔性传输的光纤激光器。The high-power laser 4 is suitable for rapidly cutting workpieces 12 with various thicknesses, preferably high-power and high-quality kilowatt-level and above-kilowatt-level lasers, including but not limited to fiber lasers, CO 2 lasers, solid-state lasers, etc., especially preferably for flexible transmission. fiber-optic laser.

第一光学传输结构5位于高功率激光器4与激光切割头6之间,用于将高功率激光传输至激光切割头6中,包括但不限于光纤、光管。The first optical transmission structure 5 is located between the high-power laser 4 and the laser cutting head 6, and is used to transmit the high-power laser to the laser cutting head 6, including but not limited to optical fibers and light pipes.

激光切割头6连接在运动单元8的切割头安装座上。The laser cutting head 6 is connected to the cutting head mounting seat of the motion unit 8 .

进一步的,短脉冲激光加工单元14包括短脉冲激光器9、第二光学传输结构10和光学扫描结构11;短脉冲激光器9用于发射短脉冲激光;第二光学传输结构10用于将短脉冲激光传输至光学扫描结构11中;光学扫描结构11用于利用短脉冲激光按照第二预设轨迹对工件12进行高速扫描,以精密加工和精密修整工件12,以提高切缝质量。其中,精密加工包括但不限于表面清洗、微织构加工、三维加工、打孔加工等精细加工。短脉冲激光器9包括但不限于光纤激光器、固体激光器等;激光器脉宽<1μS,包括但不限于纳秒激光器、皮秒激光器、飞秒激光器等。Further, the short-pulse laser processing unit 14 includes a short-pulse laser 9, a second optical transmission structure 10 and an optical scanning structure 11; the short-pulse laser 9 is used to emit short-pulse laser light; the second optical transmission structure 10 is used to transmit the short-pulse laser light. It is transmitted to the optical scanning structure 11; the optical scanning structure 11 is used to scan the workpiece 12 at high speed according to the second preset trajectory by using a short pulse laser, so as to precisely process and precisely trim the workpiece 12 to improve the quality of the kerf. Among them, precision machining includes but is not limited to surface cleaning, micro-texturing, three-dimensional machining, drilling and other fine machining. The short-pulse laser 9 includes, but is not limited to, fiber lasers, solid-state lasers, etc.; laser pulse width <1 μS, including but not limited to nanosecond lasers, picosecond lasers, femtosecond lasers, and the like.

第二光学传输结构10位于短脉冲激光器9与光学扫描结构11之间,用于将短脉冲激光传输至光学扫描结构11中,包括但不限于光纤、光管、反射镜片。The second optical transmission structure 10 is located between the short-pulse laser 9 and the optical scanning structure 11, and is used for transmitting the short-pulse laser to the optical scanning structure 11, including but not limited to optical fibers, light pipes, and mirrors.

光学扫描结构11放置在运动单元8的扫描结构安装座上,用于实现短脉冲激光的高速扫描,包括但不限于各类基于振镜的高速扫描及基于光学器件旋转的旋光类高速扫描,优选地使用扫描振镜,包括但不限于两轴、三轴扫描振镜,用于控制激光在X、Y两个方向运动或控制激光在X、Y、Z三个方向运动。扫描速度一般>100mm/s,优选地>1000mm/s,更优选地>10m/s。The optical scanning structure 11 is placed on the scanning structure mounting seat of the motion unit 8, and is used to realize high-speed scanning of short-pulse lasers, including but not limited to various types of high-speed scanning based on galvanometers and high-speed scanning based on optical device rotation. Scanning galvanometers, including but not limited to two-axis and three-axis scanning galvanometers, are used to control the movement of the laser in the two directions of X and Y or control the movement of the laser in the three directions of X, Y and Z. The scanning speed is generally > 100 mm/s, preferably > 1000 mm/s, more preferably > 10 m/s.

控制单元1是工控计算机、嵌入式工控系统或通过网络联通的远程控制系统,用于控制完成复合激光加工系统快速加工工件12,分别与检测单元2、高功率激光器4、供气单元7、运动单元8、短脉冲激光器9、光学扫描结构11、除尘单元13电连接,用于控制检测单元2、高功率激光器4、辅助气体的供气单元7、运动单元8、短脉冲激光器9、光学扫描结构11、除尘单元13按照预定的控制信息进行工作,互相之间协调配合完成复合激光加工系统快速加工工件12。The control unit 1 is an industrial control computer, an embedded industrial control system or a remote control system connected through a network, which is used to control and complete the rapid processing of the workpiece 12 by the composite laser processing system, and is respectively connected with the detection unit 2, the high-power laser 4, the gas supply unit 7, and the motion. Unit 8, short pulse laser 9, optical scanning structure 11, and dust removal unit 13 are electrically connected to control detection unit 2, high-power laser 4, auxiliary gas supply unit 7, motion unit 8, short pulse laser 9, optical scanning Structure 11 and the dust removal unit 13 work according to the predetermined control information, and coordinate and cooperate with each other to complete the rapid processing of the workpiece 12 by the composite laser processing system.

检测单元2用于检测工件12的定位特征点,自动获取工件12空间位置信息,将采集到的工件12空间位置信息传输至控制单元1。检测单元2至少包括成像结构、测距结构,与激光切割头6和光学扫描结构11就近连接。成像结构用于对工件12进行图像识别,检测工件12的定位特征点,获取工件12的位置数据;测距结构用于采集激光切割头6、光学扫描结构11分别与工件12的实时加工高度;工件12的位置数据和工件12的实时加工高度构成工件12的空间位置信息;成像结构优选为CCD图像传感器,用以进行图像识别,对工件12进行对边及定位。定位包括自动定位或者人工定位。测距结构包括但不限于使用超声波测距传感器、激光测距传感器、电磁感应传感器等。The detection unit 2 is used for detecting the positioning feature points of the workpiece 12 , automatically acquiring the spatial position information of the workpiece 12 , and transmitting the collected spatial position information of the workpiece 12 to the control unit 1 . The detection unit 2 at least includes an imaging structure and a distance measuring structure, and is connected with the laser cutting head 6 and the optical scanning structure 11 in close proximity. The imaging structure is used to perform image recognition on the workpiece 12, detect the positioning feature points of the workpiece 12, and obtain the position data of the workpiece 12; the ranging structure is used to collect the real-time processing heights of the laser cutting head 6, the optical scanning structure 11 and the workpiece 12 respectively; The position data of the workpiece 12 and the real-time machining height of the workpiece 12 constitute the spatial position information of the workpiece 12 ; the imaging structure is preferably a CCD image sensor for image recognition, edge alignment and positioning of the workpiece 12 . The positioning includes automatic positioning or manual positioning. The ranging structure includes, but is not limited to, the use of ultrasonic ranging sensors, laser ranging sensors, electromagnetic induction sensors, and the like.

辅助气体的供气单元7用于产生高压辅助气体,产生的高压辅助气体输入至激光切割头6中,用于吹走切缝里的熔渣,冷却聚焦透镜,防止烟尘进入透镜座内。辅助气体的使用一般要根据工件12材料来选取。The auxiliary gas supply unit 7 is used to generate high-pressure auxiliary gas, and the generated high-pressure auxiliary gas is input into the laser cutting head 6 to blow away the slag in the slit, cool the focusing lens, and prevent smoke and dust from entering the lens holder. The use of the auxiliary gas is generally selected according to the material of the workpiece 12 .

运动单元8用于根据控制单元1的控制信息,调节激光切割头6的运动位置和加工角度,实现对工件12的精确加工。运动单元8包括二轴、三轴及三轴以上的加工系统。The movement unit 8 is used to adjust the movement position and processing angle of the laser cutting head 6 according to the control information of the control unit 1 , so as to realize the precise processing of the workpiece 12 . The motion unit 8 includes two-axis, three-axis and more than three-axis processing systems.

参考图3所示,运动单元8由运动轴和驱动电机等组成,包括水平导轨、横梁16、竖直导轨17、动力摆头18、切割头安装座、扫描结构安装座、底座15等。优选地,上述结构形成龙门式结构,在多轴电机带动下,与激光切割头6和光学扫描结构11相配合,完成复合激光加工系统快速加工工件12。龙门式结构的水平导轨设有两个,平行放置在底座15上表面的两侧;横梁16横跨在两个水平导轨的顶部;竖直导轨17连接在横梁16之上;切割头安装座和扫描结构安装座分别连接在竖直导轨17上;切割头安装座用于放置激光切割头6;扫描结构安装座用于放置光学扫描结构11;动力摆头18安装在底座15上表面,位于两个水平导轨的中间;动力摆头18用于装夹工件12,可以带动工件12完成A、C两个自由度的任意摆动,从而实现复合激光加工系统快速加工工件12。Referring to FIG. 3 , the motion unit 8 is composed of a motion shaft and a driving motor, including a horizontal guide rail, a beam 16 , a vertical guide rail 17 , a power swing head 18 , a cutting head mounting seat, a scanning structure mounting seat, a base 15 and the like. Preferably, the above structure forms a gantry-type structure, which is driven by a multi-axis motor and cooperates with the laser cutting head 6 and the optical scanning structure 11 to complete the rapid processing of the workpiece 12 by the composite laser processing system. There are two horizontal guide rails of the gantry structure, which are placed in parallel on both sides of the upper surface of the base 15; the cross beam 16 spans the top of the two horizontal guide rails; the vertical guide rail 17 is connected on the cross beam 16; the cutting head mounting seat and The scanning structure mounting bases are respectively connected to the vertical guide rails 17; the cutting head mounting bases are used to place the laser cutting head 6; the scanning structure mounting bases are used to place the optical scanning structure 11; The power swing head 18 is used to clamp the workpiece 12, and can drive the workpiece 12 to complete any swing of the two degrees of freedom A and C, thereby realizing the rapid processing of the workpiece 12 by the composite laser processing system.

竖直导轨17设有两条,分别连接在横梁16的前后两面上,横梁16前面的竖直导轨17用于放置激光切割头6,横梁16后面的竖直导轨17用于放置光学扫描结构11。There are two vertical guide rails 17, which are respectively connected to the front and rear surfaces of the beam 16. The vertical guide rail 17 in front of the beam 16 is used for placing the laser cutting head 6, and the vertical guide rail 17 behind the beam 16 is used for placing the optical scanning structure 11. .

为保护环境和操作人员的身体健康,除尘单元13用于收集工件12加工后的废气、烟尘、废渣等。In order to protect the environment and the health of operators, the dust removal unit 13 is used to collect waste gas, smoke, waste residue and the like after the workpiece 12 is processed.

参考图2所示,本发明另一实施例提供一种应用于上述任一种的复合激光加工系统的复合激光加工方法,所述方法包括:Referring to FIG. 2 , another embodiment of the present invention provides a composite laser processing method applied to any of the above-mentioned composite laser processing systems, and the method includes:

S1、装夹工件12,将原始工件模型输入至控制单元1中;S1, clamping the workpiece 12, and inputting the original workpiece model into the control unit 1;

S2、检测工件12,选取工件12的定位特征点,根据定位特征点,调整原始工件坐标成为新的工件坐标,并根据新的工件坐标生成加工文件;S2, detect the workpiece 12, select the positioning feature points of the workpiece 12, adjust the original workpiece coordinates to become new workpiece coordinates according to the positioning feature points, and generate a processing file according to the new workpiece coordinates;

S3、根据加工文件,用高功率激光对工件12进行切割加工;S3. According to the processing document, use a high-power laser to cut the workpiece 12;

S4、根据加工文件,用短脉冲激光对工件12进行精密加工,并对工件12高功率激光加工区进行精密修整;S4. According to the processing document, the short-pulse laser is used to precisely process the workpiece 12, and the high-power laser processing area of the workpiece 12 is precisely trimmed;

S5、检测工件12,若满足加工要求,则完成加工;若不满足加工要求,则重复执行S2到S5,直至满足加工要求,完成加工。S5. Detect the workpiece 12. If the processing requirements are met, the processing is completed; if the processing requirements are not met, S2 to S5 are repeatedly executed until the processing requirements are met, and the processing is completed.

本发明针对多厚度异型材料工件12复合激光加工的具体方法如下:The specific method of the present invention for the composite laser processing of the multi-thickness special-shaped material workpiece 12 is as follows:

步骤1:将工件12装夹在底座15的动力摆头18上,然后将工件12原始CAD模型输入到控制单元1中。Step 1: Clamp the workpiece 12 on the power swing head 18 of the base 15 , and then input the original CAD model of the workpiece 12 into the control unit 1 .

步骤2:在工件12上设置3个或三个以上的定位特征点,通过CCD图像传感器和测距传感器,对工件12进行高度和曲面法线的测量,并将测量信息通过第一线缆19传输至控制单元1中。根据所测的定位特征点,对比工件12CAD模型的定位特征点,将原始工件12CAD模型中的坐标调整为工件12在当前机床坐标系下的实际坐标,再根据调整后的工件坐标,生成新的加工文件。Step 2: Set 3 or more positioning feature points on the workpiece 12, measure the height and surface normal of the workpiece 12 through the CCD image sensor and the distance measuring sensor, and pass the measurement information through the first cable 19 to the control unit 1. According to the measured positioning feature points, compare the positioning feature points of the workpiece 12 CAD model, adjust the coordinates in the original workpiece 12 CAD model to the actual coordinates of the workpiece 12 in the current machine tool coordinate system, and then generate a new workpiece according to the adjusted workpiece coordinates. processing files.

步骤3:根据步骤2中生成的加工文件,调整高功率激光加工的加工参数,打开高功率激光器4和供气单元7,分别给高功率激光加工提供高功率激光和辅助气体。高功率激光通过第一光学传输结构5输入至激光切割头6中;辅助气体通过第一气管21和/或第二气管22输入至激光切割头6中,对工件12沿第一预设轨迹进行激光加工,并把工件12快速切穿。Step 3: According to the processing file generated in Step 2, adjust the processing parameters of high-power laser processing, turn on high-power laser 4 and gas supply unit 7, and provide high-power laser and auxiliary gas for high-power laser processing respectively. The high-power laser is input into the laser cutting head 6 through the first optical transmission structure 5; the auxiliary gas is input into the laser cutting head 6 through the first gas pipe 21 and/or the second gas pipe 22, and the workpiece 12 is carried out along the first preset track. Laser processing, and the workpiece 12 is quickly cut through.

步骤4:根据步骤2中生成的加工文件,针对不同材料调整短脉冲激光加工的加工参数,打开短脉冲激光器9,控制光学扫描结构11完成工件12的精密加工,同时也可以利用短脉冲激光对工件12高功率激光加工区进行精密修整,以进一步提升切缝质量,或对切缝施加三维精密结构,如一定角度的倒角等等。Step 4: According to the processing file generated in Step 2, adjust the processing parameters of the short-pulse laser processing for different materials, turn on the short-pulse laser 9, and control the optical scanning structure 11 to complete the precision processing of the workpiece 12. The high-power laser processing area of the workpiece 12 is precisely trimmed to further improve the quality of the kerf, or to apply a three-dimensional precision structure to the kerf, such as chamfering at a certain angle and so on.

步骤5:在工件12加工完成之后,利用检测单元2将检测到的工件12实时加工信息通过第二线缆20传输至控制单元1中,与原始零件CAD模型进行比较,若满足加工要求,则完成加工;若不满足加工要求,则重复步骤2到步骤5,直至完成加工。Step 5: After the workpiece 12 is processed, use the detection unit 2 to transmit the detected real-time processing information of the workpiece 12 to the control unit 1 through the second cable 20, and compare it with the CAD model of the original part. If the processing requirements are met, then Complete the processing; if the processing requirements are not met, repeat steps 2 to 5 until the processing is completed.

实施例一:Example 1:

参见图4,图4是复合激光加工系统加工实施例1工件12的展示图。该工件12的中间部位有一条穿透工件12的切缝,切缝的上部设计有一排类似于梅花图形的凹槽,凹槽的底部与凹槽侧壁形成一定锥度。用传统激光切割虽然可以快速地将工件12切穿,但加工工件12表面的梅花凹槽时,容易对凹槽侧壁造成热损伤,影响加工质量。现有的精密激光加工虽然可以精密加工出工件12表面的梅花凹槽,但对于梅花凹槽下部的大厚度激光切割,很难高效完成。利用本发明的复合激光加工系统加工诸如此类的零件,则可以很好地解决问题。在同一系统下,只需经过一次装夹,就可以满足该零件快速切穿和精密加工梅花凹槽的加工要求,不仅提高了加工效率,而且也可以更好地保证加工精度和材料完整性。Referring to FIG. 4 , FIG. 4 is a display diagram of the workpiece 12 processed by the compound laser processing system in the first embodiment. The middle part of the workpiece 12 has a slit penetrating the workpiece 12, the upper part of the slit is designed with a row of grooves similar to plum blossoms, and the bottom of the groove and the side wall of the groove form a certain taper. Although traditional laser cutting can cut through the workpiece 12 quickly, when machining the quincunx groove on the surface of the workpiece 12, it is easy to cause thermal damage to the side wall of the groove, which affects the processing quality. Although the existing precision laser processing can precisely machine the quincunx grooves on the surface of the workpiece 12 , it is difficult to efficiently complete the laser cutting of the large thickness at the lower part of the quincunx grooves. Using the composite laser processing system of the present invention to process such parts can well solve the problem. Under the same system, it only needs one clamping to meet the processing requirements of rapid cutting through and precision machining of plum blossom grooves, which not only improves the processing efficiency, but also better guarantees the processing accuracy and material integrity.

实施例二:Embodiment 2:

参见图5,图5是复合激光加工系统加工实施例2工件12。传统激光切割大厚度(>2mm)材料时,可以高速切穿,但是在切割很薄的材料时,容易引起工件12热变形,降低加工质量。在热敏感材料,如陶瓷材料、复合材料材料时,传统激光切割工艺不再适宜。故此,为了避免热变形或控制各类损伤,适宜使用精密激光加工来切割0.5mm以内或者更薄的材料。图5工件12是一个多厚度板件,板件的厚度由0.3mm~30mm不等。传统方法加工这种多厚度板件时,常常需要分别使用传统激光切割工艺和精密激光加工工艺,多次装夹定位,不仅加工效率低、加工成本高、加工步骤繁琐,经济性不佳。使用本发明的复合激光加工系统,可以有效地解决多厚度材料切割问题。本发明根据工件12CAD信息,控制软件给出统一的加工程序,将工件12一次性装夹到位,协调利用高功率激光器4对大厚度部位进行激光切割,用短脉冲激光器9配合高速光学扫描单元快速地对超薄部位进行激光切割或其他工件12部位进行三维加工,同时也可以利用短脉冲激光对之前高功率激光加工区进行精密修整,从而提高加工质量。如此,一次装夹,高效率高质量完成多厚度、多材料部件的高端加工。Referring to FIG. 5 , FIG. 5 shows the workpiece 12 of Example 2 processed by the compound laser processing system. When the traditional laser cuts a large thickness (>2mm) material, it can cut through at a high speed, but when cutting a very thin material, it is easy to cause thermal deformation of the workpiece 12 and reduce the processing quality. For heat-sensitive materials, such as ceramic materials and composite materials, the traditional laser cutting process is no longer suitable. Therefore, in order to avoid thermal deformation or control various damages, it is suitable to use precision laser processing to cut materials within 0.5mm or thinner. The workpiece 12 in FIG. 5 is a multi-thickness plate, and the thickness of the plate varies from 0.3 mm to 30 mm. When processing such multi-thickness plates by traditional methods, it is often necessary to use traditional laser cutting technology and precision laser processing technology, respectively, and multiple clamping and positioning, which not only has low processing efficiency, high processing cost, cumbersome processing steps, and poor economy. Using the composite laser processing system of the present invention can effectively solve the problem of multi-thickness material cutting. According to the CAD information of the workpiece 12, the control software provides a unified processing program, the workpiece 12 is clamped in place at one time, the high-power laser 4 is used in coordination to perform laser cutting on the large-thickness part, and the short-pulse laser 9 is used in conjunction with the high-speed optical scanning unit to quickly Laser cutting of ultra-thin parts or three-dimensional processing of other workpiece parts can also be performed, and at the same time, short-pulse laser can be used to precisely trim the previous high-power laser processing area, thereby improving the processing quality. In this way, high-end machining of multi-thickness and multi-material components can be completed with high efficiency and high quality in one clamping.

实施例三:Embodiment three:

参见图6,图6是复合激光加工系统加工实施例3部件的展示图。由图6可知,该部件是一个箱体结构,箱体材料为不锈钢。该箱体的厚度在1.5mm~80mm不等,箱体的上部有一个斜面,斜面上开有凹槽和矩形切口,凹槽处嵌入一块材质为SiC的长方体,长方体上需要相对箱体结构,精确加工倒角为45°的盲孔和倒角为30°的通孔。常规方法,此类部件加工时需要将不同材质的零件分步加工完成,再进行装配,工序繁杂。使用本发明,则可以将SiC长方体事先安装在箱体凹槽处,再统一进行箱体的切口和SiC长方体的原位精密定位打孔,以保证SiC长方体上孔相对部件其它部位的定位精度。利用本发明加工这类部件,既满足加工要求,同时也保证了孔的相对定位精度,提高了加工效率。Referring to FIG. 6 , FIG. 6 is a display diagram of the components of Example 3 processed by the composite laser processing system. It can be seen from Figure 6 that the component is a box structure, and the box material is stainless steel. The thickness of the box varies from 1.5mm to 80mm. The upper part of the box has an inclined surface, and there are grooves and rectangular cuts on the inclined surface. A cuboid made of SiC is embedded in the groove. Blind holes with a chamfer of 45° and through holes with a chamfer of 30° are precisely machined. In the conventional method, when processing such parts, it is necessary to process parts of different materials step by step, and then assemble them, and the process is complicated. Using the present invention, the SiC cuboid can be installed in the groove of the box in advance, and then the incision of the box and the in-situ precise positioning and punching of the SiC cuboid can be uniformly performed, so as to ensure the positioning accuracy of the hole on the SiC cuboid relative to other parts of the component. Using the invention to process such components not only meets the processing requirements, but also ensures the relative positioning accuracy of the holes and improves the processing efficiency.

以上所述,仅是本申请的几个实施例,并非对本申请做任何形式的限制,虽然本申请以较佳实施例揭示如上,然而并非用以限制本申请,任何熟悉本专业的技术人员,在不脱离本申请技术方案的范围内,利用上述揭示的技术内容做出些许的变动或修饰均等同于等效实施案例,均属于技术方案范围内。The above, only several embodiments of this application, are not limited to any form of this application. Although this application is revealed as above, it is not used to limit this application. Within the scope of the technical scheme of this application, some changes or modifications are made by the technical content revealed above, all of which are equivalent to equivalent implementation cases, all of which are within the scope of the technical solution.

Claims (10)

1. A composite laser machining system, the system comprising: the device comprises a control unit, and a detection unit, a high-power laser processing unit, a short pulse laser processing unit, a movement unit and an air supply unit which are all connected with the control unit;
the detection unit is used for detecting the positioning characteristic points of the workpiece and acquiring the spatial position information of the workpiece;
the high-power laser processing unit is used for cutting a workpiece according to a first preset track by using high-power laser;
the short pulse laser processing unit is used for processing and trimming the workpiece according to a second preset track by using short pulse laser;
the motion unit is used for adjusting the processing positions and the processing angles of the high-power laser processing unit and the short-pulse laser processing unit;
the gas supply unit is used for supplying high-pressure auxiliary gas to the high-power laser processing unit so as to blow away slag in the cutting seam of the workpiece and cool the high-power laser processing unit;
the control unit is used for generating control information according to the processing information of the workpiece and the spatial position information; and controlling the high-power laser processing unit, the short-pulse laser processing unit, the motion unit and the air supply unit to work according to the control information.
2. The system of claim 1, wherein the high power laser processing unit comprises a high power laser, a first optical transmission structure, and a laser cutting head;
the high-power laser is used for emitting high-power laser;
the first optical transmission structure is used for transmitting the high-power laser into the laser cutting head;
the laser cutting head is used for cutting a workpiece according to a first preset track by using the high-power laser;
preferably, the first optical transmission structure is an optical fiber or a light pipe;
preferably, the high-power laser is a fiber laser and CO 2 Any one of a laser and a solid-state laser.
3. The system of claim 2, wherein the short pulse laser processing unit comprises a short pulse laser, a second optical transmission structure, and an optical scanning structure;
the short pulse laser is used for emitting short pulse laser;
the second optical transmission structure is used for transmitting the short pulse laser to the optical scanning structure;
the optical scanning structure is used for scanning a workpiece at a high speed according to a second preset track by using the short pulse laser so as to process and trim the workpiece;
preferably, the short pulse laser is a fiber laser or a solid laser;
preferably, the short pulse laser is any one of a nanosecond laser, a picosecond laser and a femtosecond laser;
preferably, the second optical transmission structure is any one of an optical fiber, a light pipe and a reflector;
preferably, the optical scanning structure is a scanning galvanometer or an optical type scanning structure based on rotation of an optical device.
4. The system of claim 3, wherein the detection unit comprises an imaging structure and a ranging structure;
the imaging structure is used for carrying out image recognition on the workpiece, detecting the positioning characteristic points of the workpiece and acquiring the position data of the workpiece;
the distance measuring structure is used for acquiring the real-time processing heights of the laser cutting head, the optical scanning structure and the workpiece respectively;
the position data of the workpiece and the real-time machining height of the workpiece form spatial position information of the workpiece;
preferably, the imaging structure is a CCD image sensor;
preferably, the distance measuring structure is any one of an ultrasonic distance measuring sensor, a laser distance measuring sensor and an electromagnetic induction sensor.
5. The system of claim 3, wherein the motion unit comprises a base, two horizontal guide rails, a powered pendulum head, a cross beam, two vertical guide rails, a cutting head mount and a scan structure mount, and a drive motor;
the two horizontal guide rails are arranged on two sides of the upper surface of the base; the power swing head is arranged on the upper surface of the base and positioned between the two horizontal guide rails, and is used for clamping the workpiece and driving the workpiece to swing freely on two degrees of freedom;
the cross beam is connected to the two horizontal guide rails in a crossing manner; the two vertical guide rails are connected to the cross beam; the cutting head mounting seat and the scanning structure mounting seat are respectively connected to the two vertical guide rails; the cutting head mounting seat is used for placing the laser cutting head, and the scanning structure mounting seat is used for placing the optical scanning structure;
the driving motor is used for driving the power swing head, the cutting head mounting seat and the scanning structure mounting seat to move.
6. The system of claim 1, further comprising a dust removal unit for collecting exhaust gas, soot, or waste residue from the processing of the workpiece.
7. A composite laser processing method applied to the composite laser processing system according to any one of claims 1 to 6, characterized by comprising:
s1, clamping a workpiece, and inputting an original workpiece model into a control unit;
s2, detecting the workpiece, selecting a positioning feature point of the workpiece, adjusting an original workpiece coordinate into a new workpiece coordinate according to the positioning feature point, and generating a processing file according to the new workpiece coordinate;
s3, cutting and processing the workpiece by using high-power laser according to the processing file;
s4, according to the processing file, performing precision processing on the workpiece by using short pulse laser, and performing precision finishing on a high-power laser processing area of the workpiece;
s5, detecting the workpiece, and finishing machining if the machining requirement is met; if the machining requirements are not met, repeatedly executing S2 to S5 until the machining requirements are met, and finishing machining;
preferably, the precision machining is any one of surface cleaning, micro-texture machining, three-dimensional machining, and punching machining.
8. The method according to claim 7, wherein the step S2 is specifically:
3 or more than 3 positioning feature points are arranged on the workpiece;
the height of the workpiece and the normal of the curved surface are measured through the imaging structure and the distance measuring structure, and the measured information is transmitted to the control unit;
and the control unit compares the positioning characteristic points of the workpiece CAD model according to the measured positioning characteristic points, adjusts the coordinates in the original workpiece CAD model into the actual coordinates of the workpiece in the current machine tool coordinate system, and generates a new processing file according to the adjusted workpiece coordinates.
9. The method according to claim 8, wherein the step S3 is specifically:
adjusting the processing parameters of the high-power laser processing according to the generated new processing file;
and opening the high-power laser and the gas supply unit, respectively providing high-power laser and high-pressure auxiliary gas, carrying out laser processing on the workpiece along a first preset track, and quickly cutting through the workpiece.
10. The method according to claim 8, wherein step S4 is specifically:
according to the generated new processing file, processing parameters of the short pulse laser processing are adjusted aiming at different materials;
and opening the short pulse laser, controlling the optical scanning structure to finish the precision machining of the workpiece, and performing precision finishing on the high-power laser machining area of the workpiece.
CN202110347126.6A 2021-03-31 2021-03-31 A composite laser processing system and processing method Pending CN115213568A (en)

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CN116578034A (en) * 2023-07-14 2023-08-11 西安炬光科技股份有限公司 Electric control module, laser medical equipment and laser beam output control method

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EP2962802A1 (en) * 2014-07-04 2016-01-06 Ideko, S. Coop Laser inspection and machining head
CN110814544A (en) * 2019-11-18 2020-02-21 温州大学 A high-precision hole-making method for dual-laser compound cutting

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EP2962802A1 (en) * 2014-07-04 2016-01-06 Ideko, S. Coop Laser inspection and machining head
CN204209284U (en) * 2014-09-11 2015-03-18 深圳英诺激光科技有限公司 A kind of hard material laser deep processing equipment
CN110814544A (en) * 2019-11-18 2020-02-21 温州大学 A high-precision hole-making method for dual-laser compound cutting

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CN115502584A (en) * 2022-11-24 2022-12-23 四川富乐华半导体科技有限公司 Copper-clad ceramic substrate slicing process
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