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CN115166884B - Two-dimensional super-surface grating, two-dimensional diffraction optical waveguide and near-to-eye display device - Google Patents

Two-dimensional super-surface grating, two-dimensional diffraction optical waveguide and near-to-eye display device Download PDF

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CN115166884B
CN115166884B CN202211092769.1A CN202211092769A CN115166884B CN 115166884 B CN115166884 B CN 115166884B CN 202211092769 A CN202211092769 A CN 202211092769A CN 115166884 B CN115166884 B CN 115166884B
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CN115166884A (en
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王萌光
李勇
吴斐
娄身强
陆希炜
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Beijing LLvision Technology Co ltd
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    • GPHYSICS
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    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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Abstract

The invention provides a two-dimensional super-surface grating, a two-dimensional diffraction optical waveguide and near-to-eye display equipment, and relates to the technical field of super-surfaces, wherein the two-dimensional super-surface grating comprises a plurality of first elements and second elements which have the same shape and different sizes; wherein the number of first primitives and the number of second primitives are equal; the first element and the second element are arranged at intervals and are formed by straight edge connection; the first elements are in a cross-shaped structure and are arranged in an array at equal intervals with other first elements; the second cells are arranged in a cross-shaped structure, and the second cells are arranged in an array with equal intervals with other second cells. Through the mode, the first element and the second element which are the same in shape and different in size are arranged, so that the coupling-out efficiency can be adjusted, the light leakage at the outer side is reduced, and the privacy is improved.

Description

Two-dimensional super-surface grating, two-dimensional diffraction optical waveguide and near-to-eye display device
Technical Field
The invention relates to the technical field of super surfaces, in particular to a two-dimensional super surface grating, a two-dimensional diffraction optical waveguide and near-to-eye display equipment.
Background
In recent years, with the rapid development of computer science, human-computer interaction technologies such as Virtual Reality (VR) and Augmented Reality (AR) based on near-eye display devices are becoming application hotspots. According to different interaction modes, the VR near-eye display equipment generates a virtual environment through a computer, and an observer can observe, touch and interact with objects in the virtual environment; and the virtual environment generated by the AR near-eye display equipment is superposed in the real world, and an observer can interact with the real world while seeing the virtual environment to achieve the purpose of augmented reality, so that the AR has stronger interaction capacity relative to VR, and shows a more potential development trend in the aspects of education, medical treatment, military affairs and the like.
The display system adopted by the AR glasses in the market at present is the combination of various miniature display screens and optical elements such as prisms, free-form surfaces, birdBanh, optical waveguides and the like, wherein the difference of optical combiners is a key part for distinguishing the AR display system. In summary, the optical waveguide scheme has the best development potential in terms of optical effect, appearance and mass production, and may be a better choice for enabling the AR glasses to reach the consumer level.
The mainstream of optical waveguide, namely the nature of diffractive optical waveguide, is a technology for realizing near-to-eye image display by using a diffraction grating lens, and the generation and the popularization of the technology benefit from the technical progress trend that an optical element changes from millimeter level to micro-nanometer level and changes from 'solid' to 'plane'. However, the conventional surface relief grating has problems of low diffraction efficiency, narrow field angle, large volume and the like.
The diffraction light waveguide technology is divided into one-dimensional expansion and two-dimensional expansion. The development of the related technology of the two-dimensional diffraction light waveguide needs to break through the bottleneck in the aspect of materials so as to improve optical parameters, and meanwhile, a series of high-precision mass-production micro-nano processing equipment is needed. However, the coupling-out efficiency of the front and the back of the common two-dimensional grating is basically consistent, and the problem of light leakage exists.
Disclosure of Invention
The invention provides a two-dimensional super-surface grating, a two-dimensional diffraction optical waveguide and near-to-eye display equipment, which are used for solving the defects of low diffraction efficiency and light leakage of the grating in the prior art.
The invention provides a two-dimensional super-surface grating, which comprises a plurality of first elements and second elements which have the same shape and different sizes; wherein the number of the first primitive and the second primitive is equal; the first element and the second element are arranged at intervals and are formed by straight edge connection; the first elements are in a cross-shaped structure and are arranged in an array at equal intervals with other first elements; the second cells are arranged in a cross-shaped structure, and the second cells are arranged in an array with equal intervals with other second cells.
According to the two-dimensional super-surface grating provided by the invention, a first element is constructed by intersecting two groups of straight edge sets, and each group of straight edge set comprises a plurality of mutually parallel straight edges; each group of straight edge sets of the first primitive comprises the same number of straight edges; the straight edges in each group of straight edge sets are intersected with the two straight edges in the other group of straight edge sets; the second primitive is constructed by intersecting two groups of straight edge sets, and each group of straight edge set comprises a plurality of mutually parallel straight edges; each group of straight edge sets of the second primitive comprises the same number of straight edges; the straight edges in each set of straight edge sets intersect with two straight edges in the other set of straight edge sets.
According to the two-dimensional super-surface grating provided by the invention, the first element comprises twelve straight edges; in the first primitive, the first, third, fifth, seventh, ninth, and eleventh straight sides belong to the same set of straight sides, the first, third, fifth, seventh, ninth, and eleventh straight sides being parallel to each other; the second straight side, the fourth straight side, the sixth straight side, the eighth straight side, the tenth straight side and the twelfth straight side belong to another straight side set, and the second straight side, the fourth straight side, the sixth straight side, the eighth straight side, the tenth straight side and the twelfth straight side are parallel; the second primitive includes twelve straight edges; in the second primitive, the first straight side, the third straight side, the fifth straight side, the seventh straight side, the ninth straight side, and the eleventh straight side belong to the same set of straight sides, the first straight side, the third straight side, the fifth straight side, the seventh straight side, the ninth straight side, and the eleventh straight side are parallel; the second straight side, the fourth straight side, the sixth straight side, the eighth straight side, the tenth straight side and the twelfth straight side belong to another straight side set, and the second straight side, the fourth straight side, the sixth straight side, the eighth straight side, the tenth straight side and the twelfth straight side are parallel; wherein the first straight side of the first primitive and the first straight side of the second primitive are parallel.
According to the two-dimensional super-surface grating provided by the invention, in the first element, the lengths of the first straight edge, the fourth straight edge, the seventh straight edge and the tenth straight edge are equal; the second straight side, the third straight side, the fifth straight side, the sixth straight side, the eighth straight side, the ninth straight side, the eleventh straight side and the twelfth straight side are equal in length; in the second primitive, the first, fourth, seventh, and tenth straight sides are equal in length; the second straight side, the third straight side, the fifth straight side, the sixth straight side, the eighth straight side, the ninth straight side, the eleventh straight side and the twelfth straight side are equal in length; wherein a length of the first straight edge of the first primitive is greater than a length of the first straight edge of the second primitive; the length of the second straight edge of the first primitive is greater than the length of the second straight edge of the second primitive.
According to the two-dimensional super-surface grating provided by the invention, in the first element, an included angle between the eleventh straight edge and the twelfth straight edge and an included angle between the fifth straight edge and the sixth straight edge are 60 degrees; the angle between the second and third straight sides and the angle between the eighth and ninth straight sides is 120 °.
According to the two-dimensional super-surface grating provided by the invention, the refractive index of visible light of the two-dimensional super-surface grating is greater than or equal to 1.5.
According to the two-dimensional super-surface grating provided by the invention, the material of the two-dimensional super-surface grating is any one of silicon oxide, silicon nitride or gallium nitride.
The present invention also provides a two-dimensional diffractive optical waveguide comprising: the grating structure comprises a waveguide substrate, a one-dimensional incoupling grating and the two-dimensional super-surface grating, wherein the one-dimensional incoupling grating and the two-dimensional super-surface grating are arranged on the surface of the waveguide substrate; the one-dimensional coupling grating is used for coupling incident light carrying image information into the two-dimensional diffraction optical waveguide; the two-dimensional super-surface grating is used for coupling out diffracted light which is from the one-dimensional coupling-in grating and is conducted in a total reflection mode in the two-dimensional diffraction optical waveguide to human eyes for imaging while diffracting and expanding the diffracted light along two directions.
According to the two-dimensional diffraction optical waveguide provided by the invention, the incident angle of the incident light coupled into the two-dimensional diffraction optical waveguide is 40-70 degrees.
The invention also provides near-eye display equipment which comprises the two-dimensional diffraction optical waveguide.
The two-dimensional super-surface grating comprises a plurality of first elements and second elements which are the same in shape and different in size, wherein the first elements and the second elements are formed by connecting straight edges, and the first elements and other first elements are arranged in an equally-spaced array; the second cells are arranged in an equally spaced array with the other second cells. Through the mode, the two-dimensional super-surface grating is provided with the first element and the second element which are the same in shape and different in size, the sizes of the elements can be freely changed, coupling-out efficiency is adjusted, light leakage on the outer side can be reduced due to the special structure of the two-dimensional super-surface grating, and privacy is improved.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed for the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a two-dimensional super-surface grating according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an embodiment of a one-dimensional super-surface grating according to the present invention;
FIG. 3 is a schematic diagram of an embodiment of a two-dimensional super-surface grating of the present invention;
FIG. 4 is a schematic structural diagram of one embodiment of a two-dimensional diffractive optical waveguide of the present invention;
FIG. 5 is a light ray trace diagram of one embodiment of a two-dimensional diffractive optical waveguide of the present invention;
FIG. 6 is a schematic diagram of the relationship between the coupling-out efficiency and the visible wavelength of one embodiment of the two-dimensional diffractive optical waveguide simulation of the present invention;
FIG. 7 is a schematic diagram of the relationship between the coupling-out efficiency and the incident angle of one embodiment of the two-dimensional diffractive optical waveguide simulation of the present invention;
FIG. 8 is a schematic diagram of the relationship between the field angle and the refractive index of a two-dimensional diffractive optical waveguide according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a two-dimensional super-surface grating according to an embodiment of the present invention. In this embodiment, the two-dimensional super-surface grating comprises a plurality of first elements 10 and second elements 20 which are identical in shape and different in size.
Wherein the number of the first primitives 10 and the second primitives 20 is equal; the first element 10 and the second element 20 are arranged at intervals, and the first element 10 and the second element 20 are formed by straight edge connection.
The first cells 10 are in a cross-shaped structure, and the first cells 10 are arranged in an array with equal intervals with other first cells 10; the second cells 20 are in a cross-shaped configuration, and the second cells 20 are arranged in an equally spaced array with other second cells 20.
Conventional optical devices, such as prisms, lenses, and spiral phase plates, rely on phase accumulation of light during transmission to produce a desired wavefront. Generally, such optical devices have irregular geometric shapes and large volumes, which are not favorable for miniaturization and integration of the devices.
The metamaterial with reduced dimensionality is adopted by the invention, and abrupt interface phase discontinuity can be introduced, so that the complete control on the phase, amplitude and polarization of electromagnetic waves is realized.
The ultra-thin and plane geometrical characteristics of the optical super-surface enable the super-surface based device to be easily integrated with other optical devices to develop compact multifunctional optical devices. In particular, the microelectronic manufacturing technology with high mass production and high precision as the remarkable features provides an important approach for the mass production of the super-surface device.
The super surface grating as an outcoupling grating is one of the main development directions in the near-eye display optical field. The super-surface grating can not only improve the coupling efficiency and reduce the power consumption of devices, but also enlarge the field angle by adjusting the refractive index of glass, thereby achieving the imaging effect exceeding the traditional grating and greatly reducing the volume and weight of VR/AR glasses or helmets. And the light leakage ratio can be reduced through the structure, and the light leakage problem of the diffraction light waveguide is improved.
Optionally, the visible light refractive index of the two-dimensional super surface grating is greater than or equal to 1.5. The two-dimensional super-surface grating is made of any one of silicon oxide, silicon nitride or gallium nitride. The incident deflection angle of the two-dimensional super-surface grating is related to the wavelength of incident light and the refractive index of the material of the two-dimensional super-surface grating.
In some embodiments, in each column of the two-dimensional super-surface grating, the first element 10 and the second element 20 are arranged next to each other in sequence; in each row of the two-dimensional super-surface grating, the first element 10 and the second element 20 are arranged next to each other in sequence.
The two-dimensional super-surface grating is provided with the first element and the second element which are the same in shape and different in size, the sizes of the elements can be freely changed, coupling-out efficiency is adjusted, light leakage on the outer side can be reduced due to the special structure of the two-dimensional super-surface grating, and privacy is improved.
The super-surface is mainly of waveguide type, resonance type and PB phase type. Referring to fig. 2, fig. 2 is a schematic structural diagram of a one-dimensional super-surface grating according to an embodiment of the present invention. In the present embodiment, the period elements of the one-dimensional super-surface grating are composed of three elements with height L and width W L And W R The distance between the two micro-nano structures is D, and the period of the basic element is D
Figure 982560DEST_PATH_IMAGE001
The principle of the waveguide type super surface grating is as follows: when the waveguide height L is long enough, the incident plane wave is coupled into the waveguide grating through air, and is transmitted in the waveguide grating approximately in the fundamental mode, the phase and the transmittance of the emergent end are determined by the transmission characteristics of the fundamental mode of the waveguide, and the transmission characteristics of the fundamental mode are determined by the medium refractive index and the waveguide width. Two elements of the design are arranged side by side, optical coupling between elements with different widths is negligible, and then light moving along different elements is accumulatedAccumulating a phase shift proportional to length L
Figure 568262DEST_PATH_IMAGE002
Figure 778532DEST_PATH_IMAGE003
Wherein,
Figure 285737DEST_PATH_IMAGE004
is the effective index of refraction between the two elements,
Figure 623178DEST_PATH_IMAGE005
the phase difference over the sub-wavelength propagation length of (a) is:
Figure 548539DEST_PATH_IMAGE006
by making two phase differences of
Figure 946023DEST_PATH_IMAGE007
Is placed at a sub-wavelength distance D to direct the beam at an angle
Figure 252108DEST_PATH_IMAGE008
Figure 596502DEST_PATH_IMAGE009
Normal incidence deflection angle and wavelength of super surface grating, refractive index of glass
Figure 422375DEST_PATH_IMAGE010
In connection with the cycle:
Figure 210334DEST_PATH_IMAGE011
the two-dimensional super-surface grating can be regarded as two one-dimensional super-surface gratings which are offset by a preset angle and are assembled and intercepted. Referring to fig. 3, fig. 3 is a schematic diagram of a two-dimensional super-surface grating according to an embodiment of the present invention. The high-efficiency high-privacy-performance light coupler is composed of a plurality of rhombic, triangular and rectangular elements, the sizes of the elements can be freely changed, the coupling-out efficiency is adjusted, light leakage on the outer side can be reduced due to the special structure of the high-privacy-performance light coupler, and privacy is improved.
In some embodiments, the two-dimensional super-surface grating is constructed by intersecting two sets of straight edge sets, each set of straight edge sets comprising a plurality of mutually parallel straight edges; each group of straight edge sets of the first primitive comprises the same number of straight edges; the straight edges in each set of straight edge sets intersect two straight edges in the other set of straight edge sets.
The second primitive is constructed by intersecting two groups of straight edge sets, and each group of straight edge set comprises a plurality of mutually parallel straight edges; each group of straight edge sets of the second primitive comprises the same number of straight edges; the straight edges in each set of straight edge sets intersect with two straight edges in the other set of straight edge sets.
The second primitive may be considered as determined by the first primitive after scaling in its entirety.
Optionally, the first primitive includes twelve straight sides. With continued reference to fig. 3, in the first cell 10, the first straight side 11, the third straight side 13, the fifth straight side 15, the seventh straight side 17, the ninth straight side 19, and the eleventh straight side 1B belong to the same set of straight sides, and the first straight side 11, the third straight side 13, the fifth straight side 15, the seventh straight side 17, the ninth straight side 19, and the eleventh straight side 1B are parallel to each other; the second straight side 12, the fourth straight side 14, the sixth straight side 16, the eighth straight side 18, the tenth straight side 1A and the twelfth straight side 1C belong to another set of straight sides, and the second straight side 12, the fourth straight side 14, the sixth straight side 16, the eighth straight side 18, the tenth straight side 1A and the twelfth straight side 1C are parallel to each other.
Further, in the first cell 10, the first, fourth, seventh and tenth straight sides 11, 14, 17, 1A are of equal length; the second 12, third 13, fifth 15, sixth 16, eighth 18, ninth 19, eleventh 1B and twelfth 1C straight sides are of equal length.
In a two-dimensional supersurface grating in some embodiments, optionally, the second elements comprise twelve straight sides. With continued reference to fig. 3, in the second cell 20, the first straight side 21, the third straight side 23, the fifth straight side 25, the seventh straight side 27, the ninth straight side 29, and the eleventh straight side 2B belong to the same set of straight sides, and the first straight side 21, the third straight side 23, the fifth straight side 25, the seventh straight side 27, the ninth straight side 29, and the eleventh straight side 2B are parallel to each other; the second straight side 22, the fourth straight side 24, the sixth straight side 26, the eighth straight side 28, the tenth straight side 2A and the twelfth straight side 2C belong to another set of straight sides, and the second straight side 22, the fourth straight side 24, the sixth straight side 26, the eighth straight side 28, the tenth straight side 2A and the twelfth straight side 2C are parallel to each other.
Further, in the second cell 20, the first straight side 21, the fourth straight side 24, the seventh straight side 27 and the tenth straight side 2A are equal in length; the second, third, fifth, sixth, eighth, ninth, eleventh, and twelfth straight sides 22, 23, 25, 26, 28, 2B, 2C are equal in length.
Wherein the first straight edge 11 of the first element 10 and the first straight edge 21 of the second element 20 are parallel; the length of the first straight edge 11 of the first primitive 10 is greater than the length of the first straight edge 21 of the second primitive 20; the length of the second straight edge 12 of the first primitive 10 is greater than the length of the second straight edge 22 of the second primitive 20.
In particular, the first straight edge 11, the third straight edge 13, the fifth straight edge 15, the seventh straight edge 17, the ninth straight edge 19, the eleventh straight edge 1B of the first cell 10 and the first straight edge 21, the third straight edge 23, the fifth straight edge 25, the seventh straight edge 27, the ninth straight edge 29, the eleventh straight edge 2B of the second cell 20 are parallel.
The second straight side 12, the fourth straight side 14, the sixth straight side 16, the eighth straight side 18, the tenth straight side 1A, the twelfth straight side 1C of the first cell 10 and the second straight side 22, the fourth straight side 24, the sixth straight side 26, the eighth straight side 28, the tenth straight side 2A, the twelfth straight side 2C of the second cell 20 are parallel.
Optionally, in the first cell 10, the included angle between the eleventh straight side 1B and the twelfth straight side 1C and the included angle between the fifth straight side 15 and the sixth straight side 16 are the same and are between 30 ° and 90 °; the angle between the second straight edge 12 and the third straight edge 13 and the angle between the eighth straight edge 18 and the ninth straight edge 19 are the same and are 90-150 deg..
Preferably, in the first cell 10, the included angle between the eleventh straight edge 1B and the twelfth straight edge 1C and the included angle between the fifth straight edge 15 and the sixth straight edge 16 is 60 °; the angle between the second 12 and third 13 straight edge and the angle between the eighth 18 and ninth 19 straight edge is 120 deg..
That is, in the second cell 20, the included angle between the eleventh straight side 2B and the twelfth straight side 2C and the included angle between the fifth straight side 25 and the sixth straight side 26 are the same and are 30 ° to 90 °; the angle between the second straight edge 22 and the third straight edge 23 and the angle between the eighth straight edge 28 and the ninth straight edge 29 are the same and are 90-150 deg..
I.e. in the second cell 20, the angle between the eleventh straight edge 2B and the twelfth straight edge 2C and the angle between the fifth straight edge 25 and the sixth straight edge 26 are 60 °; the angle between the second straight edge 22 and the third straight edge 23 and the angle between the eighth straight edge 28 and the ninth straight edge 29 is 120 deg..
Referring to fig. 4, fig. 4 is a schematic structural diagram of a two-dimensional diffractive optical waveguide according to an embodiment of the present invention. In the present embodiment, the two-dimensional diffractive light waveguide includes: a waveguide substrate, and a one-dimensional incoupling grating 30 and the two-dimensional super-surface grating arranged on the surface of the waveguide substrate.
The one-dimensional incoupling grating 30 is used for incoupling incident light rays carrying image information into the two-dimensional diffraction optical waveguide; the two-dimensional super-surface grating is used for coupling out diffracted light which comes from the one-dimensional coupling-in grating 30 and is guided in a total reflection mode in the two-dimensional diffraction optical waveguide to human eyes for imaging while diffracting and expanding the diffracted light in two directions.
In some embodiments, the incident angle of the incident light coupled into the two-dimensional diffractive optical waveguide is 40 ° -70 °.
Please refer to fig. 5 to 8 for a simulation of the two-dimensional diffractive optical waveguide of this embodiment, fig. 5 is a light trace diagram of an embodiment of the two-dimensional diffractive optical waveguide of the present invention, fig. 6 is a schematic diagram of a relationship between a coupling-out efficiency and a visible light wavelength of an embodiment of the two-dimensional diffractive optical waveguide simulation of the present invention, fig. 7 is a schematic diagram of a relationship between a coupling-out efficiency and an incident angle of an embodiment of the two-dimensional diffractive optical waveguide simulation of the present invention, and fig. 8 is a schematic diagram of a relationship between a field angle and a refractive index of an embodiment of the two-dimensional diffractive optical waveguide simulation of the present invention.
As shown in fig. 5 and 6, T1 is the image source light coupled out into the human eye, R1 is the leakage light on the outside, and R is the light continuing total reflection and is relatively uniform. Between 450nm and 650nm of visible light, T1 is far larger than R1, and even leakage light is smaller than image source light by an order of magnitude in red and blue light bands.
As shown in fig. 7, in the range of the angle of the incoupled light of 40 ° to 70 °, it is clearly seen that R1 is smaller and the leakage light is reduced.
As shown in fig. 8, the two-dimensional diffractive optical waveguide of the present embodiment gradually increases the angle of view with an increase in refractive index.
The invention also provides near-eye display equipment which comprises the two-dimensional diffraction optical waveguide.
In summary, the two-dimensional super-surface grating, the two-dimensional diffractive optical waveguide and the near-eye display device provided by the invention have the advantages that the two-dimensional super-surface grating comprises a plurality of first elements and second elements which are the same in shape and different in size, the first elements and the second elements are formed by connecting straight edges, and the first elements and other first elements are arranged in an array at equal intervals; the second cells are arranged in an equally spaced array with the other second cells. Through the mode, the two-dimensional super-surface grating is provided with the first element and the second element which are the same in shape and different in size, the sizes of the elements can be freely changed, coupling-out efficiency is adjusted, light leakage on the outer side can be reduced due to the special structure of the two-dimensional super-surface grating, the problem of image leakage is solved, and privacy and safety are protected; the bidirectional pupil expansion is realized, and the blank area of the lens is fully utilized; compared with the traditional diffraction optical waveguide, the super-surface grating has more parameters, is easier to regulate and control, and improves the consistency; in addition, the two-dimensional super-surface grating, the two-dimensional diffraction optical waveguide and the near-eye display device are compatible with a semiconductor manufacturing process, and batch production can be realized.
The above-described embodiments of the apparatus are merely illustrative, and the units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (8)

1. A two-dimensional super surface grating is characterized by comprising a plurality of first elements and second elements which have the same shape and different sizes; wherein the first primitive and the second primitive are equal in number; the first element and the second element are arranged at intervals, and the first element and the second element are formed by straight edge connection;
the first cells are in a cross-shaped structure and are arranged in an array with equal intervals with other first cells; the second elements are in a cross-shaped structure and are arranged in an array at equal intervals with other second elements;
the first primitive is constructed by intersecting two sets of straight edges, the first primitive comprising twelve straight edges; in the first primitive, a first straight side, a third straight side, a fifth straight side, a seventh straight side, a ninth straight side, and an eleventh straight side belong to the same set of straight sides, the first straight side, the third straight side, the fifth straight side, the seventh straight side, the ninth straight side, and the eleventh straight side being parallel to each other; a second straight side, a fourth straight side, a sixth straight side, an eighth straight side, a tenth straight side, and a twelfth straight side belong to another set of straight sides, the second straight side, the fourth straight side, the sixth straight side, the eighth straight side, the tenth straight side, and the twelfth straight side being parallel;
the second primitive is constructed by intersecting two sets of straight edges, and the second primitive comprises twelve straight edges; in the second primitive, a first straight side, a third straight side, a fifth straight side, a seventh straight side, a ninth straight side, and an eleventh straight side belong to the same set of straight sides, the first straight side, the third straight side, the fifth straight side, the seventh straight side, the ninth straight side, and the eleventh straight side being parallel; a second straight side, a fourth straight side, a sixth straight side, an eighth straight side, a tenth straight side, and a twelfth straight side belong to another set of straight sides, the second straight side, the fourth straight side, the sixth straight side, the eighth straight side, the tenth straight side, and the twelfth straight side being parallel;
wherein the first straight edge of the first primitive and the first straight edge of the second primitive are parallel.
2. A two-dimensional supersurface grating according to claim 1,
in the first primitive, the first, fourth, seventh, and tenth straight sides are equal in length; said second straight side, said third straight side, said fifth straight side, said sixth straight side, said eighth straight side, said ninth straight side, said eleventh straight side, and said twelfth straight side are equal in length;
in the second primitive, the first, fourth, seventh, and tenth straight sides are equal in length; said second straight side, said third straight side, said fifth straight side, said sixth straight side, said eighth straight side, said ninth straight side, said eleventh straight side, and said twelfth straight side are equal in length;
wherein a length of the first straight edge of the first primitive is greater than a length of the first straight edge of the second primitive; a length of a second straight edge of the first primitive is greater than a length of a second straight edge of the second primitive.
3. A two-dimensional supersurface grating according to claim 1,
in the first cell, the included angle between the eleventh straight edge and the twelfth straight edge and the included angle between the fifth straight edge and the sixth straight edge is 60 °; an included angle between the second straight side and the third straight side and an included angle between the eighth straight side and the ninth straight side is 120 °.
4. A two-dimensional super surface grating according to claim 1,
the refractive index of visible light of the two-dimensional super surface grating is greater than or equal to 1.5.
5. A two-dimensional supersurface grating according to claim 1,
the two-dimensional super-surface grating is made of any one of silicon oxide, silicon nitride or gallium nitride.
6. A two-dimensional diffractive optical waveguide, comprising: a waveguide substrate, a one-dimensional incoupling grating arranged on the surface of the waveguide substrate, and a two-dimensional super-surface grating according to any of claims 1-5;
the one-dimensional coupling grating is used for coupling incident light carrying image information into the two-dimensional diffraction optical waveguide; the two-dimensional super-surface grating is used for diffracting and expanding diffracted light which comes from the one-dimensional coupling-in grating and is conducted in a total reflection mode in the two-dimensional diffraction light waveguide along two directions so as to be coupled out to a human eye for imaging.
7. The two-dimensional diffractive optical waveguide according to claim 6,
the incident angle of the incident light coupled into the two-dimensional diffraction optical waveguide is 40-70 degrees.
8. A near-eye display device comprising the two-dimensional diffractive optical waveguide according to any one of claims 6 to 7.
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