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CN114951975A - Laser processing apparatus and method - Google Patents

Laser processing apparatus and method Download PDF

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Publication number
CN114951975A
CN114951975A CN202210608261.6A CN202210608261A CN114951975A CN 114951975 A CN114951975 A CN 114951975A CN 202210608261 A CN202210608261 A CN 202210608261A CN 114951975 A CN114951975 A CN 114951975A
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processing
laser
light
different
optical path
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高树伟
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Suzhou Keyun Laser Technology Co Ltd
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Suzhou Keyun Laser Technology Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0673Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

本发明涉及一种激光加工设备和方法,加工设备包括激光发射源,激光发射源所发出的光源连接有分光装置,激光发射源所发出的光源输入分光装置后输出两条光路支路,分光装置可滑移地安装在其两条光路支路的相交处,分光装置的滑移方向与激光发射源所发出的光源进入分光装置的入射方向相交设置,每条光路支路均连接有加工装置,且不同的光路支路所连接的加工装置的加工方式不同,不同规格的分光装置可替换地设置在两条相交光路的相交处。采用本发明,不同的光路支路的加工装置的加工方式不同,不仅提高了加工效率,还降低了企业成本;通过对分光装置的配置实现了不同的加工装置在不同的工位进行激光作业,有效地提高了一个激光加工设备的加工效率。

Figure 202210608261

The invention relates to a laser processing equipment and method. The processing equipment comprises a laser emission source, a light source emitted by the laser emission source is connected with a light splitting device, and the light source emitted by the laser emission source is input into the light splitting device and then outputs two optical path branches. It is slidably installed at the intersection of its two optical path branches. The sliding direction of the beam splitting device intersects with the incident direction of the light source emitted by the laser emitting source entering the beam splitting device. Each optical path branch is connected with a processing device. In addition, the processing methods of the processing devices connected to different optical path branches are different, and spectroscopic devices of different specifications can be alternatively arranged at the intersection of the two intersecting optical paths. By adopting the invention, the processing methods of the processing devices of different optical path branches are different, which not only improves the processing efficiency, but also reduces the cost of the enterprise; Effectively improve the processing efficiency of a laser processing equipment.

Figure 202210608261

Description

激光加工设备和方法Laser processing equipment and method

技术领域technical field

本发明涉及激光加工领域,特别是涉及一种激光加工设备和方法。The present invention relates to the field of laser processing, in particular to a laser processing device and method.

背景技术Background technique

当下国产激光设备商的大力兴起,以及国外设备的引入导致国内激光设备竞争相当激烈。目前激光加工设备的加工方式主要分为两种,一种是通过激光加工设备进行激光打标、激光内雕等:另一种是通过激光加工设备进行工件的切割。进行激光打标、激光内雕等工序需要激光扫描振镜,而进行工件的切割需要激光加工物镜或者激光切割头;目前工厂对两种加工方式都具备需求,因此,一般是配备两台设备,一台设备用于通过激光扫描振镜进行激光打标、激光内雕等,另一台设备用于通过激光加工物镜或者激光切割头进行工件的切割;或者是采用同一台激光加工设备进行激光扫描振镜与激光加工物镜(或者激光切割头)进行线路切换,但是激光扫描振镜与激光加工物镜(或者激光切割头)不能同时进行加工,导致加工效率低下。At present, the vigorous rise of domestic laser equipment manufacturers and the introduction of foreign equipment have led to fierce competition in domestic laser equipment. At present, the processing methods of laser processing equipment are mainly divided into two types, one is laser marking, laser engraving, etc. through laser processing equipment; the other is cutting workpieces through laser processing equipment. Laser scanning galvanometers are required for laser marking, laser engraving and other processes, and laser processing objective lenses or laser cutting heads are required for workpiece cutting; at present, the factory has requirements for both processing methods, so generally two sets of equipment are equipped. One device is used for laser marking, laser engraving, etc. through a laser scanning galvanometer, and the other device is used for workpiece cutting through a laser processing objective lens or a laser cutting head; or the same laser processing equipment is used for laser scanning The galvanometer and the laser processing objective lens (or laser cutting head) perform line switching, but the laser scanning galvanometer and the laser processing objective lens (or laser cutting head) cannot be processed at the same time, resulting in low processing efficiency.

发明内容SUMMARY OF THE INVENTION

基于此,有必要针对上述技术问题,提供一种能够提高激光加工效率的激光加工设备和方法。Based on this, it is necessary to provide a laser processing apparatus and method that can improve the efficiency of laser processing in response to the above technical problems.

一方面,提供一种激光加工设备,所述激光加工设备包括激光发射源,所述激光发射源所发出的光源连接有分光装置,所述激光发射源所发出的光源输入分光装置后输出两条光路支路,所述分光装置可滑移地安装在其两条光路支路的相交处,所述分光装置的滑移方向与所述激光发射源所发出的光源进入所述分光装置的入射方向相交设置,每条光路支路均连接有加工装置,且不同的光路支路所连接的加工装置的加工方式不同,不同规格的所述分光装置可替换地设置在两条相交光路的相交处。On the one hand, a laser processing equipment is provided, the laser processing equipment includes a laser emission source, a light source emitted by the laser emission source is connected to a spectroscopic device, and the light source emitted by the laser emission source is input into the spectroscopic device and outputs two Optical path branch, the light splitting device is slidably installed at the intersection of its two optical path branches, the sliding direction of the light splitting device and the incident direction of the light source emitted by the laser emitting source entering the light splitting device Each optical path branch is connected with a processing device, and the processing devices connected to different optical path branches have different processing methods, and the spectroscopic devices of different specifications can be alternatively arranged at the intersection of the two intersecting optical paths.

在其中一个实施例中,不同所述加工装置的加工方式包括物镜/切割头加工方式、激光振镜加工方式。In one of the embodiments, the processing methods of the different processing devices include an objective lens/cutting head processing method and a laser galvanometer processing method.

在其中一个实施例中,所述激光发射源所发出的光源至少连接有两个分光装置,前一个所述分光装置的其中一条光路支路的输出光源作为后一个所述分光装置的输入光源。In one embodiment, the light source emitted by the laser emitting source is connected with at least two light splitting devices, and the output light source of one of the optical branch of the former light splitting device is used as the input light source of the latter light splitting device.

在其中一个实施例中,相邻两条所述光路支路的相交处设置有移动机构,所述分光装置采用分光镜,所述分光镜连接在所述移动机构上。In one of the embodiments, a moving mechanism is provided at the intersection of two adjacent optical path branches, the beam splitting device adopts a beam splitter, and the beam splitter is connected to the moving mechanism.

在其中一个实施例中,还包括控制装置,所述控制装置与多个所述移动机构通信连接。In one of the embodiments, a control device is further included, and the control device is communicatively connected with a plurality of the moving mechanisms.

在其中一个实施例中,所述分光装置与加工装置之间的光路上依次连接有调光治具、衰减器、扩束镜和调光治具。In one embodiment, a dimming fixture, an attenuator, a beam expander and a dimming fixture are sequentially connected on the optical path between the light splitting device and the processing device.

另一方面,提供了一种激光加工方法,所述激光加工方法包括:In another aspect, a laser processing method is provided, the laser processing method comprising:

控制装置控制分光装置移动至激光发射源所发出的光源的光路上,激光发射源所发出的光源输入至分光装置,形成两条光路支路;The control device controls the splitting device to move to the optical path of the light source emitted by the laser emission source, and the light source emitted by the laser emission source is input to the optical splitting device to form two optical path branches;

不同的光路支路所连接的不同的加工装置分别采用不同的加工方式对相同或不同的工件同时进行加工;Different processing devices connected to different optical path branches use different processing methods to process the same or different workpieces at the same time;

控制装置控制分光装置离开激光发射源所发出的光源的光路,激光发射源所发出的光源输入至相应的加工装置,并采用与加工装置相应的加工方式对工件进行加工。The control device controls the beam splitting device to leave the light path of the light source emitted by the laser emitting source, and the light source emitted by the laser emitting source is input to the corresponding processing device, and the workpiece is processed by a processing method corresponding to the processing device.

在其中一个实施例中,所述激光加工方法所采用的激光加工设备包括多个分光装置,所述激光加工方法还包括:In one embodiment, the laser processing equipment used in the laser processing method includes a plurality of light splitting devices, and the laser processing method further includes:

控制装置对多个分光装置进行控制,使得不同的加工装置在不同的工位参与激光加工。。The control device controls multiple spectroscopic devices, so that different processing devices participate in laser processing at different stations. .

在其中一个实施例中,所述激光加工方法,还包括:In one embodiment, the laser processing method further includes:

更换不同规格的分光装置,以改变不同光路支路的加工功率。Replace the spectroscopic device with different specifications to change the processing power of different optical branches.

在其中一个实施例中,所述激光加工方法,还包括:In one embodiment, the laser processing method further includes:

调整衰减器的参数,以改变不同光路支路的加工功率。Adjust the parameters of the attenuator to change the processing power of different optical branches.

本发明的上述技术方案相比现有技术具有以下优点:The above-mentioned technical scheme of the present invention has the following advantages compared with the prior art:

上述激光加工设备和方法,激光发射源所发出的光源输入分光装置后,输出两条光路支路,每条光路支路都会连接一个加工装置,且不同的光路支路的加工装置的加工方式不同,包括物镜/切割头加工方式、激光振镜加工方式,不同加工方式的加工装置集成到同一个激光加工设备上,不仅提高了加工效率,还降低了企业成本;此外,同一个激光加工设备上设置多个分光装置,前一个分光装置的其中一条光路支路的输出光源作为后一个分光装置的输入光源,形成了分光装置的串联,同一个光源提供了多条光路支路,通过对分光装置的配置实现了不同的加工装置在不同的工位进行激光作业,有效地提高了一个激光加工设备的加工效率。In the above-mentioned laser processing equipment and method, after the light source emitted by the laser emission source is input into the optical splitting device, it outputs two optical path branches, each optical path branch will be connected to a processing device, and the processing methods of different optical path branches are different. , including the objective lens/cutting head processing method, the laser galvanometer processing method, and the processing devices of different processing methods are integrated into the same laser processing equipment, which not only improves the processing efficiency, but also reduces the cost of the enterprise; in addition, on the same laser processing equipment A plurality of light splitting devices are arranged, and the output light source of one of the optical path branches of the former light splitting device is used as the input light source of the latter light splitting device, forming a series connection of the light splitting devices. The same light source provides a plurality of optical path branches. The configuration of the laser processing device enables different processing devices to perform laser operations at different stations, effectively improving the processing efficiency of a laser processing equipment.

附图说明Description of drawings

为了更清楚地说明本发明实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其它的附图。In order to illustrate the technical solutions in the embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained from these drawings without any creative effort.

图1是本发明的激光加工设备的第一结构示意图;Fig. 1 is the first structural schematic diagram of the laser processing equipment of the present invention;

图2是本发明的激光加工设备的第二结构示意图;Fig. 2 is the second structural schematic diagram of the laser processing equipment of the present invention;

图3是本发明的激光加工设备的第三结构示意图;Fig. 3 is the third structural schematic diagram of the laser processing equipment of the present invention;

图4是本本发明的激光加工方法的方法流程图。FIG. 4 is a method flow chart of the laser processing method of the present invention.

说明书附图标记说明:Instructions for reference signs:

1、激光发射源;2、分光装置;3、光路支路;4、加工装置;5、控制装置;6、调光治具;7、衰减器;8、扩束镜;9、反射镜。1. Laser emission source; 2. Spectroscopic device; 3. Optical branch; 4. Processing device; 5. Control device; 6. Light adjustment fixture; 7. Attenuator; 8. Beam expander; 9. Reflector.

具体实施方式Detailed ways

为了使本申请的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本申请进行进一步详细说明。应当理解,此处描述的具体实施例仅仅用以解释本申请,并不用于限定本申请。In order to make the purpose, technical solutions and advantages of the present application more clearly understood, the present application will be described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, but not to limit the present application.

实施例一:Example 1:

本实施例的激光加工设备,参照图1~图3所示,图1为本发明的激光加工设备的第一结构示意图;图2是本发明的激光加工设备的第二结构示意图;图2是本发明的激光加工设备的第三结构示意图。1 to 3, FIG. 1 is a schematic diagram of the first structure of the laser processing equipment of the present invention; FIG. 2 is a schematic diagram of the second structure of the laser processing equipment of the present invention; A schematic diagram of the third structure of the laser processing equipment of the present invention.

激光加工设备包括激光发射源1,所述激光发射源1所发出的光源连接有分光装置2,所述激光发射源1所发出的光源输入分光装置2后输出两条光路支路3,所述分光装置2可滑移地安装在其两条光路支路3的相交处,所述分光装置2的滑移方向与所述激光发射源1所发出的光源进入所述分光装置2的入射方向相交设置,每条光路支路3均连接有加工装置4,且不同的光路支路3所连接的加工装置4的加工方式不同,不同规格的所述分光装置2可替换地设置在两条相交光路的相交处。The laser processing equipment includes a laser emitting source 1, the light source emitted by the laser emitting source 1 is connected to a spectroscopic device 2, and the light source emitted by the laser emitting source 1 is input into the spectroscopic device 2 and then outputs two optical path branches 3. The spectroscopic device 2 is slidably installed at the intersection of its two optical path branches 3 , and the sliding direction of the spectroscopic device 2 intersects with the incident direction of the light source emitted by the laser emitting source 1 entering the spectroscopic device 2 Setting, each optical path branch 3 is connected with a processing device 4, and the processing methods of the processing devices 4 connected to different optical path branches 3 are different, and the spectroscopic devices 2 of different specifications are alternatively arranged in two intersecting optical paths. the intersection.

现有技术的激光加工设备不能满足同时对工件进行不同加工方式的加工,基于此问题,本发明提出一种激光加工设备,该激光加工设备包括激光发射源1,激光发射源1用于提供进行激光加工操作的激光能量源。激光发射源1所发出的光源上连接有分光装置2,分光装置2用于将激光发射源1所发出的光源一分为二,形成两条光路支路3,每条光路支路3连接一个加工装置4,且不同的光路支路3连接的加工装置4的加工方式不同,例如,其中一个加工装置4采用物镜/切割头加工方式,另一个加工装置4采用激光振镜加工方式,这样不同光路支路3所连接的加工装置4可以同时对相同或不同的工件进行不同加工方式的加工,可以同时对相同或不同的工件进行打标和切割,即,可以对同一个工件同时进行打标和切割,或者,对其中一个工件进行打标,对另一个工件进行切割,打标与切割同时进行,有效的提高了同一个激光加工设备的激光加工效率,还降低了成本。分光装置2可滑移地安装在其两条光路支路3的相交处,因此当分光装置2移动至激光发射源1所发出的光源的光路上时,分光装置2参与工作,此时,激光发射源1所发出的光源输入分光装置2后一分为二,形成两个光路支路3,如图1所示;当分光装置2移动,使得分光装置2离开激光发射源1所发出的光源的光路时,分光装置2不参与工作,此时,激光发射源1所发出的光源直接输入至相应的光源支路,如图2所示。通过对分光装置2的移动便可以实现不同加工方式的切换,有效的提高了激光加工设备的加工效率。分光装置2具有不同的规格,不同规格的分光装置2所输出的光路支路3的功率不同。因此为了满足激光加工时不同加工功率的需求,可以根据实际加工需求来更换所需规格的分光装置2。例如,分光装置2所输出的光路支路3的功率比为3:7、4:6等,用户可以根据具体的实际加工需求来选择,可以针对不同的工件,选择合适的加工功率,提高加工质量。此外,分光装置2的滑移方向与激光发射源1所发出的光源进入分光装置2的入射方向相交设置,也就是分光装置2的滑移方向与激光发射源1所发出的光源进入分光装置2的入射方向不平行设置,这样才能保证分光装置2包括两个状态,即,分光装置2位于激光发射源1所发出的光源的光路上、分光装置2离开激光发射源1所发出的光源的光路。The laser processing equipment in the prior art cannot satisfy the simultaneous processing of workpieces in different processing methods. Based on this problem, the present invention proposes a laser processing equipment. The laser processing equipment includes a laser emission source 1, and the laser emission source 1 is used to provide Laser energy source for laser machining operations. The light source emitted by the laser emitting source 1 is connected with a spectroscopic device 2, and the spectroscopic device 2 is used to divide the light source emitted by the laser emitting source 1 into two to form two optical path branches 3, and each optical path branch 3 is connected to one The processing device 4, and the processing methods of the processing devices 4 connected with different optical path branches 3 are different, for example, one of the processing devices 4 adopts the objective lens/cutting head processing method, and the other processing device 4 adopts the laser galvanometer processing method, so different The processing device 4 connected to the optical path branch 3 can process the same or different workpieces in different processing methods at the same time, and can simultaneously mark and cut the same or different workpieces, that is, the same workpiece can be marked at the same time. and cutting, or, marking one workpiece and cutting the other workpiece, marking and cutting are carried out at the same time, which effectively improves the laser processing efficiency of the same laser processing equipment and reduces the cost. The spectroscopic device 2 is slidably installed at the intersection of its two optical path branches 3, so when the spectroscopic device 2 moves to the optical path of the light source emitted by the laser emission source 1, the spectroscopic device 2 participates in the work, at this time, the laser The light source emitted by the emission source 1 is input into the beam splitting device 2 and then divided into two to form two optical path branches 3, as shown in Figure 1; When the optical path is connected, the splitting device 2 does not participate in the work. At this time, the light source emitted by the laser emission source 1 is directly input to the corresponding light source branch, as shown in FIG. 2 . By moving the spectroscopic device 2, the switching of different processing modes can be realized, which effectively improves the processing efficiency of the laser processing equipment. The spectroscopic devices 2 have different specifications, and the powers of the optical branch 3 output by the spectroscopic devices 2 of different specifications are different. Therefore, in order to meet the requirements of different processing powers during laser processing, the spectroscopic device 2 of the required specification can be replaced according to the actual processing requirements. For example, the power ratio of the optical branch 3 output by the spectroscopic device 2 is 3:7, 4:6, etc. The user can choose according to the specific actual processing requirements, and can select the appropriate processing power for different workpieces to improve the processing power. quality. In addition, the sliding direction of the spectroscopic device 2 intersects with the incident direction of the light source emitted by the laser emitting source 1 entering the spectroscopic device 2 , that is, the sliding direction of the spectroscopic device 2 and the light source emitted by the laser emitting source 1 enter the spectroscopic device 2 . The incident directions of the laser beams are not set in parallel, so as to ensure that the spectroscopic device 2 includes two states, that is, the spectroscopic device 2 is located on the optical path of the light source emitted by the laser emission source 1, and the beam splitting device 2 is away from the optical path of the light source emitted by the laser emission source 1. .

在其中一个实施方式中,不同所述加工装置4的加工方式包括物镜/切割头加工方式、激光振镜加工方式。In one of the embodiments, different processing methods of the processing device 4 include an objective lens/cutting head processing method and a laser galvanometer processing method.

现有的激光加工方式主要包括两种,一种是对工件的切割,如物镜/切割头加工方式;另一种是对工件的雕刻,如激光振镜加工方式。为了保证两种加工方式并存的同时,还能够降低企业成本,将这两种激光加工方式集成到同一个加工设备上,通过对分光装置2的控制,便可以实现同时采用不同的加工方式对工件进行加工的功能,有效的提高了激光加工设备的加工效率,还降低了企业成本。The existing laser processing methods mainly include two types, one is the cutting of the workpiece, such as the objective lens/cutting head processing method; the other is the engraving of the workpiece, such as the laser galvanometer processing method. In order to ensure the coexistence of the two processing methods and also reduce the cost of the enterprise, the two laser processing methods are integrated into the same processing equipment. The function of processing can effectively improve the processing efficiency of laser processing equipment and reduce the cost of enterprises.

在其中一个实施方式中,所述激光发射源1所发出的光源至少连接有两个分光装置2,前一个所述分光装置2的其中一条光路支路3的输出光源作为后一个所述分光装置2的输入光源。In one embodiment, the light source emitted by the laser emitting source 1 is connected to at least two spectroscopic devices 2, and the output light source of one of the optical branch 3 of the former spectroscopic device 2 is used as the latter spectroscopic device 2 input light sources.

如图3所示,激光发射源1所发出的光源至少连接两个分光装置2,为了提高企业的产能,现有的激光加工设备的加工方法及加工模式已经无法满足厂商的需求,因此可以将加工工具在同一个加工设备上模块化和集成化,类似于自动化生产线上的加工设备,包括多个工位,每个工位设置一个加工装置4,实现流水线自动化作业;模块化指的是每个加工装置4是一个加工模块,集成化是指将多个加工模块集成到一个激光加工设备上。因此,同一个激光发射源1的光源依次经过多个分光装置2,且前一个分光装置2的其中一条光路支路3的输出光源作为后一个分光装置2的输入光源,依次连接,可以满足多个加工装置4的需求。并且考虑到同一个激光发射源1所发出的光源的激光功率经过多个分光装置2进行分光后激光功率会下降,因此对不同的工位可以配置不同的加工工序,有的加工工序所需要的激光加工功率较大,有的加工工序所需要的激光加工功率较小,可以根据具体的实际需求进行资源配置,以提高激光加工功率的利用率。As shown in Figure 3, the light source emitted by the laser emission source 1 is connected to at least two spectroscopic devices 2. In order to improve the production capacity of the enterprise, the existing processing methods and processing modes of the laser processing equipment have been unable to meet the needs of the manufacturer. The processing tools are modularized and integrated on the same processing equipment, similar to the processing equipment on the automatic production line, including multiple stations, each station is provided with a processing device 4 to realize the automatic operation of the assembly line; modularization refers to each station. Each processing device 4 is a processing module, and integration refers to integrating multiple processing modules into one laser processing device. Therefore, the light source of the same laser emitting source 1 passes through a plurality of spectroscopic devices 2 in sequence, and the output light source of one of the optical path branches 3 of the previous spectroscopic device 2 is used as the input light source of the next spectroscopic device 2, and they are connected in sequence, which can satisfy multiple requirements. The requirements of a processing device 4. And considering that the laser power of the light source emitted by the same laser emitting source 1 will drop after being split by multiple spectroscopic devices 2, different processing procedures can be configured for different stations, and some processing procedures require The laser processing power is relatively large, and the laser processing power required by some processing procedures is relatively small. The resource allocation can be carried out according to the specific actual needs to improve the utilization rate of the laser processing power.

在其中一个实施方式中,相邻两条所述光路支路3的相交处设置有移动机构,所述分光装置2采用分光镜,所述分光镜连接在所述移动机构上。In one of the embodiments, a moving mechanism is provided at the intersection of two adjacent optical path branches 3 , and the beam splitting device 2 adopts a beam splitter, and the beam splitter is connected to the moving mechanism.

分光装置2在实际应用场景中,要根据实际的场景需求来不断移动分光装置2,因此分光装置2需要一个移动机构,通过移动机构来实现对分光装置2的移动。因此,分光装置2可以直接连接在移动机构上,一般的,移动机构包括滑轨和滑块,滑轨固定在激光加工设备上,滑块可滑移地连接在滑轨上,滑块的动力源可以是电机驱动,或者是气缸驱动等,优选的,选择气功移动,可以将成本。气缸的活塞杆带动滑块移动,分光装置2连接在滑块上,滑块便会带动分光装置2移动,分光装置2便可以进入或者脱离激光发射源1所发出的光源的光路,以实现不同加工方式的切换。In the actual application scenario, the spectroscopic device 2 needs to be continuously moved according to the actual scene requirements. Therefore, the spectroscopic device 2 needs a moving mechanism, and the movement of the spectroscopic device 2 is realized by the moving mechanism. Therefore, the spectroscopic device 2 can be directly connected to the moving mechanism. Generally, the moving mechanism includes a sliding rail and a sliding block. The sliding rail is fixed on the laser processing equipment, and the sliding block is slidably connected to the sliding rail. The power of the sliding block The source can be driven by a motor, or driven by a cylinder, etc. Preferably, Qigong is selected to move, which can reduce the cost. The piston rod of the cylinder drives the slider to move, the beam splitter 2 is connected to the slider, the slider will drive the beam splitter 2 to move, and the beam splitter 2 can enter or leave the light path of the light source emitted by the laser emission source 1 to achieve different Switching of processing methods.

在其中一个实施方式中,还包括控制装置5,所述控制装置5与多个所述移动机构通信连接。In one of the embodiments, a control device 5 is further included, and the control device 5 is connected in communication with a plurality of the moving mechanisms.

当分光装置2设置有多个时,激光加工设备可以分出多条光路支路3,多条光路支路3可以连接不同工位的加工装置4,以实现多个加工装置4的流水线作业加工。而在实际需求场景中,需要根据实际的需求来设置哪些工位的加工装置4需要参与加工,哪些工位的加工装置4不需要参与加工,因此需要对多个分光装置2进行控制,以确定需要参与加工的分光装置2。激光加工设备还包括控制装置5,控制装置5与移动机构通信连接,因此通过控制装置5便可以来控制需要参与加工的分光装置2。在自动化生产线上,直接将激光加工设备集成到自动化生产线上,不同的加工装置4位于不同的工位上,提高了激光加工设备的通用性和加工效率。如图所示,可以任选其中1~4个分光装置2参与激光加工。When there are multiple beam splitting devices 2 , the laser processing equipment can be divided into multiple optical path branches 3 , and the multiple optical path branches 3 can be connected to the processing devices 4 at different stations, so as to realize the assembly line processing of the multiple processing devices 4 . In the actual demand scenario, it is necessary to set which stations of the processing devices 4 need to participate in the processing and which of the processing devices 4 do not need to participate in the processing according to the actual needs. Therefore, it is necessary to control multiple spectroscopic devices 2 to determine A spectroscopic device 2 involved in processing is required. The laser processing equipment further includes a control device 5, which is connected in communication with the moving mechanism, so that the spectroscopic device 2 that needs to be processed can be controlled by the control device 5. In the automated production line, the laser processing equipment is directly integrated into the automated production line, and different processing devices 4 are located on different workstations, which improves the versatility and processing efficiency of the laser processing equipment. As shown in the figure, one to four of the spectroscopic devices 2 can be selected to participate in the laser processing.

在其中一个实施方式中,所述分光装置2与加工装置4之间的光路上依次连接有调光治具6、衰减器7、扩束镜8和调光治具6。In one embodiment, a dimming fixture 6 , an attenuator 7 , a beam expander 8 and a dimming fixture 6 are sequentially connected on the optical path between the spectroscopic device 2 and the processing device 4 .

要想实现整个激光加工设备上光路的有效传播,需要在光路上进行相应的光路控制。分光装置2与加工装置4之间的光路上依次设置调光治具6、衰减器7、扩束镜8和调光治具6。调光治具6主要是起光路对准的作用,使得分光装置2的光路支路3与衰减器7的光路对准、使得扩束镜8的光路与加工工具的光路对准。衰减器7起到了功率衰减的作用,如图1所示,当分光装置2位于激光发射源1所发出的光源的光路上时,分光装置2参与激光加工,因此激光发射源1所发出的光源输入至分光装置2后形成两个光路支路3;当分光装置2离开激光发射源1所发出的光源的光路时,激光发射源1所发出的光源只会进入图右2侧光路支路3;为了满足两个光路支路3同时进行激光加工,而且还能够独立的进行激光加工,设置了衰减器7。在存在两条光路支路3的实际场景中,衰减器7可以将其中一个光路支路3的激光功率衰减至零,而使得其中一条光路支路3可以单独进行激光加工,其中一条光路支路3不参与激光加工。扩束镜8起调整光束直径的作用,以满足不同的加工精度。In order to realize the effective propagation of the optical path on the entire laser processing equipment, it is necessary to carry out corresponding optical path control on the optical path. A dimming fixture 6 , an attenuator 7 , a beam expander 8 and a dimming fixture 6 are sequentially arranged on the optical path between the spectroscopic device 2 and the processing device 4 . The dimming fixture 6 mainly plays the role of optical path alignment, so that the optical path branch 3 of the spectroscopic device 2 is aligned with the optical path of the attenuator 7, and the optical path of the beam expander 8 is aligned with the optical path of the processing tool. The attenuator 7 plays the role of power attenuation. As shown in FIG. 1 , when the beam splitting device 2 is located on the optical path of the light source emitted by the laser emission source 1, the beam splitting device 2 participates in the laser processing. Therefore, the light source emitted by the laser emission source 1 After input to the beam splitting device 2, two optical path branches 3 are formed; when the beam splitting device 2 leaves the optical path of the light source emitted by the laser emission source 1, the light source emitted by the laser emission source 1 will only enter the optical path branch 3 on the right side of the figure. ; In order to satisfy the simultaneous laser processing of the two optical path branches 3, and to be able to perform laser processing independently, an attenuator 7 is provided. In the actual scene where there are two optical path branches 3, the attenuator 7 can attenuate the laser power of one of the optical path branches 3 to zero, so that one of the optical path branches 3 can be individually laser processed, and one of the optical path branches 3 Not involved in laser processing. The beam expander 8 plays the role of adjusting the beam diameter to meet different machining precisions.

实施例二:Embodiment 2:

参照图4所示,图4为本发明的激光加工方法的方法流程图。Referring to FIG. 4 , FIG. 4 is a method flowchart of the laser processing method of the present invention.

基于激光加工设备的激光加工方法,借助于分光装置2的移动,实现采用不同加工方式的加工装置4同时对相同或不同的工件进行加工;以及对多个分光装置2的组合配置,实现多个加工装置4的组合加工。The laser processing method based on the laser processing equipment, by means of the movement of the spectroscopic device 2, realizes that the processing devices 4 using different processing methods simultaneously process the same or different workpieces; Combined machining of the machining device 4 .

所述激光加工方法包括:The laser processing method includes:

如图1所示,控制装置5控制分光装置2移动至激光发射源1所发出的光源的光路上,激光发射源1所发出的光源输入至分光装置2,形成两条光路支路3;As shown in FIG. 1 , the control device 5 controls the spectroscopic device 2 to move to the optical path of the light source emitted by the laser emitting source 1, and the light source emitted by the laser emitting source 1 is input to the spectroscopic device 2 to form two optical path branches 3;

不同的光路支路3所连接的不同的加工装置4分别采用不同的加工方式对相同或不同的工件同时进行加工。Different processing devices 4 connected to different optical path branches 3 respectively use different processing methods to simultaneously process the same or different workpieces.

如图1所示,包括激光发射源1、分光装置2(包含移动机构,图中未示出)、物镜/切割头加工方式的加工装置4、激光振镜加工方式的加工装置4、调光治具6、衰减器7、扩束镜8、反射镜9。按照实际光路需求将这些装置进行连接。此时的状态为分光装置2位于激光发射器所发出的光源的光路上。具体方法为:As shown in Figure 1, it includes a laser emission source 1, a beam splitting device 2 (including a moving mechanism, not shown in the figure), a processing device 4 for the processing of the objective lens/cutting head, a processing device 4 for the processing of a laser galvanometer, and a dimming device. Fixture 6, attenuator 7, beam expander 8, reflector 9. Connect these devices according to the actual optical path requirements. The state at this time is that the spectroscopic device 2 is located on the optical path of the light source emitted by the laser transmitter. The specific method is:

控制装置5与移动机构通信连接,控制装置5控制移动机构移动,使得移动机构带动分光装置2移动至激光发射源1所发出的光源的光路上,激光发射源1所发出的光源经过调光治具6输入至分光装置2,分光装置2将光源一分为二,形成两条光路支路3,如图1所示,左侧光路支路3和右侧光路支路3。左侧光路支路3依次经过调光治具6、衰减器7、扩束镜8、调光治具6,最终到达加工装置4,即,物镜/切割头加工方式的加工装置4。此时该加工装置4便可以执行切割方式的激光加工。同时,右侧光路支路3依次经过反射镜9、调光治具6、衰减器7、扩束镜8、调光治具6、反射镜9,最终到达加工装置4,即,激光振镜加工方式的加工装置4,此时该加工装置4便可以执行雕刻方式的激光加工。因此左右两侧的光路支路3可以同时执行激光加工,并且可以采用不同的激光加工方式对相同或者不同的工件进行激光加工。反射镜9主要起到改变光路的作用,可以根据实际需求设置需求数量的反射镜9,对光路进行变换。The control device 5 is connected in communication with the moving mechanism, and the control device 5 controls the movement of the moving mechanism, so that the moving mechanism drives the spectroscopic device 2 to move to the optical path of the light source emitted by the laser emission source 1, and the light source emitted by the laser emission source 1 undergoes dimming control. The device 6 is input to the light splitting device 2, and the light splitting device 2 divides the light source into two to form two optical path branches 3, as shown in FIG. 1, the left optical path branch 3 and the right optical path branch 3. The left optical path branch 3 passes through the dimming fixture 6, the attenuator 7, the beam expander 8, and the dimming fixture 6 in sequence, and finally reaches the processing device 4, that is, the processing device 4 in the objective lens/cutting head processing method. At this time, the processing device 4 can perform the laser processing of the cutting method. At the same time, the right optical path branch 3 passes through the reflector 9, the dimming fixture 6, the attenuator 7, the beam expander 8, the dimming fixture 6, and the reflector 9 in sequence, and finally reaches the processing device 4, that is, the laser galvanometer The processing device 4 in the processing mode, at this time, the processing device 4 can perform the laser processing in the engraving mode. Therefore, the optical path branches 3 on the left and right sides can perform laser processing at the same time, and different laser processing methods can be used to perform laser processing on the same or different workpieces. The reflecting mirror 9 mainly plays the role of changing the optical path, and a required number of reflecting mirrors 9 can be set according to actual requirements to transform the optical path.

此外,由于衰减器7的存在,衰减器7可以将其所在光路支路3的激光功率衰减至零。因此为了能够左右两侧光路支路3的加工装置4既可以同时工作,又可以分别独立的工作,设置衰减器7,左右两侧的光路支路3可以按最大功率进行激光加工,也可以在最大功率范围以内配合衰减器7进行不同功率下激光作业,当然也包括利用衰减器7将某个光路支路3的功率衰减至零,使得另一条光路支路3可以独立的进行激光作业。In addition, due to the existence of the attenuator 7, the attenuator 7 can attenuate the laser power of the optical branch 3 where the attenuator 7 is located to zero. Therefore, in order to enable the processing device 4 of the optical path branches 3 on the left and right sides to work at the same time or work independently, attenuators 7 are provided, and the optical path branches 3 on the left and right sides can be laser processed at the maximum power, or can be Within the maximum power range, the attenuator 7 is used to perform laser operations at different powers. Of course, it also includes using the attenuator 7 to attenuate the power of a certain optical branch 3 to zero, so that another optical branch 3 can independently perform laser operations.

如图2所示,此时的状态为分光装置2离开激光发射源1所发出的光源的光路。具体方法为:As shown in FIG. 2 , the state at this time is that the spectroscopic device 2 leaves the optical path of the light source emitted by the laser emission source 1 . The specific method is:

控制装置5控制分光装置2离开激光发射源1所发出的光源的光路,激光发射源1所发出的光源输入至相应的加工装置4,并采用与加工装置4相应的加工方式对工件进行加工。The control device 5 controls the beam splitting device 2 to leave the optical path of the light source emitted by the laser emission source 1 .

控制装置5与移动机构通信连接,控制装置5控制移动机构移动,使得移动机构带动分光装置2离开激光发射源1所发出的光源的光路,激光发射源1所发出的光源直接到达反射镜9,依次经过调光治具6、衰减器7、扩束镜8、调光治具6、反射镜9,最终到达加工装置4,即,激光振镜加工方式的加工装置4,此时该加工装置4便可以执行雕刻方式的激光加工。而此时的光路支路3的功率相对较大,因此该光路支路3可以加工功率需求高的产品,而经过分光装置2进行分光的光路支路3的功率相对较小,可以加工功率需求低的产品。The control device 5 is connected in communication with the moving mechanism, and the control device 5 controls the movement of the moving mechanism, so that the moving mechanism drives the spectroscopic device 2 to leave the optical path of the light source emitted by the laser emission source 1, and the light source emitted by the laser emission source 1 directly reaches the reflector 9, After passing through the dimming fixture 6, the attenuator 7, the beam expander 8, the dimming fixture 6, and the reflector 9 in sequence, it finally reaches the processing device 4, that is, the processing device 4 of the laser galvanometer processing method. At this time, the processing device 4 can perform engraving laser processing. At this time, the power of the optical path branch 3 is relatively large, so the optical path branch 3 can process products with high power requirements, while the power of the optical path branch 3 that is split by the optical splitting device 2 is relatively small, which can process power requirements. low product.

如图3所示,激光加工设备的光路上可以设置多个分光装置2,具体实施方法如下:As shown in Figure 3, a plurality of beam splitting devices 2 can be set on the optical path of the laser processing equipment, and the specific implementation method is as follows:

在其中一个实施方式中,所述激光加工方法所采用的激光加工设备包括多个分光装置2,所述激光加工方法还包括:In one of the embodiments, the laser processing equipment used in the laser processing method includes a plurality of spectroscopic devices 2, and the laser processing method further includes:

控制装置5对多个分光装置2进行控制,使得不同的加工装置4在不同的工位参与激光加工。The control device 5 controls the plurality of spectroscopic devices 2 so that different processing devices 4 participate in laser processing at different stations.

控制装置5与移动机构通信连接,控制装置5便可以控制移动机构进行滑移,移动机构会带动分光装置2进行滑移,因此通过控制装置5可以间接地控制分光装置2的滑移动作。控制装置5对多个分光装置2进行控制,以控制具体参与激光加工的分光装置2。不同的分光装置2连接不同的加工装置4,不同的加工装置4置于不同的工位,通过控制装置5可以控制不同的分光装置2位于激光发射器所发出的光源的光路上,与分光装置2相对应的加工装置4便可以参与到激光作业中,位于不同工位的加工装置4便可以完成相应的加工动作,实现流水线激光加工作业。The control device 5 is connected in communication with the moving mechanism, the control device 5 can control the moving mechanism to slide, and the moving mechanism drives the spectroscopic device 2 to slide, so the sliding action of the spectroscopic device 2 can be indirectly controlled by the control device 5 . The control device 5 controls the plurality of spectroscopic devices 2 to control the spectroscopic device 2 specifically involved in laser processing. Different spectroscopic devices 2 are connected to different processing devices 4, and different processing devices 4 are placed in different workstations. Through the control device 5, different spectroscopic devices 2 can be controlled to be located on the optical path of the light source emitted by the laser transmitter. 2. The corresponding processing devices 4 can participate in the laser operation, and the processing devices 4 located in different stations can complete the corresponding processing actions to realize the pipeline laser processing operation.

在其中一个实施方式中,所述激光加工方法,还包括:In one embodiment, the laser processing method further comprises:

更换不同规格的分光装置2,以改变不同光路支路3的加工功率。Replace the spectroscopic device 2 with different specifications to change the processing power of the different optical path branches 3 .

分光装置2具有不同的规格,不同规格的分光装置2所输出的光路支路3的功率不同。因此为了满足激光加工时不同加工功率的需求,可以根据实际加工需求来更换所需规格的分光装置2。例如,分光装置2所输出的光路支路3的功率比为3:7、4:6等,用户可以根据具体的实际加工需求来选择,可以针对不同的工件,选择合适的加工功率,提高加工质量。通过更换不同规格的分光装置2,以实现改变不同光路支路3的加工功率。分光装置2决定了通过分光装置2的光路支路3的最大功率。The spectroscopic devices 2 have different specifications, and the powers of the optical branch 3 output by the spectroscopic devices 2 of different specifications are different. Therefore, in order to meet the requirements of different processing powers during laser processing, the spectroscopic device 2 of the required specification can be replaced according to the actual processing requirements. For example, the power ratio of the optical branch 3 output by the spectroscopic device 2 is 3:7, 4:6, etc. The user can choose according to the specific actual processing requirements, and can select the appropriate processing power for different workpieces to improve the processing power. quality. By replacing the spectroscopic device 2 with different specifications, the processing power of the different optical path branches 3 can be changed. The beam splitter 2 determines the maximum power of the optical branch 3 passing through the beam splitter 2 .

在其中一个实施方式中,所述激光加工方法,还包括:In one embodiment, the laser processing method further comprises:

调整衰减器7的参数,以改变不同光路支路3的加工功率。Adjust the parameters of the attenuator 7 to change the processing power of the different optical branch 3 .

控制装置5控制分光装置2移动至激光发射源1所发出的光源的光路上,激光发射源1所发出的光源输入至分光装置2,形成两条光路支路3时,可以调整衰减器7的参数,以改变不同光路支路3的加工功率。由于衰减器7的存在,衰减器7可以将其所在光路支路3的激光功率衰减至零。因此为了能够左右两侧光路支路3的加工装置4既可以同时工作,又可以分别独立的工作,设置衰减器7,左右两侧的光路支路3可以按最大功率进行激光加工,也可以在最大功率范围以内配合衰减器7进行不同功率下激光作业,当然也包括利用衰减器7将某个光路支路3的功率衰减至零,使得另一条光路支路3可以独立的进行激光作业。The control device 5 controls the spectroscopic device 2 to move to the optical path of the light source emitted by the laser emitting source 1, and the light source emitted by the laser emitting source 1 is input to the spectroscopic device 2, and when two optical path branches 3 are formed, the attenuator 7 can be adjusted. parameters to change the processing power of different optical path branches 3. Due to the existence of the attenuator 7, the attenuator 7 can attenuate the laser power of the optical branch 3 where the attenuator 7 is located to zero. Therefore, in order to enable the processing device 4 of the optical path branches 3 on the left and right sides to work at the same time or work independently, attenuators 7 are provided, and the optical path branches 3 on the left and right sides can be laser processed at the maximum power, or can be Within the maximum power range, the attenuator 7 is used to perform laser operations at different powers. Of course, it also includes using the attenuator 7 to attenuate the power of a certain optical branch 3 to zero, so that another optical branch 3 can independently perform laser operations.

应该理解的是,虽然图4的流程图中的各个步骤按照箭头的指示依次显示,但是这些步骤并不是必然按照箭头指示的顺序依次执行。除非本文中有明确的说明,这些步骤的执行并没有严格的顺序限制,这些步骤可以以其它的顺序执行。而且,图4中的至少一部分步骤可以包括多个子步骤或者多个阶段,这些子步骤或者阶段并不必然是在同一时刻执行完成,而是可以在不同的时刻执行,这些子步骤或者阶段的执行顺序也不必然是依次进行,而是可以与其它步骤或者其它步骤的子步骤或者阶段的至少一部分轮流或者交替地执行。It should be understood that although the various steps in the flowchart of FIG. 4 are sequentially displayed according to the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated herein, the execution of these steps is not strictly limited to the order, and these steps may be performed in other orders. Moreover, at least a part of the steps in FIG. 4 may include multiple sub-steps or multiple stages. These sub-steps or stages are not necessarily executed and completed at the same time, but may be executed at different times. The execution of these sub-steps or stages The sequence is also not necessarily sequential, but may be performed alternately or alternately with other steps or sub-steps of other steps or at least a portion of a phase.

以上实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。The technical features of the above embodiments can be combined arbitrarily. In order to make the description simple, all possible combinations of the technical features in the above embodiments are not described. However, as long as there is no contradiction in the combination of these technical features It is considered to be the range described in this specification.

以上所述实施例仅表达了本申请的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对发明专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本申请构思的前提下,还可以做出若干变形和改进,这些都属于本申请的保护范围。因此,本申请专利的保护范围应以所附权利要求为准。The above-mentioned embodiments only represent several embodiments of the present application, and the descriptions thereof are specific and detailed, but should not be construed as a limitation on the scope of the invention patent. It should be pointed out that for those skilled in the art, without departing from the concept of the present application, several modifications and improvements can be made, which all belong to the protection scope of the present application. Therefore, the scope of protection of the patent of the present application shall be subject to the appended claims.

Claims (10)

1. The laser processing equipment is characterized by comprising a laser emission source (1), wherein a light source emitted by the laser emission source (1) is connected with a light splitting device (2), a light source emitted by the laser emission source (1) is input into the light splitting device (2) and then outputs two light path branches (3), the light splitting device (2) is arranged at the intersection of two light path branches (3) thereof in a sliding way, the sliding direction of the light splitting device (2) is intersected with the incident direction of a light source emitted by the laser emission source (1) entering the light splitting device (2), each light path branch (3) is connected with a processing device (4), and the processing modes of the processing devices (4) connected with different light path branches (3) are different, and the light splitting devices (2) with different specifications can be arranged at the intersection of two intersecting light paths in a replaceable manner.
2. The laser processing apparatus according to claim 1, wherein the processing modes of the different processing devices (4) comprise an objective/cutting head processing mode and a laser galvanometer processing mode.
3. The laser processing apparatus according to claim 2, wherein the light source emitted by the laser emission source (1) is connected with at least two light splitting devices (2), and the output light source of one of the optical path branches (3) of the former light splitting device (2) is used as the input light source of the latter light splitting device (2).
4. The laser processing equipment according to any one of claims 1 to 3, wherein a moving mechanism is arranged at the intersection of two adjacent light path branches (3), and the light splitting device (2) adopts a light splitting mirror connected to the moving mechanism.
5. The laser machining apparatus according to claim 4, further comprising a control device (5), the control device (5) being communicatively connected to a plurality of the moving mechanisms.
6. The laser processing apparatus according to claim 1, wherein a dimming jig (6), an attenuator (7), a beam expander (8) and a dimming jig (6) are connected in sequence on the light path between the light splitting device (2) and the processing device (4).
7. A laser processing method using the laser processing apparatus according to any one of claims 1 to 6, characterized by comprising:
the control device (5) controls the light splitting device (2) to move to a light path of a light source emitted by the laser emission source (1), and the light source emitted by the laser emission source (1) is input into the light splitting device (2) to form two light path branches (3);
different processing devices (4) connected with different light path branches (3) respectively adopt different processing modes to simultaneously process the same or different workpieces;
the control device (5) controls the light splitting device (2) to leave the light path of the light source emitted by the laser emission source (1), the light source emitted by the laser emission source (1) is input into the corresponding processing device (4), and the workpiece is processed by adopting a processing mode corresponding to the processing device (4).
8. The laser processing method according to claim 7, wherein the laser processing apparatus used in the laser processing method includes a plurality of beam splitters (2), and the laser processing method further includes:
the control device (5) controls the plurality of light splitting devices (2) so that different processing devices (4) participate in laser processing at different stations.
9. The laser processing method according to claim 7, further comprising:
and replacing the light splitting devices (2) with different specifications to change the processing power of different light path branches (3).
10. The laser processing method according to claim 9, further comprising:
and adjusting parameters of the attenuator (7) to change the processing power of different optical path branches (3).
CN202210608261.6A 2022-05-31 2022-05-31 Laser processing apparatus and method Pending CN114951975A (en)

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Application publication date: 20220830