CN114813023B - Equipment and method for detecting flow resistance of shower plate - Google Patents
Equipment and method for detecting flow resistance of shower plate Download PDFInfo
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- CN114813023B CN114813023B CN202210604319.XA CN202210604319A CN114813023B CN 114813023 B CN114813023 B CN 114813023B CN 202210604319 A CN202210604319 A CN 202210604319A CN 114813023 B CN114813023 B CN 114813023B
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- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000001514 detection method Methods 0.000 claims abstract description 226
- 239000007921 spray Substances 0.000 claims abstract description 93
- 239000007789 gas Substances 0.000 claims description 56
- 238000005507 spraying Methods 0.000 claims description 19
- 238000000605 extraction Methods 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 13
- 238000007789 sealing Methods 0.000 claims description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 239000011261 inert gas Substances 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- 229910052743 krypton Inorganic materials 0.000 claims description 3
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052754 neon Inorganic materials 0.000 claims description 3
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 abstract description 8
- 238000004891 communication Methods 0.000 description 13
- 238000005137 deposition process Methods 0.000 description 6
- 238000005086 pumping Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 238000012216 screening Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M9/00—Aerodynamic testing; Arrangements in or on wind tunnels
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M9/00—Aerodynamic testing; Arrangements in or on wind tunnels
- G01M9/06—Measuring arrangements specially adapted for aerodynamic testing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M9/00—Aerodynamic testing; Arrangements in or on wind tunnels
- G01M9/08—Aerodynamic models
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Abstract
The application provides equipment and a detection method for detecting flow resistance of a spray plate, and relates to the technical field of semiconductors; the method comprises the following steps of S1: placing the spray plate into a detection chamber having a detection chamber; the detection chamber comprises a first detection chamber and a second detection chamber which are respectively positioned at two sides of the spray plate; s2: introducing gas into the first detection chamber and extracting gas from the second detection chamber; gas passes through the shower plate from the first detection chamber into the second detection chamber; s3: when the air pressure in the second detection cavity is stable, acquiring an air pressure value Q1 in the first detection cavity; s4: changing the spray plates, repeating S1-S3, and obtaining the air pressure value Q1 in the first detection cavity corresponding to different spray plates; s5: and selecting a spray plate with the same Q1 value. The application discloses a device for detecting flow resistance of a shower plate. The present application improves the problem of the prior art lacking a flow resistance detection method for selecting a shower plate with equivalent flow resistance.
Description
Technical Field
The application relates to the technical field of semiconductors, in particular to equipment and a detection method for detecting flow resistance of a shower plate.
Background
In the deposition reaction of semiconductor equipment, the spray plate is an important structural member affecting the process effect, and when the spray plate is subjected to factory inspection, an inspection deviation exists in manufacturers, so that after reaction gas reaches the process chamber through the spray heads, the repeatability and the stability of the cavity deposition process can be affected by the aperture size and depth errors of different spray heads, and the quality of products is further affected. In practical production, in some semiconductor devices, two chambers commonly share a vacuum system, so the showerhead is a determining factor that affects the difference of deposition processes between chambers based on the same vacuum environment, and thus a method for detecting the flow resistance of the shower plate is needed to eliminate the process difference.
Disclosure of Invention
The object of the present application is to provide a method for detecting the flow resistance of a shower plate, which solves the problem of the prior art lacking a flow resistance detection method for selecting a shower plate with equal flow resistance.
It is a further object of the present application to provide an apparatus for detecting the flow resistance of a shower plate.
Based on the technical problems, the application provides a method for detecting flow resistance of a shower plate, which comprises the following steps:
s1: placing the spray plate into a detection chamber having a detection chamber; the detection chamber comprises a first detection chamber and a second detection chamber which are respectively positioned at two sides of the spray plate;
s2: introducing gas into the first detection chamber and extracting gas from the second detection chamber; gas passes through the shower plate from the first detection chamber into the second detection chamber;
s3: when the air pressure in the second detection cavity is stable, acquiring an air pressure value Q1 in the first detection cavity;
s4: changing the spray plates, repeating S1-S3, and obtaining the air pressure value Q1 in the first detection cavity corresponding to different spray plates;
S5: selecting a spraying plate with the same value of Q1;
Wherein the value of Q1 of the spray plates is equal to the difference of the values of Q1 corresponding to the two identical spray plates, and the difference is not more than 0.1% of the value of Q1 with larger value.
Further, in some embodiments of the present application, the gas is selected from at least one of a shielding gas, an inert gas;
The protective gas is nitrogen; and/or
The inert gas is any one of helium, neon, argon and krypton.
Further, in some embodiments of the application, the flow rate of the gas entering the first detection chamber is 1000SCCM-10000SCCM; and/or
The gas pressure in the second detection chamber is 1-10Torr.
Further, in some embodiments of the application, the detection chamber is in a vacuum state in the non-detection state.
The application also discloses a method for detecting the flow resistance of the spray plate, which comprises the following steps:
s1: placing the spray plate into a detection chamber having a detection chamber; the detection chamber comprises a first detection chamber and a second detection chamber which are respectively positioned at two sides of the spray plate;
s2: introducing gas into the first detection chamber and extracting gas from the second detection chamber; gas passes through the shower plate from the first detection chamber into the second detection chamber;
S3: when the air pressure in the first detection cavity is stable, acquiring an air pressure value Q2 in the second detection cavity;
S4: changing the spray plates, repeating the steps S1-S3, and obtaining the air pressure value Q2 in the second detection cavity corresponding to different spray plates;
S5: selecting a spraying plate with the same Q2 value;
wherein, the value of Q2 of the spray plates is equal to the difference value of the values of Q2 corresponding to the two spray plates, and the value of Q2 with a larger value is not more than 0.1 percent.
The application also discloses a device for detecting the flow resistance of the spray plate, which comprises:
Detection room: the detection chamber is provided with a detection chamber; the two sides of the detection chamber are respectively provided with an air inlet and an air outlet which are communicated with the detection chamber;
an air inlet system: the air inlet system is communicated with the air inlet and is used for introducing air into the detection chamber;
and (3) an air extraction system: the air extraction system is communicated with the air outlet and is used for extracting air from the detection chamber; and
Air pressure detecting device: the air pressure detection device comprises a first air pressure detection device and a second air pressure detection device, and the first air pressure detection device and the second air pressure detection device are respectively used for detecting air pressure at two sides of the spray plate;
wherein, the air inlet system and/or the air extraction system is provided with a regulating valve for regulating the gas flow.
Further, in some embodiments of the present application, an object for mounting a shower plate is disposed in the detection chamber;
a through hole is arranged in the middle of the object; the size of the through hole is smaller than the size of the spraying plate and larger than the size of the area distributed by the spraying holes of the spraying plate;
The object is connected with the inner surface of the detection chamber in a sealing way.
Further, in some embodiments of the application, the air intake system includes an air intake duct;
An air inlet channel is arranged on the air inlet;
the air inlet pipeline is communicated with the air inlet through an air inlet channel.
Further, in some embodiments of the application, the pumping system includes a pumping duct, a bypass branch duct, and a pump structure;
One end of the air exhaust pipeline is communicated with the air outlet the other end is communicated with the pump structure;
One end of the bypass branch pipeline is communicated with one end of the air exhaust pipeline connected with the air outlet the other end is communicated with one end of the air exhaust pipeline connected with the pump structure; the bypass branch pipe is provided with a pneumatic valve.
Further, in some embodiments of the application, the detection chamber is further provided with heating means for heating the shower plate.
The application provides a method for detecting flow resistance of a spray plate, which utilizes a measured value of air pressure to replace the flow resistance of the spray plate, under the condition that the air pressure on one side of the spray plate is stable, the air pressure on the other side of the spray plate is measured, and the air pressure values on two sides of two spray plates are compared, so that whether the flow resistance of the two spray plates is the same can be known, and further the screening of the spray plates is realized. The flow resistance detection method of the spray plate has simple steps, short detection time and no damage to the spray plate, can quickly and conveniently solve the problems of product performance stability and process repeatability caused by different flow resistances of the spray plate in the equipment of the existing semiconductor deposition process, and improves the consistency of product performance.
The application provides equipment for detecting flow resistance of a spray plate, which controls air flow by using an air extraction system and an air inlet system, and air pressure detection devices for detecting air pressure at two sides of the spray plate are arranged at two sides of the spray plate.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present application, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural view of an apparatus for detecting flow resistance of a shower plate according to some embodiments of the present application.
Description of main reference numerals:
1-detection chamber, 2-first vacuum gauge, 3-second vacuum gauge, 4-air inlet pipeline, 5-pipeline, 6-first communication hole, 7-second communication hole, 8-shower plate, 9-air exhaust pipeline, 10-pump structure, 11-control valve, 12-ceramic seat, 13-heating plate.
Detailed Description
The technical solutions of the present application will be clearly and completely described in connection with the embodiments, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
The technical solutions of the present application will be clearly and completely described in connection with the embodiments, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
The following disclosure provides many different embodiments, or examples, for implementing different features of the application. In order to simplify the present disclosure, components and arrangements of specific examples are described below. They are, of course, merely examples and are not intended to limit the application. Furthermore, the present application may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not themselves indicate the relationship between the various embodiments and/or arrangements discussed. In addition, the present application provides examples of various specific materials, but one of ordinary skill in the art will recognize the application of other processes and/or the use of other materials.
Based on the above technical problem, the present application provides an apparatus for detecting flow resistance of a shower plate, referring to fig. 1, including:
Detection room: the detection chamber is provided with a detection chamber 1; the two sides of the detection chamber are respectively provided with an air inlet and an air outlet which are communicated with the detection chamber 1;
an air inlet system: the air inlet system is communicated with the air inlet and is used for introducing air into the detection chamber 1;
And (3) an air extraction system: the air extraction system is communicated with the air outlet and is used for extracting air from the detection chamber 1; and
Air pressure detecting device: the air pressure detection device comprises a first air pressure detection device and a second air pressure detection device, and the first air pressure detection device and the second air pressure detection device are respectively used for detecting the air pressure at two sides of the spray plate 8;
wherein, the air inlet system and/or the air extraction system is provided with a regulating valve for regulating the gas flow.
When the spray plate 8 is detected, the spray plate 8 is fixed in the detection chamber 1 of the detection chamber, so that the detection chamber 1 is divided into a first detection chamber and a second detection chamber by the spray plate 8, the air inlet and the air outlet are respectively positioned in the first detection chamber and the second detection chamber, and the first gas detection device and the second gas detection device are respectively used for detecting the gas pressure of the first detection chamber and the second detection chamber. When the spray plate 8 is fixed in the detection chamber, the connection part between the spray plate 8 and the inner wall of the detection chamber is in sealing connection with the inner wall of the detection chamber, so that gas can only flow between the first detection chamber and the second detection chamber through the spray holes on the spray plate 8. It should be noted that, the adjusting valve arranged on the air inlet system and/or the air exhaust system is used for adjusting the air pressure in the first detection chamber or the second detection chamber, so that the air pressure is stable, and the air pressure value in the other detection chamber 1 can be directly measured, so that whether the flow resistances of the two spraying plates 8 are equal can be obtained, and therefore, the spraying plates 8 with equal outflow resistances are screened, the adjusting valve is used for selecting the spraying plates 8 of the semiconductor deposition equipment, the difference of the semiconductor deposition process caused by different flow resistances of the spraying plates 8 is reduced, the stability and the repeatability of the deposition process are further improved, and the consistency of the product quality is improved. In addition, since the flow resistance of the shower plate 8 is measured by using gas as a fluid, it has no influence on the shower plate 8 to be detected, and the shower plate 8 after detection can be directly and rapidly used for a semiconductor deposition process without any damage.
Meanwhile, as the flow resistance detection equipment provided by the technical scheme is used for screening the spray plates 8 with equal flow resistance, the air pressure on one side of the spray plates 8 is only required to be stabilized, the air pressure value on the other side of the spray plates 8 is obtained, the flow resistance of the spray plates 8 is not required to be calculated according to the air pressure, the flow resistance detection step of the spray plates 8 is simplified, the calculation process is omitted, and the detection efficiency is improved. In addition, by stabilizing the air pressure value at one side of the spray plate 8 and comparing only the air pressure value at the other side of the spray plate 8, the variation can be greatly reduced, and the accuracy of the result can be improved.
In some embodiments, a seal is provided on the inner side wall of the detection chamber, and the shower plate 8 is in sealing connection with the inner side wall of the detection chamber by the seal. In some embodiments, the seal may be a sealing ring.
In some embodiments, the first air pressure detecting device and the second air pressure detecting device can independently select commercially available devices which can be used for measuring the air pressure and the vacuum degree, such as a vacuum gauge and an air pressure sensor; preferably a vacuum gauge.
In some embodiments, an object for mounting the shower plate 8 is arranged in the detection chamber;
A through hole is arranged in the middle of the object; the size of the through holes is smaller than the size of the spray plate 8 and larger than the size of the area where the spray holes of the spray plate 8 are distributed, so that the spray holes are not shielded;
The object is connected with the inner surface of the detection chamber in a sealing way.
When the spray plate 8 is detected, the spray plate 8 is fixed on the object, and the distributed areas of the spray holes correspond to the through holes, so that the spray holes are not shielded. The shower plate 8 and the object are arranged to divide the detection chamber 1 of the detection chamber into a first detection chamber and a second detection chamber.
In some embodiments, the periphery of the object is fixed on the inner side wall of the detection chamber and is in sealing connection with the inner side wall of the detection chamber.
In some embodiments, the placement object is a U-shaped piece with a through hole on the bottom surface or the top surface, which is fixed on the top surface or the bottom surface of the detection chamber and is in sealing connection with the top surface or the bottom surface of the detection chamber.
The shower plate 8 is hermetically connected to the object.
In some embodiments, the surface of the object is provided with a seal, by means of which the shower plate 8 is in sealing connection with the object. In some embodiments, the seal may be a sealing ring.
In some embodiments, the air intake system comprises an air intake conduit 4;
An air inlet channel is arranged on the air inlet;
the intake duct 4 communicates with the intake port through an intake passage.
It should be noted that, the internal diameter of the air inlet channel is greater than the internal diameter of the air inlet pipeline 4 and is less than or equal to the diameter of the air inlet, meanwhile, the air inlet channel has a certain height, the vertical height of the gas vertically blowing into the detection chamber 1 is increased, the gas injected into the detection chamber 1 is in stepped diffusion, the pressure distribution of gas impulse and gas impact is adjusted, the gas is distributed uniformly on one side of the spraying plate 8 far away from the air inlet channel as far as possible, and the phenomenon that the gas is distributed unevenly on one side of the spraying plate 8 far away from the air inlet channel because the air inlet pipeline 4 is too close to the spraying plate 8 and the gas impulse is larger is avoided, so that the pressure in the second detection chamber is unstable and the detection result is affected.
In some embodiments, the inlet channel has an inner diameter of 10-30 cm and a height of 10-30 cm, preferably a circular inlet channel with an inner diameter of 16cm and a height of 16 cm.
In some embodiments, the intake passage is a ceramic base 12.
In some embodiments, the air intake system comprises an air intake conduit 4 in communication with the air intake; wherein the gas inlet pipe 4 is provided with a flow meter for detecting the flow rate of the gas. The flowmeter may be a commercially available Mass Flow Controller (MFC).
In some embodiments, the air inlet pipe 4 is further provided with a control valve 11 for controlling the air flow and thus the air pressure in the first detection chamber, so that the air pressure in the first detection chamber is stabilized, and thus the measurement of the data required for detecting the flow resistance of the shower plate 8 can be achieved by measuring the air pressure in the second detection chamber.
In some embodiments, the pumping system comprises a pumping duct 9 and a pump structure 10; one end of the air extraction pipeline 9 is communicated with the air outlet, the other end of the air extraction pipeline is communicated with the pump structure 10, and the air in the detection chamber 1 is extracted through the pump structure 10.
In some embodiments, the air extraction pipeline 9 is further provided with a control valve 11 for controlling the air flow rate and thus the air pressure in the second detection chamber, so that the air pressure in the second detection chamber is stable, and the measurement of data required for detecting the flow resistance of the spray plate 8 can be realized by measuring the air pressure of the first detection chamber.
In some embodiments, the gas extraction system further comprises a bypass branch conduit;
One end of the bypass branch pipeline is communicated with one end of the air exhaust pipeline 9 connected with the air outlet, and the other end of the bypass branch pipeline is communicated with one end of the air exhaust pipeline 9 connected with the pump structure 10; the bypass branch pipe is provided with a pneumatic valve, so that the air pressure control in the cavity 1 is conveniently detected, and the operation safety of the equipment is improved.
In some embodiments, the pump structure 10 is a commercially available pump.
In some embodiments, the detection chamber is further provided with a heating device for heating the shower plate 8, so that the shower plate 8 can be heated to a working temperature, air pressure data corresponding to the flow resistance of the shower plate 8 is measured at the working temperature, the influence of the temperature on the flow resistance detection result of the shower plate 8 is reduced, and the accuracy of the detection result is improved. This is because, when the shower plate 8 is used, in a chamber of a Chemical Vapor Deposition (CVD) apparatus, the heating plate 13 is set at a temperature, for example, a temperature commonly used in a Plasma Enhanced Chemical Vapor Deposition (PECVD) method is 400 ℃, at which the shower plate 8 is subjected to heat radiation from the heating plate 13, the temperature is also increased, so that the shower plate 8 has a thermal expansion phenomenon, and the aperture of the shower plate 8 is also reduced, which affects the accuracy of flow resistance detection. Therefore, when the scheme is adopted for detection, the bottom substrate needs to be subjected to heating treatment, so that more accurate detection is achieved.
In some embodiments, the heating device may be a commercially available electrical heating device.
In some embodiments, the bottom surface of the detection chamber is provided with a heating plate 13 to heat the shower plate 8 during detection.
In some embodiments, the control valve 11 may be selected from commercially available gate valves and temperature control valves for controlling the pressure and temperature of the gas in the detection chamber 1 so that it satisfies the detection conditions.
In some embodiments, the air inlet is opposite to the spraying holes of the spraying plate 8, so that the uniformity of air inlet is ensured, and the influence on the detection accuracy is avoided.
In some embodiments, the first communication hole 6 for detection of the first air pressure detecting device is provided on the inner wall of the detection chamber provided air inlet; the second communication hole 7 for detection of the second air pressure detecting means is provided on the inner wall of the detection chamber provided with the air outlet. Preferably, the first communication hole 6 of the first air pressure detecting device and the second communication hole 7 of the second air pressure detecting device are provided vertically correspondingly. This is because the first communication hole 6 of the first air pressure detecting device is provided above the shower plate 8, and the detection result of the first air pressure detecting device is high due to the influence of the flow resistance of the shower plate 8, and the second communication hole 7 of the second air pressure detecting device is provided below the shower plate 8 near the air outlet, and the detection result of the second air pressure detecting device is low, so that the first communication hole 6 of the first air pressure detecting device and the second communication hole 7 of the second air pressure detecting device are correspondingly provided on the top surface near the air inlet and the bottom surface near the air outlet, respectively, to ensure the accuracy of the detection result.
In this embodiment, the first air pressure detecting device and the second air pressure detecting device are vacuum gauge respectively, wherein the first air pressure detecting device is a first vacuum gauge 2, and the second air pressure detecting device is a second vacuum gauge 3. The first vacuum gauge 2 is communicated with the first communication hole 6 through a pipeline 5, and then is communicated with the first detection chamber, and the air pressure of the first detection chamber is measured; the second vacuum gauge 3 is communicated with the second communication hole 7 through a pipeline, and then is communicated with the second detection chamber, and the air pressure of the second detection chamber is measured.
The application also provides a method for detecting the flow resistance of the shower plate 8, which comprises the following steps:
S1: placing the shower plate 8 into a detection chamber having a detection chamber 1; the detection chamber 1 comprises a first detection chamber and a second detection chamber which are respectively positioned at two sides of the spray plate 8;
S2: introducing gas into the first detection chamber and extracting gas from the second detection chamber; gas passes from the first detection chamber through the shower plate 8 into the second detection chamber;
s3: when the air pressure in the second detection cavity is stable, acquiring an air pressure value Q1 in the first detection cavity;
s4: changing the spray plate 8, repeating S1-S3, and obtaining the air pressure value Q1 in the first detection chamber corresponding to different spray plates 8;
s5: selecting a spray plate 8 with the same value of Q1;
Wherein, the value of Q1 of the spray plates 8 is equal to the value of Q1 corresponding to the two identical spray plates 8, and the difference of the value of Q1 with larger value is not more than 0.1 percent.
In the application, the first detection chamber is formed by enclosing the structural surface of the spray plate 8 and the inner surface of the detection chamber, or the structural surface of the spray plate 8, the surface for placing objects and the inner surface of the detection chamber, so that the gas is uniformly dispersed on the surface of the spray plate 8 after being injected into the first detection chamber, and then enters the second detection chamber through the spray holes, thereby being beneficial to the detection accuracy.
In some embodiments, the gas is selected from at least one of a shielding gas, an inert gas;
The protective gas is nitrogen; and/or
The inert gas is any one of helium, neon, argon and krypton.
Preferably, the gas is selected from nitrogen or argon, which are relatively common gases in CVD reactions, which reduces costs and makes the detection process safer.
In some embodiments, the flow rate of the gas into the first detection chamber is 1000SCCM-10000SCCM; and/or
The air pressure value of the second detection chamber is 1-10Torr, and the flow and air pressure value are relatively close to the working flow and air pressure of the spray plate 8, so that the detection error can be further reduced, and the accuracy of the detection result is improved.
In some embodiments, the gas pressure value of the second detection chamber is controlled within a range of 3 Torr.+ -. 0.01 Torr.
In some embodiments, the detection chamber is in a vacuum state in the non-detection state.
The application also discloses a method for detecting the flow resistance of the spray plate 8, which comprises the following steps:
S1: placing the shower plate 8 into a detection chamber having a detection chamber 1; the detection chamber 1 comprises a first detection chamber and a second detection chamber which are respectively positioned at two sides of the spray plate 8;
S2: introducing gas into the first detection chamber and extracting gas from the second detection chamber; gas passes from the first detection chamber through the shower plate 8 into the second detection chamber;
S3: when the air pressure in the first detection cavity is stable, acquiring an air pressure value Q2 in the second detection cavity;
S4: changing the spray plate 8, repeating S1-S3, and obtaining different air pressure values Q2 in the second detection chamber corresponding to the spray plate 8;
s5: selecting a spray plate 8 with the same value of Q2;
wherein the value of Q2 of the spray plates 8 is equivalent to that of Q2 corresponding to the two spray plates 8, and the difference of the values of Q2 with larger values is not more than 0.1 percent.
In some embodiments, the gas pressure in the first detection chamber is 1-10Torr.
In some embodiments, the gas pressure value of the first detection chamber is controlled within a range of 3 Torr.+ -. 0.01 Torr.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present application, and not for limiting the same; although the application has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the application.
Claims (9)
1. A method of detecting shower plate flow resistance comprising:
s1: placing the spray plate into a detection chamber having a detection chamber; the detection chamber comprises a first detection chamber and a second detection chamber which are respectively positioned at two sides of the spray plate;
s2: introducing gas into the first detection chamber and extracting the gas from the second detection chamber; the gas passes from a first detection chamber through the shower plate into the second detection chamber;
S3: when the air pressure in the second detection cavity is stable, acquiring an air pressure value Q1 in the first detection cavity;
S4: replacing the spray plates, repeating S1-S3, and obtaining different air pressure values Q1 in the first detection chambers corresponding to the spray plates;
s5: selecting the spraying plates with the same Q1 value;
Wherein the value of Q1 of the spray plates is equal to the difference between the values of Q1 corresponding to the two identical spray plates, and the value of Q1 with the larger value is not more than 0.1%; the flow rate of the gas entering the first detection chamber is 1000SCCM-10000SCCM; and/or
The air pressure value of the second detection chamber is 1-10Torr.
2. The method of detecting a shower plate flow resistance according to claim 1, wherein the gas is at least one selected from a shielding gas and an inert gas;
The protective gas is nitrogen; and/or
The inert gas is any one of helium, neon, argon and krypton.
3. The method of detecting a shower plate flow resistance according to claim 1, wherein the detection chamber is in a vacuum state in a non-detection state.
4. A method of detecting shower plate flow resistance comprising:
s1: placing the spray plate into a detection chamber having a detection chamber; the detection chamber comprises a first detection chamber and a second detection chamber which are respectively positioned at two sides of the spray plate;
s2: introducing gas into the first detection chamber and extracting the gas from the second detection chamber; the gas passes from a first detection chamber through the shower plate into the second detection chamber;
s3: when the air pressure in the first detection cavity is stable, acquiring an air pressure value Q2 in the second detection cavity;
S4: replacing the spray plates, repeating S1-S3, and obtaining different air pressure values Q2 in the second detection chambers corresponding to the spray plates;
s5: selecting the spraying plates with the same Q2 value;
the value of Q2 of the spray plates is equal to that the difference between the values of Q2 corresponding to the two spray plates is not more than 0.1% of the value of Q2 with larger value.
5. An apparatus for detecting shower plate flow resistance suitable for the method for detecting shower plate flow resistance according to any one of claims 1 to 4, comprising:
detection room: the detection chamber is provided with a detection chamber; the two sides of the detection chamber are respectively provided with an air inlet and an air outlet which are communicated with the detection chamber;
An air inlet system: the air inlet system is communicated with the air inlet and is used for introducing air into the detection chamber;
And (3) an air extraction system: the air extraction system is communicated with the air outlet and is used for extracting air from the detection chamber; and
Air pressure detecting device: the air pressure detection device comprises a first air pressure detection device and a second air pressure detection device, and the first air pressure detection device and the second air pressure detection device are respectively used for detecting air pressure at two sides of the spray plate;
wherein, the air inlet system and/or the air extraction system is provided with a regulating valve for regulating the flow of the gas.
6. The apparatus for detecting flow resistance of shower plate as claimed in claim 5, wherein said detection chamber is provided with a placement object for mounting said shower plate;
a through hole is formed in the middle of the object; the size of the through hole is smaller than the size of the spraying plate and larger than the size of the area distributed by the spraying holes of the spraying plate;
The object is connected with the inner surface of the detection chamber in a sealing way.
7. The apparatus for detecting flow resistance of shower plate as claimed in claim 5, wherein said air intake system includes an air intake duct;
an air inlet channel is arranged on the air inlet;
The air inlet pipeline is communicated with the air inlet through the air inlet channel.
8. The apparatus for detecting shower plate flow resistance as claimed in claim 5, wherein said air extraction system comprises an air extraction duct, a bypass branch duct and a pump structure;
one end of the air exhaust pipeline is communicated with the air outlet, and the other end of the air exhaust pipeline is communicated with the pump structure;
One end of the bypass branch pipeline is communicated with one end of the air exhaust pipeline connected with the air outlet, and the other end of the bypass branch pipeline is communicated with one end of the air exhaust pipeline connected with the pump structure; and a pneumatic valve is arranged on the bypass branch pipeline.
9. The apparatus for detecting flow resistance of shower plate according to claim 5, wherein the detection chamber is further provided with heating means for heating the shower plate.
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Citations (2)
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| CN104949808A (en) * | 2014-03-24 | 2015-09-30 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method and system for detecting leakage rate |
| CN107768224A (en) * | 2016-08-19 | 2018-03-06 | 东京毅力科创株式会社 | The method for checking the shower plate of plasma processing apparatus |
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| US6333695B2 (en) * | 1998-06-17 | 2001-12-25 | Richard Young | Apparatus for flow detection, measurement and control and method for use of same in a fire sprinkler system |
| GB0713678D0 (en) * | 2007-07-13 | 2007-08-22 | Delphi Tech Inc | Apparatus and methods for testing a fuel injector nozzle |
| CN203551211U (en) * | 2013-11-12 | 2014-04-16 | 英利能源（中国）有限公司 | Spraying experiment device |
| CN106469665A (en) * | 2015-08-21 | 2017-03-01 | 沈阳拓荆科技有限公司 | A kind of straight pass shower plate preventing hollow cathode discharge |
| CN108728795B (en) * | 2017-04-13 | 2021-06-08 | 北京北方华创微电子装备有限公司 | Process equipment |
| CN108519319B (en) * | 2018-05-25 | 2023-12-22 | 华南理工大学 | Negative pressure type porous material and flow resistance measuring device and method for product of negative pressure type porous material |
| CN111986971B (en) * | 2019-05-23 | 2024-05-17 | 北京北方华创微电子装备有限公司 | Microwave source air inlet device and semiconductor process equipment |
| CN111304632A (en) * | 2020-03-17 | 2020-06-19 | 常州捷佳创精密机械有限公司 | Spraying device and process chamber |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104949808A (en) * | 2014-03-24 | 2015-09-30 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method and system for detecting leakage rate |
| CN107768224A (en) * | 2016-08-19 | 2018-03-06 | 东京毅力科创株式会社 | The method for checking the shower plate of plasma processing apparatus |
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