CN114812402A - Optical method for coaxial displacement detection - Google Patents
Optical method for coaxial displacement detection Download PDFInfo
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- CN114812402A CN114812402A CN202210558444.1A CN202210558444A CN114812402A CN 114812402 A CN114812402 A CN 114812402A CN 202210558444 A CN202210558444 A CN 202210558444A CN 114812402 A CN114812402 A CN 114812402A
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 43
- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000001514 detection method Methods 0.000 title claims abstract description 15
- 230000003287 optical effect Effects 0.000 title claims abstract description 14
- 239000000463 material Substances 0.000 claims abstract description 65
- 239000000523 sample Substances 0.000 claims abstract description 44
- 239000003086 colorant Substances 0.000 claims abstract description 9
- 239000011248 coating agent Substances 0.000 claims abstract description 8
- 238000000576 coating method Methods 0.000 claims abstract description 8
- 230000005284 excitation Effects 0.000 claims description 9
- 238000002189 fluorescence spectrum Methods 0.000 claims description 9
- 230000035945 sensitivity Effects 0.000 claims description 5
- 230000005484 gravity Effects 0.000 claims description 2
- 238000007493 shaping process Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 7
- 239000006185 dispersion Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
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- 230000001419 dependent effect Effects 0.000 description 1
- 238000011549 displacement method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
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Abstract
The invention relates to an optical method for coaxial displacement detection, which comprises the steps of coating a circular mark pattern on the surface of a measured object by using two fluorescent materials with different fluorescent colors, wherein the filling ratio of the two fluorescent materials in the pattern gradually changes along the radial direction of a circle; exciting light is emitted from the probe to form a conical light beam, and the diameter of the light beam is increased along with the increase of the coaxial distance from the probe; the two fluorescent materials in the circular region covered by the exciting light on the marking pattern are excited to emit fluorescence, the fluorescence comprises two wave bands respectively originating from the two fluorescent materials, and the proportion of the light intensity of the two wave bands is changed along with the coaxial distance from the marking pattern to the probe; therefore, the coaxial displacement of the surface of the object to be measured relative to the probe can be known through the fluorescence characteristic value of the marking pattern. The invention provides a method for detecting the coaxial displacement of a measured object relative to a probe, and the method has the advantages of interference resistance, high precision and low cost.
Description
Technical Field
The invention relates to the technical field of optical detection, in particular to an optical method for coaxial displacement detection.
Background
In photometric techniques, the displacement of an object along the probe axis is called coaxial displacement. The optical sensing technology for measuring the distance from an object to a probe and the coaxial displacement of the object relative to the probe mainly has the principles of reflection type, dispersion type and interference type, the measuring range of the interference type displacement sensing is generally in the micron level, and the measuring range can reach the centimeter level and only has the reflection type and dispersion type sensing technology.
The reflection type coaxial measurement is that a beam of light is normally incident to the surface of a measured object from a probe, and the light reflected from the surface of the object enters the probe, because the beam is naturally dispersed in the transmission process, the intensity of the reflected light received by the probe is monotonously dependent on the distance from the reflection position of the surface of the object to the probe on the premise that the intensity of the emergent light of the probe is stable. The technical equipment has low cost and has the defect of poor stability due to easy interference of environmental factors.
The dispersive coaxial measurement uses a lens with strong dispersion characteristics, and takes parallel light as an example, and the focal lengths of light with different wavelengths are different. The object to be measured is imaged through the lens, and the distances from the reflecting surface of the object to the lens are different and correspond to different colors of images. This technique has a high accuracy and has the disadvantage that the probe used, including the lens, is relatively expensive.
The invention provides an optical method for coaxial displacement detection, which utilizes two fluorescent materials with different fluorescent colors to coat a mark pattern on the surface of a measured object, the diameter of an exciting light cone beam emitted by a probe is gradually increased along with the distance away from the probe, and the ratio of the luminous intensity of the two fluorescent materials in the excited fluorescence on the mark pattern is changed along with the distance, so that the distance between the surface of the measured object and the probe can be known through the fluorescent characteristic value of the mark pattern. Compared with the reflection type and dispersion type coaxial displacement measurement methods, the method has the advantages of interference resistance, high precision and low cost.
Disclosure of Invention
The invention aims to provide an optical method for coaxial displacement detection, which can be used for wireless measurement like other optical coaxial displacement measurement methods and has the advantages of interference resistance, high precision and low cost. Which are mutually contradictory in other ways.
The technical scheme of the invention is as follows:
an optical method for coaxial displacement detection comprises coating a circular mark pattern on the surface of a measured object with two fluorescent materials with different fluorescent colors, wherein the filling ratio of the two fluorescent materials in the pattern gradually changes along the radial direction of the circle; exciting light is emitted from the probe to form a conical light beam coaxial with the probe, and the diameter of the light beam is increased along with the increase of the coaxial distance from the probe; the two fluorescent materials in the circular region covered by the exciting light on the marking pattern are excited to emit fluorescence, the fluorescence comprises two wave bands respectively originating from the two fluorescent materials, and the proportion of the light intensity of the two wave bands is changed along with the coaxial distance from the marking pattern to the probe; therefore, the coaxial displacement of the surface of the measured object relative to the probe can be obtained through the fluorescence characteristic numerical value of the marking pattern; the method comprises the following specific steps:
selecting two fluorescent materials with different fluorescent colors, selecting proper excitation light wavelength according to the light emitting characteristics of the fluorescent materials, and adjusting the sensitivity of displacement detection by controlling the difference of the fluorescent wavelengths of the two fluorescent materials;
coating the surface of a measured object with the fluorescent material at a position to be measured, wherein the position to be measured changes, to form a circular marking pattern, wherein the circular marking pattern is coaxial with the probe, and the filling ratio of the two fluorescent materials gradually changes along the radial direction of the circle;
shaping light emitted by the exciting light source into a conical light beam through the probe, wherein the light beam is coaxial with the probe and is projected onto the marking pattern, and the fluorescence of the fluorescent material in the projected interval is excited;
measuring and recording fluorescence spectra when the axial distance from the measured object to the probe changes, calculating fluorescence characteristics according to the fluorescence spectra, and calibrating a relation function between the fluorescence characteristics and the axial distance; wherein the fluorescence characteristics comprise color parameters, fluorescence intensity ratio, fluorescence spectrum center of gravity wavelength and fluorescence intensity of fluorescence;
and step five, placing the measured object coated with the mark pattern at an axial unknown distance of the probe, exciting the fluorescence of the projected area on the mark pattern by using the exciting light cone beam used in the step three, measuring and calculating the fluorescence characteristics of the fluorescence, and substituting the fluorescence characteristics into the relation function obtained in the step four to obtain the coaxial displacement to be measured.
The essence of the invention is to convert the shift in space into a frequency shift of the fluorescence spectrum; the stability and high precision of the spectroscopy detection are transferred to the displacement detection, so that the displacement detection has the characteristics of interference resistance and high precision; the fluorescence characteristics as the sensing signals comprise various characteristics related to fluorescence intensity, and the measurement of the fluorescence intensity is low in cost when the fluorescence wavelength is not considered; when only the fluorescence intensity is considered, the technology of the invention is compatible with a reflection type coaxial measurement technical method.
Compared with the prior art, the invention has the advantages that:
the invention can be used for wireless measurement as other optical measurement coaxial displacement methods, and has the advantages of interference resistance, high precision and low cost.
Drawings
FIG. 1 shows fluorescence spectra of two phosphors of the present invention filled with a pattern of marks, wherein the wavelength band labeled A, B is derived from phosphor A and phosphor B, respectively;
FIG. 2 is a schematic view of a marking pattern according to the present invention;
FIG. 3 is a schematic front and top view of an axisymmetric optical path of the present invention;
FIG. 4 is an illustration of fluorescence characteristic versus displacement and an actual calibration of the sensing equation.
Detailed Description
Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, and the scope of the present invention will be more clearly defined.
The embodiment of the invention provides an optical method for coaxial displacement detection, in particular to a method for wirelessly measuring the coaxial displacement of a fluorescent mark pattern on a measured object relative to a probe by means of a fluorescent signal. The method comprises the following specific steps:
step 3, as shown in fig. 3, an axisymmetric light path is arranged, and the probe, the excitation light beam and the marking pattern are coaxial, wherein the excitation light emitted by the laser is shaped into a cone-shaped light beam by the probe; the exciting light is projected on the mark pattern, and the fluorescent material in the projection interval marked by the dotted circle is excited to emit fluorescence; when the mark pattern has axial displacement relative to the probe, the projection interval of the excitation light beam changes along with the change of the range, and because the filling ratio of the fluorescent material A and the fluorescent material B in the interval also changes monotonically along with the change of the radius of the projection interval, the light intensity ratio of the fluorescent material A and the fluorescent material B in the fluorescence returned, collected by the probe and detected by the spectrometer changes monotonically along with the axial displacement of the mark pattern;
step 4, measuring and recording the fluorescence spectrum of the projection region of the excitation light beam on the mark pattern, and calculating the fluorescence characteristic as a displacement sensing signal according to the fluorescence spectrum, wherein the displacement sensing signal shown in fig. 4 is a ratio value of the fluorescence peak intensity of the fluorescent material B and the fluorescent material A on the fluorescence spectrum; the fluorescence characteristics can also be color parameters of mixed fluorescence of the fluorescent material A and the fluorescent material B, fluorescence integral intensity ratio of the fluorescent material A and the fluorescent material B, fluorescence spectrum center-of-gravity wavelength and total fluorescence intensity of the fluorescent material A and the fluorescent material B; the spectrometer can also be replaced by other functional light paths, for example, a filter is used for separating the wave bands belonging to the fluorescent material A and the fluorescent material B in the fluorescence, the respective light intensities of the two wave bands are measured, and a division circuit is used for calculating the fluorescence integral intensity ratio of the fluorescent material A and the fluorescent material B and outputting an electric signal; when the total fluorescence intensity is used as a coaxial displacement sensing signal, the fluorescence characteristic does not need to distinguish the wavelengths of two fluorescent materials, and the corresponding displacement sensing mode is actually the same as that of light reflection type displacement sensing, or the invention is compatible with the light reflection type displacement sensing technology; when other fluorescent characteristics are adopted as coaxial displacement sensing signals, the signals are irrelevant to the fluctuation of the intensity of the excitation light, the sensing stability is enhanced correspondingly, and the precision is improved;
step 5, changing the coaxial displacement of the measured object relative to the probe gradually to obtain the corresponding data of the fluorescence characteristic and the coaxial displacement, wherein the fitted relation function is the calibrated displacement sensing equation, and the fitting polynomial Y shown in fig. 4 is 1.57-1.37X +0.36X 2 Wherein Y is a fluorescence characteristic, i.e., a ratio value of fluorescence peak-to-peak intensities of the fluorescent material B and the fluorescent material A, and X is a displacement; the sensitivity of the displacement sensing is the tangent slope of the fitted curve; the sensitivity is adjusted by selecting different fluorescent materials A and B and controlling the difference of the fluorescent wavelengths of the fluorescent materials A and B, taking the example that the sensing fluorescent signal is the color parameter of mixed fluorescence, the color of the mixed fluorescence is the intermediate color of the fluorescent colors of the materials A and B, and the larger the difference of the fluorescent wavelengths is, the larger the intermediate color change corresponding to the same displacement is, namely, the higher sensitivity is;
and 6, coating the same mark pattern on a measured object with unknown axial distance from the probe, exciting fluorescence of an excited light projection area on the mark pattern in the same axial symmetrical light path, measuring and calculating the fluorescence characteristics of the excited light projection area, and substituting the fluorescence characteristics into the displacement sensing equation to obtain the axial distance to be measured.
Without being limited thereto, any changes and substitutions that do not occur to the purpose of inventive faculty should be covered by the scope of protection of the invention. Therefore, the protection scope of the present invention shall be subject to the protection scope defined by the claims.
Claims (1)
1. An optical method for coaxial displacement detection is characterized in that the method comprises the steps of coating a circular mark pattern on the surface of a measured object by using two fluorescent materials with different fluorescent colors, wherein the filling ratio of the two fluorescent materials in the pattern is gradually changed along the radial direction of a circle; exciting light is emitted from the probe to form a conical light beam coaxial with the probe, and the diameter of the light beam is increased along with the increase of the coaxial distance from the probe; the two fluorescent materials in the circular region covered by the exciting light on the marking pattern are excited to emit fluorescence, the fluorescence comprises two wave bands respectively originating from the two fluorescent materials, and the proportion of the light intensity of the two wave bands is changed along with the coaxial distance from the marking pattern to the probe; therefore, the coaxial displacement of the surface of the measured object relative to the probe can be obtained through the fluorescence characteristic numerical value of the marking pattern; the method comprises the following specific steps:
selecting two fluorescent materials with different fluorescent colors, selecting proper excitation light wavelength according to the light emitting characteristics of the fluorescent materials, and adjusting the sensitivity of displacement detection by controlling the difference of the fluorescent wavelengths of the two fluorescent materials;
coating the surface of a measured object with the fluorescent material at a position to be measured, wherein the position to be measured changes, to form a circular marking pattern, wherein the circular marking pattern is coaxial with the probe, and the filling ratio of the two fluorescent materials gradually changes along the radial direction of the circle;
shaping light emitted by the exciting light source into a conical light beam through the probe, wherein the light beam is coaxial with the probe and is projected onto the marking pattern, and the fluorescence of the fluorescent material in the projected interval is excited;
measuring and recording fluorescence spectra when the axial distance from the measured object to the probe changes, calculating fluorescence characteristics according to the fluorescence spectra, and calibrating a relation function between the fluorescence characteristics and the axial distance; wherein the fluorescence characteristics comprise color parameters, fluorescence intensity ratio, fluorescence spectrum center of gravity wavelength and fluorescence intensity of fluorescence;
and step five, placing the measured object coated with the mark pattern at an axial unknown distance of the probe, exciting the fluorescence of the projected area on the mark pattern by using the exciting light cone beam used in the step three, measuring and calculating the fluorescence characteristics of the fluorescence, and substituting the fluorescence characteristics into the relation function obtained in the step four to obtain the coaxial displacement to be measured.
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| CN202210558444.1A CN114812402B (en) | 2022-05-20 | 2022-05-20 | Optical method for coaxial displacement detection |
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| CN202210558444.1A CN114812402B (en) | 2022-05-20 | 2022-05-20 | Optical method for coaxial displacement detection |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05223738A (en) * | 1992-02-14 | 1993-08-31 | Res Dev Corp Of Japan | Measuring device for fluorescent tomographic image |
| CN1588003A (en) * | 2004-08-27 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Method for rapidly and longitudinally super-resolving single-molecule fluorescent sample |
| CN103163106A (en) * | 2013-01-30 | 2013-06-19 | 浙江大学 | Super-resolution fluorescent lifetime imaging method and device based on stimulated emission lost |
| CN107290317A (en) * | 2017-07-02 | 2017-10-24 | 广东技术师范学院 | The method that double optical path modulation fluorescence excitation light sources measure packed complicated solution composition |
| CN108645341A (en) * | 2018-03-09 | 2018-10-12 | 南昌航空大学 | Fluorescence type displacement sensing method |
| US20200400574A1 (en) * | 2019-06-20 | 2020-12-24 | Ethicon Llc | Image synchronization without input clock and data transmission clock in a pulsed fluorescence imaging system |
-
2022
- 2022-05-20 CN CN202210558444.1A patent/CN114812402B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05223738A (en) * | 1992-02-14 | 1993-08-31 | Res Dev Corp Of Japan | Measuring device for fluorescent tomographic image |
| CN1588003A (en) * | 2004-08-27 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Method for rapidly and longitudinally super-resolving single-molecule fluorescent sample |
| CN103163106A (en) * | 2013-01-30 | 2013-06-19 | 浙江大学 | Super-resolution fluorescent lifetime imaging method and device based on stimulated emission lost |
| CN107290317A (en) * | 2017-07-02 | 2017-10-24 | 广东技术师范学院 | The method that double optical path modulation fluorescence excitation light sources measure packed complicated solution composition |
| CN108645341A (en) * | 2018-03-09 | 2018-10-12 | 南昌航空大学 | Fluorescence type displacement sensing method |
| US20200400574A1 (en) * | 2019-06-20 | 2020-12-24 | Ethicon Llc | Image synchronization without input clock and data transmission clock in a pulsed fluorescence imaging system |
Non-Patent Citations (2)
| Title |
|---|
| 孙炳恒等: "高显色激光照明用宽光谱远程荧光转换材料", vol. 42, no. 10, pages 1585 - 1618 * |
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