CN114774876A

CN114774876A - Coating rotating stand

Info

Publication number: CN114774876A
Application number: CN202210514160.2A
Authority: CN
Inventors: 唐智; 冯柳君
Original assignee: Nafeng Vacuum Coating Shanghai Co ltd
Current assignee: Nafeng Vacuum Coating Shanghai Co ltd
Priority date: 2022-05-11
Filing date: 2022-05-11
Publication date: 2022-07-22
Anticipated expiration: 2042-05-11
Also published as: CN114774876B

Abstract

The invention discloses a film coating rotating stand, which comprises: the product hanging rod is rotatably arranged on the bottom surface of the frame body through the lower end; peg rotation control mechanism locates the bottom surface below of support body, includes: the swing arm is orthogonally and fixedly arranged on the lower end of the hanging rod, and a pair of longitudinal rocking handles is respectively arranged on the two ends of the swing arm; the inner lateral limiting track is arranged along the inner side of the revolution track of the hanging rod and forms a closed loop structure, and the inner lateral limiting track comprises an arc track section and a peak-shaped turning track section facing the inner side of the arc; when the hanging rod revolves along with the rack body, the side direction formed by the two rocking handles is resisted through the arc track section to limit the hanging rod to rotate, when the hanging rod revolves to the position that the rocking handle positioned at the front side is guided to the turning track section, the front and back position exchange between the two rocking handles is realized by utilizing the deflection action received by the swing arm, so that the hanging rod is driven to carry out one-time rotation action, the purpose of periodically and rapidly turning over products installed on the hanging rod is realized, and the deposition rate and the uniformity of a film layer are improved.

Description

Coating rotating stand

Technical Field

The invention relates to the technical field of coating, in particular to a coating rotating stand.

Background

At present, when vacuum coating equipment is used for simultaneously carrying out surface coating process on a plurality of products, a rotating frame is generally arranged in an equipment process cavity, and the products are fixed on the rotating frame through a hanging rod, so that the products are coated in the rotation of the rotating frame. By the rotation of the rotating frame, each product on the rotating frame can obtain equal plating opportunity facing the sputtering target.

For small products, in order to ensure that all surfaces of the products needing film coating are subjected to uniform film layer deposition, the small products can rotate by means of the rotation of the hanging rod while the products revolve along with the rotating frame.

However, for products with a plurality of large surfaces, such as flat products, coating needs to be performed on the front and back surfaces of the products, and if the products rotate frequently in the process, the problem of uneven coating on the front and back surfaces of the products is easily caused. Preferably, the planar product is quickly turned over integrally at regular time intervals or in a rotation period during the rotation of the turret, so that both the front and back surfaces of the product can be quickly turned to the side facing the sputtering target in an alternating manner.

The design of the rotary frame is that a two-stage interlocking transmission relationship is formed between the rotation of the hanging rod and the revolution of the rotary frame, so that the rotation of the hanging rod cannot be interfered when the rotary frame rotates, and the rotary frame is difficult to be suitable for coating of a planar product with a large surface.

Disclosure of Invention

The invention aims to overcome the defects of the prior art and provide a coating rotating stand.

One technical solution for achieving the above object of the present invention is:

a coating turret comprising:

a frame body;

the product hanging rod is rotatably arranged on the bottom surface of the frame body through the lower end;

peg rotation control mechanism locates the bottom surface below of support body includes:

the swing arm is orthogonally and fixedly arranged on the lower end of the hanging rod, and a pair of longitudinal rocking handles is respectively arranged at the two ends of the swing arm;

the inner lateral limiting track is arranged along the inner side of the revolution track of the hanging rod and forms a closed loop structure, and the inner lateral limiting track comprises an arc track section and a peak-shaped turning track section facing the inner side of the arc;

when the hanging rod revolves along with the rack body, the two rocking handles are kept on the front side and the rear side of the lower end of the hanging rod respectively through the lateral blocking formed by the arc track section on the two rocking handles to limit the hanging rod to rotate, when the hanging rod revolves to the turning track section, one rocking handle on the front side is guided to the turning track section, so that the swing arm drives the other rocking handle on the rear side to be separated from the inner lateral limiting track due to the deflection action, and gradually rotates to the front side of the lower end of the hanging rod along with the swing arm until the other rocking handle is pressed against the arc track section again, the front and rear position of the two rocking handles on the rotated swing arm is exchanged, and the hanging rod is driven to perform one rotation action.

Furthermore, the hanging rod rotation control mechanism is provided with a disc arranged along the inner side of the revolution track of the hanging rod, the inner lateral limiting track is positioned on the circumferential side surface of the disc, a peak-shaped notch is formed in the circumferential side surface of the disc, the turning track section is positioned on the side surface of the notch, and the arc track section is positioned on the circumferential side surface of the disc outside the notch.

Furthermore, the hanging rod rotation control mechanism further comprises a guide track section, the guide track section is arranged on the outer side of the turning track section and used for guiding the rocking handle positioned on the front side to the turning track section, the turning track section comprises a first turning track section and a second turning track section which are connected, and the guide track section comprises a first guide track section and a second guide track section, wherein the first guide track section is arranged facing the first turning track section, and the second guide track section is connected with the first guide track section and is arranged facing the second turning track section.

Furthermore, the hanging rod rotation control mechanism further comprises an outer lateral limiting track, the outer lateral limiting track is arranged on the outer side of the guide track section and used for limiting the swing track of the other rocking handle located on the rear side after the rocking handle is separated from the inner lateral limiting track.

Further, the first turning track section, the second turning track section, the first guiding track section and the second guiding track section include linear track sections, and the outer lateral limiting track includes an arc-shaped outer lateral limiting track section.

Furthermore, an included angle between the first turning track section and the second turning track section is an obtuse angle.

Furthermore, an inwards concave third turning track section is arranged between the first turning track section and the second turning track section, and the guide track section is also used for further guiding the rocking handle positioned on the front side to the third turning track section so as to cause relative rotation between the rocking handle and the third turning track section.

Furthermore, the rocking handle is sleeved with a roller.

Further, the support body comprises an upper plate, a lower plate and a support rod which is connected and arranged between the upper plate and the lower plate, and the hanging rod is arranged between the upper plate and the lower plate and forms rotating fit with the upper plate and the lower plate simultaneously.

Furthermore, the turning track section is provided with one or more than one inside lateral limiting track.

According to the technical scheme, the transverse swing arms with the two longitudinal rocking handles at the two ends are coaxially arranged at the lower end of the product hanging rod which is in running fit with the rotating frame body, the closed loop structure of the inward side limiting track comprising the arc track section and the peak-shaped turning track section is arranged on the inner side of the revolution track of the hanging rod, when the hanging rod revolves along with the frame body, the arc track section can laterally resist the two rocking handles from the inward direction, so that the two rocking handles are kept on the front side and the rear side of the lower end of the hanging rod respectively, and the rotation of the hanging rod is limited; when the hanging rod revolves to the starting point side of the turning track section, one rocking handle positioned at the front side of the hanging rod is guided to the turning track section through the guiding track section arranged at the outer side of the turning track section, so that the swinging arm is forced to deflect under the combined action of the revolution pulling force from the hanging rod and the limitation of the guiding track section and the turning track section on the rocking handle, the other rocking handle positioned at the rear side is driven to be separated from the inner side limiting track and gradually rotated to the front side positioned at the lower end of the hanging rod along with the swinging arm until the swinging arm is pressed against the arc track section at the terminal side of the turning track section again, the front and rear positions of the two rocking handles on the rotated swinging arm are exchanged, and therefore, the hanging rod is driven to perform one rotation action in the revolution process through one deflection action generated by the swinging arm every time of the turning track section, and the purpose of periodically and rapidly overturning different plated surfaces of products mounted on the hanging rod is realized, so as to effectively improve the deposition rate and further improve the uniformity of the film layer.

Drawings

Fig. 1-2 are schematic structural views of a coating turret according to a preferred embodiment of the invention.

Fig. 3-4 are schematic views illustrating a mounting structure of a swing arm on a hanging rod bearing according to a preferred embodiment of the present invention.

Fig. 5 is a schematic structural view of an inner lateral limiting rail according to a preferred embodiment of the invention.

Fig. 6 is an enlarged structural view of a turning track segment according to a preferred embodiment of the invention.

Fig. 7-8 are schematic structural views of a hanging rod limiting mechanism according to a preferred embodiment of the invention.

Fig. 9-13 are schematic diagrams illustrating a mechanism for controlling the hanging rod to rotate according to a preferred embodiment of the present invention.

Fig. 14 is an assembly structure diagram of a split rail according to a preferred embodiment of the invention.

Detailed Description

In order that the technical solution of the invention may be better understood, the invention will now be described in detail by means of specific embodiments.

Refer to fig. 1-2. The invention relates to a film coating rotating stand, which comprises: the hanging rack comprises a rack body 1, a hanging rod 10 rotatably arranged on the rack body 1, a hanging rod autorotation control mechanism 18 arranged below the bottom surface of the rack body 1 and the like.

In a preferred embodiment, the frame body 1 may be a cylindrical frame structure, and may specifically include an upper plate 11 and a lower plate 19 coaxially arranged in an up-down manner, and a plurality of longitudinally arranged support rods (not shown) connected between the upper plate 11 and the lower plate 19 for fixing the upper plate 11 and the lower plate 19. Wherein the upper tray 11 and the lower tray 19 are arranged in a horizontal manner such that the upper surface of the upper tray 11 forms the top surface of the frame 1 and the lower surface of the lower tray 19 forms the bottom surface of the frame 1. The lower disc 19 is rotatably arranged in the cavity of the film coating equipment, so that the whole frame body 1 can be driven to rotate around the rotation center under control.

The hanging rod 10 is vertically arranged between the upper plate 11 and the lower plate 19 and can form rotating fit with the upper plate 11 and the lower plate 19 simultaneously. The plurality of hanging rods 10 can be arranged in sequence along the rotation circumference of the rack body 1. When the frame body 1 rotates, each hanging rod 10 can revolve along with the frame body 1, and the revolution tracks of the hanging rods 10 are completely overlapped.

The hanging rod 10 is provided with a clamp 13, and the product 2 to be coated is fixed on the hanging rod 10 through the clamp 13.

The lower end of the peg 10 may be rotatably mounted on a lower disc 19 via a peg bearing 14. The upper end of the hanging rod 10 can form rotary connection with the upper disk 11 through a hanging rod limiting mechanism 12.

Fig. 1 shows an example of a case where a plurality of hangers 10 are loaded on the circumference of a rack body 1. Fig. 2 shows an example when a single hanger bar 10 is loaded on the circumference of the rack body 1.

Taking a flat product 2 as an example, for example, a rectangular flat plate-like product 2 shown in fig. 1-2, both sides of the product 2 need to be coated. If a common two-stage rotating frame is adopted for coating, because the hanging rod usually has an interlocking relationship between revolution and rotation around the rotating frame, in the coating process, the hanging rod continuously rotates in the revolution process, so that the front side or the back side of the product 2 cannot be continuously sputtered by a film layer in frequent turnover, namely, the deposition rate of the film layer on the front side or the back side of the product 2 is low, and the problem of uneven coating can be caused.

In order to solve the above problems, the present invention provides a hanging rod rotation control mechanism 18 on the rotating stand to separate the rotation of the hanging rod 10 from the revolution motion around the rotating stand, i.e. to control the rotation of the hanging rod 10 individually, so as to solve the above disadvantages of the prior art.

Refer to fig. 1-2. The hanging rod rotation control mechanism 18 may include a rotating mechanism 15 disposed on the lower end of the hanging rod 10, and an inner lateral limiting rail 16 disposed below the bottom surface of the frame body 1 and forming a fit with the rotating mechanism 15.

Reference is made to fig. 3-4 in combination with fig. 1-2. The rotating mechanism 15 may include a swing arm 151 provided on the lower end of the hanging bar 10, and a pair of swing handles 152 provided on both ends of the swing arm 151.

In a preferred embodiment, the lower end of the hanging rod 10 is mounted on the hanging rod bearing 14 through a rotating shaft 20, such as a U-shaped groove rotating shaft 20 shown in the figure, and the hanging rod bearing 14 is fixed on the lower disc 19 through a mounting hole 191 on the lower disc 19, so that the lower end of the hanging rod 10 and the lower disc 19 can form a rotating fit, and the hanging rod 10 can rotate on the lower disc 19 through the rotating fit between the rotating shaft 20 and the hanging rod bearing 14. Meanwhile, the lower end of the rotating shaft 20 can penetrate out of the hanging rod bearing 14 and be positioned below the lower disc 19, and the straight arm-shaped swing arm 151 is horizontally arranged on the exposed lower end of the vertical rotating shaft 20, so that a coaxial synchronous rotating relation is formed between the swing arm 151 and the rotating shaft 20. Thus, when the swing arm 151 is controlled to deflect relative to the hanging rod bearing 14 (the lower disc 19), the rotating shaft 20 connected with the swing arm 151 can be driven to rotate relative to the lower disc 19, and the hanging rod 10 connected with the rotating shaft 20 can rotate on the lower disc 19 (the frame body 1).

Meanwhile, two rocking handles 152 are symmetrically arranged at two ends of the swing arm 151 transversely exposed out of the rotating shaft 20, and the rocking handles 152 are vertically connected to two ends of the horizontal swing arm 151 and can be arranged towards the lower part of the swing arm 151.

The swing arm 151 may be connected to the handle 152 in a fixed or rotatable manner.

Reference is made to fig. 5 in conjunction with fig. 1-2. The inner lateral stop rail 16 may be mounted on the bottom surface of the cavity and below the lower tray 19 of the rack. The inner side limiting track 16 is arranged along the inner side of the revolution track of the hanging rod 10 and forms a closed loop structure.

The inner lateral limiting track 16 is generally circular, and the circle center of the circle is concentric with the rotation center of the frame body 1. The inboard curb track 16 may include a circular arc track segment 161 that occupies a majority of the length of the track body, and a short transition track segment 162 connected between the circular arc track segments 161. In the drawing, the turning track segment 162 is recessed toward the center of the circular arc track segment 161, and a turning track segment 162 in a mountain shape (or a triangle shape) is formed.

In a preferred embodiment, the inner lateral limit track 16 may be provided on the circumferential side of one of the discs 21. The disc 21 is independently located below the frame body 1, and the circle center of the disc 21 is concentric with the rotation center of the frame body 1 but does not rotate along with the frame body 1. The circumference of the disc 21 is located inside the revolution path of the hanging rod 10. The disc 21 has a mountain-peak (or triangular) notch on the circumferential side, the turning track section 162 is located on the side of the disc 21 at the notch, and the circular arc track section 161 is located on the circumferential side of the disc 21 outside the notch.

Wherein, the cooperation that is located between two rocking handles 152 on swing arm 151 both ends and the circular arc track section 161 can satisfy: when the hanging rod 10 revolves along with the frame body 1, the two rocking handles 152 positioned below the two ends of the swing arm 151 are laterally limited by the arc track sections 161 from the outer sides of the circular discs 21 and abut against the arc track sections 161 in tandem (or almost in tandem) at the same time, so that the position of the swing arm 151 is relatively fixed without rotating (or rotating obviously), and the hanging rod 10 cannot rotate (or rotate obviously) relative to the lower disc 19.

The cloth rail rotation control mechanism 18 further comprises a guide track section 171. The guide rail section 171 is disposed outside the turning rail section 162 and faces the turning rail section 162. The guide rail section 171 is used to guide a first rocking handle 152-1 (see fig. 9) located on the front side of the swing arm 151 in the revolving direction of the hanger 10 from the circular arc rail section 161 to the turning rail section 162, so that the first rocking handle 152-1 can move along the turning rail section 162, slide in from the starting point (entrance) of the passage 181 between the guide rail section 171 and the turning rail section 162, and slide out from the ending point (exit) of the passage 181 between the guide rail section 171 and the turning rail section 162 to abut against the circular arc rail section 161 again. In the process, the swing arm 151 will deflect, and a second crank 152-2 (see fig. 9) of the swing arm 151, which is located at the rear side of the hanging rod 10 in the revolving direction, will be separated from the arc track section 161 due to the deflection of the swing arm 151, so as not to enter the passage 181 between the guide track section 171 and the turning track section 162, but to bypass the passage 181 between the guide track section 171 and the turning track section 162, and abut against the arc track section 161 at the front of the turning track section 162 again along with the deflection of the swing arm 151. Meanwhile, due to the deflection action of the swing arm 151, the front and back positions of the first rocking handle 152-1 and the second rocking handle 152-2 on the revolution track of the hanging rod 10 are also exchanged.

Refer to fig. 6 and 5. In a preferred embodiment, the return track segment 162 may include a first return track segment 1621 and a second return track segment 1622 connected thereto. Guide track segment 171 may include a first guide track segment 1711 disposed facing first turning track segment 1621, and a second guide track segment 1712 connected to first guide track segment 1711 and disposed facing second turning track segment 1622.

In a preferred embodiment, first and second

turning track segments

1621, 1622 may comprise straight track segments.

Further, the first and second

guide track segments

1711 and 1712 may include straight track segments corresponding to the first and second

turning track segments

1621 and 1622.

The guide track segment 171 may be disposed on both hypotenuse sides of one triangular guide structure 17 as viewed in the drawing, and disposed facing the first turning track segment 1621 and the second turning track segment 1622. The first guide track section 1711 is parallel to the first turning track section 1621, the second guide track section 1712 is parallel to the second turning track section 1622, and the width of the passage 181 formed between the guide track section 171 and the turning track section 162 is slightly larger than the diameter of the rocking handle 152, so as to ensure the smooth movement of the rocking handle 152 when the rocking handle 152 passes through the passage 181 between the guide track section 171 and the turning track section 162.

In a preferred embodiment, the angle formed between first and second

turnaround track sections

1621, 1622 is obtuse. The included angle can be designed according to the actual film process, the product and the rotating speed. An angled configuration between first and second

turning track segments

1621 and 1622 having an angle of 130 degrees is illustrated, but is not limited thereto.

In a preferred embodiment, a third turning track segment 1623, which is concave towards the center of the circular track segment 161, may be disposed between the first turning track segment 1621 and the second turning track segment 1622. When a first rocking handle 152-1 on the front side of the swing arm 151 is guided into the passage 181 between the guide track section 171 and the turning track section 162, the guide track section 171 can further guide the first rocking handle 152-1 to the third turning track section 1623, so that the first rocking handle 152-1 is accommodated in the recess of the third turning track section 1623, and the corresponding end of the swing arm 151 is deflected with the third turning track section 1623 as a rotating fulcrum under the pulling action of the hanging rod 10 on the swing arm 151, so that a second rocking handle 152-2 on the rear side at the other end of the swing arm 151 is gradually turned to the front side relative to the first rocking handle 152-1 along with the deflection of the swing arm 151 on the third turning track section 1623. Thereafter, the hanging bar 10 in revolution continues to bring the first rocking handle 152-1, which is now located at the rear side on the swing arm 151, out of the third turning track segment 1623 and is led out along the passage 181 between the second guide track segment 1712 and the second turning track segment 1622.

In a preferred embodiment, the third turning track segment 1623 may be in the form of a groove, such as, but not limited to, a rectangular groove as shown in fig. 6. Wherein the length and width of the groove should ensure that the rocking handle 152 can perform relative rotation in the groove.

Refer to fig. 5. In a preferred embodiment, the cloth rail rotation control mechanism 18 may further include an outer lateral limit track 22. The outer lateral restraint rail 22 is disposed outside of the guide rail section 171, i.e., the outer lateral restraint rail 22 is disposed outside of the guide structure 17. The outer lateral limiting track 22 is used for limiting the swing track of the second rocking handle 152-2 after separating from the circular arc track section 161 of the inner lateral limiting track 16 from the outer side, so as to ensure that the first rocking handle 152-1 is accommodated in the recess of the third turning track section 1623 and reliably rotates in the recess of the third turning track section 1623 without falling out after the first rocking handle 152-1 is guided to the third turning track section 1623 by the guide track section 171.

Refer to fig. 6. In a preferred embodiment, the outer lateral limit rail 22 may have an arc-shaped outer lateral limit rail section 221, the arc shape of which corresponds to the swing path of the second rocking handle 152-2 along with the swing arm 151.

Refer to fig. 3-4. In a preferred embodiment, the rocking handle 152 may be sleeved with a roller 153, so as to facilitate the movement fit between the rocking handle 152 and the inner side limiting rail 16, and prevent the abrasion of the rocking handle 152 and the inner side limiting rail 16 due to the long-term fit.

In a preferred embodiment, one or more of the return track segments 162 may be disposed on the inner lateral stop track 16, depending on the process requirements. I.e. the cloth rail 10 and the products 2 loaded thereon will be turned one or more times during one rotation cycle of the turret.

Refer to fig. 7-8. In a preferred embodiment, the peg limiter mechanism 12 is rotatably mounted on the upper tray 11. The hanging rod limiting mechanism 12 is provided with a turning limiting block 123, one end of the turning limiting block 123 can be rotatably connected with the positioning fixing block 121 through a horizontal rotating shaft 122, and further is connected with the upper disc 11 through the positioning fixing block 121. Thus, the hanging rod stopper mechanism 12 can be vertically rotated on the upper plate 11 about the rotation shaft 122.

The bottom surface of the other end of the turning-over limiting block 123 can be internally provided with a limiting bearing 124, and the limiting bearing 124 is buckled on the upper end of the hanging rod 10 to form a running fit after the turning-over limiting block 123 is turned downwards. Thus, the upper and lower ends of the hanging rod 10 are simultaneously in rotating fit with the upper plate 11 and the lower plate 19.

Refer to fig. 9-13. When the rotating stand of the present invention is operated, when the hanging rod 10 revolves (for example, clockwise rotation as shown in the figure) along with the rack body 1, the two rocking handles 152(152-1, 152-2) at the two ends of the swinging arm 151 can be laterally stopped from the inner side by the arc track section 161 on the inner lateral limiting track 16, so that the two rocking handles 152 are kept at the front and rear sides of the lower end of the hanging rod 10. For the sake of distinction, one crank 152 located temporarily on the front side is defined as a first crank 152-1, and the other crank 152 located temporarily on the rear side is defined as a second crank 152-2. Thus, the swing arm 151 is prevented from being deflected by the first and second rocking handles 152-1 and 152-2 from the circular arc orbit segment 161 in the same direction, so that the rotation of the hanger 10 is restricted, and one outer surface of, for example, a flat product 2 loaded on the hanger 10 can be kept facing the target (refer to fig. 1) while revolving around the hanger 10, as shown in fig. 9.

When the hanging rod 10 revolves to the turning track section 162, the first rocking handle 152-1 is guided to the turning track section 162 by the guiding track section 171, so that the swing arm 151 starts to deflect under the combined action of pushing and guiding by the revolving of the hanging rod 10, and the second rocking handle 152-2 at the rear side of the swing arm 151 is driven to be separated from the arc track section 161 of the inner lateral limiting track 16. At this time, the first rocking handle 152-1 slides up and down along the passage 181 between the guiding track section 171 and the turning track section 162 under the revolving driving and guiding action of the hanging rod 10. The second rocker 152-2 is also deflected into the path between the guide structure 17 and the outer lateral limit rail 22 and is restrained by the arcuate outer lateral limit rail segment 221 from the outside, as shown in fig. 10.

When the first rocking handle 152-1 slides to fall into the groove structure of the third turning track segment 1623, it cannot be pulled out temporarily due to the blocking effect of the third turning track segment 1623 on the inner wall of the groove. At this time, the hanging rod 10 still revolves, so that one end of the swing arm 151 located in the third turning track segment 1623 is driven to rotate by using the groove as a fulcrum, that is, the first rocking handle 152-1 rotates in the groove structure of the third turning track segment 1623, so that the other end of the swing arm 151 starts to rotate to the front side, that is, the front-back relative position between the first rocking handle 152-1 and the second rocking handle 152-2 starts to change. In this process, the swing track of the second rocking handle 152-2 can be limited from the outside by using the outer lateral limiting track section 221, so as to ensure that the first rocking handle 152-1 does not fall out when rotating in the recess of the third turning track section 1623, as shown in fig. 11.

Thereafter, as the suspension rod 10 continues to revolve, the first crank 152-1, which is continuously rotated in the groove, is taken out of the groove and starts to slide downhill along the path 181 between the guide rail section 171 and the turning rail section 162, as shown in fig. 12.

When the first rocking handle 152-1 slides out of the end point (outlet) of the passage 181 between the guide track section 171 and the turning track section 162, the front-back relative position between the first rocking handle 152-1 and the second rocking handle 152-2 on the swing arm 151 has been completely exchanged, that is, the position of the first rocking handle 152-1 originally located on the front side has been changed to be located on the rear side, the second rocking handle 152-2 originally located on the rear side has been changed to be located on the front side of the first rocking handle 152-1 by swinging along with the arc of the swing arm 151 after being separated from the arc track section 161 and bypassing the turning track section 162, and again abuts against the arc track section 161 in front of the turning track section 162 under the common guiding action of the outer side limiting track section 221 and the guide track section 171. Through this process, the swing arm 151 deflects 180 degrees, thereby driving the hanging rod 10 to perform a 180-degree rotation, so that the other inner surface of the planar product 2 loaded on the hanging rod 10 is turned over by 180 degrees after passing through the turning track section 162 along with the hanging rod 10, and is located in a direction facing the target, as shown in fig. 13.

It should be noted that, the front-back relative position of the first rocking handle 152-1 and the second rocking handle 152-2 on the revolving track of the hanging rod 10 is exchanged once when passing through one turning track section 162, so that the front-back relative position is alternately changed once when the first rocking handle 152-1 and the second rocking handle 152-2 are deflected by 180 degrees each time through the swinging arm 151.

Thus, the turret rotates in the cavity, which brings the clamp 13 on each hanging rod 10 of the turret and the product 2 loaded thereon to revolve. Taking the example of providing a turning track segment 162, each product 2 on the turret is rapidly turned over one time each time the turret rotates one revolution. Wherein the speed of one turn (in time) is inversely proportional to the length of the turning track segment 162.

Also, the length setting of the turning track segment 162, and the size setting of the included angle between the first turning track segment 1621 and the second turning track segment 1622, are related to the distance from the crank 152 to the center of the swing arm 151.

Refer to fig. 14. The position matching can be performed by adopting several inserts 23, and by using the side profile of the inserts 23, a detachable split-type track, including the split-type structure of the turning track section 162, the guide structure 17 and the outer lateral limiting track 22, is formed on the disc 21, so as to be used in the early stage test, and after the matching effect between all the parts is confirmed, the integrated-type track shown in fig. 5 is processed and used.

The invention has the advantages that the operation of the rotating frame is stable, the rotating speed of the rotating frame can be set according to the process requirements, and the product turnover control at preset time intervals can be realized by matching the number of the turning track sections 162 arranged on the inner side limiting track 16, so that the deposition rate on each surface of the product can be effectively controlled, and the film quality is improved.

The whole rotating frame does not need to be matched with gears, so that the cost can be reduced, the clamping abrasion of the rotating frame can be reduced, and the rotating frame is suitable for wide popularization.

It should be understood by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be used as a limitation of the present invention, and that the changes and modifications of the above embodiments are within the scope of the claims of the present invention as long as they are within the spirit and scope of the present invention.

Claims

1. A coating turret, comprising:

a frame body;

the lower end of the product hanging rod is rotatably arranged on the bottom surface of the frame body;

the swing arm is orthogonally and fixedly arranged on the lower end of the hanging rod, and a pair of longitudinal rocking handles is respectively arranged at two ends of the swing arm;

when the hanging rod revolves along with the rack body, the two rocking handles are kept on the front side and the rear side of the lower end of the hanging rod respectively through the lateral blocking formed by the arc track section on the two rocking handles, so that the hanging rod is limited to rotate.

2. The coating turret according to claim 1, wherein the peg rotation control mechanism comprises a disc disposed along an inner side of the orbital path of the peg, the inner side limiting track is disposed on a circumferential side of the disc, the circumferential side of the disc has a peak-shaped notch, the turning track section is disposed on a side of the notch, and the circular arc track section is disposed on a circumferential side of the disc outside the notch.

3. The coating film rotating stand according to claim 1, wherein the hanging rod rotation control mechanism further comprises a guide rail section, the guide rail section is arranged outside the turning rail section and is used for guiding the rocking handle positioned at the front side to the turning rail section, the turning rail section comprises a first turning rail section and a second turning rail section which are connected, the guide rail section comprises a first guide rail section which is arranged to face the first turning rail section, and a second guide rail section which is connected with the first guide rail section and is arranged to face the second turning rail section.

4. The coating turret according to claim 3, wherein the peg rotation control mechanism further comprises an outer lateral limiting track disposed outside the guiding track segment for limiting a swing path of the other rocking handle located at the rear side after being separated from the inner lateral limiting track.

5. The coating turret of claim 4, wherein the first turning track segment, the second turning track segment, the first guide track segment, and the second guide track segment comprise straight track segments and the outer lateral limiting track comprises a circular arc outer lateral limiting track segment.

6. The coating turret of claim 3, wherein the angle between the first turning track section and the second turning track section is obtuse.

7. The coating revolving rack of claim 3, wherein an inwardly concave third turning track section is provided between the first turning track section and the second turning track section, and the guiding track section is further configured to guide the crank handle located at the front side to the third turning track section so as to cause relative rotation between the crank handle and the third turning track section.

8. The coating turret of claim 1 wherein the rocking handle is sleeved with rollers.

9. The coating turret of claim 1, wherein the frame includes an upper plate, a lower plate, and a support rod connected between the upper plate and the lower plate, and the hanging rod is disposed between the upper plate and the lower plate and forms a rotational fit with both the upper plate and the lower plate.

10. The coating turret according to claim 1, wherein one or more turning track segments are provided on the inner lateral limiting track.